JPH09171945A - Manufacture of electrode foil for aluminum electrolytic capacitor - Google Patents

Manufacture of electrode foil for aluminum electrolytic capacitor

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Publication number
JPH09171945A
JPH09171945A JP33298195A JP33298195A JPH09171945A JP H09171945 A JPH09171945 A JP H09171945A JP 33298195 A JP33298195 A JP 33298195A JP 33298195 A JP33298195 A JP 33298195A JP H09171945 A JPH09171945 A JP H09171945A
Authority
JP
Japan
Prior art keywords
etching
foil
aluminum foil
aluminum
electrolytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33298195A
Other languages
Japanese (ja)
Inventor
Yoichi Harada
洋一 原田
Takehiko Nakahara
武彦 中原
Yoshihiro Watanabe
善博 渡辺
Koichi Kojima
浩一 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP33298195A priority Critical patent/JPH09171945A/en
Publication of JPH09171945A publication Critical patent/JPH09171945A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain the stabilized electrode foil having excellent quality by performing the DC electrolytic etching of an aluminum foil at the front stage, performing the dipping processing of the aluminum foil at the post stage, thereafter performing AC electrolytic etching, and forming the constant initial pit, which becomes the starting point of the AC electrolytic etching at the post stage. SOLUTION: At the front stage, a DC current is made to flow through an aluminum foil in etching liquid, and the DC electrolytic etching of the aluminum foil is performed. Thereafter, the aluminum foil is dipped into the etching liquid, and the dipping processing of the aluminum foil is performed. Then, the current density of the AC electrolytic etching is gradually increased. Thereafter, the etching is performed at the constant current density of about 0.3A/cm<2> . Then, the etched etching foil undergoes formation in the aqueous solution of oxalic acid, and the electrode foil is manufactured. Thus, the electrode foil, wherein electrostatic capacitance is not lowered and the stable quality is provided, can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、各種電子機器に利
用されるアルミ電解コンデンサ用電極箔の製造方法に関
するもので、特に低圧用陽極箔のエッチング技術に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electrode foil for an aluminum electrolytic capacitor used in various electronic devices, and more particularly to a technique for etching a low voltage anode foil.

【0002】[0002]

【従来の技術】電子機器の小形化、高信頼性化を目指し
てアルミ電解コンデンサの小形化、高信頼性化が進めら
れている。このためには電極箔の高容量化、高信頼性化
が必要である。
2. Description of the Related Art Miniaturization and high reliability of aluminum electrolytic capacitors have been promoted with the aim of downsizing electronic devices and achieving high reliability. For this purpose, it is necessary to increase the capacity and reliability of the electrode foil.

【0003】一般にアルミ電解コンデンサ用電極箔は、
アルミ箔を電気化学的、または化学的にエッチングして
その表面積を拡大し、その表面に絶縁性酸化物皮膜を形
成して製造する。アルミ箔のエッチング方法は、塩素イ
オンを含む水溶液中に燐酸、硫酸、硝酸等を添加した電
解液中で、アルミ箔の両側に配置された電極間に交流電
流を流してエッチングする交流電解エッチングと、塩素
イオンを含む水溶液中に燐酸、硫酸、硝酸等を添加した
電解液中で、アルミ箔を正極とし、かつアルミ箔の両側
に配置された電極を負極として直流電流を流してエッチ
ングする直流電解エッチングに大別される。
Generally, an electrode foil for an aluminum electrolytic capacitor is
The aluminum foil is electrochemically or chemically etched to increase its surface area, and an insulating oxide film is formed on the surface to manufacture. The aluminum foil is etched by alternating current electrolytic etching in which an alternating current is passed between electrodes arranged on both sides of the aluminum foil in an electrolytic solution prepared by adding phosphoric acid, sulfuric acid, nitric acid, etc. to an aqueous solution containing chlorine ions. DC electrolysis in which an aluminum foil is used as a positive electrode and electrodes on both sides of the aluminum foil are used as negative electrodes in an electrolytic solution containing phosphoric acid, sulfuric acid, nitric acid, etc. Broadly divided into etching.

