JP2841344B2 - Piezoelectric ceramic composition - Google Patents
Piezoelectric ceramic compositionInfo
- Publication number
- JP2841344B2 JP2841344B2 JP2034715A JP3471590A JP2841344B2 JP 2841344 B2 JP2841344 B2 JP 2841344B2 JP 2034715 A JP2034715 A JP 2034715A JP 3471590 A JP3471590 A JP 3471590A JP 2841344 B2 JP2841344 B2 JP 2841344B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- composition
- ceramic composition
- powder
- magnesium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 title claims description 30
- 239000000919 ceramic Substances 0.000 title claims description 27
- 239000011777 magnesium Substances 0.000 description 20
- 239000000843 powder Substances 0.000 description 15
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 13
- 229910052749 magnesium Inorganic materials 0.000 description 13
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 10
- 239000000395 magnesium oxide Substances 0.000 description 9
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 4
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 4
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000001095 magnesium carbonate Substances 0.000 description 3
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 150000002823 nitrates Chemical class 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910000018 strontium carbonate Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- -1 oxides Chemical class 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は圧電体セラミックス組成物に関し、特にPbTi
O3−PbZrO3−Pb（Mg1/3Nb2/3）O3系圧電体セラミックス
組成物に関するものである。Description: TECHNICAL FIELD The present invention relates to a piezoelectric ceramic composition, and particularly to PbTi
The present invention relates to an O 3 —PbZrO 3 —Pb (Mg 1/3 Nb 2/3 ) O 3 piezoelectric ceramic composition.
PbTiO3−PbZrO3−Pb（Mg1/3Nb2/3）O3系セラミックス
組成物又はその組成のうち、Pbの一部をSrで置換したセ
ラミックス組成物は、高誘電率の圧電体材料として使用
されている（例えば特公昭44−17103号明細書など）。PbTiO 3 —PbZrO 3 —Pb (Mg 1/3 Nb 2/3 ) O 3 ceramic composition or a ceramic composition in which Pb is partially substituted with Sr is a high dielectric constant piezoelectric material. (For example, Japanese Patent Publication No. 44-17103).
この種の圧電体セラミックスは、その材料として各元
素を含む個別の化合物（例えば、酸化物、炭酸塩など）
を混合し、この混合物の仮焼後、成形し、更に焼成した
後、分極処理を行なうことにより、製造されている。Piezoelectric ceramics of this type are composed of individual compounds containing each element (eg, oxides, carbonates, etc.)
Are mixed, calcined, molded, fired and then subjected to a polarization treatment.
しかしながら、近年、アクチュエーターや圧電スピー
カーなどの高品質の圧電セラミックス製品のために、よ
り高誘電率で変換効率の高い圧電体セラミックス材料が
要望されている。However, in recent years, there has been a demand for a piezoelectric ceramic material having a higher dielectric constant and a high conversion efficiency for high quality piezoelectric ceramic products such as actuators and piezoelectric speakers.
本発明者らは、高誘電率・高変換効率の圧電体セラミ
ックスの製造について、鋭意研究を進めた結果、PbTiO3
−PbZrO3−Pb（Mg1/3Nb2/3）O3系セラミックス組成物又
はその組成のうちPbの一部をSrで置換したセラミックス
組成物において、過剰にMgOが配合されていれば、その
誘電率及び変換効率が改善されることを見出して、本発
明を完成させるに至った。The present inventors have, for the manufacture of the piezoelectric ceramic of high dielectric constant and high conversion efficiency, a result of our intensive studies, PbTiO 3
-PbZrO 3 -Pb (Mg 1/3 Nb 2/3 ) O 3 ceramic composition or a ceramic composition in which part of Pb is replaced with Sr in the composition, if MgO is excessively blended, The inventors have found that the dielectric constant and the conversion efficiency are improved, and have completed the present invention.
