JP5388613B2 - High pressure cleaning liquid jet cleaning system - Google Patents

Description

  The present invention mainly applies a high-pressure cleaning liquid to flat plate-like objects such as FPD (flat panel display) such as liquid crystal panels, plasma panels, solar cell panels, organic EL (electric luminance) panels, large plate-like glass, and semiconductor wafers. The present invention relates to a high-pressure cleaning liquid jet cleaning apparatus (also referred to as a water jet cleaning machine) that performs cleaning by spraying. Specifically, for example, in the manufacturing process of liquid crystal displays and semiconductor wafers, high-pressure cleaning liquid (including high-pressure water) is sprayed on pollutants that cause yield reduction such as fine particles on the glass substrate surface, organic matter and metal impurities. The present invention relates to a high-pressure cleaning liquid jet cleaning apparatus that can be used for removal, has a simple structure, and can be reduced in cost.

  As this type of high-pressure cleaning liquid jet cleaning apparatus, a high pressure sprayed from the cleaning apparatus while rotating (circularly moving) a nozzle holder having a plurality of high-pressure liquid injection nozzles arranged around it or swinging it conically. There has been proposed an apparatus that precisely cleans one surface of a cleaning target with a high-pressure cleaning liquid sprayed from a spray nozzle by moving the cleaning liquid in an orthogonal direction while being vertically applied to the cleaning target (for example, Patent Document 1). reference). This apparatus is provided with a converging nozzle that ejects a high-pressure cleaning liquid in a straight line.

  As for the nozzle used in the conventional general cleaning apparatus, there are many cone types in which the sprayed cleaning liquid spreads in a conical shape or a fan type that spreads in a fan shape. If these nozzles are used, the jet of the cleaning liquid diffuses and the width of the diffusion is wide, so that it is not necessary to make a circular motion or swing like the cleaning device of Patent Document 1.

  On the other hand, the cleaning device of Patent Document 1 uses a converging spray nozzle that is sprayed in a straight line in which the cleaning liquid does not diffuse, so that the energy density of the sprayed cleaning liquid is a cone type or a fan type. Compared to tens of times, it is very high. Therefore, the peeling / cleaning effect on the cleaning surface is very excellent. However, the region (area) where the cleaning liquid hits the object to be cleaned is extremely narrow, and only the local portion can be cleaned. In other words, the areas where the cleaning liquid is not applied are wide, and those areas are not cleaned.

  In order to solve this problem, the inventors of the present application perform high-pressure liquid injection that performs cleaning by injecting cleaning liquid from a number of high-pressure liquid injection nozzles in a straight line while moving the object to be cleaned at a constant speed. In the cleaning system, the high-pressure liquid injection nozzles are directed to the object to be cleaned and are arranged in a common nozzle holder with a space between each other, the directions of the high-pressure liquid injection nozzles are aligned, and the high-pressure liquid injection nozzles are aligned with the nozzles. A cleaning method and a cleaning device were developed, in which high-pressure liquid was sprayed from the high-pressure liquid spray nozzles onto the object to be cleaned while swirling circularly in a horizontal plane through a holder, and a patent application (2007-281322) was developed. )doing.

  In other prior art relating to this type of cleaning apparatus, a detection means for detecting a specific region having more deposits than other regions in the surface of the cleaning target, and the cleaning target is inclined along the conveying direction Holding means for holding in a state; conveying means for conveying the object to be cleaned along the conveying direction while being held by the holding means; discharging means for discharging a cleaning liquid onto the surface of the object to be cleaned; and the surface Moving means for moving the discharge means along the width direction of the object to be cleaned, which is a direction perpendicular to the transport direction, and selectively from the discharge means to the specific region A cleaning apparatus that discharges the cleaning liquid has been proposed (see, for example, Patent Document 2).

Japanese Patent No. 2705719 JP 2006-10947 A

  As described above, the higher the rotational speed when the holder is swiveled around its support shaft, the higher the cleaning density, while the vibration of the holder or the entire apparatus including the holder increases. That is, since this vibration acceleration increases with the square of the rotational speed, it is difficult for the hand-held cleaning apparatus as described in Patent Document 1 to continue the cleaning operation with the hand held by the operator. become. Further, if the number of nozzles mounted on the holder is increased to 2 to 3 times, not only will the overall length of the holder be increased, but the outer diameter of the holder will be greatly increased, which is inaccurate as a hand-held cleaning device. .

