JP2005203529A - Method for manufacturing electrode foil for aluminum electrolytic capacitor - Google Patents

Method for manufacturing electrode foil for aluminum electrolytic capacitor Download PDF

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JP2005203529A
JP2005203529A JP2004007687A JP2004007687A JP2005203529A JP 2005203529 A JP2005203529 A JP 2005203529A JP 2004007687 A JP2004007687 A JP 2004007687A JP 2004007687 A JP2004007687 A JP 2004007687A JP 2005203529 A JP2005203529 A JP 2005203529A
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current density
etching
foil
electrode foil
maximum value
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Takuya Yamashita
卓哉 山下
Mitsuhisa Yoshimura
満久 吉村
Takehiko Nakahara
武彦 中原
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing electrode foil for aluminum electrolytic capacitor which has effectively improved static electricity capacitance of the electrode foil by improving pit density and pit growth property. <P>SOLUTION: In a method for manufacturing electrode foil for etching aluminum by impressing an alternative current in the electrolyte, an aqueous solution which is mainly composed of hydrochloric acid with addition of at least a kind of solution of sulfuric acid, oxalic acid, and phosphoric acid is used as the electrolyte, the maximum value is set at the start of the etching process as the step of the current density to impress the alternate current, the current density is gradually reduced from the maximum value, uniform and dense etching pit can be generated by setting the current density to 0 at the intermediate step before the step where the current density becomes 0, and the growth of etching pit can be improved in higher density. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明はアルミ電解コンデンサ用電極箔の製造方法に関し、さらに詳しくいえば低圧用アルミ電解コンデンサに用いられる陽極箔のエッチング処理技術に関するものである。   The present invention relates to a method of manufacturing an electrode foil for an aluminum electrolytic capacitor, and more particularly to an etching technique for an anode foil used for a low-voltage aluminum electrolytic capacitor.

近年、電子機器の小型化、高信頼性化に伴い、アルミ電解コンデンサに対するユーザーからのニーズも小型化が強く要望されており、そのためにアルミ電解コンデンサに用いられる電極箔も従来以上に単位面積当たりの静電容量を高める必要が生じている。   In recent years, along with the downsizing and high reliability of electronic equipment, there has been a strong demand from users for aluminum electrolytic capacitors, and as a result, electrode foils used for aluminum electrolytic capacitors are more than per unit area. There is a need to increase the electrostatic capacity.

一般的なアルミ電解コンデンサは、アルミニウム箔をエッチング処理によって実効表面積を拡大させた表面に陽極酸化により誘電体酸化皮膜を形成した陽極箔とアルミニウム箔をエッチング処理によって実効表面積を拡大させた陰極箔とをセパレータを介して巻回することによりコンデンサ素子を形成し、このコンデンサ素子に駆動用電解液を含浸させるとともに、このコンデンサ素子を金属ケース内に封止することにより構成されている。   A general aluminum electrolytic capacitor includes an anode foil in which a dielectric oxide film is formed by anodic oxidation on a surface of which an effective surface area is expanded by etching the aluminum foil, and a cathode foil in which the effective surface area is expanded by etching the aluminum foil. The capacitor element is formed by winding the capacitor element through a separator, and the capacitor element is impregnated with a driving electrolyte, and the capacitor element is sealed in a metal case.

この種のアルミ電解コンデンサにおいて、その静電容量を高める或いは小形化を図るには、陽極箔の実効表面積を拡大し単位面積当たりの静電容量を高めることが必要不可欠になっており、陽極箔の実効表面積を拡大させるエッチング技術の開発が盛んに行われている。   In this type of aluminum electrolytic capacitor, it is essential to increase the effective surface area of the anode foil and increase the capacitance per unit area in order to increase its capacitance or reduce its size. The development of etching technology that expands the effective surface area of silicon has been actively conducted.

前記陽極箔のエッチング処理は、硫酸、硝酸、燐酸、蓚酸などの皮膜を形成する酸を添加した塩酸水溶液中で化学的あるいは電気化学的に行われているが、特に低圧用に使用される陽極箔のエッチング処理は、塩酸を主成分とする電解液中で交流電流を印加してエッチング処理する工程を数回繰り返し行うことにより、アルミニウム箔にエッチングピットを段階的に無数形成している。   The etching treatment of the anode foil is performed chemically or electrochemically in an aqueous hydrochloric acid solution to which an acid for forming a film such as sulfuric acid, nitric acid, phosphoric acid, or oxalic acid is added. In the etching process of the foil, an infinite number of etching pits are formed stepwise in the aluminum foil by repeatedly performing the etching process by applying an alternating current in an electrolyte mainly composed of hydrochloric acid several times.

この交流電流によるエッチング処理は、アルミニウム箔の表面にカソード電流が流れたときにアルミニウムの水和皮膜が形成され、アノード電流が流れたときに前記水和皮膜の欠陥部からエッチングピットが形成されて、この反応が繰り返されることにより無数のエッチングピットが形成されることが知られており、そのエッチング処理の電解液組成、交流電流の電流密度や周波数の条件を工夫・改善して、陽極箔の静電容量や機械的強度などの特性の向上を図っている。   In this etching process using an alternating current, an aluminum hydrate film is formed when a cathode current flows on the surface of the aluminum foil, and an etching pit is formed from a defective portion of the hydrate film when an anode current flows. It is known that countless etching pits are formed by repeating this reaction, and the electrolyte solution composition, the current density and frequency conditions of the alternating current are devised and improved, and the anode foil The characteristics such as capacitance and mechanical strength are improved.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献1、2が知られている。
特開平02−189912号公報 特開2003−96599号公報
For example, Patent Documents 1 and 2 are known as prior art document information relating to the invention of this application.
Japanese Patent Laid-Open No. 02-189912 Japanese Patent Laid-Open No. 2003-96599

