JPH09212923A - Manufacture of optical-disk master disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture an optical-disk master disk easily by a method wherein a high-hardness carbon film layer is formed on one face of a substrate, it is irradiated with a laser beam while the laser beam is being turned on and off according to a recording signal and an opening part or a recessed part is foremd in a required part. SOLUTION: A plated layer 11 is formed on one face 10A of a substrate 10, and the side of the face 10A of the substrate 10 is finished to be smooth. Then, a thin-film layer 12 which is composed of DLC(diamondlike carbon) is foremd on the face 10A of the substrate 10. Then, the DLC thin film layer 12 is irradiated with a laser beam according to a recording signal. Thereby, a disk master 13 which comprises an uneven pattern according to the recording signal is formed on one face. In succession, a metal layer 14 is formed on one face of the disk master 13, the metal layer 14 is then stripped from the substrate 10, and a center hole is formed. Thereby, it is possible to obtain a stamper which comprises the uneven pattern according to the recording signal on one face 15A.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical disk master, which is suitable for manufacturing a stamper used as a mold for optical disk molding.

[0002]

2. Description of the Related Art A conventional stamper is shown in FIG.
It is manufactured by the following procedures shown in (J) to (J). That is, first, the substrate 1 made of glass or nickel as shown in FIG. 2A used in the preceding mastering process is used, and the substrate 1 is subjected to a chemical cleaning treatment (3 processes) to obtain the substrate shown in FIG. Thus, the residue 2 such as nickel and resist is removed from the surface.

Next, as shown in FIG. 2 (C), one surface 1A of the substrate 1 is polished extremely smoothly (1 step), and after precisely cleaning the substrate 1 as shown in FIG. 2 (D) (3 step), Figure 2
As shown in (E), a photoresist layer is formed on one surface 1A of the substrate 1 by a spin coating method or the like to form a resist layer 3 (2 steps).

Subsequently, as shown in FIG. 2 (F), the resist layer 3 is exposed (one step) in accordance with a recording signal and developed to develop one surface of the substrate 1 as shown in FIG. 2 (G). 1
A disk master 4 having a concavo-convex pattern corresponding to a recording signal composed of the remaining resist layer 3A is formed on A,
After that, as shown in FIG. 2H, a metal layer 5 made of nickel is laminated and formed on the concavo-convex pattern of the disk master 3 by a plating process (two steps).

Thereafter, as shown in FIG. 2 (I), the metal layer 5 is peeled off from the disk master 4 and washed, and then an opening (center hole) is formed at the center. This makes it possible to obtain the stamper 6 having the concavo-convex pattern according to the recording signal on the one surface 6A as shown in FIG.

[0006]

By the way, in such a conventional stamper manufacturing method, since the number of steps is large as described above, a large amount of manufacturing equipment is required, and the equipment cost is accordingly high and the manufacturing equipment is occupied. There was a problem that the area became large. Further, since the stamper 6 itself is manufactured through many steps such as resist coating, exposure and development as described above, there is a problem that the manufacturing time is long and the manufacturing cost is high.

Further, in the stamper manufacturing method as described above, since a photoresist having weak adhesion and strength with glass or nickel is used as a means for forming a concave-convex pattern on the one surface 1A of the substrate 1 according to a recording signal. However, there is a problem that only one stamper 6 can be created from one disk master 4.

The present invention has been made in consideration of the above points, and it is an object of the present invention to propose a method for manufacturing an optical disk master that can be easily manufactured.

[0009]

In order to solve such a problem, in the present invention, a high hardness carbon film layer made of high hardness carbon is formed on one surface of a substrate, and the high hardness carbon film layer is turned on / off according to a recording signal. On the other hand, a laser beam is irradiated with a predetermined power to form an opening or a recess at a necessary portion.

By doing so, a concavo-convex pattern corresponding to a recording signal can be formed on the one surface of the substrate by the high hardness carbon film layer. Therefore, the so-called disk
A master can be created easily.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

FIGS. 1A to 1I show a stamper manufacturing procedure according to an embodiment. First, one surface 10A of a substrate 10 made of glass or nickel as shown in FIG. 1A.
By forming the plating layer 11 on the top by a plating process (one step) as shown in FIG. 1B, the one surface 10A side of the substrate 10 is finished extremely smooth.

Then, as shown in FIG. 1C, a thin film layer made of DLC (Diamond Like Carbon) is formed on one surface 10A of this substrate 10 (more precisely, on the fitting layer 11) by a vapor deposition method or the like. Is referred to as a DLC film layer) 12 is a prescribed pit depth (for example, according to the reproducing wavelength or format).
0.11 [μm]) and the same thickness.

Subsequently, as shown in FIG. 1D, this DL
The C film layer 12 is irradiated with ultraviolet laser light with a predetermined power while the intensity thereof is modulated according to the recording signal. As a result, the carbon molecules in each necessary portion (for example, a portion corresponding to a pit) of the DLC film layer 12 are broken, and the carbon molecules in each required portion are sublimated (laser abrasion), thereby forming a pit-shaped opening 12A. Is formed, and thus, the disk master 13 having the concavo-convex pattern corresponding to the recording signal on one surface is prepared.

