JPH10101406A - Alumina-based sintering material and magnetodielectric resonator using the supporting bed using the same - Google Patents

Alumina-based sintering material and magnetodielectric resonator using the supporting bed using the same

Info

Publication number
JPH10101406A
JPH10101406A JP9219909A JP21990997A JPH10101406A JP H10101406 A JPH10101406 A JP H10101406A JP 9219909 A JP9219909 A JP 9219909A JP 21990997 A JP21990997 A JP 21990997A JP H10101406 A JPH10101406 A JP H10101406A
Authority
JP
Japan
Prior art keywords
weight
alumina
cao
mgo
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9219909A
Other languages
Japanese (ja)
Other versions
JP2981192B2 (en
Inventor
Kenichi Mizuno
賢一 水野
Sadahiro Yamamoto
禎広 山元
Toru Shimamori
融 島森
Kazuhisa Itakura
一久 板倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
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Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP9219909A priority Critical patent/JP2981192B2/en
Publication of JPH10101406A publication Critical patent/JPH10101406A/en
Application granted granted Critical
Publication of JP2981192B2 publication Critical patent/JP2981192B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain an alumina-based firing material which can give a supporting bed having a high non-load Q value and excellent thermal conductivity by setting the contents of the components for alumina base used for a supporting bed of a specific structure. SOLUTION: Two kinds of Al2 O3 powders (of >=99.9% and >=99.99%), MgO as a sintering aid, CaCO3 to be converted to CaO and SiO2 (the purity of both components are >=99.9% are weighed in amounts of <=1.0wt.% of MgO (except 0%), 0.02-1.0wt.% of CaO and 0.1-1.0wt.% of SiO2 based on 100wt.% as the total of Al2 O3 +MgO+CaO+SiO2 (where Al2 O3 is 99.2-99.8wt.% and the case that SiO2 is 40-60wt.% based on 100wt.% of MgO+CaO+SiO2 in total is excluded) and they are formulated. An organic binder and water are added to this mixture, ground and granuled, molded and fired in the air atmosphere at 1,550-1,625 deg.C for 2 hours.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、アルミナ基焼結材
料及び共振器本体が、このアルミナ基焼結材料を焼成し
てなる支持台を介して金属容器の内面に固定された磁器
誘電体共振器に関する。更に詳しくいえば、特に無負荷
Q値(以下、単にQu という。)が高く、更には熱伝導
性に優れた支持台を得ることができるアルミナ基焼結材
料及び同様に高いQu を有する磁器誘電体共振器に関す
る。
The present invention relates to a ceramic dielectric resonator in which an alumina-based sintered material and a resonator main body are fixed to the inner surface of a metal container via a supporting base formed by firing the alumina-based sintered material. About the vessel. More specifically, it has an alumina-based sintered material having a high unloaded Q value (hereinafter simply referred to as " Qu ") and a high support having excellent thermal conductivity, and a similarly high Qu . The present invention relates to a porcelain dielectric resonator.

【0002】[0002]

【従来の技術】マイクロ波領域における高周波特性に優
れた誘電体が開発され、この誘電体を用いた共振器が利
用されている。しかし、誘電特性に優れた材料を使用し
た共振器であっても、この共振器本体を用いた磁器誘電
体共振器の作製方法或いはその構造等によっては、誘電
体材料本来の優れた性能が十分に生かされず、却って誘
電特性が低下することもある。
2. Description of the Related Art A dielectric having excellent high-frequency characteristics in a microwave region has been developed, and a resonator using the dielectric has been used. However, even in the case of a resonator using a material having excellent dielectric properties, the original excellent performance of the dielectric material may not be sufficient depending on the method of manufacturing a ceramic dielectric resonator using the resonator body or its structure. In some cases, the dielectric properties are degraded.

【0003】例えば、現在、広く用いられている共振器
本体を支持台を介して金属製の容器内に固定した磁器誘
電体共振器にあっては、支持台の誘電特性、共振器本体
を支持台に接合するためのグレージング材、接着剤等の
種類及びその厚さなどによっては、支持台、金属容器な
どを含めた磁器誘電体共振器全体のQu が低下するとの
問題がある。また、高純度(99.99%以上)のアル
ミナを用いた焼結材料が特に高いQu を有することは知
られている。しかし、この高純度のアルミナを得るため
には高価な高純度のアルミナ原料を必要とする他、焼結
材料の成形、焼成等において生産性が低いとの問題があ
る。
For example, in a ceramic dielectric resonator in which a resonator body which is widely used at present is fixed in a metal container via a support, the dielectric characteristics of the support and the support of the resonator body Depending on the type and thickness of the glazing material, adhesive and the like for joining to the table, there is a problem that the Qu of the entire porcelain dielectric resonator including the support table, the metal container and the like is reduced. Moreover, sintered materials using alumina of high purity (99.99%) is known to have a particularly high Q u. However, in order to obtain this high-purity alumina, an expensive high-purity alumina raw material is required, and there is a problem that productivity is low in molding and firing of a sintered material.

