JPH09202650A - Water-repellent, oil-repellent and antistaining membrane and its formation - Google Patents

Water-repellent, oil-repellent and antistaining membrane and its formation

Info

Publication number
JPH09202650A
JPH09202650A JP8009982A JP998296A JPH09202650A JP H09202650 A JPH09202650 A JP H09202650A JP 8009982 A JP8009982 A JP 8009982A JP 998296 A JP998296 A JP 998296A JP H09202650 A JPH09202650 A JP H09202650A
Authority
JP
Japan
Prior art keywords
film
repellent
water
oil
petal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8009982A
Other languages
Japanese (ja)
Other versions
JP3688042B2 (en
Inventor
Tsutomu Minami
努 南
Seiji Tadanaga
清治 忠永
Hiroshi Inaba
博司 稲葉
Akira Yuasa
章 湯浅
Yoshinori Akamatsu
佳則 赤松
Hideki Yamamoto
秀樹 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP00998296A priority Critical patent/JP3688042B2/en
Publication of JPH09202650A publication Critical patent/JPH09202650A/en
Application granted granted Critical
Publication of JP3688042B2 publication Critical patent/JP3688042B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/42Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/40Coatings comprising at least one inhomogeneous layer
    • C03C2217/425Coatings comprising at least one inhomogeneous layer consisting of a porous layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

PROBLEM TO BE SOLVED: To readily and inexpensively prepare a water-repellent and oil-repellent antistaining membrane which is formed by coating a specific coating layer formed on a substrate body with a water-repellent membrane, thus shows increased impregnation, supporting and holding properties of the water-repellent membrane. SOLUTION: This membrane comprises a substrate body made of a transparent glass plate, a flower pedal-like transparent alumina coating membrane formed on the substrate body and a water-repellent membrane coated on the alumina layer. The flower pedal-like transparent alumina membrane is formed with a coating liquid containing at least an aluminum alkoxide such as aluminum sec-butoxide and a stabilizer such as ethyl acetoacetate, drying and then subjecting the formed amorphous alumina membrane to a hydrothermal treatment, then drying and firing. In addition, the water-repellent membrane is preferably formed with a coating liquid containing a fluorine-containing silane (for example, a fluoroalkylsilane) and heat treated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、超撥水性能を示す
ことはもとより、耐熱性や耐候性に優れた撥水撥油防汚
性膜及びその形成法に関し、車輌用、船舶用、航空機用
あるいは建築用等の内外ウインドウガラスやミラーガラ
スや装飾用ガラス、あるいは各種建築材や建装材など広
く使用可能である有用な撥水撥油防汚性膜及びその形成
法を提供するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water- and oil-repellent antifouling film excellent in heat resistance and weather resistance as well as exhibiting super water repellency, and a method for forming the same, which is used for vehicles, ships, and aircraft. Provided is a useful water- and oil-repellent antifouling film and a method for forming the same, which can be widely used for interior and exterior window glass for interior or construction, mirror glass, decorative glass, and various building materials and building materials. is there.

【0002】[0002]

【従来の技術】最近、半導体分野ではもとより、ガラス
基板でなる窓材をはじめ、金属やプラスチツク等の各種
建築建装資材あるいは布地などの表面に撥水性を付与す
ることが行われ、種々その性能を向上せしめるような提
案、特に超撥水性を持たせる提案がなされている。
2. Description of the Related Art In recent years, in the field of semiconductors, water repellency has been imparted to surfaces of various architectural materials such as window materials made of glass substrates, metals and plastics, and fabrics. Has been proposed to improve the water repellency, in particular, to provide super water repellency.

【0003】例えば、特公平7-86146 号公報には、撥水
撥油防汚性被膜及びその形成方法が記載されており、40
0nm 未満の凹凸が形成された基体の表面に、少なくとも
シロキサン結合を介してフッ素を含む化学吸着単分子膜
が形成されており、表面に400nm 未満の凹凸を持つ撥水
撥油防汚性被膜。ならびに基体表面に400nm 未満の凹凸
が形成する工程と、一端にクロルシラン基(SiCln X3-n
基、n=1,2,3 、X は官能基)を有し、他の一端にフッ素
炭素基を有するクロロシラン系界面活性剤を溶かした非
水系有機溶媒中に、前記基体を浸漬し、前記活性剤より
なる化学吸着単分子膜を基体表面に形成する工程を含む
表面に400nm 未満の凹凸を持つ撥水撥油防汚性被膜の製
造方法。
For example, Japanese Examined Patent Publication (Kokoku) No. 7-86146 describes a water-repellent, oil-repellent antifouling coating and a method for forming the coating.
A water- and oil-repellent antifouling film having a chemisorption monomolecular film containing fluorine at least through a siloxane bond formed on the surface of a substrate having irregularities of less than 0 nm and having irregularities of less than 400 nm on the surface. In addition, the step of forming irregularities of less than 400 nm on the substrate surface and the chlorosilane group (SiCl n X 3-n
Group, n = 1,2,3, X is a functional group), the other end is immersed in a non-aqueous organic solvent in which a chlorosilane-based surfactant having a fluorocarbon group is dissolved, the substrate, A method for producing a water-repellent, oil-repellent and antifouling coating having irregularities of less than 400 nm on the surface, including a step of forming a chemisorption monomolecular film made of an activator on the surface of a substrate.

【0004】なかでも、前記凹凸形状は、サンドブラス
ト、フッ酸を用いた化学エッチング法あるいは電解エッ
チング、サンドペ−パ−によるラビング法であることが
記載されている。
Above all, it is described that the uneven shape is formed by sandblasting, a chemical etching method using hydrofluoric acid, an electrolytic etching method, or a rubbing method using a sandpaper.

【0005】また例えば、特開平6-116430号公報には、
撥水撥油性フイルムとその製造方法が記載されており、
プラスチックフイルム上の少なくとも片面に微小な凹凸
を形成した無機硬質膜、前記無機硬質膜上の微小な凹凸
上にシロキサン結合を介して形成させたフッ素を含む化
学吸着単分子膜とからなる撥水撥油性フイルム。ならび
に、プラスチックフイルムの少なくとも片面に無機硬質
膜を形成する工程と、前記無機硬質膜の表面を炭素およ
びフッ素を含むガス中でプラズマ放電処理を行い、微小
な凹凸を形成する工程と、前記凹凸に形成した無機硬質
膜表面を少なくとも酸素を含むガスでプラズマ放電処理
を行い、凹凸表面を親水性にする工程と、凹凸に形成さ
れた無機硬質膜を表面上に形成した前記プラスチックフ
イルムをフッ化炭素基とクロロシリル基を含む化合物
を、非水系の溶媒に溶解した溶液に浸漬し、前記無機硬
質膜の凹凸表面にフッ素を含む化学吸着単分子膜をシロ
キサン結合を介して形成させる工程とからなる撥水撥油
性フイルムの製造方法がが記載されている。
For example, Japanese Patent Application Laid-Open No. Hei 6-116430 discloses that
The water- and oil-repellent film and its manufacturing method are described.
A water-repellent and water-repellent film comprising an inorganic hard film having minute irregularities formed on at least one surface of a plastic film, and a chemisorption monomolecular film containing fluorine formed on the minute irregularities of the inorganic hard film through a siloxane bond. Oily film. Also, a step of forming an inorganic hard film on at least one surface of the plastic film, a step of performing plasma discharge treatment on the surface of the inorganic hard film in a gas containing carbon and fluorine, to form fine unevenness, and the unevenness The surface of the formed inorganic hard film is subjected to plasma discharge treatment with a gas containing at least oxygen to make the uneven surface hydrophilic, and the plastic film having the inorganic hard film formed on the uneven surface is treated with fluorocarbon. A compound containing a group and a chlorosilyl group is immersed in a solution dissolved in a non-aqueous solvent to form a chemisorption monomolecular film containing fluorine on the uneven surface of the inorganic hard film through a siloxane bond. A method for producing a water- and oil-repellent film is described.

【0006】なかでも、前記無機硬質膜の膜厚が0.02〜
10μm であること、および微小な凹凸の粗さが0.01〜0.
3 μm であることが記載されている。また例えば、特開
平7-197017号公報には、撥水表面を有する固体およびそ
の生成方法が記載されており、表面の少なくとも一部
に、大きい周期の凹凸構造が形成されその凹凸構造が前
記周期より小さい周期の凹凸構造を含む多段凹凸構造を
有し、その表面積増倍因子が5以上である撥水表面を有
する固体。ならびに固体表面に、機械加工を施すことに
より、電気めっき等の化学反応処理を施すことにより、
結晶を析出させあるいは粒子を凝集させることによりそ
れぞれ撥水表面を有する固体を生成する方法を記載して
いる。
In particular, the thickness of the inorganic hard film is 0.02 to
10 μm, and the roughness of fine irregularities is 0.01 to 0.
It is described as 3 μm. Further, for example, JP-A-7-197017 describes a solid having a water-repellent surface and a method for producing the same, in which at least a part of the surface has an uneven structure with a large period, and the uneven structure has the above-mentioned periodic structure. A solid having a water-repellent surface having a multi-step concavo-convex structure including a concavo-convex structure having a smaller period and having a surface area multiplication factor of 5 or more. In addition, by performing mechanical processing on the solid surface, by performing a chemical reaction treatment such as electroplating,
It describes a method of producing solids each having a water-repellent surface by precipitating crystals or aggregating particles.

【0007】なかでも、前記多段凹凸構造は、固体表面
に、切削加工や研削加工や電解加工を含む機械加工、レ
−ザ加工含む電気的加工、電気分解や化学反応や拡散律
速凝集を含む化学的加工、リソグラフイ−、プラズマ加
工、真空蒸着などとその組合せた加工によって形成し、
その周期が1mm以下10nm以上であることが記載されてい
る。
Among them, the multi-step concavo-convex structure has a solid surface on which mechanical processing including cutting, grinding and electrolytic processing, electrical processing including laser processing, chemical processing including electrolysis, chemical reaction and diffusion-controlled aggregation. Processing, lithographic, plasma processing, vacuum deposition, etc.
It is described that the period is 1 mm or less and 10 nm or more.

【0008】また例えば、特開平7-206475号公報には、
撥水性層担持部材が記載されており、表面上に複数個の
凹部および凸部を交互に繰り返し形成し、該表面を撥水
性材料からなる撥水性膜により被覆した撥水性層担持部
材において、上記撥水性膜により被覆された凹部または
凸部のピッチが20μm から150 μm までの範囲にあり、
該ピッチに対する凹部の深さまたは凸部の頂部を結ぶこ
とによって得られる仮想表面の表面粗さが500 μm 以下
であるように凹部および凸部を形成した撥水性層担持部
材が記載されている。
Further, for example, in Japanese Patent Laid-Open No. 7-206475,
A water-repellent layer-carrying member is described, wherein a plurality of concave portions and convex portions are alternately and repeatedly formed on the surface, and the surface is coated with a water-repellent film made of a water-repellent material. The pitch of the recesses or protrusions covered by the water-repellent film is in the range of 20 μm to 150 μm,
There is described a water-repellent layer-carrying member having a concave portion and a convex portion formed so that the depth of the concave portion with respect to the pitch or the surface roughness of a virtual surface obtained by connecting the top portions of the convex portions is 500 μm or less.

【0009】なかでも、凹部または凸部をフォトリソグ
ラフィ−により四角錘状に形成したこと、ならびに凹部
または凸部を交互に繰り返し形成することによってフレ
ネルレンズにしたことが記載されている。
Among them, it is described that the concave portion or the convex portion is formed into a quadrangular pyramid shape by photolithography, and the concave portion or the convex portion is alternately and repeatedly formed to form a Fresnel lens.

【0010】さらに他に例えば、特開平6-122838号公報
に記載のはっ水性塗料及びその塗装方法等、特開平6-34
5881号公報に記載の撥水性材料及びその製造方法等、特
開平7-26168 号公報に記載の超撥水性塗料の製造方法
等、特開平7-76797 号公報に記載の有機被膜及びその形
成方法等、特開平4-283268号公報に記載の含フッ素化合
物複合体等の塗料関連の提案がある。
Further, for example, the water-repellent coating and its coating method described in JP-A-6-122838, JP-A-6-34
No. 5881, a water-repellent material and a method for producing the same, and a method for producing a super-water-repellent paint described in JP-A-7-26168, and an organic film described in JP-A-7-76797 and a method for forming the same There are proposals related to paints such as a fluorine-containing compound composite described in JP-A-4-283268.

【0011】またさらに例えば、日本化学会誌、1992,
(12),1511〜1514頁には、ゾル−ゲル法によるスポンジ
状アルミナ薄膜の調製が記載されており、硝酸アルミニ
ウム九水和物を用いてアルミナ薄膜を形成し、該アルミ
ナ薄膜を熱水中で処理したのち、焼成することで表面構
造がスポンジ状に変化し、100 〜200nm の細孔でかつ長
さ50〜100nm 、幅5nm 前後の繊維状微粒子が連結した集
合体から構成されたスポンジ状アルミナ薄膜が記載され
ている。
Further, for example, the Chemical Society of Japan, 1992,
(12), pages 1511 to 1514, the preparation of a sponge-like alumina thin film by the sol-gel method is described, an alumina thin film is formed using aluminum nitrate nonahydrate, and the alumina thin film is heated in hot water. The surface structure changes into a sponge-like structure after being treated with, and has a sponge-like structure composed of aggregates of fibrous fine particles with pores of 100 to 200 nm and lengths of 50 to 100 nm and widths of around 5 nm. Alumina thin films are described.

【0012】[0012]

【発明が解決しようとする課題】前述したような例え
ば、特公平7-86146 号公報に記載の撥水撥油防汚性被膜
及びその形成方法、特開平6-116430号公報に記載の撥水
撥油性フイルムとその製造方法、特開平7-197017号公報
に記載の撥水表面を有する固体およびその生成方法、な
らびに特開平7-206475号公報に記載の撥水性層担持部材
のいずれも、水滴に対する接触角が例えば約160 °程度
のものが得られてはいるものの、例えば不透明、あるい
はその凹凸形状を形成するために酸やフッ素によるエツ
チング、各種機械的加工、電気的加工、化学的加工、フ
ォトリソグラフイ−、プラズマ加工など複雑な工程が必
要であり、また薄膜に対しての処理が難しい課題があ
る。
DISCLOSURE OF INVENTION Problems to be Solved by the Invention As described above, for example, a water-repellent oil-repellent antifouling coating and a method for forming the same as described in JP-B-7-86146, and a water-repellent coating described in JP-A-6-116430. Oil-repellent film and its manufacturing method, solid having a water-repellent surface described in JP-A-7-197017 and its production method, and any of the water-repellent layer-carrying member described in JP-A-7-206475, water droplets Although a contact angle with respect to about 160 ° has been obtained, for example, etching with acid or fluorine to form an opaque or uneven shape thereof, various mechanical processing, electrical processing, chemical processing, There is a problem that a complicated process such as photolithography and plasma processing is required, and it is difficult to process a thin film.

【0013】また例えば、前記スポンジ状アルミナ薄膜
では、孔状空隙や表面凹凸のサイズが小さくかつその繊
維状微粒子が連結した集合体から構成されたスポンジ状
ではその形状特性が不充分であって、例えば下地層膜と
して必ずしも充分その性能を発揮し難い等の課題があ
る。
Further, for example, the sponge-like alumina thin film has a small size of pore-like voids and surface irregularities, and the sponge-like structure composed of aggregates of the fibrous fine particles has insufficient shape characteristics. For example, there is a problem that it is difficult to sufficiently exhibit its performance as an underlayer film.

【0014】そこで、本発明の主な課題としては、その
特異な空隙とその特異な形状の集合体化にしかつ比表面
積を高めるようより制御した透明アルミナ膜として、下
地層膜としてよりその機能と性能を発揮しかつより実用
化の実効をもたらすものとしたなかで、その上に撥水膜
を被覆形成し、撥水膜の含浸性、担持性あるいは拘持性
の性能を高めることを同時にもたらし、表層表面の特異
な凹凸状を活かして相乗効果を発現せしめ、より優れた
超撥水性膜をより安定した状態で得ることにある。
Therefore, the main object of the present invention is to make the peculiar voids and the peculiar shape into an aggregate and to control the transparent alumina film so as to increase the specific surface area. While exhibiting performance and bringing more practical application, a water-repellent film is formed on the surface of the water-repellent film at the same time to enhance the impregnating property, carrying property or holding property of the water-repellent film. The purpose is to utilize the unique irregularities on the surface of the surface layer to exert a synergistic effect, and to obtain a more excellent superhydrophobic film in a more stable state.

【0015】[0015]

【課題を解決するための手段】本発明は、従来のかかる
課題に鑑みてなしたものであって、基体上に、例えばガ
ラス基板上に、撥水膜の含浸性、担持性あるいは拘持性
の性能を高めることができる、その特異な空隙とその特
異な形状の集合体化とするようより制御した微細でしっ
かりしかつ比表面積を高めた花弁状形状を呈する透明ア
ルミナ膜を下地層膜として形成し、その上に、撥水膜を
被覆するよう被膜することにより、撥水膜の含浸性、担
持性あるいは拘持性の性能を高めると同時に、表層表面
の特異な凹凸状を活かして相乗効果を発現せしめ、優れ
た超撥水性膜をもたらして格段にその性能を発揮するこ
ととなり、光学特性を損なうことなく、かつ硬さも向上
し、耐熱性あるいは耐候性等が優れたものとなり、建築
建装用もしくは自動車用等の窓材、各種膜付きガラス物
品あるいは各種建築資材用等において有用な撥水撥油防
汚性膜及びその形成法を提供するものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has a water repellent film impregnating property, carrying property or holding property on a substrate, for example, a glass substrate. As a base layer film, a transparent alumina film with a fine, firm, and petal-like shape with a higher specific surface area, which is more controlled so that the unique voids and the unique shape are aggregated, can be obtained. By forming it and coating it on top of it, the performance of impregnation, supportability or holding property of the water-repellent film is enhanced, and at the same time, the unique unevenness of the surface layer is utilized to synergize. The effect is exhibited, and the excellent super water-repellent film is brought to exert its performance remarkably, the optical characteristics are not impaired, the hardness is also improved, and the heat resistance or weather resistance is excellent, and the construction is improved. For construction or own Window materials, such as for cars, there is provided a useful oil-repellent antifouling film and its formation method in various film-coated glass article or the like for various building materials.

【0016】すなわち、本発明は基体上に形成した花弁
状透明アルミナ膜と、該花弁状透明アルミナ膜上に被覆
した撥水膜とでなることを特徴とする撥水撥油防汚性
膜。ならびに、前記花弁状透明アルミナ膜が、アルミニ
ウムアルコキシドと安定化剤から少なくともなる塗布液
で被膜を乾燥し熱処理して成膜したアモルフアスアルミ
ナ膜を、熱水処理し、乾燥、焼成したことでなる花弁状
の透明アルミナ膜であることを特徴とする上述した撥水
撥油防汚性膜。
That is, the present invention is a water-repellent, oil-repellent, and antifouling film comprising a petal-shaped transparent alumina film formed on a substrate and a water-repellent film coated on the petal-shaped transparent alumina film. In addition, the petal-like transparent alumina film is formed by drying the film with a coating liquid containing at least an aluminum alkoxide and a stabilizer and heat-treating the amorphous alumina film to be subjected to hot water treatment, drying and firing. The water- and oil-repellent antifouling film described above, which is a petal-shaped transparent alumina film.

【0017】また、前記花弁状透明アルミナ膜が、該花
弁状透明アルミナ膜の中心線平均粗さを面拡張した平均
面粗さRa’値が17nm以上、かつ比表面積SRが1.5 以上で
あることを特徴とする上述した撥水撥油防汚性膜。
Further, the petal-shaped transparent alumina film has an average surface roughness Ra 'value of 17 nm or more and a specific surface area S R of 1.5 or more obtained by surface-expanding the center line average roughness of the petal-shaped transparent alumina film. The water-repellent, oil-repellent, and antifouling film described above.

【0018】さらに、前記撥水膜が、フッ素含有シラン
化合物からなる塗布液を塗布し、加熱処理した被覆膜で
あることを特徴とする上述した撥水撥油防汚性膜。さら
にまた、前記フッ素含有シラン化合物が、フルオロカ−
ボン基を有するフッ素含有シラン化合物であることを特
徴とする上述した撥水撥油防汚性膜。
Further, the water-repellent and oil-repellent antifouling film is characterized in that the water-repellent film is a coating film obtained by applying a coating solution containing a fluorine-containing silane compound and heat-treating it. Furthermore, the fluorine-containing silane compound is a fluorocarbon.
The water- and oil-repellent antifouling film as described above, which is a fluorine-containing silane compound having a bon group.

【0019】さらにまた、前記基体が、透明ガラス基板
であることを特徴とする上述した撥水撥油防汚性膜。ま
た、基体上に、アルミニウムアルコキシドと安定化剤か
ら少なくともなる塗布液を塗布し、乾燥、焼成をしてア
モルフアスアルミナ膜を成膜し、次いで該アモルフアス
アルミナ膜に熱水処理をし、乾燥、焼成して花弁状透明
アルミナ膜を形成した後、その上にフッ素含有シラン化
合物からなる塗布液を塗布し、加熱処理して撥水膜を被
覆形成したことを特徴とする撥水撥油防汚性膜の形成
法。
Furthermore, the above-mentioned water-repellent, oil-repellent and antifouling film, wherein the substrate is a transparent glass substrate. Further, a coating liquid containing at least an aluminum alkoxide and a stabilizer is applied on a substrate, dried and baked to form an amorphous alumina film, and then the amorphous alumina film is subjected to hot water treatment and dried. After forming a petal-like transparent alumina film by baking, a coating liquid consisting of a fluorine-containing silane compound is applied on the film, and heat-treated to form a water-repellent film. Method of forming dirty film.

【0020】さらに、前記フッ素含有シラン化合物が、
フルオロカ−ボン基を有するフッ素含有シラン化合物で
あることを特徴とする上述した撥水撥油防汚性膜の形成
法。さらにまた、前記基体が、透明ガラス基板であるこ
とを特徴とする上述した撥水撥油防汚性膜の形成法をそ
れぞれ提供するものである。
Further, the fluorine-containing silane compound is
The method for forming a water- and oil-repellent antifouling film as described above, which is a fluorine-containing silane compound having a fluorocarbon group. Furthermore, each of the above-mentioned methods for forming a water-repellent, oil-repellent, and antifouling film is provided in which the substrate is a transparent glass substrate.

【0021】[0021]

【発明の実施の形態】ここで、前記したように、基体上
に形成した花弁状透明アルミナ膜と、該花弁状透明アル
ミナ膜上に被覆した撥水膜とでなる撥水撥油防汚性膜と
したのは、その特異な空隙とその特異な形状の集合体化
にしかつ比表面積を高めるようより制御した透明アルミ
ナ膜として、下地層膜としてよりその機能と性能を発揮
しかつより実用化の実効をもたらすものとしたなかで、
その上に撥水膜を被覆形成し、撥水膜の含浸性、担持性
あるいは拘持性の性能を高めることを同時にもたらし、
表層表面の特異な凹凸状を活かして相乗効果を発現せし
め、より優れた超撥水性膜をより安定した状態で得るこ
とにある。
BEST MODE FOR CARRYING OUT THE INVENTION Here, as described above, the water-repellent, oil-repellent, and antifouling property of a petal-shaped transparent alumina film formed on a substrate and a water-repellent film coated on the petal-shaped transparent alumina film. The film is a transparent alumina film that is controlled by combining the unique voids and the unique shape and increasing the specific surface area. Among the things that bring about the effect of
A water-repellent film is formed on it to bring about an improvement in the impregnating property, carrying property or holding property of the water-repellent film,
This is to utilize the unique irregularities on the surface of the surface layer to exert a synergistic effect, and to obtain a more excellent superhydrophobic film in a more stable state.

【0022】下地層膜としての花弁状透明アルミナ膜と
しては、アルミニウムアルコキシドと安定化剤から少な
くともなる塗布液で被膜を、例えば約600 ℃以下で乾燥
し熱処理して成膜したアモルフアスアルミナ膜を、熱水
処理し、乾燥、焼成したことでなる花弁状の透明アルミ
ナ膜であって、該花弁状透明アルミナ膜の中心線平均粗
さを面拡張した平均面粗さRa’値が17nm以上、かつ比表
面積SRが1.5以上である。
As the petal-like transparent alumina film as the underlayer film, an amorphous alumina film formed by coating a coating liquid containing at least an aluminum alkoxide and a stabilizer, for example, by drying at about 600 ° C. or lower and heat-treating the film. A hot-water-treated, dried, petal-shaped transparent alumina film obtained by baking, the average surface roughness Ra'value of which the center line average roughness of the petal-shaped transparent alumina film is surface-expanded is 17 nm or more, Moreover, the specific surface area S R is 1.5 or more.

【0023】前記アルミニウムアルコキシドとしては、
例えばアルミニウムエトキシド、アルミニウムイソプロ
ポキシド、アルミニウム-n- ブトキシド、アルミニウム
-sec- ブトキシド、アルミニウム-tert-ブトキシド、ア
ルミニウムアセチルアセトナ−トなどが挙げられる。
As the aluminum alkoxide,
For example, aluminum ethoxide, aluminum isopropoxide, aluminum-n-butoxide, aluminum
-sec-butoxide, aluminum-tert-butoxide, aluminum acetylacetonate and the like can be mentioned.

【0024】また、前記安定化剤としては、例えばアセ
チルアセトンやアセト酢酸エチル等のβ- ジケトン類、
モノエタノ−ルアミンやジエタノ−ルアミンやトリエタ
ノ−ルアミン等のアルカノ−ルアミン類、さらに一般的
な金属アルコキシドの安定化剤などが挙げられる。
Examples of the stabilizer include β-diketones such as acetylacetone and ethyl acetoacetate,
Examples thereof include alkanolamines such as monoethanolamine, dietanolamine and triethanolamine, and general metal alkoxide stabilizers.

【0025】また、希釈溶媒としては、例えばメチルア
ルコ−ル、エチルアルコ−ル、プロピルアルコ−ル、ブ
チルアルコ−ル、さらに一般的なゾルゲル法において用
いられる希釈溶媒などが挙げられる。
Examples of the diluting solvent include methyl alcohol, ethyl alcohol, propyl alcohol, butyl alcohol, and a diluting solvent used in a general sol-gel method.

【0026】また、前記アルミニウムアルコキシドと安
定化剤から少なくともなる塗布液としては、アルミニウ
ムアルコキシドが空気中の水分とすばやく反応ゲル化し
白濁化するのに対し、これを防止する効果がある例えば
β- ジケトン類やアルカノ−ルアミン類等の安定化剤を
例えばモル比で約1以上を加え、各種アルコ−ル等の希
釈溶媒で塗布し易い濃度まで、例えばディッピング法に
よる塗布では希釈アルコ−ルのアルミニウムアルコキシ
ドの比はモル比で約10以上、好ましくは約20以上である
等に希釈し、少量の水を触媒として加えることで塗布液
とした。
As a coating solution containing at least the aluminum alkoxide and the stabilizer, aluminum alkoxide reacts quickly with water in the air to form a gel and becomes cloudy, while it has an effect of preventing this, for example, β-diketone. Alumina alkoxide of dilute alcohol is added to a concentration at which it can be easily coated with a diluting solvent such as various alcohols, for example, by adding a stabilizer such as alkanols and alkanolamines in a molar ratio of about 1 or more. Was diluted to a molar ratio of about 10 or more, preferably about 20 or more, and a small amount of water was added as a catalyst to prepare a coating solution.

【0027】なお、好ましい混合割合としては、モル比
で、例えばアルミニウムアルコキシド:希釈溶媒:安定
化剤:水=1:10〜100 :0.5 〜2 :0 〜5 である。ま
たなお、その各原料の添加混合する塗布液の調製につい
ては、例えば後述する実施例1のようにする。
The preferred mixing ratio is, for example, aluminum alkoxide: diluting solvent: stabilizer: water = 1: 10 to 100: 0.5 to 2: 0 to 5 in terms of molar ratio. The preparation of the coating liquid in which the respective raw materials are added and mixed is performed, for example, as in Example 1 described later.

【0028】さらに、撥水膜用の撥水剤としては、例え
ばフルオロカ−ボン基を有するフッ素含有シラン化合
物、具体的には、CF3(CH2)2Si(OCH3)3、CF3(CH2)2SiC
l3、CF3(CF2)5(CH2)2Si(OCH3)3、CF3(CF2)5(CH2)2SiC
l3、CF3(CF2)7(CH2)2Si(OCH3)3、CF 3(CF2)7(CH2)2SiC
l3、CF3(CF2)7(CH2)3SiCH3(OCH3)2 、CF3(CF2)7(CH2)2S
iCH3Cl 2 等であって、一般的にはCF3(CF2)a (CH2)2SiR
b X c 〔R:アルキル基、X:アルコキシ基もしくはハロゲ
ン原子など加水分解を受ける基、a:0 〜7 の整数、b:0
〜2 の整数、c:1 〜3 の整数、b+c=3 〕で表される化合
物である。
Further, as the water repellent agent for the water repellent film, for example,
For example, a fluorine-containing silane compound having a fluorocarbon group
Thing, specifically CFThree(CHTwo)TwoSi (OCHThree)Three, CFThree(CHTwo)TwoSiC
lThree, CFThree(CFTwo)Five(CHTwo)TwoSi (OCHThree)Three, CFThree(CFTwo)Five(CHTwo)TwoSiC
lThree, CFThree(CFTwo)7(CHTwo)TwoSi (OCHThree)Three, CF Three(CFTwo)7(CHTwo)TwoSiC
lThree, CFThree(CFTwo)7(CHTwo)ThreeSiCHThree(OCHThree)Two, CFThree(CFTwo)7(CHTwo)TwoS
iCHThreeCl TwoEtc., generally CFThree(CFTwo)a(CHTwo)TwoSiR
bXc[R: alkyl group, X: alkoxy group or halogen
Group that undergoes hydrolysis, such as a hydrogen atom, a: 0 to an integer of 7, b: 0
~ 2 integer, c: 1 to 3 integer, b + c = 3]
Things.

【0029】また例えば、フッ化ピッチ〔CFm 、m:1.1
〜1.6 。大阪ガス社製〕。あるいはフッ素樹脂、具体的
にはポリテトラフルオロエチレン〔PTFE〕、テトラエチ
レン−ヘキサフルオロプロピレン共重合体〔PFEP〕、エ
チレン−テトラフルオロエチレン共重合体〔PETFE 〕、
テトラフルオロエチレン−パ−フルオロアルキルビニル
エ−テル共重合体〔PFA 〕、エチレン−クロロトリフル
オロエチレン共重合体〔PECTFE〕、テトラフルオロエチ
レン−ヘキサフルオロプロピレン−パ−フルオロアルキ
ルビニルエ−テル共重合体〔PEPE〕、ポリクロロトリフ
ルオロエチレン〔PCTFE 〕、ポリビニリデンフルオライ
ド〔PVdF〕、ポリフッ化ビニル〔PVF 〕等。ならびにフ
ッ化グラファイトなどが挙げられる。
Further, for example, fluorinated pitch [CF m , m: 1.1
~ 1.6. Made by Osaka Gas Co., Ltd.]. Or fluororesin, specifically polytetrafluoroethylene [PTFE], tetraethylene-hexafluoropropylene copolymer [PFEP], ethylene-tetrafluoroethylene copolymer [PETFE],
Tetrafluoroethylene-perfluoroalkylvinylether copolymer [PFA], ethylene-chlorotrifluoroethylene copolymer [PECTFE], tetrafluoroethylene-hexafluoropropylene-perfluoroalkylvinylether copolymer Combined [PEPE], polychlorotrifluoroethylene [PCTFE], polyvinylidene fluoride [PVdF], polyvinyl fluoride [PVF] and the like. And graphite fluoride.

【0030】また、膜付けする塗布法としては、例えば
ディッピング法、スピンコ−ト法、ノズルフロ−コ−ト
法、スプレ−法、リバ−スコ−ト法、フレキソ法、印刷
法、フロ−コ−ト法、ならびにこれらの併用等、既知の
塗布手段が適宜採用し得るものである。なかでもディッ
ピング法における引き上げ速度としては、必要な膜厚に
よって適宜選択すればよいことではあるが、浸漬後例え
ば約0.1 乃至3.0mm /秒程度の静かな均一速度で引き上
げることが好ましい。
As a coating method for forming a film, for example, a dipping method, a spin coat method, a nozzle flow coat method, a spray method, a reverse coat method, a flexo method, a printing method, a flow coat method. The known coating means such as a coating method and a combination thereof can be appropriately adopted. Among them, the pulling rate in the dipping method may be appropriately selected depending on the required film thickness, but it is preferable to pull up at a quiet uniform rate of, for example, about 0.1 to 3.0 mm / sec after immersion.

【0031】またさらに、前記アモルフアスアルミナ膜
を成膜する際における乾燥、焼成については、例えば約
600 ℃程度以下、好ましくは約550 ℃程度以下で約5分
間乃至60分間程度である。また、熱水処理後における乾
燥、焼成については、例えば約100 ℃程度前後で約10分
間前後の乾燥のみ、もしくは該乾燥に続いて焼成、例え
ば約300 ℃乃至500 ℃程度で約10分間前後の焼成をし、
花弁状の透明アルミナ膜を形成し、より実用化し得て実
効を有する花弁状透明アルミナ膜をうることができた。
なお、該花弁状透明アルミナ膜の膜厚としては、約50nm
以上400nm 以下程度が好ましいものである。また、撥水
膜における乾燥、焼成については、例えば室温乃至約10
0 ℃程度前後で約10乃至 120分間程度前後の乾燥のみ、
もしくは該乾燥に続いて焼成、例えば約200 ℃乃至450
℃程度で約10分間前後の焼成である。
Furthermore, the drying and firing in forming the amorphous alumina film is, for example, about
The temperature is about 600 ° C. or lower, preferably about 550 ° C. or lower for about 5 to 60 minutes. Regarding the drying and baking after the hot water treatment, for example, only about 100 ° C for about 10 minutes or only after drying, for example, about 300 to 500 ° C for about 10 minutes. Firing,
By forming a petal-like transparent alumina film, it was possible to obtain a petal-like transparent alumina film that could be put into practical use and could be effective.
The thickness of the petal-shaped transparent alumina film was about 50 nm.
It is preferably not less than 400 nm and not more than 400 nm. For drying and baking the water-repellent film, for example, from room temperature to about 10
Only drying for about 10 to 120 minutes at about 0 ℃,
Alternatively, the drying is followed by calcination, for example, about 200 ° C to 450 ° C.
Firing is performed for about 10 minutes at about ℃.

【0032】また、前記アモルフアスアルミナ膜の熱水
処理については、例えば50℃乃至100 ℃の熱水または約
100 ℃程度にボイルされた熱水中に該アモルフアスアル
ミナ膜付きガラス基板を浸漬せしめて、該アモルフアス
アルミナ膜の表層表面が解膠作用等を受けることで、後
述する図1乃至図3に示すように、特異な微小な孔状の
空隙をもって特異な花弁状のものがランダムに集合体化
した表層表面を有するものと成り、所期のめざす特異な
空隙と形状化をなしうることができ、例えば含浸性や担
持性や拘持性等下地層膜として、その機能や性能をより
充分に発揮する膜と成し得る花弁状透明アルミナ膜とな
る。また、該熱水処理の処理時間としては、約5分間乃
至24時間前後が好ましいものである。
The hot water treatment of the amorphous alumina film is carried out, for example, with hot water at 50 ° C. to 100 ° C.
By immersing the glass substrate with the amorphous alumina film in hot water boiled at about 100 ° C and subjecting the surface layer surface of the amorphous alumina film to deflocculation, etc., as shown in FIGS. As shown, peculiar petal-shaped ones with peculiar minute pore-shaped voids have a surface layer that is randomly aggregated, and it is possible to form peculiar voids and shapes that are aimed at. For example, it becomes a petal-like transparent alumina film which can be formed as a film that exhibits its function and performance more sufficiently as an underlayer film having impregnating property, carrying property, and retaining property. The treatment time of the hot water treatment is preferably about 5 minutes to 24 hours.

【0033】またさらに、得られた花弁状透明アルミナ
膜の評価法の一つとしては、走査型電子顕微鏡(SEM )
による5.0 万倍で表層表面を上面視した写真観察、5.0
万倍の側断面視した写真観察、ならびにサイクリックコ
ンタクトモ−ド原子力間顕微鏡(CC-AFM )による表層
表面を斜視した写真観察ならびに該観察による該膜の中
心線平均粗さRaを面拡張した平均面粗さRa’値と比表面
積SRを求めて表示できるようにしたものである。〔実施
例1を参照のこと〕。
Furthermore, as one of the evaluation methods for the obtained petal-shaped transparent alumina film, a scanning electron microscope (SEM) is used.
Observing the top surface of the surface with a magnification of 50
Photograph observation with a side cross-section at a magnification of 10,000 times, and photograph observation with a perspective view of the surface layer surface by a cyclic contact mode atomic force microscope (CC-AFM) and surface expansion of the center line average roughness Ra of the film by the observation. The average surface roughness Ra ′ value and the specific surface area S R are obtained and displayed. [See Example 1].

【0034】その結果、図1乃至図3に示すようにな
り、例えば空隙の大きさが約50nm乃至100nm 程度で花弁
状物が約20nm乃至50nm程度となり、なかでも前記平均面
粗さRa’値が約17nm程度以上、かつ比表面積SRが1.5程
度 以上となることであり、好ましくはRa’値が約20nm
程度以上、かつ比表面積SRが1.7 程度以上である。な
お、該両者の値が極端に大きくなるとヘイズ等の問題が
発現することは言うまでもない。
As a result, as shown in FIGS. 1 to 3, for example, the size of the voids is about 50 nm to 100 nm and the petals are about 20 nm to 50 nm. Above all, the average surface roughness Ra 'value is Is about 17 nm or more, and the specific surface area S R is about 1.5 or more, preferably Ra 'value is about 20 nm.
The specific surface area S R is about 1.7 or more. It goes without saying that problems such as haze will occur when the values of both are extremely large.

【0035】またさらに、撥水膜における撥水性能の評
価法の一つとしては、接触角計〔エルマ(株)製〕を用
い、該膜の大気中(約25℃)での水滴(水滴量約1.7 μ
l )に対する接触角θ(°)を測定することで行った。
その結果、接触角θは約140°以上、好ましくは接触角
θが約150 °以上170 °以下程度であり、超撥水性能を
有するものであった。
Furthermore, as one of the methods for evaluating the water-repellent performance of the water-repellent film, a contact angle meter (manufactured by Elma Co., Ltd.) is used, and water drops (water droplets) in the atmosphere (about 25 ° C.) of the film are used. Amount about 1.7 μ
It was carried out by measuring the contact angle θ (°) with respect to l).
As a result, the contact angle θ was about 140 ° or more, preferably about 150 ° or more and 170 ° or less, and it had super-water repellency.

【0036】前述したとおり、本発明の撥水撥油防汚性
膜及びその形成法によれば、基体上に形成した花弁状透
明アルミナ膜と、該花弁状透明アルミナ膜上に被覆した
撥水膜とでなることとしたことにより、撥水膜の含浸
性、担持性あるいは拘持性の性能を高めることができ
る、その特異な空隙とその特異な形状の集合体化とする
ようより制御した微細でしっかりしかつ比表面積を高め
た花弁状形状を呈する透明アルミナ膜を下地層膜として
でき、その上に撥水膜を被覆するよう被膜することで、
高安全性で厄介な工程なく簡便に効率よく得られ、撥水
膜の含浸性、担持性あるいは拘持性の性能を高めると同
時に、表層表面の特異な凹凸状を活かして相乗効果を発
現せしめ、優れた超撥水性膜をもたらして格段にその性
能を発揮することとなり、光学特性を損なうことなく、
かつ硬さも向上し、耐熱性あるいは耐候性等が優れたも
のとなり、建築建装用もしくは自動車用等の窓材、各種
膜付きガラス物品あるいは各種建築資材用等において有
用な撥水撥油防汚性膜及びその形成法を提供するもので
ある。
As described above, according to the water-repellent, oil-repellent and antifouling film of the present invention and the method for forming the same, a petal-shaped transparent alumina film formed on a substrate and a water-repellent film coated on the petal-shaped transparent alumina film. Since it is made of a film, the water-repellent film can be improved in impregnating property, carrying property or retaining property, and is controlled more so as to be an aggregate of the unique void and the unique shape. By forming a transparent alumina film that is fine and firm and has a petal-like shape with an increased specific surface area as a base layer film, and by coating a water-repellent film on it,
It is highly safe and can be obtained easily and efficiently without any troublesome process, and enhances the performance of impregnation, supportability or retainability of the water-repellent film, while at the same time exerting a synergistic effect by utilizing the unique irregularities of the surface layer. , Brings an excellent super water-repellent film and exerts its performance remarkably, without impairing the optical characteristics,
It also has improved hardness and excellent heat resistance, weather resistance, etc., and is useful as a water-repellent, oil-repellent and anti-fouling property for window materials for building construction or automobiles, various glass products with films, or various building materials. A film and a method for forming the film are provided.

【0037】[0037]

【実施例】以下、実施例により本発明を具体的に説明す
る。ただし本発明は係る実施例に限定されるものではな
い。
The present invention will be described below in detail with reference to examples. However, the present invention is not limited to such an embodiment.

【0038】実施例1 大きさ約100mm x100mm 、厚さ約2mmのクリア・フロー
トガラス基板を中性洗剤、水すすぎ、アルコールで順次
洗浄し、乾燥した後、アセトンで払拭し被膜用ガラス基
板とした。
Example 1 A clear float glass substrate having a size of about 100 mm × 100 mm and a thickness of about 2 mm was sequentially washed with a neutral detergent, water rinse, alcohol, dried and then wiped with acetone to form a glass substrate for coating. .

【0039】アルミニウム-sec- ブトキシド〔Al(O-sec
-Bu)3 〕とイソプロピルアルコ−ル〔IPA 〕とを約30分
間室温で攪拌し、アセト酢酸エチル〔EAcAc 〕を添加し
約3時間室温で攪拌し、さらに水〔H2O 〕と〔IPA 〕を
加え、モル比で、Al(O-sec-Bu)3 :IPA :EAcAc :H2O
=1:20:1:2の割合とし、約1時間室温で攪拌しAl
2O3 ゾルである下地層膜用塗布液を調製した。
Aluminum-sec-Butoxide [Al (O-sec
-Bu) 3 ] and isopropyl alcohol [IPA] are stirred at room temperature for about 30 minutes, ethyl acetoacetate [EAcAc] is added, and the mixture is stirred at room temperature for about 3 hours, and then water [H 2 O] and [IPA] are added. ], And Al (O-sec-Bu) 3 : IPA: EAcAc: H 2 O in molar ratio
= 1: 20: 1: 2, and stir at room temperature for about 1 hour.
A coating liquid for the underlayer film, which is a 2 O 3 sol, was prepared.

【0040】次いで、前記被膜用ガラス基板の片面をマ
スク材でマスキングし、該下地層膜用塗布液槽内にマス
キング付き被膜用ガラス基板を浸漬した後、約1mm/秒
のスピ−ドで引き上げ、マスク材を除去することで、所
謂ディッピング法により前記被膜用ガラス基板の表面に
塗布膜を形成した。
Next, one surface of the glass substrate for coating is masked with a mask material, the glass substrate for coating with masking is immersed in the coating liquid tank for the underlayer film, and then pulled up at a speed of about 1 mm / sec. By removing the mask material, a coating film was formed on the surface of the coating glass substrate by a so-called dipping method.

【0041】続いて、乾燥後、約500 ℃で約10分間焼成
する熱処理をし、透明アモルフアスアルミナ膜を得た。
次に、約100 ℃の熱水中に約0.5 乃至2時間程度浸漬す
る熱水処理をした後、約100 ℃で約10分間程度乾燥し、
さらに約400 ℃で約10分間程度焼成し、特異な表層表面
形状をした透明アルミナ薄膜付きガラス基板を得た。
Then, after drying, a heat treatment of baking at about 500 ° C. for about 10 minutes was performed to obtain a transparent amorphous alumina film.
Next, after soaking in hot water at about 100 ° C for about 0.5 to 2 hours, dry it at about 100 ° C for about 10 minutes,
Further, it was baked at about 400 ° C. for about 10 minutes to obtain a glass substrate with a transparent alumina thin film having a unique surface layer shape.

【0042】得られた該特異な表層表面形状をした透明
アルミナ薄膜付きガラス基板の透明アルミナ薄膜につい
て、下記の評価をした。 〔表層表面の観察〕 イ、走査型電子顕微鏡(SEM )〔日立製作所製 S-4500
、加速電圧5.0kV 、倍率5.0 万倍〕で観察した。その
一部として上面視した表層表面の写真と側断面視した断
面の写真で示す。
The following evaluation was made on the obtained transparent alumina thin film of the glass substrate with the transparent alumina thin film having the peculiar surface layer surface shape. [Observation of surface layer] B. Scanning electron microscope (SEM) [Hitachi S-4500
, Acceleration voltage 5.0 kV, magnification 50,000 times]. As a part thereof, a photograph of the surface of the surface viewed from the top and a photograph of the cross section viewed from the side are shown.

【0043】ロ、走査型プロ−ブ顕微鏡のサイクリック
コンタクトモ−ド原子間力顕微鏡(CC-AFM)〔セイコ−
電子工業(株)製、SPI3700 、1.0 μm四方スキャン〕
で観察した。該アルミナ薄膜の中心線平均粗さを面拡張
した平均面粗さRa’値(nm)と比表面積SRで示す。
Cyclic contact mode of scanning probe microscope Atomic force microscope (CC-AFM) [SEIKO-
Electronic Industry Co., Ltd., SPI3700, 1.0 μm square scan]
Was observed. The average surface roughness Ra ′ value (nm) obtained by surface-expanding the center line average roughness of the alumina thin film and the specific surface area S R are shown.

【0044】すなわち、平均面粗さRa’値(nm)は、JI
S B 0601で定義されている中心線平均粗さRaを、測定面
に対し適用し三次元に拡張したもので、「基準面から指
定面までの偏差の絶対値を平均した値」と表現し、次式
で与えられる。
That is, the average surface roughness Ra 'value (nm) is JI
The center line average roughness Ra defined in SB 0601 is applied to the measurement surface and expanded in three dimensions, and expressed as "the value obtained by averaging the absolute values of the deviations from the reference surface to the designated surface", It is given by the following formula.

【0045】[0045]

【数1】 [Equation 1]

【0046】但し、Ra’:平均面粗さ値(nm)。S0:測
定面が理想的にフッラトであるとした時の面積、|X R
−X L |×|X T −X B |。 F(X 、Y ):測定点(X
、Y )における高さ、X は X座標、Y は Y座標。X R
〜X L :測定面の X座標の範囲。X T 〜X B :測定面の
Y座標の範囲。Z0:測定面内の平均の高さ。
However, Ra ': average surface roughness value (nm). S 0 : Area assuming that the measurement surface is ideally flat, | X R
−X L | × | X T −X B |. F (X, Y): Measuring point (X
, Y), X is the X coordinate, and Y is the Y coordinate. X R
~ X L : Range of X coordinate of measurement surface. X T to X B :
Y coordinate range. Z 0 : average height in the measurement plane.

【0047】また、比表面積(SR)は、SR=S /S
0〔S0:測定面が理想的にフラットであるときの面積。S
:実際の測定面の表面積。〕で求められる。なお、実際
の測定面の表面積は次のようにして求める。
The specific surface area (S R ) is S R = S / S
0 [S 0 : Area when the measurement surface is ideally flat. S
: Actual measurement surface area. ] Is required. The actual surface area of the measurement surface is obtained as follows.

【0048】先ず、最も近接した3つのデ−タ点(A,B,
C )より成る微小三角形に分割し、次いで各微小三角形
の面積△S を、ベクトル積を用いて求める。△S (△AB
C )=|AB×AC|/2〔但し、ABおよびACは各辺の長
さ〕となり、この△S の総和が求める表面積S になる。
First, the three closest data points (A, B,
C) is divided into small triangles, and then the area ΔS of each small triangle is obtained using the vector product. △ S (△ AB
C) = | AB × AC | / 2 (where AB and AC are the lengths of each side), and the total of ΔS is the required surface area S.

【0049】その結果、得られた透明アルミナ薄膜付き
ガラス基板における透明アルミナ膜の表層表面は、5.0
万倍で上面視した表層表面のSEM 写真を図1に示すよう
に、また5.0 万倍の側断面視した断面のSEM 写真を図2
に示すようになり、約50nm乃至100nm 程度の微細でかつ
入り組んだ特異な孔状空隙を醸し出し、約20nm乃至50nm
程度の微小な大きさでランダム状にかつ複雑に入り組ん
だ特異な花弁形状を呈して集合体化したものである花弁
状透明アルミナ膜であった。
As a result, the surface layer surface of the transparent alumina film in the obtained glass substrate with the transparent alumina thin film was 5.0
Figure 1 shows a SEM photograph of the surface of the surface viewed from the top at a magnification of × 10,000, and Figure 2 shows a SEM photograph of the cross section viewed at a magnification of × 50,000.
As shown in Fig. 5, a fine and intricate peculiar pore-like void of about 50 nm to 100 nm is created, and about 20 nm to 50 nm.
It was a petal-like transparent alumina film that was aggregated by exhibiting a unique petal shape that was randomly and intricately complicated in a small size.

【0050】さらに、前記花弁状透明アルミナ膜を斜視
したCC-AFM写真は図3に示すようになり、前記平均面粗
さRa’値(nm)は約26nm程度であり、比表面積(S R
は約1.8 程度であった。
Further, a CC-AFM photograph of the petal-like transparent alumina film in perspective is shown in FIG. 3, and the average surface roughness Ra 'value (nm) is about 26 nm, and the specific surface area (S R )
Was about 1.8.

【0051】また膜厚としては約150nm 程度であった
が、約50nm乃至400nm 程度の範囲で、クラック等の欠陥
の発現もなく、花弁状透明アルミナ膜を得ることができ
た。なお、得られた花弁状透明アルミナ膜付きガラス基
板の花弁状透明アルミナ膜について、例えばその硬さ、
耐熱性、耐候性、可視光透過率や可視光反射率等の光学
特性などを評価したところ、例えば充分透視性に優れ、
優れた反射低減性を示し、その硬さも向上したものとな
り、耐熱性や耐候性もあるものであった。
Although the film thickness was about 150 nm, a petal-like transparent alumina film could be obtained in the range of about 50 nm to 400 nm without the occurrence of defects such as cracks. The obtained petal-shaped transparent alumina film on a glass substrate with a petal-shaped transparent alumina film, for example, its hardness,
When heat resistance, weather resistance, optical characteristics such as visible light transmittance and visible light reflectance were evaluated, for example, excellent transparency was obtained,
It exhibited excellent reflection reduction properties, improved hardness, and also had heat resistance and weather resistance.

【0052】さらに次いで、フッ化ピッチ〔C6F6〕1g
に対し1,1,2-トリクロロ-1,2,2- トリフルオロエタン
〔Cl2FCCClF2、融点:-35℃、沸点:47.6 ℃〕66gを加
え、室温で約24時間攪拌し、撥水膜用塗布液とした。
Next, 1 g of fluorinated pitch [C 6 F 6 ]
To this, 66 g of 1,1,2-trichloro-1,2,2-trifluoroethane [Cl 2 FCCClF 2 , melting point: -35 ° C, boiling point: 47.6 ° C] was added, and the mixture was stirred at room temperature for about 24 hours, and then water repellent. It was used as a film coating liquid.

【0053】前記花弁状透明アルミナ膜付きガラス基板
の非膜面側をマスク材でマスキングし、該撥水膜用塗布
液槽内の撥水膜用塗布液中に該花弁状透明アルミナ膜付
きガラス基板を浸漬し、引き上げスピ−ド約1.96mm/秒
で引き上げ、マスク材を取り剥がすことでなし、ディッ
ピング法により前記花弁状透明アルミナ膜付きガラス基
板の花弁状透明アルミナ薄膜上に被覆するように塗膜を
形成した。
The non-film surface side of the glass substrate with a petal-shaped transparent alumina film is masked with a mask material, and the glass with a petal-shaped transparent alumina film is immersed in the coating liquid for the water-repellent film in the coating liquid tank for the water-repellent film. The substrate is dipped and pulled up at a speed of about 1.96 mm / sec, and the mask material is not peeled off. The glass substrate with the petal-like transparent alumina film is coated by the dipping method on the petal-like transparent alumina thin film. A coating film was formed.

【0054】次いで、該撥水膜を被覆した花弁状透明ア
ルミナ膜付きガラス基板の撥水膜を乾燥し、撥水膜と花
弁状透明アルミナ膜を2層に積層した積層膜付きガラス
基板を得た。
Next, the water-repellent film of the glass substrate with a petal-shaped transparent alumina film coated with the water-repellent film is dried to obtain a glass substrate with a laminated film in which the water-repellent film and the petal-shaped transparent alumina film are laminated in two layers. It was

【0055】得られた積層膜付きガラス基板について、
下記の試験を行った。 〔撥水性試験〕該積層膜の大気中(約25℃)での水(水
滴量約1.7 μl )に対する接触角θ(°)を、接触角計
〔エルマ(株)製〕を用いて測定した。
Regarding the obtained glass substrate with a laminated film,
The following tests were performed. [Water repellency test] The contact angle θ (°) of the laminated film with respect to water (water droplet amount: about 1.7 μl) in the atmosphere (about 25 ° C.) was measured using a contact angle meter (manufactured by Elma Co., Ltd.). .

【0056】その結果は、接触角θが約140 °であり、
高い接触角を比較的長時間保ち、所期の性能を有する撥
水撥油防汚性膜であった。実施例2 実施例1と同様なガラス基板上に、先ず実施例1と同様
の花弁状透明アルミナ膜を成膜した後、撥水膜用塗布液
としてフルオロアルキルシラン〔FAS 〕としてTSL8233
〔東芝シリコン(株)製。C8F17C2H4Si(OCH3)3〕を主成
分とする塗布液を用い、花弁状透明アルミナ膜の上に被
覆成膜した。なお、撥水膜用塗布液の混合割合として
は、モル比で、C8F17C2H4Si(OCH3)3:メチルアルコ−ル
〔MeOH〕:水〔H2O 〕:塩酸〔HCl 〕=1:10:3:0.
0005前後とした。また約200 ℃乃至400 ℃前後で約10分
間前後程度の熱処理をし、布で拭き整えた。
The result is that the contact angle θ is about 140 °,
It was a water- and oil-repellent antifouling film that maintained the high contact angle for a relatively long time and had the desired performance. Example 2 First, a petal-shaped transparent alumina film similar to that in Example 1 was formed on the same glass substrate as in Example 1, and then TSL8233 as fluoroalkylsilane [FAS] was used as a coating liquid for the water repellent film.
[Made by Toshiba Silicon Co., Ltd. C 8 F 17 C 2 H 4 Si (OCH 3) 3 ] using a coating solution mainly composed of, coated deposited on the petal-like transparent alumina film. Incidentally, the mixing ratio of the water-repellent film coating solution, in a molar ratio, C 8 F 17 C 2 H 4 Si (OCH 3) 3: Methyl alcohol - Le [MeOH]: water [H 2 O]: hydrochloride [ HCl] = 1: 10: 3: 0.
It was set to around 0005. In addition, heat treatment was performed at about 200 ° C to 400 ° C for about 10 minutes and wiped with a cloth.

【0057】得られた撥水膜と花弁状透明アルミナ膜を
2層に積層した積層膜付きガラス基板について、実施例
1と同様な試験を行った。その結果は、接触角θが約16
5 °であり、高い接触角を比較的長時間保ち、所期の性
能を有する撥水撥油防汚性膜であった。
The same test as in Example 1 was conducted on the glass substrate with a laminated film obtained by laminating the obtained water-repellent film and the petal-like transparent alumina film in two layers. The result is that the contact angle θ is about 16
It was 5 °, and it was a water- and oil-repellent antifouling film that maintained the high contact angle for a relatively long time and had the desired performance.

【0058】さらに、花弁状透明アルミナ膜を得るため
の熱水処理の処理時間による接触角θへの影響を確認し
たところ、処理時間10分間乃至120 分間の間で、接触角
θが約165 °乃至167 °の範囲にあった。
Furthermore, the influence of the treatment time of the hot water treatment for obtaining the petal-like transparent alumina film on the contact angle θ was confirmed, and the contact angle θ was about 165 ° during the treatment time of 10 to 120 minutes. It was in the range of to 167 °.

【0059】またさらに、前記FAS の熱処理温度による
接触角θへの影響を確認したところ、熱処理温度400 ℃
乃至450 ℃で、接触角θが約166 °乃至155 °の範囲に
あった。
Furthermore, when the influence of the heat treatment temperature of the FAS on the contact angle θ was confirmed, the heat treatment temperature was 400 ° C.
The contact angle θ was in the range of about 166 ° to 155 ° at ˜450 ° C.

【0060】比較例1 硝酸アルミニウム九水和物〔Al(NO3)3・9H2O〕に1,3-ブ
タンジオ−ル〔1,3-Butandiol 〕を加えて約90℃で約5
時間攪拌し20wt%Al(NO3)3・9H2O溶液を塗布液として調
製した。
[0060] Comparative Example 1 aluminum nitrate nonahydrate [Al (NO 3) 3 · 9H 2 O ] 1,3 butanediol - about 5 to about 90 ° C. was added Le [1,3-Butandiol]
After stirring for 20 hours, a 20 wt% Al (NO 3 ) 3 .9H 2 O solution was prepared as a coating solution.

【0061】次いで、前記実施例1と同様の被膜用ガラ
ス基板を、該塗布液槽内の塗布液中に浸漬した後、約0.
4mm /秒の引き上げスピ−ドで引き上げるディッピング
法によって被膜した。続いて約100 ℃で約2時間乾燥し
た後、約500 ℃で約5時間焼成した。
Then, the same glass substrate for coating as in Example 1 was dipped in the coating solution in the coating solution tank, and then, about 0.
It was coated by a dipping method of pulling up with a pulling speed of 4 mm / sec. Then, after drying at about 100 ° C. for about 2 hours, it was baked at about 500 ° C. for about 5 hours.

【0062】次に、約100 ℃の熱水で約2時間の熱水処
理をし、約100 ℃で約30分間の乾燥をした後、約400 ℃
で約10分間焼成した。得られたアルミナ薄膜付きガラス
基板を実施例1と同様のSEM での写真ならびにCC-AFM
による平均面粗さRa' 値(nm)と比表面積SRでもって評
価した。
Next, hot water treatment at about 100 ° C. for about 2 hours is performed, and after drying at about 100 ° C. for about 30 minutes, about 400 ° C.
It was baked for about 10 minutes. The obtained glass substrate with an alumina thin film was photographed by SEM and CC-AFM as in Example 1.
The average surface roughness Ra 'value (nm) and the specific surface area S R were evaluated.

【0063】その結果、3.5 万倍のSEM 写真である図4
に示すようになり、約100nm 乃至200nm 程度の細孔を有
し、約50nm乃至100nm の長さで約5nm程度の幅の繊維状
粒子の集合体でなるスポンジ状の表面形状であった。
As a result, a SEM photograph of 35,000 times magnification is shown in FIG.
As shown in Fig. 5, the surface had a sponge-like shape having pores of about 100 nm to 200 nm, and an aggregate of fibrous particles having a length of about 50 nm to 100 nm and a width of about 5 nm.

【0064】さらに、前記CC-AFM 写真を図5に示すよ
うになり、前記平均面粗さRa' 値(nm)は約15nm程度で
あり、比表面積(S R )は1.3 程度であった。次いで、
該スポンジ状透明アルミナ薄膜付きガラス基板のスポン
ジ状透明アルミナ膜の上に、実施例1と同様の撥水膜を
被覆した。
Further, the CC-AFM photograph is shown in FIG. 5, and the average surface roughness Ra ′ value (nm) is about 15 nm and the specific surface area (S R ) is about 1.3. Then
A water-repellent film similar to that of Example 1 was coated on the sponge-like transparent alumina film of the glass substrate with the sponge-like transparent alumina thin film.

【0065】得られた撥水膜とスポンジ状透明アルミナ
膜を2層に積層した積層膜付きガラス基板について、実
施例1と同様な試験を行った。その結果は、接触角θが
約130 °乃至135 °程度であり、必ずしも所期の超撥水
性能を有する撥水撥油防汚性膜とは到底言い難いもので
あった。
The same test as in Example 1 was conducted on the glass substrate with a laminated film obtained by laminating the water repellent film and the sponge-like transparent alumina film in two layers. As a result, the contact angle θ was about 130 ° to 135 °, and it was difficult to say that the film was a water / oil / oil / fouling resistant film having the desired super water repellency.

【0066】[0066]

【発明の効果】以上前述したように、本発明の撥水撥油
防汚性膜及びその形成法によれば、手軽に容易な膜形成
手段ならびに熱水処理でもって被膜を安価に効率よく得
られ、該被膜において制御した特異な形状の花弁状の集
合体で成す、特異な孔状の空隙を醸し出して成る表層表
面を有しかつ比表面積をより高めるアルミナ酸化物薄膜
をうることができ、例えば撥水性薄膜など各種機能性薄
膜の下地層膜として抜群の含浸性、担持性あるいは拘持
性で埋め込み被覆せしめてその性能を充分発現すること
となる等、格段にその性能を発揮して、光学特性を損な
うことなく、超撥水性とすることができ、密着性、耐熱
性、耐久性ならびに耐候性等に優れるものとなる等、建
築建装用もしくは自動車用窓材をはじめ、各種ガラス物
品、建材物品等において好適に採用できる、有用な撥水
撥油防汚性膜及びその形成法を提供するものである。
As described above, according to the water- and oil-repellent antifouling film and the method for forming the same of the present invention, a film can be obtained inexpensively and efficiently by a simple and easy film forming means and hot water treatment. It is possible to obtain an alumina oxide thin film which has a surface layer surface which is formed of a petal-like aggregate having a uniquely controlled shape in the film, and which has a unique pore-like void, and which further enhances the specific surface area, For example, as an underlayer film of various functional thin films such as a water-repellent thin film, the performance is remarkably exhibited by being fully embedded by being embedded and coated with outstanding impregnating property, carrying property or retaining property. It can be made super water-repellent without impairing the optical properties, and becomes excellent in adhesion, heat resistance, durability, weather resistance, etc., including architectural construction or automobile window materials, various glass articles, For building materials Suitably adopted to have, it is to provide a useful oil-repellent antifouling film and its formation method.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1において、本発明の下地層膜である花
弁状透明アルミナ膜に対し、SEM によって5.0 万倍で上
面視した表層表面の写真を示す図である。
FIG. 1 is a diagram showing a photograph of a surface layer surface of a petal-shaped transparent alumina film, which is a base layer film of the present invention, in Example 1, viewed from the top with a magnification of 50,000 times by SEM.

【図2】実施例1において、本発明の下地層膜である花
弁状透明アルミナ膜に対し、SEM によって5.0 万倍で側
断面視した断面の写真を示す図である。
FIG. 2 is a view showing a photograph of a cross section of a petal-like transparent alumina film, which is a base layer film of the present invention, in Example 1 as viewed sideways by SEM at a magnification of 50000 times.

【図3】実施例1において、本発明の下地層膜である花
弁状透明アルミナ膜に対し、CC-AFM によって斜視した
表層表面の写真を示す図である。
FIG. 3 is a view showing a photograph of a surface layer surface of a petal-like transparent alumina film, which is the underlayer film of the present invention, in a perspective view by CC-AFM in Example 1.

【図4】比較例1において、従来の下地層膜であるスポ
ンジ状透明アルミナ膜に対し、SEM によって3.5 万倍で
上面視した表層表面の写真を示す図である。
FIG. 4 is a view showing a photograph of the surface of the surface of the conventional sponge-like transparent alumina film, which is a conventional underlayer film, in Comparative Example 1 as viewed from above by 35,000 times by SEM.

【図5】比較例1において、従来の下地層膜であるスポ
ンジ状透明アルミナ膜に対し、CC-AFM によって斜視し
た表層表面の写真を示す図である。
FIG. 5 is a view showing a photograph of a surface layer surface of a conventional sponge-like transparent alumina film, which is a conventional underlayer film, taken by CC-AFM in Comparative Example 1.

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C09K 3/18 104 C09K 3/18 104 (72)発明者 忠永 清治 大阪府堺市中百舌鳥町6−998−3 (72)発明者 稲葉 博司 三重県松阪市大口町1510 セントラル硝子 株式会社硝子研究所内 (72)発明者 湯浅 章 三重県松阪市大口町1510 セントラル硝子 株式会社硝子研究所内 (72)発明者 赤松 佳則 三重県松阪市大口町1510 セントラル硝子 株式会社硝子研究所内 (72)発明者 山本 秀樹 三重県松阪市大口町1510 セントラル硝子 株式会社硝子研究所内Continuation of the front page (51) Int.Cl. 6 Identification number Reference number within the agency FI Technical indication location C09K 3/18 104 C09K 3/18 104 (72) Inventor Seiji Tadanaga 6-998 Naka Mozucho, Sakai City, Osaka Prefecture -3 (72) Inventor Hiroshi Inaba 1510 Oguchi-cho, Matsusaka-shi, Mie Central Glass Co., Ltd. Glass Research Institute (72) Inventor Akira Yuasa 1510 Oguchi-cho, Matsusaka-shi, Mie Central Glass Co., Ltd. (72) Inventor Akamatsu Yoshinori 1510 Oguchi-cho, Matsusaka-shi, Mie Central Glass Co., Ltd. Glass Research Institute (72) Inventor Hideki Yamamoto 1510 Oguchi-cho, Matsusaka-shi, Mie Central Glass Co., Ltd. Glass Research Institute

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 基体上に形成した花弁状透明アルミナ膜
と、該花弁状透明アルミナ膜上に被覆した撥水膜とでな
ることを特徴とする撥水撥油防汚性膜。
1. A water- and oil-repellent antifouling film comprising a petal-shaped transparent alumina film formed on a substrate and a water-repellent film coated on the petal-shaped transparent alumina film.
【請求項2】 前記花弁状透明アルミナ膜が、アルミニ
ウムアルコキシドと安定化剤から少なくともなる塗布液
で被膜を乾燥し熱処理して成膜したアモルフアスアルミ
ナ膜を、熱水処理し、乾燥、焼成したことでなる花弁状
の透明アルミナ膜であることを特徴とする請求項1記載
の撥水撥油防汚性膜。
2. An amorphous alumina film formed by drying and heat-treating the petal-like transparent alumina film with a coating liquid comprising at least an aluminum alkoxide and a stabilizer is hot water treated, dried and fired. The water-repellent, oil-repellent, and antifouling film according to claim 1, which is a petal-shaped transparent alumina film.
【請求項3】 前記花弁状透明アルミナ膜が、該花弁状
透明アルミナ膜の中心線平均粗さを面拡張した平均面粗
さRa’値が17nm以上、比表面積SRが1.5 以上であること
を特徴とする請求項1乃至2記載の撥水撥油防汚性膜。
3. The petal-shaped transparent alumina film has an average surface roughness Ra ′ value of 17 nm or more and a specific surface area S R of 1.5 or more obtained by surface-expanding the centerline average roughness of the petal-shaped transparent alumina film. The water- and oil-repellent antifouling film according to claim 1 or 2.
【請求項4】 前記撥水膜が、フッ素含有シラン化合物
からなる塗布液を塗布し、加熱処理した被覆膜であるこ
とを特徴とする請求項1乃至3記載の撥水撥油防汚性
膜。
4. The water-repellent, oil-repellent and antifouling property according to claim 1, wherein the water-repellent film is a coating film obtained by applying a coating liquid containing a fluorine-containing silane compound and heat-treating the coating liquid. film.
【請求項5】 前記フッ素含有シラン化合物が、フルオ
ロカ−ボン基を有するフッ素含有シラン化合物であるこ
とを特徴とする請求項4記載の撥水撥油防汚性膜。
5. The water- and oil-repellent antifouling film according to claim 4, wherein the fluorine-containing silane compound is a fluorine-containing silane compound having a fluorocarbon group.
【請求項6】 前記基体が、透明ガラス基板であること
を特徴とする請求項1乃至5記載の撥水撥油防汚性膜。
6. The water- and oil-repellent antifouling film according to claim 1, wherein the substrate is a transparent glass substrate.
【請求項7】 基体上に、アルミニウムアルコキシドと
安定化剤から少なくともなる塗布液を塗布し、乾燥、焼
成をしてアモルフアスアルミナ膜を成膜し、次いで該ア
モルフアスアルミナ膜に熱水処理をし、乾燥、焼成して
花弁状透明アルミナ膜を形成した後、その上にフッ素含
有シラン化合物からなる塗布液を塗布し、加熱処理して
撥水膜を被覆形成したことを特徴とする撥水撥油防汚性
膜の形成法。
7. A substrate is coated with a coating solution containing at least an aluminum alkoxide and a stabilizer, dried and baked to form an amorphous alumina film, and then the amorphous alumina film is subjected to hot water treatment. The water-repellent film is characterized in that after forming a petal-shaped transparent alumina film by drying, baking, and then applying a coating liquid consisting of a fluorine-containing silane compound on it, and heat-treating it to form a water-repellent film. Method for forming oil-repellent antifouling film.
【請求項8】 前記フッ素含有シラン化合物が、フルオ
ロカ−ボン基を有するフッ素含有シラン化合物であるこ
とを特徴とする請求項7記載の撥水撥油防汚性膜の形成
法。
8. The method of forming a water- and oil-repellent antifouling film according to claim 7, wherein the fluorine-containing silane compound is a fluorine-containing silane compound having a fluorocarbon group.
【請求項9】 前記基体が、透明ガラス基板であること
を特徴とする請求項7乃至8記載の撥水撥油防汚性膜の
形成法。
9. The method for forming a water- and oil-repellent antifouling film according to claim 7, wherein the substrate is a transparent glass substrate.
JP00998296A 1996-01-24 1996-01-24 Super water and oil repellent antifouling film and method for forming the same Expired - Fee Related JP3688042B2 (en)

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