JPH09161991A - X-ray generating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sufficiently suppress collision, attachment and deposition of sputtering particles to an optical element installed in a vacuum vessel and satisfactorily prevent damage of the optical element and drop of its performance. SOLUTION: A target member 204 in a vacuum vessel 201 which is decompressed, is bombarded with an exciting energy beam 203 so that a plasma 205 is formed, and an X-ray 207 is taken out of the plasma 205. In this X-ray generating device, a duct 209 is provided to take in the sputtered particles 206 emitted by the target member 204 in the normal direction in that position of target member 204 which is irradiated with the energy beam 203. The duct 209 is connected with an evacuation device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is suitable for use in X-ray apparatuses such as X-ray microscopes, X-ray analyzers and X-ray exposure apparatuses.
The present invention relates to a line generator.

[0002]

2. Description of the Related Art An excitation energy beam (for example, a pulsed laser beam) is focused on a target material (target member) placed in a vacuum vessel, the target material is turned into plasma, and X-rays radiated from this plasma. In the X-ray source (hereinafter referred to as LPX) that extracts and uses the ions, in addition to the X-rays, ions and atoms of the target material from the plasma and the vicinity of the plasma,
Alternatively, small pieces (hereinafter referred to as scattered particles) are emitted.

These scattered particles collide with an optical element arranged in a vacuum container, particularly an optical element or an optical member (hereinafter collectively referred to as an optical element) arranged in the vicinity of plasma, and these optical elements are collided with these optical elements. It may be damaged or adhered to or deposited on the optical element to reduce the performance of the optical element (for example, reflectance or transmittance). The optical element includes, for example, a window for introducing laser light into the vacuum container, a lens for condensing the laser light (when the condensing element is placed in the vacuum container), and radiation from plasma. There are a mirror for reflecting X-rays, a filter for transmitting X-rays radiated from plasma, and a filter for cutting visible light.

In using the LPX, it is an important issue to prevent collision, adhesion and deposition of scattered particles on the optical element, and various prevention methods have been considered.
For example, by filling the vacuum container with gas, the speed of scattered particles is reduced and stopped by the collision of scattered particles with gas molecules,
The optical element is prevented from reaching the optical element or the amount of the optical element reaching the optical element is reduced.

[0005]

However, in the case of the method of filling the vacuum container with gas to prevent collision, adhesion and deposition of scattered particles on the optical element, the direction in which the optical element is originally placed is set. Particles emitted in a different direction from the above also diffuse due to a large number of collisions with gas molecules, and eventually collide with, adhere to, or accumulate on the optical element, preventing damage to the optical element and degrading performance. There is a problem that a sufficient effect of prevention cannot be obtained.

The present invention has been made in view of the above problems, and it is possible to sufficiently suppress the collision, adhesion, and deposition of scattered particles on an optical element arranged in a vacuum container. As a result, it is an object of the present invention to provide an X-ray generator capable of sufficiently preventing damage to an optical element and performance deterioration.

[0007]

Therefore, the first aspect of the present invention is to "generate X-rays by irradiating a target member in a depressurized vacuum container with an excitation energy beam to form plasma and extracting X-rays from the plasma. In the apparatus, there is provided a duct for taking in the scattered particles emitted from the target member, and at least a duct for taking in the scattered particles emitted in the normal direction of the excitation energy beam irradiation position of the target member is provided, and further inside the duct. An X-ray generator (claim 1), characterized in that a scattering member that scatters the scattered particles and / or a trapping member that traps the scattered particles are provided.

A second aspect of the present invention relates to an "X-ray generator for irradiating an excitation energy beam to a target member in a depressurized vacuum container to form plasma and extracting X-rays from the plasma. A duct for taking in scattered particles emitted from the device, and at least providing a duct for taking in scattered particles emitted in the normal direction of the excitation energy beam irradiation position of the target member, and connecting the duct to a vacuum exhaust device. An X-ray generator (claim 2) "is provided, and the present invention thirdly provides a" scattering member for scattering the scattered particles inside the duct, "
And / or an X-ray generator (claim 3) according to claim 2 provided with a capture member for capturing the scattered particles.

