JPH09248535A - Dedusting method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve dedusting effect. SOLUTION: In a dedusting device 10, a jetting means 20 continuously jetting gas 12 toward a surface of a substrate 11 being a matter to be dusted, a moving means 30 for moving the substrate 11 to a surface direction and a shielding means 40 capable of shielding the gas 12 are provided. In the shielding means 40, an inner peripheral surface 41A of a cylindrical body 41 being shielding member revolves around a periphery of the jetting means 20 with a crossing direction against a jetting direction B of the gas 12 as an axis.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust removing method and a dust removing apparatus, and more particularly to a dust removing method and a dust removing apparatus for removing dust from a glass substrate or a resin substrate in manufacturing a liquid crystal panel, for example.

[0002]

2. Description of the Related Art In manufacturing a liquid crystal panel used for displaying various images, a dust removing process is indispensable for surely removing dust adhering to the surface of a glass or resin substrate. Generally, in the dust removing step, an air knife type dust removing device that blows dust off by injecting a gas such as nitrogen at a high pressure onto the substrate surface is often used.
As such a dust removing device, for example, an air injecting dust removing device has been proposed in which a shutter capable of reciprocating rotation is provided at a position close to the front side of an injection port of a nozzle for injecting air (see Japanese Patent Publication No. 7-32899: Conventional example).

FIG. 8 shows an outline of an air jet dust remover 80 exemplified in the third example of the prior art. The air jet dust remover 80 is a film dust remover for removing dust on the surface of the film 81 traveling in a predetermined direction, and has an injection port extending in a direction orthogonal to the traveling direction of the film 81 (see arrow a in the figure). 82 and a shutter 83 arranged at a position close to the front side (downward in the figure) of the ejection port 82. The shutter 83 is a horizontally long plate along the ejection port 82,
A large number of slits 84 that cross the ejection port 82 are provided. The shutter 83 is adapted to periodically reciprocate at high speed along the injection port 82 in small steps (see arrows b and c in the figure). Therefore, according to the air jet dust remover 80, the air jetted from the jet port 82 is intermittently cut off at a high speed to blow the air shower on the surface of the film 81 while vibrating the air shower at small speeds, so to speak, a pulse. It is said that dust can be removed from the film 81 by injecting air in a uniform manner.

[0004]

By the way, in the above-described air jet dust removing device 80, even if the shutter 83 reciprocates, air is continuously jetted from the slits 84 which are always open. That is, in the air jet dust remover 80, the air jetted from the jet port 82 in a substantially strip shape is merely branched by the shutter 83 into a substantially comb shape, and even if the shutter 83 reciprocates, the surface of the film 81 is not covered. On the other hand, the trajectory of each air jetted in a substantially streak shape only meanders (see the chain line in the figure). Therefore, the air jet dust remover 80 does not intermittently jet air, and has a problem that the dust removing effect of the film 81 is low. The present invention has been made to solve such a conventional problem, and an object thereof is to provide a dust removing method and a dust removing apparatus capable of improving the dust removing effect.

[0005]

In order to achieve the above object, the dust removing method according to the first aspect of the present invention is for removing dust adhering to the surface of an object to be removed by injecting gas. A dust removing method, wherein the gas is continuously jetted from a jetting unit toward the surface of the dust-excluded object, and the dust-extracting object and the jetting unit are relatively moved along the surface direction of the dust-excluded object. Further, a shielding member that shields the gas is made to circulate around the injecting means with a direction intersecting with the injecting direction of the gas as an axis line.

Further, the dust removing device according to claim 2 of the present invention is a dust removing device for removing dust adhering to the surface of the object to be removed by injecting gas, and the surface of the object to be removed is removed. Means for continuously injecting the gas toward the air, moving means for relatively moving the dust-removed object and the injection means along the surface direction of the dust-removed object, and a shield capable of shielding the gas And a shielding means provided with a member, wherein the shielding member is provided so as to be capable of orbiting around the injection means with an axis intersecting a direction intersecting the injection direction of the gas.

