JPH10144620A5 - - Google Patents

Info

Publication number
JPH10144620A5
JPH10144620A5 JP1996311321A JP31132196A JPH10144620A5 JP H10144620 A5 JPH10144620 A5 JP H10144620A5 JP 1996311321 A JP1996311321 A JP 1996311321A JP 31132196 A JP31132196 A JP 31132196A JP H10144620 A5 JPH10144620 A5 JP H10144620A5
Authority
JP
Japan
Prior art keywords
laser
wavelength
linear beam
laser light
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1996311321A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10144620A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8311321A priority Critical patent/JPH10144620A/ja
Priority claimed from JP8311321A external-priority patent/JPH10144620A/ja
Publication of JPH10144620A publication Critical patent/JPH10144620A/ja
Publication of JPH10144620A5 publication Critical patent/JPH10144620A5/ja
Withdrawn legal-status Critical Current

Links

JP8311321A 1996-11-07 1996-11-07 レーザー照射システムおよびその応用方法 Withdrawn JPH10144620A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8311321A JPH10144620A (ja) 1996-11-07 1996-11-07 レーザー照射システムおよびその応用方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8311321A JPH10144620A (ja) 1996-11-07 1996-11-07 レーザー照射システムおよびその応用方法

Publications (2)

Publication Number Publication Date
JPH10144620A JPH10144620A (ja) 1998-05-29
JPH10144620A5 true JPH10144620A5 (cg-RX-API-DMAC10.html) 2004-11-04

Family

ID=18015736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8311321A Withdrawn JPH10144620A (ja) 1996-11-07 1996-11-07 レーザー照射システムおよびその応用方法

Country Status (1)

Country Link
JP (1) JPH10144620A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6977775B2 (en) 2002-05-17 2005-12-20 Sharp Kabushiki Kaisha Method and apparatus for crystallizing semiconductor with laser beams

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2923016B2 (ja) * 1990-09-17 1999-07-26 株式会社日立製作所 薄膜半導体の製造方法及びその装置
JPH06163406A (ja) * 1992-11-17 1994-06-10 Ricoh Co Ltd 光源装置並びにそれを用いた材料製造装置および材料製造方法
JP3054310B2 (ja) * 1994-03-09 2000-06-19 株式会社半導体エネルギー研究所 半導体デバイスのレーザー処理方法
JPH0883765A (ja) * 1994-07-14 1996-03-26 Sanyo Electric Co Ltd 多結晶半導体膜の製造方法

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