JPH09113234A - Sensor for measuring two-dimensional shape - Google Patents
Sensor for measuring two-dimensional shapeInfo
- Publication number
- JPH09113234A JPH09113234A JP27085995A JP27085995A JPH09113234A JP H09113234 A JPH09113234 A JP H09113234A JP 27085995 A JP27085995 A JP 27085995A JP 27085995 A JP27085995 A JP 27085995A JP H09113234 A JPH09113234 A JP H09113234A
- Authority
- JP
- Japan
- Prior art keywords
- light
- dimensional
- dimensional shape
- mirror
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明が属する技術分野】本発明は、対象物の幅方向に
ライン状に光を照射し、その散乱光を受光素子にて受光
し、三角測量の原理を用いて対象物の幅方向と深さ方向
の形状を計測する２次元形状計測センサーに関し、この
２次元形状計測センサーを長さ方向に走査することによ
って３次元形状を計測する３次元形状計測装置に好適に
利用できる２次元形状計測センサーに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention irradiates light in a line shape in the width direction of an object, receives the scattered light by a light receiving element, and uses the principle of triangulation to detect the width direction and depth of the object. Regarding a two-dimensional shape measuring sensor for measuring a shape in the depth direction, a two-dimensional shape measuring sensor suitable for use in a three-dimensional shape measuring device for measuring a three-dimensional shape by scanning the two-dimensional shape measuring sensor in the length direction It is about.
【０００２】[0002]
【従来の技術】従来の３次元形状計測装置の一構成例を
図７を参照して説明する。光源２１からの光をガルバノ
ミラー２２で反射させ、固定鏡２３を介して対象物２４
に照射し、その散乱光を固定鏡２５を介してガルバノミ
ラー２２の裏面で反射させて受光素子２６にて受光する
ように構成されている。この場合、光源２１からの光は
ガルバノミラー２２の回転によってｘ方向に走査され、
対象物２４に対してｘ方向のライン状に光が照射され、
ｘ方向の各照射位置に対するｚ方向の位置が受光素子２
６における受光位置で測定される。そして、これをｙ方
向に走査することによって対象物の三次元形状が測定さ
れる。2. Description of the Related Art A configuration example of a conventional three-dimensional shape measuring apparatus will be described with reference to FIG. The light from the light source 21 is reflected by the galvanometer mirror 22, and the object 24 is reflected via the fixed mirror 23.
The scattered light is reflected by the back surface of the galvano mirror 22 via the fixed mirror 25 and is received by the light receiving element 26. In this case, the light from the light source 21 is scanned in the x direction by the rotation of the galvanometer mirror 22,
The object 24 is irradiated with light in a line in the x direction,
The position in the z direction with respect to each irradiation position in the x direction is the light receiving element 2.
6 is measured at the light receiving position. Then, by scanning this in the y direction, the three-dimensional shape of the object is measured.
【０００３】次に、他の構成例を図８を参照して説明す
る。光源３１からの光が集光レンズ３２を通ってガルバ
ノミラー３３で反射し、ハーフミラー３４で一部の光を
反射させてｘ方向検知素子３５に入射させてｘ方向の照
射位置を検知し、ハーフミラー３４を透過した光を対象
物３６に照射し、その散乱光を受光レンズ３７を介して
ｚ方向検知素子３８で受光し、その受光位置でｘ方向の
各照射位置に対するｚ方向の位置を測定するように構成
されている。Next, another configuration example will be described with reference to FIG. The light from the light source 31 passes through the condenser lens 32 and is reflected by the galvano mirror 33, and a part of the light is reflected by the half mirror 34 to be incident on the x-direction detection element 35 to detect the irradiation position in the x-direction. The object 36 is irradiated with the light transmitted through the half mirror 34, the scattered light is received by the z-direction detecting element 38 via the light-receiving lens 37, and the position in the z-direction with respect to each irradiation position in the x-direction is detected at the light-receiving position. It is configured to measure.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、図７の
３次元形状計測装置の構成においては、受光素子２６で
同一ｚ方向位置と検出される位置は、図９（ａ）、
（ｂ）に示すように、円弧Ｐを描くことになり、２等辺
三角形となる図９（ａ）から外れた図９（ｂ）の状態で
はｚ方向の誤差が出てｚ方向に高い精度が得られ難く、
精度を高くするためには補正が必要となって構成が複雑
になるとともに計測に時間がかかり、高速化するにはコ
スト高になるという問題がある。However, in the configuration of the three-dimensional shape measuring apparatus of FIG. 7, the position detected by the light receiving element 26 as the same z-direction position is as shown in FIG.
