JPH0943417A - Production of color filter - Google Patents

Production of color filter

Info

Publication number
JPH0943417A
JPH0943417A JP19503995A JP19503995A JPH0943417A JP H0943417 A JPH0943417 A JP H0943417A JP 19503995 A JP19503995 A JP 19503995A JP 19503995 A JP19503995 A JP 19503995A JP H0943417 A JPH0943417 A JP H0943417A
Authority
JP
Japan
Prior art keywords
black matrix
color filter
substrate
dried
carbon dispersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19503995A
Other languages
Japanese (ja)
Inventor
Masatoshi Yamaguchi
正利 山口
Yasushi Sugimoto
靖 杉本
Hidekuni Tomono
秀邦 伴野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP19503995A priority Critical patent/JPH0943417A/en
Publication of JPH0943417A publication Critical patent/JPH0943417A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a color filter in which a black matrix having uniform film thickness distribution without projection defects due to aggregated particles is formed by using a carbon dispersion liquid. SOLUTION: A glass substrate 101 is cleaned, dried and treated with hexamethyldisilazane, on which a positive photoresist is applied, exposed through a photomask and developed. A carbon dispersion liquid 104 is applied by spin coating method and dried. The substrate is dipped in an alkali peeling soln. to dissolve the resist, then unnecessary part is forcedly removed by water pressure. Then the substrate is dried and cured to form a black matrix 102. In order to remove projections 103, roll press method is used to complete a black matrix 102 having no projection defects.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、カラー液晶表示装
置に使用されるカラーフィルタの製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a color filter used in a color liquid crystal display device.

【0002】[0002]

【従来の技術】液晶ティスプレイ(以下LCDと略す)
は、薄型、小型、低消費電力などの特長を生かし、現
在、時計、電卓、TV、パソコン等の表示部に用いられ
ている。更に近年、カラーLCDが開発されOA・AV
機器を中心にナビゲーションシステム、ビュウファイン
ダーなど数多くの用途に使われ始めており、その市場は
今後、急激に拡大するものと予想されている。
2. Description of the Related Art Liquid crystal displays (hereinafter abbreviated as LCDs).
Utilizing features such as thinness, small size, and low power consumption, is currently used for display units such as watches, calculators, TVs, and personal computers. In recent years, color LCDs have been developed and OA / AV
It has begun to be used in many applications such as navigation systems and viewfinders, mainly in equipment, and the market is expected to expand rapidly in the future.

【0003】LCDをカラー表示させるためのカラーフ
ィルタは、図3に示すように格子状パターンのBM(ブ
ラックマトリックス)1が形成されたガラス板等の基板
2上に、R(赤)G(緑)B(青)からなるカラー画素
3(約100×100×2μm)を順次形成し、その上
に透明なオーバーコート層(OC)4形成したものであ
る。5は偏光板、6はITO電極である。
As shown in FIG. 3, a color filter for displaying an LCD in color is R (red) G (green) on a substrate 2 such as a glass plate on which a BM (black matrix) 1 having a grid pattern is formed. ) B (blue) color pixels 3 (about 100 × 100 × 2 μm) are sequentially formed, and a transparent overcoat layer (OC) 4 is formed thereon. 5 is a polarizing plate and 6 is an ITO electrode.

【0004】カラーLCDは、カラーフィルタ7をLC
D内部に設置し、バックライト光をカラーフィルタに透
過することによって表示画面をカラー化できる。8は配
向膜、9は液晶、10はシ−ル材、11はトップコ−ト
層、12はITO電極、13はガラス板等の基板、14
は偏光板である。
[0004] In the color LCD, the color filter 7 has an LC
D, the display screen can be colored by transmitting backlight light through a color filter. 8 is an alignment film, 9 is a liquid crystal, 10 is a seal material, 11 is a top coat layer, 12 is an ITO electrode, 13 is a substrate such as a glass plate, 14
Is a polarizing plate.