すなわち、本発明は、PbTiO3−PbZrO3−Pb（Mg1/3Nb
2/3）O3系セラミックス組成物又は該組成のうちPbの一
部をSrで置換してセラミックス組成物において、酸化マ
グネシウム（MgO）が0.3〜６モル％過剰に配合されてい
ることを特徴とする圧電体セラミックス組成物である。That is, the present invention is, PbTiO 3 -PbZrO 3 -Pb (Mg 1/3 Nb
2/3) in a part of the O 3 based ceramic compositions or of said set forming Pb substituted by Sr ceramic composition, characterized in that magnesium oxide (MgO) is 0.3 to 6 mol% excess formulation Is a piezoelectric ceramic composition.
本発明の圧電体セラミックスの組成は、 ｘ（PbTiO3）−ｙ（PbZrO3）−ｚ［Pb（Mg1/3Nb2/3）
O3］−ｚ′MgO ここで、ｘ＝82〜１、ｙ＝95〜１、ｚ＝88〜１、 ｘ＋ｙ＋ｚ＝100、ｚ′＝0.3〜６ （いずれもモル％） で表わされる。The composition of the piezoelectric ceramic of the present invention is x (PbTiO 3 ) -y (PbZrO 3 ) -z [Pb (Mg 1/3 Nb 2/3 )
O 3 ] −z′MgO where x = 82 to 1, y = 95 to 1, z = 88 to 1, x + y + z = 100, z ′ = 0.3 to 6 (all are mol%).
上記組成で、Pbはその１〜20原子％がSrで置換されて
いてもよく、また、特性向上のために微量の他の添加物
があってもよい。In the above composition, 1 to 20 atomic% of Pb may be substituted with Sr, and there may be trace amounts of other additives for improving characteristics.
酸化マグネシウムの過剰配合量が0.3モル％未満で
は、特性向上の効果が認められず、また、６モル％を超
えて配合した場合は、電気機械結合係数の向上は認めら
れるが、誘電率は低下する。When the amount of excess magnesium oxide is less than 0.3 mol%, no effect of improving properties is observed. When the amount exceeds 6 mol%, the electromechanical coupling coefficient is improved, but the dielectric constant is lowered. I do.
本発明で原料粉末として配合される酸化マグネシウム
源は、酸化物、炭酸塩、硝酸塩などの化合物が用いら
れ、特にその形態は限定されない。As the magnesium oxide source blended as the raw material powder in the present invention, compounds such as oxides, carbonates, and nitrates are used, and the form is not particularly limited.
本発明の他の配合原料も、それぞれの元素の酸化物、
炭酸塩、硝酸塩、塩化物、硫化物など、焼成して最終的
にPbTiO3−PbZrO3−Pb（Mg1/3Nb2/3）O3系化合物を形成
するものであれば、その形態は限定されない。Other compounding raw materials of the present invention are also oxides of the respective elements,
Carbonates, nitrates, chlorides, as long as it forms a sulfide such as, finally PbTiO 3 -PbZrO 3 -Pb (Mg 1/3 Nb 2/3) firing the O 3 compounds, the form Not limited.
本発明のセラミック組成物の原料配合に際しては、ニ
オブ酸マグネシウムを予め合成しておいてもよい。In mixing the raw materials of the ceramic composition of the present invention, magnesium niobate may be synthesized in advance.
ニオブ酸マグネシウムは、例えば、ニオブの化合物で
ある五酸化ニオブとマグネシウムの化合物である炭酸マ
グネシウムを等モルで混合し、800〜1000℃で反応させ
ることにより合成される。その際、必ずしも、ニオブ酸
マグネシウムは単一相でなく、主成分を構成する組成で
あればよい。Magnesium niobate is synthesized, for example, by mixing niobium pentoxide, a compound of niobium, and magnesium carbonate, a compound of magnesium, in equimolar amounts and reacting at 800 to 1000 ° C. In this case, magnesium niobate is not necessarily a single phase, and may have a composition constituting a main component.
