JPH09278535A - Production of ceramic - Google Patents
Production of ceramicInfo
- Publication number
- JPH09278535A JPH09278535A JP8921796A JP8921796A JPH09278535A JP H09278535 A JPH09278535 A JP H09278535A JP 8921796 A JP8921796 A JP 8921796A JP 8921796 A JP8921796 A JP 8921796A JP H09278535 A JPH09278535 A JP H09278535A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- particle size
- baking
- powder
- comparable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は例えば圧電磁器など
のセラミックスの製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing ceramics such as piezoelectric ceramics.
【0002】[0002]
【従来の技術】従来より、原料粉体の仮焼は焼成温度よ
りも低い温度で行われていた。2. Description of the Related Art Conventionally, calcination of raw material powder has been performed at a temperature lower than the firing temperature.
【0003】[0003]
【発明が解決しようとする課題】原料粉体の粒径が1.
0μm以下と小さくなるにしたがい、焼成温度を低くす
ることができる。しかし、圧電材料においては、原料粉
体の粒径を小さくして低温焼成すると、圧電性が低く、
高強度、高出力のセラミックスを得ることが困難であっ
た。The particle diameter of the raw material powder is 1.
As it becomes as small as 0 μm or less, the firing temperature can be lowered. However, in the piezoelectric material, when the raw material powder has a small particle size and is fired at a low temperature, the piezoelectricity is low,
It was difficult to obtain high strength and high output ceramics.
【0004】そこで、本発明は低温焼成においても優れ
た圧電性を示し、さらに高強度、高出力を可能にするセ
ラミックスを提供することを目的とするものである。Therefore, an object of the present invention is to provide a ceramic exhibiting excellent piezoelectricity even at low temperature firing and capable of high strength and high output.
【0005】[0005]
【課題を解決するための手段】この目的を達成するため
に本発明は、粒子径が0.5μm以下の原料粉体を焼成
温度と同等以上の温度で仮焼し、粉砕した後に、焼成す
るものであり、原料粉体の粒子径を微細にし、仮焼温度
を焼成温度と同等以上にすることにより、反応速度が増
し、結晶性が向上するので、低温焼成においても高温焼
成と同様の圧電性を示し、さらに結晶粒径の微細化にと
もない高強度のセラミックスを得ることができる。In order to achieve this object, the present invention is to calcinate a raw material powder having a particle size of 0.5 μm or less at a temperature equal to or higher than a calcining temperature, pulverize and calcinate. By making the particle size of the raw material powder fine and making the calcination temperature equal to or higher than the firing temperature, the reaction rate is increased and the crystallinity is improved. It is possible to obtain ceramics that exhibit high properties and have high strength as the crystal grain size becomes finer.
【0006】[0006]
【発明の実施の形態】本発明の請求項1に記載の発明
は、粒子径が0.5μm以下の原料粉体を焼成温度と同
等以上の温度で仮焼し、粉砕した後に焼成するものであ
り、原料粉体の粒子径を微細にし、仮焼温度を焼成温度
と同等以上にすることにより、反応速度が増し、結晶性
が向上するので、低温焼成においても高温焼成と同様の
圧電性を示し、さらに結晶粒径の微細化にともない高強
度磁器を得ることができる。BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is one in which a raw material powder having a particle diameter of 0.5 μm or less is calcined at a temperature equal to or higher than the firing temperature, pulverized and then fired. If the particle size of the raw material powder is made fine and the calcination temperature is equal to or higher than the firing temperature, the reaction rate is increased and the crystallinity is improved. Further, it is possible to obtain a high-strength porcelain as the crystal grain size becomes finer.
【0007】請求項2に記載の発明は、原料粉体として
鉛系の材料を用いるものであり、原料粉体の粒子径を微
細にすることにより、焼成温度と同等以上の温度で仮焼
したとしても、鉛成分の飛翔量が少なく、結晶性のすぐ
れた粉体を得ることができるので、低温焼成した場合で
も、圧電性のよい高出力、高強度のセラミックスを得る
ことができる。According to the second aspect of the present invention, a lead-based material is used as the raw material powder, and the raw material powder is calcined at a temperature equal to or higher than the firing temperature by making the particle diameter fine. Also, since the flying amount of the lead component is small and a powder having excellent crystallinity can be obtained, it is possible to obtain a high-output and high-strength ceramic having good piezoelectricity even when fired at a low temperature.
【0008】請求項3に記載の発明は、仮焼後の粉砕し
た粉体の粒子径を0.5μm以下とするものであり、原
料粉体の粒径と同等以下にすることにより、より低温で
焼成することができる。According to the third aspect of the invention, the particle size of the pulverized powder after calcination is set to 0.5 μm or less. Can be fired at.