【0004】[0004]

【発明が解決しようとする課題】本発明は、上記問題を
解決するものであり、Qu が高く、更には熱伝導性に優
れた支持台を得ることができるアルミナ基焼結材料及び
このQu の高い支持台を介して共振器本体を金属容器の
内面に固定した、同様にQu の高い磁器誘電体共振器を
提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an alumina-based sintered material capable of obtaining a support having a high Q u and further having excellent thermal conductivity, and a Q-alumina. the resonator body is fixed to the inner surface of the metal container via a high support base of u, and an object thereof is to provide a high porcelain dielectric resonators Similarly Q u.

【0005】[0005]

【課題を解決するための手段】第1発明のアルミナ基焼
結材料は、一端が共振器本体に接合され、他端が金属容
器の内面に固定された支持台の形成に用いられるアルミ
ナ基焼結材料において、該焼結材料は、Al2 3 、M
gO、CaO及びSiO2 の合計量を100重量%とし
た場合に、1.0重量%以下のMgO、0.02〜1.
0重量%のCaO及び0.1〜1.0重量%のSiO2
を含有することを特徴とする。
The alumina-based sintered material according to the first invention has an alumina-based sintered material used for forming a support having one end joined to the resonator body and the other end fixed to the inner surface of the metal container. In the sintering material, the sintered material is Al 2 O 3 , M
Assuming that the total amount of gO, CaO and SiO 2 is 100% by weight, 1.0% by weight or less of MgO, 0.02-1.
0% by weight of CaO and 0.1 to 1.0 wt% of SiO 2
It is characterized by containing.

【0006】また、第6発明の磁器誘電体共振器は、共
振器本体が、アルミナ基焼結材料を焼成してなる支持台
を介して金属容器の内面に固定された磁器誘電体共振器
において、上記アルミナ基焼結材料は、Al2 3 、M
gO、CaO及びSiO2 の合計量を100重量%とし
た場合に、1.0重量%以下のMgO、0.02〜1.
0重量%のCaO及び0.1〜1.0重量%のSiO2
を含有することを特徴とする。尚、前記の通り、第1及
び第6発明において、Al2 3 とSiO2 の量比がと
もに特定の範囲内にある場合を除く。
In a porcelain dielectric resonator according to a sixth aspect of the present invention, there is provided a porcelain dielectric resonator in which a resonator main body is fixed to an inner surface of a metal container via a supporting base formed by firing an alumina-based sintered material. , The alumina-based sintered material is Al 2 O 3 , M
Assuming that the total amount of gO, CaO and SiO 2 is 100% by weight, 1.0% by weight or less of MgO, 0.02-1.
0% by weight of CaO and 0.1 to 1.0 wt% of SiO 2
It is characterized by containing. Note that, as described above, in the first and sixth aspects of the present invention, the case where both the ratios of Al 2 O 3 and SiO 2 are within a specific range is excluded.

【0007】誘電損失が小さく、Qu の高い「支持台」
及び「磁器誘電体共振器」とするためには、上記「アル
ミナ基焼結材料」は「Al2 3 」の他、一定量の「M
gO」、「CaO」及び「SiO2 」を含有していなけ
ればならない。MgOを含有していない場合、及びCa
Oが0.02重量%未満又はSiO2 が0.1重量%未
満である場合は、誘電損失が大きくなり、Qu が低下す
る。一方、MgO、CaO、SiO2 がそれぞれ1.0
重量%を越える場合も、同様に誘電特性が低下する。ま
た、Al2 3 の含有量は98.0重量%以上であるこ
とが好ましく、Al2 3 の量比がこのように高けれ
ば、相対的に助剤成分の割合が低くなり、支持台の耐久
性が低下することがない。
[0007] "Support" with low dielectric loss and high Qu
In order to obtain a "porous ceramic dielectric resonator", the above-mentioned "alumina-based sintered material" includes "Al 2 O 3 " and a certain amount of "M
gO ", must contain the" CaO "and" SiO 2 ". When MgO is not contained and Ca
If O is less than 0.02% by weight or SiO 2 is less than 0.1% by weight, the dielectric loss increases and the Qu decreases. On the other hand, MgO, CaO, SiO 2, respectively 1.0
When the amount is more than the weight percentage, the dielectric properties are similarly reduced. Further, the content of Al 2 O 3 is preferably 98.0% by weight or more. If the amount ratio of Al 2 O 3 is so high, the ratio of the auxiliary component becomes relatively low, and Does not decrease in durability.