  -The device described in Patent Document 2 is a device that intensively cleans a specific basin where there are many deposits on the object to be cleaned, and is not a device that uniformly cleans the entire object to be cleaned.

  In the cleaning device 70 of the above-mentioned patent application relating to the prior application, as shown in FIG. 9, a nozzle holder 71 in which a large number of high-pressure water injection nozzles 72 are arranged is rotated in a horizontal plane by eccentrically rotating drive shafts 74 on both sides. It consists of a structure that cleans while circularly moving. Therefore, an isosceles triangular bending moment acts on the nozzle holder 71 when vibrating in the Y direction in FIG. 9. Therefore, the nozzle holder 71 needs to have a cross-sectional strength sufficient to overcome the bending moment, and the nozzle holder 71 is increased in size and weight in order to increase the rigidity of the nozzle holder 71. Along with this, the eccentric rotation drive units 73 and the drive motors on both sides must be increased, leading to an increase in cost and increasing external vibration. Further, in order to secure the sealed cleaning chamber 76, a predetermined gap (as viewed in the direction of the arrow G in FIG. 9) is provided between the support portion 75 extending from both sides of the nozzle holder 71 that moves in a circular motion and both side walls 77 of the cleaning chamber 76. In addition, the clearance between the front and rear portions of the object to be cleaned (not shown) in the transport direction must be sealed. This complicates the sealing device.

  The present invention has been made in view of the above points, and can be simplified in structure as compared with the cleaning device according to the above-mentioned prior application, can be reduced in size and weight, can be reduced in cost, and can be used for a device during cleaning. It is an object to provide a high-pressure cleaning liquid jet type cleaning device that suppresses vibration and enables uniform and efficient cleaning.

In order to solve the above-mentioned problems, the high-pressure cleaning liquid jet type cleaning apparatus of the present invention is a high-pressure cleaning liquid jet type cleaning provided with a number of injection nozzles for cleaning a target object by injecting the high-pressure cleaning liquid into a single straight line. A device in which a large number of spray nozzles are arranged at regular intervals along the longitudinal direction of the nozzle holder , and each end of the nozzle holder can be rotated to the lower end of the first and second pendulum members, respectively. And the upper end portions of the first and second pendulum members are respectively supported above the cleaning path of the cleaning object so as to be rotatable around the axis by a rotation axis parallel to the conveyance direction, at least one of the rotation axes of the first and second pendulum member, connected to the drive shaft for reciprocating rotated by a predetermined angle by the driving device, perpendicular to the object to be cleaned in the longitudinal direction of the nozzle holder While transporting the direction, the when to pendulum movement of the nozzle holder in the longitudinal direction is reciprocated within a predetermined distance in a direction at the same time perpendicular to the longitudinal direction, it is injected to said object to be cleaned a pressure cleaning liquid from each of the injection nozzle It is characterized by washing.

According to the high-pressure washing liquid ejecting cleaning apparatus according to claim 1 having the configuration described above, Riko motion vibration in the longitudinal direction (lateral direction) of the nozzle holder a number of high-pressure washing liquid ejecting nozzles with the nozzle holder (swing) Then simultaneously Since high-pressure cleaning liquid is sprayed in a straight line from a number of spray nozzles, high cleaning strength can be obtained. Also, Riko motion oscillation in the longitudinal direction of the nozzle holder, uniformly be jetted substantially no gap pressure cleaning liquid across the width of the cleaning object, the cleaning unevenness is less likely to occur. Furthermore, even if the moving speed of the object to be cleaned is increased to speed up the cleaning, the reciprocating rotation time is shortened, or the reciprocating rotation angle is narrowed, the nozzle holder or the entire apparatus including the nozzle holder vibrates. The acceleration is not increased and the vibration is suppressed.
In addition, the nozzle holder is swung in the longitudinal direction (left-right direction) while spraying cleaning liquid from a number of injection nozzles under high pressure, and at the same time, reciprocates in the direction orthogonal to the longitudinal direction of the nozzle holder (front-rear direction). Since it is moved, the high-pressure cleaning liquid is not concentrated and sprayed at a specific location on the object to be cleaned. In addition, the nozzle holder is swung in the longitudinal direction and smoothly reciprocated at a constant pitch in the direction perpendicular to the longitudinal direction. It can be sprayed on the surface to increase the degree of freedom in ensuring the uniformity of cleaning.

