JPH0997922A - Light-emitting element - Google Patents
Light-emitting elementInfo
- Publication number
- JPH0997922A JPH0997922A JP25390195A JP25390195A JPH0997922A JP H0997922 A JPH0997922 A JP H0997922A JP 25390195 A JP25390195 A JP 25390195A JP 25390195 A JP25390195 A JP 25390195A JP H0997922 A JPH0997922 A JP H0997922A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- light emitting
- type
- emitting device
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Led Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、発光ダイオード等
の発光素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting device such as a light emitting diode.
【0002】[0002]
【従来の技術】最近、GaN、GaAlN、InGa
N、InAlGaN等の窒化ガリウム系半導体からなる
発光素子が、強度の強い青色等の短波長発光が可能であ
ることから、活発に研究開発されている。2. Description of the Related Art Recently, GaN, GaAlN, InGa
Light-emitting devices made of gallium nitride-based semiconductors such as N and InAlGaN have been actively researched and developed because they are capable of emitting intense blue light having a short wavelength.
【0003】しかしながら、一般に斯る窒化ガリウム系
半導体からなる発光素子では、サファイア等の絶縁性基
板が使用されている。However, in general, in a light emitting device made of such a gallium nitride-based semiconductor, an insulating substrate such as sapphire is used.
【0004】この絶縁性基板を用いた発光素子では、こ
の基板の裏面に一方の電極を設けた構造にすることが困
難であり、半導体層側(同一面側)にp型側、n型側電
極とも備えた構造が採用される。In the light emitting element using this insulating substrate, it is difficult to form a structure in which one electrode is provided on the back surface of this substrate, and the p-type side and the n-type side are located on the semiconductor layer side (same surface side). A structure equipped with electrodes is adopted.
【0005】斯る半導体層側に両電極を備える発光素子
としては、例えば特開平6−338632号(H01L
33/00)公報に記載されている。A light emitting device having both electrodes on the semiconductor layer side is disclosed in, for example, JP-A-6-338632 (H01L).
33/00).
【0006】図4は従来の発光ダイオードの概略上面図
(半導体層側)、図5は図4中一点鎖線A−Aに沿った
概略断面図である。FIG. 4 is a schematic top view (semiconductor layer side) of a conventional light emitting diode, and FIG. 5 is a schematic sectional view taken along the alternate long and short dash line AA in FIG.
【0007】図4及び図5中、101はサファイア基
板、102はn型GaN層、103はp型GaN層、1
04はn型GaN層102上に形成されたn型側電極、
105はp型GaN層103上に形成された透光性のp
型側電極、106はp型側電極105の隅部に形成され
たボンディング用パットである。In FIGS. 4 and 5, 101 is a sapphire substrate, 102 is an n-type GaN layer, 103 is a p-type GaN layer, 1
04 is an n-type side electrode formed on the n-type GaN layer 102,
Reference numeral 105 denotes a translucent p formed on the p-type GaN layer 103.
A mold side electrode 106 is a bonding pad formed at a corner of the p-type side electrode 105.
【0008】この発光ダイオードではp型側電極105
側から光取り出しが行われる。In this light emitting diode, the p-type side electrode 105
Light is extracted from the side.
【0009】[0009]
【発明が解決しようとする課題】しかしながら、上記発
光ダイオードは、n型側電極104がn型GaN層10
2の隅部にのみ存在するため、n型GaN層102全体
に電流が均一に流れない。However, in the above-mentioned light emitting diode, the n-type side electrode 104 has the n-type GaN layer 10.
Since it exists only in the two corners, the current does not flow uniformly throughout the n-type GaN layer 102.
【0010】この結果、従来の発光ダイオードでは、発
光領域が狭く、また電流集中に起因した素子の劣化が起
こる等の恐れがあった。As a result, in the conventional light emitting diode, the light emitting region is narrow, and there is a possibility that the element may deteriorate due to current concentration.
【0011】本発明は上述の問題点を鑑み成されたもの
であり、発光領域の大きい半導体層側にp型側、n型側
電極を備える発光素子を提供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a light emitting device having a p-type side electrode and an n-type side electrode on the semiconductor layer side having a large light emitting region.