In a fourth aspect of the present invention, "the X-ray generator according to any one of claims 1 to 3, wherein a gas inlet for introducing gas into the vacuum container is provided in the vacuum container. 4) ”is provided. Further, the present invention is fifthly, "a window for introducing the excitation energy beam into the vacuum container,
And / or an optical element installed in the vacuum container,
An X-ray generator (claim 5) according to any one of claims 1 to 4, wherein separate ducts are provided to prevent the scattered particles from colliding, adhering or accumulating.

A sixth aspect of the present invention provides an "X-ray generator according to claim 5 (claim 6)", wherein a gas inlet is provided in the separate duct. Further, the present invention seventhly provides an “X-ray generator (claim 7) according to claim 5 or 6, wherein a baffle is provided in the separate duct”. In addition, an eighth aspect of the present invention is that "a scattered particle shielding member that shields the scattered particles is provided in the vicinity of the plasma, and the scattered particle shielding member has a first opening through which the excitation energy beam passes and the X-ray An X-ray generator (claim 8) according to any one of claims 1 to 7, wherein a second opening passing therethrough and a third opening through which particles scattered toward the inside of the duct pass are provided. To do.

The ninth aspect of the present invention is that "a scattered particle control member for controlling the directional distribution of the emitted amount of the scattered particles is provided in the vicinity of the plasma. Generator (claim 9) ". The tenth aspect of the present invention is that the “scattered particle control member has a shape that reduces the emitted amount of the scattered particles in the direction of extracting the X-rays and increases the emitted amount of the scattered particles toward the inside of the duct. An X-ray generator (claim 10) according to claim 9, characterized in that it has a portion.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION In the X-ray generator of the present invention, it is a duct for taking in scattered particles emitted from a target member, and at least in the normal direction of the irradiation position (that is, the direction in which the amount of scattered particles emitted is the largest). (1) is provided with a duct for taking in the scattered particles emitted to (1) and further provided with a scattering member and / or a trapping member inside the duct, or the duct is connected to a vacuum exhaust device. Therefore, the amount of scattered particles that are diffused and suspended in the vacuum container can be significantly reduced.

That is, in the X-ray generator of the present invention,
When a target member is irradiated with an excitation energy beam, scattered particles emitted in a predetermined solid angle range viewed from the excitation energy beam irradiation position of the target member, at least the normal direction of the irradiation position (that is, the scattered particle emission amount is The scattered particles emitted in the most direction) are emitted toward the inside of the duct and are taken into the duct.

When a scattering member is provided inside the duct, the scattered particles taken in are scattered by the scattering member, reflected many times inside the duct, and then captured inside the duct. Further, when a capturing member (for example, an elastic body such as rubber) is provided inside the duct, most of the scattered particles taken into the duct are captured inside the duct by the capturing member.

Further, when the duct is connected to a vacuum exhaust device, the scattered particles taken in the duct are discharged to the outside of the vacuum container by the vacuum exhaust device. Therefore, according to the X-ray generator of the present invention (claims 1 to 10), collision, adhesion, and deposition of scattered particles to an optical element arranged in a vacuum container, particularly to an optical element arranged in the vicinity of plasma, can be prevented. It is possible to sufficiently suppress it, and as a result, it is possible to sufficiently prevent damage to the optical element and performance deterioration.

Examples of such an optical element include, for example, a window for introducing an excitation energy beam (for example, a laser beam) into the vacuum container, a lens for condensing the excitation energy beam (the condensing element is inside the vacuum container). (When placed), there are mirrors for reflecting the X-rays radiated from the plasma, filters for transmitting the X-rays radiated from the plasma and cutting visible light, but are not limited to these. is not.