Subsequently, as shown in FIG. 1 (E), a metal layer 14 made of nickel is formed on one surface of the disk master 13 by plating, and then this metal layer 14 is formed as shown in FIG. 1 (F). After peeling layer 14 from substrate 10 and washing,
Drill a center hole. This makes it possible to obtain the stamper 15 having the concavo-convex pattern according to the recording signal on the one surface 15A as shown in FIG. 1 (I).

In the above structure, in this embodiment, the DLC film layer 12 is formed on the one surface 10A of the substrate 10A, and the DLC film layer 12 is irradiated with the ultraviolet laser light while the intensity thereof is modulated according to the recording signal. As a result, a disk master 13 having a concavo-convex pattern corresponding to a recording signal is formed on one surface, and the stamper 15 is manufactured based on the disk master 13.

Therefore, in this stamper manufacturing method, the number of manufacturing steps can be reduced as compared with the conventional stamper manufacturing method using the photoresist, and the stamper 15 can be manufactured by a correspondingly short time. 15
Manufacturing cost can be reduced. Further, in this stamper manufacturing method, the number of manufacturing steps can be reduced, so that the manufacturing equipment can be reduced, and the manufacturing equipment cost and the occupied area of the manufacturing equipment can be reduced accordingly.

Further, in this stamper manufacturing method, a hard DLM which has good adhesion to the substrate 10 made of glass or nickel and is used as a means for forming a concave-convex pattern according to a recording signal is used. It is possible to create a plurality of stampers 15 from the disk master 13, and the production cost and production efficiency of the finally produced optical disk can be improved accordingly.

According to the above configuration, the one surface 10 of the substrate 10
A DLC film layer 12 is formed on A, and the DLC film layer 12 is irradiated with an ultraviolet laser beam while being turned on and off according to a recording signal, whereby a disk master 13 having a concavo-convex pattern according to the recording signal is formed on one surface. Since the stamper 15 is manufactured and the stamper 15 is manufactured based on the disk master 13, the number of manufacturing steps of the stamper 15 can be reduced, thus realizing the stamper manufacturing method that can facilitate the manufacturing of the stamper 15. it can.

In the above-described embodiment, the DLC film layer 12 is formed on the one surface 10A of the substrate 10 with a film thickness corresponding to the depth of the pit, and the DLC film layer 12 has an opening portion corresponding to a recording signal. The case of forming 12A has been described, but the present invention is not limited to this, and for example, a DLC film layer is formed on one surface 10A of the substrate 10 with a film thickness equal to or larger than the standard pit depth, and the cutting step ( At the time of FIG. 1D, the output power of the ultraviolet laser light may be controlled to form a recess at a required portion (for example, a portion corresponding to the pit) of the DLC film layer with a standard pit depth.

Further, in the above-mentioned embodiment, the case where the plating layer 11 is formed on the one surface 10A of the substrate 10 is described, but the present invention is not limited to this, and for example, the one surface 10A of the substrate 10 is extremely formed. You may make it grind | polish evenly.

Further, in the above embodiment, the substrate 10
The case where the vapor deposition method is applied as the method of forming the DLC film layer 12 on the one surface 10A has been described, but the present invention is not limited to this, and the DLC film layer 12 is formed using, for example, the plasma CVD method. Alternatively, the substrate 1
As the means for forming the DLC film layer 12 on the one surface 10A of 0, various other methods can be applied.

Further, in the above embodiment, the substrate 10
The case where the ultraviolet laser beam is applied to the DLC film layer 12 formed on the one surface 10A as a means for forming the opening 12A in accordance with the recording signal has been described, but the present invention is not limited to this and is not necessary. As long as an opening can be formed in the DLC film layer 12 (for example, a wavelength of 300 nm or less), various laser lights such as excimer laser light can be applied.

Further, in the above embodiment, the substrate 10
The case where the DLC film layer 12 made of DLC is formed on the one surface 10A has been described, but the present invention is not limited to this, and other high hardness carbon film layers made of high hardness carbon may be formed. You can

[0025]

As described above, according to the present invention, a high hardness carbon film layer made of high hardness carbon having a predetermined thickness is formed on one surface of a substrate, and a predetermined power is applied to the high hardness carbon film layer while turning it on and off according to a recording signal. By forming the opening or the recess in the necessary portion by irradiating the laser beam, the concavo-convex pattern corresponding to the recording signal can be formed on the one surface of the substrate by the high hardness carbon film layer. . Therefore, a so-called disc master can be easily produced, and thus, a method for producing an optical disc master that can be easily produced can be realized.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a procedure for manufacturing a stamper according to an embodiment.

FIG. 2 is a cross-sectional view showing a procedure for manufacturing a conventional stamper.

[Explanation of symbols]

10 ... Substrate, 10A ... One side, 12 ... DLC film layer,
12A ... Aperture, 13 ... Disk stamper, 14
…… Metal layer, 15 …… Stamper.

Claims (2)

[Claims] 1. A method of manufacturing an optical disk master, which is a mold for optical disk molding, wherein a high-hardness carbon film layer having a predetermined thickness and made of high-hardness carbon is formed on the one surface of a substrate having one surface smoothed. And a second step of forming an opening or a recess in a necessary portion of the high hardness carbon film layer by irradiating a laser beam with a predetermined power while turning on and off according to a recording signal. A method for manufacturing an optical disc master, which is characterized in that 2. The method of manufacturing an optical disc master according to claim 1, wherein the laser light is an ultraviolet laser light.