【0012】[0012]
【課題を解決するための手段】本発明の発光素子は、基
板と、該基板上に複数の半導体層が成長されてなると共
に、該半導体層側に第1導電型側用の第1の電極と第2
導電型側用の第2の電極とを備えてなる発光素子におい
て、上記第2の電極は上記第1の電極領域の少なくとも
一部を周設していることを特徴とする。A light emitting device of the present invention comprises a substrate, a plurality of semiconductor layers grown on the substrate, and a first electrode for the first conductivity type on the semiconductor layer side. And the second
In a light emitting device including a second electrode for the conductivity type side, the second electrode is provided so as to surround at least a part of the first electrode region.
【0013】特に、上記第2の電極は上記複数の半導体
層の第2導電型の最上層上に位置し、上記第1の電極は
上記最上層の周囲に位置する複数の半導体層のうちの第
1導電型の半導体層上に位置することを特徴とする。
尚、第1の電極領域は最上層上の略全域であるのが好ま
しい。In particular, the second electrode is located on the uppermost layer of the second conductivity type of the plurality of semiconductor layers, and the first electrode is one of the plurality of semiconductor layers located around the uppermost layer. It is characterized in that it is located on the semiconductor layer of the first conductivity type.
In addition, it is preferable that the first electrode region is substantially the entire region on the uppermost layer.
【0014】更に、上記第2の電極は上記第1の電極領
域の略半分以上を周設することを特徴とする。Further, the second electrode is characterized in that it surrounds approximately half or more of the first electrode region.
【0015】また、上記第1の電極は透光性の金属電極
からなることを特徴とする。Further, the first electrode is made of a translucent metal electrode.
【0016】特に、上記第1の電極は線状の金属電極か
らなることを特徴とする。In particular, the first electrode is composed of a linear metal electrode.
【0017】また、上記第1の電極は透光性を有する厚
みに設定されていることを特徴とする。Further, the first electrode is characterized in that it is set to a thickness having a light transmitting property.
【0018】加えて、上記第1の電極はその隅部でワイ
ヤーボンディングされると共に、上記第2の電極は上記
隅部とは略対角線上の該第2の電極の略中心でワイヤー
ボンディングされることを特徴とする。In addition, the first electrode is wire-bonded at the corner thereof, and the second electrode is wire-bonded at substantially the center of the second electrode on a substantially diagonal line from the corner. It is characterized by
【0019】更に、上記第2の電極は上記第1の電極の
ボンディング部から等距離となる形状配置にしたことを
特徴とする。Further, it is characterized in that the second electrode is arranged in a shape such that it is equidistant from the bonding portion of the first electrode.
【0020】特に、上記第2の電極は上記第1の電極領
域の略半分を周設することを特徴とする。In particular, the second electrode is characterized in that it surrounds approximately half of the first electrode region.
【0021】[0021]
【発明の実施の形態】本発明の実施の一形態に係る発光
ダイオードを図面を用いて説明する。図1、図2はそれ
ぞれこの発光ダイオードの概略上面図(半導体層側)、
図1中の一点鎖線A−Aに沿った略断面図である。DETAILED DESCRIPTION OF THE INVENTION A light emitting diode according to an embodiment of the present invention will be described with reference to the drawings. 1 and 2 are schematic top views (semiconductor layer side) of the light emitting diode,
FIG. 2 is a schematic cross-sectional view taken along one-dot chain line AA in FIG. 1.
【0022】図1及び図2において、サファイア等の絶
縁性基板1上には、層厚3μmのn型GaN層2、層厚
1μmのp型GaN層3がこの順序に積層されると共
に、p型層3の周囲がエッチング除去されてn型層2が
露出している。1 and 2, an n-type GaN layer 2 having a layer thickness of 3 μm and a p-type GaN layer 3 having a layer thickness of 1 μm are laminated in this order on an insulating substrate 1 such as sapphire, and p The periphery of the mold layer 3 is removed by etching to expose the n-type layer 2.
【0023】上記p型GaN層(最上層)3上の略全域
には、膜厚100ÅのNiからなる透光性の略正方形状
p型側電極(第1の電極)4が形成されており、その端
部に膜厚1μmのAuからなるボンディング用パット5
が形成されている。A light-transmitting substantially square p-type side electrode (first electrode) 4 made of Ni and having a film thickness of 100 Å is formed on substantially the entire area of the p-type GaN layer (uppermost layer) 3. , A bonding pad 5 made of Au having a film thickness of 1 μm at its end
Are formed.
