JP3395152B2 - Film sticking method and apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking method and device for sticking a film on the surface of a substrate for a printed wiring board or a substrate such as a glass substrate of a liquid crystal display device or a plasma display device.

[0002]

2. Description of the Related Art In a process of manufacturing a printed wiring board used for electronic equipment such as a computer, a transparent support film (usually a resin film typified by polyester) is formed on a conductive layer on the surface of a printed wiring board substrate. The cover film is peeled off and the laminated film on which the photosensitive resin layer is formed and which is covered with the cover film is attached. And after this, overlay the wiring pattern film,
The photosensitive resin layer is exposed for a predetermined time through the wiring pattern film and the translucent support film. Then
After peeling off the translucent support film, the exposed photosensitive resin layer is developed to form an etching mask pattern, and thereafter, unnecessary portions of the conductive layer are removed by etching, whereby predetermined wiring is formed. A printed wiring board having a pattern is formed. Further, a similar laminate film is attached in the step of forming a display cell on a glass substrate of a liquid crystal display device or a plasma display device.

A film sticking device for sticking a laminate film as described above is constructed such that a continuous film loaded on a film supply roll is peeled off by a film separating member and then conveyed by a conveying means. The photosensitive resin layer is guided to the front side of the substrate so that the side of the substrate is located, and temporarily attached to the front end of the substrate by a temporary attachment member that can move toward and away from the substrate, and then the film is laminated by a lamination roll. The substrate is conveyed while being pressure-bonded. The pressure bonding of the film to the substrate is carried out so that the bonding length will be a length substantially corresponding to the substrate length, and the supply film is provided on the film temporary attachment member itself or a member in the vicinity thereof so as to have the length. It is cut by the film cutting means.

The film tacking member is, for example, as disclosed in Japanese Patent Publication No. 4-9656, a main vacuum plate having a plurality of suction holes (grooves) for sucking a film on its surface, and a main vacuum plate. It is composed of an arc-shaped or triangular film temporary attachment member main body provided on the tip side of the main vacuum plate in the film supply direction,
As a whole, the film is moved toward and away from the substrate so that the film can be supplied and temporarily attached.

The film tacking member moves closer to the substrate in a state where the film is adsorbed on the surface when the film feeding and tacking operations are performed, and when the film feeding and tacking operations are completed, the film tacking member Is removed from the substrate and moves away from the substrate. When the suction of the film is released, the film is separated from the surface of the film temporary attachment member.

After the temporary attachment, the substrate is conveyed while the film is pressure-bonded to the substrate by the lamination roll. During the film pressure-bonding operation by the lamination roll, the film is separated from the surface of the film temporary attachment member. Has become.

When a film is attached to each of the conveyed substrates, both the film supply and temporary attaching operation and the pressure bonding operation are repeated for each substrate.

[0008]

In the film sticking process, after the cut film tip is adsorbed and held on the surface of the film tacking member, the substrate to which the film tip is to be tacked is transported on the substrate transport surface. The film tacking member stands by in a stationary state until it is stopped at a predetermined position. Therefore, the film is in a stopped state even at the position of the upstream film separating member.

The film separating member has a triangular or circular cross section, and is peeled from the photosensitive resin layer by bending and pulling the cover film along its outer shape.
It is for exposing the photosensitive resin layer, and the photosensitive resin layer is pulled by the cover film at the separation point at the time of peeling.

The photosensitive resin layer has an adhesive property, and when pulled by the cover film, the photosensitive resin layer receives a force of floating from the translucent support film. When the standby time of the film tacking member is long, for example, 10 seconds or more, the photosensitive resin layer is slightly cured while floating.

Therefore, when the raised portion is thermocompression-bonded to the substrate, a streak in the width direction is generated on the substrate, which causes an abnormal exposure at the time of exposure in a subsequent process, which causes a product defect. There is a problem.

Further, for example, as disclosed in Japanese Patent Application Laid-Open No. Sho 60-212218, a film is continuously attached to a plurality of substrates which are intermittently conveyed by a lamination roll, and the substrates are attached to each other by a cutter after the attachment. There is a film sticking device that cuts the film with.

In such a continuous sticking type film sticking apparatus, when the transfer of the substrate is interrupted, the film is held at a neutral position separated from the lamination roll and waits for the next substrate loading. In this case, of course, even at the position of the film separating member for peeling the cover film, the film stops in a state where the photosensitive resin layer is pulled from the cover film. When the waiting time is long, there is a problem that the film has a streak in the width direction when the film is attached to the substrate, as described above.

The present invention has been made in view of the above-mentioned conventional problems, and even when the film is stopped for a long time, the streaks generated in the width direction of the film when the film is stuck to the substrate causes An object of the present invention is to provide a film sticking method and device which prevent product defects.