As shown in (b), a circular arc P is drawn, and in the state of FIG. 9 (b), which is deviated from FIG. 9 (a), which is an isosceles triangle, an error in the z direction occurs and high accuracy is obtained in the z direction. Hard to get,
There is a problem that correction is required to increase the accuracy, the configuration is complicated, the measurement takes time, and the cost is increased to increase the speed.
【０００５】また、図８の３次元形状計測装置の構成に
おいては、ｚ方向検知素子３８が２次元ＣＣＤの場合、
１００万画素（１０００×１０００画素）程度が汎用的
であるが、Ｚ方向のみ見ると１０００画素であり、深い
計測範囲、例えば１００ｍｍ程度の場合では０．１ｍｍ
／画素となり、大きな分解能は得られないという問題が
ある。そこで、ｚ方向のみの分解能を上げるために、３
０００〜５０００画素の１次元ＣＣＤを適用することが
考えられるが、その場合ｘ方向の計測幅が極めて狭くな
ってしまい、実用的でないという問題がある。In the configuration of the three-dimensional shape measuring apparatus shown in FIG. 8, when the z-direction detecting element 38 is a two-dimensional CCD,
About 1 million pixels (1000 x 1000 pixels) is generally used, but it is 1000 pixels when viewed only in the Z direction, and 0.1 mm in a deep measurement range, for example, about 100 mm.
There is a problem in that a large resolution cannot be obtained. Therefore, in order to increase the resolution only in the z direction, 3
It is conceivable to apply a one-dimensional CCD of 000 to 5000 pixels, but in that case, the measurement width in the x direction becomes extremely narrow, which is not practical.
【０００６】本発明は、上記従来の問題点に鑑み、大き
な計測幅と計測深度、及び高い分解能を有する２次元形
状計測センサーを提供することを目的としている。In view of the above conventional problems, it is an object of the present invention to provide a two-dimensional shape measuring sensor having a large measuring width and measuring depth and high resolution.
【０００７】[0007]
【課題を解決するための手段】本発明の２次元形状計測
センサーは、対象物に光を投光し、その散乱光を三角測
量の原理を用いて計測して対象物における投光位置の２
次元方向の位置を計測する２次元形状計測センサーにお
いて、投光側に、対象物にライン状に光を投光する投光
手段を設け、受光側に、回転走査ミラーと、１次元の受
光素子と、結像手段とを設けたものである。The two-dimensional shape measuring sensor of the present invention projects light onto an object and measures the scattered light using the principle of triangulation to determine the projected position of the object.
In a two-dimensional shape measuring sensor for measuring a position in a dimensional direction, a light projecting means for projecting light linearly on an object is provided on a light projecting side, and a rotary scanning mirror and a one-dimensional light receiving element are provided on a light receiving side. And an image forming means.
【０００８】これによれば、対象物の光ライン方向（ｘ
方向）の位置は、対象物からの散乱光を受ける回転走査
ミラーの回転角度で求められ、対象物の深さ方向（ｚ方
向）の位置は受光素子の受光位置によって求められ、し
たがって回転走査ミラーの回転により大きな計測幅が得
られるとともに、１次元受光素子にて計測深度及び高い
分解能を共に得ることができる。According to this, the optical line direction (x
Position) is determined by the rotation angle of the rotary scanning mirror that receives the scattered light from the target object, and the position in the depth direction (z direction) of the target object is determined by the light receiving position of the light receiving element. A large measurement width can be obtained by the rotation of, and both the measurement depth and the high resolution can be obtained by the one-dimensional light receiving element.
