JPH09268348A - Fe-ni alloy sheet for electronic parts and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an Fe-Ni alloy sheet for electronic parts, excellent in strength and press blankability, and its production. SOLUTION: An alloy, having a composition which consists of, by weight, 30-55% Ni, <=1.2% Si, <=1.5% Mn, and the balance essentially Fe except impurities and in which the content of C among the impurities is regulated to <=0.02%, or an alloy further containing <=12% Co is subjected to final cold rolling at a rolling rate corresponding to the secondary work hardening region. The preferred alloy as the object further contains 1.0-3.0wt.%, in total, of one or >=2 elements among W, Mo, V, Al, Ti, and Nb or 0.05-1.0%, in total, of either or both of Zr and Be.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Fe-Ni alloy thin plate which is excellent in strength and press punching workability and is suitable for use as a material for electronic parts such as lead frames.

[0002]

2. Description of the Related Art Fe-Ni alloys, which have low thermal expansion characteristics and excellent workability and corrosion resistance, are widely used as materials for electronic parts. For example, a lead frame of an integrated circuit element has Fe-42Ni, Fe-29Ni-17Co.
However, Fe-3 is particularly suitable for members that utilize low thermal expansion characteristics.
Fe-Ni based alloys such as 6Ni (Invar) and Fe-31Ni-5Co (Super Invar) are used.

In the case of applying the above-mentioned Fe-Ni type alloy to electronic parts, Fe-Ni for electronic parts is used.
Fine processing such as press punching and photo-etching is performed on the alloys of the alloys, and thinning of the Fe-Ni alloys for electronic components represented by lead frames is required due to high integration of semiconductor devices. And further miniaturization is required. Since such an Fe-Ni alloy thin plate is insufficient in strength, it is likely to be warped or bent during transportation or mounting, and in an electronic component subjected to fine processing, it buckles due to impact during assembly or use. There are problems such as.

Further, when the Fe-Ni alloy thin plate is subjected to press punching, burrs may be generated due to the inferior rupture property of the material. It was difficult to maintain the accuracy in. For this reason, there is a strong demand for a material having higher strength than conventional high-strength materials and easy microfabrication for Fe-Ni alloy thin plates for electronic parts.

[0005]

In response to such demands, the following proposals have been made to improve the strength and fine workability of Fe-Ni alloy thin plates. For example Cu, M
There is a proposal for increasing the strength by adding n, Nb, Mo, etc. (JP-A-3-197641). However, if an attempt is made to increase the strength to a Vickers hardness of 240 HV or more only by adding the strengthening element, it is necessary to add a large amount of the strengthening element, which causes deterioration of etching processability, solderability, and plating property.

Further, when a large amount of the strengthening element forms an inclusion, the press punching surface may become rough due to variations in the grain size and density, and at the same time, the press punching tool may be damaged. Furthermore, since these elements increase the coefficient of thermal expansion, the low coefficient of thermal expansion, which is one of the features of the Fe-Ni alloy, is impaired. On the contrary, if added in such a small amount that these problems do not occur, the strength becomes insufficient as a high strength material.

Further, as a method of using a strengthening mechanism other than the addition of alloying elements, Fe-
By strengthening the dual phase structure of Ni-Co (Japanese Patent Laid-Open No. 3-16
No. 6340), a sophisticated manufacturing technique is required to control the two-phase structure. Further, there is a proposal (Japanese Patent Laid-Open No. 59-33857, Japanese Patent Laid-Open No. 4-160112) to increase the strength by controlling the crystal grains by annealing before the final cold rolling and by final cold rolling at a high rolling rate. This method utilizes work hardening, but this cannot be said to sufficiently satisfy the above-mentioned further strengthening.

Regarding the improvement of the press punching workability of Fe-Ni alloys, there is a proposal (JP-A-60-255954) in which S is contained to disperse a sulfide. However, since sulfide causes surface defects, solder, and defective plating, it is not always preferable for use as a material for electronic parts. In view of the above points, the present invention does not significantly increase the cost, and does not impair etching processability, solderability, and plating properties, and has sufficient high strength and good press punchability for electronic parts Fe-Ni. An object is to provide a system alloy thin plate and a method for manufacturing the same.

