JPH09320792A - X-ray generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray generator using buffer gas for inhibiting scattering particles from a plasma X-ray source, capable of reducing, adhering and deposition of the scattering particles in convenient, relative to an X-ray extracting direction and capable of being used constantly for a long time as a result, even if plasma generation is long at a short time intervals. SOLUTION: An X-ray generator is constituted to irradiate a target member 401 in a pressure-reduced vacuum container 443 with an exciting energy beam 411, form a plasma 402, and extract and X-ray from the plasma 402 so that buffer gas is used to inhibit scattering particles to be radiated from the target member 401 and/or the plasma 402. In this case, the X-ray generator is provided with a scattering particle-inhibiting member 422 adjacent to or in the vicinity of a solid angle area 412, equivalent to a range in which the X-ray is to be extracted and a scattering particle dispersion inhibiting member 433, having a movable part 432 that can pass through the solid angle area 412.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray
The present invention relates to an X-ray generator suitable for use in an X-ray apparatus such as an X-ray microscope and an X-ray analyzer.

[0002]

2. Description of the Related Art When a laser beam (an example of an excitation energy beam) is focused on a target member placed in a depressurized vacuum container and irradiated, the target member is rapidly turned into plasma, and the plasma emits a very bright light. It is known that high X-rays are radiated (emitted) (produce X-rays) (for example, such an X-ray source is LPX: Laser-Plasma X-raysour).
called ce).

With the generation of X-rays, high-speed scattered particles of electrons and ions from the plasma, and scattered particles of member material from the target member (for example, gasified material, ionized material, small pieces of material, etc.) ) Is released and scattered in the vacuum container (hereinafter, collectively referred to as scattered particles). Such scattered particles can form a clean optical surface (for example, X
This is a big problem because it collides with the surface of the linear optical element and damages them, or adheres and deposits to deteriorate or change the function and characteristics.

In order to solve this problem, according to the conventional method, a thin film made of a substance having a high X-ray transmission property (for example, Be) (hereinafter referred to as scattered particle blocking) is provided between the X-ray source and the cleaning optical surface. A thin film or an X-ray extraction filter) was installed and shielded to prevent scattered particles from reaching the clean optical surface. As another method, a gas having a low atomic number having a high X-ray transmittance (for example, He gas) is filled in the vacuum container, or a gas flow of the gas is formed so that the scattered particles are gasified. The molecules were made to collide with each other to prevent scattered particles (Japanese Patent Laid-Open No. 63-29255).
See 3).

When a gas is filled in the vacuum container, the particles scattered from the plasma or the target member are scattered with the gas molecules and eventually lose the energy when they are ejected.
It mixes into the movement of gas molecules. Then, it adheres to the surface or wall surface of the member in the vacuum container, or, when not only introducing the buffer gas but also exhausting it, it is exhausted together with the gas molecules by the vacuum pump.

By the way, by installing a thin film for preventing scattered particles, it is possible to prevent the scattered particles from adhering to and depositing on the clean optical surface.
Instead, flying particles adhere to the flying particle blocking thin film,
Since they are deposited, there is a problem that the X-ray transmittance of the scattered particle blocking thin film gradually decreases (the X-ray intensity used in the X-ray extraction direction decreases). In addition, X in the vacuum container
In a method of preventing scattered particles by filling a low atomic number gas (buffer gas) having a high transmittance with respect to rays or by forming a gas flow of the gas, scattered particles can be effectively prevented. There is a problem that it does not mean.

For example, when the target member is tantalum, in a sufficiently evacuated vacuum container (pressure less than 10 Pa), many scattered particles are distributed in the direction normal to the surface of the target member. When a buffer gas for preventing scattered particles is introduced into the vacuum container, in the direction where many scattered particles are emitted, the scattered particles decrease due to scattering by gas molecules, but the scattered particles are scattered before the gas introduction. The scattered particles also scatter in the direction of less emission.

Therefore, when the buffer gas is used to prevent the scattered particles, the distribution of the scattered particles in the emission direction becomes uniform. This indicates that the effect of introducing gas is smaller in the direction in which the emission of scattered particles is smaller than that in the direction in which the emission of scattered particles is large, or is rather the opposite effect. Extraction of X-rays is generally performed in the direction in which the emission of scattered particles is small, and in the X-ray extraction direction in which the emission of scattered particles is small, the effect of introducing gas may be small or may be the opposite effect. This is a big problem.