【0008】尚、本発明のアルミナ基焼結材料において
は、第2発明のように、Al2 3の含有量を「99.
5〜99.8重量%」とすることが好ましい。このよう
にAl2 3 の量比を高くすればQu の大きい支持台及
び磁器誘電体共振器を得ることができる。また、第3発
明のように、MgOは「0.01〜0.5重量%」、C
aOは「0.02〜0.5重量%」及び「SiO2
0.1〜0.6重量%」であることが好ましい。この範
囲のMgO、CaO及びSiO2 を含有するアルミナ基
焼結材料を使用することによっても、より誘電損失が小
さく、Qu の高い支持台等を得ることができる。更に、
Al2 3 の量比を第2発明のように高くし、且つMg
O、CaO及びSiO2 の含有量を第4発明において特
定される重量分率とすることによっても、よりQu を高
くすることができ、且つ熱伝導率を向上させることもで
きる。
In the alumina-based sintered material of the present invention, as in the second invention, the content of Al 2 O 3 is set to “99.
5 to 99.8% by weight ". Thus it is possible to obtain a large support base and porcelain dielectric resonator Q u if higher ratio of Al 2 O 3. Further, as in the third invention, MgO is "0.01 to 0.5% by weight", C
It is preferred aO is "0.02 to 0.5% by weight" and "SiO 2 is 0.1 to 0.6% by weight". MgO in this range, by the use of alumina-based sintered material containing CaO and SiO 2, more dielectric loss is small, it is possible to obtain a high Q u support base or the like. Furthermore,
The amount ratio of Al 2 O 3 is increased as in the second invention, and
O, also by the weight fraction to be specified in the content of CaO and SiO 2 fourth invention, it is possible to increase the more Q u, can also be and improve the thermal conductivity.

【0009】また、支持台は共振器本体が発生する熱を
固定部から金属容器へと逃がす役目もあるため、熱伝導
性に優れたものでなければならない。支持台の熱伝導率
はAl2 3 の含有量が多いほど、また組織の粒成長が
進んでいるほど高くなる傾向にある。この熱伝導率は、
支持台のAl2 3 の含有量が98.0重量%未満では
28W/mKよりも低くなってしまい、共振器本体が発
生する熱が十分に放熱されず、共振器本体の温度が10
0℃以上の高温になってしまうこともある。
Further, since the support has a function of releasing heat generated by the resonator main body from the fixed portion to the metal container, the support must be excellent in heat conductivity. The thermal conductivity of the support tends to increase as the content of Al 2 O 3 increases and as the grain growth of the structure progresses. This thermal conductivity is
If the Al 2 O 3 content of the support is less than 98.0% by weight, it will be lower than 28 W / mK, and the heat generated by the resonator main body will not be sufficiently dissipated.
The temperature may be as high as 0 ° C. or more.

【0010】尚、Al2 3 の量比を第2発明のように
高くし、MgO、CaO及びSiO2 を第4発明におい
て特定される重量分率とし、且つ気孔率を第5発明のよ
うに、「5%以下」とすれば、Qu が5000以上であ
り、熱伝導率が30W/mK以上であって、優れた性能
の支持台及び磁器誘電体共振器を得ることができる。上
記の気孔率は特に4%以下、更には2%以下とすること
が好ましく、このように緻密な焼結体とすることによ
り、Qu を6000以上、特に7000〜7500程度
にまで高めることができる。
The amount ratio of Al 2 O 3 is increased as in the second invention, MgO, CaO and SiO 2 are set to the weight fraction specified in the fourth invention, and the porosity is changed as in the fifth invention. to, if "5%", Q u is not less 5000 or more, the thermal conductivity is not more 30 W / mK or more, it is possible to obtain the support table and the porcelain dielectric resonator with excellent performance. Porosity of the particular 4% or less, more preferably 2% or less, with the above dense sintered body, a Q u 6000 or more, in particular increased to about 7,000 to 7,500 it can.

【0011】共振器本体を支持台に接合する方法は特に
制限されない。例えばペースト状のグレージング材を共
振器本体と支持台との間に介在させ、800℃程度の温
度で熱処理することによって、グレージング材に含まれ
るガラス成分を溶融させ、その後、冷却することによっ
て固化させ、共振器本体と支持台とを接合する方法が挙
げられる。また、エポキシ系、シアノアクリレート系な
どの有機系接着剤を用いることもできる。但し、これら
グレージング材及び接着剤の中には、磁器誘電体共振器
のQu を低下させるものもあり、所要の接合強度を得る
に要する以上の厚さとすることは好ましくない。
The method of joining the resonator body to the support is not particularly limited. For example, a paste-like glazing material is interposed between the resonator body and the support, and heat-treated at a temperature of about 800 ° C. to melt the glass component contained in the glazing material, and then solidify by cooling. And a method of joining the resonator body and the support base. Also, an organic adhesive such as an epoxy-based or cyanoacrylate-based adhesive can be used. However, some of these glazing and the adhesive, some of them reduce the Q u porcelain dielectric resonator, it is not preferable to the above thickness required of obtaining required bonding strength.