According to a second aspect of the present invention, the spray nozzles are arranged on the lower surface of the nozzle holder at equal intervals along the longitudinal direction, and the high-pressure cleaning liquid supply path is disposed along the longitudinal direction of the nozzle holder. And one end of a flexible high-pressure cleaning liquid supply pipe can be connected to the end of the high-pressure cleaning liquid supply path.

  In this way, the lower end of the pendulum member is pivotally attached to both ends of the nozzle holder to support the nozzle holder so that it can swing in the longitudinal direction, and the upper end of the pendulum member is connected via a crank mechanism or a motor. The nozzle holder can be reciprocally rotated by applying a reciprocating rotational force to the rotating shaft that supports the portion. In addition, the nozzle holder swings in the longitudinal direction (left-right direction) and moves in a pendulum, but the swing range (rotation angle 2θ) is as small as about 30 to 60 °, for example. The high pressure cleaning liquid supply pipe bends and absorbs the displacement of the end of the nozzle holder. Then, the high-pressure cleaning liquid supplied into the high-pressure cleaning liquid supply path through the high-pressure cleaning liquid supply pipe is jetted under a high pressure from each of the injection nozzles facing (communicating) the high-pressure cleaning liquid supply path.

Since the high-pressure cleaning liquid jet cleaning apparatus according to the present invention has the above-described configuration, the following excellent effects can be obtained. That is,
A large number of injection nozzles reciprocally swing within a predetermined rotation angle in the longitudinal direction via the nozzle holder and the pendulum member. During this oscillation, the cleaning liquid is sprayed from a large number of spray nozzles onto the object to be cleaned under high pressure. When the nozzle holder is reciprocally swung only in the longitudinal direction, the cleaning locus becomes a zigzag shape (as shown in FIG. 1). Therefore, the nozzle holder has a constant width in the width direction of the object to be cleaned (direction perpendicular to the conveying direction). A cleaning region is formed. Therefore, since the cleaning object is transported at a constant speed across the cleaning area, the cleaning liquid can be sprayed uniformly and at a high cleaning density on the entire surface of the cleaning object under high pressure. Power is obtained and cleaning unevenness is less likely to occur. In addition, since the nozzle holder is swung in the longitudinal direction (left-right direction) for cleaning, vibration acceleration is not increased even at higher speeds, vibration is suppressed, and an excellent cleaning effect with high cleaning density is achieved. can get. Above all, the cleaning device of the present invention can reduce the rigidity of the holder and reduce the weight of the rotary support structure such as the bearing, compared to the cleaning device of the prior application that rotates the holder in a horizontal plane for cleaning. The vibration can be reduced and the manufacturing cost can be greatly reduced.

  Further, when the cleaning device of the present invention is installed in a sealed cleaning chamber called a clean chamber, it is not necessary to provide a gap (interval between the nozzle holder 75 and the cleaning chamber side wall 77) as shown in FIG. The sealing mechanism can be simplified.

  Furthermore, in addition to the reciprocating rocking motion in the longitudinal direction of the nozzle holder, the reciprocating linear motion in the direction perpendicular to the longitudinal direction of the nozzle holder is simultaneously performed, so that the cleaning liquid is traced to the object to be cleaned in a perfect circular or elliptical shape. Therefore, the cleaning performance comparable to that of the prior application cleaning device can be obtained, and the structure is simple and the cost can be greatly reduced. In addition, by adjusting the timing and stroke distance of the reciprocating linear movement of the nozzle holder, not only a perfect circular cleaning trajectory but also an arbitrary elliptical cleaning trajectory can be drawn. Becomes larger.

