JP3739124B2 - Dust remover - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a filtration apparatus and, more particularly, for example, in the production of liquid crystal panels, to a dust removing apparatus for a glass substrate, a resin substrate to dust.
[0002]
[Prior art]
In manufacturing a liquid crystal panel used for various image displays, a dust removal process for removing dust attached to the glass or resin substrate surface is indispensable.
In general, in the dust removal process, an air knife type dust removal device that blows off dust by injecting a gas such as nitrogen at a high pressure onto the substrate surface is often used.
As such a dust removing device, for example, an air jet dust removing device is proposed in which a shutter capable of reciprocating rotation is provided at a position close to the front side of an ejection port of a nozzle that ejects air (see Japanese Patent Publication No. 7-32899). Conventional example).
[0003]
FIG. 8 shows an outline of an air jet dust removing device 80 exemplified in the third embodiment of the conventional example. The air jet dust removing device 80 is a film dust removing device for dust removing the surface of the film 81 traveling in a predetermined direction, and an ejection port extending in a direction orthogonal to the traveling direction of the film 81 (see arrow a in the figure). 82 and a shutter 83 disposed at a position close to the front side (downward in the drawing) of the injection port 82.
The shutter 83 is a horizontally long plate along the ejection port 82, and is provided with a number of slits 84 that cross the ejection port 82. The shutter 83 reciprocates at high speeds periodically along the ejection port 82 (see arrows b and c in the figure).
Therefore, according to this air jet dust removing device 80, the air jetted from the jet port 82 is intermittently shut off at a high speed, so that the air shower is blown on the surface of the film 81 while being vibrated at small speeds, so to speak, a pulse. It is supposed that dust can be removed from the film 81 by air-injecting into a shape.
[0004]
[Problems to be solved by the invention]
By the way, in the air jet dust removing device 80 described above, even if the shutter 83 reciprocates, air is continuously jetted from the slits 84 that are always open.
That is, the air jet dust removing device 80 merely branches the air jetted from the jet port 82 into a substantially comb shape by the shutter 83, and even if the shutter 83 reciprocates, On the other hand, the trajectory of each air jetted in a substantially streak shape only meanders (see the chain line in the figure).
Therefore, the air jet dust removing device 80 does not jet air intermittently, and there is a problem that the dust removing effect of the film 81 is low.
The present invention has been made to solve such conventional problems, and its object is to provide a filtration apparatus that can improve the dust removal effect.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the invention described in claim 1 is directed to an injection unit that continuously injects a gas toward the surface of the object to be dedusted, and the object to be dedusted and the ejecting unit of the object to be dedusted. A moving means for relatively moving along the surface direction, and a shielding means having a shielding member capable of shielding the gas, the axis intersecting the direction in which the shielding member intersects the gas injection direction The dust removing device is provided so as to be able to circulate around the jetting means and removes the dust attached to the surface of the dust removal object by jetting a gas, wherein the jetting means includes the jet means and the dust removal object. A slit-like nozzle extending in a direction intersecting with the relative movement direction, and the shielding means has a cylindrical body capable of accommodating the nozzle, and a through-hole formed in a peripheral surface of the cylindrical body, Cylindrical center axis As well as a rotatable, characterized in that the through hole is formed in a substantially conical shape which widens toward the outer surface from the inner peripheral surface of the cylindrical body has a.
[0006]
The invention according to claim 2 is characterized in that the ejecting means is provided such that a sandwiching angle between the ejecting direction and the moving direction of the dust-deposited object with respect to the ejecting means is an acute angle. The invention described in claim 3 is characterized in that a large number of the through holes are formed at a predetermined interval in a substantially spiral shape.
[0007]
In the present invention, as the gas, for example, nitrogen or normal air that does not have chargeability, toxicity, and the like and does not alter the dust removal object can be used.
As the moving means, one may be moved well, or both is moved relative to the other to one of the injection means and the dust removal thereof.
[0008]
According to the present invention, the gas injected from the injection means along with the circulation of the shielding member reaches the surface of the object to be removed intermittently or pulsatically without decreasing the flow velocity, the flow pressure, the flow rate and the like. As a result, the dust removal effect of the object to be removed is improved as compared with the prior art, thereby achieving the object.
[0009]
Further , according to the invention described in claim 2 , for example, the gas is injected obliquely with respect to the flat surface of the object to be removed. Therefore, the dust adhering to the surface of the dust removal object separates from the dust removal object and rises together with the gas reflected by the dust removal object, so that a remarkable dust removal effect is obtained.
[0010]
Further, according to the invention described in claim 3, wherein the through-hole by being formed a number at predetermined intervals in a substantially helical, the gas is intermittently injected from the through hole along with the rotation of the cylinder Since the ejection trajectory with respect to the surface of the dust removal object is not linear, the entire surface of the dust removal object can be removed .