[0009]

Means for Solving the Problems In addition to the investigation of the strengthening element effective in increasing the strength, the present inventors have made detailed explanations on the effect of the Fe--Ni alloy on the strength and press punching workability in the rolling process. Study was carried out. As a result, it was found that there is a secondary work hardening region where the hardness rapidly increases and the strength increases as the rolling rate increases in cold rolling.
If this region is applied to the final cold rolling, the breakability of the material will be greatly improved, the press punching workability will be improved, and high strength will be obtained even if the addition amount of the strengthening element is reduced. We found a new effect that can also improve.

Further, by combining the final cold rolling in the secondary work hardening zone with the addition of the strengthening element and controlling the optimum addition amount, both higher strength and press punching workability can be improved at the same time. I found what I could do. Further, the present inventors have found a new effect that the strength anisotropy of the material becomes small when the rolling ratio corresponding to the secondary work hardening region is applied to the Fe-Ni alloy thin plate of the specific component, and arrived at the present invention. .

That is, the manufacturing method of the Fe-Ni alloy thin plate for electronic parts according to the present invention is, in% by weight, Ni30 to 55.
%, Si 1.2% or less, Mn 1.5% or less, the balance is substantially Fe except impurities, and C among impurities.
Alloy containing 0.02% or less, or Co of 12
% Of alloy is hot-rolled, cold-rolled and annealed at least once, and then finally cold-rolled at a rolling rate corresponding to the secondary work hardening region.

A preferred target alloy in the method for producing an Fe-Ni alloy thin plate for electronic parts of the present invention is, in% by weight,
One or two or more of W, Mo, V, Al, Ti, and Nb in total 1.0 to 3.0%, or one or two of Zr and Be in total 0.05 to 1.0. % Contained. Further, in the present invention, by adjusting the hardness of the alloy thin plate before the final cold rolling to the Vickers hardness of 145 HV or more, the above-mentioned secondary work hardening region can be easily achieved.

The Fe-Ni alloy thin plate for electronic parts of the present invention obtained by the above-mentioned manufacturing method of the present invention has a weight percentage of Ni of 30 to 55%, Si of 1.2% or less, and Mn of 1.5.
%, The balance is substantially Fe except for impurities, and has a composition of 0.02% or less of C, or a composition of 12% or less of Co. It is a Fe-Ni alloy thin plate for electronic parts having a structure in which crystal grains are expanded through final cold rolling with a rolling ratio corresponding to a work-hardened region.

Preferably, in% by weight, W, Mo, V,
One or more of Al, Ti, and Nb in total is 1.
Fe-N for electronic parts, containing 0 to 3.0% or 0.05 to 1.0% of one or two of Zr and Be in total.
It is an i-based alloy thin plate.

A microstructural feature of the Fe-Ni alloy thin plate of the present invention is that the crystal grains are expanded after the final cold rolling in the secondary work hardening zone. Conventional Fe-N
Although the crystal grains of the i-based alloy thin plate were expanded, the expansion was not due to the secondary work hardening region, and thus the crystal grains did not have sufficient strength. However, the Fe-
By applying the secondary work hardening zone to the final cold rolling rate, the Ni-based alloy thin plate is expanded with its crystal grains rapidly increasing in strength, and as a result, the strength of the material is remarkably improved. .

Further, since the fracture strength of the material is greatly improved by increasing the strength of the material, and further, the cleanliness of the fracture surface is increased by reducing the amount of the reinforcing element, during press punching,
Burrs are unlikely to occur. That is, Fe- for electronic parts of the present invention
The Ni-based alloy thin plate has both high hardness and good press punching workability. The Fe-Ni alloy thin plate for electronic parts preferably has a Vickers hardness of 240 HV or higher, and more preferably 270 HV or higher.

Further, the F for electronic parts according to the manufacturing method of the present invention
When the e-Ni alloy thin plate is heated at 1000 ° C. for 15 minutes by applying the secondary work hardening region, the strength of the (200) plane is 80% or more in the relative X-ray intensity of the crystal plane by X-ray diffraction. The properties of the material according to the present invention can be specified.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION One of the features of the present invention is to perform final cold rolling in a secondary work hardening region where the hardness rapidly increases with respect to the rolling rate. If it is attempted to increase the strength only by adding the strengthening element as in the conventional method, the deterioration of etching workability, solderability, plating property and press workability due to the addition of a large amount of the strengthening element will occur. Considering this, at most, the Vickers hardness was about 240 HV.