Particularly, when a scattered particle control member for controlling the directional distribution of the scattered particle emission amount near the plasma and for reducing the emitted particle emission amount in the X-ray extraction direction is provided. In regard to the X-ray extraction direction, it is a big problem that the effect of introducing gas is small, or rather has the opposite effect. Therefore, in order to solve the problem that occurs when a buffer gas is used to block scattered particles, the scattered particle blocker is placed adjacent to or close to the solid angle region through which the extracted X-rays pass so as not to block it. It has been proposed by the same applicant as the present application that the scattered particles be prevented by disposing the member (Japanese Patent Application No.
-127600).

[0010]

For example, as shown in FIG. 6, a scattering particle blocking member 622 is provided adjacent to or in close proximity to a solid angle region 612 through which X-rays to be extracted do not block. When a buffer gas is introduced in the conventional X-ray generator, among the scattered particles generated by the generation of the plasma 602, those flying inside the member 622 lose energy due to collision with gas molecules, and inside the member 622. After drifting, it is prevented by adhering to the member 622.

Here, if the time interval of generation of the plasma 602 is long, the floating particles are diffused until the next plasma is generated, but if the plasma is generated at a short time interval for a long time. Since the scattered particles inside the member 622 cannot sufficiently diffuse, the member 6
The density of scattered particles floating with gas molecules inside 22 is increased.

As a result, the number of scattered particles reaching and adhering to the X-ray extraction window (an example of a clean optical surface) 641 increases, and the X-ray transmittance of the X-ray extraction window 641 decreases due to the adhesion of the scattered particles. There is a problem that it cannot be used stably as a radiation source. That is, even if the vacuum container is filled with the buffer gas and the scattered particle blocking member is provided adjacent to or in close proximity to the solid angle region through which the X-ray to be extracted passes, the generation of plasma is long at short time intervals. There is a problem that a sufficient effect of preventing scattered particles cannot be obtained over the time.

The present invention has been made in view of the above problems, and is an X-ray generator that uses a buffer gas to prevent scattered particles from a plasma X-ray source, and plasma is generated at short time intervals. It is an object of the present invention to provide an X-ray generator that can be used stably for a long period of time by reducing the adhesion and deposition of scattered particles that are unfavorable in the X-ray extraction direction even over a long period of time.

[0014]

Accordingly, the present invention first provides a method of forming a plasma by irradiating a target member in a decompressed vacuum vessel with an excitation energy beam to form a plasma,
An X-ray generator for extracting a line, the target member and / or
Alternatively, in an X-ray generator that uses a buffer gas to prevent scattered particles emitted from the plasma, a scattered particle blocking member is provided adjacent to or in proximity to a solid angle region corresponding to a range from which the X-rays are taken out, and An X-ray generator (claim 1), characterized in that a scattered particle diffusion / blocking member having a movable part capable of passing through the solid angle region is provided.

A second aspect of the present invention is an X-ray generator for irradiating an excitation energy beam to a target member in a vacuum container which has been decompressed to form plasma and extracting X-rays from the plasma. A member and / or an X-ray generator that uses a buffer gas to block scattered particles emitted from the plasma, wherein the member has an opening through which the excitation energy beam passes and another opening through which the X-rays pass. And a scattering particle shielding member for shielding scattering particles emitted from the target member and / or the plasma is provided in the vicinity of the target member and the plasma, and in a solid angle region corresponding to a range for extracting the X-rays. It is characterized in that a scattered particle blocking member is provided adjacent to or in the vicinity thereof, and further, a scattered particle diffusing / blocking member having a movable portion capable of passing through the solid angle region is provided. X-ray generator according to (Claim 2) "
I will provide a.

The third aspect of the present invention is that "the buffer gas is controlled to be introduced and discharged so that the pressure inside the vacuum container is within a predetermined pressure range. X-ray generator (claim 3) ". A fourth aspect of the present invention is characterized in that a mechanism for introducing a buffer gas into the solid angle region and discharging the buffer gas together with scattered particles from the solid angle region is further provided. X-ray generator (claim 4).

Fifthly, the present invention relates to a "scattered particle control member for controlling the directional distribution of the amount of scattered particles emitted from the target member and / or the plasma, in the direction of extracting the X-rays. The scattered particle control member for reducing the emission amount of scattered particles is further provided.
X-ray generator according to claim 4 (claim 5). A sixth aspect of the present invention is that "cooling means for cooling the scattered particle blocking member is further provided.
An X-ray generator according to claim 6 is provided.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION In an X-ray generator that uses a buffer gas to prevent particles scattered from a plasma X-ray source according to the present invention, it is adjacent to or close to a solid angle region corresponding to the range for extracting the X-rays. And a scattering particle diffusion / blocking member for diffusing and / or blocking the scattering particles (claim 1). .

