JPH09300464A - Method and apparatus for sticking of film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely perform contact bonding on a base sheet without generating wrinkle and air occlusion by sucking the apex part of a film at a position adjoining to the front side of a seal bar in the transferring direction of the base sheet when the film is tacked by a seal bar. SOLUTION: The cutting position of a film by means of a rotary cutter is adjusted in advance so as to make the apex of the film 12 reach a suction channel 60. Then, while the apex part of the film 12 is sucked under a condition where the apex part 21A of a tack member main body 21 is covered with a seal bar 32, the tack member 20 is lowered to a position where it is brought into contact with the top face at the apex position of the head base sheet stopping at a tack position through the apex part of the film 12. The apex part of the film 12 is tacked on the top face of the apex of the head base sheet by means of the seal bar 32 and thereafter, the tack member 20 is released from the negative pressure contg. the tack member main body 21 and is elevated and is made to wait for the next tacking.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking device for sticking a film onto the surface of a printed wiring board or a substrate such as a glass substrate of a liquid crystal display device or a plasma display device.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for electronic equipment such as a computer, a transparent support film (usually a resin film typified by polyester) is formed on a conductive layer on the surface of the printed wiring board. The cover film is peeled off and a laminate film having a photosensitive resin layer formed thereon and covered with a cover film is attached. Then, after that, a wiring pattern film is overlaid, and the photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the transparent support film. Next, after peeling the light-transmitting support film, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching, whereby a predetermined portion is formed. A printed wiring board having the wiring pattern is formed. Further, in the step of forming a display cell on a glass substrate of a liquid crystal display device or a plasma display device, a similar laminate film is stuck.

[0003] A film sticking apparatus for sticking a laminated film as described above is provided with a photosensitive resin layer on a leading end of a substrate conveyed by a conveying means to a continuous film loaded on a film supply roll. After guiding to the substrate side and temporarily attaching to the front end of the substrate by a temporary attaching member capable of moving close to and away from the substrate, the lamination roll presses the film onto the substrate while transporting the substrate. Have been. The film is pressure-bonded to the substrate so that the length of the film is approximately equal to the length of the substrate, and the supply film is provided on the film temporary bonding member itself or a member in the vicinity thereof so as to have the length. Cut by the film cutting means. Further, the cover film is peeled off before the temporary attaching member.

The film temporary attaching member includes a main vacuum plate having a plurality of suction holes (grooves) for adsorbing a film on a surface thereof, as disclosed in Japanese Patent Publication No. Hei 4-9656, for example. An arc-shaped or triangular-shaped film tacking member main body provided on the leading end side of the main vacuum plate in the film supply direction,
As a whole, the film is moved toward and away from the substrate so that the film supply and the tacking operation can be performed.

The film temporary attaching means moves closer to the substrate while adsorbing the film on the surface when the film supplying and temporary attaching operations are performed, and when the film supplying and temporary attaching operations are completed, the film temporary attaching means Is removed from the substrate and moves away from the substrate. When the suction of the film is released, the film is separated from the surface of the film tacking means.

After temporary attachment, the substrate is conveyed while the film is pressure-bonded to the substrate by the lamination roll. During the film pressure-bonding operation by the lamination roll, the film is separated from the surface of the film temporary attachment means. Has become.

When a film is pasted on each of the conveyed substrates, both the operations of supplying and temporarily attaching the film and the pressing operation are repeated for each substrate.

A seal bar for pressing the film toward the substrate is provided in a protruding manner at the tip of the film temporary attachment member main body, and a heater for heating the seal bar is provided behind the seal bar. The attachment tip is heated so that it can be temporarily attached to the tip of the substrate.

Here, a film suction hole (groove) is provided at a position adjacent to the main vacuum side of the seal bar in the front end of the film temporary attachment member main body, and the front end of the film suctioned here is provided. The seal bar is held at a lower position.

[0010]

However, if the thickness of the adsorbed film is about 40 μm or more, the tip of the film can be held at the outer position of the seal bar. Thickness is 8 to 3
When the thickness is very thin, 5 μm, the rigidity is insufficient, so that the film hangs down from the position of the suction hole (groove) adjacent to the seal bar, and the tip of the film, which should press the film to the substrate by the seal bar, is bent. There is a problem in that crimping occurs due to the occurrence of wrinkles.