【0012】上記のようにして一方の端面に共振器本体
が接合された支持台の他の端面は、「金属容器」の「内
面」に固定される。この固定はPTTFによるものであ
ってもよいし、ハンダなどによって接合、固定する方法
であってもよい。また、ビス、ナットによって機械的に
固定することもできる。この金属容器は、通常、両端面
が密閉された円筒状容器であり、共振器本体が接合され
た支持台は、円筒状容器の一方の端面の内面の中心部に
固定される。これによって、共振器本体と支持台と金属
容器とが一体となった磁器誘電体共振器を得ることがで
きる。
The other end face of the support having the resonator body joined to one end face as described above is fixed to the "inner face" of the "metal container". This fixing may be performed by PTTF, or a method of bonding and fixing with solder or the like. Further, it can be mechanically fixed with screws and nuts. This metal container is usually a cylindrical container whose both end surfaces are sealed, and the support to which the resonator body is joined is fixed to the center of the inner surface of one end surface of the cylindrical container. Thus, a ceramic dielectric resonator in which the resonator main body, the support base, and the metal container are integrated can be obtained.

【0013】セラミックからなる磁器誘電体共振器で
は、本発明のように、共振器本体を支持台を介して金属
容器の内面に固定したものが多く、通常、共振器本体が
支持台及び金属容器と一体となった完成品が商品として
提供されている。このような磁器誘電体共振器では、共
振器本体の誘電特性が優れていても、支持台の誘電特
性、その他の要因によって、必ずしもQu の高い磁器誘
電体共振器が得られない場合もある。そのため、この支
持台を構成するセラミックとしてもQu の高いものを使
用する必要があり、それによって、第6発明のようにQ
u の高い磁器誘電体共振器を得ることができる。
Many ceramic dielectric resonators made of ceramic have a resonator body fixed to the inner surface of a metal container via a support, as in the present invention. Finished products that are integrated with are provided as products. In such a porcelain dielectric resonator, also have excellent dielectric properties of the resonator body, the dielectric properties of the support, other factors, not necessarily even if high Q u porcelain dielectric resonator can not be obtained . For this reason, it is necessary to use a ceramic having a high Q u as the ceramic constituting the support base.
A ceramic dielectric resonator having a high u can be obtained.

【0014】[0014]

【発明の実施の形態】以下、実施例により本発明を具体
的に説明する。 (1) 円柱状の試片の作製及びその評価 Al2 3 粉末〔純度:99.9%以上(比較例8及び
9を除く実施例及び比較例の場合)及び99.99%以
上(比較例8及び9の場合)の2種類〕と、焼結助剤で
あるMgO、CaOとなるCaCO3 及びSiO2 (純
度:いずれも99.9%以上)を、表1、表2、表3及
び表4に示す量比となるように秤量し、配合した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described specifically with reference to examples. (1) Preparation of cylindrical test piece and its evaluation Al 2 O 3 powder [Purity: 99.9% or more (Examples and Comparative Examples excluding Comparative Examples 8 and 9) and 99.99% or more (Comparative Examples 8 and 9), and the sintering aids MgO, CaCO 3 and SiO 2 (purity: 99.9% or more, both of which become CaO) are shown in Tables 1, 2, and 3. And weighed and blended so as to have the ratios shown in Table 4.

【0015】ここで、上記の純度99.9%のAl2
3 粉末としては、CaO;200ppm、SiO2 ;5
00ppmを含めて合計800ppm程度の不純物を含
有するものを用いた。尚、CaCO3 は酸化物となった
場合に表1、表2、表3及び表4に示す量比となる配合
量とし、またAl2 3 粉末中に含まれるCaO、Si
2 等の不純物については、これを含めて表1、表2、
表3及び表4の量比となるように調整した。
Here, the above-mentioned Al 2 O having a purity of 99.9% is used.
3 As powders, CaO; 200 ppm, SiO 2 ;
Those containing impurities of about 800 ppm in total including 00 ppm were used. In addition, when CaCO 3 becomes an oxide, it is used in an amount as shown in Table 1, Table 2, Table 3 and Table 4, and CaO, Si contained in the Al 2 O 3 powder is used.
For impurities such as O 2 , Table 1, Table 2,
The amounts were adjusted so as to have the ratios shown in Tables 3 and 4.

【0016】上記の各粉末の混合物に適量の有機バイン
ダと水とを加え、ボールミル中、20mmφのアルミナ
ボールを使用し、90rpmで、16時間粉砕した。そ
の後、スプレードライヤにより造粒した。この造粒され
た原料を用い、静水圧プレス法によって19mmφ(直
径)×11mmt(厚さ)の円柱状の成形体を得た。
尚、プレス圧は1000kg/cm2 とした。
An appropriate amount of an organic binder and water were added to the mixture of the above powders, and the mixture was ground in a ball mill using 90 mmφ alumina balls at 90 rpm for 16 hours. Then, it granulated by the spray dryer. Using this granulated raw material, a columnar compact of 19 mmφ (diameter) × 11 mmt (thickness) was obtained by isostatic pressing.
The pressing pressure was 1000 kg / cm 2 .

