JPH01251651A - Work washing and burr-eliminating equipment - Google Patents

Abstract

PURPOSE:To enable a uniform jetting of super high pressure jet flow against a work, by installing a pair of rotary link bodies and nozzles, the former being arranged in the upper space of the wafer and rotating in the same direction, and the latter being arranged in the intermediate part of a connecting rod and jetting the super high pressure jet liquid against the work. CONSTITUTION:Unfinished works are mounted on a conveyer 34 and carried in the direction of an arrow; by driving a motor 24, each nozzle 28 starts a rotating circular motion, via pulleys 20a, 20b, and a connecting rod 26. In this state, by driving a discharge pump, super high pressure jet water flow is gushed against the works from each nozzle 28. As a result, the super high pressure jet water flow gushed and scanned against the works, while drawing the same circular locus. Since the works 36 are transferred in the arrow direction, the scanning of the super high pressure jet water flow becomes a spiral type, so that the wafers 36 are uniformly subjected to washing and burr-eliminating.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a workpiece cleaning/deburring apparatus that cleans and deburrs a workpiece using an ultra-high pressure jet liquid.

(Background of the Invention) In order to clean a workpiece such as a frame of an IC board or to remove dirt from the workpiece, an ultra-high pressure jet liquid such as water or a cleaning liquid is sometimes applied. In this case, since there is a limit to the spraying area of the jet, in order to treat a wide and large workpiece evenly and efficiently, it is desirable to spray the ultrahigh-pressure jet liquid while scanning the workpiece.

One possible method for scanning such ultra-high-pressure jet liquid is to attach an injection nozzle to an eccentric shaft and inject while rotating and scanning.

For example, as shown in FIG. 2, an outer case 52 is attached so as to pass through the plate 50 in the vertical direction, and a rotary shaft 56 is held in the case 52 through a bearing 54 in one turn. At the top of this rotating shaft 56 is a pulley 5.
form 8. This rotating shaft 56 is provided with a nozzle insertion hole 6-0 penetrating vertically at the position of an axis B eccentric from the rotation axis A, and an injection nozzle 64 is inserted into this nozzle insertion hole 60, and this nozzle 64 is bearing 6
2, it is rotatably held. On the other hand, a pulley 68 that is rotationally driven by a rotary motor 66 is provided at another position on the plate 50, and a belt 70 is wound between this pulley 68 and the previous pulley 58. The nozzle 64 arranged in this way is positioned above the workpiece, and the motor 6
6 and rotates the nozzle 64 to eject an ultra-high pressure jet stream. As a result, the ultra-high-pressure jet stream is sprayed onto the workpiece while drawing a circular trajectory with a radius corresponding to the eccentricity AB, and the workpiece is unevenly cleaned and
Can be deburred.

At this time, since the nozzle 64 is rotatably held by the bearing 62, the water supply hose 72 does not rotate.

However, even in a bearing structure using such a bearing 62, the resistance torque of this bearing portion is constantly applied to the water supply hose 72 through the nozzle 64 as torsional torque. As a result, due to the rotation of the rotating shaft 56, the water supply hose 7
2 is disadvantageous in that it easily deteriorates and its lifespan is shorter than when used statically.

In addition, in the case of a multiple nozzle with a plurality of nozzles provided at the tip of the nozzle 64, each nozzle has to be eccentric to the rotation center axis B of the nozzle 64, so it is affected by the resistance torque of the bearing part. The entire multiple nozzle rotates and scans the work at a position twisted in the opposite direction of rotation of the rotary shaft 56 compared to when it is stationary. Therefore, when moving the workpiece under the nozzle, a problem arises in that the scanning range in the direction orthogonal to the workpiece movement direction becomes narrow. In addition, if the rigidity of the water supply hose 72 is insufficient, torsional displacement is applied in a pulsating manner, causing the multiple nozzles to rotate pulsatingly and the scanning radius to the workpiece to fluctuate, resulting in a distorted trajectory of the jet stream. Become. To prevent this, it is possible to offset each nozzle to the opposite side in advance in anticipation of twisting of the multiple nozzles due to the resistance torque of the bearing, or to increase the rigidity of the hose 72. However, if the rotational speed of the rotary shaft 56 or the injection pressure of the jet stream changes, the balance between the combined force of the centrifugal force and injection pressure reaction force applied to the nozzle and the rigidity of the hose 72 will shift. The offset amount must be adjusted each time.

(Object of the invention) The present invention was made in view of the above circumstances, and the nozzle installation does not add rotational resistance torque to the parts, prevents shortening of the life of the water supply hose, and also provides a multi-nozzle system. To provide a workpiece cleaning chamber deburring device that can uniformly inject ultra-high pressure jets onto a workpiece with the same trajectory without being affected by pressure and rotational speed.

(Structure of the Invention) According to the present invention, this object is provided in a workpiece cleaning/deburring device that cleans and deburrs a workpiece by spraying an ultra-high pressure jet liquid onto the workpiece. A pair of rotating links that rotate in synchronization and in the same direction, and a pair of rotating links that are spanned between both rotating links, one end of which is pivoted to the eccentric shaft of one of the rotating links, and the other end of which rotates in the same direction. Achieved by a workpiece cleaning φ deburring device characterized by comprising a connecting rod that is pivoted at a corresponding position of the link body, and a nozzle that is provided in the middle of the connecting rod and injects an ultra-high pressure jet liquid onto the workpiece. be done.

(Example) FIG. 1 is a perspective view of an embodiment of the present invention.