[0011]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a first embodiment according to the present invention. The dust removing apparatus 10 in this embodiment removes the surface of the substrate 11 by jetting a gas 12 such as nitrogen at a high pressure toward a glass or resin substrate 11 used for a liquid crystal panel.
The dust removing apparatus 10 includes an ejection unit 20 that continuously ejects the gas 12 toward the surface of the substrate 11, and a movement for moving the substrate 11 in the surface direction (direction of arrow A in the figure) relative to the ejection unit 20. It comprises a means 30 and a shielding means 40 capable of shielding the gas 12.
The moving means 30 is configured to sequentially move the substrate 11 so as to pass directly below the ejecting means 20 by a plurality of belt conveyors 31 arranged in tandem.
[0012]
As shown in FIG. 2, the ejection unit 20 blows the gas 12 pumped into the rectangular tube member 21 from the nozzle 22 provided on the side surface of the rectangular tube member 21 to the outside.
The rectangular tube member 21 is formed by a pair of U-shaped members 23 and 24 connected approximately in the middle. The U-shaped members 23 and 24 are long materials that continue in the depth direction in the figure, the ribs 25 and 25 are surface-connected, and the ribs 26 and 26 are spaced apart. The ribs 26 and 26 are arranged so that the mutually facing surfaces are parallel to each other.
Therefore, the rectangular tube member 21 is formed in a slit shape along the axial direction (the depth direction in the drawing) of the rectangular tube member 21 by the ribs 26 and 26.
[0013]
Such an injection means 20 has a sandwich angle between the injection direction of the gas 12 injected from the nozzle 22 in a strip shape (see arrow B in the figure) and the moving direction of the substrate 11 relative to the injection means 22 (see arrow A in the figure). The ribs 26 and 26 are appropriately formed so that the angle becomes an acute angle, and the rectangular tube member 21 is appropriately disposed.
Further, in the ejection unit 20, the longitudinal dimension of the nozzle 22 is set to be larger than the maximum length in the surface direction of the substrate 11, and the rectangular tube member 21 is arranged orthogonal to the moving direction of the substrate 11.
Therefore, in the dust removing apparatus 10 of the present embodiment, when the substrate 11 is moved by the moving unit 30, the injection unit 20 sequentially injects the gas 12 across the entire surface of the substrate 11 obliquely.
[0014]
The shielding means 40 includes a cylindrical body 41 that can accommodate the nozzle 22 and a large number of through holes 42 formed in the peripheral surface of the cylindrical body 41.
The cylindrical body 41 has an inner diameter, an outer diameter, and an installation position so that the axis is not in contact with the square tube member 21 and the outer peripheral surface 41B is not in contact with the substrate 11. It is appropriately selected and is arranged so that the axis is parallel to the axis of the rectangular tube member 21.
As shown in FIG. 3, the through holes 42 have a substantially bowl shape that expands from the inner peripheral surface 41 </ b> A of the cylindrical body 41 toward the outer peripheral surface 41 </ b> B, and are formed in a number of substantially spirals at predetermined intervals. .
These through holes 42 are formed on the outer peripheral surface of the cylindrical body 41 so as to draw a double helix.
[0015]
In such a shielding means 40, the cylindrical body 41 is rotatable about the axis, and the inner peripheral surface 41A of the cylindrical body 41, which is a blocking member, and each through hole 42 are in an endless track shape immediately before the opening of the nozzle 22. Pass through alternately.
Therefore, the dust removing apparatus 10 of the present embodiment is configured to block or pulsate the gas 12 injected from the nozzle 22 toward the substrate 11 at a constant period as the cylindrical body 41 rotates.
[0016]
At this time, when the through hole 42 is positioned immediately before the nozzle 22, the shielding means 40 has a through hole formed in a substantially bowl shape even if the axis of the through hole 42 intersects the injection direction of the gas 12. The gas 12 is allowed to pass smoothly along the inner peripheral surface of the hole 42.
Therefore, in the dust removing apparatus 10 of the present embodiment, there is little possibility that the flow velocity, fluid pressure, etc. of the gas 12 injected intermittently or pulsatically with the rotation of the cylindrical body 41 will be reduced.
[0017]
Returning to FIG. 1, the dust removing apparatus 10 as described above moves the substrate 11 by the moving means 30, jets the gas 12 from the nozzle 22 of the jetting means 20, and rotates the cylindrical body 41 of the blocking means 40. Let
Then, as shown in FIG. 2, the blocking means 40 intermittently or pulsatically injects the gas 12 from the through holes 42 onto the surface of the substrate 11 as the cylindrical body 41 rotates. At this time, since each through hole 42 is spirally formed on the peripheral surface of the cylindrical body 41, the blocking means 40 sequentially supplies the gas 12 along the movement width direction of the substrate 11 as the cylindrical body 41 rotates. Injecting intermittently, the entire surface of the substrate 11 is sequentially removed.
