JPH0990412A - Production of liquid crystal display device and liquid crystal display device produced by the process - Google Patents

Production of liquid crystal display device and liquid crystal display device produced by the process

Info

Publication number
JPH0990412A
JPH0990412A JP24262395A JP24262395A JPH0990412A JP H0990412 A JPH0990412 A JP H0990412A JP 24262395 A JP24262395 A JP 24262395A JP 24262395 A JP24262395 A JP 24262395A JP H0990412 A JPH0990412 A JP H0990412A
Authority
JP
Japan
Prior art keywords
solvent
liquid crystal
display device
crystal display
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24262395A
Other languages
Japanese (ja)
Inventor
Hiroyuki Onishi
博之 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP24262395A priority Critical patent/JPH0990412A/en
Publication of JPH0990412A publication Critical patent/JPH0990412A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To improve a voltage holding rate and to make display with high quality and high contrast free from unequal display and burn by forming a black insulator on a first substrate, then washing the substrate with a specific solvent. SOLUTION: A washing stage is included in the process after the formation of the black insulator. The washing is preferably executed by using the org. solvent. Namely, the black insulator is washed with the solvent after the formation thereof, by which the ions in the black insulator are extracted by the solvent. Such components which are dissolved to generate ions by an oriented film solvent are previously removed. The washing by such solvent is effective even after the formation of the oriented film. The ion components in the black insulator previously diffuse into the oriented film when oriented film is formed prior to the washing by the solvent. The black insulator is partially dissolved by the oriented film solvent and is conceivably held diffused in the oriented film. The ionic impurities diffused into the oriented film may be extracted by executing the washing by the solvent in this state.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は非線形素子を有する
液晶表示装置の製造方法及びその方法を用いて製作され
た液晶表示装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a liquid crystal display device having a non-linear element and a liquid crystal display device manufactured by using the method.

【0002】[0002]

【従来の技術】非線形素子としてアモルファスシリコン
の薄膜トランジスタ(以下、TFTと略記する)を用い
た液晶表示装置の従来例を以下に説明する。
2. Description of the Related Art A conventional example of a liquid crystal display device using an amorphous silicon thin film transistor (hereinafter abbreviated as TFT) as a non-linear element will be described below.

【0003】図2はそのような液晶表示装置の液晶パネ
ル部の平面図であり、図3は図2のA−A’断面図であ
る。先ず、第1のガラス基板(アレイ基板)1上にクロ
ムからなるゲート配線2とITOからなる透明画素電極
3とを形成し、その後、窒化ケイ素からなるゲート絶縁
膜4を一面に堆積させる。さらに、非晶質シリコンから
なる半導体層5を形成し、ゲート絶縁膜に穴6を開け、
半導体層と一部重なるようにソース配線を形成し、半導
体層の一部と穴6に重なるようにドレイン電極7を形成
する。そして、黒色の絶縁材料で各配線を隠すブラック
ストライプ8をフォトリソグラフィによって形成する。
この様な手法により、第2の基板(対向基板)上に黒色
誘電体を設ける場合に比べて、配線に対するずれを小さ
くすることができ、効果的に画素電極間の隙間を遮光す
ることができる。
FIG. 2 is a plan view of a liquid crystal panel portion of such a liquid crystal display device, and FIG. 3 is a sectional view taken along the line AA 'of FIG. First, the gate wiring 2 made of chromium and the transparent pixel electrode 3 made of ITO are formed on the first glass substrate (array substrate) 1, and then the gate insulating film 4 made of silicon nitride is deposited on the entire surface. Further, a semiconductor layer 5 made of amorphous silicon is formed, a hole 6 is opened in the gate insulating film,
The source wiring is formed so as to partially overlap the semiconductor layer, and the drain electrode 7 is formed so as to partially overlap the semiconductor layer and the hole 6. Then, a black stripe 8 for hiding each wiring is formed by photolithography with a black insulating material.
By such a method, compared with the case where the black dielectric is provided on the second substrate (counter substrate), the deviation with respect to the wiring can be reduced, and the gap between the pixel electrodes can be effectively shielded. .

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記の
ような従来の黒色絶縁体を用いた液晶表示装置にあって
は、黒色絶縁体から発生するイオン性不純物や配向膜な
どの溶剤による溶解イオン等が液晶中へ染み出ることに
より、電圧保持特性が悪化してコントラストが低下し、
表示ムラや焼付け等が発生するという問題があった。
However, in the liquid crystal display device using the conventional black insulator as described above, ionic impurities generated from the black insulator, dissolved ions by a solvent such as an alignment film, and the like. Seeping into the liquid crystal, the voltage holding characteristics deteriorate and the contrast decreases,
There is a problem in that display unevenness and printing occur.