【0024】上記n型層2の上記露出面上には、ボンデ
ィング用パット5に対向するように略矩形状p型側電極
4の電極領域の周囲に、L字状部(該領域の周囲の1つ
の対向する各辺側領域部)6aに形成されると共にその
略中心にボンディングパット部6bを有する層厚1μm
のAlからなるn型側電極(第2の電極)6が周設され
ている。On the exposed surface of the n-type layer 2, an L-shaped portion (around the area around the electrode area of the substantially rectangular p-type side electrode 4 facing the bonding pad 5) is formed. A layer thickness of 1 μm, which is formed in one opposing side area portion 6a and has a bonding pad portion 6b substantially in the center thereof.
An n-type side electrode (second electrode) 6 made of Al is provided around.
【0025】そして、図示しないが、ボンディング用パ
ット5、ボンディングパット部6bには図示しないAu
等からなるボンディング線がそれぞれボンディングされ
て、リードフレーム等に電気的に接続される。Although not shown, the bonding pad 5 and the bonding pad portion 6b are not shown in Au.
Bonding wires made of, etc. are respectively bonded and electrically connected to a lead frame or the like.
【0026】上記p型側電極4は、発光が透過するよう
に厚みが設定されることにより、発光に対して透光性を
有し、p型側電極4側が光取り出し側になる。The thickness of the p-type side electrode 4 is set so that the emitted light can be transmitted, so that the p-type side electrode 4 has a light-transmitting property with respect to the emitted light, and the p-type side electrode 4 side becomes the light extraction side.
【0027】上記p型側電極4はp型GaN層3上の略
全域に形成されることにより、p型側で電流が略均一に
流れるように構成されると共に、n型側電極6もp型側
電極4の領域の周囲を囲むようにL字状をなすことによ
り、n型側も電流がより均一に流れるように構成されて
いる。この結果、電流は発光領域(pn接合面)を含む
素子中を大面積で且つ略均一に流れるので、発光面積が
大きく、電流集中も略起こらない。The p-type side electrode 4 is formed over substantially the entire area of the p-type GaN layer 3 so that a current flows substantially uniformly on the p-type side, and the n-type side electrode 6 is also p-type. By forming an L shape so as to surround the area of the mold side electrode 4, the current is made to flow more uniformly on the n type side. As a result, the current flows in a large area and substantially uniformly in the element including the light emitting region (pn junction surface), so that the light emitting area is large and current concentration does not substantially occur.
【0028】しかも、本実施形態では、ボンディング用
パット5とボンディングパット部6bが素子の対角線上
の隅部に位置するので、素子中を流れる電流はより均一
になる。Moreover, in this embodiment, since the bonding pad 5 and the bonding pad portion 6b are located at the corners on the diagonal of the element, the current flowing through the element becomes more uniform.
【0029】本発明の他の実施の形態に係る発光ダイオ
ードを概略上面図(半導体層側)である図3を用いて説
明する。尚、p型側電極以外は上記実施の形態と同じで
あるので、その説明は割愛する。A light emitting diode according to another embodiment of the present invention will be described with reference to FIG. 3 which is a schematic top view (semiconductor layer side). Note that, except for the p-type side electrode, it is the same as in the above-mentioned embodiment, and therefore its explanation is omitted.
【0030】図3中、p型GaN層3上には、線状電極
部が略中心から放射状に延在してなる電極部13とその
一端部に一体に接続するボンディング用パット5からな
る膜厚0.1μmのNi膜と膜厚0.7μmのAu膜が
この順序で積層されてなるAu/Ni構造のp型側電極
(第1の電極)14が形成されている。In FIG. 3, on the p-type GaN layer 3, a film composed of an electrode portion 13 in which a linear electrode portion extends radially from substantially the center and a bonding pad 5 integrally connected to one end portion thereof. A p-type side electrode (first electrode) 14 having an Au / Ni structure is formed by stacking a Ni film having a thickness of 0.1 μm and an Au film having a thickness of 0.7 μm in this order.
【0031】n型層2の上記露出面上には、上記実施の
形態と同様にボンディング用パット5を望むように略正
方形状p型側電極14の電極領域(図中、点線内)15
の周囲に、L字状部(該領域の周囲の1つの対向する各
辺側領域部)6aに形成されると共にその略中心にボン
ディングパット部6bを有する層厚1μmのAlからな
るn型側電極6が周設されている。On the exposed surface of the n-type layer 2, the electrode region (in the dotted line in the figure) 15 of the substantially square p-type side electrode 14 is formed so that the bonding pad 5 is desired as in the above embodiment.