【0004】直流電解エッチングでエッチングしたアル
ミ箔では筒状のピットが形成されるもので、直流密度、
液組成、エッチング液温度等によりピットの深さ、径等
を制御することができる。ピット径は交流電解エッチン
グのピットに比べて比較的大きくでき、主として中圧
用、高圧用陽極箔として使用される。一方、交流電解エ
ッチングでエッチングしたアルミ箔では、アルミ箔が電
解液に対して電位的に正、負の状態を繰り返し、正の状
態では皮膜の弱い場所を起点としてアルミニウムが溶解
し、負の状態ではアルミニウムの表面に皮膜を形成す
る。このため、交流電解エッチングでエッチングしたア
ルミ箔では径が小さい海綿状のピットが形成されるの
で、主として低圧用陽極箔として用いられる。
Aluminum foil etched by direct current electrolytic etching has cylindrical pits formed thereon.
The pit depth, diameter, etc. can be controlled by the liquid composition, the temperature of the etching liquid, and the like. The pit diameter can be made relatively large as compared with the pits for AC electrolytic etching, and is mainly used as an intermediate foil for medium and high pressure. On the other hand, in the case of aluminum foil etched by AC electrolytic etching, the aluminum foil repeats positive and negative potentials with respect to the electrolytic solution.In the positive state, the aluminum melts starting from the weak spot of the film and is in a negative state. Then, a film is formed on the surface of aluminum. For this reason, sponge-like pits having a small diameter are formed in the aluminum foil etched by AC electrolytic etching, so that the aluminum foil is mainly used as a low voltage anode foil.

【0005】低圧用陽極箔の製造方法の一つとして、ア
ルミ箔表面の自然酸化皮膜を除去する作用を有し、かつ
表面に保護膜を形成する作用を有するエッチング液にア
ルミ箔を浸漬処理し、続いて交流電解エッチングの電流
密度を徐々に立ち上げてエッチングを開始する方法が特
開昭63−299309号公報に示されている。この方
法は、アルミ箔をエッチング液中に一定時間浸漬するこ
とにより、アルミ箔表面の不要酸化皮膜を除去するとと
もに、表面保護のために新たな皮膜を形成し、そして交
流電解エッチングの電流密度を徐々に上げながらエッチ
ングを開始し、皮膜の欠陥をピット発生起点として、そ
の起点を持続させてピットを内部に成長させ、表面をで
きるだけ溶解しないようにしてエッチングを行うもので
ある。
As one of the methods for producing a low voltage anode foil, the aluminum foil is dipped in an etching solution that has a function of removing a natural oxide film on the surface of the aluminum foil and a function of forming a protective film on the surface. Then, a method of gradually raising the current density of alternating current electrolytic etching to start etching is disclosed in JP-A-63-299309. This method removes the unnecessary oxide film on the surface of the aluminum foil by immersing the aluminum foil in the etching solution for a certain period of time, and forms a new film to protect the surface of the aluminum foil. Etching is started while gradually raising it, and the defect of the film is used as a starting point of pit generation, and the starting point is maintained to grow the pits inside, and etching is performed so that the surface is not dissolved as much as possible.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記し
た従来のアルミ箔のエッチング方法では、アルミ原箔の
焼鈍条件や圧延条件によってアルミ原箔表面の酸化皮膜
の厚さ、圧延油の量等が変化するもので、この変化によ
り、不要皮膜の除去が均一でない場合があるとともに、
新たに形成される皮膜も不均一となるものである。その
ため、交流電解エッチングを行った場合には、開始点の
分布が不均一になって、ピットが内部に進行せず表面の
みの溶解となり、その結果、表面積が拡大せず、静電容
量が低下するという問題点があった。
However, in the above-mentioned conventional method for etching an aluminum foil, the thickness of the oxide film on the surface of the aluminum foil, the amount of rolling oil, etc. are changed depending on the annealing conditions and rolling conditions of the aluminum foil. Due to this change, the removal of the unnecessary film may not be uniform, and
The newly formed film is also non-uniform. Therefore, when AC electrolytic etching is performed, the distribution of starting points becomes non-uniform, and the pits do not progress inward and only the surface is dissolved, and as a result, the surface area does not increase and the capacitance decreases. There was a problem to do.

