JPH09232474A - Resin sealing construction for bare chip ic on fpc and its manufacture - Google Patents

Resin sealing construction for bare chip ic on fpc and its manufacture

Info

Publication number
JPH09232474A
JPH09232474A JP3977496A JP3977496A JPH09232474A JP H09232474 A JPH09232474 A JP H09232474A JP 3977496 A JP3977496 A JP 3977496A JP 3977496 A JP3977496 A JP 3977496A JP H09232474 A JPH09232474 A JP H09232474A
Authority
JP
Japan
Prior art keywords
bare chip
fpc
resin
groove structure
bubbles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3977496A
Other languages
Japanese (ja)
Other versions
JP3129960B2 (en
Inventor
Isao Kajima
功夫 梶間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP08039774A priority Critical patent/JP3129960B2/en
Publication of JPH09232474A publication Critical patent/JPH09232474A/en
Application granted granted Critical
Publication of JP3129960B2 publication Critical patent/JP3129960B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/83009Pre-treatment of the layer connector or the bonding area
    • H01L2224/83051Forming additional members, e.g. dam structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83385Shape, e.g. interlocking features
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To reduce the dispersion of penetration of resin flowing in between a bare chip IC and an FPC, to suppress the generation of an uneven flow, and to suppress the generation of bubbles on the occasion of applying sealing resin, by providing groove constructions on the FPC region below the bare chip IC mounted. SOLUTION: Groove constructions 10 are formed on an FPC surface 2, to prevent resin from flowing unevenly and from containing bubbles by surface tension, at positions in the lower region of the bare chip IC 7 of the board FPC 2 where the bare chip IC 7 is mounted. Concerning to these groove constructions 10, a plurality are formed in parallel to a direction of filling resin from a position of applying the resin, or radially or backwardly radially. As a result of this, concerning to resin flowing in between the bare chip IC 7 and the FPC 2, the amount of resin flowing in every groove is uniformalized, and filling can be performed without the generation of an uneven flow. Accordingly, it becomes possible to suppress the generation of bubbles on the occasion of applying the sealing resin.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、特に樹脂にて封止
することにより信頼性を得るモジュール、特にFPC上
のベアチップICの樹脂封止構造およびその製造方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a module which is highly reliable by sealing with a resin, and more particularly to a resin sealing structure for a bare chip IC on an FPC and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来のFPC上のベアチップICの樹脂
封止構造における封止樹脂の気泡防止対策は、まず樹脂
を塗布した際、気泡を発生させない方法として、実装さ
れたベアチップICとFPC(フレキシブル プリント
配線板)に対して、気泡の発生しにくい塗布位置及び
塗布条件(塗布スピード、塗布量、樹脂温度等)により
最適値を検討し、樹脂剤自体の粘性を改善して、流動性
の高いものを使用していた。しかし、これだけの対策で
は、完全に気泡の発生は防止することはできなかった。
2. Description of the Related Art A conventional method for preventing bubbles of a sealing resin in a resin sealing structure for a bare chip IC on an FPC is to prevent the bubbles from being generated when the resin is first applied. For printed wiring boards), the optimum value is examined according to the coating position and coating conditions (coating speed, coating amount, resin temperature, etc.) where bubbles are less likely to occur, and the viscosity of the resin agent itself is improved, resulting in high fluidity. I was using one. However, it was not possible to completely prevent the generation of air bubbles by such measures.

【0003】次の対策として、封止樹脂の脱泡工程が取
り入れられた。図6に従来のFPC上のベアチップIC
の封止樹脂における脱泡工程を示す。FPC等回路を構
成する基板にベアチップIC等半導体部品を実装し樹脂
を塗布した電子部品モジュール50を、その樹脂か硬化
する前にデシケータか完全に密閉された温度槽51に入
れ、槽に接続された真空ポンプ52を作動させて、脱泡
作業を行う。53はその時の排気を示す。
As a next countermeasure, a defoaming process of the sealing resin has been adopted. Fig. 6 shows a bare chip IC on a conventional FPC.
The defoaming process in the sealing resin of is shown. An electronic component module 50 in which a semiconductor component such as a bare chip IC is mounted on a substrate forming a circuit such as an FPC and a resin is applied is placed in a desiccator or a completely sealed temperature bath 51 before the resin is cured, and is connected to the bath. The vacuum pump 52 is operated to perform defoaming work. Reference numeral 53 indicates the exhaust gas at that time.

【0004】脱泡装置は、端的に言えば、完全密閉でき
る温度槽とそれに接続された真空ポンプにより構成さ
れ、真空ポンプを作動させることによって、温度槽内の
空気を排出するものである。この装置に入れることによ
って、樹脂が硬化していないので真空ポンプによる槽内
の空気の圧力の低下により、封止樹脂内にある気泡は樹
脂外ヘと排出される。さらに、槽内の温度を上げること
によって、脱泡の効率を向上させることかできるが、こ
のような手間のかかる脱泡工程を採用していた。
In short, the defoaming device is composed of a temperature chamber that can be completely sealed and a vacuum pump connected to it, and the air in the temperature chamber is discharged by operating the vacuum pump. Since the resin is not cured by putting it in this apparatus, the air pressure in the tank is reduced by the vacuum pump, and the bubbles in the sealing resin are discharged to the outside of the resin. Further, although the efficiency of defoaming can be improved by raising the temperature in the tank, such a troublesome defoaming step has been adopted.

【0005】FPC等回路を構成する基板にベアチップ
IC等半導体部品を実装し樹脂を塗布した電子部品モジ
ュール50について、図7を用いて説明する。図7
(a)は実装前の平面図であり、FPC(フレキシブル
プリント配線基板 サーキット)54にIC実装部の
ベアチップICとの接続リード(ILB、インナー リ
ード ボンド)55をベアチップICのバンプに対向す
るよう4方向に配置されている。図7(b)は実装前の
断面図である。FPCの基材であるポリイミドフィルム
56上の銅箔57をエッチングによりパターン形成した
後、レジスト剤58を印刷によりその上に形成し、硬化
させ作製する。
An electronic component module 50 in which a semiconductor component such as a bare chip IC is mounted on a substrate forming a circuit such as an FPC and a resin is applied will be described with reference to FIG. Figure 7
(A) is a plan view before mounting, in which a connecting lead (ILB, inner lead bond) 55 for connecting to a bare chip IC of an IC mounting portion 55 is faced to a bump of the bare chip IC on an FPC (flexible printed wiring circuit). Are arranged in the direction. FIG. 7B is a sectional view before mounting. A copper foil 57 on a polyimide film 56, which is a base material of the FPC, is patterned by etching, and then a resist agent 58 is formed thereon by printing, and is cured.

【0006】図7(c)は実装後の平面図であり、54
はFPC、55はFPCへのIC実装部のための接続リ
ード(ILB)であり、59はベアチップICである。
図7(d)は実装後の断面図である。FPCの基材であ
るポリイミドフィルム56上に銅箔57があり、レジス
ト剤58が印刷され、ベアチップIC59上のバンプ6
0は銅箔57と圧接され、電気的導通が図られている。
そして、ベアチップICとFPCとの空間には封止樹脂
剤61が充填されている。
FIG. 7 (c) is a plan view after mounting,
Is an FPC, 55 is a connection lead (ILB) for an IC mounting portion on the FPC, and 59 is a bare chip IC.
FIG. 7D is a sectional view after mounting. There is a copper foil 57 on a polyimide film 56 which is a base material of the FPC, a resist agent 58 is printed, and the bumps 6 on the bare chip IC 59.
0 is pressed against the copper foil 57 to establish electrical continuity.
The space between the bare chip IC and the FPC is filled with the sealing resin agent 61.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、従来の
FPC上のベアチップICの樹脂封止構造においては以
下に示すような問題点があった。
However, the conventional resin encapsulation structure of a bare chip IC on an FPC has the following problems.