【0009】以下本発明の一実施の形態について説明す
る。 (実施の形態1)まず、出発原料として、PbO,Sr
CO3,ZnO,SnO2,Nb2O5,TiO2,Zr
O2,MnCO3を用いて、Pb(Zn1/3Nb2/3)0.06
(Sn1/3Nb2/3)0.12Ti0.42Zr0.40O3+0.5
wt%MnO2となるように秤量した。次にこれらの原
料に水、分散剤などを加えて、媒体撹拌ミルまたはボー
ルミル等で湿式混合し、混合粒子径が(表1)に示すよ
うになるようにした。An embodiment of the present invention will be described below. (Embodiment 1) First, as starting materials, PbO, Sr
CO 3 , ZnO, SnO 2 , Nb 2 O 5 , TiO 2 , Zr
Using O 2 and MnCO 3 , Pb (Zn 1/3 Nb 2/3 ) 0.06
(Sn 1/3 Nb 2/3 ) 0.12 Ti 0.42 Zr 0.40 O 3 +0.5
Weighed so as to be wt% MnO 2 . Next, water, a dispersant and the like were added to these raw materials and wet-mixed with a medium stirring mill or a ball mill so that the mixed particle diameter was as shown in (Table 1).
【0010】[0010]
【表1】 [Table 1]
【0011】次いで、この混合粉でスラリーを作成し、
乾燥後、粉体のままでマグネシア磁器坩堝に入れ、(表
1)の温度条件で2時間仮焼した。解砕後、混合時と同
じ条件でボールミルまたは媒体撹拌ミル等で湿式粉砕し
た。乾燥後、バインダーを加え、擂潰機で均質に撹拌し
た後、32メッシュの篩を用いて整粒を行った。この粉
体を直径13mm、厚み1mmの円板に70MPaの圧
力で成形した。次いでこの成形物を700℃の空気中で
熱処理を行ってバインダーを焼却した。バインダーの焼
却後鉛成分の飛散を防ぐために、1100〜1200
℃、空気中で焼成を行った。次にこの焼結体を厚みを
0.3mmに平面研磨後、電極は真空蒸着でCr−Au
をつけた。分極は150℃のシリコン油中で3kV/m
mの直流電流を30分印加して行った。また圧電定数を
共振−反共振法で測定した。その結果を(表1)に記
す。(表1)から明らかなように、従来の工法では、焼
成温度が1290℃以上でなければ得られない圧電特性
が、本実施の形態による圧電セラミックスは、混合粒径
を0.5μm以下に粉砕し、仮焼温度を焼成条件と同等
以上で行った粉体を0.5μm以下に粉砕した場合、1
100℃の低温焼結の場合でも誘電率が1270以上結
合係数が0.58以上と従来の製造方法以上の圧電性が
得られることがわかる。Next, a slurry is prepared from this mixed powder,
After drying, the powder was put in a magnesia porcelain crucible as it was, and calcined for 2 hours under the temperature condition of (Table 1). After crushing, wet crushing was performed with a ball mill or a medium stirring mill under the same conditions as when mixing. After drying, a binder was added, and the mixture was homogeneously stirred with a grinder, and then sized using a 32 mesh sieve. This powder was molded into a disk having a diameter of 13 mm and a thickness of 1 mm at a pressure of 70 MPa. Next, this molded product was heat-treated in air at 700 ° C. to incinerate the binder. After incineration of the binder, to prevent scattering of lead components, 1100 to 1200
Firing was performed in the air at ℃. Next, this sintered body was flat-polished to a thickness of 0.3 mm, and the electrodes were vacuum-deposited with Cr-Au.
I attached. Polarization is 3kV / m in 150 ° C silicon oil
The direct current of m was applied for 30 minutes. Moreover, the piezoelectric constant was measured by the resonance-antiresonance method. The results are shown in (Table 1). As is clear from (Table 1), in the conventional method, the piezoelectric characteristics that cannot be obtained unless the firing temperature is 1290 ° C. or higher, but the piezoelectric ceramics according to the present embodiment are pulverized to a mixed particle size of 0.5 μm or less. When pulverized to a particle size of 0.5 μm or less by calcination at a temperature equal to or higher than the calcination condition, 1
It can be seen that even in the case of low temperature sintering at 100 ° C., the dielectric constant is 1270 or more, the coupling coefficient is 0.58 or more, and piezoelectricity higher than that of the conventional manufacturing method can be obtained.
【0012】さらに好ましくは混合粒径を0.2μm以
下、また仮焼後の粉体の粒径を0.2μm以下にするこ
とによりさらにすぐれた圧電特性を有する圧電磁器を得
ることができる。More preferably, by setting the mixed particle size to 0.2 μm or less and the particle size of the powder after calcination to 0.2 μm or less, a piezoelectric ceramic having further excellent piezoelectric characteristics can be obtained.
