JPH09312017A - Manufacturing of magnetic disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the lowering in yield due to the sticking of dust to a disk by removing the dust produced from the tape cleaning operation in such a manner that a sucking device is provided near the contact part between a cleaning tape and the disk. SOLUTION: Vaccum ducts 11, 12 are connected respectively to air filters through vacuum fans at the upper and side positions of the disk 6 in a chamber 1. Next, by rotating reels 3, 5 to run the cleaning tape 4 in the direction X and vertically moving the disk 6 in the direction Y while making it to rotate, the surface of the disk 6 is polished by the tape 4. In this case, the vacuum fans are kept operating, and the dust produced by the polishing operation is sucked and ejected through the vacuum ducts 11, 12, then the sticking of particles to the disk 6 is prevented. The coarse particles are fallen into a cover 8 and collected by a dust collector 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk manufacturing method, and in particular, a magnetic disk is manufactured by sequentially forming an underlayer, a magnetic layer and a protective layer on a disk substrate and then tape-cleaning the surface. The present invention relates to a method for preventing dust generated by tape cleaning from adhering to a disk and manufacturing a high-quality magnetic disk with high yield.

[0002]

2. Description of the Related Art Generally, in a magnetic disk, after forming an underlayer on a disk substrate, a magnetic layer and a protective layer are sequentially formed by a thin film forming means such as a sputtering method, and then the surface of the disk generated in the film forming process is formed. It is manufactured by performing tape cleaning as a finishing process for removing the projections and smoothing them. This tape cleaning is abbreviated as FTP (Final Tape Polish), and usually, a cleaning tape formed by adhering abrasive grains to the surface of a film tape is run and the disc is rotated so that the surface of the tape and the surface of the disc are separated from each other. It is carried out by reciprocating the rotating disk in the direction orthogonal to the tape running direction at the contact position.

By the way, in recent years, with the increase in recording density of magnetic disks, the distance (flying height) between the magnetic disk and the magnetic head tends to become smaller and smaller.
5 μm or less is required. For this reason, under the present circumstances, the demands on the surface properties of magnetic disks have become more severe.

[0004]

In the conventional method of manufacturing a magnetic disk, dust (polishing powder) is generated in the FTP step by polishing the surface of the disk with a cleaning tape having abrasive grains attached thereto. As a result of examination by the present inventor, it has been found that the adhesion of the dust to the disk surface due to static electricity or the like is one of the causes of the decrease in G / T yield.

The present invention solves the above-mentioned conventional problems, and
It is an object of the present invention to provide a method for producing a high-quality magnetic disk with a high yield by preventing dust from adhering to the disk surface in the P step.

[0006]

According to a method of manufacturing a magnetic disk of the present invention, an underlayer, a magnetic layer and a protective layer are sequentially formed on a disk substrate, and then the surface is tape-cleaned to manufacture a magnetic disk. In the above method, a suction device is provided in the vicinity of the contact portion between the cleaning tape and the disk to remove dust generated by the tape cleaning.

In the present invention, the dust generated during the tape cleaning can be efficiently removed by the suction device provided near the contact portion between the cleaning tape and the disk.

Therefore, the problem of a decrease in G / T yield due to the adhesion of dust to the disk surface is solved, and a high quality magnetic disk can be manufactured with a high yield.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective view of an FTP apparatus to which the method of manufacturing a magnetic disk according to the embodiment is applied.

In the illustrated apparatus, a machine base 2 is installed in a chamber 1, and a reel 3 on which a cleaning tape 4 is wound and a reel 5 for winding the cleaning tape 4 are arranged on the machine base 2. Has been done. A drive member (not shown) for rotationally driving the reels 3 and 5 is provided in the machine base 2.

The machine base 2 is further provided with a spindle 7 for holding the disk 6, a rotary drive device for rotating the spindle 7 to rotate the disk 6 around its axis, and for raising and lowering the spindle 7. And a vertical drive device (both not shown) for moving the disk 6 up and down.