Further, since the suction groove adjacent to the seal bar adsorbs the leading end of the film, its suction force must be increased, while the area adjacent to the seal bar has no space. Since the suction groove has a narrow width, the film is strongly sucked in a narrow range. For this reason, when the film is thin, the film is sucked in a state where the film is drawn into the suction groove. Therefore, if the film is pressed into the substrate as it is, wrinkles are formed at the sucked portion, and air is bitten.

The present invention has been made in view of the above-mentioned conventional problems, and provides a film sticking apparatus capable of reliably crimping to a substrate without causing wrinkles or air entrapment even in the case of a thin film. The purpose is to provide.

[0013]

According to the method of the present invention, a continuous film formed by laminating at least a photosensitive resin layer on a transparent support film is pulled out from a film supply roll, and the transparent support film and the photosensitive resin layer are formed. With and stacked,
The photosensitive resin layer side is guided to the front end of the substrate conveyed by the conveying means so that the photosensitive resin layer side is positioned on the substrate side, and is temporarily attached in a state of being attracted to a temporary attaching member that can move toward and away from the substrate. After being temporarily attached to the tip of the substrate by a seal bar at the tip of the member, a lamination roll is used to press the film onto the substrate while the film is attached to the substrate. The above object is achieved by adsorbing the leading end of the film at a position adjacent to the front side of the seal bar in the substrate feeding direction.

According to a second aspect of the present invention, when the film is temporarily attached by the seal bar, at least until the film is adsorbed on the front side of the seal bar in the substrate feeding direction, the seal bar is on the rear side of the substrate feeding direction. The tip portion of the film is sucked even at a position adjacent to.

According to a third aspect of the present invention, after the film suction on the front side of the seal bar in the substrate feeding direction, the film suction on the rear side of the substrate feeding direction is released.

According to a fourth aspect of the invention, the film suction force on the rear side of the seal bar in the substrate feeding direction is made weaker than the film suction force on the front side.

Further, according to the present invention, a continuous film in which at least a photosensitive resin layer is laminated on a transparent supporting film is pulled out from a film supply roll, and the transparent supporting film and the photosensitive resin layer are laminated. In this state, the photosensitive resin layer side is guided to the front end of the substrate conveyed by the conveying means so that the photosensitive resin layer side is positioned on the substrate side, and the front end of the substrate is moved by a temporary attachment member that can move toward and away from the substrate. After being temporarily attached to the substrate by a lamination roll, while pressing the film to the substrate, the substrate is conveyed, the temporary attachment member, a main vacuum plate having a film adsorption means on the surface along the film path, It is connected to the tip of the main vacuum plate in the film feed direction,
A film temporary attachment member main body that is continuously curved from the surface of the main vacuum plate, has a film suction means on the surface, and has a tip end with a seal bar that presses the film toward the substrate. In the film sticking device, the seal bar attachment end surface at the tip of the film temporary attachment unit main body is placed over the seal bar, and further at a position adjacent in the substrate feeding direction at the time of film suction, The above-mentioned object is achieved by providing a tip end adsorbing means for adsorbing the tip end of the film extending beyond by a negative pressure.

According to a sixth aspect of the present invention, a groove is formed in the front end portion so as to face the substrate conveyed by the conveying means and extend in the film width direction, and the seal is provided. A bar, most of which is housed in the groove, and
A part of the substrate is a rod-shaped member that is arranged so as to project from the groove.

According to a seventh aspect of the present invention, the groove has a trapezoidal cross-sectional shape whose inner side is wider than the open end at least in the longitudinal intermediate range.

According to an eighth aspect of the invention, the seal bar is a round bar member.

According to a ninth aspect of the present invention, the tip suction means is
A suction groove formed in the width direction of the film is formed on the seal bar mounting end surface.

According to a tenth aspect of the present invention, in the seal bar,
A rear suction means for adsorbing the film is provided close to the side opposite to the tip suction means.

According to the present invention, the tip of the film is sucked by the negative pressure at a position beyond the seal bar, so that the tip of the film is not wrinkled or bent by the seal bar and the film is attached to the substrate. It can be securely attached.

Further, at the time of temporarily attaching the film with the seal bar, the film is adsorbed at a position adjacent to the rear side of the seal bar at least until the film adsorption is completed. It can be smoothly adsorbed on the front side over the seal bar.

