JPH0869950A - Formation of outer electrode of ceramic electronic part - Google Patents

Formation of outer electrode of ceramic electronic part

Info

Publication number
JPH0869950A
JPH0869950A JP6205665A JP20566594A JPH0869950A JP H0869950 A JPH0869950 A JP H0869950A JP 6205665 A JP6205665 A JP 6205665A JP 20566594 A JP20566594 A JP 20566594A JP H0869950 A JPH0869950 A JP H0869950A
Authority
JP
Japan
Prior art keywords
external electrode
electrode paste
film
ceramic element
paste film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6205665A
Other languages
Japanese (ja)
Inventor
Masaki Takagi
政樹 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP6205665A priority Critical patent/JPH0869950A/en
Publication of JPH0869950A publication Critical patent/JPH0869950A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a ceramic electronic part having an outer electrode which has a nearly uniform film thickness as a whole and is free from voids. CONSTITUTION: An end of a ceramic element is dipped in and pulled from a paste layer of electrode materials formed on a surface plate for forming an outer electrode paste film 3 on the end of the ceramic element 2. The unsolidified outer electrode past film 3 which is formed on the end of the ceramic element 2 is pressed to a flat plate 6 on which a mold-release agent layer 5 for this outer electrode paste film 3 is formed, the film 3 is pushed up, and in this condition, ultrasolic vibration is applied to the outer electrode paste film 3. This makes film thickness of the outer electrode paste film 3 formed on the end of the ceramic element 2 uniform, then, drying is performed. After the outer electrode paste film 3 is solidified, the ceramic element 2 is taken out of the flat plate 6 and baked.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミック電子部品の
外部電極形成方法に関し、特に例えば、積層コンデン
サ、チップ抵抗、チップインダクタなどのように、端部
に外部電極を有するセラミック電子部品の外部電極形成
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming an external electrode of a ceramic electronic component, and more particularly to an external electrode of a ceramic electronic component having an external electrode at an end thereof, such as a multilayer capacitor, a chip resistor, a chip inductor and the like. It relates to a forming method.

【0002】[0002]

【従来の技術】図1の(a)及び(b)は従来の電子部
品の外部電極形成方法を示し、電極材料ペースト層にセ
ラミック素子を浸漬し、引上げる工程を示す説明図であ
る。図2は図1の工程で得られた外部電極ペースト膜の
状態を示す要部拡大断面図である。図1からわかるよう
に、定盤9上に形成された電極材料ペースト層1にセラ
ミック素子2の端部を矢印方向に浸漬して、引上げる。
これによって、セラミック素子2の端部に外部電極ペー
スト膜3が形成され、その後この外部電極ペースト膜3
を焼成し、外部電極が形成される。
2. Description of the Related Art FIGS. 1A and 1B are explanatory views showing a conventional method of forming an external electrode of an electronic component, showing a step of immersing a ceramic element in an electrode material paste layer and pulling it up. FIG. 2 is an enlarged sectional view of an essential part showing the state of the external electrode paste film obtained in the step of FIG. As can be seen from FIG. 1, the end portion of the ceramic element 2 is dipped in the electrode material paste layer 1 formed on the surface plate 9 in the direction of the arrow and pulled up.
As a result, the external electrode paste film 3 is formed on the end portion of the ceramic element 2, and then the external electrode paste film 3 is formed.
Is fired to form external electrodes.

【0003】[0003]

【発明が解決しようとする課題】ところが、このような
方法を用いると、電極材料ペースト層1から引き上げた
セラミック素子2の端部に付着した外部電極ペースト膜
は自重で垂れ下がり、図2に示すように、セラミック素
子2の端部の下面の膜厚Tが厚くなりすぎたり、セラミ
ック素子2の端部の周縁部の膜厚tが薄くなりすぎたり
する場合がある。また、セラミック素子2を電極材料ペ
ースト層1に浸漬するときに、セラミック素子2の端部
の下面のエアーを巻き込むことがあり、これがセラミッ
ク素子2の端部の下面の外部電極ペースト膜3に気泡と
して残存し、焼成後の外部電極にボイドが発生する場合
がある。
However, when such a method is used, the external electrode paste film attached to the end of the ceramic element 2 pulled up from the electrode material paste layer 1 hangs down by its own weight, as shown in FIG. In addition, the film thickness T of the lower surface of the end of the ceramic element 2 may become too thick, or the film thickness t of the peripheral portion of the end of the ceramic element 2 may become too thin. Further, when the ceramic element 2 is immersed in the electrode material paste layer 1, air on the lower surface of the end portion of the ceramic element 2 may be trapped, which causes bubbles in the external electrode paste film 3 on the lower surface of the end portion of the ceramic element 2. As a result, voids may be generated in the external electrode after firing.

