JPH087459Y2 - スカベンジヤの熱排気自動制御装置 - Google Patents

スカベンジヤの熱排気自動制御装置

Info

Publication number
JPH087459Y2
JPH087459Y2 JP1987116379U JP11637987U JPH087459Y2 JP H087459 Y2 JPH087459 Y2 JP H087459Y2 JP 1987116379 U JP1987116379 U JP 1987116379U JP 11637987 U JP11637987 U JP 11637987U JP H087459 Y2 JPH087459 Y2 JP H087459Y2
Authority
JP
Japan
Prior art keywords
scavenger
temperature
adjusting device
duct air
heat exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987116379U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6421413U (enrdf_load_stackoverflow
Inventor
伸 中巻
信治 井田
肇 石田
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1987116379U priority Critical patent/JPH087459Y2/ja
Publication of JPS6421413U publication Critical patent/JPS6421413U/ja
Application granted granted Critical
Publication of JPH087459Y2 publication Critical patent/JPH087459Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Feedback Control In General (AREA)
  • Control Of Temperature (AREA)
JP1987116379U 1987-07-29 1987-07-29 スカベンジヤの熱排気自動制御装置 Expired - Lifetime JPH087459Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987116379U JPH087459Y2 (ja) 1987-07-29 1987-07-29 スカベンジヤの熱排気自動制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987116379U JPH087459Y2 (ja) 1987-07-29 1987-07-29 スカベンジヤの熱排気自動制御装置

Publications (2)

Publication Number Publication Date
JPS6421413U JPS6421413U (enrdf_load_stackoverflow) 1989-02-02
JPH087459Y2 true JPH087459Y2 (ja) 1996-03-04

Family

ID=31358862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987116379U Expired - Lifetime JPH087459Y2 (ja) 1987-07-29 1987-07-29 スカベンジヤの熱排気自動制御装置

Country Status (1)

Country Link
JP (1) JPH087459Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147253U (enrdf_load_stackoverflow) * 1976-05-04 1977-11-08
JPS628633U (enrdf_load_stackoverflow) * 1985-07-01 1987-01-19
JPS6266627A (ja) * 1985-09-19 1987-03-26 Oki Electric Ind Co Ltd 半導体熱処理装置

Also Published As

Publication number Publication date
JPS6421413U (enrdf_load_stackoverflow) 1989-02-02

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