【0007】本発明は上記従来の問題点を解決するもの
で、アルミ原箔の特性変化があっても、後段の交流電解
エッチングの開始点となる一定の初期ピットを作ること
ができて、安定した品質を有する電極箔を製造すること
ができるアルミ電解コンデンサ用電極箔の製造方法を提
供することを目的とするものである。
The present invention solves the above-mentioned conventional problems. Even if the characteristics of the original aluminum foil are changed, it is possible to form a constant initial pit that is the starting point of the AC electrolytic etching in the subsequent stage, and it is stable. It is an object of the present invention to provide a method for producing an electrode foil for an aluminum electrolytic capacitor, which is capable of producing an electrode foil having the above quality.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に本発明のアルミ電解コンデンサ用電極箔の製造方法
は、塩素イオンを含むエッチング液中でアルミ箔を電解
エッチングするアルミ電解コンデンサ用電極箔の製造方
法において、前段でアルミ箔の直流電解エッチングを行
い、後段で前記アルミ箔の浸漬処理をした後、交流電解
エッチングの電流密度を徐々に上昇させ、その後一定電
流密度でエッチングを行うようにしたもので、この製造
方法によれば、アルミ原箔の特性変化があっても、後段
の交流電解エッチングの開始点となる一定の初期ピット
を作ることができて安定した品質を有する電極箔を製造
することができるものである。
In order to achieve the above object, a method for manufacturing an electrode foil for an aluminum electrolytic capacitor according to the present invention is an electrode foil for an aluminum electrolytic capacitor in which an aluminum foil is electrolytically etched in an etching solution containing chlorine ions. In the manufacturing method, the direct current electrolytic etching of the aluminum foil is performed in the first stage, and after the aluminum foil is subjected to the immersion treatment in the second stage, the current density of the alternating current electrolytic etching is gradually increased, and then the etching is performed at a constant current density. According to this manufacturing method, even if there is a change in the characteristics of the aluminum original foil, it is possible to form a constant initial pit that will be the starting point of the subsequent AC electrolytic etching, and to obtain an electrode foil with stable quality. It can be manufactured.

【0009】[0009]

【発明の実施の形態】本発明の請求項1に記載の発明
は、塩素イオンを含むエッチング液中でアルミ箔を電解
エッチングするアルミ電解コンデンサ用電極箔の製造方
法において、前段でアルミ箔の直流電解エッチングを行
い、後段で前記アルミ箔の浸漬処理をした後、交流電解
エッチングの電流密度を徐々に上昇させ、その後一定電
流密度でエッチングを行うようにしたものであり、前段
の直流電解エッチングにより、アルミ箔の表面に、後段
の交流電解エッチングの開始点となるべき適当数の初期
ピットを作る。この初期ピットの密度、深さ、径等は液
組成、電流密度等の直流電解エッチングの条件により制
御することができるため、アルミ原箔の表面の酸化皮膜
の厚さ、圧延油の量等が変化したとしても、常に一定の
初期ピットを作ることができる。また、後段の交流電解
エッチングにより先の初期ピットを開始点としてピット
を内部に進行させることができるもので、この場合、エ
ッチング液中に、硫酸、硝酸、蓚酸等のアルミ箔表面に
皮膜を作る性質を有する物質を添加しておくと、アルミ
箔表面に作られた皮膜によって交流電解エッチング中に
アルミ箔の表面に新たな開始点が作られるのを阻害する
ことができるため、直流電解エッチングで生成されたピ
ットの先端部からピットは成長することになり、そして
このピットは内部に進むため、表面溶解は減少し、これ
により静電容量の低下を防ぐことができるものである。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is a method for producing an electrode foil for an aluminum electrolytic capacitor, which comprises electrolytically etching an aluminum foil in an etching solution containing chlorine ions. De-etching is performed, and after the aluminum foil is immersed in the latter stage, the current density of alternating current electrolytic etching is gradually increased, and then etching is performed at a constant current density. , Make an appropriate number of initial pits on the surface of the aluminum foil to be the starting points for the subsequent AC electrolytic etching. Since the density, depth, diameter, etc. of the initial pits can be controlled by the conditions of DC electrolytic etching such as liquid composition and current density, the thickness of the oxide film on the surface of the aluminum original foil, the amount of rolling oil, etc. Even if it changes, a constant initial pit can always be created. In addition, it is possible to advance the pits internally from the initial pits as starting points by the subsequent AC electrolytic etching. In this case, a film is formed on the aluminum foil surface of sulfuric acid, nitric acid, oxalic acid, etc. in the etching solution. By adding a substance having properties, it is possible to prevent a new starting point from being created on the surface of the aluminum foil during AC electrolytic etching by the film formed on the surface of the aluminum foil. The pits will grow from the tips of the generated pits, and the pits will progress inward, so that surface dissolution is reduced, and thus the reduction in capacitance can be prevented.