However, as described above, by applying the rolling ratio in the secondary work hardening region to the final cold rolling, the material strength can be remarkably increased even if the addition of the strengthening element is reduced,
As a result, a material having a Vickers hardness of 240 HV or more can be obtained. In addition, the material that has undergone final cold rolling in the secondary work hardening region has excellent breakability of the material, so that it is possible to suppress the occurrence of burrs during press punching compared to the past, and to add a large amount of strengthening elements. Since high strength can be obtained without doing so, it is also excellent in etching processability.

That is, according to the present invention, the final cold rolling in the secondary work hardening region can simultaneously improve the strength of the material and the press punching workability, and thus Fe- which enables high strength and easy microfabrication. Therefore, a Ni-based alloy thin plate can be obtained.

An example of the secondary work hardening region in which the present invention performs the final cold rolling will be specifically described with reference to FIG. FIG. 1 shows F
The relationship between the cold rolling rate and the hardness of e-42Ni is shown, and the material is the Vickers hardness of 15 before the cold rolling.
It is set as high as 2 HV. This work hardening curve shown in FIG. 1 can be roughly divided into three regions.
That is, in the low rolling ratio region, the hardness increases in proportion to the rolling ratio (region I). Then, when the rolling rate becomes high, the hardness becomes not so high even if the rolling rate is increased, and it becomes a blunt region (region II). Then, when the rolling rate is further increased, it becomes a secondary work hardening region where the hardness is remarkably increased (region III).

The secondary work hardening region is the work hardening curve showing the relationship between rolling ratio and hardness as shown in FIG.
It can be specified as a point at which the rate of increase in hardness changes from a decrease to an increase, that is, an inflection point of the work-hardening curve of the material or more, and the present invention is used in the region III in the example of FIG. 1 described above. It is the corresponding secondary work hardening region.

FIG. 1 shows an example of the work hardening curve.
The shape of the work hardening curve differs depending on the composition, hardness at the start of cold rolling, and the like. Therefore, the final cold rolling rate at which the secondary work hardening starts is about 77% in FIG. 1, but the value is not constant and may change up and down. It can be easily obtained by investigating the relationship between rolling rate and hardness. However, in the secondary work hardening region of the material satisfying the composition region of the present invention, when the hardness before cold rolling is Vickers hardness of 125 to 165 HV, the final cold rolling rate starts at 70 to 85%.

Further, the present inventors have found that, if the composition is the same, the higher the hardness before the final cold rolling is, the lower the rolling rate falls into the secondary work hardening region. That is, by controlling the hardness before the final cold rolling to be high, it is possible to more easily achieve high strength and improvement in press punching workability. Therefore, it is desirable that the hardness is as high as possible before the final cold rolling, and specifically, a material satisfying the hardness before the final cold rolling of 145 HV or more is desirable for the practice of the present invention.

For example, FIG. 2 shows the work hardening curve of Fe-40Ni-2Mo, and the Vickers hardness before cold rolling is 1
In the case of 61 HV, the curve is as shown in (a), and the final cold rolling rate at which the secondary work hardening starts is 70%. When the Vickers hardness before cold rolling is 126 HV, the curve is as shown in (b), and the final cold rolling rate at which the secondary work hardening starts is 78%. In addition, it is desirable to use an inflection point, that is, a final cold rolling rate higher than the starting rolling rate of the secondary work hardening by 5% or more.

As described above, if the rolling ratio in the secondary work hardening region is used for the final cold rolling, the addition amount of the strengthening element can be greatly reduced. Therefore, the etching process caused by the addition of the strengthening element can be performed. It is possible to obtain high strength and good press punchability without deteriorating the solderability, the solderability, and the plating property, and it is possible to significantly reduce the cost by saving the additive element.

Further, by utilizing the rolling ratio in the secondary work hardening region, the difference in strength between the rolling direction and the direction orthogonal to the rolling, which is caused by the strain imparted by cold working which has been a problem in the past, that is, the strength anisotropy The workability can be reduced, and the uneven processing caused by the strength difference in the rolling direction can be suppressed.