しかしながら、前記アルミニウム箔を塩酸を主成分とする電解液中で交流電流を印加するエッチング処理において、同一エッチング処理槽内では一定な電流密度を用い、この周波数を規制することによりアルミニウム箔の表面積の拡大を図っているが、アルミニウム箔の表面積が過剰になると機械的強度が弱くなることから、アルミニウム箔の表面積をある領域までしか拡大することができないという課題を有している。   However, in the etching process in which an alternating current is applied to the aluminum foil in an electrolyte containing hydrochloric acid as a main component, a constant current density is used in the same etching treatment tank, and the surface area of the aluminum foil is controlled by regulating this frequency. Although the enlargement is attempted, since the mechanical strength is weakened when the surface area of the aluminum foil is excessive, there is a problem that the surface area of the aluminum foil can be expanded only to a certain region.

また、前記特許文献1及び特許文献2等にみられるように種々の電流密度を変化させた交流エッチング方法が提案されているが、近年のアルミ電解コンデンサ用電極箔に対する要望に対して満足した電極箔を提供することが困難である。   Further, as shown in Patent Document 1 and Patent Document 2 and the like, an AC etching method in which various current densities are changed has been proposed, but an electrode satisfying the recent demand for an electrode foil for an aluminum electrolytic capacitor. It is difficult to provide a foil.

本発明は、前記従来の課題を解決するためのもので、アルミニウム箔の化学溶解反応、電気化学的反応、拡散現象を考慮し、緻密で高密度のエッチングピットを生成させて表面積を拡大し、静電容量を高くすることができるアルミ電解コンデンサ用電極箔の製造方法を提供するものである。   The present invention is for solving the above-mentioned conventional problems, taking into account the chemical dissolution reaction, electrochemical reaction, and diffusion phenomenon of aluminum foil, increasing the surface area by generating dense and high-density etching pits, The present invention provides a method for producing an electrode foil for an aluminum electrolytic capacitor capable of increasing the capacitance.

前記目的を達成するために、本発明の請求項1に記載の発明は、電解液中で交流電流を印加してアルミニウムをエッチング処理する電極箔の製造方法であって、前記電解液は塩酸を主成分として硫酸、蓚酸、リン酸の少なくとも1種を添加した水溶液を用い、前記交流電流を印加する電流密度のステップはエッチング処理始めを最大値とし、その最大値から漸次減少させ、電流密度が0になる前の途中段階で電流密度を0にするようにした製造方法とするものであり、電流密度の最大値から漸次減少させることにより、交流電流のカソード電流が流れる際、高い電流密度では水酸化皮膜が厚く形成され表面を残した均一で緻密な海綿状のエッチングピットを発生させることができ、低い電流密度ではカソード水酸化皮膜が薄く形成され、高い電流密度で形成されたエッチングピットからさらなるエッチングピットを高密度に生成させることが可能となり、その結果、アルミニウム箔の表面積の拡大を効率的に行い、アルミ電解コンデンサ用電極箔の静電容量を高めることができるという作用を有する。   In order to achieve the above object, an invention according to claim 1 of the present invention is a method of manufacturing an electrode foil in which aluminum is etched by applying an alternating current in an electrolytic solution, and the electrolytic solution contains hydrochloric acid. Using an aqueous solution to which at least one of sulfuric acid, oxalic acid, and phosphoric acid is added as a main component, the current density step for applying the alternating current has a maximum value at the beginning of the etching process, and gradually decreases from the maximum value. It is a manufacturing method in which the current density is set to zero in the middle stage before becoming zero, and when the cathode current of the alternating current flows by gradually decreasing from the maximum value of the current density, It is possible to generate uniform and dense sponge-like etching pits that leave the surface with a thick hydroxide film, and the cathode hydroxide film is formed thin at high current density. It becomes possible to generate further etching pits at high density from the etching pits formed at the flow density, and as a result, the surface area of the aluminum foil is efficiently increased and the capacitance of the electrode foil for the aluminum electrolytic capacitor is increased. It has the effect of being able to.

なお、電流密度の最大値から漸次減少させる方法としては、傾きを直線的に減少させる方法、階段状に減少させる方法、曲線状に減少させる方法等がある。   In addition, as a method of gradually decreasing from the maximum value of the current density, there are a method of linearly decreasing the slope, a method of decreasing in a step shape, a method of decreasing in a curved shape, and the like.

本発明の請求項2に記載の発明は、交流電流を印加する電流密度のステップを複数回繰り返すようにした製造方法とするものであり、ステップを複数回繰り返すものである。   The invention according to claim 2 of the present invention is a manufacturing method in which the step of current density for applying an alternating current is repeated a plurality of times, and the step is repeated a plurality of times.