N-type side made of Al having a layer thickness of 1 μm, which is formed in an L-shaped portion (one side-side area portion around the area) 6a and has a bonding pad portion 6b in the approximate center thereof. The electrode 6 is provided around.
【0032】上記p型側電極14は、発光が透過するよ
うに線状の形状とすることにより、発光に対して透光性
を有し、p型側電極14側が光取り出し側になる。By forming the p-type side electrode 14 into a linear shape so that the emitted light can pass therethrough, it has a light-transmitting property with respect to the emitted light, and the p-type side electrode 14 side becomes the light extraction side.
【0033】上記p型側電極14はその電極領域15が
p型GaN層3上の略全域であることにより、p型側で
電流が略均一に流れるように構成されると共に、n型側
電極6もp型側電極14の電極領域15の周囲を囲むよ
うにL字状をなすことにより、n型側も電流がより均一
に流れるように構成されている。この結果、電流は発光
領域(pn接合面)を含む素子中を大面積で且つ略均一
に流れるので、発光面積が大きく、電流集中も略起こら
ない。Since the electrode region 15 of the p-type side electrode 14 is substantially the entire region on the p-type GaN layer 3, a current flows substantially uniformly on the p-type side and the n-type side electrode is formed. 6 is also L-shaped so as to surround the periphery of the electrode region 15 of the p-type side electrode 14, so that the current flows more evenly on the n-type side. As a result, the current flows in a large area and substantially uniformly in the element including the light emitting region (pn junction surface), so that the light emitting area is large and current concentration does not substantially occur.
【0034】しかも、本実施形態でも、ボンディング用
パット5とボンディングパット部6bが素子の対角線上
の隅部に位置するので、素子中を流れる電流はより均一
になる。Moreover, also in this embodiment, since the bonding pad 5 and the bonding pad portion 6b are located at the corners on the diagonal of the element, the current flowing through the element becomes more uniform.
【0035】加えて、本実施形態も上記実施形態と同じ
く、n型側電極6はp型側電極14のボンディング用パ
ット5から略等しい距離となるような形状配置を選択さ
れているので、更に電流は均一化する。In addition, in the present embodiment as well, as in the above-described embodiment, the n-type side electrode 6 is selected such that the n-type side electrode 6 has a substantially equal distance from the bonding pad 5 of the p-type side electrode 14, so that it is further selected. The current is made uniform.
【0036】尚、n型電極がp型側電極領域の略半分よ
り少なく周設するようにしても効果があるが、上記実施
形態のように略半分以上に周設する方が、電流の流れの
均一化が図れることが可能であるので好ましく、略全部
を周設するようにも適宜可能である。It should be noted that the n-type electrode is effective even if the n-type electrode is provided to be less than approximately half of the p-type side electrode region. It is preferable that the above can be made uniform, and it is also possible to provide substantially the entire circumference.
【0037】また、上述では、基板上にn型層、p型層
の順序で構成したが、基板上にp型層、n型層の順序で
構成するようにしてもよく、この場合、p型側、n型側
の構成は上述とは逆になる。In the above description, the n-type layer and the p-type layer are formed in this order on the substrate. However, the p-type layer and the n-type layer may be formed in this order on the substrate. The configurations on the mold side and the n-type side are opposite to the above.
【0038】勿論、上述では単一のpn接合からなる発
光ダイオードについて述べたが、ダブルヘテロ構造、更
には量子井戸構造の活性層を備えるダブルヘテロ構造で
もよい。Of course, the light emitting diode having a single pn junction has been described above, but a double hetero structure or a double hetero structure including an active layer having a quantum well structure may be used.
【0039】また、本発明は発光ダイオードに限らず、
面発光型レーザ等にも適宜適用できる。The present invention is not limited to light emitting diodes,
It is also applicable to surface-emitting lasers and the like.
【0040】[0040]
【発明の効果】本発明の発光素子は、基板と、該基板上
に複数の半導体層が成長されてなると共に、該半導体層
側に第1導電型側用の第1の電極と第2導電型側用の第
2の電極とを備えてなる発光素子において、上記第2の
電極は上記第1の電極領域の少なくとも一部を周設して
いるので、素子中を流れる電流が大面積で且つより均一
になる。The light emitting device of the present invention comprises a substrate, a plurality of semiconductor layers grown on the substrate, and the first conductive type first electrode and the second conductive type on the semiconductor layer side. In the light emitting device including the second electrode for the mold side, since the second electrode surrounds at least a part of the first electrode region, the current flowing through the device has a large area. And it becomes more uniform.