【0008】回路構成されたFPC基板に実装されたべ
アチップICは、数十μm〜百数十μmの接続パンプを
介して、FPC基板とベアチップICとが電気的、機械
的に接合されている。従って、外力や環境条件により信
頼性に著しい影響を与えることになる。
In the bare chip IC mounted on the FPC board having a circuit structure, the FPC board and the bare chip IC are electrically and mechanically joined to each other through a connection pump of several tens μm to one hundred and several tens μm. Therefore, the reliability is significantly affected by external force and environmental conditions.

【0009】そのため、ベアチップICと基板の接続部
を保護するため、エポキシ樹脂等の樹脂剤がベアチップ
ICとFPCとの空間に塗布し硬化させることにより、
接続信頼性を確保するものである。しかし、その樹脂内
に気泡が入っている場合、諸条件によって、気泡の膨張
や収縮により封止樹脂にクラックが生じることがある。
また封止樹脂はベアチップICの下部にも注入してお
り、特にこの部分に発生した気泡は、膨張によりベアチ
ップICを上方に押し上げ、接続部に対して、剥離方向
の応力が働き断線に至る。概ね封止樹脂内に発生する気
泡はこの部分に集中していた。従来のFPCでは、実装
したベアチップICの下部には何もなくフラットな場合
でも、FPCとベアチップICの間に流入した樹脂は、
ベアチップICのバンプピッチやバンプ形状に影響を受
けて、浸透スピードにばらつきが生じる。このばらつき
が樹脂の流れを乱流となし、気泡を発生させる要因とな
っていた。
Therefore, in order to protect the connection portion between the bare chip IC and the substrate, a resin agent such as an epoxy resin is applied to the space between the bare chip IC and the FPC and cured,
It ensures connection reliability. However, when bubbles are contained in the resin, cracks may occur in the sealing resin due to expansion and contraction of the bubbles depending on various conditions.
Further, the sealing resin is also injected into the lower portion of the bare chip IC, and in particular, bubbles generated in this portion push up the bare chip IC upward due to expansion, and stress in the peeling direction acts on the connection portion, leading to disconnection. Bubbles generated in the sealing resin were mostly concentrated in this portion. In the conventional FPC, even if there is nothing below the mounted bare chip IC and it is flat, the resin flowing between the FPC and the bare chip IC is
The penetration speed varies depending on the bump pitch and bump shape of the bare chip IC. This variation has made the flow of resin a turbulent flow and has been a factor in generating bubbles.

【0010】次に従来例におけるFPCに実装したベア
チップICの樹脂封止工程における気泡の発生について
図8を用いて説明する。
Next, the generation of bubbles in the resin sealing process of the bare chip IC mounted on the FPC in the conventional example will be described with reference to FIG.

【0011】図8(a)はFPC表面が平滑であり、且
つベアチップICにバンプが無いと仮想した(非現実
の)場合の樹脂封止の流れ方を示すものである。ベアチ
ップIC59がある領域が点線で示されており、封止樹
脂剤61は樹脂塗布位置62から注入され、塗布した位
置から封止樹脂剤はベアチップICの周囲を伝っていく
ものと、ベアチップICとFPCの間に表面張力により
流れ込んでいくものとに分けることができる。そして、
封止樹脂剤の流れの進行波面63は多少の凹凸が発生す
るが、FPC表面が平滑で且つベアチップICにバンプ
が無い非現実の場合には、気泡の巻き込みは発生しな
い。55はFPCを示す。
FIG. 8A shows the flow of resin sealing when the FPC surface is smooth and the bare chip IC has no bumps (unrealistic). A region where the bare chip IC 59 is present is indicated by a dotted line, and the sealing resin agent 61 is injected from the resin application position 62, and the sealing resin agent propagates around the bare chip IC from the applied position. It can be divided into those that flow in due to surface tension during FPC. And
The traveling wave front 63 of the flow of the encapsulating resin agent has some irregularities, but in the unrealistic case where the FPC surface is smooth and the bare chip IC has no bumps, entrapment of bubbles does not occur. 55 shows FPC.

【0012】図8(b)は現実の場合の従来のFPC表
面とベアチップICとの間を封止樹脂剤が流れる様子を
示すものである。ベアチップIC59がある領域が点線
で示されており、封止樹脂剤61は樹脂塗布位置62か
ら注入され、ベアチップIC59のバンプ64の影響を
受け、封止樹脂剤の流れ(浸透)の進行波面63は凹凸
が激しくなる。55はFPCを示す。
FIG. 8B shows how the encapsulating resin agent flows between the conventional FPC surface and the bare chip IC in the actual case. A region where the bare chip IC 59 is present is shown by a dotted line, and the encapsulating resin agent 61 is injected from the resin application position 62, is affected by the bump 64 of the bare chip IC 59, and is a traveling wave front 63 of the flow (permeation) of the encapsulating resin agent. Becomes more uneven. 55 shows FPC.

【0013】図8(c)は図8(b)の更に時間が経過
した時の封止樹脂剤の流れを示す。55はFPC、61
は封止樹脂剤、62は樹脂塗布位置を示し、ベアチップ
IC59のバンプ64の影響を受け、封止樹脂剤の流れ
の進行波面63は凹凸が激しくなり、ある程度の距離を
進むと封止樹脂剤の流れは乱流となり、終には気泡65
をはらむこととなる。また、ベアチップICの接続バン
プは各メーカーによって形や大きさピッチはまちまちで
規格化されていないので、気泡の発生確率は一定しな
い。図8(d)は図8(c)のA−A′断面を示すもの
である。
FIG. 8C shows the flow of the encapsulating resin agent when the time shown in FIG. 8B further elapses. 55 is FPC, 61
Is a sealing resin agent, and 62 is a resin coating position. The bumps 64 of the bare chip IC 59 affect the traveling wave front 63 of the flow of the sealing resin agent, and the unevenness becomes severe. Flow becomes turbulent and eventually bubbles 65
Will be involved. Also, since the connection bumps of the bare chip IC are not standardized in shape and size pitch by each manufacturer, the probability of bubble generation is not constant. FIG. 8D shows a cross section taken along the line AA ′ of FIG.

【0014】従来の技術では、封止樹脂内に発生した気
泡は、真空ポンプによる強制的な気泡の排出を行う脱泡
工程を組み込んでおり、作業項数としても大きく、生産
効率に大きく影響していた。さらに、この脱泡工程を通
しても完全に気泡を除去できない製品もあり、顕微鏡に
よる外観検査によって、気泡を内包する電子部品モジュ
ールを選別し除去していた。
In the prior art, the bubbles generated in the sealing resin incorporate a defoaming process in which the bubbles are forcibly discharged by a vacuum pump, and the number of work items is large, which greatly affects the production efficiency. Was there. Further, there are some products in which the air bubbles cannot be completely removed even through this defoaming step, and the electronic component modules containing the air bubbles are selected and removed by a visual inspection with a microscope.

