JPH10142241A5 - - Google Patents

Info

Publication number
JPH10142241A5
JPH10142241A5 JP1996298872A JP29887296A JPH10142241A5 JP H10142241 A5 JPH10142241 A5 JP H10142241A5 JP 1996298872 A JP1996298872 A JP 1996298872A JP 29887296 A JP29887296 A JP 29887296A JP H10142241 A5 JPH10142241 A5 JP H10142241A5
Authority
JP
Japan
Prior art keywords
cantilever
wafer
vibration
detection means
fixed end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996298872A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10142241A (ja
JP3670777B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP29887296A priority Critical patent/JP3670777B2/ja
Priority claimed from JP29887296A external-priority patent/JP3670777B2/ja
Publication of JPH10142241A publication Critical patent/JPH10142241A/ja
Publication of JPH10142241A5 publication Critical patent/JPH10142241A5/ja
Application granted granted Critical
Publication of JP3670777B2 publication Critical patent/JP3670777B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29887296A 1996-11-11 1996-11-11 カンチレバーの評価装置 Expired - Fee Related JP3670777B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29887296A JP3670777B2 (ja) 1996-11-11 1996-11-11 カンチレバーの評価装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29887296A JP3670777B2 (ja) 1996-11-11 1996-11-11 カンチレバーの評価装置

Publications (3)

Publication Number Publication Date
JPH10142241A JPH10142241A (ja) 1998-05-29
JPH10142241A5 true JPH10142241A5 (enrdf_load_stackoverflow) 2004-10-07
JP3670777B2 JP3670777B2 (ja) 2005-07-13

Family

ID=17865285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29887296A Expired - Fee Related JP3670777B2 (ja) 1996-11-11 1996-11-11 カンチレバーの評価装置

Country Status (1)

Country Link
JP (1) JP3670777B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001183257A (ja) * 1999-12-28 2001-07-06 Mitsutoyo Corp プローブの検査方法及び装置
JP2005049219A (ja) * 2003-07-29 2005-02-24 Toudai Tlo Ltd 走査型プローブ顕微鏡
JP4485571B2 (ja) * 2005-03-02 2010-06-23 独立行政法人科学技術振興機構 ヘテロダインレーザドップラープローブ及びそれを用いた測定システム
JP5004223B2 (ja) * 2007-06-27 2012-08-22 国立大学法人長岡技術科学大学 振動測定装置及び振動測定方法

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