In these cases, as the gas, for example, nitrogen, ordinary air or the like, which has no chargeability, toxicity, etc. and does not deteriorate the dust-removed matter, can be adopted. Further, as the injection means, an arbitrary number of nozzles formed in a cylindrical shape or a slit shape may be arranged toward the object to be removed so that the gas to be injected has a desired flow rate, flow velocity, and fluid pressure. The shape of the nozzle may be appropriately selected. Such an injection means may be appropriately formed so as to obtain an explosion proof property against gas, a moisture proof property, and the like. On the other hand, as the moving means, one of the ejecting means and the dust-free object may be moved with respect to the other, or both may be moved. As the shielding means, a shielding member may be formed in a flat surface shape, an arc surface shape, a spherical surface shape, or the like so as to pass between the object to be removed and the ejection means.

In the invention described in claim 1 and claim 2 of the present invention, the gas shielded by the shield member is less likely to linearly reach the object to be removed because the gas is reflected by the shield member. . Further, even if the gas shielded by the shield member flows along the surface of the shield member and eventually reaches the dust-removed object, the flow rate, flow velocity, and fluid pressure of the gas are reduced. That is, in the invention described in claim 1 and claim 2, the gas injected from the injection means with the circulation of the shielding member reaches the surface of the dust-removed object intermittently or pulsatingly. As a result, the dust removing effect of the substance to be removed is improved, and thus the above-mentioned object is achieved.

Further, the dust removing device according to claim 3 is
It is characterized in that the ejection means has a slit-shaped nozzle extending in a direction intersecting a relative movement direction of the ejection means and the dust-removed object. In this case, the longitudinal dimension of the nozzle may be set larger than the relative movement maximum width dimension of the object to be removed. The spraying means is arranged so that the longitudinal direction of the nozzle intersects with the relative movement direction of the dust-removing object and the spraying means at an arbitrary angle so that the gas can be sprayed over the entire surface of the dust-removing object. It should be installed in.

In the dust removing apparatus according to the third aspect, if the longitudinal dimension of the nozzle for jetting the gas in a substantially strip shape is set appropriately, the jetting means and the dust-excluded object can be moved relative to each other to remove the dust. Dust removal is completed in one stroke. Therefore, in the dust removing device according to the third aspect, for example, the jetting means is provided in the substantially gate-shaped frame,
If a large number of objects to be removed are conveyed in parallel so as to pass under the frame, the removal of the objects to be removed will be completed in sequence, and for example, the production of the liquid crystal substrate can be speeded up.

Further, in the dust removing device according to the present invention, the jetting means is provided such that an angle between the jetting direction and a moving direction of the dust-removed object with respect to the jetting means is an acute angle. Is characterized by. In the dust removing apparatus according to the fourth aspect, the gas is obliquely jetted to the flat surface dust-free object. Therefore,
The dust adhering to the surface of the dust-removed object separates from the dust-removed object and rises up together with the gas reflected by the dust-removed object, so that a remarkable dust-removing effect is obtained.

According to a fifth aspect of the dust remover, the shielding means has a cylindrical body capable of accommodating the nozzle, and a through hole formed in the peripheral surface of the cylindrical body. It is characterized by being rotatable about an axis. In this case, a circular shape, an arbitrary square shape, a slit, or the like can be adopted as the through hole, and an arbitrary number may be formed along the circumferential direction and the axial direction of the cylindrical body. In the dust remover according to the fifth aspect, when the cylindrical body is rotated, the gas ejected from the nozzle is periodically blocked by the inner peripheral surface of the cylindrical body and the through holes. Shape, size,
By appropriately selecting the number, the form of formation, the diameter of the cylindrical body, the rotating direction, the rotating speed, etc., the cycle of the gas intermittently or pulsatingly injected into the dust-free object can be set arbitrarily.

Further, the dust removing device according to the sixth aspect is characterized in that a large number of the through holes are formed in a substantially spiral shape at a predetermined interval. Here, when the through holes are formed at a predetermined interval in the circumferential direction of the cylindrical body, or when the through holes are formed at a predetermined interval in the axial direction of the cylindrical body, the through holes are rotated with the rotation of the cylindrical body. The gas injected intermittently is
The ejection trajectory on the surface of the object to be removed becomes linear. Therefore, in these cases, the gas is not injected between the injection loci, and there is a concern that the entire surface of the object to be removed cannot be removed. On the other hand, in the dust removing device according to the sixth aspect, since the large number of through holes are formed in a substantially spiral shape at a predetermined interval, the above-mentioned inconvenience does not occur and the dust removing effect can be improved.