本発明の請求項3に記載の発明は、交流電流を印加する電流密度のステップをエッチング処理始めを最大値とし、その最大値から漸次減少させた後、その減少させた電流密度で一定時間エッチング処理を行ってから電流密度を0にするようにした製造方法とするもので、また、請求項4に記載の発明は、電流密度のステップを複数回繰り返すようにした製造方法とするものであり、電流密度の最大値から漸次減少させることにより、交流電流のカソード電流が流れる際、高い電流密度では水酸化皮膜が厚く形成され表面を残した均一で緻密な海綿状のエッチングピットを発生させることができ、低い電流密度で一定時間エッチング処理することにより、カソード水酸化皮膜が薄く形成され、高い電流密度で形成されたエッチングピットからさらなるエッチングピットの成長を高密度に促すことが可能となり、アルミニウム箔の表面積の拡大を効率的に行うことができるという作用を有する。   According to a third aspect of the present invention, the current density step for applying an alternating current is set to a maximum value at the beginning of the etching process, and after gradually decreasing from the maximum value, etching is performed for a certain period of time at the reduced current density. The present invention provides a manufacturing method in which the current density is reduced to 0 after processing, and the invention described in claim 4 is a manufacturing method in which the current density step is repeated a plurality of times. By gradually decreasing from the maximum value of the current density, when the alternating current cathode current flows, the hydroxide film is formed thick at a high current density, and a uniform and dense sponge-like etching pit is generated leaving the surface. The cathode hydroxide film is thinly formed by etching at a low current density for a certain period of time, and the etching pits formed at a high current density are formed. Stage of growth of etch pits becomes possible to prompt a high density, such an action can be enlarged surface area of the aluminum foil efficiently.

本発明の請求項5に記載の発明は、交流電流を印加するエッチング処理始めの電流密度を一定時間保持するようにした製造方法とするものであり、高い電流密度のカソード電流が流れる際、水酸化皮膜が厚く形成され、アルミニウム箔の表面を残した均一で緻密な海綿状のエッチングピットを数多く発生させることができるという作用を有する。   The invention according to claim 5 of the present invention is a manufacturing method in which the current density at the beginning of the etching process for applying an alternating current is maintained for a certain period of time. When a cathode current having a high current density flows, The oxide film is formed thick, and has an effect that a large number of uniform and fine sponge-like etching pits leaving the surface of the aluminum foil can be generated.

本発明の請求項6に記載の発明は、電流密度の最大値から漸次減少させるまでの時間を3秒以上にするようにした製造方法とするものであり、高い電流密度で形成されたエッチングピットからさらなるエッチングピットを高密度に生成させるのに充分な電気量を与えることができるので、エッチングピットの密度を高めることができるという作用を有する。   The invention according to claim 6 of the present invention is a manufacturing method in which the time until the current density is gradually reduced from the maximum value of the current density is 3 seconds or more, and etching pits formed at a high current density. Therefore, since it is possible to provide a sufficient amount of electricity to generate further etching pits at a high density, the density of the etching pits can be increased.

本発明によれば、電解液中で交流電流を印加してアルミニウムをエッチング処理する電極箔の製造方法であって、前記電解液は塩酸を主成分として硫酸、蓚酸、リン酸の少なくとも1種を添加した水溶液を用い、前記交流電流を印加する電流密度のステップはエッチング処理始めを最大値とし、その最大値から漸次減少させ、電流密度が0になる前の途中段階で電流密度を0にするようにした製造方法とするもので、電流密度の最大値から漸次減少させることにより、交流電流のカソード電流が流れる際、高い電流密度で水酸化皮膜が厚く形成され表面を残した均一で緻密なエッチングピットを発生させることができ、低い電流密度では、カソード水酸化皮膜が薄く形成されエッチングピットの成長を高密度に促すことが可能となり、その結果、アルミニウム箔の表面積の拡大を効率的に行い、アルミ電解コンデンサ用の電極箔の静電容量を高めることができるという効果を奏するものである。   According to the present invention, there is provided a method of manufacturing an electrode foil in which aluminum is etched by applying an alternating current in an electrolyte solution, the electrolyte solution containing hydrochloric acid as a main component and at least one of sulfuric acid, oxalic acid, and phosphoric acid. The step of current density in which the alternating current is applied using the added aqueous solution is set to the maximum value at the beginning of the etching process, gradually decreases from the maximum value, and the current density is reduced to zero in the middle stage before the current density becomes zero. By gradually reducing the current density from the maximum value of the current density, when the alternating current cathode current flows, the hydroxide film is formed thick at a high current density and the surface remains uniform and dense. Etching pits can be generated, and at a low current density, the cathode hydroxide film is formed thinly, which makes it possible to promote the growth of etching pits at a high density. The enlargement of the surface area of the aluminum foil efficiently performed, in which an effect that it is possible to increase the capacitance of the electrode foil for aluminum electrolytic capacitors.

以下、本発明の実施の形態について詳細に説明をする。   Hereinafter, embodiments of the present invention will be described in detail.

(実施の形態1)
本発明の実施の形態1におけるアルミ電解コンデンサ用電極箔の製造方法は、まず厚さ100μm、純度99.98%のアルミニウム箔を用い、これをリン酸濃度が1.0wt%の90℃の水溶液に60秒間浸漬して前処理を行う。
(Embodiment 1)
In the manufacturing method of the electrode foil for an aluminum electrolytic capacitor in Embodiment 1 of the present invention, an aluminum foil having a thickness of 100 μm and a purity of 99.98% is first used, and this is an aqueous solution of 90 ° C. having a phosphoric acid concentration of 1.0 wt%. For 60 seconds.

次に、このアルミニウム箔を図1に示すようなエッチング槽を用いてエッチング処理を行う。   Next, this aluminum foil is etched using an etching tank as shown in FIG.

このエッチング処理は、一対の電極板3を配置して、塩酸5wt%、塩化アルミニウム2wt%、硫酸0.1wt%、リン酸0.5wt%、硝酸0.2wt%に調整した温度30℃の電解液5(電解液中のアルミ濃度を0.1wt%に調整)を充満したエッチング槽4に前記アルミニウム箔2を浸漬し、前記一対の電極板3に交流電源装置1から周波数35Hzの交流電流を印加して100秒間エッチング処理を行う。   In this etching process, a pair of electrode plates 3 are arranged and electrolysis at a temperature of 30 ° C. adjusted to 5 wt% hydrochloric acid, 2 wt% aluminum chloride, 0.1 wt% sulfuric acid, 0.5 wt% phosphoric acid, and 0.2 wt% nitric acid. The aluminum foil 2 is immersed in an etching tank 4 filled with the liquid 5 (the aluminum concentration in the electrolytic solution is adjusted to 0.1 wt%), and an alternating current having a frequency of 35 Hz is applied to the pair of electrode plates 3 from the alternating current power supply device 1. The applied etching is performed for 100 seconds.