Further, in this case, the wrinkles on the film can be prevented from being generated in the vicinity of the seal bar by releasing the suction of the film on the rear side after the suction is completed.

Further, when the film is adsorbed before and after the seal bar, the film is more strongly adsorbed than the front side, so that the wrinkles of the film at the adsorption position on the rear side can be suppressed.

Further, since the seal bar is a rod-shaped member housed in the groove in the film width direction formed at the tip of the film temporary attachment member main body, it is easy to install and replace, and the width in the film feeding direction is provided. By reducing the (thickness of the rod-shaped member), the film can be temporarily attached to the predetermined position on the substrate with high accuracy.

Further, since the cross section of the groove for accommodating the seal bar has a trapezoidal shape with a narrow tip side, it is possible to securely fix the rod-shaped seal bar and facilitate replacement.

Further, by using the round bar-shaped member as the seal bar, it is possible to reduce the manufacturing cost, and improve the dimensional accuracy and the accuracy of the crimping position on the substrate.

Furthermore, a force is applied to the seal bar when the film is temporarily attached to the substrate by forming a suction groove on the end face of the seal bar where the film is to be sucked.
It is possible to make them the same in the substrate feeding direction, so that the temporary film attachment can be performed uniformly.

Further, by providing the rear suction means on the side opposite to the front suction means, close to the seal bar, the front end of the film can be sucked smoothly from the rear side to the front side.

[0032]

Embodiments of the present invention will be described below with reference to the drawings.

First, a schematic structure of the film sticking apparatus 10 according to the present invention will be described with reference to FIG.

The film 12 cut and stuck by the film sticking device 10 is, as shown in FIG. 2, a photosensitive resin layer 12B on a translucent support film 12A.
And a cover film 12C are laminated to form a three-layer structure, which is continuously wound around the supply roll 14.

The film 12 unwound from the supply roll 14 is covered by the film separating member 16 to cover the film 1.
2C is peeled off so that the adhesive surface of the photosensitive resin layer 12B is exposed, and the main vacuum plate 2 forming a part of the temporary attaching member 20 via the tension roll 18 is removed.
2 is supplied. The peeled cover film 12C is configured to be wound up by a winding roll 24.

The supply roll 14 and the film separating member 1
6, the tension roll 18, the tacking member 20, the winding roll 24, and the like are provided on the upper side of the substrate transport surface I-I in FIG. 1, and the film 12 is attached to the upper surface of the substrate 26. There is.

As shown in FIGS. 3 and 4, the main vacuum plate 22 is provided with a large number of suction grooves 22A and suction holes 22B to which a negative pressure is applied, and a cover film 12C is peeled off. 12 (hereinafter referred to as the film 12 unless otherwise specified) is adsorbed, and is slidably supported by a vertical guide rail 28 in the drawing, and guided by a drive device 30 such as an air cylinder or a servomotor. Along the rail 28, it is possible to approach and separate from the film sticking position, that is, to approach and separate from the substrate transport surface I-I.

Further, at the tip of the main vacuum plate 22 on the substrate transfer surface I-I side, a film is temporarily attached to the main vacuum plate 22, which is continuously curved from the surface and has a film suction groove 21C formed on the surface. The member main body 21 is connected. This film temporary attaching member body 2
A seal bar 32 extending in the film width direction is attached to the leading end portion 21A of the film feeding direction 1 of FIG.

The temporary mounting member 20 is used to transfer the substrate I-
Although it is possible to move from the position where its tip comes into contact with the upper surface of the substrate 26 on I to the standby position shown by the solid line in FIG. 1, this standby position and the substrate transfer surface I
-I, a film holding member 34 for leading end winding and a rotary cutter 36 are arranged in this order from the side of the tacking member 20 along the feeding surface of the film 12.

The rotary cutter 36 is unwound from the supply roll 14 and covers the cover film 12C.
The front end of the film 12 from which the film has been peeled off is trimmed and aligned so that the front end is parallel to the front end edge of the substrate 26, and the film 12 is sequentially cut into a length corresponding to the substrate 26. I have.

Further, the film winding member 34 for winding the leading end is used.
Is moved to the left in FIG. 1 when the film is cut by the rotary cutter 36, the tip reaches the film passing surface, and after cutting the film is moved back to a standby position where it does not interfere with the tacking member 20. A suction groove and a suction hole (both not shown) to which a negative pressure is applied are provided on the end surface of the film passing surface side, and the tip of the film 12 can be adsorbed to the end surface. When the film is cut by the rotary cutter 36, the film 12 is sucked and held, and the tip end portion of the film 12 that has been cut and aligned is sucked and pulled rightward in FIG. The film front end portion is sucked onto the temporary attachment member main body 21 by winding and by the film suction groove 21C in the front end portion 21A.

