JPH0972939A - Board measuring apparatus - Google Patents

Board measuring apparatus

Info

Publication number
JPH0972939A
JPH0972939A JP7228050A JP22805095A JPH0972939A JP H0972939 A JPH0972939 A JP H0972939A JP 7228050 A JP7228050 A JP 7228050A JP 22805095 A JP22805095 A JP 22805095A JP H0972939 A JPH0972939 A JP H0972939A
Authority
JP
Japan
Prior art keywords
board
substrate
holder
pin
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7228050A
Other languages
Japanese (ja)
Inventor
Kazunori Sato
和典 里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Ten Ltd
Original Assignee
Denso Ten Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Ten Ltd filed Critical Denso Ten Ltd
Priority to JP7228050A priority Critical patent/JPH0972939A/en
Publication of JPH0972939A publication Critical patent/JPH0972939A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To make it possible to measure electric performances stably even under the condition, wherein vibration is applied on a board, by inserting the tip part of a probe pin into a through-hole provided in a printed wiring board, and bringing the tip part into contact electrically. SOLUTION: A board 50 to be measured is positioned and fixed at a lower board holder 40, which is fixed to a shaker. Then, an upper pin holder 20 is mounted and positioned on the board holder 40. The pin holder 20 is screwed and fixed to the board holder 40 by a fixing screw 45. Then, the board holder 40 is vibrated with a shaker, the board 50 is conducted under the condition, wherein the specified vibration is applied on the board 50, and the electric performances are measured. Thus, a tapered part 32 of a tip 32 of a probe pin 30 is inserted into a through hole 53 at the measuring point, and the tapered part 32 is compressed to the outer surface of the through hole 53 under the line contact condition. Therefore, even if the electric measurement is taken under the condition wherein the vibration is applied on the board 50, the stable measurement can be taken without the disengagement of the contact state at the measuring point. Thus, the efficiency of the measuring work can be achieved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、プリント配線基板
の電気特性測定用装置に係り、詳細には前記基板に振動
を加えた状態での測定に好適な基板測定用装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for measuring electric characteristics of a printed wiring board, and more particularly to a device for measuring a board suitable for measurement in a state where vibration is applied to the board.

【0002】[0002]

【従来の技術】従来の基板測定装置には、例えば、自動
車に取付けられる加速度センサに用いられる基板又は製
品の測定装置がある。該測定装置は基板又は製品の使用
状態で電気的特性を測定する必要がある。そこで、基板
又は製品に所定の振動又は衝撃を加えた状態で測定し必
要に応じて調整作業が行われる。以下に従来の基板測定
装置を図3を用いて説明する。
2. Description of the Related Art Conventional board measuring devices include, for example, board or product measuring devices used for acceleration sensors mounted on automobiles. The measuring device needs to measure the electrical characteristics of the substrate or the product in use. Therefore, measurement is performed with a predetermined vibration or shock applied to the substrate or the product, and adjustment work is performed as necessary. A conventional substrate measuring device will be described below with reference to FIG.

【0003】図3は基板測定装置の図で、(a)は基板
測定装置の構成を示す上面視図、(b)は側面図であ
る。基板ホルダ80は基板90又は製品を保持するもの
で、基板90又は製品の出力端子との接続コネクタ82
が設けられており、基板90又は製品を取付けるねじ8
5が螺合するねじ孔81及び加振器への取付孔(図示省
略)等が形成されている。尚、基板ホルダ80の材料に
はアルミ等の金属が用いられフライス盤等により形成さ
れる。
FIG. 3 is a diagram of a substrate measuring device, (a) is a top view showing the structure of the substrate measuring device, and (b) is a side view. The board holder 80 holds a board 90 or a product, and is a connector 82 for connecting to the output terminal of the board 90 or the product.
And the screws 8 for mounting the substrate 90 or the product
A screw hole 81 into which 5 is screwed, a mounting hole (not shown) to the vibrator, and the like are formed. The substrate holder 80 is made of metal such as aluminum and is formed by a milling machine or the like.