【0041】この結果、発光面積が大きく、且つ素子寿
命が長くなる。As a result, the light emitting area is large and the device life is long.
【0042】また、上記第2の電極が上記複数の半導体
層の第2導電型の最上層上に位置し、上記第1の電極が
上記最上層の周囲に位置する複数の半導体層のうちの第
1導電型の半導体層上に位置する場合、発光面積を大き
くすることが容易であると共に、ワイヤーボンディング
が同一面側にでき、ボンディングが簡単になる。The second electrode is located on the uppermost layer of the second conductivity type of the plurality of semiconductor layers, and the first electrode is among the plurality of semiconductor layers located around the uppermost layer. When it is located on the semiconductor layer of the first conductivity type, it is easy to increase the light emitting area, and wire bonding can be performed on the same surface side, which simplifies the bonding.
【0043】更に、上記第2の電極が上記第1の電極領
域の略半分以上を周設する場合、より素子中を流れる電
流が大面積で且つ均一になる。Further, when the second electrode surrounds approximately half or more of the first electrode region, the current flowing in the element becomes large in area and uniform.
【0044】加えて、上記第1の電極がその隅部でワイ
ヤーボンディングされると共に、上記第2の電極が上記
隅部とは略対角線上の該第2の電極の略中心でワイヤー
ボンディングされる場合、電流入出力口間の距離が大き
くなるので、更により素子中を流れる電流が大面積で且
つ均一になる。In addition, the first electrode is wire-bonded at the corner thereof, and the second electrode is wire-bonded at substantially the center of the second electrode on a diagonal line substantially diagonal to the corner. In this case, since the distance between the current input / output ports becomes large, the current flowing through the element becomes even larger in area and uniform.
【0045】更に、上記第2の電極が上記第1の電極の
ボンディング部から等距離となる形状配置にした場合、
電流の流れの均一化が顕著に行える。Further, when the second electrode is arranged in a shape such that it is equidistant from the bonding portion of the first electrode,
The flow of current can be remarkably made uniform.
【0046】特に、上記第2の電極が上記第1の電極領
域の略半分を周設するようにしても良好な効果が得られ
る。Particularly, good effects can be obtained even if the second electrode is provided so as to surround approximately half of the first electrode region.
【図1】本発明の一実施形態に係る発光ダイオードの概
略上面図である。FIG. 1 is a schematic top view of a light emitting diode according to an embodiment of the present invention.
【図2】上記一実施形態に係る発光ダイオードの概略断
面図である。FIG. 2 is a schematic cross-sectional view of a light emitting diode according to the above embodiment.
【図3】本発明の他の一実施形態に係る発光ダイオード
の概略上面図である。FIG. 3 is a schematic top view of a light emitting diode according to another embodiment of the present invention.
【図4】従来の発光ダイオードの概略上面図である。FIG. 4 is a schematic top view of a conventional light emitting diode.
【図5】上記従来の発光ダイオードの概略断面図であ
る。FIG. 5 is a schematic sectional view of the conventional light emitting diode.
1 基板 2 n型層 3 p型層 6 n型側電極 4、14 p型側電極 15 p型側電極領域 1 substrate 2 n-type layer 3 p-type layer 6 n-type side electrode 4, 14 p-type side electrode 15 p-type side electrode region
Claims (9)
長されてなると共に、該半導体層側である同一面側に第
1導電型側用の第1の電極と第2導電型側用の第2の電
極とを備えてなる発光素子において、上記第2の電極は
上記第1の電極領域の少なくとも一部を周設しているこ
とを特徴とする発光素子。1. A substrate, a plurality of semiconductor layers grown on the substrate, and a first electrode for the first conductivity type side and a second conductivity type side on the same surface side that is the semiconductor layer side. And a second electrode for use in the light emitting element, wherein the second electrode surrounds at least a part of the first electrode region.
うちの第2導電型の最上層上に位置し、上記第1の電極
は上記最上層の周囲に位置する複数の半導体層のうちの
第1導電型の半導体層上に位置することを特徴とする請
求項1記載の発光素子。2. The second electrode is located on the uppermost layer of the second conductivity type among the plurality of semiconductor layers, and the first electrode of the plurality of semiconductor layers located around the uppermost layer. The light emitting device according to claim 1, wherein the light emitting device is located on the first conductive type semiconductor layer.