【0005】そこで、本発明は、上記のような従来の液
晶表示装置における問題を解決し、高い電圧保持率、ひ
いては高コントラスト、高品質の表示が得られる液晶表
示装置を提供することを目的とする。
Therefore, an object of the present invention is to solve the problems in the conventional liquid crystal display device as described above and to provide a liquid crystal display device which can obtain a high voltage holding ratio, and thus a high contrast and a high quality display. To do.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
の本発明による液晶表示装置の製造方法は黒色絶縁体の
形成後に洗浄工程を含んでいることを特徴とする。洗浄
は、有機溶剤を用いて行うことが好ましい。
A method of manufacturing a liquid crystal display device according to the present invention for achieving the above object is characterized by including a cleaning step after forming a black insulator. The washing is preferably performed using an organic solvent.

【0007】[0007]

【発明の実施の形態】本発明によれば、黒色絶縁体形成
後に溶剤で洗浄することによって、黒色絶縁体中のイオ
ンが溶剤により抽出され、又、配向膜溶剤により溶解し
イオンを発生するような成分は予め取り除くことができ
る。この様な溶剤による洗浄は配向膜形成後においても
有効である。溶剤による洗浄の前に配向膜を形成した場
合、黒色絶縁体中のイオン成分は予め配向膜中に拡散
し、又、配向膜溶剤により黒色絶縁体の一部が溶解して
配向膜中に拡散している状態にあると考えられる。この
状態で溶剤による洗浄を行うことにより、配向膜中に拡
散したイオン性不純物を抽出することができる。この結
果、液晶注入を行っても液晶中への不純物イオンの拡散
は無くなるため電圧保持率の低下はなく、最終的に表示
ムラ、焼き付きなどの無い良好な表示品位の液晶表示装
置を得るすることができる。
According to the present invention, by washing with a solvent after forming a black insulator, the ions in the black insulator are extracted by the solvent, and the ions are dissolved by the alignment film solvent to generate ions. Such components can be removed in advance. Such cleaning with a solvent is effective even after forming the alignment film. If the alignment film is formed before cleaning with a solvent, the ionic components in the black insulator will diffuse into the alignment film in advance, or a part of the black insulator will be dissolved by the alignment film solvent and diffuse into the alignment film. It is thought that it is in a state of doing. By washing with a solvent in this state, the ionic impurities diffused in the alignment film can be extracted. As a result, even if the liquid crystal is injected, the diffusion of impurity ions into the liquid crystal is eliminated, so that the voltage holding ratio does not decrease, and finally a liquid crystal display device of good display quality without display unevenness or image sticking is obtained. You can

【0008】尚、この洗浄工程は黒色レジストを用いた
場合の現像後の水洗工程、又は通常のアレー形成後パネ
ル作成前の洗浄工程とは別に行われるのものである。
又、イソプロピルアルコールのような洗浄能力の高い有
機溶剤を用いて洗浄すれば効果的である。
This washing step is carried out separately from the washing step after development when a black resist is used, or the usual washing step after array formation and before panel formation.
Further, it is effective to wash with an organic solvent having a high washing ability such as isopropyl alcohol.

【0009】具体的な液晶の製造工程における本発明の
3通りの実施形態を図1(a)〜(c)に示す。これら
の図に示す製造工程は、第1の基板上に黒色絶縁体(黒
色誘電体ともいう)を形成した後、パネルを貼り合わせ
るまでの工程であり、図1(a)は黒色絶縁体形成後に
洗浄を行う実施形態。図1(b)は配向膜硬化後に洗浄
を行う実施形態、そして図2(c)はラビング処理後に
洗浄を行う実施形態をそれぞれ示している。なお、比較
のために、洗浄を行わない従来の工程を図4に示す。
3 (a) to 1 (c) show three embodiments of the present invention in a concrete liquid crystal manufacturing process. The manufacturing process shown in these figures is a process of forming a black insulator (also referred to as a black dielectric) on the first substrate and then attaching the panels, and FIG. 1A shows the black insulator formation. An embodiment in which cleaning is performed later. 1B shows an embodiment in which cleaning is performed after the alignment film is cured, and FIG. 2C shows an embodiment in which cleaning is performed after the rubbing treatment. For comparison, a conventional process without cleaning is shown in FIG.

