JPH09162578A - Liquid-cooling structure of electronic components - Google Patents
Liquid-cooling structure of electronic componentsInfo
- Publication number
- JPH09162578A JPH09162578A JP7344412A JP34441295A JPH09162578A JP H09162578 A JPH09162578 A JP H09162578A JP 7344412 A JP7344412 A JP 7344412A JP 34441295 A JP34441295 A JP 34441295A JP H09162578 A JPH09162578 A JP H09162578A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- flow tube
- liquid
- electronic components
- electronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20272—Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は、例えば、トラン
ジスタなどの発熱性の電子部品を液冷却する構造につい
てのものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for liquid-cooling a heat-generating electronic component such as a transistor.
【0002】[0002]
【従来の技術】次に、従来技術による電子部品の液冷却
構造を図6の構成図により説明する。図6の11は冷却
基板、13は流管、4は発熱性の電子部品であるトラン
ジスタである。2. Description of the Related Art Next, a conventional liquid cooling structure for electronic parts will be described with reference to the configuration diagram of FIG. In FIG. 6, 11 is a cooling substrate, 13 is a flow tube, and 4 is a transistor which is a heat generating electronic component.
【0003】図6では、冷却基板11には複数のトラン
ジスタ4が実装される。また、冷却基板11にはU字状
の流管13がろう接される。図7は図6の部分断面図で
あり、流管13が冷却基板11にフレアろう付けにより
接合している状態を示している。In FIG. 6, a plurality of transistors 4 are mounted on the cooling board 11. A U-shaped flow tube 13 is brazed to the cooling substrate 11. FIG. 7 is a partial cross-sectional view of FIG. 6, showing a state in which the flow tube 13 is joined to the cooling substrate 11 by flare brazing.
【0004】図6において、流管13の一端からは、冷
却液が供給される。前記冷却液が冷却板11の熱を吸収
することにより、トランジスタの発熱温度を下げること
ができる。なお、前記の冷却液は例えば、安価な地下水
を利用する。In FIG. 6, the cooling liquid is supplied from one end of the flow tube 13. Since the cooling liquid absorbs the heat of the cooling plate 11, the heat generation temperature of the transistor can be lowered. In addition, as the cooling liquid, for example, inexpensive groundwater is used.
【0005】[0005]
【発明が解決しようとする課題】図6の流管13は、耐
蝕性を確保する他、熱伝導率に優れた銅パイプが使用さ
れる。図6において、流管13と冷却基板11は、熱伝
導を良くするため、ろう接しているが、ろう接時の熱ひ
ずみにより銅板の冷却基板11が変形する場合がある。
また、銅は比重が8.8kg/m3であり、流管13と一体
となった冷却基板11を重くする。The flow tube 13 shown in FIG. 6 is made of a copper pipe which ensures corrosion resistance and is excellent in thermal conductivity. In FIG. 6, the flow tube 13 and the cooling substrate 11 are brazed to each other in order to improve heat conduction, but the copper cooling substrate 11 may be deformed due to thermal strain during brazing.
Further, copper has a specific gravity of 8.8 kg / m 3 , which makes the cooling substrate 11 integrated with the flow tube 13 heavy.
【0006】さらに、装置に搭載される図6の冷却基板
11を交換する場合、冷却基板11と一体となった流管
13ごと交換するという無駄がある。Further, when replacing the cooling substrate 11 of FIG. 6 mounted on the apparatus, it is wasteful to replace the entire flow tube 13 integrated with the cooling substrate 11.
【0007】この発明は、流管に複数の押さえ板を接合
し、前記取付板と一体になった流管を冷却基板に着脱可
能に取り付けることにより、冷却基板を流管と同材質と
することなく、冷却にすぐれ、交換容易な電子部品の液
冷却構造を提供することを目的とする。According to the present invention, the cooling board is made of the same material as that of the flow tube by joining a plurality of pressing plates to the flow tube and detachably attaching the flow tube integrated with the mounting plate to the cooling board. It is an object of the present invention to provide a liquid cooling structure for electronic parts which is excellent in cooling and easy to replace.
【0008】[0008]
【課題を解決するための手段】この目的を達成するた
め、この発明は、冷却基板に発熱性の電子部品を実装
し、冷却液が流れる流管を前記冷却基板に接触させるこ
とにより前記電子部品を伝熱吸収する電子部品の液冷却
構造であって、前記冷却基板を好熱伝導性の軽量材質で
組成し、前記流管に押さえ板を接合して一体とし、前記
一体の流管を前記冷却基板に着脱可能に取り付けること
を特徴とする。In order to achieve this object, according to the present invention, a heat generating electronic component is mounted on a cooling substrate, and a flow tube through which a cooling liquid flows is brought into contact with the cooling substrate. Is a liquid cooling structure of an electronic component that absorbs heat, wherein the cooling substrate is composed of a lightweight material having favorable thermoconductivity, and a pressing plate is joined to the flow tube to be integrated, and the integrated flow tube is It is characterized in that it is detachably attached to the cooling substrate.