【0004】このような外部電極を有するセラミック電
子部品は、膜厚の薄い部分やボイドの存在する部分から
湿気が浸入しやすく、これが残留すると絶縁抵抗等を劣
化させることがある。従って、このセラミック電子部品
を耐湿試験したり、外部電極の表面に湿式電解メッキを
施したりする場合には、湿気やメッキ液がセラミック素
子2の内部に浸入し、電子部品の信頼性を悪くする。
In a ceramic electronic component having such an external electrode, moisture easily enters from a portion having a thin film thickness or a portion where a void exists, and if it remains, the insulation resistance may be deteriorated. Therefore, when this ceramic electronic component is subjected to a moisture resistance test or when the surface of the external electrode is subjected to wet electrolytic plating, moisture or a plating solution penetrates into the ceramic element 2 and deteriorates the reliability of the electronic component. .

【0005】それゆえに、本発明の主たる目的は、全体
的にほぼ均一な膜厚でかつボイドが発生しにくい、セラ
ミック電子部品の外部電極形成方法を提供することにあ
る。
Therefore, a main object of the present invention is to provide a method for forming an external electrode for a ceramic electronic component, which has a film thickness which is substantially uniform as a whole and in which voids are less likely to occur.

【0006】[0006]

【課題を解決するための手段】本発明は、定盤上に形成
された電極材料ペースト層にセラミック素子の端部を浸
漬し、引上げて、セラミック素子の端部に外部電極ペー
スト膜を形成し、外部電極ペースト膜に対する離型剤層
が形成された平面板に、前記セラミック素子の端部に形
成された固化前の前記外部電極ペースト膜を押し当て
て、その膜を押し上げ、その状態で前記外部電極ペース
ト膜に超音波振動を与えることにより、前記セラミック
素子の端部に形成された前記外部電極ペースト膜の膜厚
を整え、その後乾燥して前記外部電極ペースト膜を固化
した後、前記セラミック素子を前記平面板より取り出し
て焼成することを特徴とする、セラミック電子部品の外
部電極形成方法である。
According to the present invention, an end portion of a ceramic element is immersed in an electrode material paste layer formed on a surface plate and pulled up to form an external electrode paste film on the end portion of the ceramic element. The external electrode paste film before solidification formed at the end of the ceramic element is pressed against the flat plate on which the release agent layer for the external electrode paste film is formed, and the film is pushed up. By applying ultrasonic vibration to the external electrode paste film, the film thickness of the external electrode paste film formed on the end portion of the ceramic element is adjusted, and then dried to solidify the external electrode paste film, and then the ceramic A method for forming an external electrode of a ceramic electronic component, comprising taking out an element from the flat plate and firing the element.

【0007】[0007]

【作用】定盤上に形成された電極材料ペースト層から引
き上げたセラミック素子の端部に付着した外部電極ペー
スト膜は自重で垂れる。そこで、外部電極ペースト膜に
対する離型剤層が形成された平面板に、前記セラミック
素子の端部に形成された固化前の前記外部電極ペースト
膜を押し当てて、垂れた膜を押し上げ、その状態で前記
外部電極ペースト膜に超音波振動を与えることによっ
て、外部電極ペースト膜の流動性を良くして、外部電極
ペースト膜の膜厚を整え、全体的にほぼ均一な膜厚とす
るとともに、外部電極ペースト膜の中の気泡が押し出さ
れる。更に、前記外部電極ペースト膜を前記平面板に押
し当てられた状態で乾燥することにより、その膜の形状
がくずれないように固化できる。その後、外部電極ペー
スト膜が固化されたセラミック素子を前記平面板から取
り出しても、前記平面板上に離型剤が塗布されているた
めに、前記外部電極ペースト膜が平面板に取られること
はない。このようにして形成された外部電極ペースト膜
を焼成することにより、全体的にほぼ均一な膜厚でかつ
ボイドのない外部電極を有するセラミック電子部品を得
ることができる。よって、外部電極からセラミック素子
の中に湿気やメッキ液の浸入を抑制できる。
The external electrode paste film attached to the end of the ceramic element pulled up from the electrode material paste layer formed on the surface plate hangs by its own weight. Therefore, the external electrode paste film before solidification formed at the end of the ceramic element is pressed against the flat plate on which the release agent layer for the external electrode paste film is formed, and the sagging film is pushed up, By applying ultrasonic vibration to the external electrode paste film, the fluidity of the external electrode paste film is improved, the film thickness of the external electrode paste film is adjusted, and a substantially uniform film thickness is obtained. Bubbles in the electrode paste film are pushed out. Furthermore, by drying the external electrode paste film while being pressed against the flat plate, the external electrode paste film can be solidified so that the shape of the film does not collapse. Thereafter, even if the ceramic element in which the external electrode paste film is solidified is taken out from the plane plate, the external electrode paste film is not taken on the plane plate because the release agent is applied on the plane plate. Absent. By firing the external electrode paste film thus formed, it is possible to obtain a ceramic electronic component having an external electrode having a substantially uniform film thickness as a whole and having no void. Therefore, it is possible to suppress the infiltration of moisture and the plating liquid into the ceramic element from the external electrodes.