【０００９】また、結像手段に２方向の散乱光を集める
２つのシリンドリカルレンズを備えることにより、大き
な計測幅と計測深度を確保しながら軽量化を図り、コン
パクトな構成とすることができ、また受光側に光路長を
同じにする手段を設けることにより精度の良い計測がで
き、かつ回転走査ミラーを非球面の曲面ミラーにて構成
することにより簡単・安価に光路長を同じにでき、また
受光側の回転走査ミラーと同期をとって受光素子の結像
位置演算を行なう計測制御手段を設けることにより、自
動計測することができる。Further, by providing the image forming means with two cylindrical lenses that collect scattered light in two directions, it is possible to achieve a large measurement width and measurement depth while achieving weight reduction and a compact structure. By providing a means for making the optical path length the same on the light receiving side, accurate measurement can be performed, and by configuring the rotary scanning mirror with an aspherical curved surface mirror, the optical path length can be made the same easily and inexpensively. Automatic measurement can be performed by providing measurement control means for calculating the image forming position of the light receiving element in synchronization with the rotary scanning mirror on the side.
【００１０】[0010]
【発明の実施の形態】以下、本発明の一実施形態の２次
元形状計測センサーについて、図１〜図６を参照して説
明する。DETAILED DESCRIPTION OF THE INVENTION A two-dimensional shape measuring sensor according to an embodiment of the present invention will be described below with reference to FIGS.
【００１１】図１、図２において、１は、対象物５にラ
イン状に光を投光する投光手段で、楕円錐状のレーザー
光を発する半導体レーザー２と、レーザー光を円柱状の
光に変形させるコリメートレンズ３と、円柱状の光を扇
状に広げるシリンドリカルレンズ４にて構成されてい
る。５は形状を計測すべき対象物である。対象物５から
の反射光は、シリンドリカルレンズ６、７を通り、非球
面の曲面にて光路長を同じにする回転走査ミラー８で反
射されて１次元受光素子としての１次元ＣＣＤ９に結像
されるように構成されている。回転走査ミラー８はパル
スモータ１０にて駆動される。In FIGS. 1 and 2, reference numeral 1 denotes a light projecting means for projecting light linearly onto an object 5, a semiconductor laser 2 which emits an elliptic cone laser light, and a cylindrical laser light. It is composed of a collimating lens 3 which is deformed into a cylindrical shape and a cylindrical lens 4 which spreads cylindrical light in a fan shape. Reference numeral 5 is an object whose shape is to be measured. The reflected light from the object 5 passes through the cylindrical lenses 6 and 7, and is reflected by the rotary scanning mirror 8 having the same optical path length on the curved surface of the aspherical surface and imaged on the one-dimensional CCD 9 as a one-dimensional light receiving element. Is configured to. The rotary scanning mirror 8 is driven by a pulse motor 10.
【００１２】次に、図４に示す計測制御手段１１につい
て説明すると、１８は全体制御部で、半導体レーザ２
と、パルスモータ１０を駆動するモータ駆動部１２と、
１次元ＣＣＤ９を駆動する受光素子駆動部１３を制御
し、ｘ，ｚ演算部１４に演算指令を出力する。受光素子
駆動部１３からは１次元ＣＣＤ９による検出データが位
置演算部１５に出力され、その演算結果がｘ，ｚ演算部
１４に出力される。また、モータ駆動部１２から回転走
査ミラー８の回転角度を演算する角度演算部１６に駆動
信号が出力され、演算結果がｘ，ｚ演算部１４に出力さ
れる。ｘ，ｚ演算部１４の演算結果は出力部１７に出力
され、この出力部１７から計測結果が適当な形態で出力
される。Next, the measurement control means 11 shown in FIG. 4 will be described. 18 is an overall control section, which is the semiconductor laser 2
And a motor drive unit 12 that drives the pulse motor 10,
It controls the light-receiving element drive unit 13 that drives the one-dimensional CCD 9, and outputs a calculation command to the x, z calculation unit 14. The detection data from the one-dimensional CCD 9 is output from the light receiving element drive unit 13 to the position calculation unit 15, and the calculation result is output to the x, z calculation unit 14. Further, a drive signal is output from the motor drive unit 12 to the angle calculation unit 16 that calculates the rotation angle of the rotary scanning mirror 8, and the calculation result is output to the x, z calculation unit 14. The calculation result of the x, z calculation unit 14 is output to the output unit 17, and the output unit 17 outputs the measurement result in an appropriate form.