【0004】リード線(例えばビニル電線等)95は基
板90又は製品の出力端子と電気的に接続され、基板9
0又は製品の測定情報を測定器へ伝達する。基板90は
電子部品(図示省略)等が搭載された被測定基板で、基
板90には導体(例えば銅)により回路が形成されてい
る。また、基板90の表面には表面保護皮膜(例えばオ
ーバーガラス)等が施されている。尚、基板90はシャ
ーシ91に固定されている。
A lead wire (for example, a vinyl electric wire) 95 is electrically connected to the substrate 90 or an output terminal of the product, and the substrate 9
0 or product measurement information is transmitted to the measuring device. The board 90 is a board to be measured on which electronic components (not shown) and the like are mounted, and a circuit is formed on the board 90 by a conductor (eg, copper). Further, the surface of the substrate 90 is provided with a surface protective film (for example, over glass) or the like. The substrate 90 is fixed to the chassis 91.

【0005】次に、基板の測定について説明する。先
ず、測定する基板90を加振器に固定された基板ホルダ
80に位置決め固定する。次に、加振器にて基板ホルダ
80を振動させ、基板90に所定の振動を加えた状態で
基板90に通電し電気的性能を測定をする。そして、必
要に応じて調整を行う。
Next, the measurement of the substrate will be described. First, the substrate 90 to be measured is positioned and fixed to the substrate holder 80 fixed to the vibrator. Next, the substrate holder 80 is vibrated by a shaker, and the substrate 90 is energized in a state where a predetermined vibration is applied to the substrate 90 to measure the electrical performance. Then, adjustment is made as necessary.

【0006】[0006]

【発明が解決しようとする課題】しかし、上述の基板測
定では、電気的性能測定及び調整作業が1枚づつ行われ
るために、全体の作業効率が悪いものになっていた。こ
れらの測定及び調整作業効率を改善するために、基板9
0の表面に形成されたパターンの途中にテストパターン
を形成し、該テストパターンに電気的導体のプロープピ
ンを圧接させ、基板90を多数枚綴の状態で電気的性能
測定及び調整作業を行うことが考えられる。しかし、多
数枚綴りのプリント配線基板に振動を加えた状態で電気
的性能測定をする場合、基板表面のテストパターンに弾
性的に圧接させたプロープピンの先端が点接触となって
いるので、基板に振動が加わった場合に振動により、テ
ストパターンからプロープピンの先端が外れ測定が不安
定となるおそれがある。
However, in the above-mentioned board measurement, since the electrical performance measurement and the adjustment work are performed one by one, the overall work efficiency becomes poor. In order to improve the efficiency of these measurement and adjustment work, the substrate 9
It is possible to form a test pattern in the middle of the pattern formed on the surface of No. 0, press the probe pin of the electric conductor into pressure contact with the test pattern, and perform the electrical performance measurement and adjustment work in a state where the substrate 90 is bound into a plurality of sheets. Conceivable. However, when measuring electrical performance in a state where vibration is applied to a large number of printed wiring boards, the tip of the probe pin elastically pressed against the test pattern on the board surface makes point contact, so When vibration is applied, the tip of the probe pin may come off from the test pattern and the measurement may become unstable.

【0007】そこで、本発明は上述の問題を解決するも
ので、多数枚綴りのプリント配線基板に振動を加えた状
態でも安定した電気性的能測定が可能な基板測定装置を
提供することを目的とする。
Therefore, the present invention solves the above-mentioned problems, and an object of the present invention is to provide a substrate measuring apparatus capable of performing stable electrical performance measurement even in a state where vibration is applied to a printed wiring board with a large number of sheets. And

【0008】[0008]

【課題を解決するための手段】本発明は、上述の目的を
達成するもので、プリント配線基板に設けられたテスト
パターンにプローブピンを圧接し、前記基板の電気的特
性を測定する基板測定装置において、前記プローブピン
を当接方向へ弾性的に付勢する付勢手段を有し、前記プ
ローブピンの先端部を、前記プリント配線基板に設けら
れたスルーホールからなるテストパターンに挿入し弾性
的に当接させたことを特徴とする。
SUMMARY OF THE INVENTION The present invention achieves the above-mentioned object, and a substrate measuring device for measuring the electrical characteristics of a printed wiring board by pressing a probe pin against the test pattern and measuring the electrical characteristics of the board. In, there is an urging means for elastically urging the probe pin in the contact direction, and the tip end portion of the probe pin is inserted into a test pattern made of a through hole provided in the printed wiring board to elastically It is characterized by being brought into contact with.