【0017】次いで、この成形体を大気雰囲気下、15
50〜1625℃の温度で、2時間保持して焼成した。
尚、比較例8、9については、上記の焼成条件では緻密
な焼結体が得られなかったため、室温から1500℃ま
でを48時間かけて昇温し、1500℃で2時間保持し
た後、500℃まで36時間かけて降温して焼成した。
その後、得られた焼結体の周面及び両端面を研磨し、約
16mmφ×8mmtの寸法の円柱状とした。
Next, the molded body is placed in an air atmosphere for 15 minutes.
It was calcined at a temperature of 50 to 1625 ° C. for 2 hours.
In Comparative Examples 8 and 9, since a dense sintered body was not obtained under the above firing conditions, the temperature was raised from room temperature to 1500 ° C. over 48 hours, and the temperature was maintained at 1500 ° C. for 2 hours. The temperature was lowered to 36 ° C. over 36 hours and calcined.
Thereafter, the peripheral surface and both end surfaces of the obtained sintered body were polished to obtain a columnar shape having a size of about 16 mmφ × 8 mmt.

【0018】上記の円柱状の焼結体を試料とし、平行導
体板型誘電体円柱共振器法(TE011 MODE)により
u を測定した。また、同時に誘電率(εr )を測定し
た。尚、Qu の測定時の共振周波数は8.7GHzとし
た。更に、同じ焼結体の熱伝導率をレーザーフラッシュ
法にて測定した。また、実施例12〜31についてはア
ルキメデス法によって焼結体の密度を測定し、下記の式
によって気孔率を求めた。 気孔率(%)=100−(実測した密度/理論密度)×
100 実施例の結果を表1、表2及び表3に、比較例の結果を
表4に示す。尚、表4において、*は第1発明の範囲外
であることを表す。
[0018] The cylindrical sintered body of the above the sample was measured Q u by the parallel conductive plate type dielectric cylindrical resonator method (TE 011 MODE). At the same time, the dielectric constant (ε r ) was measured. In addition, the resonant frequency at the time of measurement of Q u was set to 8.7GHz. Further, the thermal conductivity of the same sintered body was measured by a laser flash method. In Examples 12 to 31, the density of the sintered body was measured by the Archimedes method, and the porosity was determined by the following equation. Porosity (%) = 100− (measured density / theoretical density) ×
Tables 1, 2 and 3 show the results of the 100 Examples, and Table 4 shows the results of the Comparative Examples. In Table 4, * indicates that the value is outside the scope of the first invention.

【0019】[0019]

【表1】 [Table 1]

【0020】[0020]

【表2】 [Table 2]

【0021】[0021]

【表3】 [Table 3]

【0022】[0022]

【表4】 [Table 4]

【0023】表1の結果によれば、第1発明の範囲内で
ある実施例1〜11では、Qu の高い焼結体が得られて
いることが分かる。特に第3発明の範囲内である実施例
3〜4及び9〜11の焼結体は、より高いQu を有する
ものである。また、熱伝導性については、これら実施例
のようにAl2 3 の含有量が98.79重量%以上で
あれば、その熱伝導率は28W/mK以上となる。尚、
Al2 3 の量比が高くなるにつれて熱伝導率が高くな
る。更に、Al2 3 の量比が99.75重量%と高い
実施例9では、Qu が5000を越えて大きくなってい
ることが分かる。
According to the results in Table 1, in Examples 1 to 11 are within the scope of the first invention, it can be seen that high Q u sintered body is obtained. In particular the sintered bodies of Examples 3-4 and 9-11 within the scope of the third invention has a higher Q u. As for the thermal conductivity, when the content of Al 2 O 3 is 98.79% by weight or more as in these examples, the thermal conductivity becomes 28 W / mK or more. still,
As the amount ratio of Al 2 O 3 increases, the thermal conductivity increases. Furthermore, the Al 2 O 3 in an amount ratio of 99.75% and higher Example 9, it can be seen that the Q u becomes large beyond 5000.

【0024】また、表2及び表3の結果によれば、Al
2 3 の含有量が99.5〜99.8重量%であって、
MgO、CaO及びSiO2 の量比が第4発明の範囲内
にあり、且つ気孔率が4%以下、特に1.1〜1.5%
と緻密度の高い実施例12〜29の焼結体では、Qu
5010〜7450、熱伝導率が32〜34W/mK
と、非常に優れた性能を有していることが分かる。更
に、実施例27、30及び31は組成は同一であるが気
孔率が異なっており、気孔率が大きくなるにつれて、Q
u 及び熱伝導率が低下する傾向にあることが分かる。
尚、この実施例31の焼結体であっても、支持台或いは
磁器誘電体共振器として特に問題はなく、十分に実用に
供することができる。
Also, according to the results of Tables 2 and 3,
The content of 2 O 3 is 99.5 to 99.8% by weight,
The amount ratio of MgO, CaO and SiO 2 is within the range of the fourth invention, and the porosity is 4% or less, particularly 1.1 to 1.5%
And the sintered body of denseness high embodiment of twelve to twenty-nine, Q u is from 5010 to 7450, the thermal conductivity of 32~34W / mK
It can be seen that it has very excellent performance. Further, Examples 27, 30, and 31 have the same composition but different porosity, and as the porosity increases, Q
It can be seen that u and thermal conductivity tend to decrease.
The sintered body of Example 31 has no particular problem as a support or a ceramic dielectric resonator, and can be sufficiently put to practical use.