【0009】[0009]
【作用】冷却液が流れる流管と電子部品を実装する冷却
基板の接合が不要なため、冷却基板を加工性が良く、軽
量の材質にすることができる。冷却基板または流管を単
独で交換できる。また、流管と押さえ板は接合により一
体化し、押さえ板の冷却基板への接触面積が広くなり、
熱伝導性がよくなり、高い冷却性能が得られる。Since the flow tube through which the cooling liquid flows and the cooling substrate on which the electronic component is mounted are not required to be joined, the cooling substrate can be made of a workable and lightweight material. The cooling substrate or flow tube can be replaced alone. Also, the flow tube and the pressing plate are integrated by joining, and the contact area of the pressing plate with the cooling substrate is increased,
The thermal conductivity is improved and high cooling performance is obtained.
【0010】[0010]
【発明の実施の形態】以下、図面を参照して、この発明
の一実施の形態を説明する。図1は、この発明による一
実施の形態の構造を示す構成図である。図1において、
図6と対応する部分には同一の符号をつけ、その説明を
省略する。図1の1は冷却基板、2は押さえ板、3は流
管である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing the structure of an embodiment according to the present invention. In FIG.
The parts corresponding to those in FIG. 6 are designated by the same reference numerals, and the description thereof will be omitted. In FIG. 1, 1 is a cooling substrate, 2 is a pressing plate, and 3 is a flow tube.
【0011】図1では、冷却基板1には複数のトランジ
スタ4が実装される。また、U字状の流管3には複数の
押さえ板2がろう接される。流管3の一端からは、冷却
液が供給される。前記冷却液が冷却板11の熱を伝導で
吸収することにより、トランジスタの発熱温度を下げる
ことができる。なお、前記の冷却液は例えば、安価な地
下水を利用する。In FIG. 1, a plurality of transistors 4 are mounted on the cooling board 1. A plurality of pressing plates 2 are brazed to the U-shaped flow tube 3. A cooling liquid is supplied from one end of the flow tube 3. The cooling liquid absorbs the heat of the cooling plate 11 by conduction, so that the heat generation temperature of the transistor can be lowered. In addition, as the cooling liquid, for example, inexpensive groundwater is used.
【0012】図2は、図1の斜視分解組立図である。図
2に示されるように、流管3と複数の押さえ板2は一体
になっている。押さえ板2には雌ねじが形成され、冷却
基板1の取り付け穴を設けておき、押さえ板2が付いた
流管3をねじ止めする。FIG. 2 is a perspective exploded view of FIG. As shown in FIG. 2, the flow tube 3 and the plurality of pressing plates 2 are integrated. A female screw is formed in the pressing plate 2, a mounting hole for the cooling substrate 1 is provided, and the flow tube 3 with the pressing plate 2 is screwed.
【0013】冷却基板3は、トランジスタ4などの発熱
部品を取り付けるため、加工性が良く、強度的に優れ、
かつ熱伝導性が良い材質が必要である。さらに、部品が
多く取り付く場合、軽い材質が必要である。前記条件を
満足させる材質として、冷却基板3はアルミニウムで組
成する。Since the cooling substrate 3 is mounted with heat-generating components such as the transistor 4, it has good workability and strength.
Moreover, a material having good thermal conductivity is required. Furthermore, when many parts are mounted, a light material is required. The cooling substrate 3 is made of aluminum as a material that satisfies the above conditions.
【0014】図3は、流管3と押さえ板2の接合前の状
態図である。押さえ板2の数量は、流管3の形状、長さ
により異なる。図1の流管3はU字状であるが、これに
限定されるものではなく、例えば、W字状でも良い。流
管3は従来技術と同じ理由で、銅パイプを使用する。し
たがって、ろう接される押さえ板2も銅材である。押さ
え板2には、冷却基板1との固定用の雌ねじ部を設けて
おく。FIG. 3 is a state diagram before joining the flow tube 3 and the pressing plate 2. The number of pressing plates 2 varies depending on the shape and length of the flow tube 3. Although the flow tube 3 in FIG. 1 is U-shaped, it is not limited to this and may be W-shaped, for example. The flow tube 3 uses a copper pipe for the same reason as in the prior art. Therefore, the press plate 2 to be brazed is also a copper material. The pressing plate 2 is provided with an internal thread portion for fixing the cooling plate 1.
【0015】図4は、図1の部分断面図であり、流管3
と押さえ板2がフレアろう付けにより接合している状態
を示している。FIG. 4 is a partial sectional view of FIG.
And the pressing plate 2 are joined by flare brazing.
【0016】図5は、図1におけるトランジスタ4の熱
の伝わり方を示した図である。トランジスタ4から発熱
は、流管3と冷却基板1の接触点の他、流管3を取り付
ける押さえ板2の取付面全体から、熱伝導できる。FIG. 5 is a diagram showing how the heat of the transistor 4 in FIG. 1 is conducted. Heat generated from the transistor 4 can be conducted from not only the contact point between the flow tube 3 and the cooling substrate 1 but also the entire mounting surface of the pressing plate 2 to which the flow tube 3 is attached.