前記交流電流を印加する電流密度は、図2に示すように最初の電流密度を最大値とし、その最大値から漸次減少させ、電流密度が0になる前の途中段階で電流密度を0にするステップにするようにした。   As shown in FIG. 2, the current density to which the alternating current is applied is maximized at the initial current density, and gradually decreased from the maximum value, and the current density is reduced to 0 in the middle stage before the current density becomes zero. I made it a step.

最後に、硫酸10wt%の60℃の水溶液で60秒間の浸漬処理を行い、250℃で120秒間の熱処理を行って、アルミ電解コンデンサ用電極箔となるエッチング箔を作製する。   Finally, an immersion treatment is performed for 60 seconds with an aqueous solution of 10 wt% sulfuric acid at 60 ° C., and a heat treatment is performed at 250 ° C. for 120 seconds to produce an etching foil to be an electrode foil for an aluminum electrolytic capacitor.

以下、本実施の形態1の具体的な実施例について説明をする。   Hereinafter, specific examples of the first embodiment will be described.

(実施例1)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.75A/cm2にし、そこから0.25A/cm2まで(最初の電流密度から67%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Example 1)
In the first embodiment, the initial current density of the waveform shown in FIG. 2 is set to 0.75 A / cm 2 , and then gradually decreased to 0.25 A / cm 2 (67% decrease from the initial current density), and thereafter An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例2)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.69A/cm2にし、そこから0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Example 2)
In the first embodiment, the first current density of the waveform shown in FIG. 2 to 0.69A / cm 2, (55% reduction from the initial current density) from there to 0.31A / cm 2 is gradually reduced, then An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例3)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.63A/cm2にし、そこから0.38A/cm2まで(最初の電流密度から40%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Example 3)
In the first embodiment, the first current density of the waveform shown in FIG. 2 to 0.63A / cm 2, 0.38A / cm to 2 (40% reduction from the initial current density) therefrom is gradually reduced, then An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例4)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.56A/cm2にし、そこから0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
Example 4
In the first embodiment, the first current density of the waveform shown in FIG. 2 to 0.56A / cm 2, (21% reduction from the initial current density) from there to 0.44 A / cm 2 is gradually reduced, then An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例5)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.53A/cm2にし、そこから0.48A/cm2まで(最初の電流密度から9%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Example 5)
In the first embodiment, the first current density of the waveform shown in FIG. 2 to 0.53A / cm 2, (9% decrease from the initial current density) from to 0.48A / cm 2 thereto is gradually reduced, then An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例6)
前記実施の形態1において、図2に示す波形の最初の電流密度を0.56A/cm2にし、そこから25秒で0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、その後電流密度を0にして10秒間保持したステップを4回繰り返し印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。なお、周波数は順に40,30,25,20Hzとした。
(Example 6)
In the first embodiment, first the current density 0.56 A / cm 2, up to 0.44A / cm 2 (21% reduction from the initial current density) there from 25 seconds of the waveform shown in FIG. 2 gradually decreases Then, an etching foil was produced in the same manner as in Embodiment 1 except that the step of holding the current density at 0 for 10 seconds was repeated 4 times. The frequencies were set to 40, 30, 25, and 20 Hz in this order.

(実施例7)
前記実施の形態1において、図3に示す波形の最初の電流密度を0.56A/cm2にし、そこから0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Example 7)
In the first embodiment, the first current density of the waveform shown in FIG. 3 to 0.56A / cm 2, (21% reduction from the initial current density) from there to 0.44 A / cm 2 is gradually reduced, then An etching foil was produced in the same manner as in the first embodiment except that a step with a current density of 0 was applied.

(実施例8)
前記実施の形態1において、図3に示す波形の最初の電流密度を0.56A/cm2にし、そこから25秒で0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、その後電流密度を0にして10秒間保持したステップを4回繰り返し印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。なお、周波数は順に40,30,25,20Hzとした。
(Example 8)
In the first embodiment, first the current density 0.56 A / cm 2, up to 0.44A / cm 2 (21% reduction from the initial current density) there from 25 seconds of the waveform shown in FIG. 3 gradually decreases Then, an etching foil was produced in the same manner as in Embodiment 1 except that the step of holding the current density at 0 for 10 seconds was repeated 4 times. The frequencies were set to 40, 30, 25, and 20 Hz in this order.

(比較例1)
前記実施の形態1において、交流電流の電流密度を0.50A/cm2の一定電流を印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Comparative Example 1)
In the first embodiment, an etching foil was produced in the same manner as in the first embodiment except that a constant current of 0.50 A / cm 2 was applied as the current density of the alternating current.

このように作製された実施例1〜8及び比較例1のエッチング箔の特性を評価した結果を(表1)に示す。なお、前記エッチング箔の評価はEIAJ規格(EIAJ RC−2364A準拠)に基づいて測定した値であり、静電容量は比較例1を100としたときの値である。   The results of evaluating the characteristics of the etching foils of Examples 1 to 8 and Comparative Example 1 thus produced are shown in (Table 1). The evaluation of the etching foil is a value measured based on the EIAJ standard (conforming to EIAJ RC-2364A), and the capacitance is a value when Comparative Example 1 is 100.