【0010】[0010]

【実施例】以下、上記実施形態に対応する実施例を説明
する。まず、アレー形成後にネガ型感光性レジストをス
ピンナーで塗布し、露光、現像後に水洗を行って黒色絶
縁体を形成した。それから、イソプロピルアルコールに
5分間浸積することによって図1(a)に示すように洗
浄を行った。そして、パネルの水洗を10分行い、乾燥
した後、配向膜印刷を行い、硬化及びラビング処理を行
った。その後、通常の方法によりパネル製作を行った。
配向膜にはポリイミドを用いた。
EXAMPLES Examples corresponding to the above-described embodiment will be described below. First, after forming an array, a negative photosensitive resist was applied by a spinner, exposed and developed, and washed with water to form a black insulator. Then, by immersing in isopropyl alcohol for 5 minutes, cleaning was performed as shown in FIG. Then, the panel was washed with water for 10 minutes and dried, and then an alignment film was printed, followed by curing and rubbing. After that, a panel was manufactured by a usual method.
Polyimide was used for the alignment film.

【0011】電圧保持率のテストのために、アレーを形
成していない電極付きパネルを上記の方法で製作した。
所定の電圧波形を印加して保持率の測定を行ったとこ
ろ、60℃において97%という良好な保持率が得られ
た。ちなみに溶剤による洗浄工程を含まない従来の工程
で作成した液晶パネルの60℃での保持率は80%であ
った。
For testing the voltage holding ratio, a panel with electrodes without an array was prepared by the above method.
When the retention rate was measured by applying a predetermined voltage waveform, a good retention rate of 97% was obtained at 60 ° C. Incidentally, the liquid crystal panel produced by the conventional process not including the solvent washing process had a retention rate of 80% at 60 ° C.

【0012】又、図1(b)に示すように、配向膜硬化
後の非線形素子を有するパネルで洗浄を行ったところ、
コントラストは150以上であり、ムラや焼き付きの無
い良好な表示特性が得られた。一方、洗浄工程を含まな
い従来の工程で製作された非線形素子付きパネルでは、
コントラストは50と低く、ムラや焼付けが多く発生し
た。
Further, as shown in FIG. 1B, when a panel having a non-linear element after the alignment film is cured is washed,
The contrast was 150 or more, and good display characteristics without unevenness or image sticking were obtained. On the other hand, in the panel with the non-linear element manufactured by the conventional process that does not include the cleaning process,
The contrast was as low as 50, and many unevenness and burning occurred.

【0013】イソプロピルアルコールに代えて、シュン
マ、γブチルラクトン、Nメチルピロリドン等を用いて
洗浄を行ったところ、同様の効果が得られた。このよう
な効果はこれらの溶媒を用いた場合に限定されるわけで
はない。アレー構成に関しても、図2に示したアレー構
成に限定されるものではない。
When cleaning was performed using Schumma, γ-butyl lactone, N-methylpyrrolidone or the like instead of isopropyl alcohol, the same effect was obtained. Such an effect is not limited to the case of using these solvents. The array configuration is not limited to the array configuration shown in FIG.

【0014】又、図1(b)に示したように、配向膜硬
化後で、さらにラビング処理後に上記のような洗浄を行
ったところ、上記と同様の効果が得られた。この場合、
電圧保持率は95%であり、図1(b)、(c)の工程
の場合に比べると僅かに低い値を示した。
Further, as shown in FIG. 1 (b), after the alignment film was cured and the rubbing treatment was performed, and then the above-mentioned cleaning was performed, the same effect as described above was obtained. in this case,
The voltage holding ratio was 95%, which was slightly lower than that in the case of the steps of FIGS. 1B and 1C.

【0015】尚、洗浄時に超音波等を印加すると洗浄効
果が上がった。また、温度を上げて洗浄を行なえば洗浄
効果が上がることも確認された。つまり、電圧保持率が
一層高くなり、表示特性もさらに向上した。
Note that the cleaning effect was improved by applying ultrasonic waves or the like during cleaning. It was also confirmed that the cleaning effect was improved by increasing the temperature and performing the cleaning. That is, the voltage holding ratio is further increased and the display characteristics are further improved.

【0016】[0016]

【発明の効果】以上説明したように、本発明の液晶表示
装置の製造方法によって製作された液晶表示装置は高い
電圧保持率を示し、その結果、コントラストが高く表示
ムラ及び焼付けが無い高品質の表示を得ることができ
る。
As described above, the liquid crystal display device manufactured by the method for manufacturing a liquid crystal display device of the present invention exhibits a high voltage holding ratio, and as a result, it has high contrast and high quality without display unevenness and burning. You can get the display.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施形態に係る液晶表示装置の製造工
程図
FIG. 1 is a manufacturing process diagram of a liquid crystal display device according to an embodiment of the present invention.

【図2】液晶表示装置の平面図FIG. 2 is a plan view of a liquid crystal display device.

【図3】図2の液晶表示装置のA−A´断面図3 is a sectional view taken along the line AA ′ of the liquid crystal display device of FIG.