【0010】以下、本発明の一実施の形態について、従
来の方法と比較しながら説明する。焼鈍条件の異なるア
ルミ箔20ロットについて、本発明の方法と従来の方法
でそれぞれエッチングを行った。 (1) 本発明の方法(直流電解エッチング+交流電解
エッチング) (A)エッチング条件 直流電解エッチング アルミニウム濃度 9g/L 塩酸濃度 7% 硫酸濃度 20% 液温 80℃ 電流密度 0.4A/cm2 交流電解エッチング アルミニウム濃度 7g/L 塩酸濃度 15% 液温 30℃ 浸漬時間 100秒 初期立ち上げ時間 15秒 電流密度 0.3A/cm2 (B)化成 蓚酸水溶液中 22V (2) 従来の方法(交流電解エッチング) (A)エッチング条件 交流電解エッチング アルミニウム濃度 7g/L 塩酸濃度 15% 液温 30℃ 浸漬時間 100秒 初期立ち上げ時間 15秒 電流密度 0.3A/cm2 (B)化成 蓚酸水溶液中 22V 本発明の方法は、前段で、アルミニウム濃度9g/L、
塩酸濃度7%、硫酸濃度20%の水溶液で、かつ液温が
80℃のエッチング液中で、アルミ箔に電流密度0.4
A/cm2の直流電流を流してアルミ箔の直流電解エッチ
ングを行い、その後、後段で、アルミニウム濃度7g/
L、塩酸濃度15%の水溶液で、かつ液温が30℃のエ
ッチング液に前記アルミ箔を100秒間浸漬してアルミ
箔の浸漬処理を行った後、交流電解エッチングの電流密
度を初期立ち上げ時間15秒の間に徐々に上昇させ、そ
の後一定電流密度0.3A/cm2でエッチングを行うよ
うにしたものである。
An embodiment of the present invention will be described below in comparison with a conventional method. 20 lots of aluminum foil having different annealing conditions were etched by the method of the present invention and the conventional method. (1) Method of the present invention (DC electrolytic etching + AC electrolytic etching) (A) Etching conditions DC electrolytic etching Aluminum concentration 9 g / L Hydrochloric acid concentration 7% Sulfuric acid concentration 20% Liquid temperature 80 ° C. Current density 0.4 A / cm 2 AC Electrolytic etching Aluminum concentration 7g / L Hydrochloric acid concentration 15% Liquid temperature 30 ° C Immersion time 100 seconds Initial startup time 15 seconds Current density 0.3A / cm 2 (B) Chemical conversion in oxalic acid aqueous solution 22V (2) Conventional method (AC electrolysis Etching) (A) Etching conditions AC electrolytic etching Aluminum concentration 7g / L Hydrochloric acid concentration 15% Liquid temperature 30 ° C Immersion time 100 seconds Initial start-up time 15 seconds Current density 0.3A / cm 2 (B) Chemical conversion in oxalic acid aqueous solution 22V The method of the invention comprises an aluminum concentration of 9 g / L,
An aqueous solution of hydrochloric acid concentration 7% and sulfuric acid concentration 20% and a current density of 0.4 on an aluminum foil in an etching solution with a liquid temperature of 80 ° C.
A direct current of A / cm 2 is applied to perform direct current electrolytic etching of aluminum foil, and then aluminum concentration is 7 g /
L, an aqueous solution of hydrochloric acid concentration of 15%, and the aluminum foil is immersed in an etching solution having a liquid temperature of 30 ° C. for 100 seconds to immerse the aluminum foil. The temperature is gradually raised in 15 seconds, and then etching is performed at a constant current density of 0.3 A / cm 2 .

