JPH07204547A - Liquid treating device for thin plate member - Google Patents

Abstract

PURPOSE:To prevent a formation of a liq. film on the surface of a work at executing a liq. treatment executed by supplying a washing liq. or other liq. to the work while transporting the work by a conveyor. CONSTITUTION:The conveyor 11 transporting the work 1 is provided at an inside of a washing chamber 10, and plural spraying nozzles 12 consisting of a liq. circulating pipe 12a and a liq. spraying member 12b provided at plural places are provided in a transport direction of the work at a top position at a midway of the conveyor. In the conveyor, a pair of a roller 14 is fitted to a rotary shaft 13 arranged in a specific pitch interval, and a pulley 15 is fitted at an end part of the rotary shaft, and a belt driven by a motor 16 is wrapped to the pulley. A supporting plates 18 and 18' bearing freely rotatably both sides of each rotary shaft is provided fixedly to an inclined base 19 including at an angle theta to an orthogonal direction with a transport direction of the work.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention sprays a liquid onto a work such as a glass substrate for cleaning a work made of a flat plate-like thin plate member or performing other processing. Thus, the present invention relates to a thin plate member liquid processing apparatus that performs showering.

[0002]

2. Description of the Related Art For example, in order to form a wiring pattern on a glass substrate, the glass substrate is first washed, then a photoresist film is coated, the photoresist film is exposed and cured, and then an extra photoresist is applied. It is necessary to remove the resist film by rinsing it with a solvent, and then wash it again. Here, each process of cleaning the glass substrate and peeling the photoresist film may be carried out by immersing in a cleaning liquid or a solvent, but in recent years, it has been continuously performed from the viewpoint of improving the processing efficiency and achieving complete automation. The method is being adopted. This continuous method is a method of showering a liquid such as a cleaning liquid or a solvent with an injection nozzle while the work such as the glass substrate described above is placed on a conveying means including a conveyor and conveyed in a predetermined direction.

In the prior art, a work is placed horizontally on a conveyer so as to be conveyed, and a plurality of injection nozzles are arranged at an upper position of the convey path of the work by this conveyer, so that a predetermined section is formed. The cleaning liquid is continuously sprayed toward the surface of the work.

[0004]

By the way, as described above, when the cleaning liquid or the like is sprayed from above in a state where the work is arranged horizontally, the liquid stays on the surface of the work,
A liquid film will be formed. When the liquid film is formed in this way, the injection pressure does not act directly on the work even if the liquid is sprayed from above, so even if the section in which the injection nozzle is arranged is taken long, the cleaning effect will not be so great. Can not be improved. Moreover, when moving to the next process, the liquid retained on the work is brought into this next process, which adversely affects the processing in the next process, and the liquid is recovered in the relevant process. When reused, there are drawbacks such as liquid loss. Therefore, in order to prevent the liquid from being brought into the next process, a mechanism for discharging the liquid accumulated on the surface of the work must be provided between the treatment process and the next process.
For this reason, there arises inconvenience that the apparatus structure becomes large and the processing line becomes long.

The present invention has been made in view of the above points, and it is an object of the present invention to prevent a liquid film from being formed on the surface of a work during the liquid treatment of the work. To do so.

[0006]

In order to achieve the above-mentioned object, the present invention provides a liquid from an injection nozzle provided at an upper position while a work made of a flat plate-like thin plate member is carried along a carrying means. Is performed and the predetermined processing is performed by showering the work, and the work is tilted by inclining the carrying means at a constant angle in a direction orthogonal to the work carrying direction. It is characterized by being configured to be transported by.

[0007]

By tilting the work, when the liquid is showered toward the work, the liquid quickly flows down along the tilt after contacting the work. Therefore, new liquid is constantly supplied to the surface of the work with a predetermined injection pressure, and the processing such as cleaning can be performed with extremely high efficiency. Immediately after the liquid supply is cut off after passing through the liquid supply unit, almost no liquid remains on the work, and even if it is carried into the next step as it is,
The liquid is not brought to the next step, and it is possible to prevent the adverse effect due to the bringing of the liquid when performing the treatment in the next step. Further, when the liquid is collected and reused, it becomes possible to prevent the liquid loss.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. First, in FIG. 1, reference numeral 1 denotes a work made of a flat plate-like thin plate member such as a glass substrate, and the work 1 is washed by showering a cleaning liquid on its surface. For this purpose, a cleaning chamber 10 is provided, and a conveyor 11 for conveying the work 1 is provided in the cleaning chamber 10, and a liquid distribution pipe 12a and a liquid distribution pipe 12a are provided at an upper position in the middle of the conveyor 11. A plurality of injection nozzles 12 each including a liquid injection member 12b provided at a plurality of positions in the axial direction of the liquid flow pipe 12a are provided in the conveyance direction of the work 1.