The main vacuum plate 22 is on the path side of the film 12 and has the suction groove 2 on the surface.
The suction plate 23A on which 2A is formed, and the suction plate 23A
On the side opposite to the film path, a backup member 23D is connected by a set screw "23C via a frame-shaped heat-resistant rubber packing 23B.

The frame-shaped heat-resistant rubber packing 23B is
A plurality of vacuum spaces 23E are provided in the film width direction, formed near the center of each vacuum space 23E, and communicated with a vacuum source (not shown) via a vacuum port 23F penetrating the backup member 23D in the thickness direction. I have.

The suction groove 22 in the suction plate 23A
A extends in a direction perpendicular to the film feed direction and is formed in a plurality of rows in the film feed direction, each of which is at a position communicating with the vacuum space 23F,
It communicates with the plurality of suction holes 22B penetrating to the vacuum space 23F side.

The film tacking member body 21 is shown in FIG.
As shown in the figure, the main vacuum plate 22
And a plurality of rows of the film suction grooves 21C are formed in the inclined suction surface 21B in a direction perpendicular to the film feeding direction.

A plurality of vacuum holes 21 formed at appropriate intervals in the longitudinal direction of the film suction grooves 21C.
D, and these vacuum holes 21D are connected to a vacuum path 21E in the film tacking member main body 21. The vacuum path 21E is connected to a vacuum source (not shown) via a negative pressure pipe 21F.

The inclined suction surface 21B forms an acute angle with the rear surface of the film temporary attachment member main body 21 which is parallel to the surface of the main vacuum plate 22, and the front end portion 21 is formed.
A is a block member 50 in which a heater 50A is embedded.
Is formed by the lower end in the figure. Around the heater 50A, a heat diffusion compound 50B having good heat conductivity is filled.

The block member 50 is fitted and mounted in the mounting groove 21G formed in the back surface of the film temporary mounting member main body 21 in the width direction of the film and also serving as a vacuum passage.
Further, it is connected to the film temporary attaching member main body 21 via a heat insulating rubber seal 51.

The lower end of the heat insulating rubber seal 51 is shorter than the inclined suction surface 21B, whereby a substantially triangular groove 51A is formed at the lower end, and the lower end is adjacent to the lower end intermittently in the film width direction. A plurality of slits 51A that communicate with the lower end of the vacuum hole 21D are formed, so that negative pressure from the vacuum hole 21D is introduced into the groove 51A.

At the lower end of the block member 50 constituting the tip portion 21A, as shown in an enlarged view in FIG. 6, a groove 54 in the film width direction which opens downward is formed, and in the groove 54, The seal bar 32 made of round bar rubber
Is elastically inserted.

Except for both ends of the block member 50 in the film width direction, the groove 54 has an inverted trapezoidal cross-sectional shape in which the upper bottom 54A side is wider and the lower end opening 54B side is narrower in the figure. The diameter of the circular cross section parallel to the trapezoidal bottom surface 54A is elastically attached in a state of entering the groove 54 into the bottom surface 54A side from the tip opening 54B.

Further, the groove 54 extends upward as shown in FIG. 5 to both ends of the block member 50 in the film width direction, and the seal bar 32 is pressed on both side surfaces of the block member 50 in the film width direction. It is fixed by metal fittings 56 (see FIG. 7).

As shown in FIGS. 4 and 6, suction grooves 58 and 60 are provided on both sides of the groove 54 in the block member 50 for sucking the film front end portion by negative pressure.
Are formed, and a negative pressure from the mounting groove 21G is introduced into the suction grooves 58 and 60 via the vacuum paths 58A and 60A.

Here, as shown in FIG. 5, the suction grooves 58 and 60 are formed continuously on the lower surface of the block member 50 in the film width direction, and the vacuum passages 58A and 58A are formed.
60A are formed at regular intervals in the film width direction.