1 is a plan view showing a first embodiment of a high-pressure cleaning liquid jet type cleaning apparatus of the present invention. FIG. 2 is a front view of the high-pressure cleaning liquid jet cleaning device shown in FIG. 1. FIG. 3A shows an embodiment of the nozzle holder 2, and FIG. 3A is a sectional view taken along the line aa in FIG. 3B, and FIG. 3B is a sectional view taken along the line bb in FIG. 4A is a front view showing a piston / crank mechanism of the cleaning apparatus of FIG. 1, and FIG. 4B is a cross-sectional view taken along line bb of FIG. 4A. FIG. 5A is an explanatory view showing the front of the cleaning liquid supply pipe 9 connected to one end of the holder 2, and FIGS. 5B and 5C show another embodiment of the cleaning liquid supply pipe 9. FIG. 5 (b) is an explanatory view showing the front of a state in which a cleaning liquid supply pipe 9 ′ made of a high-pressure hose is connected, and FIG. 5 (c) is a state in which a spirally formed metal cleaning liquid supply pipe 9 ″ is connected upward. FIG. 5D is an explanatory view showing the front in a state in which a metal cleaning liquid supply pipe 9 ″ formed in a spiral shape is connected sideways. FIG. 5 is an explanatory view showing a method of changing the swing angle θ of the nozzle holder 2 (injection nozzle 3) in the piston / crank mechanism shown in FIG. In the cleaning apparatus according to the embodiment of FIG. 1, FIG. 7A is an explanatory diagram showing the relationship between the distance immediately below the nozzle holder 2 and the object x to be cleaned (standoff), and FIG. It is explanatory drawing showing the relationship of the distance (standoff) from the injection nozzle 3 in the (theta) position to the cleaning target x. This is a graph showing the relationship between the distance (standoff) from the spray nozzle 3 to the cleaning object x and the cleaning strength, and is expressed by the relationship between the cleaning ability and the distance corresponding to the penetration time of the aluminum foil by the spray of the cleaning liquid. is there. The top view which shows the washing | cleaning apparatus 70 concerning a prior application of the structure which wash | cleans the nozzle holder 71 in which many high-pressure water-injection nozzles 72 were arranged, rotating the drive shaft 74 of both sides eccentrically, and rotating circularly within a horizontal surface. It is.

  Embodiments of a high-pressure cleaning liquid jet cleaning apparatus according to the present invention will be described below.

  As shown in FIG. 1, a high-pressure cleaning liquid jet type cleaning apparatus 1 of this embodiment is a pendulum type (also referred to as a swinging type) cleaning apparatus, and a nozzle holder 2 in which a number of high pressure cleaning liquid injection nozzles 3 are arranged on the lower surface. It has. The nozzle holder 2 is formed of a rectangular tube that is rectangular when viewed from above, and a large number of high-pressure cleaning liquid spray nozzles 3 are arranged at equal intervals in the longitudinal direction of the lower surface thereof. The length of the nozzle holder 2 is slightly longer than the width of the cleaning object x, and the spray nozzle 3 is mounted on the lower surface of the nozzle holder 2 so as to sufficiently cover the width of the cleaning object x.

  The high-pressure cleaning liquid jet cleaning device 1 according to the present embodiment is a device that cleans a rectangular thin plate-shaped cleaning object x as shown in FIG. As shown in FIG. 2, the object to be cleaned x is transported along the front-rear direction by the roller conveyor 11 in the cleaning chamber 10. A pair of support tables 12 are installed on both sides of the cleaning chamber 10 so as to sandwich the cleaning chamber 10. A support column 13 is erected on the support base 12, and a support member 14 is fixed at a right angle from the upper end of each support column 13 toward the cleaning chamber 10. The upper end portion of the pendulum member 15 is pivotally attached to the distal end portion of the support member 14 so as to be rotatable around the rotation shaft 16 by a rotation shaft 16 parallel to the conveyance direction of the cleaning object x. Then, both end portions of the nozzle holder 2 are rotatably supported by the second rotating shaft 17 across the lower end portions of the left and right pendulum members 15. In this embodiment, the pendulum member 15 is composed of a pair of plate members 15a, and is arranged so as to sandwich the nozzle holder 2 and the support member 14 from both sides as shown in FIG. Each is rotatably mounted.