Therefore, even when the plasma is generated at short time intervals for a long time, inconvenient scattered particles are deposited or deposited (adhered to the scattered particle blocking thin film, the clean optical surface, etc.) in the X-ray extraction direction. (Deposition) can be reduced. Further, in the X-ray generator using the buffer gas to prevent the scattered particles from the plasma X-ray source of the present invention,
The target is a member having an opening through which the excitation energy beam passes and another opening through which the X-rays pass, and the scattered particle shielding member for shielding scattered particles emitted from the target member and / or the plasma. A member having a movable part that is provided in the vicinity of the member and the plasma and that is adjacent to or close to the solid angle region corresponding to the range for extracting the X-rays, and that further has a movable portion that can pass through the solid angle region. Therefore, a scattered particle diffusion / blocking member for diffusing and / or blocking the scattered particles is provided (claim 2).

Therefore, even when the plasma is generated for a short period of time and for a long period of time, inconvenient scattered particles are deposited and deposited (adhered to a scattered particle blocking thin film, a clean optical surface, etc.) in the X-ray extraction direction. (Deposition) can be further reduced. Here, as an example of the conventional scattered particle blocking member, a member having an opening equal to (or approximately equal to) the cut surface of the solid angle region corresponding to the range for extracting X-rays is provided adjacent to or close to the region. Think about the case.

Even if such a scattered particle blocking member is provided adjacent to the solid angle region, there is no effect on the X-rays reaching the opening equal to the cut surface of the solid angle region, and the amount of the extracted X-rays changes. do not do. On the other hand, most of the scattered particles that try to enter the solid angle region are blocked by the scattered particle blocking member, so that it is possible to reduce the inconvenient deposition and accumulation of the scattered particles in the X-ray extraction direction. it can.

The flying particle blocking member which brings about such an effect is only required to have a shape capable of blocking the flying particles from entering the solid angle region, and is not limited to a plate-shaped member having an aperture. Absent. Strictly speaking, the amount of X-ray light extracted decreases, but the above effect can be obtained even if the scattered particle blocking member is provided in the solid angle region corresponding to the range for extracting X-rays. For example, there is a case where a very thin plate is provided along the optical path on the optical path of X-rays in the solid angle region.

By the way, as described above, even when the buffer gas is filled in the vacuum container and the scattered particle blocking member is provided adjacent to or in proximity to the solid angle region through which the X-ray to be extracted passes, plasma is not generated. If the time interval is short and the time is long, there is a problem that a sufficient effect of preventing scattered particles cannot be obtained. Therefore, in the X-ray generator of the present invention, by providing a scattered particle diffusion / prevention member that is a member having a movable portion that can pass through a solid angle region and that diffuses and / or prevents scattered particles, this problem is solved. Has been resolved.

FIG. 1 shows the arrangement of each member according to the X-ray generator (one example) of the present invention. In the X-ray generator shown in FIG. 1, a target material (an example of a target member) 101 is placed in a vacuum container filled with gas at an appropriate pressure, and an excitation energy beam 1 is generated in the vicinity of a plasma generation position.
A scattered particle shielding member 121, which is a member having an opening through which 11 passes and another opening through which X-rays pass, and which shields scattered particles emitted from the target material 101 and / or the plasma 102, is arranged.

Further, the scattered particle blocking member 1 adjacent to or close to the solid angle region 112 corresponding to the range for extracting X-rays.
22 is provided and further has a movable part 132 that can pass through the solid angle region, and diffuses and / or diffuses scattered particles.
Alternatively, a scattered particle diffusion / blocking member 133 for blocking is provided. Here, the scattered particle blocking member 122 has a duct shape for preventing scattered particles from colliding, adhering or accumulating on the X-ray extraction window (an example of a clean optical surface) 123 arranged in the solid angle region 112. It is a member and is provided so as to surround the solid angle region 112 and the X-ray extraction window 123.

Further, the scattered particle diffusion / prevention member 133 is
The blade has a shape (blade 232 and shaft 231) as shown in FIG. 2, and the blade (an example of a movable portion) 132 is configured to be rotatable about the shaft 131 as a rotation axis. In the X-ray generator shown in FIG. 1, most of the scattered particles emitted from the target material 101 and / or the plasma 102 are shielded by the scattered particle shielding member 121.