In the X-ray apparatus of the present invention, it is preferable to provide a gas introduction port for introducing gas into the vacuum container (Claim 4). Gas is introduced from such a gas introduction port to cause a collision between the scattered particles and the gas molecules by filling the gas in the vacuum container to stop the scattered particles or effectively reduce the speed thereof. be able to. The decelerated scattered particles are discharged to the outside of the vacuum container by being taken into the duct connected to the vacuum exhaust device and exhausted, or by being exhausted by the vacuum exhaust device connected to the vacuum container. To be done.

At this time, scattered particles emitted in a predetermined solid angle range viewed from the irradiation position of the excitation energy beam of the target member, at least in the normal direction of the irradiation position (that is, the direction in which the scattered particle emission amount is the largest). Since the emitted particles are emitted toward the inside of the duct, they are taken into the inside of the duct and discharged to the outside of the vacuum container by the vacuum exhaust device.

At this time, a gas flow is formed from the periphery of the plasma into the duct. Therefore, the scattered particles that are emitted or scattered outside the solid angle range and are decelerated by the collision with gas molecules are taken into the duct along the gas flow, and the vacuum container is evacuated by the vacuum exhaust device. It is discharged outside. That is, according to the X-ray apparatus (Claim 4) of the present invention, the velocity of the scattered particles is attenuated by the introduced gas, and the scattered particles are discharged to the outside of the vacuum container by the duct connected to the vacuum exhaust device. It is possible to increase the effect of suppressing the collision, adhesion and deposition of the scattered particles and the effect of preventing damage and performance deterioration of the optical element.

Further, in the X-ray apparatus of the present invention, scattered particles collide with, adhere to or accumulate on a window for introducing the excitation energy beam into the vacuum container and / or an optical element installed in the vacuum container. It is preferable to provide separate ducts for preventing the above-mentioned problems (Claim 5). By providing such a separate duct, it is possible to prevent flying particles, which are emitted or scattered outside the solid angle range and are floating or diffusing in the vacuum container, from colliding, adhering or accumulating on the window and / or the optical element. Therefore, it is possible to further increase the effect of preventing damage to the optical element and performance degradation.

Further, it is preferable that a gas inlet is provided in the separate duct (claim 6). By introducing the gas from the gas introduction port into the different duct, the scattered particles that have entered the different duct are decelerated and stopped due to collision with the introduced gas molecules, and are discharged to the outside of the different duct. Then, the discharged scattered particles are taken out of the vacuum container by being taken into a duct connected to the vacuum exhaust device and exhausted, or by being exhausted by a vacuum exhaust device connected to the vacuum container. Is discharged to.

That is, according to the X-ray apparatus of the present invention (claim 6), the probability that the scattered particles that have entered the separate duct will collide with, adhere to, or be deposited on the optical element is very low, so that the optical element is damaged. Also, the effect of preventing performance degradation can be further increased. Moreover, it is preferable to provide a baffle in the separate duct (claim 7). The scattered particles that have entered the separate duct are blocked by the baffle,
Since collision, adhesion, and deposition on the optical element are prevented, the effect of preventing damage and performance deterioration of the optical element can be increased.

Further, in the X-ray apparatus of the present invention, a scattered particle shielding member for shielding scattered particles is provided in the vicinity of the plasma, and the first opening through which the excitation energy beam passes through the scattered particle shielding member is taken out. It is preferable to provide a second opening through which the X-rays that pass through and a third opening through which particles that fly toward the inside of the duct pass.

By providing such a scattered particle shielding member, the emission of scattered particles in an inconvenient direction is eliminated,
The effect of preventing damage to the optical element and performance degradation can be increased. Further, even when introducing a gas into the vacuum container, by providing a scattered particle shielding member, the amount of scattered particles scattered by collision with gas molecules and floating and diffusing in the vacuum container is reduced. The effect of preventing damage and performance degradation can be increased.

Further, in the X-ray apparatus of the present invention, it is preferable to provide a scattered particle control member for controlling the directional distribution of the emitted amount of the scattered particles in the vicinity of the plasma (claim 9). Further, it is preferable that the scattered particle control member is provided with a shape portion that reduces the amount of the scattered particles emitted in the direction in which the X-rays are taken out and increases the amount of the scattered particles that are directed toward the inside of the duct ( Claim 10).

