JPH089161Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH089161Y2
JPH089161Y2 JP104390U JP104390U JPH089161Y2 JP H089161 Y2 JPH089161 Y2 JP H089161Y2 JP 104390 U JP104390 U JP 104390U JP 104390 U JP104390 U JP 104390U JP H089161 Y2 JPH089161 Y2 JP H089161Y2
Authority
JP
Japan
Prior art keywords
sample
powdery
suppressor electrode
receiver
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP104390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0392769U (OSRAM
Inventor
孝一 土田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP104390U priority Critical patent/JPH089161Y2/ja
Publication of JPH0392769U publication Critical patent/JPH0392769U/ja
Application granted granted Critical
Publication of JPH089161Y2 publication Critical patent/JPH089161Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP104390U 1990-01-09 1990-01-09 イオン注入装置 Expired - Lifetime JPH089161Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP104390U JPH089161Y2 (ja) 1990-01-09 1990-01-09 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP104390U JPH089161Y2 (ja) 1990-01-09 1990-01-09 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0392769U JPH0392769U (OSRAM) 1991-09-20
JPH089161Y2 true JPH089161Y2 (ja) 1996-03-13

Family

ID=31504975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP104390U Expired - Lifetime JPH089161Y2 (ja) 1990-01-09 1990-01-09 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH089161Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0392769U (OSRAM) 1991-09-20

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