The scattered particles that have passed through the opening of the shielding member 121 and have entered the inside of the scattered particle blocking member 122 lose their energy while changing their traveling directions due to scattering with the buffer gas molecules, and eventually in the movement of the gas molecules. And drifts in the inner space of the member 122. Then, the scattered particles floating in the space are the blades 1 rotating around the axis 131.
Since it adheres to 33 (scattering particle blocking effect) or is ejected by the motion of the scattering particle diffusing / blocking member 133 (scattering particle diffusing effect), the scattered particle density in the inner space of the blocking member 122 is kept low.

Then, the scattered particles thus scraped off are adsorbed to the blocking member 122. That is, the amount of scattered particles reaching the X-ray extraction window 103 due to the action of the members 122, 133 or the action of the members 121, 122, 133 is greatly reduced as compared with the case where these members are not provided. To do. As described above, according to the X-ray generator of the present invention, even when plasma is generated at short time intervals and for a long time, the adhesion and deposition of flying particles, which is inconvenient in the X-ray extraction direction, can be reduced, and As a result, the device can be used stably for a long time (claims 1 and 2).

Scattered particle diffusion / prevention member 1 according to the present invention
Since the movable part of 33 (for example, the blade 132) passes through the solid angle region 112 for extracting the X-ray, if the movable part is in the solid angle region 112 when the X-ray is generated, the X-ray is emitted. It blocks and reduces the amount of X-ray light. So X
When lines are generated, scattered particle diffusion / prevention member 1
It is preferable to control the cycle of the operation (for example, rotation) of the movable portion (for example, the blade 132) so that the movable portion 33 does not exist in the solid angle region 112.

For example, it is not necessary for the movable part of the member 133 to pass through the solid angle region 112 every time plasma is generated, and the density of scattered particles in the space inside the scattered particle blocking member 122 is high. Several times before it becomes
Only once every tens of times. If the decrease in the amount of X-ray light can be allowed to some extent, the plasma generation time and the member 13
The movable (eg, rotation) periods of 3 may not be correlated.
This is because, when there is a correlation between the plasma generation time and the movable period of the member 133, there is a possibility that X-rays in the same region will always be blocked.

In an application such as an X-ray exposure apparatus which requires irradiation of X-rays a plurality of times, the influence thereof is further reduced. The movable part of the scattered particle diffusion / blocking member 133 according to the present invention (for example,
It is preferable that the blades 132) can pass through a region (space) as wide as possible in the solid angle region 112 from which X-rays are extracted, in order to increase the effect of diffusing and preventing scattered particles.
For example, the shape shown in FIG. 2 is preferable to the shape shown in FIG.

The buffer gas according to the present invention is introduced so that the inside of the vacuum container has a predetermined pressure range so that an appropriate amount of X-rays to be extracted or an appropriate effect of preventing scattered particles can be obtained. The discharge is preferably controlled (claim 3). The buffer gas according to the present invention is preferably one that absorbs a small amount of X-rays of a wavelength to be used (taken out), and for example, X-rays to be used among gases such as helium, oxygen, nitrogen, air, argon, and krypton. It is sufficient to select a material that absorbs less.

In the X-ray generator of the present invention, the buffer gas is introduced into the solid angle region where X-rays are taken out, and
It is preferable to further provide a mechanism for discharging the buffer gas together with the scattered particles from within the solid angle region (claim 4). With this configuration, the scattered particles in the solid angle region where the X-rays are extracted by the introduction of the buffer gas can be diffused, and the buffer gas can be discharged to the outside from the region together with the diffused scattered particles. As for the above, it is possible to further reduce the inconvenient adhesion and deposition of scattered particles.

In the X-ray generator of the present invention, the scattered particle control member controls the directional distribution of the amount of scattered particles emitted from the target member and / or the plasma, and the scattered particles in the direction of extracting X-rays. It is preferable to further provide a scattered particle control member for reducing the amount of emitted particles because the scattered particle blocking effect in the X-ray extraction direction is increased (claim 5).

As a material used for such a scattered particle control member, for example, a material having a high melting point or a high hardness such as tantalum, tungsten, diamond, ceramic, stainless steel is preferable. This is because the scattered particle control member is arranged at a position very close to the plasma, so that the emission of the member material due to collision of ions and electrons flying from the plasma with the member surface is prevented. That is, when the material of the member is released, the same inconvenient adhesion and deposition as the scattered particles occur, and this is prevented.