By providing such a scattered particle control member in the vicinity of the plasma, for example, the angular distribution of the scattered particle emission amount is concentrated in the normal direction at the excitation energy beam irradiation position of the target member (the normal direction of the target surface), The amount discharged in other directions can be reduced. Therefore, the amount of scattered particles emitted in the incident direction of the excitation energy beam or in the X-ray extraction direction is reduced, and the probability that scattered particles collide, adhere, or accumulate on the optical element arranged in that direction can be reduced.

Moreover, the direction in which the release amount increases (for example,
Particles flying toward the (normal direction) are taken into the duct or discharged to the outside of the vacuum container, so these particles are scattered, diffused, and suspended by collision with gas molecules, and are scattered around. It is possible to prevent the optical element from colliding with, adhering to, or accumulating. That is, the X-ray apparatus of the present invention (claims 1, 1)
According to 0), it is possible to increase the effect of preventing damage to the optical element and performance degradation.

Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

[0029]

【Example】

[Embodiment 1] FIG. 1 is a schematic configuration diagram of an X-ray generator according to the present embodiment. Laser light (an example of excitation energy beam)
103 is condensed on the target member 104 through the window 102 by a condensing optical element (not shown) to generate plasma 105.

Part of X-rays generated from this plasma 10
After passing through the visible light cut X-ray transmission film (for example, Be film) 108, it is guided to another X-ray optical element (for example, X-ray multilayer film mirror). In this embodiment, the duct 109 having the central axis in the normal line direction of the target surface at the laser irradiation position (site) of the target member 104, which has the largest emission amount of the scattered particles 106, is installed, and the scattered particles are introduced into the duct. It is taken in, scattered by the scattering member 110, and reflected many times in the duct.

While being repeatedly reflected in the duct many times, the scattered particles lose their kinetic energy and adhere to the inner wall of the duct or accumulate in the duct. At this time, by providing the baffle as shown in FIG. 1 inside the duct, the scattered particles once entering the duct are less likely to come out, so that the scattered particles can be efficiently captured in the duct.

The duct 109 does not block the laser beam 103 and the X-ray 107 to be extracted, and the target member 104.
It is installed as close as possible to. That is, the duct 10
By installing 9 in this way, the solid angle of entrainment of scattered particles becomes large, and most of the scattered particles are
It will be incident within 09. Therefore, according to the X-ray generator of the present embodiment, the optical element (laser light introduction window 102, visible light cut X-ray transmission film 1) arranged in the vacuum container is provided.
It is possible to sufficiently suppress the collision, adhesion, and deposition of the scattered particles on the surface 08), and as a result, it is possible to sufficiently prevent the optical element from being damaged and the performance from being deteriorated.

In this embodiment, the scattering member 110 is provided inside the duct.
However, an elastic body such as rubber is provided as a capture member,
The scattered particles may be captured by colliding them with the scattered particles. [Embodiment 2] FIG. 2 is a schematic configuration diagram of an X-ray generator according to the present embodiment.

Laser light (an example of an excitation energy beam) 203 is emitted from the window 20 by a condensing optical element (not shown).
2 is focused on the target member 204 through the plasma 20
5 is generated. Part of X-rays generated from this plasma 2
07 is a visible light cut X-ray transmission film (eg, Be film) 208
After being transmitted, it is guided to another X-ray optical element (for example, an X-ray multilayer mirror).

In the present embodiment, the duct 209 having the central axis in the direction normal to the target surface at the laser irradiation position (site) of the target member 204 where the emitted amount of the scattered particles 206 is the largest is installed to disperse the scattered particles. The particles are taken into the duct and scattered particles are discharged to the outside of the vacuum container by a first vacuum exhaust device (not shown). The inside of the vacuum container 201 is evacuated to a predetermined vacuum degree in advance by a second vacuum exhaust device (not shown) directly connected to the vacuum container 201, and then a valve connecting the vacuum container 201 and the second vacuum exhaust device is installed. It is closed and exhausted by the first vacuum exhaust device connected to the duct 209.