【0009】また、前記プローブピンを前記スルーホー
ルの両面より弾性的に当接させるようにしたことを特徴
とする。
Further, the probe pin is elastically abutted from both sides of the through hole.

【0010】[0010]

【実施例】本発明の第1実施例を図1を用いて説明す
る。図1は本発明の第1実施例を示す基板測定装置の要
部断面図である。10は電子部品等が搭載された基板5
0を電気的に測定する基板測定装置で、上側ピンホルダ
20、プローブピン30、下側基板ホルダ40、加振器
(図示省略)及び測定器(図示省略)等により構成され
ている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a sectional view of an essential part of a substrate measuring apparatus showing a first embodiment of the present invention. 10 is a substrate 5 on which electronic components and the like are mounted
This is a substrate measuring device that electrically measures 0, and includes an upper pin holder 20, a probe pin 30, a lower substrate holder 40, a vibrator (not shown), a measuring device (not shown), and the like.

【0011】上側ピンホルダ20はプローブピン30を
取付けるもので、基板50の上部に設けられ、下側基板
ホルダ40に位置決め固定された基板50のスルーホー
ル(電気的測定点)53に対向する位置にプローブピン
30のスリーブ33が圧入される孔21及び下側基板ホ
ルダ40への取付ねじ45が挿通する孔22等が形成さ
れている。尚、上側ピンホルダ20の材料には、アルミ
等の金属が用いられフライス盤等により形成される。
The upper pin holder 20 is for mounting the probe pin 30, and is provided on the upper portion of the substrate 50, and is located at a position facing the through hole (electrical measurement point) 53 of the substrate 50 positioned and fixed to the lower substrate holder 40. A hole 21 into which the sleeve 33 of the probe pin 30 is press-fitted, a hole 22 into which a mounting screw 45 to the lower substrate holder 40 is inserted, and the like are formed. The upper pin holder 20 is made of a metal such as aluminum and is formed by a milling machine or the like.

【0012】プローブピン30は基板50のスルーホー
ル53に圧接し、電気的信号(電流、電圧)を取り出す
ためのピンで、ピン31、スリーブ33及びばね34等
により構成されており、ピン31がスリーブ33の内径
に挿通され、ばね34により弾性的に保持されている。
ピン31の外形は基板50のスルーホールの孔径より大
きく、先端部32はスルーホールに挿入するように針状
に形成されており、先端部32は磨耗を防ぐために焼き
入れを施し用いられる。尚、ピン31の材料には導電性
の鋼材等が用いられる。
The probe pin 30 is a pin for coming into pressure contact with the through hole 53 of the substrate 50 to take out an electrical signal (current, voltage), and is composed of a pin 31, a sleeve 33, a spring 34, etc. It is inserted into the inner diameter of the sleeve 33 and is elastically held by the spring 34.
The outer shape of the pin 31 is larger than the hole diameter of the through hole of the substrate 50, and the tip portion 32 is formed in a needle shape so as to be inserted into the through hole. The tip portion 32 is hardened and used to prevent abrasion. A conductive steel material or the like is used for the material of the pin 31.