It is preferable to further provide a cooling means for cooling the scattered particle blocking member according to the present invention, since the member easily adsorbs the scattered particles and the blocking effect is increased (claim 6). Alternatively, the surface of the scattered particle blocking member is processed (for example, frosted) so that the scattered particles can be easily adsorbed.
It is also preferable to do so. The shape of the target member according to the present invention is preferably a rollable tape shape, but may be a plate shape, a bulk shape, a column shape, or a fine particle shape. Further, the material of the target member is preferably Ta, W or the like.

Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.

[0038]

EXAMPLE FIG. 4 shows a schematic partial configuration diagram of an X-ray generator of this example in which tape-shaped tantalum is used as a target member and X-rays having a wavelength of 14 nm are extracted and used. The YAG laser light (an example of an excitation energy beam) 411 passes through the entrance window 442 while being condensed by the condenser lens 445, enters the vacuum container 443, and is incident on the surface of the tantalum target (an example of a target member) 401. Collected.

The tantalum target 401 has a thickness of 15 μm.
When the plasma is generated, the reel 403 is rotated by a driving means (for example, a motor, not shown) so that the laser light is not repeatedly focused on the same position on the tape. It is winding up. The moving speed of the tantalum tape is the speed at which the tape moves more than the diameter of the holes generated in the tantalum tape due to the plasma generation, from the time when one plasma is generated until the laser light for generating the next plasma is incident. is there.

YA on the tantalum tape target 401
The G laser is incident and condensed at an incident angle of 45 degrees, and the X-ray generated from the generated plasma 402 is an X-ray extraction window (clean optical surface) provided in the direction of 45 degrees on the opposite side to the YAG laser. (Example) It is led from 441 to the X-ray optical system. In the vicinity of the plasma 402, a scattered particle shielding member 421 having openings through which the YAG laser 411 incident on the target 401 and the X-rays to be extracted can pass is provided, and the target 401 and / or the plasma 4 is provided.
Most of the scattered particles emitted from 02 are shielded by the scattered particle shielding member 421.

Further, from the vicinity of the X-ray extraction window of the shielding member 421 to the vicinity of the X-ray extraction window, a scattered particle blocking member 422 is provided adjacent to or in proximity to the solid angle region 412 corresponding to the X-ray extraction range. There is. Here, the scattered particle blocking member 422 is a duct-shaped member for preventing the scattered particles from colliding with, adhering to, or accumulating on the X-ray extraction window 441 arranged in the solid angle region 412. And the X-ray extraction window 441.

Kr gas as a buffer gas is introduced into the vacuum container 443 and is exhausted at the same time.
It is controlled to maintain the pressure of orr. Kr gas has the same transmittance as He at the same pressure for X-rays having a wavelength of 14 nm. The scattered particles, which are not shielded by the shielding member 421 and have passed through the opening and have entered the inside of the scattered particle blocking member 422, lose their energy while changing the traveling direction due to scattering with the buffer gas molecules, and eventually the gas molecules. It mixes into the movement and drifts inside the member 422.

A space 444 adjacent to the inner space of the member 422 is a member having vanes (an example of a movable part) 432 that can pass through the solid angle region 412, and scatters for scattering and / or blocking scattered particles. Particle diffusion / blocking member 4
33 are provided. The member 433 has a shape as shown in FIG.
2 has a mechanism (not shown) for rotating.

Plasma 402 has a repetition frequency of 10 Hz
The blades 432 of the member 433 rotate 5 times per second with the shaft 431 as the rotation axis. The member 433 has two blades 432, and the blades 432 pass through the solid angle region 412 for extracting X-rays between the generation of one plasma and the generation of the next plasma. become.

Here, the oscillation timing of the YAG laser 411 is controlled in correlation with the position of the blade 432 of the member 433, and when the blade 432 is in the position of blocking the X-ray (in the solid angle region), the plasma is generated. Is controlled so as not to generate. Scattered particles that lose their energy due to scattering with gas molecules and float in the inner space of the member 422 are
The particles are attached to the blades 432 rotating around 31 (scattering particle blocking effect) or are scraped out by the rotating blades 432 (scattering particle diffusing effect), so that the scattering particle density in the inner space of the member 422 is kept low. .

In the space 444 provided with the member 433 and the space inside the scattered particle blocking member 422, the vacuum container 443 is provided.
Since Kr gas is introduced and exhausted separately from the whole, the scattered particles scraped out by the rotating blade 432 are quickly diffused and adsorbed to the blocking member 422. Therefore, the amount of scattered particles reaching the X-ray extraction window 441 is significantly reduced.