The duct 209 does not block the laser beam 203 and the X-ray 207 to be extracted, and the target member 204.
It is installed as close as possible to. That is, the duct 20
By installing 9 in this way, the solid angle at which the scattered particles are taken in is increased, and most of the scattered particles are in the duct 20.
It will be incident within 9. The scattered particles that have entered the duct 209 are evacuated to the vacuum container 2 by the first vacuum exhaust device.
01 is discharged to the outside.

Therefore, according to the X-ray generator of this embodiment, the scattered particles collide with and adhere to the optical elements (laser light introduction window 202, visible light cut X-ray transmission film 208) arranged in the vacuum container. As a result, it is possible to sufficiently suppress the deposition, and as a result, it is possible to sufficiently prevent the damage and performance deterioration of the optical element. [Embodiment 3] FIG. 3 is a schematic configuration diagram of an X-ray generator according to the present embodiment.

In this embodiment as well, as in the first embodiment, since the duct 309 having the central axis in the direction normal to the target surface from which many scattered particles 306 are emitted is provided as close to the target member 304 as possible, Inclusion of scattered particles The solid angle becomes large, and most of the scattered particles are incident on and taken into the duct 309. Then, the scattered particles that have entered the duct 309 are evacuated by the vacuum exhaust device 301 to the vacuum container 301.
It is discharged outside.

In this embodiment, the gas introducing port 310 is provided in the vacuum container 301, and the gas is introduced into the vacuum container 301 from this gas introducing port. It has the configuration of. As a gas to be introduced, a rare gas (He, Ne, Ar, Kr, Xe, Rn) or nitrogen,
Oxygen, air, etc. can be used, but not limited to these.

The gas pressure in the vacuum container is such that the laser light does not break down before reaching the target, the transmittance of the X-ray of the wavelength to be used is sufficiently high, and the scattered particles are effective. Any pressure that can decelerate, for example,
It is about 0.001 to several tens of Torr. By filling the gas in the vacuum container 301, the scattered particles repeatedly collide with gas molecules, gradually reducing the speed, and
Scattered in random directions.

As described above, as in the second embodiment, most of the scattered particles 306 are taken into the duct 309 and discharged to the outside of the vacuum container, so that they diffuse into the vacuum container 301.
The amount of airborne particles is reduced. Further, since the gas is introduced from the inlet 310 and is exhausted from the duct 309 by the vacuum exhaust device, a gas flow 311 is generated from the vicinity of the plasma 305 into the duct 309.

Then, the scattered particles that are emitted or scattered outside the duct 309, are decelerated by the gas and are diffused and suspended are sucked into the duct 309 along the gas flow 311. The scattered particles sucked into the duct and taken in are
It is discharged to the outside of the vacuum container by a vacuum exhaust device connected to the duct. Therefore, in the present embodiment, scattered particles that are diffused and suspended in the vacuum container 301 are further reduced as compared with the second embodiment, and collide with the optical element (laser light introduction window 302, visible light cut X-ray transmission film 308), The amount of scattered particles that adhere and accumulate can be further reduced.

That is, according to the X-ray generator of this embodiment,
The velocity of the scattered particles is attenuated by the introduced gas, and the scattered particles are discharged to the outside of the vacuum container by the duct connected to the vacuum exhaust device, so that the scattered particles collide with and adhere to the optical element arranged in the vacuum container. Further, it is possible to further suppress the deposition and increase the effect of preventing damage to the optical element and performance deterioration. [Embodiment 4] FIG. 4 is a schematic configuration diagram of an X-ray generator according to the present embodiment.

The X-ray generator of this embodiment is different from that of the third embodiment except that separate ducts 413 and 412 for covering the laser light introducing window 402 and the visible light cutting X-ray transmitting film 408 are provided.
The X-ray apparatus has exactly the same configuration. In this embodiment,
By covering the periphery of the optical element with another duct in this manner, it is possible to prevent scattered particles that are diffused and suspended in the vacuum container from coming from the periphery and colliding, adhering, and accumulating on these optical elements.