The rotary cutter 36 has a substantially fixed blade 36A which is arranged in the width direction of the film 12 and is parallel to the film passing surface, and the rotation center axis of the fixed blade 3 is fixed.
6A and a rotating blade 36B in which a cutting blade is spirally wound around a cylindrical outer periphery of a member (a cylinder or a cylinder) disposed substantially parallel to the rotating blade 36B. By rotating while making contact on the surface, the film 12 on the film passing surface is cut in the width direction at that position.

Here, the fixed blade 36A is the rotary blade 36.
B is made to be able to advance and retreat in a direction perpendicular to the film passing surface, and is advanced to a position where it comes into contact with the rotary blade 36B only when cutting the film 12 unwound from the supply roll 14 and the peeled cover film 12C. In a normal state, the retracted position is separated from the rotary blade 36B (the drive mechanism is not shown).

In the figure, reference numeral 40 is a driving roller in the substrate transport mechanism, 42 is a driven roller, 44 is a substrate pressing member, 46 is a substrate front end position detecting optical sensor, and 48 is a lamination roll.

The substrate pressing member 44 is composed of a substrate pressing roller 44A and a substrate pressing roller air cylinder 44B for moving the substrate pressing roller 44A up and down.

The relationship among the lamination roll 48, the driving roller 40, the substrate pressing member 44 and the substrate tip position detecting optical sensor 46 is as follows.

The leading end of the leading substrate 26 being transported from left to right in FIG. 1 is detected by the substrate leading edge position detecting optical sensor 46 provided near the substrate transport surface II, and after a predetermined time, Substrate 2 to film temporary setting position
When 6 is conveyed, the rotation of the driving roller 40 is stopped. At the same time, the substrate 26 is
Press the air cylinder 44B for the substrate holding roller.
Thereby, the substrate pressing roller 44A is driven.

The substrate 2 is pressed by the substrate pressing roller 44A.
6 is reliably stopped, and even if the film tacking member main body 21, which is the distal end of the tacking member 20, comes into contact with the substrate 26, the substrate 26 does not move, and the tacking to the film 12 is reliably performed. .

The substrate 26 by the substrate pressing roller 44A
Is carried out until the lamination roll 48 comes into contact with the substrate 26, and in synchronization with the timing at which the lamination roll 48 comes into contact, the air cylinder 44 for the substrate holding roller is pressed.
B is released.

Reference numeral S1 in the drawing is a width-shift start position sensor, S
2 denotes a substrate rear end detection sensor, and S3 denotes a substrate passage detection sensor.

Further, reference numeral 72 in FIG. 1 is arranged on the opposite side of the film winding member 34 for tip winding from the path of the film 12 and in the direction of the inclined suction surface 21B of the temporary attachment member main body 21. An air blow pipe for blowing a compressed air flow is shown in FIG.

As shown in FIG. 8, the air blow pipe 72 is provided with an air blow case 72B having a nozzle 72A continuously formed in the film width direction at the tip on the side of the inclined suction surface 21B, and an air blow case 72B. Air blow case 7
2B, and a discharge hole 72 for blowing air toward the nozzle 72A.
Air pipe 7 in which many C are formed intermittently in the longitudinal direction
The air flow blown out from the air pipe 72D is rectified by the nozzle 72A and blown onto the inclined suction surface 21B of the film temporary attachment member body 21.

Compressed air is supplied to the air pipe 72C from both longitudinal ends thereof. Further, the compressed air supply time, that is, the air flow blowing time from the nozzle 72A, is immediately before the start of the movement of the leading end winding film holding portion 34 to the right in the figure, that is, the adsorbed film leading end is directed toward the temporary attaching member 20. The time is from immediately before the start of pulling to the end of winding the film 12 around the leading end portion 21A.

Reference numeral 74 in FIG. 1 designates the rotary cutter 3.
Reference numeral 36 denotes a film guide roll disposed close to the downstream side of 6, and reference numeral 36 denotes an air blow tube. The air blow pipe 76 blows out compressed air in the direction of the suction bar 78 for the rear end of the film provided on the lamination roll 48 side, and moves the rear end of the film 12 cut by the rotary cutter 36 in the direction of the suction bar 78. It's a fluttering thing.

Next, the signal path of the control system of the film sticking apparatus will be described with reference to FIG.

In this control system, each sensor 46, S
In addition to 1 to S3, the central control unit 70 outputs a control signal for each cylinder solenoid and each motor in accordance with each sensor of the film winding diameter for the detection sensors (not shown) at the front and rear ends of each cylinder. . It also has the functions of a counter and a timer.