【0013】スリーブ33は筒状で内径はピン31が挿
通し・・・しゅう動するように形成されており、外周の
端部(図面上部)にはばね34をねじ込み固定するねじ
部00が形成されている。スリーブ33の材料には絶縁
性の樹脂材が用いられる。尚、スリーブ33を圧入する
相手側の部材が電気的絶縁性の場合は導電性の材料例え
ば黄銅等を用いてもよい。
The sleeve 33 is cylindrical and has an inner diameter such that the pin 31 is inserted therethrough and slides, and a screw portion 00 for screwing and fixing a spring 34 is formed at an outer peripheral end portion (upper part of the drawing). Has been done. An insulating resin material is used as the material of the sleeve 33. If the other member into which the sleeve 33 is press-fitted is electrically insulating, a conductive material such as brass may be used.

【0014】下側基板ホルダ40は基板50を保持する
もので、基板50の位置決め部41、上側ピンホルダ2
0を取付けるねじ45が螺合するねじ孔42及び加振器
への取付孔(図示省略)等が形成されている。また、基
板50の下面との接触面には絶縁板(例えば樹脂板等)
43が固定されている。尚、下側基板ホルダ40の材料
にはアルミ等の金属が用いられフライス盤等により形成
される。
The lower substrate holder 40 holds the substrate 50. The positioning portion 41 of the substrate 50 and the upper pin holder 2 are provided.
A screw hole 42 into which a screw 45 for mounting 0 is screwed, a mounting hole (not shown) to the vibrator, and the like are formed. Further, an insulating plate (for example, a resin plate) is provided on the contact surface with the lower surface of the substrate 50.
43 is fixed. The lower substrate holder 40 is made of a metal such as aluminum and is formed by a milling machine or the like.

【0015】リード線(例えばビニル電線等)35はプ
ローブピン30のピン31の上端部に電気的に接続さ
れ、基板50の測定情報を測定器へ伝達する。基板50
は電子部品(図示省略)等が搭載された被測定基板で、
基板50には導体(例えば銅)51により回路が形成さ
れており、該回路の要所には電気的性能を測定するため
のスルーホール53が形成されている。また、基板50
のスルーホール53を除く表面には表面保護皮膜(例え
ばオーバーガラス)等が施されている。
A lead wire (for example, a vinyl electric wire) 35 is electrically connected to the upper end of the pin 31 of the probe pin 30 and transmits the measurement information of the substrate 50 to the measuring instrument. Board 50
Is a substrate to be measured on which electronic parts (not shown) etc. are mounted,
A circuit is formed by a conductor (for example, copper) 51 on the substrate 50, and a through hole 53 for measuring electrical performance is formed at a main part of the circuit. Also, the substrate 50
A surface protective film (for example, over glass) or the like is applied to the surface excluding the through holes 53.

【0016】次に、基板の測定について説明する。先
ず、測定する基板50を加振器に固定された下側基板ホ
ルダ40に位置決め固定する。次に、上側ピンホルダ2
0を下側基板ホルダ40の上に乗せ位置決めし、固定ね
じ45により上側ピンホルダ20を下側基板ホルダ40
にねじ止め固定する。次に、加振器にて下側基板ホルダ
40を振動させ、基板50に所定の振動を加えた状態で
基板50に通電し電気的性能を測定する。そして、必要
に応じて調整を行う。
Next, the measurement of the substrate will be described. First, the substrate 50 to be measured is positioned and fixed to the lower substrate holder 40 fixed to the vibrator. Next, the upper pin holder 2
0 is placed on the lower substrate holder 40 and positioned, and the upper pin holder 20 is fixed by the fixing screw 45.
And fix it with screws. Next, the lower substrate holder 40 is vibrated by a vibration exciter, and the substrate 50 is energized while a predetermined vibration is applied to measure the electrical performance. Then, adjustment is made as necessary.

【0017】以上説明したように、本実施例によれば、
プローブピン30のピン31の先端テーパー部32が測
定点のスルーホール53に挿入され、ピン31の先端テ
ーパー部32がスルーホール53の外周に線接触の状態
で圧接しているので、測定装置に振動を加え基板50に
振動が加わった状態で電気的測定を行っても、測定点の
接触状態が外れることなく安定した測定ができる。従っ
て、多数枚綴りの基板を分割せずに測定ができるので、
測定作業の効率化が図れる。
As described above, according to this embodiment,
The tip taper portion 32 of the pin 31 of the probe pin 30 is inserted into the through hole 53 at the measurement point, and the tip taper portion 32 of the pin 31 is press-contacted to the outer periphery of the through hole 53 in a line contact state. Even if electrical measurement is performed in a state where vibration is applied to the substrate 50, stable measurement can be performed without the contact state of the measurement point being deviated. Therefore, it is possible to measure without splitting a large number of substrates,
The efficiency of measurement work can be improved.