Figure 2005203529
Figure 2005203529

(表1)から明らかなように、交流電流を印加する電流密度を最初の最大値から漸次減少させ、その後電流密度を0にするステップにし、その減少率を21%〜55%にすることによってアルミニウム箔の表面積の拡大を効率的に行うことができ、エッチング箔の静電容量を向上させることができる。   As is clear from (Table 1), by gradually decreasing the current density to which the alternating current is applied from the initial maximum value, and then setting the current density to 0, the reduction rate is 21% to 55%. The surface area of the aluminum foil can be efficiently increased, and the capacitance of the etching foil can be improved.

また、実施例6のように交流電流を印加する電流密度のステップを繰り返し行うことにより、さらなるエッチング箔の静電容量の向上を図ることができる。   Further, by repeating the current density step of applying an alternating current as in Example 6, the capacitance of the etching foil can be further improved.

また、実施例7及び8の結果から、電流密度の最大値から曲線状に漸次減少させることにより、静電容量をさらに高めることができる。   Further, from the results of Examples 7 and 8, the capacitance can be further increased by gradually decreasing the maximum value of the current density in a curved shape.

なお、電流密度の最大値からの減少率が9%では、比較例1とほぼ同程度の静電容量しか得ることができない。また、電流密度の最大値からの減少率を67%では、比較例1よりも低い静電容量になり、効率の良いアルミニウム箔の表面積の拡大を図ることができない。   Note that when the rate of decrease from the maximum value of the current density is 9%, it is possible to obtain only substantially the same capacitance as in Comparative Example 1. Moreover, when the rate of decrease from the maximum value of the current density is 67%, the capacitance becomes lower than that of Comparative Example 1, and the surface area of the aluminum foil with high efficiency cannot be achieved.

(実施の形態2)
前記実施の形態1において、交流電流を印加する電流密度を図4に示すように最初の電流密度を最大値とし、その最大値から漸次減少させた後、続いて、その減少させた電流密度で一定時間エッチング処理を行ってから電流密度を0にするステップにしてエッチング処理を行った以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Embodiment 2)
In the first embodiment, the current density at which the alternating current is applied is set to the initial current density as shown in FIG. 4 and gradually reduced from the maximum value, and then the reduced current density is used. An etching foil was produced in the same manner as in the first embodiment except that the etching process was performed by performing the etching process for a certain time and then setting the current density to 0 as a step.

以下、本実施の形態2の具体的な実施例について説明をする。   A specific example of the second embodiment will be described below.

(実施例9)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから0.5秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で99.5秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
Example 9
In the second embodiment, the initial current density of the waveform shown in FIG. 4 is set to 0.69 A / cm 2 and then from 0.51 to 0.31 A / cm 2 (55% reduction from the initial current density). Etching foils were produced in the same manner as in the second embodiment except that the voltage was gradually decreased, and subsequently applied for 99.5 seconds at a current density of 0.31 A / cm 2 , and then the step of setting the current density to 0 was applied.

(実施例10)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから1秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で99秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
(Example 10)
In the second embodiment, the first current density was to 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) at 1 second from the bottom of the waveform shown in FIG. 4 gradually decreases Subsequently, an etching foil was produced in the same manner as in Embodiment 2 except that a step was applied at a current density of 0.31 A / cm 2 for 99 seconds and then a step in which the current density was reduced to 0 was applied.

(実施例11)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから3秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で97秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
(Example 11)
In the second embodiment, first the current density 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) in 3 seconds from there the waveform shown in FIG. 4 gradually decreases Subsequently, an etching foil was produced in the same manner as in Embodiment 2 except that a step of applying a current density of 0.31 A / cm 2 for 97 seconds and then applying a step of setting the current density to 0 was applied.

(実施例12)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから10秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で90秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
(Example 12)
In the second embodiment, first the current density 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) there from 10 seconds of the waveform shown in FIG. 4 gradually decreases Subsequently, an etching foil was produced in the same manner as in the second embodiment except that a step was applied at a current density of 0.31 A / cm 2 for 90 seconds and then a step in which the current density was reduced to 0 was applied.

(実施例13)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから20秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で80秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
(Example 13)
In the second embodiment, first the current density 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) there from 20 seconds of the waveform shown in FIG. 4 gradually decreases Subsequently, an etching foil was produced in the same manner as in the second embodiment except that a step of applying a current density of 0 was applied for 80 seconds at a current density of 0.31 A / cm 2 and then applying a step of setting the current density to 0.

(実施例14)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから50秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で50秒間印加し、その後電流密度を0にしたステップを印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。
(Example 14)
In the second embodiment, first the current density 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) there from 50 seconds of the waveform shown in FIG. 4 gradually decreases Subsequently, an etching foil was produced in the same manner as in Embodiment 2 except that a step of applying a current density of 0 was applied at a current density of 0.31 A / cm 2 for 50 seconds, and then applying a step of setting the current density to 0.

(実施例15)
前記実施の形態2において、図4に示す波形の最初の電流密度を0.69A/cm2にし、そこから3秒で0.31A/cm2まで(最初の電流密度から55%減少)漸次減少させ、続いて電流密度0.31A/cm2で22秒間印加し、その後電流密度を0にして10秒間保持したステップを4回繰り返し印加した以外は前記実施の形態2と同様にしてエッチング箔を作製した。なお、周波数は順に40,30,25,20Hzとした。
(Example 15)
In the second embodiment, first the current density 0.69A / cm 2, up to 0.31A / cm 2 (55% reduction from the initial current density) in 3 seconds from there the waveform shown in FIG. 4 gradually decreases Then, the etching foil was applied in the same manner as in Embodiment 2 except that the step of applying for 22 seconds at a current density of 0.31 A / cm 2 and then applying the current density to 0 for 10 seconds was repeated four times. Produced. The frequencies were set to 40, 30, 25, and 20 Hz in this order.