【００１３】次に、以上の構成の２次元形状計測センサ
ーによる計測動作について、図１〜図３を参照して説明
する。半導体レーザー２から発した光は、コリメートレ
ンズ３を通ることによりコリメート光になり、シリンド
リカルレンズ４を介してｘ方向に沿うライン状の光ａと
なって対象物５に照射される。その光は対象物５で反射
して散乱光ｂとなる。ｘ方向の各位置の散乱光ｂは、シ
リンドリカルレンズ６とシリンドリカルレンズ７を介し
て回転走査ミラー８の回転位置に応じて１次元ＣＣＤ９
に結像される。その際、回転走査ミラー８は光路長を一
定にする非球面の曲面に形成されているため、誤差を生
じることなく精度良く１次元ＣＣＤ９に結像される。ま
た、シリンドリカルレンズ６はｚ方向の計測範囲Ｃz を
１次元ＣＣＤ９による検出範囲に縮小するようにｚ方向
に集光し、シリンドリカルレンズ７はｘ方向の計測範囲
Ｃx の散乱光ｂが小型の回転走査ミラー８の回転走査に
て１次元ＣＣＤ９に結像されるようにｘ方向に集光する
作用を有している。かくして、図３において、斜線で示
す計測範囲のうち、回転走査ミラー８がある回転位置に
位置している状態でｚ方向に沿うラインＣxi上に存在す
る対象物５の反射散乱光が１次元ＣＣＤ９に当たり、そ
のｚ方向の位置Ｃziがこの１次元ＣＣＤ９にて計測され
る。Next, the measuring operation of the two-dimensional shape measuring sensor having the above structure will be described with reference to FIGS. The light emitted from the semiconductor laser 2 becomes a collimated light by passing through the collimator lens 3, and becomes a linear light a along the x direction via the cylindrical lens 4 and is applied to the object 5. The light is reflected by the object 5 and becomes scattered light b. The scattered light b at each position in the x direction passes through the cylindrical lens 6 and the cylindrical lens 7 and the one-dimensional CCD 9 according to the rotational position of the rotary scanning mirror 8.
Is imaged. At that time, since the rotary scanning mirror 8 is formed on an aspherical curved surface that makes the optical path length constant, an image is accurately formed on the one-dimensional CCD 9 without causing an error. The cylindrical lens 6 focuses the light in the z direction so that the measurement range Cz in the z direction is reduced to the detection range by the one-dimensional CCD 9, and the cylindrical lens 7 scans the scattered light b in the measurement range Cx in the x direction in a small size. It has a function of condensing in the x direction so that an image is formed on the one-dimensional CCD 9 by the rotational scanning of the mirror 8. Thus, in FIG. 3, the reflected and scattered light of the object 5 existing on the line Cxi along the z direction in the state where the rotary scanning mirror 8 is located at a certain rotational position in the measurement range indicated by the diagonal lines is the one-dimensional CCD 9 Then, the position Czi in the z direction is measured by the one-dimensional CCD 9.
【００１４】次に、回転走査ミラー８を微小角度振る
と、計測範囲のラインＣxiのｘ方向の位置が変わり、そ
の振れ角度によりｘ方向の位置が決まり、このｘ方向の
位置におけるｚ方向の位置が上記と同様に１次元ＣＣＤ
９にて計測される。以上の動作の繰り返しにより対象物
５におけるライン状の光ａが照射された位置における
ｘ、ｚ方向の２次元位置が計測される。Next, when the rotary scanning mirror 8 is shaken by a slight angle, the position of the line Cxi in the measurement range in the x direction changes, the position in the x direction is determined by the shake angle, and the position in the z direction at this x position. Is a one-dimensional CCD as above
Measured at 9. By repeating the above operation, the two-dimensional position in the x and z directions at the position where the linear light a is irradiated on the object 5 is measured.