The strength anisotropy does not increase in the secondary work-hardening region used in the present invention because the dislocation density whose distribution is biased due to the influence of the cold rolling direction at the rolling ratio below the secondary work-hardening region is It is considered that both the rolling direction and the direction perpendicular to the rolling are saturated in the secondary work hardening region. Also,
The strength anisotropy that remains in the material even after rolling in the secondary work hardening region can be further reduced without significantly lowering the strength by subjecting it to strain relief annealing under appropriate conditions below the recrystallization temperature. You can

The Fe-Ni alloy for electronic parts is subjected to fine processing such as press punching and photo etching, and Fe for electronic parts typified by lead frames is used.
In the Ni-based alloy thin plate, further fine processing is required. Further, the Fe-Ni-based electronic component is affected by the heat generation of the circuit, and thus it is desirable that the coefficient of thermal expansion be small. For example, in the case of a lead frame material, a silicon chip (α _30-200 = 4 ~ A low thermal expansion characteristic as high as 5 × 10 -6 power / ° C) is required.

Addition of a large amount of strengthening elements deteriorates the properties of press punching workability, etching workability, and thermal expansion coefficient, and adversely affects the above-mentioned strength anisotropy. It is desirable to make maximum use of the final cold rolling strengthening in the hardened region.

In addition to the above, the present inventors have found that a higher strength of Vickers hardness of 270 HV or more can be achieved by combining the final cold rolling in the secondary work hardening zone with the addition of a strengthening element. It was also found that the rupture of the material is further improved by further increasing the strength of the material, and burrs generated during press punching can be sufficiently suppressed.

Further, by selecting as the strengthening element to be added, which produces fine precipitates, the fine precipitates serve as the starting point of fracture during press punching, and the press punching workability can be greatly improved. . That is, in order to achieve the above effect, the addition of a strengthening element is effective,
By properly controlling the amount of addition, it is possible to obtain higher strength and good press punchability without deteriorating the etching processability, solderability and plating property due to the addition of the strengthening element.

In order to achieve the above effects, the composition of the Fe-Ni alloy thin plate of the present invention was determined as follows.
The Ni content adjusts the thermal expansion coefficient of an electronic component manufactured using the material, and minimizes the thermal expansion coefficient in the vicinity of 36% thereof. Ni is less than 30% or 52
%, The coefficient of thermal expansion becomes too large, and Fe-Ni
The advantage of low thermal expansion, which is one of the features of alloys, is eliminated. Therefore, the Ni content is limited to 30 to 55%.

Co can be replaced with Ni in terms of thermal expansion. When Co is replaced with Ni, the Curie point rises and the coefficient of thermal expansion can be kept low up to higher temperatures. Further, Co does not impair the soldering property and the plating property like other elements, has the effect of forming a solid solution in the Fe-Ni alloy and increasing the hardness at the time of annealing, whereby the hardness after the final cold rolling is increased. Also raises. However, no further effect is seen with addition of 12% or more. Therefore, the Co content is limited to 12% or less. Also, especially when low thermal expansion is required,
It is desirable that the total of the Ni content and the Co content is 33 to 45%.

Although C may be added for steelmaking, the alloy composition is controlled as an impurity of 0.02% or less. C
When the content exceeds 0.02%, the etching processability of the material is significantly deteriorated, and the excessive precipitation of carbide causes solderability,
Since the plating property may be significantly impaired, the content is set to 0.02% or less. The desirable range of C for the etching property is 0.005% or less. Si and Mn are added as deoxidizing agents and are effective in increasing strength. However, Si is 1.
When 2% and Mn exceed 1.5%, the coefficient of thermal expansion increases,
1.2% Si due to deterioration of solder and plating
Hereinafter, Mn is set to 1.5% or less. When it is not necessary to increase the strength with Si and Mn, Si 0.2% or less and Mn 0.5% or less are desirable from the viewpoint of etching property.

W, Mo, V, Al, Ti, Nb, Zr,
Be is equal to or more than the lower limit specified in the present invention, and both have the effect of further increasing the strength of the Fe-Ni alloy. Also, especially T
i, Nb, Zr, and Be are elements effective in forming fine precipitates that become the starting points of fracture during press punching and significantly improving the workability, so it is necessary to add these. Is desirable. However, if the added amount is too large, other properties are impaired, so the following definitions are made.