好ましくは、この様にして得られたニオブ酸マグネシ
ウムを、ボールミルやビーズミルなどで、平均粒径２μ
ｍ以下、望ましくは、１μｍ以下のサブミクロン粒子に
粉砕し、微細で反応性の高い粉末として使用する。Preferably, the thus obtained magnesium niobate is subjected to an average particle diameter of 2 μm using a ball mill or a bead mill.
The powder is pulverized into submicron particles having a particle size of m or less, preferably 1 μm or less, and used as a fine and highly reactive powder.
反応性が高く、微細であるニオブ酸マグネシウムとし
ては、水や溶媒に可溶性のニオブとマグネシウムの塩を
加水分解して得られた湿式合成の粉末、該塩を熱分解し
て得られた粉末などがある。この種の方法で得られた粉
末の平均粒径は１μｍ以下であり、極めて反応性に富ん
でいる。とりわけ、水熱反応で合成されたニオブ酸マグ
ネシウムは、低い温度で合成されるため特に反応性が高
く、平均粒径が1.0μｍ以下の微細な粉末が得られ、本
発明の原料としては特に好ましいものである。水熱反応
の合成によるニオブ酸マグネシウムは、例えば、ニオブ
の化合物である五酸化ニオブとマグネシウムの化合物で
ある酸化マグネシウムとを等モルで混合し、この混合粉
末と水とを白金容器に入れ、100〜500kg/cm2の圧力で、
300〜600℃に保持することにより得られる。Highly reactive and fine magnesium niobate includes wet-synthesized powder obtained by hydrolyzing a salt of niobium and magnesium soluble in water or a solvent, powder obtained by thermally decomposing the salt, and the like. There is. The average particle size of the powder obtained by this type of method is 1 μm or less, and it is extremely reactive. In particular, magnesium niobate synthesized by a hydrothermal reaction is particularly high in reactivity because it is synthesized at a low temperature, and a fine powder having an average particle size of 1.0 μm or less is obtained, which is particularly preferable as a raw material of the present invention. Things. Magnesium niobate synthesized by hydrothermal reaction, for example, niobium pentoxide, a compound of niobium, and magnesium oxide, a compound of magnesium, are mixed in equimolar amounts, and the mixed powder and water are put in a platinum container, at a pressure of ~500kg / cm 2,
Obtained by maintaining at 300-600 ° C.
上記の各原料を、最終的に必要とする組成に配合した
後の工程については、慣用の方法を用いることができ
る。For the steps after each of the above-mentioned raw materials is blended into the finally required composition, a conventional method can be used.
例えば、配合した原料粉末をボールミルなどを用いて
混合粉砕した後、得られた粉末を700〜1000℃で１〜５
時間大気雰囲気中で仮焼する。その後、仮焼粉末を必要
な形状に成形し、大気雰囲気下1100〜1350℃で１〜５時
間焼成し、焼成物を分極することにより、本発明の圧電
体セラミックスが得られる。分極の条件としては特に限
定しないが、60〜100℃で1.5〜5kV/mmの電圧を１〜30分
印加するのがその目安となる。For example, after mixing and pulverizing the compounded raw material powder using a ball mill or the like, the obtained powder is heated at 700 to 1000 ° C. for 1 to 5 times.
Calcinate in air atmosphere for hours. Thereafter, the calcined powder is formed into a required shape, fired at 1100 to 1350 ° C. in the air atmosphere for 1 to 5 hours, and the fired product is polarized to obtain the piezoelectric ceramic of the present invention. The condition of the polarization is not particularly limited, but a rule of thumb is to apply a voltage of 1.5 to 5 kV / mm at 60 to 100 ° C. for 1 to 30 minutes.
以下、実施例によって本発明を説明する。 Hereinafter, the present invention will be described with reference to examples.