【００１５】上記計測過程における図４の計測制御手段
による制御について、図４、図５を参照して説明する
と、図５（ａ）に示すように、ある時刻ｔ0 において全
体制御部１８からモーター駆動部１２にパルスｕが出力
され、そのパルスによりパルスモータ１０がある微小角
度θαだけ回転し、次のパルスｖまではその位置を動か
ない。一方、パルスｕが終わる時刻ｔ1 になると、図５
（ｂ）に示すように、位置演算を開始するパルスｗが受
光素子駆動部１３に出力されて位置演算が行なわれ、モ
ータ駆動部１２に対して次のパルスｖが出力されるｔ2
時刻までに位置演算部１５での演算が終了する。このよ
うにして回転走査ミラー８の振り角度からｘ方向の位置
が、１次元ＣＣＤ９の受光位置から三角測量によるｚ方
向位置が計測され、以上の動作を繰り返すことにより対
象物５のｘ，ｚ方向の２次元位置が計測される。[0015] Control by the measurement control unit in FIG. 4 in the above measurement process, FIG. 4, will be described with reference to FIG. 5, as shown in FIG. 5 (a), from the overall control unit 18 at a certain time t 0 Motor A pulse u is output to the drive unit 12, the pulse motor 10 rotates a certain small angle θα by the pulse, and the position does not move until the next pulse v. On the other hand, at time t 1 when the pulse u ends, as shown in FIG.
As shown in (b), the pulse w for starting the position calculation is output to the light receiving element drive unit 13 to perform the position calculation, and the next pulse v is output to the motor drive unit t 2
The calculation by the position calculation unit 15 is completed by the time. In this way, the position in the x direction from the swing angle of the rotary scanning mirror 8 and the z direction position from the light receiving position of the one-dimensional CCD 9 are measured by triangulation. By repeating the above operation, the object 5 in the x and z directions is measured. The two-dimensional position of is measured.
【００１６】なお、投光手段１において、半導体レーザ
ー２に代えて、ＬＥＤやガスレーザー等の他のレーザー
を用いても良く、その場合にはコリメートレンズ３は不
要である。また、シリンドリカルレンズ４にて光を扇状
に広げる代わりに、図６に示すように、半導体レーザー
２とコリメートレンズ３等の点光源からの光をガルバノ
ミラー１９で走査してもよい。In the light projecting means 1, another laser such as an LED or a gas laser may be used in place of the semiconductor laser 2, in which case the collimator lens 3 is not necessary. Further, instead of spreading the light in a fan shape by the cylindrical lens 4, light from a point source such as the semiconductor laser 2 and the collimating lens 3 may be scanned by the galvano mirror 19 as shown in FIG.
【００１７】一方、受光側でも、非球面の曲面を有する
回転走査ミラー８にて光路長を同じにした例を示した
が、光路長を同じにする機能をシリンドリカルレンズ７
に分担させ、回転走査ミラー８は平面鏡にすることも可
能である。また、コンパクトに構成するために光路に鏡
を介装することも可能である。また、場合によってはシ
リンドリカルレンズ６、７を省略したり、複合レンズを
採用したりすることもできる。また、１次元の受光素子
として、１次元ＣＣＤ９に代えてＰＳＤ等を用いること
もできる。On the other hand, on the light receiving side as well, an example has been shown in which the optical path length is made the same by the rotary scanning mirror 8 having an aspherical curved surface, but the cylindrical lens 7 has the function of making the optical path length the same.
Alternatively, the rotary scanning mirror 8 may be a plane mirror. It is also possible to insert a mirror in the optical path for a compact structure. Further, depending on the case, the cylindrical lenses 6 and 7 may be omitted, or a compound lens may be adopted. Further, as the one-dimensional light receiving element, a PSD or the like can be used instead of the one-dimensional CCD 9.