  With this configuration, the nozzle holder 2 is reciprocally rotated while being maintained in a horizontal state within a range of ± angle θ in the width direction of the cleaning object x. In the present embodiment, a drive shaft 20 that reciprocally rotates by an angle θ is connected to one of the left and right rotating shafts 16 and 16 (right side in the figure), and the other (left side in the figure) rotating shaft 16 is a pendulum member. 15 is rotatably supported. In addition, a piston / crank mechanism is used as a mechanism for reciprocatingly rotating the drive shaft 20 and the rotary shaft 16, and the motor 22 is rotated by rotating the drive shaft 22a in one direction. That is, in this example, the nozzle holder 2 reciprocally rotates within a predetermined rotation angle 2θ around the rotation shaft 16 by the piston / crank mechanism.

  In this example, as shown in FIG. 4B, one end of the lever 21 is attached to the drive shaft 22a so as to be integrally rotatable by a sleeve-like rotation transmitting portion 27. As shown in FIG. One end of the crank 23 rotating in one direction (for example, counterclockwise) and the other end of the lever 21 rotating integrally with the drive shaft 22a are respectively connected by the crank pin 25 and the piston pin 26 via the connecting rod 24. It is connected rotatably. A counterweight 23a is integrally formed on the other end side of the crank 23 (on the opposite side of the crankpin 25). With this configuration, when the crank 23 rotates in one direction (for example, clockwise), the piston pin 26 portion of the lever 21 reciprocates in the left-right direction by θ (for example, 30 °), and the rotation shaft 16 moves to its center position. Since the nozzle holder 2 is reciprocated around S as a rotation center, the nozzle holder 2 is reciprocated by a rotation angle θ in the longitudinal direction (left and right direction), and the cleaning liquid is directed toward the object x to be cleaned under high pressure from each spray nozzle 3 on the lower surface of the nozzle holder 2. Spraying while swinging in the width direction.

  In the above embodiment, the nozzle holder 2, that is, the spray nozzle 3 on the lower surface is designed to reciprocate around the rotation center S left and right (in the width direction of the cleaning object x), for example, by θ1 = 30 °, as shown in FIG. The rotation radius of the crank 23 is r1, and the rotation radius of the lever 21 is R1. At this time, the swing stroke of the lever 21 is S1.

  The cleaning liquid (including cleaning water) sprayed from each of the spray nozzles 3 is sprayed in a straight line under high pressure. The cleaning liquid sprayed from each spray nozzle 3 is a single straight line and has a large cleaning ability (cleaning power). Further, the cleaning liquid sprayed from each spray nozzle 3 has a single linear shape, but the nozzle holder 2 swings in the width direction of the cleaning target object x, and the cleaning target object x is transported by a roller conveyor 11 or the like. Therefore, the entire surface of the object to be cleaned x can be cleaned with almost no gap by adjusting the speeds of the two.

  FIG. 3 is a view showing an embodiment of a nozzle holder 2 in which a large number of injection nozzles 3 are arranged on the lower surface. The nozzle holder 2 of this example has a square cross section as shown in FIGS. 3 (a) and 3 (b). A high-pressure cleaning liquid supply path 32 is provided along the longitudinal direction above the long nozzle holder 2 having a shape. In addition, a nozzle portion 4 on which a large number of injection nozzles 3 are mounted at a constant pitch is provided in the lower portion of the nozzle holder 2, and the nozzle portion 4 is formed with an opening 4 c that opens a lower end facing below each injection nozzle 3. . Further, a connection hole 4d communicating with the high-pressure cleaning liquid supply path 32 is provided at one end of the lower portion of the nozzle holder 2, and one end of the high-pressure cleaning liquid supply path 32 is connected to the connection hole 4d. In the case of this example, a cleaning liquid supply pipe 9 (see FIG. 5A) such as a high-pressure hose which is made of metal or rubber having flexibility and is reinforced by winding a metal blade (wire) on the outer peripheral surface. Connected to one end of the high-pressure cleaning liquid supply path 32. In addition, the code | symbol 5 in FIG.3 (b) is a through-hole of the 2nd rotating shaft 17. As shown in FIG.