As described above, according to the X-ray generator of the present embodiment, even when plasma is generated for a short period of time and for a long period of time, it is possible to reduce the attachment and deposition of scattered particles which are unfavorable in the X-ray extraction direction. As a result, the device can be used stably for a long time. In this embodiment, the member 433 is formed into a shape as shown in FIG. 2 and is rotated five times around the axis in one second, but the shape and the speed of movement are not limited to this.

The number of blades is not limited to one (two), and as shown in FIG. 5, the scattered particle diffusion / prevention member 533 having a plurality of pairs of blades positions each pair of blades. The density of scattered particles in each space may be reduced.

[0049]

As described above, according to the X-ray generator of the present invention, even when the plasma is generated for a short time and for a long time, the adhesion of scattered particles, which is inconvenient in the X-ray extraction direction, is caused. Therefore, the deposition can be reduced, and as a result, the device can be used stably for a long time.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing each member of an X-ray generator (example) of the present invention.

FIG. 2 is a schematic perspective view showing an example of a scattered particle diffusion / blocking member according to the present invention.

FIG. 3 is a schematic perspective view showing an example of an unfavorable shape as the scattered particle diffusion / prevention member according to the present invention.

FIG. 4 is a schematic configuration diagram of an X-ray generator according to an embodiment.

FIG. 5 is a schematic configuration diagram of an X-ray generator according to another embodiment.

FIG. 6 is a schematic configuration diagram of a conventional X-ray generator.

[Explanation of symbols]

101, 401, 501, 601 Target member 102, 402, 502, 602 Plasma 111, 411, 511, 611 Excitation laser beam (an example of excitation energy beam) 112, 412, 512, 612 Solid equivalent to the range for extracting X-rays Corner area 121,421,521,621 Scattered particle blocking member 122,422,522,622 Scattered particle blocking member 131,231,331,431,531 Axis (an example of constituents of scattered particle diffusing / blocking member) 132,232 , 332, 432, 532 Blades (an example of movable part of scattered particle diffusion / blocking member) 133, 433, 533 Scattered particle diffusion / blocking member 123, 441, 541, 641 X-ray extraction window (an example of clean optical surface) 442 , 542, 642 Incident window 443, 543, 643 Vacuum container 444, 5 4 adjacent to the inner space of the scattering particles blocking member space 445,545,645 YAG laser condenser lens than on

Claims (6)

[Claims] 1. An X-ray generator for irradiating an excitation energy beam to a target member in a vacuum container, which is decompressed, to form plasma, and extracting X-rays from the plasma, wherein the target member and / or the plasma In an X-ray generator that uses a buffer gas to block emitted particles, a particle scattering member that is adjacent to or close to a solid angle region corresponding to a range for extracting the X-rays is provided, and the solid angle region is provided. An X-ray generator characterized in that a scattered particle diffusing / blocking member having a movable portion capable of passing through is provided. 2. An X-ray generator for irradiating an excitation energy beam to a target member in a vacuum container that has been decompressed to form plasma, and extracting X-rays from the plasma, wherein the target member and / or the plasma An X-ray generator that uses a buffer gas to prevent emitted scattered particles, which is a member having an opening through which the excitation energy beam passes and another opening through which the X-rays pass, and the target member and / Or a scattered particle shielding member for shielding scattered particles emitted from the plasma is provided in the vicinity of the target member and the plasma, and the scattered particle is adjacent to or close to a solid angle region corresponding to the range for extracting the X-rays. An X-ray generation device, characterized in that a member is provided, and further, a scattered particle diffusion / prevention member having a movable portion capable of passing through the solid angle region is provided. 3. The X-ray generator according to claim 1, wherein the buffer gas is controlled to be introduced and discharged so that the inside of the vacuum container has a predetermined pressure range. 4. The mechanism according to claim 1, further comprising a mechanism for introducing the buffer gas into the solid angle region and discharging the buffer gas together with the scattered particles from the solid angle region. X-ray generator. 5. A scattered particle control member for controlling the directional distribution of the emitted amount of scattered particles emitted from the target member and / or the plasma, and reducing the emitted amount of scattered particles in the X-ray extraction direction. The X-ray generator according to any one of claims 1 to 4, further comprising a scattered particle control member. 6. The X-ray generator according to claim 1, further comprising cooling means for cooling the scattered particle blocking member.