【0018】次に、本発明の第2実施例を図2を用いて
説明する。図2は本発明の第2実施例を示す基板測定装
置の要部断面図である。尚、第2実施例は第1実施例の
下側基板ホルダを変更したもので、その他については第
1実施例と略同じであるので、同じ構成については同じ
符号を付し説明を省略する。
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a sectional view of an essential part of a substrate measuring apparatus showing a second embodiment of the present invention. The second embodiment is a modification of the lower substrate holder of the first embodiment. Since the other parts are substantially the same as those of the first embodiment, the same components are designated by the same reference numerals and the description thereof will be omitted.

【0019】60は下側ピンホルダで、基板50の下側
からスルーホール53に圧接するプローブピン30を取
付けるもので、基板50の位置決め部62で位置決めさ
れた基板50のスルーホール53に対向する位置に、プ
ローブピン30のスリーブ33が圧入される孔61、上
側ピンホルダ20を取付けるねじ45が螺合するねじ孔
63及び加振器への取付孔(図示省略)等が形成されて
いる。尚、下側ピンホルダ60の材料にはアルミ等の金
属が用いられフライス盤等により形成される。
Reference numeral 60 denotes a lower pin holder for mounting the probe pin 30 which comes into pressure contact with the through hole 53 from the lower side of the substrate 50, and is located at a position facing the through hole 53 of the substrate 50 positioned by the positioning portion 62 of the substrate 50. A hole 61 into which the sleeve 33 of the probe pin 30 is press-fitted, a screw hole 63 into which the screw 45 for mounting the upper pin holder 20 is screwed, and a mounting hole (not shown) to the vibrator are formed. The lower pin holder 60 is made of metal such as aluminum and is formed by a milling machine or the like.

【0020】次に、基板の測定について説明する。先
ず、測定する基板50を加振器に固定された下側ピンホ
ルダ60の位置決め部62に乗せる。次に、上側ピンホ
ルダ20を下側ピンホルダ60の上に乗せ位置決めされ
た基板50を挟み付け、固定ねじ45により上側ピンホ
ルダ20を下側ピンホルダ60にねじ止め固定する。次
に、加振器にて下側ピンホルダ60を振動させ、基板5
0に所定の振動を加えた状態で基板50に通電し電気的
性能を測定する。そして、必要に応じて調整を行う。
Next, the measurement of the substrate will be described. First, the substrate 50 to be measured is placed on the positioning portion 62 of the lower pin holder 60 fixed to the vibrator. Next, the upper pin holder 20 is placed on the lower pin holder 60, the positioned substrate 50 is sandwiched, and the upper pin holder 20 is screwed and fixed to the lower pin holder 60 by the fixing screw 45. Next, the lower pin holder 60 is vibrated by a shaker, and the substrate 5
With a predetermined vibration applied to 0, the substrate 50 is energized and the electrical performance is measured. Then, adjustment is made as necessary.

【0021】以上説明したように、本第2実施例におい
ても、第1実施例と同じように効率よく安定した電気的
測定ができる。また、プローブピン30を測定点のスル
ーホール53の上下両面より圧接させた状態で測定でき
るので、さらに測定の安定性が高くなる。
As described above, also in the second embodiment, it is possible to perform efficient and stable electrical measurement as in the first embodiment. Moreover, since the measurement can be performed with the probe pin 30 pressed against the upper and lower surfaces of the through hole 53 at the measurement point, the stability of the measurement is further enhanced.