  The other end of the metal supply pipe 9 is connected to a high-pressure cleaning liquid pump (not shown), and is connected from the high-pressure cleaning liquid pump to one end of the high-pressure water supply path 32 of the nozzle holder 2 through the metal supply pipe 9. High-pressure cleaning liquid is supplied from the high-pressure water supply path 32 to each injection nozzle 3, and high-pressure water is injected from each injection nozzle 3 in a straight line. The metal high-pressure cleaning liquid supply pipe 9 need not be spiral as long as it is flexible. For example, the supply pipe 9 may be curved in a straight line. 5 (b) to 5 (d) show another embodiment of the cleaning liquid supply pipe 9, FIG. 5 (b) shows a cleaning liquid supply pipe 9 'composed of a high-pressure hose, and FIG. FIG. 5 (d) shows a state in which a spirally formed metal cleaning liquid supply pipe 9 ″ is connected upward from below, and FIG. 5D shows a spirally formed metal cleaning liquid supply pipe 9 ″ connected laterally from the side. Shows the state.

  FIGS. 7A and 7B are explanatory views showing the locus of the cleaning liquid ejected from the ejection nozzle 3 of the nozzle holder 2 onto the object to be cleaned x, at a position where the swinging direction of the nozzle holder 2 is converted to the opposite direction. The oscillation speed of the injection nozzle 3 becomes zero. Therefore, at the direction change position, the spray time of the cleaning liquid with respect to the cleaning object x becomes longer than the other positions. Usually, when the spraying time is extended, the cleaning ability is increased, so that cleaning unevenness is likely to occur. However, the influence of the cleaning apparatus of the present invention is mitigated. That is, as shown in FIG. 7A, when the distance from the injection nozzle 3 to the object x to be cleaned is L and the distance between the upper and lower rotary shafts 16 and 17 in the pendulum member 15 is also L, FIG. As shown in b), the distance LA from the injection nozzle 3 to the direction change position B on the cleaning object x is L + L (1−COSθ). When L = 100 mm and θ = 22.5 °, LA = L (2-COS22.5) = 107.6 mm, and the direction change position is 7.6 mm farther from the lower position A of the injection nozzle 3. As a result, since the cleaning ability is lowered, even if the cleaning time is extended, the difference in the cleaning ability is reduced as follows.

  That is, FIG. 8 is a graph showing the relationship between the distance (standoff) from the injection nozzle 3 to the cleaning object x and the cleaning strength, and shows the penetration time of the aluminum foil by the cleaning liquid injection in relation to the distance. is there. When the distance L extends from 100 mm to 107.6 mm of LA, it can be seen from the graph of FIG. Since the cleaning liquid sprayed from the spray nozzle 3 hits the cleaning target object x at any position (swing angle), the spraying force of the cleaning liquid acting on the cleaning target object x does not change. Further, the decrease is only due to the distance L extending from 100 mm to 107.6 mm.

  For this reason, at the direction change position B, the cleaning ability becomes smaller than the swing center position A of the pendulum by the standoff, so that the increase in the cleaning ability due to the swing speed becoming zero is alleviated. It is guessed.

  According to the high pressure cleaning liquid jet type cleaning apparatus 1 according to the above embodiment, as shown in FIG. The cleaning object is swung (reciprocatingly rotated) in the width direction of the cleaning object x while jetting the cleaning liquid. That is, according to the high-pressure cleaning liquid jet cleaning apparatus 1 according to the present embodiment, the cleaning liquid sprayed from the spray nozzles 3 arranged at equal intervals on the lower surface of the nozzle holder 2 swings in the width direction of the cleaning object x, The cleaning object x conveyed in the direction of the arrow moves so as to cross the cleaning region in which the trajectories of the high-pressure cleaning liquid ejected from the numerous ejection nozzles 3 overlap each other. The entire surface is cleaned with the cleaning liquid with almost no gap.

  As mentioned above, although the Example was shown about the high-pressure washing | cleaning liquid injection type washing | cleaning apparatus concerning this invention, it is not limited to this Example, For example, it can implement as follows.