That is, according to the X-ray generator of this embodiment,
The scattered particles that are emitted or scattered outside the solid angle range where the scattered particles are emitted toward the inside of the duct and are floating and diffusing in the vacuum container collide with, adhere to or accumulate on the window and / or the optical element. Therefore, the effect of preventing damage to the optical element and performance degradation can be further increased. [Embodiment 5] FIG. 5 is a schematic configuration diagram of an X-ray generator according to the present embodiment.

In the X-ray generator of this embodiment, the gas introduction port 5 is provided in separate ducts 513 and 512 attached so as to cover the laser light introduction window 502 and the visible light cut X-ray transmission film 508.
The X-ray apparatus has the same configuration as that of the X-ray apparatus according to the fourth embodiment except that the respective 10 are provided. In this embodiment, the gas inlet 510
By introducing the gas into the separate ducts 512 and 513 from the above, the scattered particles that have entered the separate duct are decelerated and stopped due to the collision with the introduced gas molecules, and are discharged to the outside of the separate duct. Then, the discharged scattered particles are taken into the duct 509 connected to the vacuum exhaust device,
It is discharged to the outside of the vacuum container.

That is, according to the X-ray generator of this embodiment,
The probability that scattered particles that have entered the separate duct will collide with, adhere to, or accumulate on the optical element is very low, so that the effect of preventing damage to the optical element and performance degradation can be further increased. [Sixth Embodiment] FIG. 6 is a schematic configuration diagram of an X-ray generator according to the present embodiment.

The X-ray generator according to this embodiment uses scattered particles 60.
6, the scattered particle shielding member 612 for shielding the plasma 6
And a first opening through which the laser beam 603 passes through the scattered particle shielding member 612, and the X-ray 6 to be extracted.
The X-ray apparatus has exactly the same configuration as the X-ray apparatus of the third embodiment except that a second opening through which 07 passes and a third opening through which scattered particles toward the inside of the duct 609 pass are provided.

By providing such a scattered particle shielding member 612, the outlet of the scattered particles discharged into the vacuum container 601 is limited to only the opening formed in the member 612, so that the scattered particles can be discharged in an inconvenient direction. Since it is eliminated, it is possible to reduce the amount of scattered particles scattered, diffused, and suspended in the vacuum container 601. Therefore, scattering particles are prevented from colliding with, adhering to, and accumulating on the optical element (laser light introduction window 602, visible light cut X-ray transmission film 608), and the effect of preventing damage to the optical element and performance deterioration is increased. be able to.

Even when the gas is introduced into the vacuum container, by providing the scattered particle shielding member 612, the amount of scattered particles scattered by the collision with gas molecules and floating and diffusing in the vacuum container is reduced. The effect of preventing damage to the optical element and performance degradation can be increased. In addition,
In this embodiment, there is one opening for X-ray extraction, but there may be a plurality of openings. [Embodiment 7] FIG. 7B is a schematic configuration diagram of an X-ray generator of the present embodiment.

The X-ray generator according to this embodiment uses scattered particles 70
Scattering particle control member 71 for controlling the directional distribution of the discharge amount of 6
4 is a scattering particle having a shape portion (see a perspective cross-section of FIG. 7a) that reduces the amount of scattering particles emitted in the direction of extracting X-rays 707 and increases the amount of scattering particles that are directed toward the inside of duct 709. Control member 714 plasma 70
5, the X-ray generator of the fifth embodiment has the same structure as that of the X-ray generator of the fifth embodiment.

By providing the scattered particle control member 714 in the vicinity of the plasma 705, the angular distribution of the scattered particle emission amount is concentrated in the normal direction of the laser light irradiation position of the target member 704 (the normal direction of the target surface), The amount discharged in other directions can be reduced. That is, the collision between the flying particles emitted from the plasma 705 and / or the target member 704 and the flying particle control member 714, or the collision of the flying particles with the flying particles control member 714, etc. As a result, the angular distribution of the amount of scattered particles emitted shows a sharp directivity in the direction of the normal to the target surface, and the amount of scattered particles in the direction of a large angle (for example, 45 ° or more) from the normal decreases. .