A hopper-shaped cover 8 is arranged below the machine base 2. This cover 8 is a duct 9
It is connected to the dust collector 10 via.

A vacuum duct 11 is provided above the disk 6 in the chamber 1 at a position lateral to the disk 6.
The tips of (11A, 11B) and 12 are open, and these vacuum ducts 11 and 12 are connected to an air filter (not shown) via a vacuum fan (not shown).

In this tape cleaning device,
While rotating the reels 3 and 5 to run the cleaning tape 4 in the X direction, while rotating the disk 6, Y
The surface of the disk 6 is polished with the tape 4 by moving up and down in the direction. In addition, at this time, the vacuum fan is operated to remove dust (floating dust: fine particles) generated by the polishing from the vacuum duct 1.
The particles 1 are sucked and discharged via 1, 12 to prevent the particles from adhering to the disk 6. In addition, the coarse particles generated by the polishing fall into the cover 8,
It is collected by the dust collector 10.

Therefore, the magnetic disk obtained by FTP has almost no dust adhered thereto, and according to the present invention, a high-quality magnetic disk excellent in surface properties can be obtained with a good yield.

In the present invention, it is necessary to provide a suction device near the contact portion between the cleaning tape and the disk. For example, in the case of the FTP device shown in FIG. It is preferable that the openings of the vacuum ducts 11 and 12 are located in a region 15 cm or less from the contact portion.

[0018]

The present invention will be described more specifically below with reference to examples and comparative examples.

Example 1 A Ni-P electroless plating base layer was provided on the surface of an Al substrate, and the base film was mirror-finished (polished).
The base film-forming substrate subjected to the above is finely ground concentrically by a texture processing according to a conventional method, and thereafter,
Cr underlayer, C by magnetron sputtering device
An o alloy magnetic layer and a carbon layer as a protective layer were sequentially deposited by sputtering.

As the cleaning tape, Japan Micro Coating AWA8000 (PET film coated with white alumina abrasive grains) was used, the disk rotation speed was 1000 rpm, and the tape running speed was 4.0 mm /
s, FT for tape up / down speed of 725 mm / min for about 9 seconds FT
P treatment was performed.

In this FTP processing, suction is performed in each of the vacuum ducts 11A, 11B and 12 at a flow rate of 3 m / s (these suction devices are located 8 to 12 cm from the contact portion between the tape 4 and the disk 6). In addition, the dust collector 10 sucked at a flow rate of 1 m / s.

When the G / T yield at the time of manufacturing the magnetic disk was obtained by a glide tester for about one month in this manner, it always increased by about 2 to 3% from the conventional value, and was 92% on average.

When the number of particles having a particle size of 0.3 μm or more was measured with a particle counter, it was about 200 cft.

Comparative Example 1 A magnetic disk was manufactured in the same manner as in Example 1 except that the suction by the vacuum duct and the suction by the dust collector were not performed, and the G / T yield was 90%. .

Similarly, the number of particles was measured and found to be 400 to 500 cft.

From the results of Example 1 and Comparative Example 1 described above, it is clear that according to the present invention, high quality magnetic disks can be manufactured with high yield.

[0027]

As described above in detail, according to the magnetic disk manufacturing method of the present invention, high quality magnetic disks can be manufactured with a high yield.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of an FTP device to which a magnetic disk manufacturing method according to an embodiment is applied.

[Explanation of symbols]

 1 Chamber 2 Machine Base 3,5 Reel 4 Cleaning Tape 6 Disc 7 Spindle 8 Cover 9 Duct 10 Dust Collector 11A, 11B, 12 Vacuum Duct

Claims (1)

[Claims] 1. A method of manufacturing a magnetic disk by sequentially forming an underlayer, a magnetic layer and a protective layer on a disk substrate, and then tape-cleaning the surface of the disk substrate to provide a suction device near a contact portion between the cleaning tape and the disk. Is provided to remove dust generated by tape cleaning.