[0015]

The method of the present invention is defined in claim 1.
As described above, a photosensitive resin layer is applied to a translucent support film, and a film obtained by further laminating a cover film is unwound from a film original roll, and the cover film is peeled off by a film separating member, and then the film is formed. The end of the film is cut, the cut end of the film is adsorbed by the tacking member, and the photosensitive resin layer side is placed on the film sticking surface of the substrate sequentially transported along the substrate transporting surface of the tacking member. A film sticking method in which the film is cut according to the substrate while the film is pressure-bonded to the substrate after being temporarily attached by the leading end to form a trailing end serving as the leading end of the trailing film, and one-time joining is completed. When the film is attached to the substrate when the movement of the film in the substrate transport surface direction is stopped after the cut end of the film is attracted by the temporary attachment member , A portion to be the rear end of the pattern formation scheduled area and a portion to be the front end of the pattern formation scheduled area of the film to be attached to the next substrate are located near both sides of the film separation point in the film separation member, The above object is achieved by adjusting the length of the film path from the film separating member to the tip of the film.

According to a second aspect of the present invention, in the first aspect of the present invention, after the cut end of the film is adsorbed by the tacking member, the film is pulled out by the tacking member to increase the film path length. In this state, the film is temporarily attached to the leading end of the conveyed substrate.

According to a third aspect of the invention, a film obtained by coating a light-transmitting support film with a photosensitive resin layer and further laminating a cover film is unwound from a film original roll, and the cover film is peeled off by a film separating member. Then, in the film sticking method in which the photosensitive resin layer is brought into contact with the film sticking surfaces of a plurality of substrates that are intermittently carried sequentially along the board carrying surface, and is continuously pressure-bonded by a lamination roll, When the movement of the film in the substrate transport surface direction is stopped for 10 seconds or more, the portion which becomes the rear end of the pattern formation scheduled region when the film is attached to the substrate is near the downstream side of the film separation point in the film separation member. The above object is achieved by adjusting the length of the film path from the film separating member to the vicinity of the substrate so that the film is positioned. It is intended.

[0018]

According to the present invention, as described in claim 4, a film obtained by coating a light-transmitting support film with a photosensitive resin layer and further laminating a cover film is unwound from an original film roll to separate the film. In the film sticking device, wherein the cover film is peeled off by a member, and then the photosensitive resin layer is brought into contact with the film sticking surface of the board sequentially conveyed along the board conveying surface, and the film is stuck to the board. The film path length from the transport surface to the film separating member is the rear end of the pattern formation region when the film is attached to the substrate when the movement of the film in the substrate transport surface direction is stopped for 10 seconds or more. The above-mentioned object can be achieved by setting the part to be located near the downstream side of the film separation point in the film separation member. That.

According to a sixth aspect of the invention, in the fifth aspect of the invention, the position of the film separating member is movable with respect to the substrate transfer surface and is also fixed within a movable range.

In another apparatus invention, as in claim 6 , a photosensitive resin layer is applied to a translucent support film, and a cover film is laminated on the film, and the film is unwound from an original film roll to separate the film. In the film sticking device, in which the cover film is peeled off by the member, and then the photosensitive resin layer is brought into contact with the film sticking surface of the substrate sequentially conveyed along the board conveying surface to press-bond the film, When the movement in the direction is stopped for 10 seconds or longer, the film is to be the rear end of the pattern formation area when the film is attached to the substrate, and the front end of the pattern formation area of the film to be attached to the next substrate. Parts and
The above object is achieved by providing a film path length adjusting device that adjusts the length of the film path from the film separating member to the vicinity of the substrate so as to be located near both sides of the film separating point in the film separating member. is there.

According to a seventh aspect of the invention, in the sixth aspect of the invention, a cutter that cuts the film according to the length of the substrate and a tip end of the film cut by the cutter are attracted and held in the substrate direction. And a temporary attaching member for temporarily attaching the film front end to the substrate front end on the substrate transport surface, the temporary attaching member being the rear end of the pattern formation area when the film is attached to the substrate after the film front end is adsorbed. The film path length adjusting device that waits until the temporary attachment operation starts after moving in the substrate transport surface direction until the portion to be positioned is located in the vicinity of the downstream side of the film separation point in the film separation member. .

[0023]

[0024]

[0025]

In the present invention, the film path length when the movement of the film is stopped when the film is attached to the substrate is a portion corresponding to the rear end of the pattern formation region of the film in the attached state to the substrate. Is located near the downstream side including the film separation point of the film separation member, and even if streaks are generated in the film due to the film stop for a long time, this is the rear side of the rear end of the pattern formation area of the film. By making them close to each other, the streaks generated in the film do not cause a product defect of the substrate.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of an embodiment of the present invention will be described below with reference to the drawings.

First, a schematic structure of the film sticking apparatus 10 according to the present invention will be described with reference to FIG.

The film 12 cut and stuck by the film sticking device 10 is, as shown in FIG. 2, a photosensitive resin layer 12B on a translucent support film 12A.
And a cover film 12C are laminated to form a three-layer structure, which is continuously wound around the supply roll 14.

The film 12 unwound from the supply roll 14 is bent along the acute film separation point 16A of the film separation member 16 to peel off the cover film 12C, and the adhesive surface of the photosensitive resin layer 12B is removed. It is exposed and is supplied to the main vacuum plate 22 forming a part of the temporary attachment member 20 via the tension roll 18. The peeled cover film 12C is configured to be wound by a winding roll 24.