【0015】[0015]

【課題を解決するための手段】上記の課題を解決するた
めに本発明では、発生した封止樹脂内の気泡を除去する
のではなくて、樹脂を塗布する際、気泡を発生させない
機構を特徴としており、ベアチップICを実装する基板
(FPC)のベアチップICの下部領域の位置に、表面
張力により流れ込む樹脂が乱流となって気泡をはらむこ
とを防止するために、FPC表面に溝構造を形成するこ
とにある。本発明による溝構造は、樹脂を塗布する位置
から充填する方向に平行あるいは放射状あるいは逆放射
状に複数個の構を作製する。これにより、ベアチップI
CとFPCの間に流れ込む樹脂は本発明による溝構造の
ため、溝ごとに流れる樹脂量が均一化され、乱流をおこ
さず充填することができる。本発明の溝構造の形状は、
実装するベアチップICのバンプ形状や、バンプピッチ
等条件を考慮して、最も適した構造(平行型、放射状
型、逆放射状型、組合せ型など)が選択される。
In order to solve the above-mentioned problems, the present invention is characterized by a mechanism that does not generate bubbles when the resin is applied, rather than removing the generated bubbles in the sealing resin. Therefore, a groove structure is formed on the surface of the FPC in order to prevent the resin flowing due to the surface tension from causing a turbulent flow and enclosing bubbles at the position of the lower area of the bare chip IC of the substrate (FPC) on which the bare chip IC is mounted. To do. In the groove structure according to the present invention, a plurality of structures are formed in parallel, radially or inversely radially from the position where the resin is applied, in the filling direction. As a result, the bare chip I
The resin flowing between C and FPC has a groove structure according to the present invention, so that the amount of resin flowing in each groove is uniform, and the resin can be filled without causing turbulent flow. The shape of the groove structure of the present invention is
The most suitable structure (parallel type, radial type, reverse radial type, combination type, etc.) is selected in consideration of the bump shape of the bare chip IC to be mounted and conditions such as bump pitch.

【0016】本発明の請求項1記載のFPC上のベアチ
ップICの樹脂封止構造は、FPC上にベアチップIC
を実装し、実装されるベアチップICの下部に当たるF
PC領域上に溝構造を設けたことを特徴とするものであ
る。
According to the first aspect of the present invention, the resin sealing structure of the bare chip IC on the FPC has a bare chip IC on the FPC.
F, which is the bottom of the bare chip IC
A feature is that a groove structure is provided on the PC area.

【0017】また、本発明の請求項2記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造が有機材
料により構成されることを特徴とするものである。
The resin sealing structure for a bare chip IC on an FPC according to a second aspect of the present invention is characterized in that the groove structure is made of an organic material.

【0018】また、本発明の請求項3記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造が金属材
料により構成されることを特徴とするものである。
Further, a resin sealing structure of a bare chip IC on an FPC according to a third aspect of the present invention is characterized in that the groove structure is made of a metal material.

【0019】また、本発明の請求項4記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造がFPC
の構成材料を少なくとも1つ以上含む材料より構成され
ることを特徴とするものである。
According to a fourth aspect of the present invention, in the resin sealing structure for a bare chip IC on an FPC, the groove structure is an FPC.
It is characterized by being composed of a material containing at least one or more of the constituent materials.

【0020】さらに、本発明の請求項5記載のFPC上
のベアチップICの樹脂封止の製造方法は、FPC上に
ベアチップICを実装し、実装されるベアチップICの
下部に当たるFPC領域上に溝構造を設けることにより
樹脂注入時の乱流を少なくしたことを特徴とするもので
ある。
Further, according to a fifth aspect of the present invention, in a method of manufacturing a resin encapsulation of a bare chip IC on an FPC, the bare chip IC is mounted on the FPC, and a groove structure is formed on an FPC region corresponding to a lower portion of the bare chip IC to be mounted. Is provided to reduce turbulent flow at the time of resin injection.

【0021】本発明による溝構造は、ベアチップICと
FPCの間を流れ込む樹脂の浸透ばらつきを緩和し、乱
流の発生を抑制することができ、気泡をはらむことを防
止することが可能となる。つまり、樹脂塗布位置から樹
脂が流れる方向に対して平行あるいは放射状あるいは逆
放射状に本発明による溝構造をベアチップICの接続バ
ンプ数個に対し1筋の溝を構成する。溝の設置数は多い
程乱流の発生を抑えることができるが、多すぎると表面
張力効果が減衰し、逆に封止樹脂剤が流れ込まなくなる
ので設置数を調整する必要がある。封止樹脂剤が塗布さ
れると、ベアチップICの接続バンプを介し樹脂はベア
チップICの下部ヘと流れ込む。さらに封止樹脂剤は本
発明の溝構造に沿って流れ込むため、バンプが存在して
浸透のばらつきが生じる場合であっても封止樹脂剤の流
れの乱流を少なくして、気泡を包含しない充填が行われ
ることになる。
The groove structure according to the present invention can alleviate the variation in permeation of the resin flowing between the bare chip IC and the FPC, suppress the generation of turbulent flow, and prevent the inclusion of bubbles. That is, the groove structure according to the present invention is parallel to the direction of the resin flowing from the resin application position, or has a groove structure according to the present invention to form one groove for several connecting bumps of the bare chip IC. The larger the number of grooves installed, the more the generation of turbulence can be suppressed. However, if the number of grooves is too large, the surface tension effect is attenuated, and conversely the sealing resin agent does not flow in, so it is necessary to adjust the number installed. When the sealing resin agent is applied, the resin flows into the lower portion of the bare chip IC via the connection bumps of the bare chip IC. Further, since the encapsulating resin agent flows along the groove structure of the present invention, even when bumps are present and the dispersion of penetration occurs, the turbulent flow of the encapsulating resin agent is reduced and bubbles are not included. Filling will be performed.

【0022】[0022]

【発明の実施の形態】図1乃至図5は本発明の一実施の
形態に関する図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIGS. 1 to 5 are diagrams relating to an embodiment of the present invention.

【0023】図1は本発明の一実施の形態よりなるFP
C上のベアチップICの樹脂封止構造およびその製造方
法において有機材料であるレジスト剤を溝構造の材料に
用いた場合の説明図であり、(a)平面図、(b)断面
図、(c)封止樹脂剤を充填した時の断面図を示す。
FIG. 1 shows an FP according to an embodiment of the present invention.
FIG. 6A is an explanatory view when a resist agent which is an organic material is used as a material of a groove structure in a resin sealing structure of a bare chip IC on C and a manufacturing method thereof, FIG. ) A cross-sectional view when filled with a sealing resin agent is shown.