Further, the dust removing device according to a seventh aspect is characterized in that the through hole is formed in a substantially mortar shape that widens from the inner peripheral surface of the cylindrical body toward the outer peripheral surface thereof. In the dust remover according to claim 7, since the through hole is formed in a substantially mortar-like shape, the jetting direction of the gas jetted from the nozzle is set obliquely with respect to the surface of the object to be dusted. However, the inner peripheral surface of the through hole does not hinder the gas flow. Therefore, in the dust removing device according to the seventh aspect, the flow velocity, flow pressure, flow rate, etc. of the gas injected from the through hole do not decrease, and the desired dust removing effect can be reliably obtained.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first embodiment according to the present invention. The dust removing device 10 in the present embodiment is
The surface of the substrate 11 is removed by high-pressure jetting a gas 12 such as nitrogen toward the substrate 11 made of glass or resin used for the liquid crystal panel.
The dust removing device 10 is designed so that the gas 1 is directed toward the surface of the substrate 11.
2, a jetting means 20 for continuously jetting 2, a moving means 30 for moving the substrate 11 in the plane direction (arrow A direction in the drawing) with respect to the jetting means 20, and a shielding means 40 capable of shielding the gas 12. It is configured to include. The moving means 30 is configured to sequentially move the substrate 11 so as to pass directly below the jetting means 20 by a plurality of belt conveyors 31 arranged in a row.

As shown in FIG. 2, the injection means 20 is adapted to blow out the gas 12 pumped into the rectangular tube member 21 to the outside from a nozzle 22 provided on the side surface of the rectangular tube member 21. The rectangular tube member 21 is formed by a pair of U-shaped members 23 and 24 that are connected to each other substantially at the center. The U-shaped members 23 and 24 are long members continuous in the depth direction in the figure, and the ribs 25 and 25 are surface-connected to each other, and
The ribs 26, 26 are spaced apart from each other. Rib 26,
26 are arranged such that the surfaces facing each other are parallel to each other. Therefore, the rectangular tubular member 21 is formed by the ribs 26, 26 so that the nozzle 22 has a slit shape along the axial direction (the depth direction in the drawing) of the rectangular tubular member 21.

The jetting means 20 has a jetting direction of the gas 12 jetted from the nozzle 22 in a band shape (see arrow B in the figure) and a moving direction of the substrate 11 with respect to the jetting means 22 (see arrow A in the figure). Rib 2 so that the included angle is sharp.
6 and 26 are appropriately formed, and the rectangular tube member 21 is appropriately arranged. In addition, the jetting means 20 includes a nozzle 22.
Is set to be larger than the maximum length in the plane direction of the substrate 11, and the rectangular tubular member 21 is arranged orthogonal to the moving direction of the substrate 11. Therefore, in the dust removing device 10 of the present embodiment, when the substrate 11 is moved by the moving means 30, the spraying means 20 causes the gas 1 to flow over the entire surface of the substrate 11.
2 is sequentially injected diagonally.

The shielding means 40 has a cylindrical body 41 capable of accommodating the nozzle 22 and a large number of through holes 42 formed in the peripheral surface of the cylindrical body 41. The cylindrical body 41 has an inner diameter, an outer diameter, and an installation position so that the axis line of the rectangular tube member 21 and the inner peripheral surface 41A do not contact the rectangular tube member 21 and the outer peripheral surface 41B does not contact the substrate 11. It is appropriately selected and arranged so that its axis is parallel to the axis of the rectangular tube member 21. As shown in FIG. 3, the through-holes 42 have a substantially mortar shape that widens from the inner peripheral surface 41A of the cylindrical body 41 toward the outer peripheral surface 41B, and are formed in large numbers in a substantially spiral shape at predetermined intervals. . These through holes 42 are formed so as to draw a double spiral on the outer peripheral surface of the cylindrical body 41.