【0025】一方、表4の比較例1〜8及び10では全
般にQu が低い。特に、比較例6、7及び10のように
u が1000未満となる場合もあり、本発明のアルミ
ナ基焼結材料からなる焼結体のQu を大きく下回ってい
ることが分かる。また、比較例1、10のようにAl2
3 の含有量が98.0重量%未満である場合は、熱伝
導率も大きく低下することが分かる。
On the other hand, Q u is low in general in Comparative Examples 1 to 8 and 10 in Table 4. In particular, sometimes Q u as in Comparative Examples 6, 7 and 10 is less than 1000, it is seen that below the Q u of the sintered body of alumina-based sintered material of the present invention greatly. Also, as in Comparative Examples 1 and 10, Al 2
It can be seen that when the content of O 3 is less than 98.0% by weight, the thermal conductivity is also greatly reduced.

【0026】尚、純度99.99%以上の高純度アルミ
ナのみを用いた比較例9では、この試片によるQu は非
常に高く、多くの実施例のQu を上回っている。しか
し、この比較例9では、高純度アルミナの原料コストが
高く、成形時の成形体密度が低くプレス成形性に劣る。
また、焼成においても厳密な温度制御を必要とし、且つ
焼成に長時間を要した。更に、純度99.9%のアルミ
ナを用いた上記の各実施例における歩留りが80%以上
であったのに対し、この比較例9では40%以下と低い
歩留りであった。また、εr は焼結材料の組成によって
それほど大きな差異はなかった。
[0026] In Comparative Example 9 using only high-purity alumina of 99.99% pure, Q u is very high due to the specimen, is greater than the Q u of many embodiments. However, in Comparative Example 9, the raw material cost of the high-purity alumina was high, the density of the compact during molding was low, and the press moldability was poor.
Strict temperature control was also required in firing, and a long time was required for firing. Further, while the yield in each of the above examples using 99.9% pure alumina was 80% or more, the yield in Comparative Example 9 was as low as 40% or less. Further, ε r did not vary so much depending on the composition of the sintered material.

【0027】(2) 磁器誘電体共振器の作製及びその評価 表5に示す材質からなる支持台を上記(1) の場合と同様
の工程によって作製した。その後、BaO−TiO2
焼結体からなる共振器本体1を、この支持台2の一端に
エポキシ樹脂系接着剤を用いて接合した。次いで、一体
となった共振器本体1と支持台2とを、両端面が密閉さ
れた円筒状の金属容器3の内部に収容し、支持台2の他
端を、円筒状の金属容器3の底面3aの中央部に、PT
TFによって接合、固定した。4は固定部である。
(2) Fabrication and Evaluation of Porcelain Dielectric Resonator A support made of the material shown in Table 5 was fabricated by the same process as in the above (1). Thereafter, a resonator body 1 made of a BaO-TiO 2 sintered body was joined to one end of the support 2 using an epoxy resin adhesive. Next, the integrated resonator main body 1 and the support table 2 are housed inside a cylindrical metal container 3 whose both end surfaces are sealed, and the other end of the support table 2 is connected to the cylindrical metal container 3. PT at the center of the bottom surface 3a
Bonded and fixed by TF. 4 is a fixed part.

【0028】上記のようにして作製された磁器誘電体共
振器は、TE01δモードにおける共振周波数が0.9G
Hzになるように、図1における各部寸法を、それぞれ
D=160mmφ、L=130mm、d=57mmφ、
l=18mmに設定したものである。得られた磁器誘電
体共振器のQu の測定結果を表5に示す。尚、金属容器
材質はインバーである。
The porcelain dielectric resonator manufactured as described above has a resonance frequency in the TE 01 δ mode of 0.9 G.
1 are set to D = 160 mmφ, L = 130 mm, d = 57 mmφ,
1 is set to 18 mm. Measurement results of the Q u of the resulting ceramic dielectric resonator shown in Table 5. The material of the metal container is Invar.

【0029】[0029]

【表5】 [Table 5]

【0030】表5の結果によれば、試片によるQu が高
い焼結材料からなる支持台を用いた磁器誘電体共振器の
u がやはり高いという傾向があることが分かる。ま
た、表1の実施例4の焼結材料からなる支持台を用いた
場合は、比較例9の高純度アルミナを使用した場合と同
等の非常にQu の高い磁器誘電体共振器が得られること
も分かる。
According to [0030] Table 5 results, it can be seen that Q u porcelain dielectric resonator using the support table Q u by the specimen is made of high sintering material tends to still high. In the case of using a support base made of a sintered material of Example 4 in Table 1, when using high purity alumina of Comparative Example 9 the same very Q u high porcelain dielectric resonator can be obtained I understand that.