【0024】図1(a)の平面図において、ベアチップ
IC7がFPC2に実装される接続リード(ILB)1
がベアチップICのバンプに対向するよう4方向に配置
され、本発明による溝構造10がFPC上に形成されて
いる。3は樹脂塗布位置を示す。図1(b)の断面図に
おいて、FPCの基材であるポリイミドフィルム(厚さ
約25μm)4上に銅箔回路パターン(厚さ約18μ
m)5があり、レジスト剤(材料はポリイミド系イン
ク、厚さ約5μm程度)6が印刷されている。そして、
FPC2はポリイミドフィルム4及び銅箔回路パターン
5及びレジスト剤6により構成されている。
In the plan view of FIG. 1A, the connection lead (ILB) 1 on which the bare chip IC 7 is mounted on the FPC 2 is shown.
Are arranged in four directions so as to face the bumps of the bare chip IC, and the groove structure 10 according to the present invention is formed on the FPC. Reference numeral 3 indicates a resin application position. In the cross-sectional view of FIG. 1B, a copper foil circuit pattern (thickness: about 18 μm) is formed on a polyimide film (thickness: about 25 μm) 4 which is a base material of the FPC.
m) 5 and a resist agent (made of a polyimide-based ink and having a thickness of about 5 μm) 6 is printed. And
The FPC 2 is composed of a polyimide film 4, a copper foil circuit pattern 5 and a resist agent 6.

【0025】図1(c)はFPC上にベアチップICを
実装した樹脂封止構造の断面図である。
FIG. 1C is a sectional view of a resin sealing structure in which a bare chip IC is mounted on an FPC.

【0026】FPCの基材であるポリイミドフィルム4
上に銅箔回路パターン5があり、レジスト剤6が印刷さ
れ、ベアチップIC7上の接続の金バンプ(大きさ約数
十μm〜百数十μm)8は銅箔回路パターン5と圧接さ
れ、電気的導通が図られている。そして、実装されるベ
アチップICの下部に当たるFPC領域上に本発明の溝
構造10が設けられており、ベアチップICとFPCと
の空間には封止樹脂剤9が充填されている。封止樹脂剤
9として、粘度の低い(約3ポイズ〜約50ポイズ程度
のもの)熱硬化型エポキシ樹脂材が用いられた。レジス
トによる溝構造の作製方法は、FPCの基材であるポリ
イミドフィルム4上の銅箔回路パターン5をエッチング
によりパターン形成した後、レジスト6を印刷により平
面図のように形成し硬化させ作製する。レジスト印刷の
際、同時に本発明の溝構造も作製することが可能で、加
工工程の追加や専用装置は不要である。3の位置から封
止樹脂を塗布すれば、溝構造10により樹脂が均一にベ
アチップICの周囲及び下部に充填され、気泡の発生を
抑制することができる。
Polyimide film 4 which is the base material of FPC
There is a copper foil circuit pattern 5 on top, a resist agent 6 is printed, and gold bumps (size of about several tens of μm to hundreds of tens of μm) 8 on the bare chip IC 7 are pressure-contacted with the copper foil circuit pattern 5 and are electrically connected. The electrical continuity is achieved. The groove structure 10 of the present invention is provided on the FPC region corresponding to the lower part of the bare chip IC to be mounted, and the space between the bare chip IC and the FPC is filled with the sealing resin agent 9. As the encapsulating resin agent 9, a thermosetting epoxy resin material having low viscosity (about 3 poise to about 50 poise) was used. In the method of manufacturing the groove structure using a resist, the copper foil circuit pattern 5 on the polyimide film 4 which is the base material of the FPC is patterned by etching, and then the resist 6 is formed by printing as shown in the plan view and cured. At the time of resist printing, the groove structure of the present invention can be produced at the same time, and an additional processing step or a dedicated device is unnecessary. If the sealing resin is applied from the position 3, the groove structure 10 uniformly fills the resin around and under the bare chip IC, thereby suppressing the generation of bubbles.

【0027】レジスト剤の印刷により本発明の溝構造1
0を同時に形成する場合、1回の印刷では厚さが厚さ約
5μm程度であるため、必要に応じて数回の重ね印刷が
行われ、溝構造10の厚さは約5μm〜約100μm程
度となる。また、ベアチップIC7の大きさは約5mm
角〜30mm角程度であり、接続の金バンプの配置ピッ
チは約100μm〜約500μm程度であるため、本発
明の溝構造10の大きさの幅は約20μm〜約500μ
m程度、長さは約1mm〜約 5mm程度、高さは約1
0μm〜約100μm程度、配置のピッチは約70μm
〜約3mmμm程度が用いられる。
Groove structure 1 of the present invention by printing a resist agent
When 0 is formed at the same time, the thickness of one printing is about 5 μm, so several times of overlapping printing is performed, and the thickness of the groove structure 10 is about 5 μm to about 100 μm. Becomes Moreover, the size of the bare chip IC 7 is about 5 mm.
Since the pitch is about 30 mm to 30 mm, and the arrangement pitch of the gold bumps for connection is about 100 μm to about 500 μm, the width of the size of the groove structure 10 of the present invention is about 20 μm to about 500 μm.
m, length about 1 mm to about 5 mm, height about 1
0 μm to about 100 μm, pitch of arrangement is about 70 μm
˜about 3 mm μm is used.

【0028】図2は本発明の一実施の形態よりなるFP
C上のベアチップICの樹脂封止構造およびその製造方
法においてにおいて金属材料である銅箔回路パターンを
溝構造の材料に用いた場合の説明図であり、(a)平面
図、(b)断面図、(c)封止樹脂剤を充填した時の断
面図を示す。
FIG. 2 shows an FP according to an embodiment of the present invention.
It is explanatory drawing at the time of using the copper foil circuit pattern which is a metal material as the material of a groove | channel structure in the resin sealing structure of the bare chip IC on C, and its manufacturing method, (a) top view, (b) sectional drawing. , (C) are cross-sectional views when filled with a sealing resin agent.

【0029】図2に本発明による溝構造をFPC内の回
路パターンを構成する金属材料である銅箔パターンによ
って作製した一実施の形態よりなる場合について説明す
る。本発明による溝構造が金属材料である銅箔パターン
で作製されていること以外は図1に示した一実施の形態
よりなる場合とほぼ同じである。
FIG. 2 illustrates a case where the groove structure according to the present invention is made of a copper foil pattern, which is a metal material forming a circuit pattern in an FPC, according to an embodiment. It is almost the same as that of the embodiment shown in FIG. 1 except that the groove structure according to the present invention is made of a copper foil pattern which is a metal material.

【0030】図2(a)の平面図において、ベアチップ
IC7がFPC2に実装される接続リード(ILB)1
がベアチップICのバンプに対向するよう4方向に配置
され、実装されるベアチップICの下部に当たるFPC
領域上に本発明による溝構造11がFPC2上に形成さ
れている。3は樹脂塗布位置を示す。図2(b)の断面
図において、FPCの基材であるポリイミドフィルム
(厚さ約25μm)4上に銅箔回路パターン(厚さ約1
8μm)5があり、レジスト剤(材料はポリイミド材、
厚さ約5μm程度)6が印刷されている。そして、FP
C2はポリイミドフィルム4及び銅箔回路パターン5及
びレジスト剤6により構成されている。
In the plan view of FIG. 2A, the connection lead (ILB) 1 on which the bare chip IC 7 is mounted on the FPC 2 is shown.
Are arranged in four directions so as to face the bumps of the bare chip IC, and the FPC corresponding to the bottom of the mounted bare chip IC
A groove structure 11 according to the present invention is formed on the region on the FPC 2. Reference numeral 3 indicates a resin application position. In the cross-sectional view of FIG. 2B, a copper foil circuit pattern (thickness: about 1 μm) is formed on a polyimide film (thickness: about 25 μm) 4 which is a base material of the FPC.
8 μm) 5 and resist agent (material is polyimide material,
6 is printed. And FP
C2 is composed of a polyimide film 4, a copper foil circuit pattern 5 and a resist agent 6.