Therefore, the amount of scattered particles emitted in the incident direction of the laser beam 703 and the extraction direction of the X-ray 707 is reduced, the amount of scattered particles entering the separate ducts 712 and 713 is reduced, and the scattered particles are an optical element. It is possible to reduce the probability of colliding, adhering, or accumulating on (laser light introduction window 702, visible light cut X-ray transmission film 708). Moreover, the scattered particles heading in the direction of the normal to which the amount of emission increases are taken into the duct 709 connected to the vacuum exhaust device and discharged to the outside of the vacuum container 701. Therefore, the scattered particles collide with gas molecules. It can be prevented from scattering, diffusing, and floating and colliding, adhering, and accumulating on the optical elements arranged in the periphery.

That is, according to the X-ray generator of this embodiment,
The effect of preventing damage to the optical element and performance degradation can be further increased. [Embodiment 8] FIG. 8 is a schematic diagram of an X-ray generator according to the present embodiment. The X-ray generator of this embodiment has exactly the same structure as the X-ray generator of Embodiment 7 except that baffles are provided inside the separate ducts 812 and 813 that cover the optical elements.

By providing the baffle inside the separate duct, the scattered particles that have entered the separate duct are blocked by the baffle to prevent the particles from colliding with, adhering to, or accumulating on the optical element. The effect of preventing performance deterioration can be further increased. In the above examples, the target member has a plate shape, but may have a tape shape, a rod shape, a linear shape, or a foil shape. Moreover, the shape of the duct may be a cylindrical shape, a conical cylindrical shape, or a cube (cylindrical shape) (it may be any shape).

[0056]

As described above, according to the X-ray generator of the present invention (claims 1 to 10), the scattering to the optical element arranged in the vacuum container, particularly to the optical element arranged in the vicinity of the plasma. It is possible to sufficiently suppress collision, adhesion, and accumulation of particles, and as a result, it is possible to sufficiently prevent damage to the optical element and performance deterioration.

Further, according to the X-ray apparatus of the present invention (claim 4), the velocity of the scattered particles is attenuated by the introduced gas, and the scattered particles are discharged to the outside of the vacuum container by the duct connected to the vacuum exhaust device. Therefore, the effect of suppressing the collision, adhesion, and deposition of the scattered particles and the effect of preventing damage and performance deterioration of the optical element can be increased. Further, according to the X-ray device of the present invention (claim 5), the scattering particles are emitted or scattered outside the solid angle range in which the scattered particles are discharged toward the inside of the duct, and are scattered or scattered in the vacuum container. Since the particles can be prevented from colliding with, adhering to, or accumulating on the window and / or the optical element, the effect of preventing damage to the optical element and deterioration of the performance can be further increased.

Further, according to the X-ray apparatus of the present invention (claim 6), the probability that the scattered particles that have entered the separate duct will collide with, adhere to, or accumulate on the optical element is very low, so the optical element is damaged. Also, the effect of preventing performance degradation can be further increased. Further, according to the X-ray apparatus of the present invention (claim 7), the scattered particles that have entered the separate duct are blocked by the baffle to prevent collision, adhesion and deposition on the optical element. The effect of preventing damage to the device and performance degradation can be increased.

Further, according to the X-ray apparatus of the present invention (claim 8), since the scattering particles are not emitted in an inconvenient direction, it is possible to increase the effect of preventing damage to the optical element and performance deterioration. . Further, even when introducing a gas into the vacuum container, by providing a scattered particle shielding member, the amount of scattered particles scattered by collision with gas molecules and floating and diffusing in the vacuum container is reduced. The effect of preventing damage and performance degradation can be increased.

The X-ray apparatus of the present invention (claims 9 and 10)
According to this, it is possible to increase the effect of preventing damage and performance deterioration of the optical element.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of an X-ray generator according to a first embodiment.

FIG. 2 is a schematic configuration diagram of an X-ray generator according to a second embodiment.