In this figure, reference numeral 10 is a base. This base 10 consists of a pair of support walls 12.12, a pair of bridge sections 14.14 and a bridge section 1 extending between both walls 12 on their upper edges.
It consists of top plates 16, 16 arranged so as to span the edge parts of 4, respectively, and an opening 1 between the rain top plates 16, 16.
8 is formed.

Pulleys 20a and 20b as rotary links are rotatably mounted on these rain weather plates 16, respectively.
A timing belt 22 is wound between both pulleys 20a and 20b. The rotation axis of one pulley 20a is the top plate 1
6 and is rotationally driven by a rotary motor 24 attached to the lower part thereof. When the pulley 20a is rotationally driven by the rotation of the motor 24, the timing belt 22
Accordingly, the pulley 20b also rotates synchronously.

On the other hand, a connecting rod 26 is spanned between both pulleys 20a and 20b. That is, one end of the connecting rod 26 is pivotally attached to a shaft eccentric from the rotation axis of one pulley 20a, and the other pulley 20a is
The other end of the connecting rod 26 is pivotally attached to the corresponding eccentric shaft of b (see FIG. 1). Therefore, in synchronization with the rotation of both pulleys 20a and 20b, the connecting rod 26 rotates in a circular motion while maintaining a position parallel to the line connecting the rotation center axes of both pulleys 20a and 20b.

Three nozzles 28 are provided in the middle part of the connecting rod 26 (above the opening 18) to spray ultra-high pressure jet water downward. Each nozzle 28 is arranged so as to branch from an adapter 30, and is supplied with ultra-high pressure water from a discharge pump (not shown) via a water supply hose 32.

A belt conveyor 34 is disposed below the opening 18 of the base 10, and a workpiece 36 is placed on the conveyor 34 and transported in the direction of the arrow in FIG.

Next, the operation of this embodiment will be explained.

First, the unprocessed workpiece 36 is placed on the conveyor 34 and transferred in the direction of the arrow. On the other hand, when the motor 24 is driven, the pulley 20
A, B, each nozzle 28 rotates in a circular motion via the connecting rod 26. In this state, a discharge pump (not shown) is driven to inject ultra-high pressure jet water from each nozzle 28 onto the workpiece. As a result, the ultra-high pressure jet water sprayed from the nozzle 28 is sprayed and scanned onto the workpiece 36 while drawing the same circular locus, as shown in FIG. Work 36 is the first
Since the workpiece 36 is being transferred in the direction of the arrow in the figure, the scanning of the ultrahigh-pressure jet water jet against the workpiece 36 becomes a spiral pattern.
6 is thoroughly cleaned and deburred.

Since the ultra-high pressure jet stream injected onto the workpiece 36 draws the same circular locus in this way, the energy density of the jet stream becomes almost uniform, and the workpiece 36 can be cleaned and deburred evenly. In addition, each nozzle 28 is connected to a connecting rod 26.
The nozzle 28 itself is not mounted on a bearing or the like that would generate a resistance torque during rotation. Therefore,
The resistance torque is not transmitted to the water supply hose 32 when the nozzle 28 rotates, thereby preventing the hose 32 from deteriorating and shortening its life. Further, since no torsional displacement is applied to the hose 32, even when a plurality of nozzles 28 are installed as in this embodiment, each nozzle 28 does not undergo distorted rotational movement, and the ultra-high pressure jet that hits the workpiece 36 is The energy density of the jet is uniform.

In this embodiment, a pair of pulleys 20a are used as rotating link members.
, b are used to rotate synchronously with the timing belt 22, but the present invention is not limited to such a configuration. For example, the rotating link bodies may be synchronously rotated by a chain wrapped around them as a pair of sprockets. Alternatively, the rotating link body may be formed into an arm structure, and a connecting rod may be attached to the rotating end portion of the rotating link body.

Furthermore, if the connecting rod 26 itself that spans both rotary link bodies is used as a means for synchronously rotating both rotary link bodies, the timing belt as in this embodiment may be omitted.

Although in this embodiment a plurality of nozzles 28 are attached to the connecting rod 26, the present invention also includes a case where only one nozzle 28 is attached.

Note that the ultrahigh-pressure liquid injected from the nozzle 28 is not limited to water, and an appropriate liquid such as an organic solvent may be used depending on the material of the workpiece and the purpose of use.

(Effects of the Invention) As described above, in the present invention, since the nozzle is moved in a circular motion through the connecting rod, no rotational resistance torque is applied to the nozzle mounting portion. Therefore, shortening of the life of the water supply hose can be prevented. Furthermore, even when multiple nozzles are used, each nozzle has the same locus and can uniformly inject ultra-high pressure jet onto the workpiece.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of one embodiment of the present invention, and FIG. 2 is a partial sectional view of the prior art. 20a, b... Pulley (rotating link body) 22... Timing belt, 26... Connecting rod, 28.64... Nozzle, 32.72... Water supply hose 34... Belt conveyor, 36 ···work. Patent applicant: Shibaura Seisakusho Co., Ltd.

Claims (1)

[Claims] In a workpiece cleaning/deburring device that cleans and deburrs a workpiece by spraying an ultra-high pressure jet liquid onto the workpiece, the workpiece cleaning/deburring device is arranged to sandwich a space above the workpiece and rotates in synchronization with each other in the same direction. A pair of rotating links, and a pair of rotating links that spans between both rotating links, one end of which is pivoted to the eccentric shaft of one of the rotating links, and the other end of which is pivoted to the corresponding position of the other rotating link. A workpiece cleaning/deburring device comprising: a connecting rod; and a nozzle provided at an intermediate portion of the connecting rod for injecting an ultra-high pressure jet liquid onto the workpiece.