【0031】図2(c)はFPC上にベアチップICを
実装した樹脂封止構造の断面図である。FPCの基材で
あるポリイミドフィルム4上に銅箔回路パターン5があ
り、レジスト剤6が印刷され、ベアチップIC7上の接
続金バンプ(大きさ約数十μm〜百数十μm)8は銅箔
回路パターン5と圧接され、電気的導通が図られてい
る。そして、実装されるベアチップICの下部に当たる
FPC領域上に本発明の溝構造11が設けられており、
ベアチップICとFPCとの空間には封止樹脂剤9が充
填されている。封止樹脂剤9として、粘度の低い(約3
ポイズ〜約50ポイズ程度のもの)熱硬化型エポキシ樹
脂材が用いられた。
FIG. 2C is a sectional view of a resin sealing structure in which a bare chip IC is mounted on an FPC. There is a copper foil circuit pattern 5 on a polyimide film 4 which is a base material of an FPC, a resist agent 6 is printed, and a connection gold bump (size of about several tens μm to hundreds of tens μm) 8 on a bare chip IC 7 is a copper foil. The circuit pattern 5 is pressed into contact with the circuit pattern 5 for electrical conduction. Then, the groove structure 11 of the present invention is provided on the FPC region corresponding to the lower portion of the bare chip IC to be mounted,
The space between the bare chip IC and the FPC is filled with the sealing resin agent 9. The sealing resin agent 9 has a low viscosity (about 3
A thermosetting epoxy resin material was used.

【0032】銅箔パターンによる溝構造の作製方法は、
FPCの基材であるポリイミドフィルム4上の銅箔の回
路パターン5をエッチング加工により回路形成する際、
実装されるベアチップICの下部に当たるFPC領域上
に本発明による溝構造11も作製する。回路形成の時、
同時に溝構造も形成でき、工程の追加や、専用装置は不
要である。封止樹脂の流入は実施例1と同様である。こ
の銅箔パターンによる溝構造の場合、銅箔パターンの厚
さは約18μm程度であり、レジストによる溝構造の場
合に比較して、厚さの点では優れている。3の位置から
封止樹脂を塗布すれば、溝構造11により樹脂が均一に
ベアチップICの周囲及び下部に充填され、気泡の発生
を抑制することができる。
A method for producing a groove structure using a copper foil pattern is as follows.
When the circuit pattern 5 of the copper foil on the polyimide film 4 which is the base material of the FPC is formed by etching,
The groove structure 11 according to the present invention is also formed on the FPC region corresponding to the lower part of the bare chip IC to be mounted. At the time of circuit formation,
At the same time, a groove structure can be formed, and no additional process or dedicated device is required. The inflow of the sealing resin is the same as in the first embodiment. In the case of the groove structure of the copper foil pattern, the thickness of the copper foil pattern is about 18 μm, which is superior in thickness to the groove structure of the resist. If the sealing resin is applied from the position 3, the resin can be uniformly filled in the periphery and the lower portion of the bare chip IC by the groove structure 11, and the generation of bubbles can be suppressed.

【0033】図3は本発明の一実施の形態よりなるFP
C上のベアチップICの樹脂封止構造およびその製造方
法においてFPCの構成材料を少なくとも1つ以上含む
材料を溝構造に用いた場合の説明図であり、(a)平面
図、(b)断面図、(c)封止樹脂剤を充填した時の断
面図を示す。
FIG. 3 shows an FP according to an embodiment of the present invention.
FIG. 4A is an explanatory diagram of a case where a material including at least one constituent material of FPC is used for a groove structure in a resin sealing structure of a bare chip IC on C and a manufacturing method thereof, FIG. , (C) are cross-sectional views when filled with a sealing resin agent.

【0034】本発明の溝構造がFPCの構成材料を少な
くとも1つ以上含む材料より構成されることを特徴とす
る以外は図1に示された一実施の形態よりなる場合と同
じである。この本発明は図2に示された一実施の形態よ
りなる場合に引き続いて、図1に示された一実施の形態
よりなる場合を続けて行うことにより作製される。
The groove structure of the present invention is the same as that of the embodiment shown in FIG. 1 except that the groove structure is made of a material containing at least one constituent material of FPC. The present invention is manufactured by performing the case of the embodiment shown in FIG. 2 and then the case of the embodiment shown in FIG.

【0035】図3(a)の平面図において、ベアチップ
IC7がFPC2に実装される接続リード(ILB)1
がベアチップICのバンプに対向するよう4方向に配置
され、実装されるベアチップICの下部に当たるFPC
領域上に本発明による溝構造12がFPC2上に形成さ
れている。そして、この本発明による溝構造12はFP
Cの構成材料の1つである銅箔パターンの層とレジスト
剤との積層構造となっている。3は樹脂塗布位置を示
す。図3(b)の断面図において、FPCの基材である
ポリイミドフィルム(厚さ約25μm)4上に銅箔回路
パターン(厚さ約18μm)5があり、レジスト剤(材
料はポリイミド材、厚さ約5μm程度)6が印刷されて
いる。そして、FPC2はポリイミドフィルム4及び銅
箔回路パターン5及びレジスト剤6により構成されてい
る。
In the plan view of FIG. 3A, the connection lead (ILB) 1 on which the bare chip IC 7 is mounted on the FPC 2 is shown.
Are arranged in four directions so as to face the bumps of the bare chip IC, and the FPC corresponding to the bottom of the mounted bare chip IC
The groove structure 12 according to the present invention is formed on the FPC 2 on the region. The groove structure 12 according to the present invention is made of FP.
It has a laminated structure of a layer of a copper foil pattern which is one of the constituent materials of C and a resist agent. Reference numeral 3 indicates a resin application position. In the cross-sectional view of FIG. 3B, there is a copper foil circuit pattern (thickness: about 18 μm) 5 on a polyimide film (thickness: about 25 μm) 4 which is a base material of an FPC, and a resist agent (material is a polyimide material, thickness: 6 is printed. The FPC 2 is composed of the polyimide film 4, the copper foil circuit pattern 5 and the resist agent 6.

【0036】図3(c)はFPC上にベアチップICを
実装した樹脂封止構造の断面図である。FPCの基材で
あるポリイミドフィルム4上に銅箔回路パターン5があ
り、レジスト剤6が印刷され、ベアチップIC7上の接
続金バンプ(大きさ約数十μm〜百数十μm)8は銅箔
回路パターン5と圧接され、電気的導通が図られてい
る。そして、実装されるベアチップICの下部に当たる
FPC領域上に本発明の溝構造12が設けられており、
ベアチップICとFPCとの空間には封止樹脂剤9が充
填されている。封止樹脂剤9として、粘度の低い(約3
ポイズ〜約50ポイズ程度のもの)熱硬化型エポキシ樹
脂材が用いられた。
FIG. 3C is a sectional view of a resin sealing structure in which a bare chip IC is mounted on an FPC. There is a copper foil circuit pattern 5 on a polyimide film 4 which is a base material of an FPC, a resist agent 6 is printed, and a connection gold bump (size of about several tens μm to hundreds of tens μm) 8 on a bare chip IC 7 is a copper foil. The circuit pattern 5 is pressed into contact with the circuit pattern 5 for electrical conduction. Further, the groove structure 12 of the present invention is provided on the FPC region corresponding to the lower portion of the bare chip IC to be mounted,
The space between the bare chip IC and the FPC is filled with the sealing resin agent 9. The sealing resin agent 9 has a low viscosity (about 3
A thermosetting epoxy resin material was used.