In such a shielding means 40, a cylindrical body 41 is rotatable about an axis line, and an inner peripheral surface 41A of the cylindrical body 41 as a blocking member and each through hole 42 are located just before the nozzle 22 is opened. It is designed to pass alternately in an endless orbit. Therefore, the dust removing device 10 of the present embodiment is
With the rotation of the cylindrical body 41, the gas 12 jetted from the nozzle 22 toward the substrate 11 is blocked or pulsated at a constant cycle.

At this time, when the through hole 42 is positioned immediately before the nozzle 22, the shielding means 40 is formed in a substantially mortar shape even if the axis of the through hole 42 intersects the jet direction of the gas 12. The gas 12 is allowed to smoothly pass along the inner peripheral surface of the formed through hole 42. Therefore, in the dust remover 10 of the present embodiment, there is little possibility that the flow velocity, the fluid pressure, etc. of the gas 12 injected intermittently or pulsatingly will be reduced with the rotation of the cylindrical body 41.

Returning to FIG. 1, the dust removing device 10 as described above.
Moves the substrate 11 by the moving means 30, jets the gas 12 from the nozzle 22 of the jetting means 20, and rotates the cylindrical body 41 of the blocking means 40. Then, as shown in FIG.
The gas 12 is intermittently or pulsatingly injected from the through holes 42 to the surface of the substrate 11 in accordance with the rotation. At this time, in the blocking means 40, since the through holes 42 are spirally formed on the peripheral surface of the cylindrical body 41, the gas 12 is sequentially discharged along the movement width direction of the substrate 11 as the cylindrical body 41 rotates. The particles are ejected intermittently, so that the entire surface of the substrate 11 is sequentially removed.
Then, the dust 13 adhering to the surface of the substrate 11 becomes the gas 12
Is jetted obliquely with respect to the surface of the substrate 11, it soars away from the substrate 11 together with the gas 12A reflected on the surface of the substrate 11, and collects in a predetermined dust collecting means through the duct 50 (see the chain line in FIG. 1). Be dusted.

According to the dust removing apparatus 10 of the present embodiment as described above, the gas 12 continuously jetted from the nozzle 22 is intermittently shielded by the inner peripheral surface 41A of the cylindrical body 41 which is a shielding member. , The gas 12 can be reliably and intermittently jetted toward the surface of the substrate 11,
A good dust removing effect can be obtained as compared with the conventional one. Further, in this dust removing device 10, since the slit-shaped nozzles 22 are arranged orthogonally to the moving direction of the substrate 11, the ejecting means 2 is provided.
By passing the substrate 11 directly below 0, the entire surface of the substrate 11 can be removed of dust in one stroke, and the production of the substrate 11 can be speeded up.

Furthermore, since the jetting means 20 jets the gas 12 from the nozzle 22 obliquely to the surface of the substrate 11, the dust 13 adhering to the surface of the substrate 11 easily separates from the substrate 11, which causes the dust to conspicuously. The dust removal effect is obtained. Further, since the blocking means 40 has a rotatable cylindrical body 41 and a large number of through holes 42, the diameter, the rotating direction, the rotating speed of the cylindrical body 41 and the shape, size, number, and
The period of the gas 12 injected intermittently or pulsatingly can be arbitrarily set by appropriately selecting the formation mode and the like.

In particular, since the through holes 42 are formed in a substantially spiral shape at predetermined intervals, the gas 12 is intermittently jetted along the movement width direction of the substrate 11 as the cylindrical body 41 rotates. As a result, the gas 12 can be surely jetted over the entire surface of the substrate 11. Then, the blocking means 40 includes the through holes 42.
Are formed in a substantially mortar shape, the flow of the gas 12 jetted obliquely from the nozzle 22 to the surface of the substrate 11 is not hindered, and the dust removal effect can be further improved.

FIG. 4 shows a second embodiment according to the present invention, and FIG. 5 shows a third embodiment according to the present invention.
In each embodiment described below, the members already described with reference to FIGS. 1 to 3 are denoted by the same reference numerals in the drawings to simplify or omit the description.