The dust 13 adhering to the surface of the substrate 11 soars away from the substrate 11 together with the gas 12A reflected on the surface of the substrate 11 because the gas 12 is jetted obliquely with respect to the surface of the substrate 11, and the duct 50 The dust is collected by a predetermined dust collecting means through (see the chain line in FIG. 1).
[0018]
According to the dust removing apparatus 10 of the present embodiment as described above, the gas 12 continuously ejected from the nozzle 22 is intermittently shielded by the inner peripheral surface 41A of the cylindrical body 41 which is a shielding member. Can be reliably sprayed intermittently or pulsatably toward the surface of the substrate 11, and a better dust removal effect can be obtained as compared with the prior art.
In addition, since the slit-shaped nozzle 22 is arranged orthogonally to the moving direction of the substrate 11, the dust removing apparatus 10 allows the surface of the substrate 11 to be passed in one stroke by passing the substrate 11 directly below the ejection unit 20. The entire area can be removed, and the production of the substrate 11 can be speeded up.
[0019]
Furthermore, since the injection means 20 injects the gas 12 obliquely from the nozzle 22 to the surface of the substrate 11, the dust 13 attached to the surface of the substrate 11 is easily separated from the substrate 11, thereby a remarkable dust removal effect. Is obtained.
Further, since the blocking means 40 has a rotatable cylindrical body 41 and a large number of through holes 42, the diameter, rotational direction, rotational speed of the cylindrical body 41, and the shape, size, number, and number of the through holes 42, By appropriately selecting the formation form and the like, the period of the gas 12 injected intermittently or pulsatically can be arbitrarily set.
[0020]
In particular, since each through hole 42 is formed in a substantially spiral shape at a predetermined interval, the gas 12 is intermittently ejected sequentially along the movement width direction of the substrate 11 as the cylindrical body 41 rotates. The gas 12 can be reliably injected over the entire surface of the substrate 11.
And since each through-hole 42 is formed in the substantially bowl shape, the interruption | blocking means 40 does not inhibit the flow of the gas 12 injected diagonally with respect to the surface of the board | substrate 11 from the nozzle 22, and has a dust removal effect. It can be further improved.
[0021]
FIG. 4 shows a second embodiment according to the present invention, and FIG. 5 shows a third embodiment according to the present invention.
In each of the embodiments described below, the members already described in FIGS. 1 to 3 are denoted by the same reference numerals in the drawings, and the description thereof is simplified or omitted.
[0022]
The dust removing apparatus 10A of the second embodiment shown in FIG. 4 is for removing dust from the film 11A that is the object to be removed, and the film 11A passes directly below the spraying means 20 by the moving means 30A. . The moving means 30 </ b> A has a pair of feed rollers 33 and 33 so that the film 11 </ b> A sent out from the first drum 31 is wound around the second drum 32.
According to such a dust removing device 10A, since it has basically the same configuration as the dust removing device 10 of the first embodiment described above, the same effect as the dust removing device 10 of the first embodiment described above is obtained. It is done.
[0023]
On the other hand, the dust removing apparatus 10B of the third embodiment shown in FIG. 5 is for removing dust to be removed 11B having irregularities formed on the surface.
The blocking means 40 of the dust removing device 10B is provided so that the tip of the brush 41C provided on the outer peripheral surface 41B of the cylindrical body 41 is in contact with the surface of the dust removal object 11B. The brush 41C is planted in a spiral protrusion 41D formed so as not to block each through hole 42.
And the direction of the nozzle 22 is suitably selected so that the gas 12 injected from the through-hole 42 may pass smoothly between the brushes 41C.
[0024]
According to such a dust removing device 10B, since it has basically the same configuration as the dust removing device 10 of the first embodiment and the dust removing device 10A of the second embodiment, the first embodiment described above. The same effects as those of the dust removing device 10 and the dust removing device 10A of the second embodiment are obtained.
On the other hand, according to the dust removing device 10B, the dust removal object 11B having irregularities formed on the surface can be reliably removed by the synergistic effect of the gas 12 intermittently or pulsatingly injected and the sliding contact of the brush 41C. .
[0025]
It should be noted that the present invention is not limited to the above-described embodiments, and improvements, modifications and the like within the scope that can achieve the present invention are included in the present invention.
For example, in the dust removing device 10 </ b> C shown in FIG. 6A, the rectangular tube member 21 of the ejection unit 20 is disposed between a pair of pulleys 60, and an endless belt 61 is stretched around each pulley 60. In this dust removing device 10C, a large number of slit-like through holes 62 are formed at predetermined intervals in the endless belt 61. By rotating each pulley 60, the inner periphery of the through hole 62 and the endless belt 61 is provided immediately before the nozzles 22. The surfaces pass alternately.
