JPH09260252A5 - - Google Patents

Info

Publication number
JPH09260252A5
JPH09260252A5 JP1996067883A JP6788396A JPH09260252A5 JP H09260252 A5 JPH09260252 A5 JP H09260252A5 JP 1996067883 A JP1996067883 A JP 1996067883A JP 6788396 A JP6788396 A JP 6788396A JP H09260252 A5 JPH09260252 A5 JP H09260252A5
Authority
JP
Japan
Prior art keywords
photosensitive substrate
measurement points
optical system
optical axis
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996067883A
Other languages
English (en)
Japanese (ja)
Other versions
JP3624528B2 (ja
JPH09260252A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP06788396A priority Critical patent/JP3624528B2/ja
Priority claimed from JP06788396A external-priority patent/JP3624528B2/ja
Priority to KR1019970010275A priority patent/KR970067585A/ko
Priority to US08/824,219 priority patent/US5985495A/en
Publication of JPH09260252A publication Critical patent/JPH09260252A/ja
Application granted granted Critical
Publication of JP3624528B2 publication Critical patent/JP3624528B2/ja
Publication of JPH09260252A5 publication Critical patent/JPH09260252A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP06788396A 1996-03-25 1996-03-25 投影光学系の結像特性評価方法及び該方法を使用する投影露光装置 Expired - Fee Related JP3624528B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP06788396A JP3624528B2 (ja) 1996-03-25 1996-03-25 投影光学系の結像特性評価方法及び該方法を使用する投影露光装置
KR1019970010275A KR970067585A (ko) 1996-03-25 1997-03-21 결상특성의 측정방법 및 투영노광방법
US08/824,219 US5985495A (en) 1996-03-25 1997-03-25 Methods for measuring image-formation characteristics of a projection-optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06788396A JP3624528B2 (ja) 1996-03-25 1996-03-25 投影光学系の結像特性評価方法及び該方法を使用する投影露光装置

Publications (3)

Publication Number Publication Date
JPH09260252A JPH09260252A (ja) 1997-10-03
JP3624528B2 JP3624528B2 (ja) 2005-03-02
JPH09260252A5 true JPH09260252A5 (enrdf_load_html_response) 2005-04-07

Family

ID=13357753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06788396A Expired - Fee Related JP3624528B2 (ja) 1996-03-25 1996-03-25 投影光学系の結像特性評価方法及び該方法を使用する投影露光装置

Country Status (1)

Country Link
JP (1) JP3624528B2 (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999026278A1 (fr) * 1997-11-14 1999-05-27 Nikon Corporation Dispositif d'exposition, procede de fabrication associe, et procede d'exposition
WO2000030163A1 (fr) * 1998-11-18 2000-05-25 Nikon Corporation Procede et dispositif d'exposition
US6275770B1 (en) * 1999-05-27 2001-08-14 Ipec Precision Inc. Method to remove station-induced error pattern from measured object characteristics and compensate the measured object characteristics with the error
JP3780221B2 (ja) 2002-03-26 2006-05-31 キヤノン株式会社 露光方法及び装置
JP5434353B2 (ja) * 2009-08-06 2014-03-05 株式会社ニコン 表面検査装置および表面検査方法

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