【0037】銅箔パターンによる溝構造の作製方法は、
FPCの基材であるポリイミドフィルム4上の銅箔の回
路パターン5をエッチング加工により回路形成する際、
実装されるベアチップICの下部に当たるFPC領域上
に本発明による溝構造12も作製する。回路形成の時、
同時に溝構造も形成でき、工程の追加や、専用装置は不
要である。さらに、その上のレジストによる溝構造の作
製方法は、銅箔パターンによる溝構造を形成した後、レ
ジスト6を印刷により平面図のように形成し硬化させ作
製する。レジスト印刷の際、同時に本発明の溝構造も作
製することが可能で、加工工程の追加や専用装置は不要
である。
A method for producing a groove structure using a copper foil pattern is as follows.
When the circuit pattern 5 of the copper foil on the polyimide film 4 which is the base material of the FPC is formed by etching,
The groove structure 12 according to the present invention is also formed on the FPC region corresponding to the lower part of the bare chip IC to be mounted. At the time of circuit formation,
At the same time, a groove structure can be formed, and no additional process or dedicated device is required. Further, in the method of manufacturing the groove structure by the resist thereon, after forming the groove structure by the copper foil pattern, the resist 6 is formed by printing as shown in the plan view and cured to manufacture. At the time of resist printing, the groove structure of the present invention can be produced at the same time, and an additional processing step or a dedicated device is unnecessary.

【0038】封止樹脂の流入は実施例1と同様である。
この銅箔パターンおよびレジスト剤によるに2層構造に
よる溝構造の場合、銅箔パターンの厚さは約18μm程
度であり、さらにレジスト剤による厚さ約5μmが加算
され、厚さの点では更に優れている。3の位置から封止
樹脂を塗布すれば、溝構造12により樹脂が均一にベア
チップICの周囲及び下部に充填され、気泡の発生を抑
制することができる。
The inflow of the sealing resin is the same as in the first embodiment.
In the case of a groove structure having a two-layer structure of the copper foil pattern and the resist agent, the thickness of the copper foil pattern is about 18 μm, and the thickness of the resist agent is about 5 μm, which is more excellent in terms of thickness. ing. If the sealing resin is applied from the position 3, the groove structure 12 uniformly fills the resin around and under the bare chip IC, thereby suppressing the generation of bubbles.

【0039】図4は本発明の一実施の形態よりなるFP
C上のベアチップICの樹脂封止構造およびその製造方
法において幾つかの溝構造の形を説明図であり、(a)
放射状型の溝構造、(b)平行状型の溝構造、(c)逆
平行状型の溝構造、(d)放射状型であり、且つ溝構造
のパターンを太く溝構造、(e)放射状型であり、且つ
溝構造を高密度に配置した溝構造、(f)幾つかのパタ
ーンの組み合わせによる溝構造を示す。
FIG. 4 shows an FP according to an embodiment of the present invention.
FIG. 6A is a diagram illustrating the shapes of some groove structures in the resin sealing structure of the bare chip IC on C and the manufacturing method thereof,
Radial groove structure, (b) parallel groove structure, (c) anti-parallel groove structure, (d) radial groove structure with thick groove pattern, (e) radial groove And (f) a groove structure with a combination of several patterns.

【0040】図4(a)は樹脂塗布位置13から放射状
型の溝構造14を作製した場合である。図4(b)は樹
脂塗布位置13から平行状型の溝構造15を作製した場
合である。図4(c)は樹脂塗布位置13から逆平行状
型の溝構造16を作製した場合である。図4(d)は樹
脂塗布位置13から放射状型であり、且つ溝構造のパタ
ーンを太くした場合の溝構造17を作製した場合であ
り、封止樹脂剤の樹脂量を少なくすることができる。図
4(e)は樹脂塗布位置13から放射状型であり、且つ
溝構造を高密度にを作製した場合の溝構造18である。
使用樹脂剤の粘性や気泡の発生状況に応じて、ピッチを
設定する。図1〜図3に示した本発明の溝構造の配列ピ
ッチが約500μm〜約3mm程度が用いられるのに対
して、図4に示めす本発明の場合は約100μm〜約3
00μm程度の高密度ピッチが用いられる。図4(f)
は上記のパターンを組み合わせた場合のもの溝構造19
である。
FIG. 4A shows the case where the radial groove structure 14 is formed from the resin application position 13. FIG. 4B shows a case where the parallel groove structure 15 is formed from the resin application position 13. FIG. 4C shows a case where the antiparallel groove structure 16 is formed from the resin application position 13. FIG. 4D shows a case where the groove structure 17 is formed in a radial type from the resin application position 13 and the groove structure pattern is thick, and the resin amount of the sealing resin agent can be reduced. FIG. 4E shows a groove structure 18 which is of a radial type from the resin application position 13 and which has a high density groove structure.
The pitch is set according to the viscosity of the resin material used and the generation of bubbles. The arrangement pitch of the groove structure of the present invention shown in FIGS. 1 to 3 is about 500 μm to about 3 mm, whereas the arrangement pitch of the present invention shown in FIG. 4 is about 100 μm to about 3 mm.
A high density pitch of about 00 μm is used. FIG. 4 (f)
Is a combination of the above patterns Groove structure 19
It is.

【0041】ベアチップICのバンプの形には幾つかの
型があり、図5(a)はマッシュルーム型バンプ、図5
(b)ストレート型バンプであり、その他これらの変形
もあり、さらにバンプのベアチップIC上の配置はベア
チップICの回路の回路設計や放熱設計などの因子に基
づき設定されるものである。8はベアチップICであ
る。マッシュルーム型バンプの大きさ(頭の形状)は約
90μm×約120μm〜約120μm×約140μm
程度であり、ストレート型バンプの大きさは約70μm
×約90μm〜約100μm×約95μm程度である。
There are several types of bumps for bare chip ICs. FIG. 5A shows a mushroom type bump, and FIG.
(B) It is a straight type bump, and there are other variations, and the placement of the bump on the bare chip IC is set based on factors such as the circuit design of the circuit of the bare chip IC and the heat radiation design. Reference numeral 8 is a bare chip IC. The size (head shape) of the mushroom type bump is about 90 μm × about 120 μm to about 120 μm × about 140 μm
The size of the straight bump is about 70 μm.
× about 90 μm to about 100 μm × about 95 μm.

【0042】従って、ベアチップICの外周部にのみバ
ンプが配置されているとは限らない。ベアチップICの
ほぼ全面に格子状にバンプが配置される場合もあり、ベ
アチップICのほぼ全面に放射状にバンプが配置される
場合もある。そのため、図4(f)のように組み合わせ
パターンを用いることにより、封止樹脂剤に気泡が内包
されることを抑制することができる。また、溝構造の先
端20や終端21を円形とすることでより気泡の発生を
抑えることができる。
Therefore, the bumps are not always arranged only on the outer peripheral portion of the bare chip IC. In some cases, the bumps are arranged in a grid pattern on almost the entire surface of the bare chip IC, and in some cases, the bumps are arranged radially on the almost entire surface of the bare chip IC. Therefore, by using the combination pattern as shown in FIG. 4F, it is possible to suppress inclusion of bubbles in the sealing resin agent. Further, by making the tip 20 and the end 21 of the groove structure circular, it is possible to further suppress the generation of bubbles.