【0011】そして上記のようにしてエッチングされた
エッチング箔は蓚酸水溶液中で22V化成を行って電極
箔を製造した。
The etching foil etched as described above was subjected to 22 V chemical conversion in an oxalic acid aqueous solution to produce an electrode foil.

【0012】従来の方法は、アルミニウム濃度7g/
L、塩酸濃度15%の水溶液で、かつ液温が30℃のエ
ッチング液にアルミ箔を100秒間浸漬してアルミ箔の
浸漬処理を行った後、交流電解エッチングの電流密度を
初期立ち上げ時間15秒の間に徐々に上昇させながらエ
ッチングを行うようにしたものである。
According to the conventional method, the aluminum concentration is 7 g /
After the aluminum foil is immersed in an etching solution having an L content and a hydrochloric acid concentration of 15% and the solution temperature is 30 ° C. for 100 seconds to dip the aluminum foil, the current density of AC electrolytic etching is initially set up for 15 seconds. Etching is performed while gradually increasing during a second.

【0013】そして上記のようにしてエッチングされた
エッチング箔は蓚酸水溶液中で22V化成を行って電極
箔を製造した。
The etching foil etched as described above was subjected to 22 V chemical conversion in an oxalic acid aqueous solution to produce an electrode foil.

【0014】本発明の方法により製造された電極箔と、
従来の方法により製造された電極箔の静電容量を測定し
た結果を、静電容量範囲とロット数の関係として(表
1)に示す。
An electrode foil produced by the method of the present invention,
The result of measuring the capacitance of the electrode foil manufactured by the conventional method is shown in Table 1 as a relation between the capacitance range and the number of lots.

【0015】[0015]

【表1】 [Table 1]

【0016】(表1)から明らかなように、本発明の方
法によれば、アルミ原箔の特性変化、すなわちアルミ原
箔の焼鈍条件や圧延条件によってアルミ原箔の表面の酸
化皮膜の厚さ、圧延油の量等が変化するという特性変化
があっても、前段の直流電解エッチングにより、アルミ
箔の表面に、後段の交流電解エッチングの開始点となる
一定の初期ピットを作ることができるため、従来の方法
に比べて、20ロットとも静電容量が高い安定した品質
を有する電極箔を得ることができるものである。
As is clear from Table 1, according to the method of the present invention, the thickness of the oxide film on the surface of the aluminum original foil changes depending on the characteristics of the aluminum original foil, that is, the annealing conditions and rolling conditions of the aluminum original foil. However, even if there is a change in the characteristics such as the amount of rolling oil, it is possible to form a certain initial pit on the surface of the aluminum foil by the direct current electrolytic etching in the first stage, which is the starting point of the subsequent alternating current electrolytic etching. As compared with the conventional method, it is possible to obtain the electrode foil having a stable quality with a high capacitance in 20 lots.