The central control unit 70 is configured to control the film sticking device 10 according to a predetermined procedure. The central control unit 70 can be composed of, for example, a programmable control or a relay sequence circuit.

Next, the operation of the film sticking device 10 will be described.

First, the lamination roll 48 is at the retracted position shown by the solid line in FIG. 1, the leading end winding film holding member 34 is at a position where the leading end surface is separated from the film passing surface,
The fixed blade 36A of the rotary cutter 36 is a rotary blade 36B.
The film 12 is pulled out from the supply roller 14, the cover film 12 </ b> C is peeled from the leading end, and the film 12 is wound around the take-up roll 24, and the film 12 is wound around the temporary attaching member 20 and the leading end. Of the rotary film 36 is drawn down along the film passing surface on the left side in the figure, and passes between the fixed blade 36A and the rotary blade 36B of the rotary cutter 36.

Next, a negative pressure is applied to the temporary attachment member 20 to adsorb the film 12, and the film holding member 34 for tip winding is also advanced to the film passing surface position to apply a negative pressure to the film. Adsorb 12

In this state, the fixed blade 36A is moved forward and the rotary blade 36B is rotated to cut the film 12 on the film passing surface, and the leading ends thereof are cut and aligned. The cut film 12 on the tip side of the rotary cutter 36 is discarded. Next, the fixed blade 36A is separated from the rotary blade 36B, and the leading-end wrapping film holding member 34 is moved rightward in FIG. 1 while the leading end of the film 12 is attracted to the leading end surface.

At this time, the tip portion 2 of the temporary attachment member main body 21
Negative pressure is applied in advance to the suction grooves 58 and 60 on both sides of the film suction groove 21C and the groove 54 in 1A, and in this state, when the tip winding film holding member 34 moves to the right in the drawing, suction is performed. The leading end of the film 12 is wound along the leading end 21A of the temporary attachment member main body 21, is attracted by the negative pressure of the film attraction groove, and is separated from the leading end winding film holding member 34.

The tip of the film 12 is the temporary attachment member main body 2
1, the compressed air flow blown from the nozzle 72A of the air blow pipe 72 blows the tip of the film 12 in the direction of the inclined suction surface 21B. The separated film front end portions are surely adsorbed along the inclined adsorption surface 21B without hanging down.

The cutting position of the rotary cutter 36 is adjusted in advance so that the tip of the film 12 reaches the suction groove 60. Therefore, the tip of the film does not hang down below the seal bar 32 in the sucked state.

Next, the tip portion 21A of the temporary attachment member main body 21
While the seal bar 32 is covered with the seal bar 32, the temporary attachment member 20 is driven by the drive device 30 while adsorbing the leading end of the film 12.
Is lowered along the guide rail 28 until the front end portion 21A contacts the top surface of the front end position of the leading substrate 26 stopped at the temporary attachment position via the front end portion of the film 12.

As a result, the seal bar 32 temporarily attaches the leading end of the film 12 to the upper surface of the leading end of the substrate 26,
Thereafter, the tacking member 20 including the tacking member main body 21 is released from the negative pressure, rises to the solid line in FIG. 1, and waits until the next tacking. As described above, since the leading end of the film 12 does not hang down below the seal bar 32, the tacking is performed accurately without wrinkling or overlapping.

It should be noted that the substrate pressing roller 44A is stopped when the leading substrate 26 is stopped and stopped at this temporary mounting position.
The restraint by is as described above.

The lamination roll 48 is driven from the position indicated by the solid line in FIG. 1 to the position indicated by the alternate long and two short dashes line with respect to the tip of the film 12 in the temporarily attached state, and the tip of the film 12 is pressed against the substrate 26. In this state, the substrate holding roller air cylinder 44B is released. Next, the lamination roll 48 is rotated so as to drive the substrate 26 from the left side to the right direction in FIG. Thermocompression bonding.

After that, the film 1 with the cover film 12C peeled off from the substrate 26 which is intermittently conveyed.
2 is cut to a fixed size by the rotary cutter 36,
After being temporarily tacked by the temporary tacking member 20, they are thermocompression bonded by the lamination roll 48.

When the film is cut by the rotary cutter 36, the film 12 is attached to the temporary attachment member 20.
And the lamination roll 48 are stretched. However, when the width of the film 12 is large, the film 12 is often not uniformly applied with a tensile force in the width direction. In this case, For a portion where the tensile force is insufficient, the film 12 may not be cut smoothly when cut by the rotary cutter 36.