  In the above embodiment, the spray nozzles 3 are arranged linearly at regular intervals on the lower surface of the nozzle holder 2, but two to three rows can be arranged at regular intervals in a staggered manner.

  -Although illustration is omitted, by adding a reciprocating linear motion in a direction perpendicular to the longitudinal direction of the nozzle holder 2 to the pendulum type cleaning device 1 described above, the cleaning liquid from each injection nozzle 3 is made circular or elliptical. It can be made to spray with respect to the cleaning object x as depicted. For example, in FIG. 2, the nozzle holder 2 is disposed on the support bases 12 on both sides via a linear motor so as to be able to reciprocate in the conveying direction of the cleaning object x together with the support columns 13. Then, the nozzle holder 2 is reciprocated horizontally with the column 13 by the piston / crank mechanism. With the above configuration, in the cleaning apparatus of this example, the nozzle holder 2 is swung in the longitudinal direction (left-right direction) while spraying the cleaning liquid from a number of spray nozzles 3 under high pressure, and at the same time in the longitudinal direction of the nozzle holder 2. It can also be reciprocated in the orthogonal direction (front-rear direction). In addition, by synchronizing the oscillation of the nozzle holder 2 in the longitudinal direction and the reciprocating linear movement in the front-rear direction, the cleaning liquid can be jetted in a perfect circle shape or an ellipse shape, so that the cleaning object x On the other hand, the cleaning liquid can be sprayed evenly without any gap, and an excellent cleaning effect with a high cleaning density can be obtained.

  INDUSTRIAL APPLICABILITY The present invention is mainly used as a high-pressure cleaning liquid jet cleaning apparatus for cleaning a flat plate-like object such as an FPD (flat panel display), a large plate glass, or a semiconductor wafer by spraying a high-pressure cleaning liquid.

DESCRIPTION OF SYMBOLS 1 High pressure washing | cleaning liquid injection type washing | cleaning apparatus 2 Nozzle holder 3 Injection nozzle 4 Nozzle part 4c opening 4d Connection hole 9, 9 ', 9 "high pressure washing liquid supply pipe 10 Cleaning chamber 11 Roller conveyor 12 Support stand 13 Support column 14 Support member 15 Pendulum member 16 17 Rotating shaft 20 Driving shaft 21 Lever 22 Servo motor 22a Motor driving shaft 23 Crank 23a Counterweight 24 Connecting rod 25 Crank pin 26 Piston pin 27 Sleeve-shaped rotation transmission part 32 High pressure cleaning liquid supply path x Object to be cleaned

Claims (2)

A high-pressure cleaning liquid jet type cleaning device provided with a number of injection nozzles for cleaning a target object by injecting a high-pressure cleaning liquid into a single straight line,
A number of the spray nozzles are arranged at regular intervals along the longitudinal direction of the nozzle holder,
Each end of the nozzle holder is rotatably attached to the lower end of the first and second pendulum members,
The upper end portions of the first and second pendulum members are respectively supported so as to be rotatable about the axis thereof by a rotation axis parallel to the conveyance direction above the conveyance path of the cleaning object,
Connecting at least one of the rotating shafts of the first and second pendulum members to a driving shaft that reciprocally rotates by a predetermined angle by a driving device;
Wherein while the object to be cleaned is transported in the direction perpendicular to the longitudinal direction of the nozzle holder, is reciprocated within a predetermined distance in a direction perpendicular to the nozzle holder at the same time the longitudinal direction when is pendulum motion in the longitudinal direction, each of said A high-pressure cleaning liquid jet type cleaning apparatus that performs cleaning by spraying a high-pressure cleaning liquid onto the object to be cleaned from an injection nozzle. The spray nozzles are arranged on the lower surface of the nozzle holder at regular intervals along the longitudinal direction, and a high-pressure cleaning liquid supply path is provided in communication with the spray nozzles along the longitudinal direction of the nozzle holder,
The high-pressure cleaning liquid jet cleaning apparatus according to claim 1, wherein one end of a flexible high-pressure cleaning liquid supply pipe is connected to an end of the high-pressure cleaning liquid supply path.

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