【0005】現在、カラーフィルタは主に染色法を用い
て製造されている。しかし、この方法はガラス基板上に
透明な感光性樹脂を塗布、乾燥、露光、現像によって画
素を形成後、染料を用いて染色しその後、混色防止層を
形成するといった工程を3回繰り返し行う必要があるた
め、工程数が多くコスト高となる。また、着色剤として
染料を用いているため、カラーフィルタの重要課題であ
る信頼性(耐候性・耐熱性)が劣るという欠点がある。
そこで、着色剤として顔料を用いたカラーフィルタがい
くつか提案されており、その中に電着法、印刷法、フォ
トリソ法(フォトリソグラフィー法)がある。
At present, color filters are mainly manufactured using a dyeing method. However, in this method, a step of forming a pixel by applying a transparent photosensitive resin on a glass substrate, drying, exposing, and developing, dyeing with a dye, and then forming a color mixing prevention layer is required to be repeated three times. Therefore, the number of steps is large and the cost is high. Further, since a dye is used as a coloring agent, there is a disadvantage that reliability (weather resistance and heat resistance), which is an important issue of a color filter, is inferior.
Therefore, some color filters using a pigment as a coloring agent have been proposed, among which are an electrodeposition method, a printing method, and a photolithography method (photolithography method).

【0006】しかし、電着法は電極パターンを形成する
必要があるため(1)パターンの自由度が少ない、
(2)コストが高い、また印刷法は(1)大型基板の位
置合わせが難しく解像度が低いため微細化の対応が困
難、(2)パターンの平坦性が劣る、などの問題があ
り、現状ではフォトリソ法が主流と考えられている。フ
ォトリソ法には、液状レジストとフィルムが考えられ
る。液状レジストは、感光性樹脂中に顔料を分散させた
ワニスをスピナーでガラス基板上に塗布、乾燥後、露
光、現像によってカラー画素が形成される。一方、フィ
ルムは、プリント板用感光性フィルムと同様にワニスを
フィルム化したものであり、基板にラミネート後、露
光、現像によってカラー画素が形成される。
However, the electrodeposition method requires the formation of an electrode pattern. (1) The degree of freedom of the pattern is small.
(2) The cost is high, and the printing method has problems such as (1) it is difficult to align a large substrate and the resolution is low, so it is difficult to cope with miniaturization, and (2) the flatness of the pattern is poor. The photolithography method is considered to be the mainstream. For photolithography, liquid resists and films are contemplated. In the liquid resist, color pixels are formed by applying a varnish in which a pigment is dispersed in a photosensitive resin on a glass substrate with a spinner, drying, exposing, and developing. On the other hand, the film is a varnish formed into a film like the photosensitive film for printed boards, and after being laminated on a substrate, color pixels are formed by exposure and development.

【0007】[0007]

【発明が解決しようとする課題】従来液晶用カラーフィ
ルタのブラックマトリクス(BM)にはクロムなどの金
属薄膜が適用されているが、反射率が高いため、視認性
が悪い、真空蒸着法で成膜するためコストが高いなどの
問題があった。この問題を解決するため、カーボンなど
の黒色材料を樹脂に分散させたカーボン分散液が検討さ
れている。しかしながら、カーボン粒子の平均粒子径が
0.1μmのものを20%程度分散させているため、カー
ボン粒子が凝集し、塗膜にした時に数μmの突起となり
不良となる。この突起がブラックマトリクスに存在する
とカーボン自体導電性を有するため液晶パネルに組み立
てた時対向電極である透明電極と接触し、短絡してしま
う問題があった。本発明はこの突起を除去し短絡不良を
防止するものである。
Conventionally, a metal thin film of chromium or the like is applied to the black matrix (BM) of a color filter for liquid crystal, but since the reflectance is high, the visibility is poor and the vacuum evaporation method is used. Since the film is formed, there are problems such as high cost. In order to solve this problem, a carbon dispersion liquid in which a black material such as carbon is dispersed in a resin has been studied. However, the average particle size of carbon particles is
Since about 20% of 0.1 μm particles are dispersed, the carbon particles agglomerate to form protrusions of several μm when formed into a coating film, which is unsatisfactory. If the protrusions are present in the black matrix, the carbon itself has conductivity, and thus when assembled into a liquid crystal panel, there is a problem that the protrusions come into contact with a transparent electrode which is a counter electrode and cause a short circuit. The present invention removes this protrusion to prevent a short circuit defect.