略半分以上を周設することを特徴とする請求項1又は2
記載の発光素子。3. The method according to claim 1, wherein the second electrode is provided so as to surround substantially the half of the first electrode region.
The light-emitting element according to any one of the preceding claims.
なることを特徴とする請求項1、2、又は3記載の発光
素子。4. The light emitting device according to claim 1, wherein the first electrode is a translucent metal electrode.
ることを特徴とする請求項4記載の発光素子。5. The light emitting device according to claim 4, wherein the first electrode is a linear metal electrode.
設定されていることを特徴とする請求項4記載の発光素
子。6. The light emitting device according to claim 4, wherein the first electrode is set to have a light transmitting property.
ンディングされると共に、上記第2の電極は上記隅部と
は略対角線上の該第2の電極の略中心でワイヤーボンデ
ィングされることを特徴とする請求項1、2、3、4、
5、又は6記載の発光素子。7. The first electrode is wire-bonded at a corner thereof, and the second electrode is wire-bonded at a substantially center of the second electrode on a substantially diagonal line from the corner. Claims 1, 2, 3, 4,
5. The light emitting device according to 5 or 6.
ディング部から等距離となる形状配置にしたことを特徴
とする請求項1、2、3、4、5、6、又は7記載の発
光素子8. The configuration according to claim 1, 2, 3, 4, 5, 6, or 7, wherein the second electrode is arranged in a shape that is equidistant from the bonding portion of the first electrode. Light emitting element
略半分を周設することを特徴とする請求項1、2、3、
4、5、6、7、又は8記載の発光素子。9. The method according to claim 1, wherein the second electrode surrounds substantially half of the first electrode region.
The light emitting device according to 4, 5, 6, 7, or 8.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25390195A JP3960636B2 (en) | 1995-09-29 | 1995-09-29 | Light emitting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25390195A JP3960636B2 (en) | 1995-09-29 | 1995-09-29 | Light emitting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0997922A true JPH0997922A (en) | 1997-04-08 |
JP3960636B2 JP3960636B2 (en) | 2007-08-15 |
Family
ID=17257661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25390195A Expired - Lifetime JP3960636B2 (en) | 1995-09-29 | 1995-09-29 | Light emitting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3960636B2 (en) |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10275934A (en) * | 1997-03-28 | 1998-10-13 | Rohm Co Ltd | Semiconductor light-emitting element |
JPH11150300A (en) * | 1997-11-14 | 1999-06-02 | Nichia Chem Ind Ltd | Nitride semiconductor element |
JPH11224960A (en) * | 1997-11-19 | 1999-08-17 | Unisplay Sa | Led lamp and led chip |
JP2001237458A (en) * | 1999-12-22 | 2001-08-31 | Lumileds Lighting Us Llc | Manufacturing method for iii-nitride led with enhanced light generating capability |
WO2001073858A1 (en) * | 2000-03-31 | 2001-10-04 | Toyoda Gosei Co., Ltd. | Group-iii nitride compound semiconductor device |
US6307218B1 (en) | 1998-11-20 | 2001-10-23 | Lumileds Lighting, U.S., Llc | Electrode structures for light emitting devices |
JP2001345480A (en) * | 2000-03-31 | 2001-12-14 | Toyoda Gosei Co Ltd | Iii nitride compound semiconductor element |
JP2003110140A (en) * | 2001-09-28 | 2003-04-11 | Nichia Chem Ind Ltd | Nitride semiconductor light emitting element |
KR100419613B1 (en) * | 2000-09-04 | 2004-02-25 | 삼성전기주식회사 | Blue light emitting diode with electrode structure for distributing a current density |
KR100665120B1 (en) * | 2005-02-28 | 2007-01-09 | 삼성전기주식회사 | Vertical structure nitride semiconductor light emitting device |
JP2007035990A (en) * | 2005-07-28 | 2007-02-08 | Kyocera Corp | Gallium-nitride-based compound semiconductor light emitting element, and manufacturing method thereof |
US7183136B2 (en) | 2002-06-24 | 2007-02-27 | Toyoda Gosei Co., Ltd. | Semiconductor element and method for producing the same |
WO2007034834A1 (en) * | 2005-09-20 | 2007-03-29 | Showa Denko K.K. | Nitride semiconductor light-emitting device and method for manufacturing same |
JP2007088059A (en) * | 2005-09-20 | 2007-04-05 | Showa Denko Kk | Nitride based semiconductor light emitting element and its fabrication process |