The supply roll 14 and the film separating member 1
6, the tension roll 18, the tacking member 20, the winding roll 24, etc. are vertically symmetrically provided on the upper and lower sides of the substrate transport surface I-I in FIG. 1 (the lower side is not shown), The film 12 is attached to the front surface (upper figure) and the back surface (lower surface) of the substrate 26. Unless otherwise specified, only the upper device will be described below and will be replaced with the description of the lower device.

As shown in FIGS. 3 and 4, the main vacuum plate 22 is a film in which a large number of suction grooves 22A and suction holes 22B to which a negative pressure is applied are provided on the surface and the cover film 12C is peeled off. 12 (hereinafter referred to as the film 12 unless otherwise specified) is adsorbed, and is slidably supported by a vertical guide rail 28 in the drawing, and guided by a drive device 30 such as an air cylinder or a servomotor. Along the rail 28, it is possible to approach and separate from the film sticking position, that is, to approach and separate from the substrate transport surface I-I.

Further, at the tip of the main vacuum plate 22 on the substrate transfer surface I-I side, the film is temporarily attached to the main vacuum plate 22 which is continuously curved from the surface and has a film suction groove 21C formed on the surface. The member main body 21 is connected. This film temporary attachment body 2
A seal bar 32 extending in the width direction of the film is attached to the leading end of the film 1 in the film feeding direction.

The seal bar 32 is made of a material which is elastically deformable to some extent, such as heat resistant hard rubber (including silicone rubber) supported by a block member 50 (described later) attached to the film temporary attachment member body 21. Is
It is provided at a position where the film is temporarily attached to the substrate 26 in the substrate feeding direction.

Further, the tacking member 20 is movable from a position where the tip of the tacking member 20 contacts the upper surface of the substrate 26 on the substrate carrying surface II, to a standby position shown by a solid line in FIG. However, between the standby position and the substrate transport surface I-I, along the feed surface of the film 12,
From the temporary attachment member 20 side to the film holding member 34 for winding the leading end.
And the rotary cutter 36 are arranged in this order.

The rotary cutter 36 is unwound from the supply roll 14 and covers the cover film 12C.
The front end of the peeled film 12 is cut and aligned so that the front end is parallel to the front edge of the substrate 26, and the film 12 is sequentially cut into a length corresponding to the substrate 26. There is.

Further, the film holding member 34 for winding the leading end is used.
Is for cutting the film with the rotary cutter 36,
In FIG. 1, it moves forward to the left, the tip reaches the film passing surface, and after cutting it moves back to a standby position where it does not interfere with the tacking member 20. Is provided with a suction groove and a suction hole (both not shown) to which a negative pressure is applied.
By adsorbing and holding the film 12 when the film is cut by the rotary cutter 36 and adsorbing the tip end of the film 12 that has been cut and aligned, and pulling this in the right direction in FIG. Wrap around the temporary attachment member main body 21 of the temporary attachment member 20,
In addition, the film suction groove 21C at the tip portion thereof sucks the film tip portion onto the temporary attachment member main body 21.

The main vacuum plate 22 is on the path side of the film 12 and has the suction groove 2 on the surface.
2A formed suction plate 23A, and the suction plate 23A,
On the side opposite to the film path, a backup member 23D is connected by a set screw 23C via a frame-shaped heat resistant packing 23B.

The frame-shaped heat-resistant packing 23B has a plurality of vacuum spaces 23E in the film width direction. Each vacuum space 23E is formed near the center thereof and communicates with a vacuum source (not shown) via a vacuum port 23F penetrating the backup member 23D in the thickness direction.

The suction groove 22 in the suction plate 23A
A extends in a direction orthogonal to the film feeding direction, and is formed in a plurality of rows in the film feeding direction, each of which is in a position communicating with the vacuum space 23F.
It communicates with the plurality of suction holes 22B penetrating to the vacuum space 23F side.

The film tacking member body 21 is shown in FIG.
As shown in FIG.
The inclined suction surface 21B that is continuous from the surface of and is inclined with respect to the surface is provided with the film suction grooves 21C in a plurality of rows in the direction orthogonal to the film feeding direction.

A plurality of vacuum holes 21 formed at appropriate intervals in the longitudinal direction of the film suction grooves 21C.
D is communicated, and these vacuum holes 21D are communicated with the vacuum passage 21E in the film temporary attachment member main body 21. The vacuum passage 21E is connected to a vacuum source (not shown) via the negative pressure pipe 21F.

The inclined suction surface 21B forms an acute angle with the back surface of the film temporary attachment member main body 21 which is parallel to the surface of the main vacuum plate 22, and the tip portion is
The block member 50 in which the heater 50A is embedded is formed by the lower end portion in the figure. The heater 50
Around A, a heat diffusion compound 50B with good heat conductivity
Are filled (see FIG. 6).

The block member 50 is fitted and mounted in the mounting groove 21G formed on the back surface of the film temporary mounting member main body 21 in the width direction of the film and also serving as a vacuum passage.
Further, it is joined to the film temporary attachment member main body 21 via the heat insulating rubber seal 51.