【0043】[0043]

【発明の効果】以上のように、本発明の請求項1によれ
ば、FPC上にベアチップICを実装し、該ベアチップ
ICを樹脂封止するFPC上のベアチップICの樹脂封
止構造において、実装されるベアチップICの下部に当
たるFPC領域上に溝構造を設けることにより、封止樹
脂剤に気泡を巻き込まない樹脂封止をすることができ
る。
As described above, according to claim 1 of the present invention, a bare chip IC is mounted on an FPC, and the bare chip IC is resin-sealed. By providing the groove structure on the FPC region corresponding to the lower portion of the bare chip IC to be formed, it is possible to perform resin sealing without entraining bubbles in the sealing resin agent.

【0044】また、本発明の請求項2記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造が有機材
料により構成されることにより、封止樹脂剤に気泡を巻
き込まない樹脂封止をすることができる。
Further, in the resin sealing structure for bare chip IC on FPC according to claim 2 of the present invention, the groove structure is made of an organic material so that the sealing resin agent does not entrap air bubbles. You can

【0045】また、本発明の請求項3記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造が金属材
料により構成されることにより、封止樹脂剤に気泡を巻
き込まない樹脂封止をすることができる。
Further, in the resin sealing structure for bare chip IC on FPC according to claim 3 of the present invention, the groove structure is made of a metal material so that the sealing resin agent does not entrap air bubbles. You can

【0046】また、本発明の請求項4記載のFPC上の
ベアチップICの樹脂封止構造は、前記溝構造がFPC
の構成材料を少なくとも1つ以上含む材料より構成され
ることにより、封止樹脂剤に気泡を巻き込まない樹脂封
止をすることができる。
According to a fourth aspect of the present invention, in the resin sealing structure for a bare chip IC on an FPC, the groove structure is an FPC.
By using a material containing at least one of the above constituent materials, it is possible to perform resin encapsulation without entraining bubbles in the encapsulating resin agent.

【0047】さらに、本発明の請求項5記載の樹脂封止
構造の製造方法によれば、FPC上にベアチップICを
実装し、該ベアチップICを樹脂封止するFPC上のベ
アチップICの樹脂封止する製造方法において、実装さ
れるベアチップICの下部に当たるFPC領域上に溝構
造を設けることにより樹脂注入時の乱流を少なくするF
PC上のベアチップICの樹脂封止の製造方法を提供す
ることができる。
Further, according to the method of manufacturing a resin-sealed structure according to claim 5 of the present invention, a bare chip IC is mounted on an FPC, and the bare chip IC is resin-sealed. In the manufacturing method described above, a turbulent flow at the time of resin injection is reduced by providing a groove structure on the FPC region corresponding to the bottom of the mounted bare chip IC.
It is possible to provide a method for manufacturing a resin-sealed bare chip IC on a PC.

【0048】また上記の本発明による効果を列記すれ
ば、 (1)封止樹脂を塗布する際、気泡の発生を抑制するこ
とができる。
Further, the effects of the present invention are listed as follows: (1) When applying the sealing resin, it is possible to suppress the generation of bubbles.

【0049】(2)ベアチップICのバンプ形状やパン
プビッチによる不均一な樹脂の流入を改善し、ベアチッ
プICの周囲及びベアチップICの下部に樹脂を確実に
封止することができる。
(2) It is possible to improve the uneven flow of resin due to the bump shape of the bare chip IC and the pump bitch, and reliably seal the resin around the bare chip IC and under the bare chip IC.

【0050】(3)封止樹脂を塗布した段階で気泡の発
生を防止できるため、脱泡工程を削除することができ、
工数を削減し、生産効率を向上できる。したがって、コ
スト低減できる。
(3) Since the generation of bubbles can be prevented at the stage of applying the sealing resin, the defoaming step can be eliminated,
The number of steps can be reduced and the production efficiency can be improved. Therefore, the cost can be reduced.

【0051】(4)溝構造によって封止樹脂の体積を減
らすことができ、樹脂使用量を低減できる。また樹脂塗
布時間も削減可能となる。
(4) The groove structure can reduce the volume of the sealing resin and the amount of resin used. Also, the resin application time can be reduced.

【0052】(5)ベアチップICの下部に溝構造を形
成するため、樹脂封止した後の強度を向上させることが
でる。
(5) Since the groove structure is formed in the lower portion of the bare chip IC, the strength after resin sealing can be improved.

【0053】(6)ベアチップICの下部に溝構造を形
成するので、FPC単品における湿度や熱による反り防
止に効果があり、ベアチップICの実装精度を向上させ
ることができる。
(6) Since the groove structure is formed in the lower portion of the bare chip IC, it is effective in preventing warpage due to humidity and heat in the single FPC, and the mounting accuracy of the bare chip IC can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施の形態よりなるFPC上のベア
チップICの樹脂封止構造およびその製造方法において
有機材料であるレジスト剤を溝構造に用いた場合の説明
図であり、(a)平面図、(b)断面図、(c)封止樹
脂剤を充填した時の断面図を示す。
FIG. 1 is an explanatory diagram of a case where a resist agent which is an organic material is used for a groove structure in a resin sealing structure of a bare chip IC on an FPC and a manufacturing method thereof according to an embodiment of the present invention, FIG. A plan view, (b) sectional view, and (c) a sectional view when filled with a sealing resin agent are shown.

【図2】本発明の一実施の形態よりなるFPC上のベア
チップICの樹脂封止構造およびその製造方法において
において金属材料である銅箔回路パターンを溝構造に用
いた場合の説明図であり、(a)平面図、(b)断面
図、(c)封止樹脂剤を充填した時の断面図を示す。
FIG. 2 is an explanatory diagram of a case where a copper foil circuit pattern, which is a metal material, is used for a groove structure in a resin sealing structure of a bare chip IC on an FPC and a manufacturing method thereof according to an embodiment of the present invention, (A) Plan view, (b) Sectional view, (c) Sectional view when filled with a sealing resin agent is shown.

【図3】本発明の一実施の形態よりなるFPC上のベア
チップICの樹脂封止構造およびその製造方法において
FPCの構成材料を少なくとも1つ以上含む材料を溝構
造に用いた場合の説明図であり、(a)平面図、(b)
断面図、(c)封止樹脂剤を充填した時の断面図を示
す。
FIG. 3 is an explanatory diagram of a case where a material including at least one constituent material of FPC is used for a groove structure in a resin sealing structure of a bare chip IC on an FPC and a manufacturing method thereof according to an embodiment of the present invention. Yes, (a) plan view, (b)
Sectional drawing, (c) Sectional drawing at the time of filling a sealing resin agent is shown.

【図4】本発明の一実施の形態よりなるFPC上のベア
チップICの樹脂封止構造およびその製造方法において
幾つかの溝構造の形を説明図であり、(a)放射状型の
溝構造、(b)平行状型の溝構造、(c)逆平行状型の
溝構造、(d)放射状型であり、且つ溝構造のパターン
を太く溝構造、(e)放射状型であり、且つ溝構造を高
密度に配置した溝構造、(f)幾つかのパターンの組み
合わせによる溝構造を示す。
FIG. 4 is an explanatory view showing the shapes of some groove structures in a resin sealing structure for a bare chip IC on an FPC and a method for manufacturing the same according to an embodiment of the present invention, including: (a) a radial groove structure; (B) Parallel type groove structure, (c) Anti-parallel type groove structure, (d) Radial type and groove structure with thick pattern, (e) Radial type and groove structure 3A and 3B show a groove structure having a high density, and (f) a groove structure formed by combining several patterns.