JP2007088048A (en) * | 2005-09-20 | 2007-04-05 | Showa Denko Kk | Nitride based semiconductor light emitting element and its fabrication process |
KR100814464B1 (en) * | 2006-11-24 | 2008-03-17 | 삼성전기주식회사 | Nitride semiconductor light emitting device |
US7645689B2 (en) | 2005-01-19 | 2010-01-12 | Samsung Electro-Mechanics Co., Ltd. | Gallium nitride-based light emitting device having ESD protection capacity and method for manufacturing the same |
US7947998B2 (en) | 1997-11-19 | 2011-05-24 | Unisplay S.A. | LED lamps |
JP2012028749A (en) * | 2010-07-22 | 2012-02-09 | Seoul Opto Devices Co Ltd | Light-emitting diode |
JP2013062543A (en) * | 1999-12-01 | 2013-04-04 | Cree Inc | Scalable led with improved current spreading structures |
US8692268B2 (en) | 1997-11-19 | 2014-04-08 | Epistar Corporation | LED lamps |
-
1995
- 1995-09-29 JP JP25390195A patent/JP3960636B2/en not_active Expired - Lifetime
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10275934A (en) * | 1997-03-28 | 1998-10-13 | Rohm Co Ltd | Semiconductor light-emitting element |
JPH11150300A (en) * | 1997-11-14 | 1999-06-02 | Nichia Chem Ind Ltd | Nitride semiconductor element |
US8592856B2 (en) | 1997-11-19 | 2013-11-26 | Epistar Corporation | LED lamps |
JPH11224960A (en) * | 1997-11-19 | 1999-08-17 | Unisplay Sa | Led lamp and led chip |
US7947998B2 (en) | 1997-11-19 | 2011-05-24 | Unisplay S.A. | LED lamps |
US8399903B2 (en) | 1997-11-19 | 2013-03-19 | Epistar Corporation | LED lamps |
US8779460B2 (en) | 1997-11-19 | 2014-07-15 | Epistar Corporation | Light source unit |
US8692268B2 (en) | 1997-11-19 | 2014-04-08 | Epistar Corporation | LED lamps |
US8604508B2 (en) | 1997-11-19 | 2013-12-10 | Epistar Corporation | LED lamps |
US6307218B1 (en) | 1998-11-20 | 2001-10-23 | Lumileds Lighting, U.S., Llc | Electrode structures for light emitting devices |
DE19953160B4 (en) * | 1998-11-20 | 2009-01-22 | Philips Lumileds Lighting Company, LLC, San Jose | Improved electrode structures for light emitting devices |
EP2337095A3 (en) * | 1999-12-01 | 2014-09-24 | Cree, Inc. | Scalable LED with improved current spreading structures |
JP2013062543A (en) * | 1999-12-01 | 2013-04-04 | Cree Inc | Scalable led with improved current spreading structures |
EP2337096A3 (en) * | 1999-12-01 | 2014-09-24 | Cree, Inc. | Scalable LED with improved current spreading structures |
JP2001237458A (en) * | 1999-12-22 | 2001-08-31 | Lumileds Lighting Us Llc | Manufacturing method for iii-nitride led with enhanced light generating capability |
US6777805B2 (en) | 2000-03-31 | 2004-08-17 | Toyoda Gosei Co., Ltd. | Group-III nitride compound semiconductor device |
WO2001073858A1 (en) * | 2000-03-31 | 2001-10-04 | Toyoda Gosei Co., Ltd. | Group-iii nitride compound semiconductor device |
JP2001345480A (en) * | 2000-03-31 | 2001-12-14 | Toyoda Gosei Co Ltd | Iii nitride compound semiconductor element |
US7042089B2 (en) | 2000-03-31 | 2006-05-09 | Toyoda Gosei Co., Ltd. | Group III nitride compound semiconductor device |
KR100419613B1 (en) * | 2000-09-04 | 2004-02-25 | 삼성전기주식회사 | Blue light emitting diode with electrode structure for distributing a current density |
JP2003110140A (en) * | 2001-09-28 | 2003-04-11 | Nichia Chem Ind Ltd | Nitride semiconductor light emitting element |
US7183136B2 (en) | 2002-06-24 | 2007-02-27 | Toyoda Gosei Co., Ltd. | Semiconductor element and method for producing the same |
US7645689B2 (en) | 2005-01-19 | 2010-01-12 | Samsung Electro-Mechanics Co., Ltd. | Gallium nitride-based light emitting device having ESD protection capacity and method for manufacturing the same |
KR100665120B1 (en) * | 2005-02-28 | 2007-01-09 | 삼성전기주식회사 | Vertical structure nitride semiconductor light emitting device |
JP2007035990A (en) * | 2005-07-28 | 2007-02-08 | Kyocera Corp | Gallium-nitride-based compound semiconductor light emitting element, and manufacturing method thereof |
EP1928031A1 (en) * | 2005-09-20 | 2008-06-04 | Showa Denko K.K. | Nitride semiconductor light-emitting device and method for manufacturing same |