The dust removing device 10A of the second embodiment shown in FIG.
Is for removing the film 11A, which is the object to be removed, so that the film 11A passes directly below the ejection unit 20 by the moving unit 30A. The moving means 30A uses the film 1 sent from the first drum 31.
A pair of feed rollers 33, 33 is provided so that 1A is wound around the second drum 32. According to such a dust remover 10A, since it has basically the same configuration as the dust remover 10 of the first embodiment described above, the same effect as the dust remover 10 of the first embodiment described above can be obtained. To be

On the other hand, the dust removing device 1 of the third embodiment shown in FIG.
0B is for removing the dust-removing object 11B having irregularities formed on its surface. The blocking means 40 of the dust removing device 10B is provided so that the tip of the brush 41C provided on the outer peripheral surface 41B of the cylindrical body 41 contacts the surface of the dust-removed object 11B. The brush 41C is planted with a spiral protrusion 41D formed so as not to block each through hole 42. The direction of the nozzle 22 of the ejection unit 20 is appropriately selected so that the gas 12 ejected from the through hole 42 can smoothly pass between the brushes 41C.

According to such a dust removing device 10B, since it has basically the same structure as the dust removing device 10 of the first embodiment and the dust removing device 10A of the second embodiment, the above-mentioned first dust removing device 10B is used. The same effects as those of the dust remover 10 of the embodiment and the dust remover 10A of the second embodiment can be obtained. On the other hand, according to the dust remover 10B, the dust 12B having irregularities formed on the surface can be reliably removed by the synergistic effect of the gas 12 that is intermittently or pulsatingly jetted and the sliding contact of the brush 41C. .

It should be noted that the present invention is not limited to the above-mentioned embodiments, and improvements, modifications and the like within the scope of achieving the present invention are included in the present invention. For example, FIG.
In the dust removing device 10C shown in (A), the square tube member 21 of the injection unit 20 is arranged between a pair of pulleys 60, and an endless belt 61 is stretched around each pulley 60. In this dust removing device 10C, a large number of slit-shaped through holes 62 are formed in the endless belt 61 at predetermined intervals, and by rotating each pulley 60, the through hole 62 immediately before the nozzle 22 and the inner circumference of the endless belt 61 are formed. The planes pass alternately. Even with such a dust removing device 10C, the same effects as those of the above-described respective embodiments can be obtained.

Further, the dust removing device 10D shown in FIG.
Is a blocking member 63 around the rectangular tube member 21 of the injection unit 20.
Is provided so that it can be orbited. The shielding member 63 is a long member having a semicircular cross section, and is rotatable about an axis arranged parallel to the axis of the rectangular tube member 21. In such a dust removing device 10D, the shielding member 63 rotates about an axis intersecting the ejection direction of the gas 12 ejected from the nozzle 22 of the ejecting unit 20, whereby the gas 1
2 is cut off at regular intervals. Therefore, even with such a dust remover 10C, the gas 12 is intermittently or pulsatingly injected to the substrate 11, and the same effects as those of the above-described respective embodiments can be obtained.

Further, in the dust removing device 10E shown in FIG. 7, the rectangular tube member 21 of the jetting means 20 and the cylindrical body 41 of the shielding means 40 are provided along the moving direction of each substrate 11 (see arrow A in the figure). There is. In the dust removing device 10E, the rectangular tube member 21 and the cylindrical body 41 are provided so as to be capable of reciprocating in a direction orthogonal to the moving direction of each substrate 11 (see arrow C in the figure), and the substrate 11 and the jetting device. The means 20 is relatively movable. Such a dust removing device 10E
In addition to the effects similar to those of the above-described respective embodiments, the dust adhering to the surface of the substrate 11 rises in a direction orthogonal to the moving direction of the substrate 11, so that the dust adheres to the surface of the substrate 11 again. Is less likely to occur.