If the total content of W, Mo, V, Al, Ti and Nb exceeds 3.0%, the solderability, plating property and strength anisotropy will be seriously impaired, and the thermal expansion coefficient will be increased. In this case, the total is 1.0 to 3.0%. Z
A small amount of r and Be has a strengthening effect, but if it exceeds 1.0%, the cleanliness of the material is significantly deteriorated and the strength anisotropy is impaired.
%.

By the method described above, the etching processability,
Vickers hardness of 2 without impairing solderability and plating
It is possible to obtain a Fe-Ni alloy thin plate having a high hardness of 70 HV or more, and at the same time, it is a material that is also extremely excellent in press punching workability.

The material of the present invention can be specified not only in the extremely high hardness described above, but also in its material properties and manufacturing method by the recrystallization texture obtained by recrystallization heat treatment of the material. Although such a treatment is not performed as an actual electronic component material, it is extremely effective in specifying the material of the present invention. That is, in the material that has been finally cold-rolled in the secondary work-hardening region as in the present invention, when this is subjected to recrystallization heat treatment, a (200) plane has a recrystallized texture in which it is aggregated as strongly as never before. Become.

When the conditions for the recrystallization heat treatment are different,
Since the degree of aggregation of the (200) plane is also different, the present inventor found that the relative X-ray intensity of the crystal plane by X-ray diffraction was 8 when the intensity of the (200) plane was 8 when heated at 1000 ° C. for 15 minutes.
It was defined as 0% or more. It is preferably 90% or more. In the present invention, the relative X-ray intensity is (1
11), (200), (220), (311) The diffracted X-ray intensity of each surface is obtained and defined by the ratio of each surface to the sum.

[0041]

The present invention will be described below with reference to examples. Fe
After melting and casting in a vacuum high frequency induction furnace an alloy having the composition shown in Table 1 in which various elements of the present invention are added to a Ni alloy,
Forging and hot rolling were performed up to a thickness of 4 mm, and the surface was removed to have a thickness of 3.5 mm.

[0042]

[Table 1]

After hot rolling, cold rolling was performed, and then intermediate annealing was performed so that the hardness shown in Table 2 was obtained, and then final cold rolling was performed at a rolling rate as shown in Table 2 to obtain a thickness. A 0.2 mm thick plate material was used.

Table 2 shows the rolling ratio of the final cold rolling described above,
In addition to the final cold rolling region evaluated in the same manner as in FIG. 1 and the Vickers hardness before final cold rolling, the final Vickers hardness obtained by final cold rolling, etching processability, solderability,
Plating property, burr at press punching, average coefficient of thermal expansion,
The strength anisotropy and the relative X-ray intensity of the (200) plane when the obtained material is heated at 1000 ° C. for 15 minutes are shown. As described above, the material of the present invention has a secondary work hardening region applied.

[0045]

[Table 2]

The etching workability was evaluated by ◯ when the ferric chloride solution having a concentration of 47 Baume was sprayed on the plate material at a spray pressure of 2 kg / cm ² for etching, and the etching surface was not roughened. The solderability was evaluated by immersing it in a solder bath at 235 ° C. for 5 seconds after the flux treatment, and ◯ when the solder wet area was 95% or more, and x when it was less than 95%. For plating, after degreasing and acid treatment, 0.5 μm thick Ni strike plating is applied, and 3 μm thick A
After the g-plating, the sample was heated at 450 ° C. for 3 minutes in the atmosphere, and those having no plating swelling and bending by 90 degrees and no peeling were evaluated as ◯.

As for the burr at the time of punching by press, the height of the burr at the portion where a circular hole having a diameter of 2 mm was punched was measured with the mold clearance set to 10 μm. The hardness was measured with a micro Vickers hardness tester at a load of 500 g. The strength anisotropy is 100 × (L−T) / L (%) when 0.2% proof stress in the direction perpendicular to the rolling is “T” and 0.2% proof stress in the rolling direction is “L”. Is the value of.

In Table 2, all of the samples (A to X) in the present invention in which the strengthening element was added within the definition of the present invention and the final cold rolling rate was applied in the secondary work hardening region were all final hardness. Shows excellent strength with a Vickers hardness of 240 HV or more. It also satisfies other characteristics such as press punching workability and etching workability.