As shown in an enlarged view in FIG. 6, the lower end of the heat insulating rubber seal 51 is shorter than the inclined suction surface 21B, thereby forming a substantially triangular groove 51A at the lower end, and at the lower end thereof. A plurality of slits 51B communicating with the lower ends of the adjacent vacuum holes 21D are formed intermittently in the film width direction, whereby negative pressure from the vacuum holes 21D is introduced into the grooves 51A.

At the lower end of the block member 50, as shown in FIG.
As shown in enlarged form, a groove 54 in the film width direction that opens downward is formed, and the seal bar 32 made of round bar rubber is elastically fitted in the groove 54.

Except for both ends of the block member 50 in the film width direction, the groove 54 has an inverted trapezoidal cross-sectional shape in which the upper bottom surface 54A side is wide and the lower end opening 54B side is narrow in the figure. The diameter of the circular cross section parallel to the trapezoidal bottom surface 54A is elastically attached in a state of entering the groove 54 into the bottom surface 54A side from the tip opening 54B.

Further, the groove 54 extends upward as shown in FIG. 5 to both ends of the block member 50 in the film width direction, and the seal bars 32 are pressed on both side surfaces of the block member 50 in the film width direction. It is fixed by metal fittings 56 (see FIG. 7).

As shown in FIGS. 4 and 6, suction grooves 58 and 60 are provided on both sides of the groove 54 in the block member 50 for sucking the film front end portion by negative pressure.
Further, a negative pressure from the mounting groove 21G is introduced into the suction grooves 58 and 60 through the vacuum passages 58A and 60A.

Here, as shown in FIG. 5, the suction grooves 58 and 60 are formed continuously on the lower surface of the block member 50 in the film width direction, and the vacuum passages 58A and 58A are formed.
60A are formed at regular intervals in the film width direction.

The rotary cutter 36 has a substantially straight fixed blade 36A which is arranged in the width direction of the film 12 and is parallel to the film passing surface, and the rotation center axis of the fixed blade 3 is fixed.
6A and a structure rotary blade 36B in which a cutting blade is spirally wound around a cylindrical outer circumference of a member (column or cylinder) arranged substantially parallel to 6A, and the rotary blade 36B passes through the film with respect to the fixed blade 36A. The film 12 on the film passage surface is cut in the width direction at that position by rotating while contacting on the surface.

Here, the fixed blade 36A is the rotary blade 36.
B can be moved forwards and backwards in a direction orthogonal to the film passing surface, is unwound from the supply roll 14, and is moved forward to a position in which the cover film 12C comes into contact with the rotary blade 36B only when the peeled film 12 is cut. In the normal state, the retracted position is set apart from the rotary blade 36B (drive mechanism not shown).

Reference numeral 40 in FIG. 1 denotes a driving roller in the substrate transport mechanism, 42 denotes a driven roller, 44 denotes a substrate pressing member, 46 denotes a substrate leading end position detecting optical sensor, and 48 denotes a lamination roll.

Here, the outer diameter of the lamination roll 48 gradually increases from both axial ends toward the center. When a so-called crown roll is used, when a wide film is attached to the substrate 26, wrinkles do not occur in the widthwise central region of the film and the tension pressure does not become insufficient.

The substrate pressing member 44 comprises a substrate pressing roller 44A and a substrate pressing roller air cylinder 44B for moving the substrate pressing roller 44A up and down.

The mutual relationship among the lamination roll 48, the driving roller 40, the substrate pressing member 44 and the substrate front end position detecting optical sensor 46 is as follows.

The front end of the leading substrate 26 conveyed from left to right in FIG. 1 is detected by the substrate front end position detection optical sensor 46 provided in the vicinity of the substrate transfer surface I-I, and after a predetermined time. The same substrate 2 to the film temporary attachment position
When 6 is conveyed, the rotation of the driving roller 40 is stopped. At the same time, the substrate 26 is pressed by the substrate pressing member 44.
Air cylinder 44B for the substrate pressing roller so that
As a result, the substrate pressing roller 44A is driven.

The substrate 2 is held by the substrate pressing roller 44A.
Even if the film temporary attachment member main body 21 which is the tip of the temporary attachment member 20 contacts the substrate 26, the substrate 26 does not move and the temporary attachment to the film 12 is reliably performed. .

The substrate 26 by the substrate pressing roller 44A
Is carried out until the lamination roll 48 comes into contact with the substrate 26, and in synchronization with the contact timing of the lamination roll 48, the substrate holding roller air cylinder 44
B is released.

Reference numeral S1 in the drawing is a width-shift start position sensor, S
2 is a substrate rear end detection sensor, and S3 is a substrate passage detection sensor.

Further, reference numeral 72 in FIG. 1 is disposed on the opposite side of the film winding member 34 for tip winding from the path of the film 12 and in the direction of the inclined suction surface 21B of the temporary attachment member main body 21. An air blow pipe for blowing a compressed air flow is shown in FIG.

As shown in FIG. 8, the air blow pipe 72 is provided with an air blow case 72B having a nozzle 72A continuously formed in the film width direction at the tip end on the side of the inclined suction surface 21B, and an air blow case 72B. Air blow case 7
A jet hole 72 for blowing air toward the nozzle 72A while being arranged in the film width direction in 2B.
An air pipe 7 in which a large number of Cs are intermittently formed in the longitudinal direction
2D, and the air flow blown out from the air pipe 72D is rectified by the nozzle 72A and blown toward the inclined suction surface 21B of the film temporary attachment member main body 21.