実施例１〜５ 酸化鉛、炭酸ストロンチウム、酸化ジルコニウム、酸
化チタン、五酸化ニオブ及び炭酸マグネシウムを用い
て、 Pb0.95Sr0.05（Mg1/3Nb2/3）0.375Ti0.365Zr0.26O3＋xM
gO の組成で、過剰量ｘ（モル）が0.003、0.005、0.01、0.
03及び0.06となるように５種類の組成物を配合し、各組
成物を樹脂ボール及びミルを用いて混合粉砕した。得ら
れた混合粉末をアルミナルツボにれ、大気雰囲気中800
℃で４時間仮焼した。Examples 1 to 5 Using lead oxide, strontium carbonate, zirconium oxide, titanium oxide, niobium pentoxide and magnesium carbonate, Pb 0.95 Sr 0.05 (Mg 1/3 Nb 2/3 ) 0.375 Ti 0.365 Zr 0.26 O 3 + xM
In the composition of gO, the excess amount x (mol) is 0.003, 0.005, 0.01, 0.
Five types of compositions were blended so as to obtain 03 and 0.06, and each composition was mixed and pulverized using a resin ball and a mill. The obtained mixed powder is placed in an alumina crucible, and 800
Calcination was performed at ℃ for 4 hours.
得られた仮焼粉末を乳鉢を用いて解砕し、直径15mm厚
さ3mmの円板を、350kg/cm2の圧力でプレス成形した。The obtained calcined powder was crushed using a mortar, and a disk having a diameter of 15 mm and a thickness of 3 mm was press-formed at a pressure of 350 kg / cm 2 .
マグネシアのさやに入れた白金板上に上記の成形体を
設置して、1250℃で２時間焼成して焼結体を得た。The above-mentioned molded body was placed on a platinum plate placed in magnesia sheath, and fired at 1250 ° C. for 2 hours to obtain a sintered body.
得られた焼結体を厚さ2mmに研磨し、両面に電極とし
て銀ペーストを焼きつけ、80℃で2.5kV/mmの電圧を５分
間印加して分極せしめ、圧電体セラミックスを得た。The obtained sintered body was polished to a thickness of 2 mm, silver paste was baked on both sides as electrodes, and a voltage of 2.5 kV / mm was applied at 80 ° C. for 5 minutes to polarize, thereby obtaining a piezoelectric ceramic.
得られた圧電体セラミックスの1kHzでの誘電率
（εｒ）と交換効率である電気機械結合係数（Kr）をイ
ンピーダンス・ゲインフェイズ・アナライザ（YHP社製4
19A）を用いて測定し、形状等を用いてそれぞれの値を
計算した。The dielectric constant (ε r ) at 1 kHz of the obtained piezoelectric ceramic and the electromechanical coupling coefficient (K r ), which is the exchange efficiency, were measured using an impedance gain phase analyzer (YHP 4).
19A) and each value was calculated using the shape and the like.
得られた結果を第１表に示す。 Table 1 shows the obtained results.
比較例１及び２ 実施例と同様にして、組成式のｘ（過剰のMgO量）が
０又は0.07（７モル％）になるように配合した組成物
を、混合、粉砕、成形、焼成して得られた圧電体セラミ
ックスの特性測定結果を第１表に示す。 COMPARATIVE EXAMPLES 1 AND 2 In the same manner as in the examples, a composition prepared so that x (excess MgO amount) in the composition formula was 0 or 0.07 (7 mol%) was mixed, pulverized, molded and fired. Table 1 shows the measurement results of the characteristics of the obtained piezoelectric ceramics.