As shown in FIGS. 2 and 3, the conveyor 11 has a pair of rollers 14 mounted on a rotary shaft 13 arranged at a predetermined pitch and a pulley 15 mounted on the end of the rotary shaft 13. A belt 17 driven by a motor 16 is wound around this pulley 15, and all the rollers 14 are rotationally driven by the motor 16. The roller 14 has a flange 14a continuously provided on one side of a circular main body 14a, and the end of the work 1 is guided by the flange 14a. Further, a rubber ring 14c having a large frictional force is attached to the main body portion 14a, and the work 1 is engaged with the rubber ring 14c and is fed in the direction of the arrow in FIG.

Here, both sides of each rotary shaft 13 are rotatably supported by support plates 18 and 18, and the left and right support plates 18 and 18 are fixedly provided on an inclined base 19. The inclined base 19 is inclined at an angle θ in a direction orthogonal to the conveying direction of the work 1, so that the work 1 is conveyed in a state of being inclined left and right. Thus, when the work 1 is conveyed in an inclined state, the guide roller 20 is provided at a position between the front and rear rollers 14 and 14 located on the lower side in the inclination in order to prevent the work 1 from being displaced. The work 1 is rotatably provided, and by guiding the work 1 by the guide roller 20, the work 1 is conveyed straight in a stable state.

Further, in the portion where the cleaning liquid is supplied from the liquid injection member 12b of the injection nozzle 12 in the conveyance path of the work 1, the cleaning liquid is supplied to the surface and becomes slippery. It cannot be transported smoothly. Therefore, the pressing rollers 21 and 21 which are in contact with the upper surface of the work 1 are arranged so as to face the rollers 14 and 14, and the pressing roller 21 is also provided with the rubber ring 22. As a result, the work 1 is sandwiched between the rubber ring 14c of the roller 14 and the rubber ring 22 of the pressing ring 21, so that a sufficient frictional force is exerted and a stable driving force is exerted. Laura 1
4 and the pressing roller 21 must be synchronously rotated in opposite directions. For this reason, gears 23 and 24 are connected to the roller 14 and the pressing roller 21, respectively.
By engaging these two gears 23, 24, the gear 23 on the roller 14 side to the gear 24 on the pressing roller 21 side
The rotation force is transmitted to.

Furthermore, the cleaning liquid sprayed from the spray nozzle 12 is collected and reused. For this purpose, a gutter 25 is provided at the lower end of the inclined base 19, and A cleaning liquid recovery pipe 26 is connected to the gutter 25. A filter 27 is provided in the middle of the cleaning liquid recovery pipe 26, and foreign matter and other pollutants are removed by the filter 27.
A storage tank 28 is connected to the other end of the cleaning liquid recovery pipe 26. Further, a cleaning liquid supply pipe 30 provided with a pump 29 is connected between the storage tank 28 and the liquid flow pipe 12a of the injection nozzle 12.

The present embodiment is constructed as described above, and the work 1 is placed on the roller 14 of the conveyor 11 and the motor 16 is operated to operate the work 1.
The work 1 is conveyed in an inclined state, and the cleaning chamber 10
Sent in. When the spray nozzle 12 provided in the cleaning chamber 10 is reached, the cleaning liquid sprayed from the spray nozzle 12 is supplied to the work 1 and the surface of the work 1 is shower cleaned. Here, since the work 1 is inclined, the cleaning liquid supplied to the work 1 immediately flows down along the inclination of the work 1. As a result, since the liquid does not accumulate on the work 1, new cleaning liquid is always supplied to the surface of the work 1 with a predetermined injection pressure in the entire cleaning section provided with the injection nozzle 12. The cleaning efficiency is extremely good.