【0008】[0008]

【課題を解決するための手段】本発明は、透明基板上に
規則的に配列された遮光層と着色画素を形成するカラー
フィルタの製造法に於て、遮光層を形成した透明基板を
プレスする工程を付与した事を特徴とするカラーフィル
タの製造法である。すなわち、本発明はプレスで押し潰
すことにより、突起を除去するようにしたものである。
SUMMARY OF THE INVENTION The present invention is a method of manufacturing a color filter in which a light-shielding layer and colored pixels arranged regularly on a transparent substrate are formed, and the transparent substrate on which the light-shielding layer is formed is pressed. It is a method of manufacturing a color filter, which is characterized by adding steps. That is, in the present invention, the protrusions are removed by crushing with a press.

【0009】[0009]

【発明の実施の形態】プレス法としてはロールプレス、
定盤によるプレスいずれでもよいが、作業性を考慮する
とロールプレスが望ましい。図1はロールプレスにより
遮光層の突起を除去する方法を示すもので、101は基
板、102は遮光層であるブッラクマトリックス、10
3は突起、104は鉄ロ−ルである。図2は定盤プレス
により遮光層の突起を除去する方法を示すもので、10
5は定盤である。プレス工程はブラックマトリクス形成
後に行っても良く、カーボン分散液を塗布、乾燥した後
に行っても良い。
BEST MODE FOR CARRYING OUT THE INVENTION As a pressing method, a roll press,
Either a press using a surface plate may be used, but a roll press is preferable in consideration of workability. FIG. 1 shows a method of removing protrusions of a light shielding layer by roll pressing, 101 is a substrate, 102 is a black matrix as a light shielding layer, 10
3 is a protrusion and 104 is an iron roll. FIG. 2 shows a method of removing the protrusions of the light shielding layer by a platen press.
5 is a surface plate. The pressing step may be performed after the black matrix is formed, or after the carbon dispersion is applied and dried.

【0010】[0010]

【実施例】カーボン分散液として、日立粉末冶金製ブラ
ウン管用ブラックマトリクス材料GA66MAを適用
し、形成法はリフトオフ法によった。まず透明基板とし
てコーニング社製#7059ガラス基板縦200mm、
横300mm、厚さ1.1mmサイズのものを使用し
た。このガラス基板をアセトンの超音波法などで洗浄
し、乾燥する。次にフォトレジストとガラス基板の密着
性をあげるためガラス基板の表面をヘキサメチルジシラ
ザンで処理する。次にシップレイ社製ポジ型フォトレジ
ストAZー1350をスピナー法により厚み1.0μm
となるように塗布し90℃20分のプリベークを行う。
次にフォトマスクを介して100mj/cm2露光し、
アルカリ現像液で現像する。次にGA66MAスピナー
法で700rpm20秒塗布し、送風乾燥機にて100
℃5分乾燥して膜厚0.6μmの厚みを得る。次にアル
カリ剥離液に基板を漬けレジストをまず溶解する。次に
1.5kg/cm2の水圧で強制的に不要部分を除去
し、乾燥硬化してブラックマトリクスが完成する。この
ままでは、ブラックマトリクス部に数μmの突起が存在
するため使用できない。本実施例ではこの突起を除去す
るのにロールプレス法を適用した。ロールには150φ
で研磨された鉄ロールを用い、シリンダー圧5kg/c
m2、搬送速度1m/minでプレスした。その結果、
突起高さ平均3.6μm、σ1.4μmであったのが突
起高さ平均1.5μm、σ0.25μmと低減できた。
Example As the carbon dispersion, a black matrix material GA66MA for cathode ray tubes manufactured by Hitachi Powder Metallurgy was applied, and the forming method was a lift-off method. First, as a transparent substrate, Corning # 7059 glass substrate length 200 mm,
A size of 300 mm in width and 1.1 mm in thickness was used. The glass substrate is washed with an ultrasonic method using acetone and dried. Next, the surface of the glass substrate is treated with hexamethyldisilazane in order to improve the adhesion between the photoresist and the glass substrate. Next, a positive photoresist AZ-1350 manufactured by Shipley Co., Ltd. was applied to a thickness of 1.0 μm by a spinner method.
And prebaking at 90 ° C. for 20 minutes.
Next, 100 mj / cm2 exposure through a photomask,
Develop with an alkaline developer. Next, the GA66MA spinner method is applied at 700 rpm for 20 seconds, and the blast dryer is used for 100
Drying at 5 ° C. for 5 minutes gives a thickness of 0.6 μm. Next, the substrate is immersed in an alkaline stripping solution to dissolve the resist first. Next, the unnecessary portion is forcibly removed with a water pressure of 1.5 kg / cm 2, and the material is dried and cured to complete the black matrix. As it is, it cannot be used because the projection of several μm exists in the black matrix portion. In this embodiment, a roll pressing method is applied to remove this protrusion. 150φ for roll
Cylinder pressure 5kg / c using iron roll polished by
It was pressed at m2 and a conveying speed of 1 m / min. as a result,
The average protrusion height was 3.6 μm and σ1.4 μm, but the average protrusion height could be reduced to 1.5 μm and σ0.25 μm.