このように作製された実施例9〜15のエッチング箔の特性を評価した結果を(表2)に示す。なお、前記エッチング箔の評価はEIAJ規格(EIAJ RC−2364A準拠)に基づいて測定した値であり、静電容量は比較例1を100としたときの値である。   The results of evaluating the characteristics of the etching foils of Examples 9 to 15 produced in this way are shown in (Table 2). The evaluation of the etching foil is a value measured based on the EIAJ standard (conforming to EIAJ RC-2364A), and the capacitance is a value when Comparative Example 1 is 100.

Figure 2005203529
Figure 2005203529

(表2)から明らかなように、交流電流を印加する電流密度を最初の電流密度から減少させ、その減少させた電流密度でエッチング処理を行ってもアルミニウム箔の表面積の拡大を効率的に行うことができ、エッチング箔の静電容量を向上させることができる。   As is clear from Table 2, the surface density of the aluminum foil is efficiently increased even if the current density to which the alternating current is applied is decreased from the initial current density and etching is performed at the reduced current density. And the capacitance of the etching foil can be improved.

また、実施例15のように交流電流を印加する電流密度のステップを繰り返し行うことにより、さらなるエッチング箔の静電容量の向上を図ることができる。   Further, by repeatedly performing the step of current density in which an alternating current is applied as in Example 15, the capacitance of the etching foil can be further improved.

(実施の形態3)
前記実施の形態1において、交流電流を印加する電流密度を図5に示すように最初の電流密度を最大値として一定時間保持し、その最大値から漸次減少させた後、その後電流密度を0にするステップにしてエッチング処理を行った以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Embodiment 3)
In the first embodiment, the current density to which an alternating current is applied is maintained for a certain period of time with the initial current density as a maximum value as shown in FIG. 5, and after gradually decreasing from the maximum value, the current density is then reduced to zero. An etching foil was produced in the same manner as in the first embodiment except that the etching process was performed in the step.

以下、本実施の形態3の具体的な実施例について説明をする。   A specific example of the third embodiment will be described below.

(実施例16)
前記実施の形態3において、図5に示す波形の最初の電流密度を0.63A/cm2で0.5秒間印加し、そこから0.38A/cm2まで(最初の電流密度から40%減少)漸次減少させ、その後電流密度を0にしたステップを印加した以外は前記実施の形態3と同様にしてエッチング箔を作製した。なお、交流電流の印加時間を100秒とし、周波数は35Hzとした。
(Example 16)
In the third embodiment, the initial current density of the waveform shown in FIG. 5 is applied at 0.63 A / cm 2 for 0.5 second, and then reaches 0.38 A / cm 2 (40% decrease from the initial current density). ) Etching foil was manufactured in the same manner as in the third embodiment except that a step of gradually decreasing and then setting the current density to 0 was applied. The alternating current application time was 100 seconds and the frequency was 35 Hz.

(実施例17)
前記実施例16において、図5に示す波形の最初の電流密度を1.0秒間印加した以外は前記実施例16と同様にしてエッチング箔を作製した。
(Example 17)
In Example 16, an etching foil was prepared in the same manner as in Example 16 except that the initial current density having the waveform shown in FIG. 5 was applied for 1.0 second.

(実施例18)
前記実施例16において、図5に示す波形の最初の電流密度を3.0秒間印加した以外は前記実施例16と同様にしてエッチング箔を作製した。
(Example 18)
In Example 16, an etching foil was prepared in the same manner as in Example 16 except that the initial current density of the waveform shown in FIG. 5 was applied for 3.0 seconds.

(実施例19)
前記実施例16において、図5に示す波形の最初の電流密度を5.0秒間印加した以外は前記実施例16と同様にしてエッチング箔を作製した。
(Example 19)
In Example 16, an etching foil was produced in the same manner as in Example 16 except that the initial current density of the waveform shown in FIG. 5 was applied for 5.0 seconds.

(実施例20)
前記実施例16において、図5に示す波形の最初の電流密度を10.0秒間印加した以外は前記実施例16と同様にしてエッチング箔を作製した。
(Example 20)
In Example 16, an etching foil was produced in the same manner as in Example 16 except that the initial current density of the waveform shown in FIG. 5 was applied for 10.0 seconds.

このように作製された実施例16〜20のエッチング箔の特性を評価した結果を(表3)に示す。なお、前記エッチング箔の評価はEIAJ規格(EIAJ RC−2364A準拠)に基づいて測定した値であり、静電容量は比較例1を100としたときの値である。   The results of evaluating the characteristics of the etching foils of Examples 16 to 20 produced in this way are shown in (Table 3). The evaluation of the etching foil is a value measured based on the EIAJ standard (conforming to EIAJ RC-2364A), and the capacitance is a value when Comparative Example 1 is 100.

Figure 2005203529
Figure 2005203529

(表3)から明らかなように、最初に電流密度の最大値を保持し、その電流密度から漸次減少させてエッチング処理を行うことによってアルミニウム箔の表面積の拡大を効率的に行うことができ、エッチング箔の静電容量を向上させることができる。   As is clear from (Table 3), the maximum value of the current density is initially maintained, and the surface area of the aluminum foil can be efficiently expanded by performing the etching process by gradually decreasing the current density. The capacitance of the etching foil can be improved.