【0031】尚、本発明においては、前記の具体的な実
施例に示すものに限られず、目的、用途に応じて本発明
の範囲内で種々変更した実施の形態とすることができ
る。例えば焼成温度等の焼成条件などは種々選択するこ
とができる。また、MgO、CaOとなる原料としてM
gO、CaCO3 以外に、MgCO3 或いはMg、Ca
の過酸化物、水酸化物、硝酸塩等を用いることもでき
る。同様に他の酸化物についても、加熱により酸化物と
なる種々の化合物を用いることができる。
It should be noted that the present invention is not limited to the specific examples described above, but can be variously modified within the scope of the present invention according to the purpose and application. For example, various firing conditions such as a firing temperature can be selected. In addition, as a raw material for forming MgO and CaO, M
In addition to gO and CaCO 3 , MgCO 3 or Mg, Ca
Peroxides, hydroxides, nitrates and the like can also be used. Similarly, for other oxides, various compounds that can be converted into oxides by heating can be used.

【0032】[0032]

【発明の効果】第1発明のアルミナ基焼結材料では、A
2 3 に助剤成分として特定量のMgO、CaO及び
SiO2 を配合し、含有させることにより、共振器本体
を支持台を介して金属容器に固定してなる磁器誘電体共
振器において用いられる支持台として、高いQu を有す
るものが得られる。また、Al2 3 の含有量を第2発
明に特定される範囲とし、MgO、CaO及びSiO2
の含有量を第3発明に特定される範囲とすることによっ
て、よりQu の高い、且つ相対的にAl2 3 の量比が
高くなることによって熱伝導性にも優れた支持台とする
ことができる。更に、MgO等を第4発明に特定する範
囲とし、且つ気孔率を第5発明のように小さくすること
により、特に優れた性能の支持台を得ることができる。
尚、第6発明では、上記の特定のアルミナ基焼結材料を
焼成してなる支持台を用いることにより、Qu が高く、
且つ熱伝導性に優れた磁器誘電体共振器を得ることがで
きる。
According to the first invention, the alumina-based sintered material has
l certain amount of MgO as auxiliary components 2 O 3, mixed with CaO and SiO 2, by incorporating, with the porcelain dielectric resonator formed of a fixed to a metal container through the support base of the resonator body A support having a high Q u can be obtained. Further, the content of Al 2 O 3 is set in the range specified in the second invention, and MgO, CaO and SiO 2
Is within the range specified in the third invention, thereby providing a support having a higher Q u and a relatively high amount of Al 2 O 3 and also having excellent thermal conductivity. be able to. Furthermore, by setting MgO or the like to the range specified in the fourth invention and reducing the porosity as in the fifth invention, a support having particularly excellent performance can be obtained.
In the sixth invention, by using a support base formed by firing the specific alumina-based sintered material, Q u is high,
In addition, a porcelain dielectric resonator excellent in heat conductivity can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】第4発明におけるMgO、CaO及びSiO2
の重量分率を表すグラフである。
FIG. 1 shows MgO, CaO and SiO 2 according to a fourth invention.
3 is a graph showing the weight fraction of the sample.

【図2】本発明のアルミナ基焼結材料を焼成してなる支
持台によって、共振器本体を円筒状の金属容器の内表面
上に固定して得られる磁器誘電体共振器の縦断面図であ
る。
FIG. 2 is a longitudinal sectional view of a porcelain dielectric resonator obtained by fixing a resonator main body on an inner surface of a cylindrical metal container by a support made by firing the alumina-based sintered material of the present invention. is there.

【符号の説明】[Explanation of symbols]

1;磁器誘電体共振器、2;支持台、3;円筒状の金属
容器、31;金属容器の底面、4;固定部。
1; porcelain dielectric resonator; 2; support base; 3; cylindrical metal container; 31; bottom surface of metal container;

───────────────────────────────────────────────────── フロントページの続き (72)発明者 板倉 一久 愛知県名古屋市瑞穂区高辻町14番18号 日 本特殊陶業株式会社内 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Kazuhisa Itakura 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi, Aichi Japan