Compressed air is supplied to the air pipe 72C from both longitudinal ends thereof. Further, the compressed air supply time, that is, the air flow blowing time from the nozzle 72A, is immediately before the start of the movement of the leading end winding film holding portion 34 to the right in the figure, that is, the adsorbed film leading end is directed toward the temporary attaching member 20. It is set from immediately before the start of pulling to the end of winding the film 12 around the leading end.

Reference numeral 74 in FIG. 1 indicates the rotary cutter 3.
Film guide rolls 36, which are arranged in the vicinity of the downstream side of 6, are air blow pipes, respectively. The air blow pipe 76 ejects compressed air toward the suction bar 78 for the film rear end provided on the lamination roll 48 side, and the rear end of the film 12 cut by the rotary cutter 36 moves toward the suction bar 78. It flutters.

Reference numeral 82 in FIG. 1 denotes a lowering prevention guide plate which is arranged between the driving rollers 40 and below the substrate carrying surface I-I. These guide plates 82 are horizontal plate-like members whose rear end side in the substrate transport direction is inclined downward, and the leading ends of the substrates 26 transported on the substrate transport surface I-I hang down so that the drive roller 40 is driven. It is to prevent the entry.

Reference numeral 84 indicates a pair of free rollers arranged between the lower lamination roll 48 and the drive roller 40 immediately before it, in close proximity to the lower side of the substrate carrying surface II. . As shown in the enlarged view of FIG. 9, the free roller 84 is rotatably supported by a frame 88 that is advanced and retracted by an air cylinder 86 in the substrate feeding direction, and the substrate tip position detection optical sensor 46 detects the tip of the substrate 26. When detected, it is moved in the substrate feeding direction by the air cylinder 86, and the tip of the substrate 26 is moved to the lamination rolls 48, 48.
It is supposed to lead in between. Further, when the film is attached to the substrate 26, the original position is restored. The operation timing and the like are similar to those disclosed in Japanese Examined Patent Publication No. 3-27334.

Reference numerals 90A and 90B in FIG. 1 denote upper and lower frames 48A for supporting the lamination roll 48, respectively.
A board roll-up prevention guide plate attached to 48B, and
The board lowering prevention guide plates are shown respectively. The substrate roll-up prevention guide plate 90A is a flat plate-shaped member that is provided so as to be inclined toward the upper left in FIG. 1, and the substrate fall prevention guide plate 90B is a horizontal plate-shaped member that is inclined at the left end downward in FIG. In these, the substrate 26 on which the film is stuck is wound up following the rotation of the lamination roll 48,
It prevents it from falling.

Next, the control system of the film sticking apparatus will be described with reference to FIG.

In this control system, each sensor 46, S
1 to S3, detection sensors (not shown) at the front and rear ends of each cylinder are arranged such that the central control unit 70 outputs control signals for each cylinder solenoid and each motor in accordance with each film winding diameter sensor. . It also has the functions of a counter and a timer.

The central control unit 70 is configured to control the film sticking device 10 according to a predetermined procedure. The central control unit 70 can be composed of, for example, a programmable control or a relay sequence circuit.

Here, the central control unit 70 controls the film 12 cut by the rotary cutter 36.
The tip end of the tacking member 20 is wound around the tip end of the tacking member 20 by the tip winding film holding member 34 and sucked, and then the tacking member 20 is further moved by the driving device 30 by a predetermined amount in the substrate transport surface II direction. It is designed to move forward.

With this predetermined amount, the rear end of the film 12 to be attached to the rear end of the substrate 26 (the front end of the next film 12) is located in the vicinity of the film separation point 16A, which is the acute end of the film separation member 16. Up to the direction of the substrate 26. More specifically,
As shown in FIG. 16, the rear end 13A in the substrate transport direction in the pattern formation scheduled region 13 when the film 12 is attached to the substrate 26 is located in the vicinity of the downstream side of the film separation point 16A in the film transport direction, and Board 26
The front end 13B in the pattern formation planned region 13 of the film 12 attached to the film is the film separation point 16A.
The film path length is increased so that the film path length becomes closer to the upstream side.

Next, the operation of the film sticking device 10 will be described.

First, the lamination roll 48 is at the retracted position shown by the solid line in FIG. 1, the leading end winding film holding member 34 is at a position where the leading end surface is separated from the film passing surface,
The fixed blade 36A of the rotary cutter 36 is the rotary blade 36B.
Respectively, the film 12 is pulled out from the supply roller 14, the cover film 12C is peeled from the leading end, and the film 12 is bent along the film separation point 16A of the film separation member 16 and wound on the winding roll 24. While pulling the film 12 down, the film 12 is pulled down along the film passing surface on the left side of the temporary holding member 20 and the film holding member 34 for winding the leading end, and the rotary cutter 3
6 between the fixed blade 36A and the rotary blade 36B.

Next, as shown in FIG. 11 (A), a negative pressure is applied to the temporary attaching member 20 to adsorb the film 12, and the leading end winding film holding member 34 is also advanced to the film passing surface position. Then, the film 12 is adsorbed by applying a negative pressure.