【0022】[0022]

【発明の効果】以上説明したように本発明によれば、多
数枚綴りの基板に振動を加えた状態でも安定した電気的
性能の測定が可能となる。従って、電気的性能測定作業
の効率化が図れる。
As described above, according to the present invention, it is possible to stably measure the electrical performance even in a state where vibration is applied to a multi-sheet board. Therefore, the efficiency of the electrical performance measurement work can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例を示す基板測定装置の要部
断面図である。
FIG. 1 is a sectional view of an essential part of a substrate measuring device showing a first embodiment of the present invention.

【図2】本発明の第2実施例を示す基板測定装置の要部
断面図である。
FIG. 2 is a sectional view of an essential part of a substrate measuring apparatus showing a second embodiment of the present invention.

【図3】従来の基板測定装置の図で、(a)は基板測定
装置の構成を示す上面視図、(b)は側面図である。
3A and 3B are views of a conventional substrate measuring device, FIG. 3A is a top view showing the configuration of the substrate measuring device, and FIG. 3B is a side view.

【符号の説明】[Explanation of symbols]

10、70・・基板測定装置 20・・・・・上側ピンホルダ 30・・・・・プローブピン 31・・・・・ピン 32・・・・・ピン先端テーパー部 33・・・・・スリーブ 34・・・・・ばね 35・・・・・リード線 40・・・・・下側基板ホルダ 41・・・・・基板位置決め部 400・・・・絶縁体 50・・・・・基板 51・・・・・導体 53・・・・・スルーホール 60・・・・・下側ピンホルダ 62・・・・・基板位置決め固定部 10, 70 ... Board measurement device 20 ... Upper pin holder 30 ... Probe pin 31 ... Pin 32 ... Pin tip taper portion 33 ... Sleeve 34 ...・ ・ ・ Spring 35 ・ ・ ・ ・ ・ Lead wire 40 ・ ・ ・ Lower board holder 41 ・ ・ ・ Board positioning part 400 ・ ・ ・ ・ Insulator 50 ・ ・ ・ Board 51 ・ ・ ・..Conductor 53..through hole 60..lower pin holder 62..board positioning fixing part

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 プリント配線基板に設けられたテストパ
ターンにプローブピンを圧接し、前記基板の電気的特性
を測定する基板測定装置において、 前記プローブピンを当接方向へ弾性的に付勢する付勢手
段を有し、 前記プローブピンの先端部を、前記プリント配線基板に
設けられたスルーホールからなるテストパターンに挿入
し弾性的に当接させたことを特徴とする基板測定装置。
1. A substrate measuring device for measuring the electrical characteristics of a substrate by press-contacting the probe pin with a test pattern provided on a printed wiring board, wherein the probe pin is elastically biased in the contact direction. A substrate measuring device having a biasing means, wherein a tip portion of the probe pin is inserted into a test pattern formed of a through hole provided on the printed wiring board and elastically brought into contact therewith.
【請求項2】 前記プローブピンを前記スルーホールの
両面より弾性的に当接させるようにしたことを特徴とす
る請求項1記載の基板測定装置。
2. The substrate measuring device according to claim 1, wherein the probe pin is elastically brought into contact with both sides of the through hole.
JP7228050A 1995-09-05 1995-09-05 Board measuring apparatus Withdrawn JPH0972939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7228050A JPH0972939A (en) 1995-09-05 1995-09-05 Board measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7228050A JPH0972939A (en) 1995-09-05 1995-09-05 Board measuring apparatus

Publications (1)

Publication Number Publication Date
JPH0972939A true JPH0972939A (en) 1997-03-18

Family

ID=16870423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7228050A Withdrawn JPH0972939A (en) 1995-09-05 1995-09-05 Board measuring apparatus

Country Status (1)

Country Link
JP (1) JPH0972939A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004157121A (en) * 2002-11-01 2004-06-03 Suss Microtec Test Systems Gmbh Method and device for inspecting motion sensitive substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004157121A (en) * 2002-11-01 2004-06-03 Suss Microtec Test Systems Gmbh Method and device for inspecting motion sensitive substrate

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