【0011】[0011]

【発明の効果】本発明に於いては、カ−ボン分散液を使
用し、凝集粒子による突起不良がなく及び膜厚分布の均
一なBMを形成することができる。
According to the present invention, a carbon dispersion can be used to form a BM having no protrusion defect due to agglomerated particles and having a uniform film thickness distribution.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のロ−ルプレス法を示す側面図。FIG. 1 is a side view showing a roll pressing method of the present invention.

【図2】本発明の定盤プレス法を示す側面図。FIG. 2 is a side view showing a surface plate pressing method of the present invention.

【図3】液晶ティスプレイの断面図。FIG. 3 is a sectional view of a liquid crystal display.

【符号の説明】[Explanation of symbols]

1.BM(ブラックマトリックス) 2.ガラス基板 3.カラー画素 4.オーバーコート層(OC) 5.偏光板 6.ITO電極 7.カラーフィルタ 8.配向膜 9.液晶 10.シ−ル材 11.トップコ−ト層 12.ITO電極 13.ガラス基板 14.偏光板 101.基板 102.ブッラクマトリックス 103.突起 104.鉄ロ−ル 105.定盤 1. 1. BM (black matrix) Glass substrate 3. Color pixels 4. 4. Overcoat layer (OC) Polarizing plate 6. ITO electrode 7. Color filter 8. Alignment film 9. Liquid crystal 10. Seal material 11. Top coat layer 12. ITO electrode 13. Glass substrate 14. Polarizing plate 101. Substrate 102. Black matrix 103. Protrusion 104. Iron roll 105. Surface plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 透明基板上に規則的に配列された遮光層
と着色画素を形成するカラーフィルタの製造法に於て、
遮光層を形成した透明基板をプレスする工程を付与した
ことを特徴とするカラーフィルタの製造法。
1. A method of manufacturing a color filter for forming light-shielding layers and colored pixels, which are regularly arranged on a transparent substrate, comprising:
A method of manufacturing a color filter, comprising a step of pressing a transparent substrate having a light shielding layer formed thereon.
【請求項2】 遮光層がカーボン粒子からなる請求項1
記載のカラーフィルタの製造法。
2. The light shielding layer is made of carbon particles.
A method for producing the described color filter.
JP19503995A 1995-07-31 1995-07-31 Production of color filter Pending JPH0943417A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19503995A JPH0943417A (en) 1995-07-31 1995-07-31 Production of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19503995A JPH0943417A (en) 1995-07-31 1995-07-31 Production of color filter

Publications (1)

Publication Number Publication Date
JPH0943417A true JPH0943417A (en) 1997-02-14

Family

ID=16334531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19503995A Pending JPH0943417A (en) 1995-07-31 1995-07-31 Production of color filter

Country Status (1)

Country Link
JP (1) JPH0943417A (en)

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