Even with such a dust removing device 10C, the same effects as those of the above-described embodiments can be obtained.
[0026]
In addition, in the dust removing device 10D shown in FIG. 6B, a blocking member 63 is provided around the square tube member 21 of the ejection unit 20 so as to be able to go around.
The shielding member 63 is a long member having a semicircular cross section, and is rotatable about an axis arranged parallel to the axis of the rectangular tube member 21.
In such a dust removing device 10 </ b> D, the shielding member 63 rotates around the axis intersecting the ejection direction of the gas 12 ejected from the nozzle 22 of the ejection unit 20, so that the gas 12 is blocked at a constant cycle.
Therefore, even with such a dust removing device 10 </ b> C, the gas 12 is intermittently or pulsatilely injected to the substrate 11, and thus the same effects as those of the above-described embodiments can be obtained.
[0027]
Further, in the dust removing apparatus 10E shown in FIG. 7, the rectangular tube member 21 of the ejection unit 20 and the cylindrical body 41 of the shielding unit 40 are provided along the moving direction of each substrate 11 (see arrow A in the figure). And this dust removal apparatus 10E is provided so that the square cylinder member 21 and the cylindrical body 41 can reciprocate in the direction orthogonal to the moving direction of each board | substrate 11 (refer arrow C in the figure), and the board | substrate 11 and injection | pouring The means 20 is relatively movable.
In such a dust removal apparatus 10E, the same effects as those of the above-described embodiments can be obtained, and dust attached to the surface of the substrate 11 rises in a direction perpendicular to the moving direction of the substrate 11, so that the dust is transferred to the substrate. 11 is less likely to reattach to the surface.
[0028]
Further, as the blocking means, for example, an outer cylinder capable of coaxially accommodating a cylindrical body may be provided, and a slit may be provided along the circumferential surface axial direction of the outer cylinder.
According to this, there is no possibility that the gas shielded by the inner peripheral surface of the cylindrical body leaks from the adjacent through hole toward the dust removal object, and the intermittentness of the injected gas can be improved.
In addition, the materials, shapes, dimensions, forms, etc. of dust removal objects, gas, dust, spraying means, nozzles, moving means, shielding means, cylindrical bodies, shielding members, through-holes, etc., exemplified in the respective embodiments and modifications described above, The number, location, etc. are arbitrary as long as the present invention can be achieved, and are not limited.
[0029]
【The invention's effect】
According to the present invention , the gas injected from the through hole can be intermittently or pulsatically injected onto the surface of the dust removal object without reducing the flow velocity, the flow pressure, the flow rate, etc. Improves the dust removal effect.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing a first embodiment of the present invention.
FIG. 2 is a side view showing shielding means.
FIG. 3 is a cross-sectional view showing the operation of the first embodiment.
FIG. 4 is a schematic perspective view showing a second embodiment of the present invention.
FIG. 5 is a sectional view showing a third embodiment of the present invention.
FIG. 6 is a schematic diagram showing a modification of the present invention.
FIG. 7 is a schematic perspective view showing a modification of the present invention.
FIG. 8 is a schematic perspective view showing a conventional dust removing device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Dust removal apparatus 11 Liquid crystal substrate which is a to-be-dusted object 12 Gas 13 Dust 20 Injecting means 22 Nozzle 30 Moving means 40 Shielding means 41 Cylindrical body 41A Inner peripheral surface which is a shielding member 42 Through-hole A Moving direction B Injecting direction

Claims (3)

Injecting means for continuously injecting gas toward the surface of the dust removal object, moving means for relatively moving the dust removal object and the injection means along the surface direction of the dust removal object, and the gas A shielding means having a shielding member capable of shielding, wherein the shielding member is provided so as to be able to circulate around the ejection means about a direction intersecting the gas ejection direction as an axis. In the dust removing device for removing dust adhering to the surface of the object to be removed,
The spraying means has a slit-like nozzle extending in a direction intersecting with the relative movement direction of the spraying means and the dust removal object,
The shielding means has a cylindrical body that can accommodate the nozzle, and a through-hole formed in a peripheral surface of the cylindrical body, and the cylindrical body is rotatable about an axis,
The dust removing apparatus, wherein the through hole is formed in a substantially bowl shape that expands from an inner peripheral surface of the cylindrical body toward an outer peripheral surface . 2. The dust removing apparatus according to claim 1 , wherein the ejecting unit is provided such that a sandwich angle between the ejecting direction and a moving direction of the dust-deposited object with respect to the ejecting unit is an acute angle. The through hole is dust removing system according to claim 1 or 2, characterized in that it is formed in a large number at predetermined intervals in a substantially spiral shape.

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