In this film sticking apparatus 10, the film 12 is adsorbed and held on the tip of the film holding member 34 for tip winding at a position near the rotary cutter 36 between the temporary member 22 and the lamination roll 48. Therefore, the pulling force is evenly applied to the portion of the film 12 where the pulling force is insufficient, whereby the cutting by the rotary cutter 36 is smoothly performed.

Although the film sticking apparatus 10 sticks the film 12 only on the upper surface of the substrate 26, the present invention is not limited to this, and the lower surface or the upper and lower surfaces of the substrate 26 may be attached. Of course, it can also be applied when a film is attached.

The seal bar 32 in the film sticking apparatus 10 is composed of a round bar-shaped member made of, for example, elastic rubber, but the present invention is not limited to this, and a resin member, a metal member, or a hollow member is used. In addition to the cylindrical member or the seal bar 32A shown in FIG. 10, a rod-shaped member having another cross-sectional shape such as a semicircle or a semi-cylindrical shape may be used in addition to the substantially trapezoidal cross section having an arcuate portion.

Further, the suction grooves 58 and 60 provided on both sides of the seal bar 32 in the film sticking apparatus are provided in the block member 50, respectively. ), A suction groove (suction hole) may be provided adjacent to the above.

Further, as shown in FIG. 10, for example, the film suction groove on the film temporary attachment member main body 21 side is omitted, and only one suction groove 60 on the block member 50 side is positioned adjacent to the seal bar. It may have any configuration.

That is, in the film sticking apparatus, the film front end is adsorbed before and after the seal bar 32, but the present invention is not limited to this, and is adjacent to the front side of the seal bar in the substrate feeding direction. What is necessary is that the front end of the film can be adsorbed at the above position.

Further, as shown in FIG. 11, for example, the seal bar 3 is provided at the tip portion 21A of the temporary attachment member main body 21.
It is also possible to provide only the suction groove 60 for the front end of the film in the front side of the second substrate feeding direction, and omit the suction groove at the position adjacent to the rear side.

When the film is very thin, when the film is adsorbed at a position adjacent to the rear side of the seal bar, wrinkles are generated in this part, and when the film is pressed directly onto the substrate, air is caught in the part corresponding to the sucked mark. There is a problem that it will be embedded.

In the case of the embodiment shown in FIGS. 10 and 11, since there is no suction groove at the position adjacent to the rear side of the seal bar 32, there are no wrinkles and no entrainment of air bubbles accompanied therewith at the time of pressure bonding to the substrate.

At the position of the suction groove on the front side, wrinkles may occur at the tip of the film, but since the tip side of the seal bar 32 is not used, there is no problem even if wrinkles occur.

Even when the suction grooves are provided adjacent to the front and rear of the seal bar as in the case of FIG. 6, the suction force of the rear suction groove is made weaker than that of the front suction groove. Or, if the negative pressure of the suction groove on the rear side is released after suction after tacking, the entire film is pulled in the direction of the suction groove 60 on the front side after suction, so that wrinkles and bubbles are not trapped during the pressure bonding to the substrate. It never happens.

[0095]

Since the present invention is constructed as described above, even if the film after the cover film is peeled off is thin, the tip of the film does not hang down to the lower side of the seal bar. It can be sucked and held at the tip, and therefore the seal bar ensures reliable and accurate attachment to the substrate.
It has an excellent effect that it can be temporarily pressure-bonded without wrinkling, folding, or trapping air.

[Brief description of drawings]

FIG. 1 is a schematic side view showing a film sticking apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing a state of a film pasted by a film pasting apparatus before a cover film is peeled off.

FIG. 3 is an enlarged perspective view showing a temporary attaching member in the film attaching apparatus.

FIG. 4 is a sectional view showing the temporary attachment member in a further enlarged manner.

FIG. 5 is a schematic front view showing a block member that constitutes a tip portion of the temporary attachment member.

FIG. 6 is a cross-sectional view showing the vicinity of the tip end of the temporary attaching member body in the film sticking apparatus in a further enlarged manner.

FIG. 7 is an enlarged side view of a portion corresponding to line VII-VII in FIG. 5;

FIG. 8 is an enlarged perspective view showing an air blow pipe of the above device.