なお、電流密度の最大値の保持時間が0.5秒では、前記実施例3と同程度の静電容量しか得ることができない。   In addition, when the holding time of the maximum value of the current density is 0.5 seconds, it is possible to obtain only the same capacitance as that of the third embodiment.

(実施の形態4)
前記実施の形態1において、交流電流を印加する電流密度を図6に示すように最初の電流密度を最大値として一定時間保持し、その最大値から漸次減少させ、続いてその減少させた電流密度で一定時間エッチング処理を行い、その後電流密度を0にするステップにしてエッチング処理を行った以外は前記実施の形態1と同様にしてエッチング箔を作製した。
(Embodiment 4)
In the first embodiment, the current density to which the alternating current is applied is maintained for a certain period of time with the initial current density as the maximum value as shown in FIG. 6, and gradually decreased from the maximum value, and then the reduced current density. Etching was performed in the same manner as in the first embodiment except that the etching process was performed for a certain period of time, and then the etching process was performed by setting the current density to zero.

以下、本実施の形態4の具体的な実施例について説明をする。   Hereinafter, specific examples of the fourth embodiment will be described.

(実施例21)
前記実施の形態4において、図6に示す波形の最初の電流密度を0.56A/cm2で3秒間印加し、そこから10秒で0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、続いて電流密度0.44A/cm2で37秒間印加し、その後電流密度を0にして10秒間保持したステップを再度繰り返し印加した以外は前記実施の形態4と同様にしてエッチング箔を作製した。なお、周波数は順に35,25Hzとした。
(Example 21)
In the fourth embodiment, the initial current density of the waveform shown in FIG. 6 is applied at 0.56 A / cm 2 for 3 seconds, and then from 0.44 A / cm 2 in 10 seconds (21% from the initial current density) (Decrease) Gradually decrease, then apply for 37 seconds at a current density of 0.44 A / cm 2 , and then repeat the step of applying the current density to 0 and holding for 10 seconds again, as in the fourth embodiment. Etching foil was produced. The frequency was set to 35 and 25 Hz in order.

(実施例22)
前記実施の形態4において、図6に示す波形の最初の電流密度を0.56A/cm2で3秒間印加し、そこから10秒で0.44A/cm2まで(最初の電流密度から21%減少)漸次減少させ、続いて電流密度0.44A/cm2で12秒間印加し、その後電流密度を0にして10秒間保持したステップを4回繰り返し印加した以外は前記実施の形態4と同様にしてエッチング箔を作製した。なお、周波数は順に40,30,25,20Hzとした。
(Example 22)
In the fourth embodiment, the initial current density of the waveform shown in FIG. 6 is applied at 0.56 A / cm 2 for 3 seconds, and then from 0.44 A / cm 2 in 10 seconds (21% from the initial current density) (Decrease) Gradually decrease, then apply for 12 seconds at a current density of 0.44 A / cm 2 , then apply the same step as in the fourth embodiment except that the step of holding the current density at 0 for 10 seconds was repeated four times. Etching foil was prepared. The frequencies were set to 40, 30, 25, and 20 Hz in this order.

(比較例2)
前記実施の形態1において、交流電流の電流密度を0.50A/cm2の一定電流を50秒印加し、その後電流密度を0にして10秒間保持したステップを再度繰り返し印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。なお、周波数は順に40,25Hzとした。
(Comparative Example 2)
In the first embodiment, except that the step of applying a constant current of 0.50 A / cm 2 for 50 seconds and then holding the current density at 0 for 10 seconds was repeated again in the first embodiment. Etching foil was produced in the same manner as in Embodiment 1. The frequency was set to 40 and 25 Hz in this order.

(比較例3)
前記実施の形態1において、交流電流の電流密度を0.50A/cm2の一定電流を25秒印加し、その後電流密度を0にして10秒間保持したステップを4回繰り返し印加した以外は前記実施の形態1と同様にしてエッチング箔を作製した。なお、周波数は順に40,30,25,20Hzとした。
(Comparative Example 3)
In the first embodiment, except that the step of applying a constant current of 0.50 A / cm 2 for 25 seconds and then holding the current density at 0 for 10 seconds was repeated four times in the first embodiment. Etching foil was produced in the same manner as in Embodiment 1. The frequencies were set to 40, 30, 25, and 20 Hz in this order.

このように作製された実施例21〜22及び比較例2〜3のエッチング箔の特性を評価した結果を(表4)に示す。なお、前記エッチング箔の評価はEIAJ規格(EIAJ RC−2364A準拠)に基づいて測定した値であり、静電容量は実施例21は比較例2を100とし、実施例22は比較例3を100としたときの値である。   The results of evaluating the characteristics of the etching foils of Examples 21 to 22 and Comparative Examples 2 to 3 produced in this way are shown in (Table 4). The evaluation of the etching foil is a value measured based on the EIAJ standard (conforming to EIAJ RC-2364A), and the capacitance of Example 21 is 100 in Comparative Example 2 and Example 22 is 100 in Comparative Example 3. This is the value when

Figure 2005203529
Figure 2005203529

(表4)から明らかなように、交流電流を印加する電流密度を最初の最大値から減少させ、その減少させた電流密度でエッチング処理するステップを繰り返し行ってもアルミニウム箔の表面積の拡大を効率的に行うことができ、エッチング箔の静電容量を向上させることができる。   As is clear from Table 4, the current density to which the alternating current is applied is reduced from the initial maximum value, and the surface area of the aluminum foil can be efficiently increased even if the etching process is repeated at the reduced current density. The capacitance of the etching foil can be improved.