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 一端が共振器本体に接合され、他端が金
属容器の内面に固定された支持台の形成に用いられるア
ルミナ基焼結材料において、該焼結材料は、Al
2 3 、MgO、CaO及びSiO2 の合計量を100
重量%とした場合に、1.0重量%以下(0重量%は含
まない。)のMgO、0.02〜1.0重量%のCaO
及び0.1〜1.0重量%のSiO2 を含有することを
特徴とするアルミナ基焼結材料。(但し、上記Al2
3 が99.2〜99.8重量%であり、且つ上記Mg
O、上記CaO及び上記SiO2 の合計量を100重量
%とした場合に、該SiO2が40〜60重量%である
場合を除く。)
1. An alumina-based sintered material having one end joined to a resonator body and the other end used to form a support fixed to an inner surface of a metal container, wherein the sintered material is Al.
The total amount of 2 O 3 , MgO, CaO and SiO 2 is 100
1.0% by weight or less (not including 0% by weight) of MgO, 0.02 to 1.0% by weight of CaO
And an alumina-based sintered material containing 0.1 to 1.0% by weight of SiO 2 . (However, the above Al 2 O
3 is 99.2 to 99.8% by weight, and the Mg
When the total amount of O, the above CaO and the above SiO 2 is 100% by weight, the case where the amount of the SiO 2 is 40 to 60% by weight is excluded. )
【請求項2】 上記Al2 3 が99.5〜99.8重
量%である請求項1記載のアルミナ基焼結材料。
2. The alumina-based sintered material according to claim 1, wherein said Al 2 O 3 is 99.5 to 99.8% by weight.
【請求項3】 上記MgOは0.01〜0.5重量%、
上記CaOは0.02〜0.5重量%及び上記SiO2
は0.1〜0.6重量%である請求項1又は2記載のア
ルミナ基焼結材料。
3. The method according to claim 1, wherein the MgO is 0.01 to 0.5% by weight,
The CaO is 0.02 to 0.5% by weight and the SiO 2
The alumina-based sintered material according to claim 1 or 2, wherein the content is 0.1 to 0.6% by weight.
【請求項4】 上記MgO、上記CaO及び上記SiO
2 が、図1の3成分組成図中の、 によって囲まれる領域内の重量分率で含有されている請
求項1又は2記載のアルミナ基焼結材料。
4. The MgO, the CaO and the SiO
2 in the three-component composition diagram of FIG. 3. The alumina-based sintered material according to claim 1, wherein the alumina-based sintered material is contained at a weight fraction in a region surrounded by.
【請求項5】 焼成して得られる焼結体の気孔率が5%
以下である請求項1乃至4のいずれか1項に記載のアル
ミナ基焼結材料。
5. A sintered body obtained by firing has a porosity of 5%.
The alumina-based sintered material according to any one of claims 1 to 4, wherein:
【請求項6】 共振器本体が、アルミナ基焼結材料を焼
成してなる支持台を介して金属容器の内面に固定された
磁器誘電体共振器において、上記アルミナ基焼結材料
は、Al2 3 、MgO、CaO及びSiO2 の合計量
を100重量%とした場合に、1.0重量%以下(0重
量%は含まない。)のMgO、0.02〜1.0重量%
のCaO及び0.1〜1.0重量%のSiO2 を含有す
ることを特徴とする磁器誘電体共振器。(但し、上記A
2 3 が99.2〜99.8重量%であり、且つ上記
MgO、上記CaO及び上記SiO2 の合計量を100
重量%とした場合に、該SiO2が40〜60重量%で
ある場合を除く。)
6. A porcelain dielectric resonator in which a resonator main body is fixed to an inner surface of a metal container via a supporting base formed by firing an alumina-based sintered material, wherein the alumina-based sintered material is Al 2 When the total amount of O 3 , MgO, CaO and SiO 2 is 100% by weight, 1.0% by weight or less (0% by weight is not included) of MgO, 0.02 to 1.0% by weight.
Porcelain dielectric resonator, comprising 0.1% to 1.0% by weight of SiO 2 . (However, the above A
l 2 O 3 is 99.2 to 99.8% by weight, and the total amount of MgO, CaO and SiO 2 is 100
The case where the content of SiO 2 is 40 to 60% by weight is excluded. )
JP9219909A 1996-08-01 1997-07-30 Alumina-based sintered material and porcelain dielectric resonator using a support made of the material Expired - Fee Related JP2981192B2 (en)

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JP8-220361 1996-08-01
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101817546A (en) * 2010-03-23 2010-09-01 大连理工大学 Method for synthesizing spherical alkali-earth metal oxide homogenous phase mixed powder
JP2012180275A (en) * 2010-05-31 2012-09-20 Nishimura Togyo Kk Method for producing ceramic for heat-radiating members, ceramic for heat-radiating members, and solar cell module and led light-emitting module using the ceramic
JP2017079328A (en) * 2015-09-28 2017-04-27 京セラ株式会社 Substrate for mounting light-emitting element, circuit board for mounting light-emitting element, light-emitting element module, and method for manufacturing substrate for mounting light-emitting element
CN113149619A (en) * 2021-05-14 2021-07-23 景德镇陶瓷大学 High-strength low-dielectric-loss alumina ceramic substrate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101817546A (en) * 2010-03-23 2010-09-01 大连理工大学 Method for synthesizing spherical alkali-earth metal oxide homogenous phase mixed powder
JP2012180275A (en) * 2010-05-31 2012-09-20 Nishimura Togyo Kk Method for producing ceramic for heat-radiating members, ceramic for heat-radiating members, and solar cell module and led light-emitting module using the ceramic
US9108887B2 (en) 2010-05-31 2015-08-18 Nishimura Porcelain Co., Ltd. Method for producing ceramic for heat-radiating members, ceramic for heat-radiating members, and solar cell module and LED light-emitting module using said ceramic
JP2017079328A (en) * 2015-09-28 2017-04-27 京セラ株式会社 Substrate for mounting light-emitting element, circuit board for mounting light-emitting element, light-emitting element module, and method for manufacturing substrate for mounting light-emitting element
CN113149619A (en) * 2021-05-14 2021-07-23 景德镇陶瓷大学 High-strength low-dielectric-loss alumina ceramic substrate
CN113149619B (en) * 2021-05-14 2022-10-11 景德镇陶瓷大学 High-strength low-dielectric-loss alumina ceramic substrate

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