【0017】この発明の実施例の構造による冷却性能
は、例えば、図1に示すような取り付け状態で、15W
のトランジスタ3個、4.5Wのダイオード1個を実装
した時、ジャンクション温度で82.9℃と予想され
る。トランジスタの絶対定格150℃に対し、ディレー
ティング0.55となるため、温度の信頼性は高い。The cooling performance according to the structure of the embodiment of the present invention is, for example, 15 W when mounted as shown in FIG.
It is expected that the junction temperature will be 82.9 ℃ when three transistors and one 4.5W diode are mounted. Since the absolute rating of the transistor is 150 ° C. and the derating is 0.55, the temperature reliability is high.
【0018】[0018]
【発明の効果】この発明は、流管と冷却基板を取り付け
る際に、押さえ板を使用したことにより、冷却基材を流
管材質に合わせる必要はなく、強度があり、軽く、熱伝
導性の優れた材料を使用することができる。また、冷却
基板と流管をろう接しないため、冷却基板がひずむこと
はなく、接触の均一性を損なうことはない。また、電子
素子の取り付いた状態で流管と冷却基板の取り外しがで
き、流管の交換が可能となった。As described above, according to the present invention, when the flow tube and the cooling substrate are attached, the pressing plate is used, so that it is not necessary to match the cooling base material with the material of the flow tube. Excellent materials can be used. Further, since the cooling substrate and the flow tube are not brazed, the cooling substrate is not distorted and the uniformity of contact is not impaired. In addition, the flow tube and the cooling substrate can be removed with the electronic element attached, and the flow tube can be replaced.
【図1】この発明による一実施の形態の構造を示す構成
図である。FIG. 1 is a configuration diagram showing a structure of an embodiment according to the present invention.
【図2】図1の斜視分解組立図である。FIG. 2 is a perspective exploded view of FIG.
【図3】流管3と押さえ板2の接合前の状態図である。FIG. 3 is a state diagram before joining the flow tube 3 and the pressing plate 2.
【図4】図1の部分断面図である。FIG. 4 is a partial sectional view of FIG. 1;
【図5】図1におけるトランジスタ4の熱の伝わり方を
示した図である。FIG. 5 is a diagram showing how heat is transmitted through a transistor 4 in FIG.
【図6】従来技術による電子部品の液冷却構造の構成図
である。FIG. 6 is a configuration diagram of a liquid cooling structure for an electronic component according to a conventional technique.
【図7】図6の部分断面図である。FIG. 7 is a partial sectional view of FIG. 6;
1 冷却基板 2 押さえ板 3 流管 4 トランジスタ(電子部品) 1 Cooling Substrate 2 Holding Plate 3 Flow Tube 4 Transistor (Electronic Component)
Claims (1)
冷却液が流れる流管を前記冷却基板に接触させることに
より前記電子部品を伝熱吸収する電子部品の液冷却構造
であって、 前記冷却基板を好熱伝導性の軽量材質で組成し、 前記流管に押さえ板を接合して一体とし、 前記一体の流管を前記冷却基板に着脱可能に取り付ける
ことを特徴とする電子部品の液冷却構造。1. A heat-generating electronic component is mounted on a cooling board,
A liquid cooling structure of an electronic component that absorbs heat transfer of the electronic component by bringing a flow tube through which a cooling liquid flows into contact with the cooling substrate, wherein the cooling substrate is composed of a lightweight material having favorable thermal conductivity, A liquid cooling structure for an electronic component, wherein a pressure plate is joined to a pipe to be integrated, and the integrated flow pipe is detachably attached to the cooling substrate.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7344412A JPH09162578A (en) | 1995-12-05 | 1995-12-05 | Liquid-cooling structure of electronic components |
KR1019960061060A KR100249279B1 (en) | 1995-12-05 | 1996-12-02 | Cooling structure of electronic part |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7344412A JPH09162578A (en) | 1995-12-05 | 1995-12-05 | Liquid-cooling structure of electronic components |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09162578A true JPH09162578A (en) | 1997-06-20 |
Family
ID=18369057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7344412A Pending JPH09162578A (en) | 1995-12-05 | 1995-12-05 | Liquid-cooling structure of electronic components |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH09162578A (en) |
KR (1) | KR100249279B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7554059B2 (en) | 2005-09-12 | 2009-06-30 | Sumitomo Electric Industries, Ltd. | Heater unit and semiconductor manufacturing apparatus including the same |
JP2010114115A (en) * | 2008-11-04 | 2010-05-20 | Daikin Ind Ltd | Mount structure |
-
1995
- 1995-12-05 JP JP7344412A patent/JPH09162578A/en active Pending
-
1996
- 1996-12-02 KR KR1019960061060A patent/KR100249279B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7554059B2 (en) | 2005-09-12 | 2009-06-30 | Sumitomo Electric Industries, Ltd. | Heater unit and semiconductor manufacturing apparatus including the same |
JP2010114115A (en) * | 2008-11-04 | 2010-05-20 | Daikin Ind Ltd | Mount structure |
Also Published As
Publication number | Publication date |
---|---|
KR970058469A (en) | 1997-07-31 |
KR100249279B1 (en) | 2000-03-15 |
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