実施例６ 五酸化ニオブ（Nb2O5）と炭酸マグネシウム（MgCO3）
を等モルづつ樹脂ボール及びミルを用いて混合した。こ
の混合物を白金ルツボに入れ、大気雰囲気中900℃で２
時間焼成して、ニオブ酸マグネシウムの粉末を得た。得
られた粉末を樹脂ボール及びミルを用いて16時間粉砕
し、ニオブ酸マグネシウムの原料粉末とした。セデイグ
ラフを用いて測定したこの粉末の平均粒径は1.6μｍで
あった。Example 6 Niobium pentoxide (Nb 2 O 5 ) and magnesium carbonate (MgCO 3 )
Were mixed in an equimolar amount using a resin ball and a mill. This mixture is placed in a platinum crucible and placed in an air atmosphere at 900 ° C. for 2 hours.
After calcining for a time, a powder of magnesium niobate was obtained. The obtained powder was pulverized for 16 hours using a resin ball and a mill to obtain a raw material powder of magnesium niobate. The average particle size of the powder measured using a sedigraph was 1.6 μm.
得られたニオブ酸マグネシウムと酸化鉛、炭酸ストロ
ンチウム、酸化ジルコニウム、酸化チタン及び過剰量ｘ
が0.01（モル％）に相当する炭酸マグネシウムを用い
て、実施例３に相当する組成を配合した組成物を、同様
に混合、粉砕、成形、焼成して圧電体セラミックスを得
た。The obtained magnesium niobate and lead oxide, strontium carbonate, zirconium oxide, titanium oxide and excess x
A composition obtained by blending a composition corresponding to Example 3 using magnesium carbonate corresponding to 0.01 (mol%) was similarly mixed, pulverized, molded and fired to obtain a piezoelectric ceramic.
得られた圧電圧セラミックスの特性測定結果を第１表
に示す。Table 1 shows the characteristic measurement results of the obtained piezoelectric ceramics.
第１表に示す結果から明らかなように、本発明の圧電
体セラミックス組成物は、従来のものと比較してその特
性が大幅に向上した。As is evident from the results shown in Table 1, the characteristics of the piezoelectric ceramic composition of the present invention were greatly improved as compared with those of the related art.
本発明により、従来の製造工程、設備を変えることな
く、高品質の圧電体セラミックスを製造することができ
る。According to the present invention, high quality piezoelectric ceramics can be manufactured without changing conventional manufacturing processes and equipment.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) C04B 35/42 - 35/49 H01B 3/00 - 3/14 H01L 41/18──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 6 , DB name) C04B 35/42-35/49 H01B 3/00-3/14 H01L 41/18
Claims (1)
ラミックス組成物又は該組成のうちPbの一部をSrで置換
したセラミックス組成物において、酸化マグネシウム
（MgO）が0.3〜６モル％過剰に配合されていることを特
徴とする圧電体セラミックス組成物。1. A ceramic composition comprising a PbTiO 3 —PbZrO 3 —Pb (Mg 1/3 Nb 2/3 ) O 3 ceramic composition or a ceramic composition in which Pb is partially substituted with Sr. A piezoelectric ceramic composition comprising 0.3 to 6 mol% of MgO).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2034715A JP2841344B2 (en) | 1990-02-15 | 1990-02-15 | Piezoelectric ceramic composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2034715A JP2841344B2 (en) | 1990-02-15 | 1990-02-15 | Piezoelectric ceramic composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03238881A JPH03238881A (en) | 1991-10-24 |
| JP2841344B2 true JP2841344B2 (en) | 1998-12-24 |
Family
ID=12422035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2034715A Expired - Lifetime JP2841344B2 (en) | 1990-02-15 | 1990-02-15 | Piezoelectric ceramic composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2841344B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3161261B2 (en) * | 1994-11-28 | 2001-04-25 | 株式会社村田製作所 | Piezoelectric ceramic composition |
| CN115894020B (en) * | 2022-12-23 | 2023-12-19 | 佛山仙湖实验室 | PMNZT-based piezoelectric ceramic with high piezoelectric coefficient and preparation method and application thereof |
-
1990
- 1990-02-15 JP JP2034715A patent/JP2841344B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03238881A (en) | 1991-10-24 |
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