【0013】なお、本実施の形態での組成は一例であっ
て、他にもPbO−TiO2−ZrO2−(Zn1/3Nb
2/3)O2,PbO−TiO2−ZrO2−(Mg1/3Nb
2/3)O2,PbO−TiO2−(Ni1/3Nb2/3)O2,
PbO−TiO2−ZrO2−(Sn1/3Nb2/3)O2系
など鉛を含む材料つまり固相反応を発生するセラミック
材料についても同様の作用を得た。Note that the composition in this embodiment is an example, and PbO-TiO 2 -ZrO 2- (Zn 1/3 Nb) is also used.
2/3 ) O 2 , PbO-TiO 2 -ZrO 2- (Mg 1/3 Nb
2/3 ) O 2 , PbO-TiO 2- (Ni 1/3 Nb 2/3 ) O 2 ,
Similar effects were obtained also for materials containing lead such as PbO—TiO 2 —ZrO 2 — (Sn 1/3 Nb 2/3 ) O 2 system, that is, ceramic materials that generate solid-state reaction.
【0014】[0014]
【発明の効果】以上のように、本発明によると、例えば
セラミックスの組成がPbO−ZrO 2−TiO2系のよ
うな鉛系を含む圧電材料の場合、仮焼段階で結晶性の優
れた粉体を得ることができるもので、その粉体を用いて
得られた焼結体は、低温焼結した場合でも高温焼成の場
合と同様以上の圧電性の良い高出力・高強度を有するも
のである。As described above, according to the present invention, for example,
Ceramic composition is PbO-ZrO Two-TiOTwoSystem
In the case of a piezoelectric material containing lead-based materials, the crystallinity is excellent at the calcination stage.
It is possible to obtain
Even if the obtained sintered body is sintered at low temperature,
It has high output and high strength with good piezoelectricity
Of.
Claims (3)
成温度と同等以上の温度で仮焼し、粉砕した後に、焼成
することを特徴とするセラミックスの製造方法。1. A method for producing ceramics, characterized in that a raw material powder having a particle diameter of 0.5 μm or less is calcined at a temperature equal to or higher than a firing temperature, pulverized, and then fired.
徴とする請求項1に記載のセラミックスの製造方法。2. The method for producing ceramics according to claim 1, wherein the raw material powder is a lead-based material.
μm以下であることを特徴とする請求項1に記載のセラ
ミックスの製造方法。3. The particle size of the pulverized powder after calcination is 0.5.
The method for producing ceramics according to claim 1, wherein the ceramics has a thickness of not more than μm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8921796A JPH09278535A (en) | 1996-04-11 | 1996-04-11 | Production of ceramic |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8921796A JPH09278535A (en) | 1996-04-11 | 1996-04-11 | Production of ceramic |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09278535A true JPH09278535A (en) | 1997-10-28 |
Family
ID=13964563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8921796A Pending JPH09278535A (en) | 1996-04-11 | 1996-04-11 | Production of ceramic |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09278535A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005051862A1 (en) * | 2003-11-26 | 2005-06-09 | Kyocera Corporation | Piezoelectric ceramic and laminated piezoelectric device |
US7056443B2 (en) | 2002-05-30 | 2006-06-06 | Tdk Corporation | Piezoelectric ceramic production method and piezoelectric element production method |
KR100673192B1 (en) * | 2000-12-27 | 2007-01-22 | 주식회사 하이닉스반도체 | Method for manufacturing a dielectric film using pieazoelectric ceramics |
EP1875526A1 (en) * | 2005-04-11 | 2008-01-09 | Piezotech, LLC | Compositions for high power piezoelectric ceramics |
CN108046807A (en) * | 2017-12-04 | 2018-05-18 | 郑州搜趣信息技术有限公司 | A kind of piezoelectric ceramics of stabilization and preparation method thereof |
-
1996
- 1996-04-11 JP JP8921796A patent/JPH09278535A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100673192B1 (en) * | 2000-12-27 | 2007-01-22 | 주식회사 하이닉스반도체 | Method for manufacturing a dielectric film using pieazoelectric ceramics |
US7056443B2 (en) | 2002-05-30 | 2006-06-06 | Tdk Corporation | Piezoelectric ceramic production method and piezoelectric element production method |
EP1367036A3 (en) * | 2002-05-30 | 2006-09-27 | TDK Corporation | Piezoelectric ceramic production method and piezoelectric element production method |
WO2005051862A1 (en) * | 2003-11-26 | 2005-06-09 | Kyocera Corporation | Piezoelectric ceramic and laminated piezoelectric device |
EP1875526A1 (en) * | 2005-04-11 | 2008-01-09 | Piezotech, LLC | Compositions for high power piezoelectric ceramics |
EP1875526A4 (en) * | 2005-04-11 | 2011-01-05 | Piezotech Llc | Compositions for high power piezoelectric ceramics |
CN108046807A (en) * | 2017-12-04 | 2018-05-18 | 郑州搜趣信息技术有限公司 | A kind of piezoelectric ceramics of stabilization and preparation method thereof |
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