FIG. 3 is a schematic configuration diagram of an X-ray generator according to a third embodiment.

FIG. 4 is a schematic configuration diagram of an X-ray generator according to a fourth embodiment.

FIG. 5 is a schematic configuration diagram of an X-ray generator according to a fifth embodiment.

FIG. 6 is a schematic configuration diagram of an X-ray generator according to a sixth embodiment.

FIG. 7 is a schematic configuration diagram (b) of an X-ray generator according to a seventh embodiment.
FIG. 7A is a sectional perspective view of the member 714.

FIG. 8 is a schematic configuration diagram of an X-ray generator according to an eighth embodiment.

[Description of Signs of Main Parts]

101, 201, 301, 401, 501, 601, 7
01,801 ... Vacuum container 102,202,302,402,502,602,7
02, 802 ... Laser light introduction window 103, 203, 303, 403, 503, 603, 7
03,803 ... Laser light 104,204,304,404,504,604,7
04,804 ... Target member 105,205,305,405,505,605,7
05,805 ... Plasma 106,206,306,406,506,606,7
06,806 ... Scattered particles 107,207,307,407,507,607,7
07,807 ... X-rays to be used (extracted) 108, 208, 308, 408, 508, 608, 7
08,808 ... Visible light cut X-ray transmission film 109, 209, 309, 409, 509, 609, 7
09,809 ... Duct 110 ... Scattering member 310, 410, 510, 610, 710, 810 ... Gas inlet 311, 411, 511, 611, 711, 811 ... Gas flow 412, 512, 712, 812 ... Separate duct 612 ... Scattered particle shielding member 413, 513, 713, 813 ... Separate duct 714, 814 ... Scattered particle control member

Claims (10)

[Claims] 1. An X-ray generator for generating plasma by irradiating a target member in a depressurized vacuum container with an excitation energy beam and extracting X-rays from the plasma, wherein scattered particles emitted from the target member are A duct for taking in, at least a duct for taking in scattered particles emitted in the normal direction at the excitation energy beam irradiation position of the target member, and a scattering member for scattering the scattered particles inside the duct, and / or An X-ray generator comprising a trapping member for trapping the scattered particles. 2. An X-ray generator for irradiating an excitation energy beam to a target member in a depressurized vacuum container to form plasma and extracting X-rays from the plasma, wherein scattered particles emitted from the target member are X-ray generation, which is a duct for taking in, and is provided with a duct for taking in scattered particles emitted in a direction normal to at least the excitation energy beam irradiation position of the target member, and connecting the duct to a vacuum exhaust device. apparatus. 3. The X-ray generation apparatus according to claim 2, wherein a scattering member that scatters the scattered particles and / or a trapping member that traps the scattered particles are provided inside the duct. 4. The vacuum container is provided with a gas inlet for introducing gas into the vacuum container.
X-ray generator of statement. 5. The scattered particles are prevented from colliding, adhering or accumulating on a window for introducing the excitation energy beam into the vacuum container and / or an optical element installed in the vacuum container. An X-ray generator according to any one of claims 1 to 4, wherein separate ducts for each are provided. 6. The X-ray generator according to claim 5, wherein a gas inlet is provided in the separate duct. 7. The X-ray generator according to claim 5, wherein a baffle is provided in the separate duct. 8. A first opening for providing a scattering particle shielding member for shielding the scattering particles in the vicinity of the plasma, and passing the excitation energy beam through the scattering particle shielding member,
The X-ray generator according to claim 1, further comprising: a second opening through which the X-rays pass, and a third opening through which particles scattered toward the inside of the duct pass. 9. The X-ray generator according to claim 1, wherein a scattered particle control member for controlling the directional distribution of the emitted amount of the scattered particles is provided in the vicinity of the plasma. 10. The scattered particle control member has a shape portion that reduces the emitted amount of the scattered particles in the direction of extracting the X-rays and increases the emitted amount of the scattered particles toward the inside of the duct. X according to claim 9, characterized in that
Line generator.