【００１８】[0018]
【発明の効果】本発明によれば、以上の説明から明らか
なように、対象物にライン状に光を投光し、受光側の回
転走査ミラーと高画素の１次元受光素子により対象物の
光ライン方向と深さ方向の位置を計測するようにしてい
るので、回転走査ミラーの走査にて光ライン方向（ｘ方
向）に大きな計測範囲を確保でき、高画素の１次元受光
素子により深さ方向（ｚ方向）に大きな計測範囲を高分
解能で計測することができ、広い計測範囲を高分解能で
計測することができる。As is apparent from the above description, according to the present invention, light is linearly projected onto an object, and the object is provided with a rotary scanning mirror on the light receiving side and a one-dimensional light receiving element having a large number of pixels. Since the position in the light line direction and the position in the depth direction are measured, it is possible to secure a large measurement range in the light line direction (x direction) by scanning the rotary scanning mirror, and the depth can be ensured by the one-dimensional light receiving element with high pixels. A large measurement range in the direction (z direction) can be measured with high resolution, and a wide measurement range can be measured with high resolution.
【００１９】また、結像手段に２方向の散乱光を集める
２つのシリンドリカルレンズを備えることにより、大き
な計測幅と計測深度を確保しながら軽量化を図り、コン
パクトな構成とすることができる。Further, by providing the image forming means with two cylindrical lenses for collecting scattered light in two directions, it is possible to reduce the weight while ensuring a large measuring width and measuring depth, and to make a compact structure.
【００２０】また、受光側に光路長を同じにする手段を
設けることにより、補正を必要とせず簡単な構成で精度
の良い計測ができる。Further, by providing means for making the optical path lengths the same on the light receiving side, it is possible to perform accurate measurement with a simple structure without requiring correction.
【００２１】また、回転走査ミラーを、光路長を同じに
する非球面の曲面ミラーにて構成することにより、簡単
・安価に光路長を同じにすることができる。Further, by forming the rotary scanning mirror by an aspherical curved mirror having the same optical path length, the optical path length can be easily made inexpensive.
【００２２】また、受光側の回転走査ミラーと同期をと
って受光素子の結像位置演算を行なう計測制御手段を設
けることにより、対象物のライン上の２次元位置が順次
自動計測され、自動的に対象物の２次元形状を計測でき
る。Further, by providing the measurement control means for calculating the image forming position of the light receiving element in synchronism with the rotary scanning mirror on the light receiving side, the two-dimensional position of the object on the line is automatically measured sequentially and automatically. The two-dimensional shape of the object can be measured.
【図１】本発明の一実施例の２次元形状計測センサーの
全体概略構成を示す斜視図である。FIG. 1 is a perspective view showing an overall schematic configuration of a two-dimensional shape measuring sensor according to an embodiment of the present invention.
【図２】同実施例の側面図である。FIG. 2 is a side view of the embodiment.
【図３】同実施例の位置計測範囲の説明図である。FIG. 3 is an explanatory diagram of a position measurement range of the embodiment.
【図４】同実施例の計測制御手段の構成図である。FIG. 4 is a configuration diagram of measurement control means of the embodiment.
【図５】同実施例の計測制御手段による動作タイミング
の説明図である。FIG. 5 is an explanatory diagram of operation timing by the measurement control means of the embodiment.
【図６】同実施例における投光手段の他の構成例を示す
斜視図である。FIG. 6 is a perspective view showing another configuration example of the light projecting means in the embodiment.
【図７】従来例の３次元形状計測装置の要部の概略構成
を示す斜視図である。FIG. 7 is a perspective view showing a schematic configuration of a main part of a conventional three-dimensional shape measuring apparatus.
【図８】他の従来例の三次元形状計測装置の要部の概略
構成を示す斜視図である。FIG. 8 is a perspective view showing a schematic configuration of a main part of another conventional three-dimensional shape measuring apparatus.
【図９】従来例の問題点の説明図である。FIG. 9 is an explanatory diagram of a problem of the conventional example.