In this state, the fixed blade 36A is moved forward and the rotary blade 36B is rotated to cut the film 12 on the film passing surface, and the leading ends thereof are cut and aligned. The cut film 12 on the tip side of the rotary cutter 36 is discarded. Next, the fixed blade 36A is separated from the rotary blade 36B, and the leading end winding film holding member 34 is attached to the leading end surface of the film 12 while adsorbing the leading end portion of the film 12 on the leading end surface.
In (A), it is moved to the right.

At this time, a negative pressure is applied in advance to the suction grooves 58, 60 on both sides of the film suction groove 21C and the groove 54 at the tip of the temporary attachment member main body 21, and in this state,
When the leading end winding film holding member 34 moves to the right in the figure, the leading end portion of the adsorbed film 12 becomes
As shown in FIG. 11B, the temporary attachment member main body 21 is wound along the front end portion thereof, is adsorbed by the negative pressure of the film adsorption groove and the suction hole, and is separated from the front end winding film holding member 34. .

The tip of the film 12 is the temporary attachment member main body 2
When the film is wound around the front end portion of No. 1, the compressed air flow blown out from the nozzle 72A of the air blow pipe 72 blows the front end of the film 12 in the direction of the inclined suction surface 21B, and thus is separated from the front end winding film holding member 34. The leading end of the film is surely adsorbed along the inclined adsorption surface 21B without sagging or bending.

Since the cutting position of the rotary cutter 36 is adjusted in advance so that the tip of the film 12 reaches slightly beyond the seal bar 32, the tip of the film hangs down below the seal bar 32 in the sucked state. Never.

Here, the tip of the film is adsorbed by the adsorption groove 60 even at a position beyond the seal bar 32. However, when the film thickness is a certain value or more and the rigidity is large, the adsorption groove 5 is formed.
Even if only 8 is picked up, it will not hang down, so the suction groove 6
0 is unnecessary.

Next, as shown in FIG. 11C, the central control unit 70 causes the temporary attaching member 20 to adsorb the film as shown in FIG.
-Drive in the I direction.

Main vacuum plate 22 at this time
As described above, the amount of drive of the substrate in the direction of the substrate transport surface I-I is the portion corresponding to the rear end 13A of the pattern formation scheduled region 13 in the state where the film 12 is attached to the substrate 26 and the next substrate 26.
The portion of the film 12 to be attached to the film 12 which is to be the tip 13B of the pattern formation scheduled region 13 is set to be on both sides of the film separation point 16A of the film separation member 16.

In this state, the temporary attachment member 20 is attached to the next substrate 2
Waiting until the tip of 6 stops at the temporary attachment position.

The board 26 is carried along the board carrying surface II, and is stopped when the tip of the board 26 reaches the temporary mounting position.
Next, with the tip end of the tacking member main body 21 covered with the seal bar 32, the tacking member 20 is guided by the drive device 30 while the tip end portion of the film 12 is adsorbed.
11D until the leading end of the film 12 contacts the upper surface of the leading end position of the leading substrate 26 stopped at the temporary attachment position via the leading end of the film 12, as shown in FIG. 11D. . Further, in synchronization with this, the temporary attachment member 20 on the lower side is also raised.

As a result, the seal bar 32 temporarily attaches the front end portion of the film 12 to the front surface and the back surface of the front end of the substrate 26, and then the temporary attachment member 20 including the temporary attachment member main body 21 has a negative pressure. It is released, and is separated to the position of FIG. 11 (E), and stands by until the next temporary attachment. As described above, since the leading end of the film 12 does not hang down below the seal bar 32, temporary attachment is performed accurately without wrinkles or overlapping.

The stopping of the substrate 26 and the restraint by the substrate pressing roller 44A at the time of stopping at this temporary attachment position are as described above.

Tip portion 2 with film 12 temporarily attached
6A, the lamination roll 48 is driven from the position indicated by the solid line in FIG. 1 to the position indicated by the chain double-dashed line in FIG.
As shown in FIG. 3, the film 12 is pressed against the substrate 26, and in this state, the air cylinder 4 for the substrate pressing roller is pressed.
4B is released. Next, the lamination roll 48 is rotated so as to drive the substrate 26 from the left side to the right side in FIG. 1 in synchronization with the driving roller 40 of the conveying device for the substrate 26, and the film 12 is rotated on the upper surface of the substrate 26 while rotating. Thermocompression bonding to.

After that, the film 1 with the cover film 12C peeled off from the substrate 26 which is intermittently conveyed.
2 is cut by the rotary cutter 36 in the above-described fixed size, sequentially drawn out from the portion to be cut next by the temporary attaching member 20, and then temporarily attached to the substrate 26 and then thermocompression bonded by the lamination roll 48. Will be done.