The samples (Y, Z) containing a strengthening element in an amount exceeding the limits of the present invention are excellent in strength and press punching workability, but inferior in etching workability, solderability, plating property and thermal expansion property. ing. Samples (H ', I') to which only the strengthening element was added without applying the secondary work hardening region
Is excellent in etching processability, solderability, plating properties and thermal expansion characteristics, but is inferior in strength.

The samples rolled in the secondary work hardening region in Table 2 have high relative X-ray intensities of 80% or more on the (200) plane after heating at 1000 ° C. for 15 minutes. The samples (H ′, I ′) that did not utilize the above were lower than 80%, which shows that the material of the present invention can be specified by the relative X-ray intensity after heating.

Furthermore, the amount of the strengthening element added was kept within the range specified in the present invention, and the samples rolled in the secondary work hardening region (A to
It is understood that X) has a low strength anisotropy, and therefore the strength anisotropy can be reduced by utilizing the rolling rate in the secondary work hardening region of the present invention.

[0052]

As described above, according to the present invention, the Fe--N
In the i-based alloy, by adding a strengthening element and performing final cold rolling at a rolling rate that makes the work hardening rate remarkable, or by combining control of hardness before the final cold rolling, etching workability, It is possible to obtain a Fe—Ni based alloy thin plate for electronic parts, which has extremely high strength and excellent press punching workability while minimizing deterioration of solderability and plating property. Therefore, the Fe-Ni alloy thin plate for electronic parts of the present invention can be applied to the microfabrication of electronic part materials such as lead frames, and has an extremely great industrial effect.

[Brief description of drawings]

FIG. 1 is a diagram showing a relationship between final cold rolling rate and hardness of an Fe-42Ni alloy.

FIG. 2 is a diagram showing a relationship between final cold rolling rate and hardness of Fe-40Ni-2Mo alloy.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication C22C 38/14 C22C 38/14 H01L 23/50 H01L 23/50 V

Claims (9)

[Claims] 1. Ni to 30-55%, Si in weight%
The content is 1.2% or less and Mn is 1.5% or less, and the balance is substantially Fe except for impurities.
Fe-Ni alloy for electronic parts, having a composition of 2% or less and having a structure in which crystal grains are expanded through final cold rolling with a rolling ratio corresponding to a secondary work hardening region. Thin plate. 2. Ni-30 to 55%, Co1 in weight%
2% or less, Si 1.2% or less, Mn 1.5% or less, the balance is substantially Fe except impurities, and has a composition of C0.02% or less of impurities, and secondary processing F for electronic parts, which has a structure in which crystal grains are expanded through final cold rolling with a rolling ratio corresponding to a hardening region
e-Ni alloy thin plate. 3. W, Mo, V, Al, T in% by weight
One or two or more of i and Nb in total of 1.0 to 3.
0% or one or two of Zr and Be is contained in a total amount of 0.05 to 1.0%.
Alternatively, the Fe-Ni alloy thin plate for electronic parts according to 2. 4. The Fe-Ni alloy thin plate for electronic parts according to claim 1, wherein the hardness after the final cold rolling is 240 HV or more in Vickers hardness. 5. The Fe—Ni alloy thin plate for electronic parts according to claim 3, wherein the hardness after the final cold rolling is 270 HV or more in Vickers hardness. 6. When heated at 1000 ° C. for 15 minutes,
In the relative X-ray intensity of the crystal plane by X-ray diffraction (20
The Fe-Ni for electronic parts according to claim 1, wherein the strength of the (0) plane is 80% or more.
Series alloy sheet. 7. Ni to 30-55%, Si in weight%
The content is 1.2% or less and Mn is 1.5% or less, and the balance is substantially Fe except for impurities.
An alloy containing 2% or less, or an alloy containing 12% or less Co is hot-rolled, cold-rolled and annealed at least once, and finally rolled at a rolling ratio corresponding to the secondary work hardening region. A method for manufacturing an Fe-Ni alloy thin plate for electronic parts, which comprises performing cold rolling. 8. W, Mo, V, Al, T in% by weight
One or two or more of i and Nb in total of 1.0 to 3.
8. A total of 0.05 to 1.0% of 0% or one or two of Zr and Be is contained.
The method for producing an Fe-Ni alloy thin plate for electronic parts according to item 1. 9. The method for producing a Fe—Ni alloy thin plate for electronic parts according to claim 7, wherein the annealing before the final cold rolling is performed so as to have a Vickers hardness of 145 HV or more.