【図4】従来の液晶表示装置の製造工程図FIG. 4 is a manufacturing process diagram of a conventional liquid crystal display device.

【符号の説明】[Explanation of symbols]

1 ガラス基板 2 ゲート配線 3 画素電極 4 ゲート絶縁膜 5 ソース電極 6 ゲート絶縁膜中の穴 7 ドレイン電極 8 黒色絶縁体 1 Glass Substrate 2 Gate Wiring 3 Pixel Electrode 4 Gate Insulation Film 5 Source Electrode 6 Hole in Gate Insulation Film 7 Drain Electrode 8 Black Insulator

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 複数の行電極及び複数の列電極からなる
マトリクス配線の各交点に非線形素子を介して画素電極
を接続し、行電極及び列電極の一方又は両方を覆うよう
に配線に沿って黒色絶縁部材を形成した第1の基板と、
透明電極を有する第2の基板との間に液晶を充填してな
る液晶表示装置の製造方法であって、前記第1の基板に
黒色絶縁体を形成した後に所定の溶剤で洗浄することを
特徴とする液晶表示装置の製造方法。
1. A pixel electrode is connected to each intersection of a matrix wiring composed of a plurality of row electrodes and a plurality of column electrodes via a non-linear element, and the wiring is provided so as to cover one or both of the row electrode and the column electrode. A first substrate on which a black insulating member is formed,
A method of manufacturing a liquid crystal display device, comprising filling a liquid crystal between a second substrate having a transparent electrode, wherein a black insulator is formed on the first substrate and then washed with a predetermined solvent. A method for manufacturing a liquid crystal display device.
【請求項2】 前記溶剤が有機溶剤である請求項1記載
の液晶表示装置の製造方法
2. The method for manufacturing a liquid crystal display device according to claim 1, wherein the solvent is an organic solvent.
【請求項3】 複数の行電極及び複数の列電極からなる
マトリクス配線の各交点に非線形素子を介して画素電極
が接続され、行電極及び列電極の一方又は両方を覆うよ
うに配線に沿って黒色絶縁部材が形成されている第1の
基板と、透明電極を有する第2の基板と、前記第1及び
第2の基板の間に狭持された液晶とを備えている液晶表
示装置であって、前記第1の基板上に黒色絶縁体が形成
された後に所定の溶剤で洗浄されていることを特徴とす
る液晶表示装置。
3. A pixel electrode is connected to each intersection of a matrix wiring composed of a plurality of row electrodes and a plurality of column electrodes via a non-linear element, and along the wiring so as to cover one or both of the row electrode and the column electrode. A liquid crystal display device comprising: a first substrate on which a black insulating member is formed; a second substrate having a transparent electrode; and a liquid crystal sandwiched between the first and second substrates. The liquid crystal display device is characterized in that the black insulator is formed on the first substrate and then washed with a predetermined solvent.
【請求項4】 前記溶剤が有機溶剤である請求項3記載
の液晶表示装置。
4. The liquid crystal display device according to claim 3, wherein the solvent is an organic solvent.
JP24262395A 1995-09-21 1995-09-21 Production of liquid crystal display device and liquid crystal display device produced by the process Pending JPH0990412A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24262395A JPH0990412A (en) 1995-09-21 1995-09-21 Production of liquid crystal display device and liquid crystal display device produced by the process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24262395A JPH0990412A (en) 1995-09-21 1995-09-21 Production of liquid crystal display device and liquid crystal display device produced by the process

Publications (1)

Publication Number Publication Date
JPH0990412A true JPH0990412A (en) 1997-04-04

Family

ID=17091816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24262395A Pending JPH0990412A (en) 1995-09-21 1995-09-21 Production of liquid crystal display device and liquid crystal display device produced by the process

Country Status (1)

Country Link
JP (1) JPH0990412A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1154305A1 (en) * 2000-04-26 2001-11-14 Dai Nippon Printing Co., Ltd. Color filter and liquid crystal display device
US6600532B2 (en) 2000-01-25 2003-07-29 Dai Nippon Printing Co., Ltd. Color filter and liquid crystal display subject to impurity extraction treatment for voltage holding ratio of 80% or more

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6600532B2 (en) 2000-01-25 2003-07-29 Dai Nippon Printing Co., Ltd. Color filter and liquid crystal display subject to impurity extraction treatment for voltage holding ratio of 80% or more
EP1154305A1 (en) * 2000-04-26 2001-11-14 Dai Nippon Printing Co., Ltd. Color filter and liquid crystal display device
US6624861B2 (en) 2000-04-26 2003-09-23 Dai Nippon Printing Co., Ltd. Color filter subject to impurity extraction treatment and liquid crystal display device having high voltage holding ratio

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