As described above, in the process in which the film 12 is sequentially thermocompression-bonded to the substrate 26 by the lamination roll 48, from the time when the film 12 is adsorbed and held by the temporary attaching member 20 to the time when it is temporarily attached to the front end of the substrate 26. When the standby time is longer than 10 seconds, the exposed photosensitive resin layer 12B in the film 12 is slightly cured, and when the film 12 starts moving next, it is slightly cured at the position of the film separation point 16A at the tip of the film separation member 16. Although the photosensitive resin layer 12B is forcibly peeled from the cover film 12C, streaks are generated in the film width direction.
Since this streak is always present between the rear end 13A of the pattern formation scheduled region 13 of the film that is stuck to the substrate and the front end 13B of the pattern formation scheduled region 13 of the film that is stuck to the next substrate, After the film 12 is attached to the substrate 26, the streaks do not enter the pattern formation region even after the exposure process.
Therefore, it does not cause a product defect.

In the film sticking apparatus 10, the film 12 is pulled out by the tacking member 20 after the film is cut, and the portion to be cut next is adjusted so as to be located near the tip of the film separating member 16. However, the present invention is not limited to this, and when the film feed is stopped and the substrate is in a standby state until the substrate is conveyed, the portion to be cut next to the film is the film separating member 16.
It is sufficient that the film path length can be changed so as to be located in the vicinity of the film separation point 16A.

For example, as shown in FIG. 12, in the film sticking apparatus as shown in FIG. 1, the film separating member 9
2 may be moved in the film feeding direction to provide a separating member displacement device 94 for changing the film path length, which may be controlled by the central control unit 70.

The drive timing of the separating member displacing device 94 by the central control device 70 is set such that the cut film 12 is cut.
The film separating member 92 is driven after the leading end of the film has been sucked and held by the tacking member 20 and for less than 10 seconds after the film feeding is stopped, preferably immediately after the suction is completed.

Further, if the film sticking device has a sufficient space, a swinging roll 96 is provided as shown in FIG. 13, and after the swinging roll 96 sucks the leading end of the film onto the tacking member 20, The film 12 may be pushed in the direction of increasing the film path. Reference numeral 98 in FIG.
Indicates a rotary cylinder for driving the oscillating roll 96.

In this case, the oscillating roll 96 is controlled by the central control unit 70, and is arranged so as to come into contact with and push the transparent support film 12A side of the film 12 after the cover film 12C is peeled off.

Further, in the above-mentioned respective embodiments, the film 12 is cut for each substrate corresponding to the length of the substrate 26, and is temporarily attached to the substrate by the attaching member 20. Is not limited to this, and FIG.
The case where the film 12 is continuously attached to the plurality of substrates 26 which are intermittently and continuously conveyed as shown in FIG.

In this case, when the transfer of the substrate 26 is interrupted and the path of the film 12 is changed to the neutral position separated from the lamination roll 48, the path changing means 10 is used.
0 or this route changing means 100,
2 or the film path length adjusting device of FIG. 13 is provided,
When the film is stopped, the portion corresponding to the front end of the film separating member 16 is adjusted so as to be located between the vicinity of the rear end 26A of the substrate 26 and the vicinity of the front end 26B of the subsequent substrate 26.

In addition, in each of the embodiments described above, even when the length of the substrate is frequently changed, it is possible to cope with the situation without stopping the operation of the apparatus. When the number is large, the production efficiency does not decrease even if the apparatus is stopped every time the lot is changed. Therefore, for example, as shown in FIG. 14, the film separating member 102 can be manually moved within a certain range, and After moving so as to have a predetermined film path length, it may be fixed with bolts 104 or the like.

Although the film separating member 102 has a circular pipe shape, it may have a triangular shape as described above, and the film separating members 16 and 92 have other shapes such as a circular pipe. May be.

[0099]

Since the present invention is configured as described above, in the step of sticking a film on a substrate, even if the film feeding is stopped for a long time, the streak in the film width direction generated at the position of the film separating member is a substrate. Since it does not fall within the upper pattern formation region, it is possible to prevent defective products from being generated due to the stripes in the width direction.

[Brief description of drawings]

FIG. 1 is a schematic side view showing a film sticking device according to an example of an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing a state of the film attached by the film attaching apparatus before the cover film is peeled off.

FIG. 3 is an enlarged perspective view showing a temporary attachment member in the film attaching apparatus.

FIG. 4 is a sectional view showing the temporary attachment member in an enlarged manner.

FIG. 5 is a schematic front view showing a block member that constitutes a tip portion of the temporary attachment member.

FIG. 6 is a cross-sectional view showing the vicinity of the leading end of the temporary attachment member main body in the film attaching apparatus in a further enlarged manner.

FIG. 7 is an enlarged side view of a portion corresponding to line VII-VII in FIG.

FIG. 8 is an enlarged perspective view showing an air blow tube of the above apparatus.

FIG. 9 is a schematic side view showing a part of a substrate transfer system in the above apparatus.

FIG. 10 is a block diagram showing a configuration of electrical signal input / output of the device.

FIG. 11 is a schematic side view showing the operation of the main part of the above apparatus.

FIG. 12 is a side view schematically showing a main part of another embodiment of the present invention.

FIG. 13 is a schematic side view showing a main part of an example of still another embodiment of the present invention.

FIG. 14 is a schematic side view showing an example of still another embodiment of the present invention.

FIG. 15 is a schematic side view showing an example of still another embodiment of the present invention.