As the blocking means, for example, an outer cylinder capable of coaxially accommodating a cylindrical body may be provided, and a slit may be provided along the axial direction of the peripheral surface of the outer cylinder. According to this, there is no possibility that the gas shielded by the inner peripheral surface of the cylindrical body will leak from the adjacent through holes toward the object to be removed, and the intermittentness of the injected gas can be improved. In addition, the objects to be removed, the gas, the dust, which are illustrated in the respective embodiments and modifications described above
The material, shape, size, form, number, arrangement position, etc. of the jetting means, nozzle, moving means, shielding means, cylindrical body, shielding member, through hole, etc. are arbitrary and not limited as long as the present invention can be achieved. .

[0033]

According to the first and second aspects of the present invention, the gas can be intermittently or pulsatingly injected onto the surface of the dust-removed object, and the dust-removed object can be removed as compared with the conventional one. The effect is improved. Further, according to the dust remover described in claim 3, the dust removal process of the dust-free object can be speeded up. Also,
According to the dust remover described in claim 4, since the gas is obliquely jetted to the dust-removed object, a remarkable dust-removing effect is obtained.

Further, according to the dust removing device of the fifth aspect, by appropriately selecting the through hole and the cylindrical body,
The cycle of the injected gas can be set arbitrarily. Further, according to the dust removing device of the sixth aspect, since the large number of through holes are formed in a substantially spiral shape at predetermined intervals, it is possible to remove dust on the entire surface of the object to be removed. Further, according to the dust removing device described in claim 7, the flow velocity, the fluid pressure, and the pressure of the gas injected from the through hole are
A desired dust removal effect can be reliably obtained without reducing the flow rate and the like.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a first embodiment of the present invention.

FIG. 2 is a side view showing a shielding means.

FIG. 3 is a sectional view showing the operation of the first embodiment.

FIG. 4 is a schematic perspective view showing a second embodiment of the present invention.

FIG. 5 is a sectional view showing a third embodiment of the present invention.

FIG. 6 is a schematic diagram showing a modified example of the present invention.

FIG. 7 is a schematic perspective view showing a modified example of the present invention.

FIG. 8 is a schematic perspective view showing a conventional dust removing device.

[Explanation of symbols]

 10 Dust Removal Device 11 Liquid Crystal Substrate 12 to Be Dust 12 Gas 13 Dust 20 Injecting Means 22 Nozzle 30 Moving Means 40 Shielding Means 41 Cylindrical Body 41A Inner Surface 42 as Shielding Member Through Hole A Moving Direction B Injecting Direction

Claims (7)

[Claims] 1. A dust removal method for removing dust adhering to the surface of an object to be removed by injecting the gas, wherein the gas is continuously injected from an injection means toward the surface of the object to be removed. While making the dust-removed object and the injection means relatively move along the surface direction of the dust-removed object,
Further, a dust removing method, characterized in that a shielding member that shields the gas is circulated around the injection means with an axis intersecting the injection direction of the gas as an axis line. 2. A dust removing device for removing dust adhering to the surface of an object to be removed by injecting the gas, and an injecting means for continuously injecting the gas toward the surface of the object to be removed. And a moving means for relatively moving the dust-removed object and the spraying means along the surface direction of the dust-removed object, and a shielding means having a shielding member capable of shielding the gas. A dust remover, characterized in that the member is provided so as to be able to circulate around the injection means with a direction intersecting the injection direction of the gas as an axis. 3. The dust removing apparatus according to claim 2, wherein the ejecting unit has a slit-shaped nozzle extending in a direction intersecting the relative moving direction of the ejecting unit and the dust-removed object. 4. The injection device is provided so that an angle between the injection direction and a moving direction of the dust-removed object with respect to the injection device is an acute angle. Dust removal device. 5. The shielding means has a cylindrical body capable of accommodating the nozzle and a through hole formed in a peripheral surface of the cylindrical body, and the cylindrical body is rotatable about an axis. The dust remover according to claim 3, which is characterized. 6. The dust remover according to claim 5, wherein a large number of the through holes are formed in a substantially spiral shape at predetermined intervals. 7. The dust remover according to claim 5, wherein the through hole is formed in a substantially mortar shape that widens from the inner peripheral surface of the cylindrical body toward the outer peripheral surface thereof.