JPH087626Y2 - エッチング装置 - Google Patents

エッチング装置

Info

Publication number
JPH087626Y2
JPH087626Y2 JP1987172460U JP17246087U JPH087626Y2 JP H087626 Y2 JPH087626 Y2 JP H087626Y2 JP 1987172460 U JP1987172460 U JP 1987172460U JP 17246087 U JP17246087 U JP 17246087U JP H087626 Y2 JPH087626 Y2 JP H087626Y2
Authority
JP
Japan
Prior art keywords
etching
sample
pretreatment
ion beam
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987172460U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0176034U (enrdf_load_stackoverflow
Inventor
義孝 笹村
耕自 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1987172460U priority Critical patent/JPH087626Y2/ja
Publication of JPH0176034U publication Critical patent/JPH0176034U/ja
Application granted granted Critical
Publication of JPH087626Y2 publication Critical patent/JPH087626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987172460U 1987-11-11 1987-11-11 エッチング装置 Expired - Lifetime JPH087626Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172460U JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172460U JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Publications (2)

Publication Number Publication Date
JPH0176034U JPH0176034U (enrdf_load_stackoverflow) 1989-05-23
JPH087626Y2 true JPH087626Y2 (ja) 1996-03-04

Family

ID=31464431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172460U Expired - Lifetime JPH087626Y2 (ja) 1987-11-11 1987-11-11 エッチング装置

Country Status (1)

Country Link
JP (1) JPH087626Y2 (enrdf_load_stackoverflow)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157523A (en) * 1981-03-25 1982-09-29 Hitachi Ltd Forming method for pattern
JPS57208143A (en) * 1981-06-17 1982-12-21 Mitsubishi Electric Corp Method for forming fine pattern
JPS6170726A (ja) * 1984-09-14 1986-04-11 Mitsubishi Electric Corp パタ−ン形成方法
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置
JPS625636A (ja) * 1985-07-01 1987-01-12 Nec Corp Ｓｉドライエツチング・表面処理装置
JPS6377120A (ja) * 1986-09-19 1988-04-07 Mitsubishi Electric Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPH0176034U (enrdf_load_stackoverflow) 1989-05-23

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