When the cleaning with the cleaning liquid supplied from the jet nozzle 12 is completed, the cleaning liquid is immediately discharged from the surface of the work 1. Therefore, when the work 1 exits from the cleaning chamber 10, almost all of the work 1 remains on the work 1. The cleaning liquid is not attached. Therefore, since the cleaning liquid is discharged to the work 1 before the work 1 moves to the next process, a mechanism for performing an operation for discharging the cleaning liquid accumulated on the work 1 before the next process is provided. It is not necessary, the apparatus configuration is simplified, and the interval from this cleaning step to the next step can be made extremely short.

After the cleaning liquid is supplied to the work 1,
The cleaning liquid is collected in the storage tank 28 and reused. However, if the cleaning liquid is taken out of the cleaning chamber 10, the cleaning liquid cannot be reused. However,
After the cleaning liquid is supplied to the work 1, most of the cleaning liquid flows down along the inclination of the work 1 and is collected in the gutter 25. Then, the cleaning liquid collected in this way is filtered by the filter 2
Since it is sent to the storage tank 28 via 7 and is circulated to the injection nozzle 12 again, the consumption of the cleaning liquid is reduced, and efficient reuse is possible.

Here, as described above, the work 1 is tilted by the angle θ, but if the jet nozzle 12 is tilted at an angle corresponding to the tilt angle of the work 1, the work 1 is inclined with respect to the entire surface. The cleaning liquid can be supplied uniformly. However, since the cleaning liquid flows along the inclined surface of the work 1, when the entire surface of the work 1 is viewed, the amount of the cleaning liquid supplied to the lower part is larger than that to the upper part. Therefore, if the injection nozzle 12 is arranged horizontally as shown by the phantom line in FIG.
Since the injection pressure of the cleaning liquid in the portion located on the upper side where the supply amount of the cleaning liquid is small is higher than that in the lower side where the supply amount of the cleaning liquid is large, the balance between the injection pressure and the supply amount of the cleaning liquid on the surface of the work 1 is good. .

In the above embodiments, the work 1
In the above description, the cleaning liquid is sprayed onto the surface of the work 1 from the spray nozzle 12 in order to perform the cleaning. However, in addition to this, the solvent is sprayed to remove the photoresist film and other works. It can also be configured as an apparatus for performing a desired liquid treatment.

[0018]

As described above, according to the present invention, the workpiece is conveyed in an inclined state by inclining the conveying means at a constant angle in the direction orthogonal to the conveying direction of the workpiece. When performing liquid processing such as cleaning on a work, it is possible to prevent the liquid from accumulating on the surface of the work.Therefore, when the liquid is supplied to the work, new liquid is constantly applied to the surface with a predetermined injection pressure. Will be supplied,
The processing efficiency such as cleaning can be improved, and after the supply of the liquid is stopped, almost no liquid remains on the work, and even if the liquid is carried into the next process immediately after this process, the liquid remains in the next process. It will not be brought in, and it will be possible to prevent the liquid brought in from adversely affecting the treatment in the next step,
In addition to eliminating the need to separately provide a mechanism for discharging the liquid accumulated on the work between the relevant process and the next process, it prevents liquid loss when recovering and reusing the liquid. There is an effect such as being able to.

[Brief description of drawings]

FIG. 1 is a configuration explanatory view of a liquid processing apparatus showing an embodiment of the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is an enlarged view of a main part of FIG.

[Explanation of symbols]

 1 Work 10 Cleaning Chamber 11 Conveyor 12 Injection Nozzle 14 Roller 18 Support Plate 19 Tilt Base

Front Page Continuation (72) Inventor Norio Morita 2-6-2 Otemachi, Chiyoda-ku, Tokyo Inside Ritsu Denshi Engineering Co., Ltd. (72) Inventor Hisaga Ichikawa 2-6-2 Otemachi, Chiyoda-ku, Tokyo Inside Ritsuden Engineering Co., Ltd.

Claims (1)

[Claims] 1. A predetermined process is performed by spraying a liquid from an injection nozzle provided at an upper position while carrying a work made of a flat plate-like thin plate member along a carrying means, and showering the work. The liquid processing apparatus for a thin plate member, wherein the work is carried in an inclined state by tilting the carrying means at a constant angle in a direction orthogonal to the carrying direction of the work.