【0017】[0017]

【発明の効果】以上のように本発明のアルミ電解コンデ
ンサ用電極箔の製造方法によれば、塩素イオンを含むエ
ッチング液中でアルミ箔を電解エッチングするアルミ電
解コンデンサ用電極箔の製造方法において、前段でアル
ミ箔の直流電解エッチングを行い、後段で前記アルミ箔
の浸漬処理をした後、交流電解エッチングの電流密度を
徐々に上昇させ、その後一定電流密度でエッチングを行
うようにしているため、アルミ原箔の特性変化、すなわ
ちアルミ原箔の焼鈍条件や圧延条件によってアルミ原箔
表面の酸化皮膜の厚さ、圧延油の量等が変化するという
特性変化があっても、前段の直流電解エッチングによ
り、アルミ箔の表面に後段の交流電解エッチングの開始
点となる一定の初期ピットを作ることができ、これによ
り、静電容量が低下することのない安定した品質を有す
る電極箔を得ることができるものである。
As described above, according to the method for producing an electrode foil for an aluminum electrolytic capacitor of the present invention, in the method for producing an electrode foil for an aluminum electrolytic capacitor in which an aluminum foil is electrolytically etched in an etching solution containing chlorine ions, Since the aluminum foil is subjected to direct current electrolytic etching in the first stage, the aluminum foil is immersed in the latter stage, the current density of the alternating current electrolytic etching is gradually increased, and then the aluminum foil is etched at a constant current density. Even if there is a change in the characteristics of the original foil, that is, the thickness of the oxide film on the surface of the original aluminum foil, the amount of rolling oil, etc. changes depending on the annealing and rolling conditions of the original aluminum foil, the direct current electrolytic etching in the previous stage , It is possible to form a certain initial pit on the surface of the aluminum foil, which is the starting point of the subsequent AC electrolytic etching, which reduces the capacitance. In which it is possible to obtain an electrode foil having a free stable quality Rukoto.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小島 浩一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Koichi Kojima 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 塩素イオンを含むエッチング液中でアル
ミ箔を電解エッチングするアルミ電解コンデンサ用電極
箔の製造方法において、前段でアルミ箔の直流電解エッ
チングを行い、後段で前記アルミ箔の浸漬処理をした
後、交流電解エッチングの電流密度を徐々に上昇させ、
その後一定電流密度でエッチングを行うようにしたアル
ミ電解コンデンサ用電極箔の製造方法。
1. A method of manufacturing an electrode foil for an aluminum electrolytic capacitor, comprising electrolytically etching an aluminum foil in an etching solution containing chlorine ions, wherein direct current electrolytic etching of the aluminum foil is performed in a first stage, and dipping treatment of the aluminum foil is performed in a second stage. After that, gradually increase the current density of AC electrolytic etching,
Then, a method of manufacturing an electrode foil for an aluminum electrolytic capacitor, which is so etched as to have a constant current density.
JP33298195A 1995-12-21 1995-12-21 Manufacture of electrode foil for aluminum electrolytic capacitor Pending JPH09171945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33298195A JPH09171945A (en) 1995-12-21 1995-12-21 Manufacture of electrode foil for aluminum electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33298195A JPH09171945A (en) 1995-12-21 1995-12-21 Manufacture of electrode foil for aluminum electrolytic capacitor

Publications (1)

Publication Number Publication Date
JPH09171945A true JPH09171945A (en) 1997-06-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP33298195A Pending JPH09171945A (en) 1995-12-21 1995-12-21 Manufacture of electrode foil for aluminum electrolytic capacitor

Country Status (1)

Country Link
JP (1) JPH09171945A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8358497B2 (en) 2008-09-11 2013-01-22 Panasonic Corporation Electrode foil for capacitor, electrolytic capacitor using the same, and method for manufacturing electrode foil for capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8358497B2 (en) 2008-09-11 2013-01-22 Panasonic Corporation Electrode foil for capacitor, electrolytic capacitor using the same, and method for manufacturing electrode foil for capacitor

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