【図5】本発明の一実施の形態よりなるFPC上のベア
チップICの樹脂封止構造およびその製造方法における
ベアチップICのバンプの形状を説明図であり、(a)
マッシュルーム型バンプ、(b)ストレート型バンプを
示す。
5A and 5B are explanatory views showing a resin sealing structure of a bare chip IC on an FPC and a bump shape of the bare chip IC in a manufacturing method thereof according to an embodiment of the present invention;
A mushroom type bump and (b) a straight type bump are shown.

【図6】従来例のFPC上のベアチップICの封止樹脂
の脱泡工程を示す。
FIG. 6 shows a defoaming process of a sealing resin for a bare chip IC on an FPC in a conventional example.

【図7】従来例のFPC上のベアチップICの樹脂封止
構造の説明図であり、(a)実装前のFPCの平面図、
(b)実装前のFPCの断面図、(c)実装後のFPC
の平面図、(d)実装前のFPCの断面図を示す。
FIG. 7 is an explanatory view of a resin sealing structure of a bare chip IC on an FPC of a conventional example, (a) a plan view of the FPC before mounting,
(B) Cross-sectional view of FPC before mounting, (c) FPC after mounting
2D is a plan view of the FPC, and FIG.

【図8】FPC上のベアチップICの樹脂封止構造にお
けるベアチップICとの間の封止樹脂剤の流れを説明す
る図であり、(a)バンプが無いと仮想した場合、
(b)バンプがあり、封止樹脂の浸透の初期状態、
(c)バンプがあり、封止樹脂の浸透の時間経過後の気
泡を内包した状態、(d)は(c)のA−A′断面を示
す。
FIG. 8 is a diagram illustrating a flow of an encapsulating resin agent between the bare chip IC and a bare chip IC in a resin encapsulation structure of a bare chip IC on an FPC.
(B) There is a bump and the initial state of penetration of the sealing resin,
(C) A state in which there are bumps and air bubbles are included after a lapse of time for permeation of the sealing resin, and (d) shows a cross section taken along the line AA ′ of (c).

【符号の説明】[Explanation of symbols]

1 接続リード 2 FPC 3 封止樹脂の塗布位置 4 FPCの基材であるポリイミドフィルム 5 銅箔回路パターン 6 レジスト剤 7 ベアチップIC 8 接続バンプ 9 封止樹脂剤 10 FPC領域上の本発明の溝構造 11 本発明の有機材料による溝構造 12 本発明の金属材料による溝構造 13 本発明のFPCの構成材料による溝構造 14 封止樹脂の塗布位置 15 放射状型の溝構造 16 平行状型の溝構造 17 逆平行状型の溝構造 18 放射状型溝構造 19 放射状型で高密度の溝構造 20 組合せ型の溝構造 21 溝構造の先端 22 溝構造の終端 DESCRIPTION OF SYMBOLS 1 Connection lead 2 FPC 3 Application position of sealing resin 4 Polyimide film which is a base material of FPC 5 Copper foil circuit pattern 6 Resist agent 7 Bare chip IC 8 Connection bump 9 Encapsulating resin agent 10 Groove structure of the present invention on FPC area 11 Groove Structure of Organic Material of the Present Invention 12 Groove Structure of Metallic Material of the Present Invention 13 Groove Structure of Constituent Material of FPC of the Present Invention 14 Sealing Resin Application Position 15 Radial Groove Structure 16 Parallel Groove Structure 17 Anti-parallel groove structure 18 Radial groove structure 19 Radial and high density groove structure 20 Combined groove structure 21 Tip of groove structure 22 End of groove structure

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 FPC上にベアチップICを実装し、該
ベアチップICを樹脂封止するFPC上のベアチップI
Cの樹脂封止構造において、実装されるベアチップIC
の下部に当たるFPC領域上に溝構造を設けたことを特
徴とするFPC上のベアチップICの樹脂封止構造。
1. A bare chip I on an FPC in which a bare chip IC is mounted on an FPC and the bare chip IC is resin-sealed.
Bare chip IC mounted in C resin sealing structure
A resin encapsulation structure for a bare chip IC on an FPC, characterized in that a groove structure is provided on an FPC region corresponding to a lower part of the FPC.
【請求項2】 前記溝構造が有機材料により構成される
ことを特徴とする請求項1記載のFPC上のベアチップ
ICの樹脂封止構造。
2. The resin sealing structure for a bare chip IC on an FPC according to claim 1, wherein the groove structure is made of an organic material.
【請求項3】 前記溝構造が金属材料により構成される
ことを特徴とする請求項1記載のFPC上のベアチップ
ICの樹脂封止構造。
3. The resin sealing structure for a bare chip IC on an FPC according to claim 1, wherein the groove structure is made of a metal material.
【請求項4】 前記溝構造がFPCの構成材料を少なく
とも1つ以上含む材料より構成されることを特徴とする
請求項1記載のFPC上のベアチップICの樹脂封止構
造。
4. The resin sealing structure for a bare chip IC on an FPC according to claim 1, wherein the groove structure is made of a material containing at least one constituent material of the FPC.
【請求項5】 FPC上にベアチップICを実装し、該
ベアチップICを樹脂封止するFPC上のベアチップI
Cの樹脂封止する製造方法において、実装されるベアチ
ップICの下部に当たるFPC領域上に溝構造を設ける
ことにより樹脂注入時の乱流を少なくしたことを特徴と
するFPC上のベアチップICの樹脂封止の製造方法。
5. A bare chip I on an FPC in which a bare chip IC is mounted on the FPC and the bare chip IC is resin-sealed.
In the resin encapsulation manufacturing method of C, a turbulent flow at the time of resin injection is reduced by providing a groove structure on the FPC region corresponding to the lower part of the bare chip IC to be mounted. Manufacturing method.
JP08039774A 1996-02-27 1996-02-27 Resin sealing structure of bare chip IC on FPC and method of manufacturing the same Expired - Fee Related JP3129960B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08039774A JP3129960B2 (en) 1996-02-27 1996-02-27 Resin sealing structure of bare chip IC on FPC and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08039774A JP3129960B2 (en) 1996-02-27 1996-02-27 Resin sealing structure of bare chip IC on FPC and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH09232474A true JPH09232474A (en) 1997-09-05
JP3129960B2 JP3129960B2 (en) 2001-01-31

Family

ID=12562289

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Country Status (1)

Country Link
JP (1) JP3129960B2 (en)

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JP2019114686A (en) * 2017-12-25 2019-07-11 新光電気工業株式会社 Electronic component built-in substrate, sheet substrate
JP2022500874A (en) * 2018-09-17 2022-01-04 スリーエム イノベイティブ プロパティズ カンパニー Flexible device with more stretchable conductive traces
CN112289751A (en) * 2020-10-29 2021-01-29 华天科技(南京)有限公司 Packaging structure provided with substrate pre-printed tin and manufacturing method thereof
CN112310008A (en) * 2020-10-29 2021-02-02 华天科技(南京)有限公司 Packaging structure provided with substrate pre-brushing glue and manufacturing method thereof
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