FIG. 9 is a block diagram showing a configuration of an electric signal input / output of the device.

FIG. 10 is a sectional view showing a main part of an example of another embodiment of the present invention.

FIG. 11 is a sectional view showing a main part of an example of still another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Film sticking device 12 ... Film 12A ... Translucent support film 12B ... Photosensitive resin layer 12C ... Cover film 16 ... Film separating member 20 ... Temporary attaching member 21 ... Film temporary attaching member main body 21A ... Tip 21B ... Inclination Adsorption surface 21C ... Film adsorption groove 21D ... Vacuum hole 22 ... Main vacuum plate 26 ... Substrate 32, 32A ... Seal bar 36 ... Rotary cutter 48 ... Lamination roll 50 ... Block member 54 ... Groove 54A ... Bottom surface 54B ... Tip opening 58, 60 ... Suction groove 58A, 60A ... Vacuum path II ... Substrate transport surface

Claims (10)

[Claims] 1. A continuous film formed by laminating at least a photosensitive resin layer on a translucent supporting film is pulled out from a film supply roll, and the transmissive supporting film and the photosensitive resin layer are laminated, and a conveying means. The leading edge of the temporary attachment member is guided to the leading edge of the substrate conveyed by the so that the photosensitive resin layer side is positioned on the substrate side, and is attracted to the temporary attachment member that can move toward and away from the substrate. In the film sticking method of transporting the substrate while pressing the film to the substrate by a lamination roll after temporarily attaching the film to the tip of the substrate with the seal bar, the seal bar is used when the film is temporarily attached by the seal bar. The film sticking method, wherein the front end of the film is adsorbed at a position adjacent to the front side in the substrate feeding direction. 2. The method according to claim 1, wherein, when the film is temporarily attached by the seal bar, the seal bar is adjacent to the rear side of the seal bar in the substrate feed direction at least until film adsorption on the front side of the seal bar in the substrate feed direction. A method for sticking a film, characterized in that the front end of the film is adsorbed even at a predetermined position. 3. The film sticking method according to claim 2, wherein after the film is adsorbed on the front side of the seal bar in the substrate feeding direction, the film adsorption on the rear side of the substrate feeding direction is released. 4. The film sticking method according to claim 2, wherein the film suction force on the rear side of the seal bar in the substrate feeding direction is made weaker than the film suction force on the front side. 5. A continuous film in which at least a photosensitive resin layer is laminated on a translucent support film is pulled out from a film supply roll, and the translucent support film and the photosensitive resin layer are laminated, and a conveying means is provided. After guiding the photosensitive resin layer side to the front end of the substrate conveyed by the so that the photosensitive resin layer side is located on the substrate side, and temporarily attaching to the front end of the substrate by a temporary attaching member that can move toward and away from the substrate. , A lamination roll, while pressing the film to the substrate, to convey the substrate, the temporary attachment member, the main vacuum plate provided with a film suction means on the surface along the film path, and the main vacuum plate Connected to the front end of the film feeding direction, continuously curved from the surface of the main vacuum plate, the surface is provided with a film suction means, And a film tacking device main body having a seal bar that presses the film toward the substrate at the tip end portion thereof, wherein the seal bar mounting end surface at the tip end portion of the film tacking part main body is provided. Further, a tip adsorbing means for adsorbing the tip portion of the film extending over the seal bar by a negative pressure when adsorbing the film is provided at a position adjacent to the substrate feeding direction beyond the seal bar. A film sticking device characterized in that 6. The opening according to claim 5, wherein the front end portion is opened so as to face the substrate conveyed by the conveying means,
And, a groove formed to extend in the film width direction is provided, and the seal bar is mostly accommodated in the groove,
Further, a film sticking device, characterized in that a part of the substrate side is a rod-shaped member arranged so as to project from the groove. 7. The film sticking device according to claim 6, wherein the groove has a trapezoidal cross-sectional shape whose inner side is wider than the open end at least in the longitudinal intermediate range. 8. The film sticking apparatus according to claim 6, wherein the seal bar is a round bar member. 9. The film sticking device according to claim 5, wherein the tip suction means is a suction groove formed in the film width direction on the seal bar mounting end surface. 10. The film tensioner according to any one of claims 5 to 9, wherein a rear suction means for sucking a film is provided on a side of the seal bar opposite to the tip suction means. Attached device.