本発明は、ピット密度及びピット成長性の向上により、効率良く電極箔の静電容量を向上させることができ、この電極箔を用いたアルミ電解コンデンサは、その定格容量を高めることができるので、電子機器の小形化や高信頼性を図ることができる。   The present invention can improve the capacitance of the electrode foil efficiently by improving the pit density and pit growth, and the aluminum electrolytic capacitor using this electrode foil can increase its rated capacity, Electronic devices can be miniaturized and highly reliable.

本発明の実施の形態で用いたエッチング槽の構成を示す断面図Sectional drawing which shows the structure of the etching tank used in embodiment of this invention 同実施の形態1で用いた交流電流を印加する電流密度の波形図Waveform diagram of current density for applying alternating current used in the first embodiment 同他の例で用いた交流電流を印加する電流密度の波形図Waveform diagram of current density applied with alternating current used in other examples 同実施の形態2で用いた交流電流を印加する電流密度の波形図Waveform diagram of current density for applying alternating current used in the second embodiment 同実施の形態3で用いた交流電流を印加する電流密度の波形図Waveform diagram of current density for applying alternating current used in the third embodiment 同実施の形態4で用いた交流電流を印加する電流密度の波形図Waveform diagram of current density for applying alternating current used in the fourth embodiment

符号の説明Explanation of symbols

1 交流電源装置
2 アルミニウム箔
3 一対の電極板
4 エッチング槽
5 電解液
DESCRIPTION OF SYMBOLS 1 AC power supply device 2 Aluminum foil 3 A pair of electrode plate 4 Etching tank 5 Electrolyte

Claims (6)

電解液中で交流電流を印加してアルミニウムをエッチング処理する電極箔の製造方法であって、前記電解液は塩酸を主成分として硫酸、蓚酸、リン酸の少なくとも1種を添加した水溶液を用い、前記交流電流を印加する電流密度のステップはエッチング処理始めを最大値とし、その最大値から漸次減少させ、電流密度が0になる前の途中段階で電流密度を0にするようにしたアルミ電解コンデンサ用電極箔の製造方法。 A method of manufacturing an electrode foil in which aluminum is etched by applying an alternating current in an electrolytic solution, wherein the electrolytic solution uses an aqueous solution to which hydrochloric acid is a main component and at least one of sulfuric acid, oxalic acid, and phosphoric acid is added, The step of the current density for applying the alternating current has a maximum value at the beginning of the etching process, and gradually decreases from the maximum value, so that the current density becomes zero in the middle stage before the current density becomes zero. Of manufacturing electrode foil for use. 交流電流を印加する電流密度のステップを複数回繰り返すようにした請求項1に記載のアルミ電解コンデンサ用電極箔の製造方法。 The method for producing an electrode foil for an aluminum electrolytic capacitor according to claim 1, wherein the step of current density for applying an alternating current is repeated a plurality of times. 交流電流を印加する電流密度のステップを、エッチング処理始めを最大値とし、その最大値から漸次減少させた後、その減少させた電流密度で一定時間エッチング処理を行ってから電流密度を0にするようにした請求項1に記載のアルミ電解コンデンサ用電極箔の製造方法。 The current density step for applying an alternating current is set to a maximum value at the beginning of the etching process, and after gradually decreasing from the maximum value, the etching process is performed for a certain period of time with the reduced current density, and then the current density is reduced to zero. The manufacturing method of the electrode foil for aluminum electrolytic capacitors of Claim 1 which was made to do. 交流電流を印加する電流密度のステップを複数回繰り返すようにした請求項3に記載のアルミ電解コンデンサ用電極箔の製造方法。 The method for producing an electrode foil for an aluminum electrolytic capacitor according to claim 3, wherein the step of current density for applying the alternating current is repeated a plurality of times. 交流電流を印加するエッチング処理始めの電流密度を一定時間保持するようにした請求項1〜4のいずれか一つに記載のアルミ電解コンデンサ用電極箔の製造方法。 The manufacturing method of the electrode foil for aluminum electrolytic capacitors as described in any one of Claims 1-4 which was made to hold | maintain the current density of the etching process start which applies an alternating current for a fixed time. 電流密度の最大値から漸次減少させるまでの時間を3秒以上にするようにした請求項3または4に記載のアルミ電解コンデンサ用電極箔の製造方法。 The method for producing an electrode foil for an aluminum electrolytic capacitor according to claim 3 or 4, wherein the time until the current density is gradually reduced from the maximum value is set to 3 seconds or more.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100732705B1 (en) 2005-09-29 2007-06-27 한국제이씨씨(주) Etching method of cathode foil for aluminum electrolytic capacitor
WO2007116845A1 (en) 2006-03-31 2007-10-18 Nippon Chemi-Con Corporation Electrode material for electrolytic capacitor
WO2022230412A1 (en) 2021-04-28 2022-11-03 パナソニックIpマネジメント株式会社 Dielectric, capacitor, electric circuit, circuit board, and apparatus
WO2022230431A1 (en) 2021-04-28 2022-11-03 パナソニックIpマネジメント株式会社 Dielectric, capacitor, electrical circuit, circuit board, and device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100732705B1 (en) 2005-09-29 2007-06-27 한국제이씨씨(주) Etching method of cathode foil for aluminum electrolytic capacitor
WO2007116845A1 (en) 2006-03-31 2007-10-18 Nippon Chemi-Con Corporation Electrode material for electrolytic capacitor
WO2022230412A1 (en) 2021-04-28 2022-11-03 パナソニックIpマネジメント株式会社 Dielectric, capacitor, electric circuit, circuit board, and apparatus
WO2022230431A1 (en) 2021-04-28 2022-11-03 パナソニックIpマネジメント株式会社 Dielectric, capacitor, electrical circuit, circuit board, and device

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