１ 投光手段 ５ 対象物 ６ シリンドリカルレンズ ７ シリンドリカルレンズ ８ 回転走査ミラー ９ １次元ＣＣＤ（１次元受光素子） １１ 計測制御手段 DESCRIPTION OF SYMBOLS 1 Projection means 5 Target object 6 Cylindrical lens 7 Cylindrical lens 8 Rotating scanning mirror 9 One-dimensional CCD (one-dimensional light receiving element) 11 Measurement control means
───────────────────────────────────────────────────── フロントページの続き (72)発明者 浜野 誠司 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Seiji Hamano 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (5)
測量の原理を用いて計測して対象物における投光位置の
２次元方向の位置を計測する２次元形状計測センサーで
あって、投光側に、対象物にライン状に光を投光する投
光手段を設け、受光側に、回転走査ミラーと、１次元の
受光素子と、結像手段とを設けたことを特徴とする２次
元形状計測センサー。1. A two-dimensional shape measuring sensor for projecting light on an object and measuring the scattered light using the principle of triangulation to measure the position of the projected position on the object in the two-dimensional direction. The light-projecting side is provided with a light-projecting means for projecting light linearly on the object, and the light-receiving side is provided with a rotary scanning mirror, a one-dimensional light-receiving element, and an image forming means. 2D shape measurement sensor.
つのシリンドリカルレンズを備えることを特徴とする請
求項１記載の２次元形状計測センサー。2. An image forming means for collecting scattered light in two directions 2
The two-dimensional shape measurement sensor according to claim 1, comprising two cylindrical lenses.
えることを特徴とする請求項１記載の２次元形状計測セ
ンサー。3. The two-dimensional shape measuring sensor according to claim 1, wherein the light receiving side is provided with means for making the optical path length the same.
査ミラーを非球面の曲面ミラーにて構成したことを特徴
とする請求項１記載の２次元形状計測センサー。4. The two-dimensional shape measuring sensor according to claim 1, wherein the rotary scanning mirror is composed of an aspherical curved mirror as means for making the optical path length the same.
受光素子の結像位置演算を行なう計測制御手段を有する
ことを特徴とする請求項１、２又は３記載の２次元形状
計測センサー。5. The two-dimensional shape measurement sensor according to claim 1, further comprising a measurement control unit that calculates an image forming position of the light receiving element in synchronization with the rotary scanning mirror on the light receiving side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27085995A JPH09113234A (en) | 1995-10-19 | 1995-10-19 | Sensor for measuring two-dimensional shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27085995A JPH09113234A (en) | 1995-10-19 | 1995-10-19 | Sensor for measuring two-dimensional shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09113234A true JPH09113234A (en) | 1997-05-02 |
Family
ID=17491974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27085995A Pending JPH09113234A (en) | 1995-10-19 | 1995-10-19 | Sensor for measuring two-dimensional shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09113234A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016151938A1 (en) * | 2015-03-23 | 2016-09-29 | 三菱重工業株式会社 | Laser radar device and traveling body |
| WO2016151939A1 (en) * | 2015-03-23 | 2016-09-29 | 三菱重工業株式会社 | Laser radar device and traveling body |
| WO2018135734A1 (en) * | 2017-01-20 | 2018-07-26 | (주) 인텍플러스 | Three-dimensional shape measuring apparatus and measuring method |
-
1995
- 1995-10-19 JP JP27085995A patent/JPH09113234A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016151938A1 (en) * | 2015-03-23 | 2016-09-29 | 三菱重工業株式会社 | Laser radar device and traveling body |
| WO2016151939A1 (en) * | 2015-03-23 | 2016-09-29 | 三菱重工業株式会社 | Laser radar device and traveling body |
| JP2016180623A (en) * | 2015-03-23 | 2016-10-13 | 三菱重工業株式会社 | Laser radar apparatus and travel body |
| JP2016180624A (en) * | 2015-03-23 | 2016-10-13 | 三菱重工業株式会社 | Laser radar apparatus and travel body |
| US10534085B2 (en) | 2015-03-23 | 2020-01-14 | Mitsubishi Heavy Industries, Ltd. | Laser radar device and traveling body |
| US11009606B2 (en) | 2015-03-23 | 2021-05-18 | Mitsubishi Heavy Industries, Ltd. | Laser radar device and traveling body |
| WO2018135734A1 (en) * | 2017-01-20 | 2018-07-26 | (주) 인텍플러스 | Three-dimensional shape measuring apparatus and measuring method |
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