FIG. 16 is an enlarged side view showing a pattern formation planned region in a substrate and a film attached to the substrate.

[Explanation of symbols]

10 ... Film sticking device 12 ... Film 12A ... Translucent support film 12B ... Photosensitive resin layer 12C ... Cover film 13 ... Pattern formation planned area 13A ... rear end 13B ... Front end 16, 92 ... Film separating member 16A ... rear end 16B ... Tip 20 ... Temporary member 21 ... Film temporary attachment body 21B ... Inclined suction surface 21C ... Film suction groove 21D ... vacuum hole 22 ... Main vacuum plate 26 ... Substrate 30 ... Drive member 32 ... Seal bar 36 ... Rotary cutter 48 ... Lamination roll 70 ... Central control unit 94 ... Separation member displacement device 96 ... rocking roll 100: Route changing means II ... Substrate transfer surface

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) B29C 65/00-65/82

Claims (7)

(57) [Claims] 1. A film comprising a light-transmitting support film coated with a photosensitive resin layer, and a cover film laminated on the light-transmitting support film. The film is unwound from a raw film roll, and the cover film is peeled off by a film separating member. The end of the film is cut, the cut end of the film is adsorbed by the tacking member, and the photosensitive resin layer side is placed on the film sticking surface of the substrate sequentially transported along the substrate transporting surface of the tacking member. A film sticking method in which the film is cut according to the substrate while the film is pressure-bonded to the substrate after being temporarily attached by the leading end to form a trailing end serving as the leading end of the trailing film, and one-time joining is completed. When the film is attached to the substrate when the movement of the film in the substrate transport surface direction is stopped after the cut end of the film is adsorbed by the temporary attachment member, , A portion to be the rear end of the pattern formation scheduled area and a portion to be the front end of the pattern formation scheduled area of the film to be attached to the next substrate are located near both sides of the film separation point in the film separation member, A film sticking method, which comprises adjusting a length of a film path from the film separating member to a film front end. 2. The film according to claim 1, wherein after the cut end of the film is adsorbed by the temporary attaching member, the film is pulled out by the temporary attaching member to increase the film path length, and the film is conveyed in this state. A film sticking method, characterized in that a film is temporarily attached to the tip of an incoming substrate. 3. A photosensitive resin layer is applied to a translucent supporting film, and a film obtained by further laminating a cover film is unwound from a film original roll, the cover film is peeled off by a film separating member, and then the substrate is conveyed. In the film sticking method in which the photosensitive resin layer is brought into contact with the film sticking surfaces of a plurality of substrates that are intermittently conveyed along the surface, and the film is stuck continuously by a lamination roll, the substrate carrying surface of the film When the movement in the direction is stopped for 10 seconds or more, the portion which becomes the rear end of the pattern formation scheduled area at the time of sticking the substrate of the film is located near the downstream side of the film separation point in the film separation member, A film sticking method comprising adjusting the length of a film path from the film separating member to the vicinity of the substrate. 4. A photosensitive resin layer is applied to a translucent support film, and a film obtained by laminating a cover film is unwound from a film original roll, the cover film is peeled off by a film separating member, and then the substrate is conveyed. In a film sticking apparatus for bringing the photosensitive resin layer into contact with the film sticking surface of the substrate sequentially conveyed along the surface and crimping the film, a film path from the substrate conveying surface of the film to the film separating member. The length of the film separating member in the film separating member is a portion which becomes the rear end of the pattern formation region when the film is attached to the substrate when the movement of the film in the substrate conveying surface direction is stopped for 10 seconds or more. A film sticking device, which is set so as to be located near the downstream side of the point. 5. The film sticking apparatus according to claim 4 , wherein the position of the film separating member is movable with respect to the substrate transfer surface and is fixed within a movable range. 6. A photosensitive resin layer is applied to a translucent support film, and a film obtained by laminating a cover film is unwound from a film original roll, the cover film is peeled off by a film separating member, and then the substrate is conveyed. In a film sticking apparatus for bringing the photosensitive resin layer into contact with the film sticking surface of the substrate sequentially conveyed along the surface and pressing the film, when the movement of the film in the substrate conveying surface direction is stopped for 10 seconds or more. Of the film separating member in the film separating member, wherein a portion which becomes a rear end of the pattern formation scheduled area when the film is attached to the substrate and a portion which becomes a front end of the pattern formation scheduled area of the film attached to the next substrate. A film path length adjuster that adjusts the length of the film path from the film separating member to the vicinity of the substrate so that it is located near both sides of the point. A film sticking device, which is provided with a straightening device. 7. The cutter according to claim 6 , which cuts the film in accordance with the length of the substrate, and the film cut on the substrate is pulled and pulled toward the substrate while adsorbing and holding the leading end of the film on the substrate transfer surface. A temporary attachment member for temporarily attaching the film front end to the substrate front end is provided, and the temporary attachment member has the film separation after the adsorption of the film front end portion, and the portion which becomes the rear end of the pattern formation planned region when the film is attached to the substrate. A film sticking device, which also functions as a film path length adjusting device that waits until a temporary attachment operation starts after moving in the substrate transport surface direction until the member is located near the downstream side of the film separation point.