JP2007088048A (en) * | 2005-09-20 | 2007-04-05 | Showa Denko Kk | Nitride based semiconductor light emitting element and its fabrication process |
WO2007034834A1 (en) * | 2005-09-20 | 2007-03-29 | Showa Denko K.K. | Nitride semiconductor light-emitting device and method for manufacturing same |
US7939845B2 (en) | 2005-09-20 | 2011-05-10 | Showa Denko K.K. | Nitride semiconductor light-emitting device and production method thereof |
JP2007088059A (en) * | 2005-09-20 | 2007-04-05 | Showa Denko Kk | Nitride based semiconductor light emitting element and its fabrication process |
EP1928031A4 (en) * | 2005-09-20 | 2014-10-01 | Toyoda Gosei Kk | Nitride semiconductor light-emitting device and method for manufacturing same |
KR100814464B1 (en) * | 2006-11-24 | 2008-03-17 | 삼성전기주식회사 | Nitride semiconductor light emitting device |
JP2012028749A (en) * | 2010-07-22 | 2012-02-09 | Seoul Opto Devices Co Ltd | Light-emitting diode |
US9202973B2 (en) | 2010-07-22 | 2015-12-01 | Seoul Viosys Co., Ltd. | Light emitting diode |
JP2015222826A (en) * | 2010-07-22 | 2015-12-10 | ソウル バイオシス カンパニー リミテッドSeoul Viosys Co.,Ltd. | Light-emitting diode |
CN105449086A (en) * | 2010-07-22 | 2016-03-30 | 首尔伟傲世有限公司 | Light emitting diode |
CN105449086B (en) * | 2010-07-22 | 2018-03-27 | 首尔伟傲世有限公司 | Light emitting diode |
Also Published As
Publication number | Publication date |
---|---|
JP3960636B2 (en) | 2007-08-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3960636B2 (en) | Light emitting element | |
US8536612B2 (en) | Light emitting device having a pluralilty of light emitting cells and package mounting the same | |
JP3659098B2 (en) | Nitride semiconductor light emitting device | |
JP3787202B2 (en) | Semiconductor light emitting device | |
JP2001339100A (en) | Light emitting element and its manufacturing method | |
US11908977B2 (en) | Semiconductor light-emitting device including a reflector layer having a multi-layered structure | |
JP2007123517A (en) | Semiconductor light-emitting element, and semiconductor light-emitting apparatus | |
JP2005026395A (en) | Semiconductor light emitting element and semiconductor light emitting device | |
JPH10173224A (en) | Compound semiconductor light emitting element and its manufacture | |
JPH06177429A (en) | Blue color led device | |
JPH10209496A (en) | Semiconductor light emitting device | |
JP2005276899A (en) | Light-emitting element | |
JP2004356213A (en) | Semiconductor light emitting device | |
JP2000049376A (en) | Light emitting element | |
JPH09129922A (en) | Light emitting element and its manufacture | |
JP4810751B2 (en) | Nitride semiconductor device | |
JPH10209494A (en) | Semiconductor light emitting device | |
KR101154511B1 (en) | High efficiency light emitting diode and method of fabricating the same | |
KR101125416B1 (en) | Light emitting device, method for fabricating the light emitting device and light emitting device package | |
KR20190136826A (en) | Semiconductor device, method for fabricating the same, and semiconductor device package | |
JP3571477B2 (en) | Semiconductor light emitting device | |
CN207082541U (en) | Light emitting diode with contact layer | |
JP2002185037A (en) | Light-emitting device | |
KR100447029B1 (en) | Semiconductor LED device and method thereof | |
KR101216940B1 (en) | Light emitting diode chip |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20040810 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20051226 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070326 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070515 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110525 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120525 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130525 Year of fee payment: 6 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130525 Year of fee payment: 6 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130525 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |