JPH09193022A - Electrodeposition grinding wheel and manufacture thereof - Google Patents
Electrodeposition grinding wheel and manufacture thereofInfo
- Publication number
- JPH09193022A JPH09193022A JP311896A JP311896A JPH09193022A JP H09193022 A JPH09193022 A JP H09193022A JP 311896 A JP311896 A JP 311896A JP 311896 A JP311896 A JP 311896A JP H09193022 A JPH09193022 A JP H09193022A
- Authority
- JP
- Japan
- Prior art keywords
- electrodeposition
- abrasive grains
- grinding
- grindstone
- abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【0001】[0001]
【発明の実施の形態】本発明は、超硬質砥粒(CBN,
ダイヤモンド等)を用いた電着砥石およびその製造方法
に関する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention is directed to ultra-hard abrasive grains (CBN,
The present invention relates to an electrodeposition grindstone using diamond and the like and a method for manufacturing the same.
【0002】[0002]
【従来の技術】従来の電着砥石として、CBN(窒化ボ
ロン立方晶、Hv:5000)電着砥石の構成とその製
造方法及び研削加工中の概要について述べる(図9〜図
13)。ここで、これらの図面中、符号1は台金、2は
電着層、3は研摩砥粒(CBN砥粒)、4は電着金属、
5は混入異物、6は研削液、7は被研削材及び8は切粉
を各々図示する。2. Description of the Related Art The structure of a CBN (boron nitride cubic crystal, Hv: 5000) electrodeposition grindstone as a conventional electrodeposition grindstone, its manufacturing method, and an outline during grinding are described (FIGS. 9 to 13). Here, in these drawings, reference numeral 1 is a base metal, 2 is an electrodeposition layer, 3 is an abrasive grain (CBN abrasive grain), 4 is an electrodeposited metal,
Reference numeral 5 is a mixed foreign material, 6 is a grinding liquid, 7 is a material to be ground, and 8 is a cutting powder.
【0003】<電着砥石の構成>電着砥石は、砥石ディ
スク外周が所定形状に成形された台金1上にCBN砥粒
3と電着金属4(通常ニッケルが多用される)とで構成
される電着層2を形成して構成される(図9及び図1
0)。この電着層2の成形は、従来製法の制約から図1
1に示す如く、砥石研削面上の全域に亙って成形されて
いる。<Structure of Electrodeposition Grinding Wheel> An electrodeposition grinding wheel is composed of a CBN abrasive grain 3 and an electrodeposition metal 4 (usually nickel is often used) on a base metal 1 whose outer circumference is formed into a predetermined shape. Electrodeposition layer 2 is formed (see FIGS. 9 and 1).
0). This electrodeposition layer 2 is formed as shown in FIG.
As shown in FIG. 1, it is formed over the entire area of the grindstone grinding surface.
【0004】<電着砥石の従来製法(図13)>図13
に、従来の電着砥石を製作する砥粒沈降式電着法を示
す。図13中、符号9は電解槽、10は電解液、11は
電動攪拌プロペラ、12はモータ、13はNi電極及び
14は直流電源を各々図示する。図13に示すように、
電解槽9中の電解液10(Ni電着の場合には、硫酸ニ
ッケル(NiSO4 )を主成分とした水溶液)中に所定
粒径の研摩砥粒(CBN砥粒)3を投入し、電動攪拌プ
ロペラ11で均一に浮遊させる。一方、一定速度で回転
させた砥石台金1aには直流電源14の陰極を結線する
と共に、電着金属(Ni)の供給を目的としたNi電極
13には直流電源14の陽極を結線し、通電して、台金
1a上に沈降・沈着したCBN砥粒層の周囲を電着金属
で捕搏する方法である。<Conventional manufacturing method of electrodeposition grindstone (FIG. 13)> FIG.
Fig. 1 shows an abrasive grain precipitation type electrodeposition method for producing a conventional electrodeposition grindstone. In FIG. 13, reference numeral 9 is an electrolytic cell, 10 is an electrolytic solution, 11 is an electric stirring propeller, 12 is a motor, 13 is a Ni electrode, and 14 is a DC power source. As shown in FIG.
Electrolytic solution 10 in electrolytic bath 9 (in the case of Ni electrodeposition, an aqueous solution containing nickel sulfate (NiSO 4 ) as a main component) is charged with abrasive abrasive grains (CBN abrasive grains) 3 having a predetermined particle diameter, and the electric power is supplied. The stirrer propeller 11 is used to uniformly suspend the suspension. On the other hand, the cathode of the DC power supply 14 is connected to the whetstone base 1a rotated at a constant speed, and the anode of the DC power supply 14 is connected to the Ni electrode 13 for the purpose of supplying electrodeposited metal (Ni). This is a method of energizing to capture the periphery of the CBN abrasive grain layer settled / deposited on the base metal 1a with an electrodeposited metal.
【0005】<従来電着砥石の研削加工中の状況(図1
0,図12)>図12に示すように、被研削材(ワー
ク)7を上記得られたCBN電着層2で、送り量Δhで
研削加工を実施中に、図10に示す如く砥粒3,3間に
切粉8が喰い込み目詰りしている。又、電着金属4の層
は、砥粒3に比べて硬度が低い為長期使用中に摩耗し、
著しい場合には、砥粒3の脱落を生じることがある。
又、潤滑・冷却作用を目的とする研削液6は研削中に被
削材7とCBN電着層2との研削界面に浸透し難い。<Conditions during grinding of a conventional electrodeposition grindstone (Fig. 1
0, FIG. 12)> As shown in FIG. 12, while the material to be ground (workpiece) 7 is being ground with the CBN electrodeposition layer 2 obtained above at the feed amount Δh, as shown in FIG. Chips 8 bit between 3 and 3 and are clogged. Also, the layer of electrodeposited metal 4 has a lower hardness than the abrasive grains 3, and therefore wears during long-term use.
In extreme cases, the abrasive grains 3 may fall off.
Further, the grinding fluid 6 for the purpose of lubrication and cooling does not easily penetrate into the grinding interface between the work material 7 and the CBN electrodeposition layer 2 during grinding.
【0006】[0006]
【発明が解決しようとする課題】以下に、従来技術固有
の課題について述べる。The problems peculiar to the prior art will be described below.
【0007】 砥粒電着層2に任意の微細パターンを
描くことが出来ない。図13に示す如く、従来方式では
粒子沈降式電着を行うため、全面に砥粒電着層2を形成
することとなる(図11参照)。マスキングによりパタ
ーンを描くことも可能であるが、粗大なパターンしか描
けず、かつ、多大な工数を要する。An arbitrary fine pattern cannot be drawn on the abrasive grain electrodeposition layer 2. As shown in FIG. 13, since the particle settling type electrodeposition is performed in the conventional method, the abrasive grain electrodeposition layer 2 is formed on the entire surface (see FIG. 11). It is possible to draw a pattern by masking, but only a coarse pattern can be drawn, and a great number of man-hours are required.
【0008】 電着可能な台金形状に制約がある。図
13に示す如く、砥石台金1aの形状では台金の回転に
より、かなり均一な砥粒電着層を形成できるが、砥石台
金1bの姿勢では片面のみとなり、砥石台金1c姿勢で
は両面とも不可となる。又、図9(b)に示すような山
型の台金1に対しては、山頂部へのCBN砥粒の沈着は
少なく、裾野部への砥粒沈着は厚目となり不均一な砥粒
電着層2となる。これは、粒子沈降式電着法を用いるこ
とに起因している。There are restrictions on the shape of the base metal that can be electrodeposited. As shown in FIG. 13, in the shape of the whetstone base metal 1a, a fairly uniform abrasive grain electrodeposition layer can be formed by the rotation of the base metal, but the whetstone base metal 1b has only one side, and the whetstone base metal 1c has both sides. It becomes impossible. In addition, with respect to the mountain-shaped base metal 1 as shown in FIG. 9B, the CBN abrasive grains are less deposited on the crests, and the abrasive grains are deposited thicker on the skirts, resulting in uneven grains. It becomes the electrodeposition layer 2. This is due to the use of the particle sedimentation type electrodeposition method.
【0009】 高価な砥粒ロスが多く、製造コストが
高価となる。従来の製造方法は図13に示すように、粒
子沈降式電着法である為、砥粒サイズの交替やスラッジ
15の除去などの電着槽9の清掃時に、電解液10交
換、メッシング等で砥石ロスを発生する。又、電解液1
0中で、所定の砥粒密度(単位体積中の砥粒個数)を必
要とする為に、台金への電着に必要な砥粒量の数十倍以
上の砥粒を電着槽内に投入する必要がある。従って、砥
粒のイニシャルコストが高価となる。There are many expensive abrasive grain losses, and the manufacturing cost becomes high. As shown in FIG. 13, the conventional manufacturing method is a particle sedimentation type electrodeposition method. Therefore, when cleaning the electrodeposition tank 9 such as changing the abrasive grain size or removing sludge 15, the electrolytic solution 10 may be replaced or meshed. Grindstone loss occurs. Also, electrolyte 1
In order to require a predetermined abrasive grain density (the number of abrasive grains in a unit volume), the number of abrasive grains required for electrodeposition on the base metal is several tens of times or more in the electrodeposition tank. Need to throw in. Therefore, the initial cost of the abrasive grains becomes high.
【0010】 生産性が低い。台金上への砥粒の沈
降、沈着と共に電着を行う為電解液10の対流,流速,
被処理物形状に左右される乱流の有無,強弱等により施
工条件の確定に時間を要し、生産性が低下しやすい。Productivity is low. The convection and flow velocity of the electrolyte solution 10 are used for electrodeposition as well as sedimentation and deposition of abrasive grains on the base metal.
It takes time to determine the construction conditions depending on the presence or absence of turbulence depending on the shape of the object to be processed, its strength, etc., and productivity tends to decrease.
【0011】 砥粒分布が不均一となる。電解液の攪
拌・対流中で、砥粒を浮遊懸濁、沈降させるので、広範
囲粒径の砥粒が沈着することとなり、電着砥粒径の不織
布が均一となる。すなわち、図10中に示すように、砥
粒3に大小あり、これを回避するため、粒径範囲の区分
毎に電着槽を設けることとなるが、設備費が高価とな
る。また、上記でも述べた如く、攪拌される電解液1
0は、各種形状・寸法の台金表面上で乱流を生じる結
果、流速分布が不均一となり、台金表面上での沈着砥粒
の分布が不均一となる。The abrasive grain distribution becomes non-uniform. Since the abrasive grains are suspended and settled by stirring and convection of the electrolytic solution, the abrasive grains having a wide range of grain sizes are deposited, and the nonwoven fabric having the electrodeposition abrasive grain size becomes uniform. That is, as shown in FIG. 10, the abrasive grains 3 are large and small, and in order to avoid this, an electrodeposition tank is provided for each division of the grain size range, but the equipment cost becomes expensive. In addition, as described above, the stirred electrolyte solution 1
When 0, turbulent flow is generated on the surface of the base metal of various shapes and sizes, resulting in non-uniform flow velocity distribution and non-uniform distribution of deposited abrasive grains on the surface of the base metal.
【0012】 品質劣化を生じ易い。攪拌、対流させ
る電解液10中では図13に示す如く、沈澱スラッジ1
5中の異物5が舞上り、図10に示す如く異物5も電着
される。Quality deterioration easily occurs. As shown in FIG. 13, the precipitated sludge 1 was stirred in the electrolyte solution 10 which was stirred and convected.
The foreign matter 5 in 5 rises, and the foreign matter 5 is also electrodeposited as shown in FIG.
【0013】 寿命が短い。異物5(塵,錆など)は
砥粒3よりも柔らかく、磨滅,脱落しやすく、電着金属
4が変形(恰も、歯槽膿漏の如く)して、正常な砥粒3
も脱落する。又図12に示す如く、研削中に研削液6が
被削物7との界面へ供給され難く、目詰まり,過熱等に
より、砥粒脱落を招来し、寿命低下となり易い。更に砥
粒捕搏は電着金属単体であり、研削中に磨滅しやすく砥
粒脱落を招き易い。The life is short. The foreign matter 5 (dust, rust, etc.) is softer than the abrasive grains 3 and is easily worn and removed, and the electrodeposited metal 4 is deformed (likely, alveolar pyorrhea) and the normal abrasive grains 3 are removed.
Will also fall out. Further, as shown in FIG. 12, it is difficult to supply the grinding liquid 6 to the interface with the work 7 during grinding, and clogging, overheating, and the like may cause the abrasive grains to fall off and shorten the life. Further, the abrasive grain catcher is an electrodeposited metal simple substance, and is easily worn during grinding and easily causes the abrasive grains to fall off.
【0014】[0014]
【課題を解決するための手段】 前記課題を解決する本発明に係る電着砥石は、台
金,砥粒及び砥粒を台金上に固搏する電着金属層とから
成る電着砥石において、研削作用を有する砥石の最外表
面に、所定のパターンで砥粒を有する電着領域群と、砥
粒を有しない窪み領域群とからなる電着層を形成してな
ることを特徴とするものである。Means for Solving the Problems An electrodeposition grindstone according to the present invention for solving the above-mentioned problems is an electrodeposition grindstone including a base metal, abrasive grains, and an electrodeposition metal layer for solidly lapping the abrasive grains on the base metal. The invention is characterized in that an outermost surface of a grindstone having a grinding action is formed with an electrodeposition layer consisting of an electrodeposition region group having abrasive grains in a predetermined pattern and a recessed region group not having abrasive grains. It is a thing.
【0015】 上記の電着砥石において、上記砥粒
を有する電着領域群が、研削を目的とする所定粒径の砥
粒の間隙に、微粉砥粒を介在させ、該微粉砥粒により砥
粒群を電着層に固搏することを特徴とするものである。In the above electrodeposition grindstone, the electrodeposition region group having the above-mentioned abrasive grains interposes fine abrasive grains in a gap between the abrasive grains having a predetermined particle diameter for the purpose of grinding, and the fine abrasive grains cause the abrasive grains to move. It is characterized in that the group is solidly beaten on the electrodeposition layer.
【0016】 上記の電着砥石の製造方法は、電解
液に対して透過性を有する薄膜体の表面上に、予め電解
液に対して溶解性と導電性を有する粘着剤を塗布し、そ
の上に、所定パターンで砥粒を粘着させた転写体を準備
し、その転写体から所定形状・寸法に切出した型材を、
砥石台金上に貼付した後、電解槽中に浸漬すると共に、
直流電源の陰極を台金に結線すると共に、陽極を電解槽
中の電着金属用電極に結線して電着を行うことを特徴と
するものである。In the above method for producing an electrodeposition grindstone, a pressure-sensitive adhesive having solubility and conductivity in an electrolytic solution is applied in advance on the surface of a thin film body having permeability to the electrolytic solution, and then applied. In addition, prepare a transfer body with abrasive grains adhered in a predetermined pattern, and cut the mold material cut out from the transfer body into a predetermined shape and size,
After sticking on the whetstone base metal, dip it in the electrolytic bath,
The cathode of the DC power source is connected to the base metal, and the anode is connected to the electrode for electrodeposited metal in the electrolytic cell to perform electrodeposition.
【0017】 上記の製造方法は、電解液に対して
透過性を有する薄膜体の表面上に、予め電解液に対して
溶解性と導電性を有する粘着剤を、所定パターンに印刷
塗布し、研削用砥粒を所定パターン上のみに付着させる
と共に、上記粘着剤の希釈液中に微細砥粒を懸濁させた
媒体を塗布してなる転写体を準備し、その転写体から所
定形状・寸法に切出した型材を砥石台金上に貼付した
後、電解槽中に浸漬すると共に、直流電源の陰極を台金
に結線すると共に、陽極を電解槽中の電着金属用電極に
結線して電着を行うことを特徴とするものである。In the above-mentioned manufacturing method, a pressure-sensitive adhesive having solubility and conductivity in the electrolyte solution is printed and applied in a predetermined pattern on the surface of the thin film body having permeability to the electrolyte solution in advance and ground. Prepare a transfer body in which the abrasive grains for adhesion are adhered only on a predetermined pattern, and a medium in which fine abrasive grains are suspended in the diluent of the adhesive is applied, and the transfer body is formed into a predetermined shape and size. After sticking the cut mold material on the grinding stone base metal, soak it in the electrolytic bath, connect the cathode of the DC power supply to the base metal, and connect the anode to the electrode for electrodeposited metal in the electrolytic bath and electrodeposition It is characterized by performing.
【0018】[0018]
【発明の実施の形態】以下、本発明の実施の形態を説明
する。Embodiments of the present invention will be described below.
【0019】[実施形態−1] 電着砥石の構成とし
て、研削作用を有する砥石最外表面に於いて、図1及び
図2のパターンに示す如く、砥石21の表面に、砥粒を
有する電着領域群22と、砥粒を有しない窪み領域群2
3とで構成される電着層24を設けるようにしている。
上記電着砥石はその断面を示す図3(a),(b)に示
すように、砥粒25群が電着金属26によって保持され
た電着領域群22が高く形成されると共に、砥粒を有し
ない電着金属26のみの窪み領域群23が低く形成され
ており、砥石全体においては凹凸形状を形成している。[Embodiment 1] As a constitution of an electrodeposition grindstone, in the outermost surface of the grindstone having a grinding action, as shown in the patterns of FIG. 1 and FIG. Adhesion region group 22 and recessed region group 2 having no abrasive grains
An electrodeposition layer 24 composed of 3 and 3 is provided.
As shown in FIGS. 3 (a) and 3 (b) showing the cross section of the electrodeposition grindstone, the electrodeposition region group 22 in which the group of abrasive grains 25 is held by the electrodeposited metal 26 is formed high and the abrasive grains are The recessed region group 23 formed only of the electrodeposited metal 26 having no groove is formed low, and the whetstone as a whole has an uneven shape.
【0020】[作用−1] 上記手段1により下記の作
用を生じる(図1,図2及び図3参照)。図1に示す如
く、研削を目的とする砥粒25を含有した砥粒を有する
電着領域群22は、砥粒を含有しない窪み領域群23よ
りも厚く突出することとなる。従って、電着層24には
砥粒を含有しない窪み領域群23によってポケット部を
形成することとなるので、被削材27の研削中に、研削
液28を包含しながら、回転研削することが出来る。一
方、ポケット内の水圧は、砥石の高速回転力と送り、切
込みにより高圧,開放(大気圧)の脈動を繰返す。従っ
て、砥粒,電着層,台金,被削面に対して冷却効果が高
まり、かつ、砥粒間に目詰まりしかけた切削は、図2
(a)〜(f)に示す各種のパターンを適宜採用するこ
とにより、高圧噴出される研削水により、噴射除去され
る。又、冷却効果により台金と電着層間の温度差、即ち
熱膨張差が低減して、電着層の剥離が阻止される。[Operation-1] The above-mentioned operation 1 causes the following operation (see FIGS. 1, 2 and 3). As shown in FIG. 1, the electrodeposition region group 22 having abrasive grains containing the abrasive grains 25 for grinding protrudes thicker than the recessed region group 23 containing no abrasive grains. Therefore, since the pocket portion is formed in the electrodeposition layer 24 by the recessed region group 23 that does not contain abrasive grains, it is possible to perform rotary grinding while grinding the work material 27 while the grinding liquid 28 is contained therein. I can. On the other hand, the water pressure in the pocket is sent with the high-speed rotational force of the grindstone, and the pulsation of high pressure and open (atmospheric pressure) is repeated due to the cutting. Therefore, the effect of cooling the abrasive grains, the electrodeposition layer, the base metal, and the surface to be cut is enhanced, and the cutting that is clogged between the abrasive grains is as shown in FIG.
By appropriately adopting the various patterns shown in (a) to (f), they are jetted and removed by the grinding water jetted at high pressure. Further, the cooling effect reduces the temperature difference between the base metal and the electrodeposition layer, that is, the difference in thermal expansion, and prevents the electrodeposition layer from peeling.
【0021】なお、上記図2(a)〜(f)に示した電
着層24の各種パターンは一例であり、本発明はこれに
限定されるものではない。The various patterns of the electrodeposition layer 24 shown in FIGS. 2 (a) to 2 (f) above are examples, and the present invention is not limited thereto.
【0022】[実施形態−2] 電着砥石として、上記
実施手段1の電着砥石の於いて、図3(c),(d)に
示す如く少なくとも、研削を目的とする砥粒25を有す
る電着領域群22の砥粒群25の粒間間隙を、電着金属
26内に微粒砥粒29を介在させて砥粒25群を固搏さ
せるようにしている。[Embodiment 2] As the electrodeposition grindstone, in the electrodeposition grindstone of the above-mentioned first embodiment, at least abrasive grains 25 for the purpose of grinding are provided as shown in FIGS. In the intergranular gap of the abrasive grain group 25 of the electrodeposition region group 22, the fine grain abrasive grains 29 are interposed in the electrodeposited metal 26 to solidify the abrasive grain group 25.
【0023】[作用−2] 上記手段2とすることによ
り、図3(c),(d)に示すように、研削砥粒25間
の電着金属26からなる層中に研削砥粒25よりも著し
く微細な砥粒(超硬質粒子)29を混入した電着層を形
成することにより、上述した図3(a),(b)の電着
層よりも硬質となり耐摩耗性が向上し、研削砥粒25の
脱落を阻止できる。[Operation-2] By adopting the above means 2, as shown in FIGS. 3 (c) and 3 (d), the abrasive grains 25 are added to the layer formed of the electrodeposited metal 26 between the abrasive grains 25. By forming an electrodeposition layer containing extremely fine abrasive grains (ultra-hard particles) 29, the electrodeposition layer becomes harder than the electrodeposition layer of FIGS. 3 (a) and 3 (b) described above, and wear resistance is improved. It is possible to prevent the abrasive grains 25 from falling off.
【0024】[実施形態−3] 上記電着パターンの作
成方法として、予め転写方式、即ち薄膜シート上に、粘
着剤を介して超硬質砥粒を上記のパターンで粘着させ、
必要に応じて粒子間空隙を粒着剤もしくは、超硬質砥粒
微粒子を含有する粘着剤で補充すること。この超硬質砥
粒付薄膜シートを台金に添付し、薄膜シート上の超硬質
砥粒パターンを電着により台金上に転写、捕搏するよう
にしている。[Embodiment-3] As a method for producing the above electrodeposition pattern, a transfer method is used in advance, that is, ultra-hard abrasive grains are adhered in the above pattern on a thin film sheet via an adhesive,
If necessary, the interparticle voids should be replenished with a graining agent or an adhesive containing ultra-hard abrasive fine particles. This thin film sheet with ultra-hard abrasive grains is attached to a base metal, and the ultra-hard abrasive grain pattern on the thin film sheet is transferred and picked up on the base metal by electrodeposition.
【0025】[作用−3] 手段3による作用につい
て、図4(a)〜(d)及び図5(a),(b)に基づ
き説明する。 薄膜シート30上に予め図2に示す所定の微細パタ
ーンに対応する粘着剤31aを印刷方式などにより塗布
することで、研削砥粒25の存在する領域22と存在し
ない領域23を有する薄膜シートを形成できる(図4
(a),(b)参照)。 で得たパターン状の砥粒付薄膜シート30上に微
細粒子29を懸濁した粘着剤溶液31aを、例えばスプ
レーガン等により噴霧することにより、研削粒子25の
間隙に微細粒子29を含有する粘着剤31bで充填した
パターン状の砥粒付薄膜シートを形成できる(図4
(c)参照)。 で得たパターン状砥粒付薄膜シートを砥石台金2
1上に粘付け(図4(d)参照)、後述する電着槽内に
おいて(図5(a)及び図6参照)、上記粘着剤31
(31a,31b)を電着金属26で置換することによ
り、台金21上に、研削砥粒25と微細粒子29を固搏
できる(図5(b)参照)。[Action-3] The action of the means 3 will be described with reference to FIGS. 4 (a) to 4 (d) and FIGS. 5 (a) and 5 (b). An adhesive 31a corresponding to a predetermined fine pattern shown in FIG. 2 is applied on the thin film sheet 30 in advance by a printing method or the like to form a thin film sheet having a region 22 in which the abrasive grains 25 exist and a region 23 in which the abrasive grains 25 do not exist. Yes (Figure 4
(See (a) and (b)). The adhesive solution 31a in which the fine particles 29 are suspended is sprayed by a spray gun or the like on the patterned thin film sheet with abrasive grains 30 obtained in step 1, so that the fine particles 29 are contained in the gaps between the grinding particles 25. A patterned thin film sheet with abrasive grains filled with the agent 31b can be formed (FIG. 4).
(C)). The thin film sheet with the patterned abrasive grains obtained in step 2
1 (see FIG. 4 (d)), and in the electrodeposition tank described later (see FIGS. 5 (a) and 6), the adhesive 31
By substituting (31a, 31b) with the electrodeposited metal 26, the grinding abrasive grains 25 and the fine particles 29 can be solidly beaten on the base metal 21 (see FIG. 5B).
【0026】[実施形態−4] 上記薄膜シート材30
として、電解液に対して浸潤、透過性を有する材質、例
えば、布地,不織布,和紙,フェルト,濾紙などを用い
ること。また粘着剤として、電解液に対して、溶解性と
導電性を有するものである。[Embodiment-4] The thin film sheet material 30
As the material, a material that is infiltrating and permeable to the electrolytic solution, for example, cloth, non-woven fabric, Japanese paper, felt, filter paper, etc. should be used. Moreover, it has solubility and conductivity in an electrolytic solution as an adhesive.
【0027】[作用−4] 上記手段4により、先ず薄
膜シート材30として、布,不織布,和紙,濾紙,フェ
ルト等を用いることにより、電解液が浸潤、透過するの
で、溶解質即ち電解液中の電着金属のイオンや溶解した
粘着剤成分は通過し、研削砥粒25、並びに微細粒子2
9は通過しえない。また、粘着剤31は、電解液に対し
て、溶解性と導電性を有しているので、薄膜シート30
を通過して溶出すると共に、電着金属26と置換される
ことになる(図5(a),(b)参照)。[Operation-4] By means of the above means 4, cloth, non-woven fabric, Japanese paper, filter paper, felt or the like is used as the thin film sheet material 30, and the electrolytic solution infiltrates and permeates through it. The ions of the electrodeposited metal and the dissolved pressure sensitive adhesive component pass through and pass through the grinding abrasive grains 25 and the fine particles 2
9 cannot pass. Further, since the adhesive 31 has solubility and conductivity in the electrolytic solution, the thin film sheet 30
And elutes and is replaced with the electrodeposited metal 26 (see FIGS. 5A and 5B).
【0028】[0028]
【実施例】本発明法に基づく電着砥石の製作の実施例を
以下に示す。EXAMPLE An example of producing an electrodeposition grindstone based on the method of the present invention will be described below.
【0029】[実施例−1] 電着砥石製作に必要な下記部材を準備した。 1 砥粒…研削砥粒:CBN,粒径:120±10μm 2 薄膜シート…化織不織布、0.3t ×50.0w mmの長
尺テープで、その片面に予め下記[3]の粘着剤を予め
全面塗布してロールとしておく(図7,符号47参
照)。 3 粘着剤…アミロデキストリン(糊精)とニガリ(M
gSO4 ,MgCl2 ,NaCl,KClなどの成分)
を使用した。 4 砥粒層パターン…図2(f)を使用した。 5 砥石台金…材質:JIS G4014 SCM415,HRc:54 に焼
入、焼戻した。 形状:図9 (a),(b)に示す山形砥石 寸法:最大外径150φmm,巾:15w mm 6 CBN砥粒付薄膜シートの製作…図7による。[Example-1] The following members necessary for producing an electrodeposition grindstone were prepared. 1 Abrasive grain ... Grinding grain: CBN, grain size: 120 ± 10 μm 2 Thin film sheet ... Synthetic woven non-woven fabric, long tape of 0.3 t × 5.0 w mm, with one side of the following [3] adhesive in advance The agent is applied over the entire surface in advance to form a roll (see reference numeral 47 in FIG. 7). 3 Adhesive ... Amilodextrin (paste) and bittern (M
gSO 4 , MgCl 2 , NaCl, KCl, etc.)
It was used. 4 Abrasive grain layer pattern: FIG. 2 (f) was used. 5 Grindstone base metal… Material: Quenched and tempered to JIS G4014 SCM415, HRc: 54. Shape: Angle grindstone shown in Fig. 9 (a), (b) Dimensions: Maximum outer diameter 150φ mm, Width: 15 w mm 6 Fabrication of thin film sheet with 6 CBN abrasive grains.
【0030】図7は本実施例に用いるパターン状砥粒付
薄膜シートを製作する方法例を示す。同図中、符号41
はローラ、42はエンドレスベルト、43は蝕刻溝、4
4はホッパーノズル、45はドクターブレード、46,
48,49はロール、47は片面粘着剤付薄膜シート、
50は離型紙、51は粘着剤がパターン状に印刷された
薄膜シート巻体を各々図示する。図7に示すように、先
ず厚さ0.8t mm×52.0w mmのSUS304L のステンレス薄
板に、図4(f)に示すパターンで0.15mm深さの蝕刻
(フォトエッチング技術による)を形成後エンドレスベ
ルト42に形成し、ロール41,41に巻装して駆動
し、ホッパーノズル44から研削砥粒25を供給し、ド
クターブレード45で、上記蝕刻溝43のみに該砥粒2
5を充填する。次に、押圧ゴムロール46を介して供給
された片面粘着剤付薄膜シート47の粘着剤上に砥粒を
転写した。次にロール49を介して、離型紙50を転写
砥粒面に介挿してスプール状51に卷回して、巻体51
とした。FIG. 7 shows an example of a method for producing the thin film sheet with patterned abrasive grains used in this embodiment. In the figure, reference numeral 41
Is a roller, 42 is an endless belt, 43 is an etching groove, 4
4 is a hopper nozzle, 45 is a doctor blade, 46,
48 and 49 are rolls, 47 is a thin film sheet with a single-sided adhesive,
Reference numeral 50 is a release paper, and 51 is a thin film sheet roll on which an adhesive is printed in a pattern. As shown in FIG. 7, first, a stainless steel thin plate of SUS304L having a thickness of 0.8 t mm × 52.0 w mm is etched by a pattern shown in FIG. 4 (f) to a depth of 0.15 mm (by photo-etching technique). After the formation, the endless belt 42 is formed, wound around the rolls 41, 41 and driven, the grinding abrasive grains 25 are supplied from the hopper nozzle 44, and the abrasive grains 2 are applied only to the etching groove 43 by the doctor blade 45.
Fill 5 Next, the abrasive grains were transferred onto the adhesive of the single-sided adhesive-attached thin film sheet 47 supplied via the pressing rubber roll 46. Next, the release paper 50 is inserted on the transfer abrasive grain surface via the roll 49, and wound around the spool 51 to form a roll 51.
And
【0031】 で得たCBN砥粒付薄膜シートを所
定寸法に切り、台金上に取付け、電着砥石を製作・完成
させた(図4,5,図6参照)。The thin film sheet with CBN abrasive grains obtained in the above was cut into a predetermined size and mounted on a base metal to manufacture and complete an electrodeposition grindstone (see FIGS. 4, 5 and 6).
【0032】1 先ず、図9に示す如く、砥石台金21
の外周面上に、図4(c)で得た研削砥粒25付薄膜シ
ート(尚、実施例−1では、補強微粒子29は除いたも
のを用いた。)を反転して、台金面上に研削砥粒25の
頂部を接触させ接着剤で固定する(図4(d)参照)。 2 続いて、図6に示す如く、電解槽9の電解液(純水
中にNiSO4 (73%),MgSO4 (7%),Mg
Cl2 (7%),ホウ酸(7%),酒石酸ソーダ(6
%)を添付した水溶液)10中へ浸漬し、直流電源14
の陰極に結線し、陽極には純Ni電極13を結線し、電
着を行い、粘着剤31の溶出がNi2+イオンである電着
金属26と置換されて(図5(a))、研削砥粒25が
Ni金属の電着金属26で形成される層により固搏され
る(図5(b)参照)。1 First, as shown in FIG.
4C, the thin film sheet with the abrasive grains 25 obtained in FIG. 4C (in addition to the fact that the reinforcing fine particles 29 were removed in Example 1 was used), the base metal surface was reversed. The top of the grinding abrasive grain 25 is brought into contact with the top and fixed with an adhesive (see FIG. 4D). 2 Then, as shown in FIG. 6, the electrolytic solution (NiSO 4 (73%), MgSO 4 (7%), Mg
Cl 2 (7%), boric acid (7%), sodium tartrate (6
%), And the DC power supply 14
, The pure Ni electrode 13 is connected to the anode and electrodeposition is performed, and the elution of the adhesive 31 is replaced with the electrodeposited metal 26 that is Ni 2+ ions (FIG. 5 (a)). The grinding abrasive grains 25 are solidified by the layer formed of the electrodeposited metal 26 of Ni metal (see FIG. 5B).
【0033】[実施例−2] 電着砥石用部材としては、下記の通りである。 1 砥粒…研削砥粒:(CBN,粒径:120±10μ
m)に加えて、補強用微粒子(CBN,粒径:15μm
以下)も併用。 2 薄膜シート…実施例−1に同じ。 3 粘着剤…研削砥粒用:アミロデキストロン(粘精)
とニガリ(MgSO4,MgCl2 ,NaCl,KCl
など)の混合物で高粘度を有す。 補強微粒子用:研削砥粒用粘着剤をアルコールで希釈し
たもの。 4 砥粒層パターン…図2(c)。 5 砥石台金…実施例−1に同じ。 6 CBN砥粒付薄膜シートの製作…図8による。[Example-2] The members for electrodeposition grindstone are as follows. 1 Abrasive grain ... Grinding grain: (CBN, grain size: 120 ± 10μ
m) in addition to the reinforcing fine particles (CBN, particle size: 15 μm)
The following) are also used together. 2 Thin film sheet ... Same as in Example-1. 3 Adhesive ... For grinding grains: Amilodextron
And bittern (MgSO 4 , MgCl 2 , NaCl, KCl
It has a high viscosity. For reinforcing fine particles: Adhesive for grinding abrasive grains diluted with alcohol. 4 Abrasive layer pattern ... Figure 2 (c). 5 Whetstone base metal ... Same as in Example-1. 6 Fabrication of thin film sheet with CBN abrasive grains.
【0034】図8は本実施例に用いるパターン状砥粒付
薄膜シートを製作する方法の他の一例を示す。同図中、
符号52は粘着剤がパターン状に印刷された薄膜シート
巻体、53はパターン状粘着体、54,55はゴムロー
ル、56はブラシ、57はスプレーガン、58は希釈粘
着剤、59は押圧ゴムロール、60は離型シート巻体、
61は薄膜シート巻体及び62は回収砥粒を各々図示す
る。FIG. 8 shows another example of the method for manufacturing the thin film sheet with patterned abrasive grains used in this embodiment. In the figure,
Reference numeral 52 is a thin film sheet roll on which an adhesive is printed in a pattern, 53 is a patterned adhesive, 54 and 55 are rubber rolls, 56 is a brush, 57 is a spray gun, 58 is a dilution adhesive, 59 is a pressing rubber roll, 60 is a release sheet winding body,
Reference numeral 61 is a thin film sheet roll, and 62 is a recovered abrasive grain.
【0035】先ず、 2 の薄膜シートからのシートの片
面に研削砥粒用粘着剤53を予め印刷転写方式で 4 の
パターンで印刷した巻体52を準備する。続いて、一対
のテフロンコートゴムロール54,55で繰出し、粘着
剤のあるシート面上にホッパーノズル44から研削砥粒
25を供給し、余剰砥粒をブラシ56で除去し、パター
ン印刷された粘着剤上のみに、一層の緻密な研削砥粒層
を形成させた後、スプレーガン57から補強用微粒子を
含む希釈粘着剤58を噴射させる。次に一対の押圧ゴム
ロール59,59を介して、離型シート巻体60からの
離形テープを介挿させ卷回して、CBN砥粒は薄膜シー
ト巻体61を得た。First, there is prepared a roll 52 in which a pressure sensitive adhesive 53 for grinding abrasive grains is printed in advance in a pattern of 4 by a print transfer method on one surface of a sheet from the thin film sheet of 2. Then, a pair of Teflon-coated rubber rolls 54 and 55 are fed out, the grinding abrasive grains 25 are supplied from the hopper nozzle 44 onto the sheet surface having the adhesive, the excess abrasive grains are removed by the brush 56, and the pattern-printed adhesive is used. After forming a denser layer of grinding abrasive grains only on the upper side, a diluting adhesive 58 containing reinforcing fine particles is sprayed from a spray gun 57. Next, the release tape from the release sheet winding body 60 was inserted through the pair of pressing rubber rolls 59, 59 and wound to obtain a thin film sheet winding body 61 of the CBN abrasive grains.
【0036】 で得たCBN砥粒付薄膜シート巻体
61を所定寸法に切断し、台金上に取付け、図2(c)
のパターンを有する電着砥石を製作・完成させた。手順
(図4,5参照)、装置(図6参照)は、実施例−1と
同様である。The CBN abrasive grain-attached thin film sheet roll 61 obtained in step 1 is cut to a predetermined size and mounted on a base metal, as shown in FIG.
We manufactured and completed an electrodeposition grindstone with the pattern. The procedure (see FIGS. 4 and 5) and the apparatus (see FIG. 6) are the same as in Example-1.
【0037】[0037]
[効果−1] 砥石電着層に任意かつ微細のパターンを
描くことができる。従来の砥粒沈降式電着法と異なり、
予め手段3で述べた如く薄膜シート上の粘着剤を介し
て、研削砥粒群を転着(図7,図8参照)させるので任
意かつ微細パターンの電着砥粒層を形成できる。[Effect-1] An arbitrary and fine pattern can be drawn on the whetstone electrodeposition layer. Unlike conventional abrasive grain precipitation type electrodeposition method,
Since the group of grinding abrasive grains is transferred (see FIGS. 7 and 8) via the adhesive on the thin film sheet as described in the means 3 in advance, an electrodeposited abrasive grain layer having an arbitrary and fine pattern can be formed.
【0038】[効果−2] 電着可能な台金形状に制約
がない。電着前に、予め、台金砥着面に、パターン状の
砥粒付着薄膜シートを貼付けた後、即ち台金砥着面に必
要なパターンで必要な砥粒を貼付けてあるので、電解槽
中で、重力や局所対流や乱流による影響を受けない。こ
のことは台形形状や姿勢に何ら影響を受けないので、制
約がなくなる。[Effect-2] There is no restriction on the shape of the base metal that can be electrodeposited. Before electrodeposition, after attaching the pattern-shaped abrasive grain-adhering thin film sheet to the base metal polishing surface in advance, that is, since the necessary abrasive grains are attached to the base metal polishing surface in the required pattern, the electrolytic bath Inside, it is not affected by gravity, local convection or turbulence. This is not affected by the trapezoidal shape or posture, so there is no restriction.
【0039】[効果−3] 高価な砥粒ロスがなく、製
造コストが安価になる。砥粒沈降式電着法で生じた砥粒
ロスは、本発明法では、台金砥着面の必要な部位に必要
最少限の砥粒を電着させるため、ロスを生じない。更
に、図7,図8に示す如く、砥粒付薄膜シートの製法
は、乾式であり、回収砥粒62は、安易かつロスなく回
収できる。[Effect-3] There is no expensive abrasive grain loss and the manufacturing cost is low. In the method of the present invention, the loss of the abrasive grains generated by the abrasive grain sedimentation type electrodeposition method does not occur because the minimum required amount of abrasive grains is electrodeposited on a necessary portion of the base metal polishing surface. Further, as shown in FIGS. 7 and 8, the method of manufacturing the thin film sheet with abrasive grains is dry, and the recovered abrasive grains 62 can be easily recovered without loss.
【0040】[効果−4] 高い生産性が得られる。上
記「効果−2」でも述べた如く、台金砥着面では、薄膜
シートを介して砥粒が保持されているので、電着中に重
力や局所対流或いは乱流による外乱がない。従って、被
処理物を高速回転させ高電流で電着が可能となり、生産
性を向上できる。又、電解液の交換液中の砥粒回収作業
などの付帯作業が激減し、装置稼動率をアップできるの
で生産性を向上できる。[Effect-4] High productivity can be obtained. As described in "Effect-2" above, since the abrasive grains are held on the base metal polishing surface via the thin film sheet, there is no disturbance due to gravity, local convection or turbulence during electrodeposition. Therefore, the object to be processed can be rotated at a high speed and electrodeposition can be performed with a high current, and the productivity can be improved. Further, incidental work such as work for collecting abrasive grains in the exchange liquid of the electrolytic solution is drastically reduced, and the operation rate of the apparatus can be increased, so that productivity can be improved.
【0041】[効果−5] 砥粒分布が均一である。予
め砥粒径を厳選して、砥粒付着薄膜シートを製作してい
るので、粒径分布が均一となる。[Effect-5] The distribution of abrasive grains is uniform. Since the abrasive grain adhesion thin film sheet is manufactured by carefully selecting the abrasive grain sizes in advance, the grain size distribution becomes uniform.
【0042】[効果−6] 品質劣化が少ない。従来の
砥粒沈降式電着法では、電解液中の異物,粉塵,錆など
も電着層に混入したが、本発明法では、薄膜シートがフ
ィルター作用を有しているので、電解液中に異物が多数
浮遊していても何ら影響を受けない。[Effect-6] Quality deterioration is small. In the conventional abrasive grain precipitation type electrodeposition method, foreign matters, dust, rust, etc. in the electrolytic solution were also mixed in the electrodeposition layer, but in the method of the present invention, since the thin film sheet has a filtering function, Even if a lot of foreign substances are floating around, there is no effect.
【0043】[効果−7] 寿命が長い。効果−6で述
べた如く電着層中に砥粒以外の軟質異物(粉塵,錆な
ど)がないこと。図2のパターンにより、図1に示す如
くポケット部に浸入した高圧研削液の噴出流により過
熱,目詰まりを阻止できるので長寿命化が図れる。又研
削砥粒間の電着層内に補強用微粒子を混入させることに
より電着金属層の磨滅防止できるので更に長寿命化が図
れる。[Effect-7] The life is long. As described in Effect-6, there should be no soft foreign matter (dust, rust, etc.) other than abrasive grains in the electrodeposition layer. With the pattern of FIG. 2, overheating and clogging can be prevented by the jet flow of the high-pressure grinding fluid that has penetrated into the pocket portion as shown in FIG. 1, so that the life can be extended. Further, by mixing the reinforcing fine particles into the electrodeposition layer between the abrasive grains, it is possible to prevent the electrodeposition metal layer from being abraded, so that the life can be further extended.
【図1】本発明により製作した電着砥石を用いて研削加
工を実施中の状況を示す図。FIG. 1 is a diagram showing a situation in which a grinding process is being performed using an electrodeposition grindstone manufactured according to the present invention.
【図2】本発明電着砥石に用いる砥粒含有電着層のパタ
ーン例を示す図。FIG. 2 is a view showing a pattern example of an abrasive grain-containing electrodeposition layer used in the electrodeposition grindstone of the present invention.
【図3】本発明による電着砥石の構成を示す図。FIG. 3 is a diagram showing a configuration of an electrodeposition grindstone according to the present invention.
【図4】本発明の電着砥石を製作する手順を示す図。FIG. 4 is a diagram showing a procedure for producing an electrodeposition grindstone of the present invention.
【図5】本発明の電着砥石を製作する手順(図4の続
き)を示す図。FIG. 5 is a view showing a procedure (sequel to FIG. 4) of manufacturing the electrodeposition grindstone of the present invention.
【図6】本発明法を用いてパターン付電着砥石を製作す
る電着法を示す図。FIG. 6 is a view showing an electrodeposition method for producing a patterned electrodeposition grindstone using the method of the present invention.
【図7】本発明に用いるパターン状砥粒付薄膜シートを
製作する方法例を示す図。FIG. 7 is a diagram showing an example of a method for manufacturing a thin film sheet with patterned abrasive grains used in the present invention.
【図8】本発明に用いるパターン状砥粒付薄膜シートを
製作する方法の他例を示す図。FIG. 8 is a diagram showing another example of a method for producing a thin film sheet with patterned abrasive grains used in the present invention.
【図9】従来の電着砥石の形状を示す図。FIG. 9 is a view showing the shape of a conventional electrodeposition grindstone.
【図10】従来の電着砥石の構成を示す図。FIG. 10 is a diagram showing a configuration of a conventional electrodeposition grindstone.
【図11】従来の電着砥石の形状を示す図。FIG. 11 is a view showing the shape of a conventional electrodeposition grindstone.
【図12】従来の電着砥石を用いて研削加工を実施中の
状況を示す図。FIG. 12 is a view showing a situation in which a grinding process is being performed using a conventional electrodeposition grindstone.
【図13】従来の電着砥石を製作する砥粒沈降式電着法
を示す図。FIG. 13 is a view showing an abrasive grain precipitation type electrodeposition method for producing a conventional electrodeposition grindstone.
1 台金 2 電着層 3 研摩砥粒 4 電着金属 5 混入異物 6 研削液 8 被削材の目詰まり 10 電解液 14 電極 21 砥石 22 研磨砥粒を含有する電着層 23 研磨砥粒を含有しない電着層 29 微細粒子 1 base metal 2 electrodeposited layer 3 abrasive grain 4 electrodeposited metal 5 mixed foreign matter 6 grinding fluid 8 clogging of work material 10 electrolyte 14 electrode 21 grindstone 22 electrodeposited layer containing abrasive grain 23 polishing abrasive grain Electrodeposition layer not containing 29 Fine particles
Claims (4)
電着金属層とから成る電着砥石において、研削作用を有
する砥石の最外表面に、所定のパターンで砥粒を有する
電着領域群と、砥粒を有しない窪み領域群とからなる電
着層を形成してなることを特徴とする電着砥石。1. An electrodeposition grindstone comprising a base metal, abrasive grains and an electrodeposited metal layer for solidly lapping the abrasive grains on the base metal, wherein the outermost surface of the grindstone having a grinding action has a predetermined pattern of the abrasive grains. An electrodeposition grindstone formed by forming an electrodeposition layer consisting of an electrodeposition region group having a groove and a recessed region group having no abrasive grains.
粒径の砥粒の間隙に、微粉砥粒を介在させ、該微粉砥粒
により砥粒群を電着層に固搏することを特徴とする電着
砥石。2. The electro-deposition grindstone according to claim 1, wherein the electro-deposition region group having the abrasive grains has fine abrasive grains interposed in a gap between the abrasive grains having a predetermined grain size for grinding. An electrodeposition grindstone, characterized in that an abrasive grain group is solidly beaten on the electrodeposition layer by grains.
表面上に、予め電解液に対して溶解性と導電性を有する
粘着剤を塗布し、その上に、所定パターンで砥粒を粘着
させた転写体を準備し、その転写体から所定形状・寸法
に切出した型材を、砥石台金上に貼付した後、電解槽中
に浸漬すると共に、直流電源の陰極を台金に結線すると
共に、陽極を電解槽中の電着金属用電極に結線して電着
を行うことを特徴とする電着砥石の製造方法。3. An adhesive having solubility and conductivity in an electrolytic solution is previously coated on the surface of a thin film having permeability to the electrolytic solution, and abrasive grains are formed on the adhesive in a predetermined pattern. Prepare a transfer material that has been adhered, attach the mold material cut out from the transfer material to a predetermined shape and size on the grinding stone base metal, immerse it in the electrolytic bath, and connect the cathode of the DC power supply to the base metal. At the same time, the method for producing an electrodeposition grindstone is characterized in that the anode is connected to the electrode for electrodeposited metal in the electrolytic cell to perform electrodeposition.
表面上に、予め電解液に対して溶解性と導電性を有する
粘着剤を、所定パターンに印刷塗布し、研削用砥粒を所
定パターン上のみに付着させると共に、上記粘着剤の希
釈液中に微細砥粒を懸濁させた媒体を塗布してなる転写
体を準備し、その転写体から所定形状・寸法に切出した
型材を砥石台金上に貼付した後、電解槽中に浸漬すると
共に、直流電源の陰極を台金に結線すると共に、陽極を
電解槽中の電着金属用電極に結線して電着を行うことを
特徴とする電着砥石の製造方法。4. An abrasive for grinding is coated on a surface of a thin film having permeability to an electrolytic solution with an adhesive having solubility and conductivity to the electrolytic solution in a predetermined pattern by printing. Prepare a transfer body that adheres only on a predetermined pattern and applies a medium in which fine abrasive grains are suspended in a diluting solution of the above-mentioned adhesive and prepare a mold material cut out from the transfer body into a predetermined shape and size. After sticking on the grinding stone base metal, dip it in the electrolytic bath, connect the cathode of the DC power supply to the base metal, and connect the anode to the electrode for electrodeposited metal in the electrolytic bath for electrodeposition. A method for manufacturing a characteristic electrodeposition grindstone.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP311896A JPH09193022A (en) | 1996-01-11 | 1996-01-11 | Electrodeposition grinding wheel and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP311896A JPH09193022A (en) | 1996-01-11 | 1996-01-11 | Electrodeposition grinding wheel and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09193022A true JPH09193022A (en) | 1997-07-29 |
Family
ID=11548449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP311896A Withdrawn JPH09193022A (en) | 1996-01-11 | 1996-01-11 | Electrodeposition grinding wheel and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09193022A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11300621A (en) * | 1998-04-16 | 1999-11-02 | Toyoda Van Moppes Kk | Grinding wheel with extra-abrasive grain having dimples dotted on outer peripheral surface and manufacture thereof |
US9333627B2 (en) | 2011-09-02 | 2016-05-10 | Mitsubishi Heavy Industries Machine Tool Co., Ltd. | Grindstone tool and method for manufacturing same |
-
1996
- 1996-01-11 JP JP311896A patent/JPH09193022A/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11300621A (en) * | 1998-04-16 | 1999-11-02 | Toyoda Van Moppes Kk | Grinding wheel with extra-abrasive grain having dimples dotted on outer peripheral surface and manufacture thereof |
US9333627B2 (en) | 2011-09-02 | 2016-05-10 | Mitsubishi Heavy Industries Machine Tool Co., Ltd. | Grindstone tool and method for manufacturing same |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6537140B1 (en) | Patterned abrasive tools | |
JP3605927B2 (en) | Method for reclaiming wafer or substrate material | |
US20150290771A1 (en) | Abrasive article and method for making the same | |
WO1998014307A1 (en) | Superabrasive tool and method of its manufacture | |
KR19990006859A (en) | Dressing tool for polishing cloth surface and manufacturing method thereof | |
US4288233A (en) | Abrasive pads for lens lapping tools | |
JP2003511255A (en) | Conditioner for polishing pad and method of manufacturing the same | |
DE102010013520A1 (en) | Process for double-sided polishing of a semiconductor wafer | |
WO2017119342A1 (en) | Polishing material | |
JPH09193022A (en) | Electrodeposition grinding wheel and manufacture thereof | |
JP2009136926A (en) | Conditioner and conditioning method | |
US5782679A (en) | Metal abrasive belt and method of making same | |
JPH10193269A (en) | Electrodeposition tool and manufacture therefor | |
JP3020434B2 (en) | Electroplated wheel and manufacturing method thereof | |
JP4354482B2 (en) | Truing tool | |
JP2004358640A (en) | Method for manufacturing electroplated tool and electroplated tool | |
JPS6334069A (en) | Grindstone | |
JP4142221B2 (en) | Conditioner for CMP equipment | |
JPH0771789B2 (en) | Whetstone | |
JP4281253B2 (en) | Electrodeposition whetstone, manufacturing apparatus and manufacturing method thereof | |
JP2009072876A (en) | Polishing pad manufacturing method | |
JP3086670B2 (en) | Super abrasive whetstone | |
JPH01188266A (en) | Electrolytic dressing for electric conductive grindstone and device thereof | |
JPH10329029A (en) | Electrodepositioning super grain grinding wheel | |
JP2004306220A (en) | Chemical mechanical polishing conditioner |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20030401 |