【0008】[0008]

【発明の効果】従って、本発明のセラミック電子部品
は、耐湿試験をしたり、外部電極の表面に湿式電解メッ
キを施しても、湿気やメッキ液のセラミック素子の内部
への浸入を抑制できるので、信頼性の高い電子部品を得
ることができる。
Therefore, the ceramic electronic component of the present invention can suppress the infiltration of moisture and plating liquid into the inside of the ceramic element even when the moisture resistance test is performed or the surface of the external electrode is subjected to wet electrolytic plating. Therefore, highly reliable electronic components can be obtained.

【0009】[0009]

【実施例】以下、図面を参照しつつ実施例を説明するこ
とにより、本発明を明らかにする。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be clarified by describing embodiments with reference to the drawings.

【0010】まず、図1に示す従来と同様にして、セラ
ミック素子2の端部を、定盤9上に外部電極用の電極材
料ペースト層1に浸漬して引き上げ、セラミック素子2
の端部に外部電極ペースト膜3が塗布される。セラミッ
ク素子2として、積層コンデンサ用セラミック素子が使
用される。積層コンデンサ用セラミック素子は、例えば
誘電体磁器材料で形成されたグリーンシートと内部電極
材料とを積層し、焼成することによって形成される。こ
の場合、複数の内部電極は誘電体磁器を介して対向し、
かつそれらが交互に誘電体磁器の両端に露出するように
形成される。電極材料ペーストとしては、例えば、銀と
ガラス材料と溶剤とを混合したものが用いられる。電極
材料ペイント層1の厚みは、セラミック素子2の端部の
下面に隣接する側面にかかる外部電極寸法に合わせて設
定される。このようにして、セラミック素子2の端部に
形成された外部電極ペースト膜3は、従来と同様、図2
に示すようにその中に気泡4が存在したり、また、セラ
ミック素子2の端部の下面の周縁部の膜厚tが薄くなっ
たりしている。
First, in the same manner as in the prior art shown in FIG. 1, the end portion of the ceramic element 2 is immersed in the electrode material paste layer 1 for the external electrode on the surface plate 9 and pulled up to make the ceramic element 2
The external electrode paste film 3 is applied to the end portions of. A ceramic element for a multilayer capacitor is used as the ceramic element 2. The ceramic element for a multilayer capacitor is formed, for example, by stacking a green sheet made of a dielectric ceramic material and an internal electrode material and firing the stacked layers. In this case, the plurality of internal electrodes face each other via the dielectric porcelain,
Further, they are formed so as to be alternately exposed at both ends of the dielectric ceramic. As the electrode material paste, for example, a mixture of silver, a glass material and a solvent is used. The thickness of the electrode material paint layer 1 is set according to the dimension of the external electrode applied to the side surface adjacent to the lower surface of the end portion of the ceramic element 2. In this way, the external electrode paste film 3 formed on the end portion of the ceramic element 2 is formed as shown in FIG.
As shown in FIG. 5, the bubbles 4 are present therein, and the film thickness t of the peripheral portion of the lower surface of the end portion of the ceramic element 2 is thin.

【0011】次に、このように外部電極ペースト膜3が
形成されたセラミック素子2を、図3に示すように、外
部電極ペースト膜に対する離型剤層5が形成された平面
板6に、セラミック素子2の端部の下面に垂れた固化前
の前記外部電極ペースト膜3を押し当てて、垂れた膜を
押し上げる。なお、離型剤は外部電極ペーストに対して
濡れ性の悪いもので、例えば、ケイ素樹脂、フッ素系樹
脂、ステアリン酸塩類、またはワックス類等の中から選
択される。
Next, as shown in FIG. 3, the ceramic element 2 having the external electrode paste film 3 formed thereon is placed on a flat plate 6 having a release agent layer 5 for the external electrode paste film formed thereon, as shown in FIG. The external electrode paste film 3 before being hung down is pressed against the lower surface of the end portion of the element 2 to push up the hung film. The release agent has poor wettability with respect to the external electrode paste, and is selected from, for example, silicon resin, fluororesin, stearates, waxes and the like.

【0012】その後、図4に示すように、平面板6に超
音波振動子7を当接させて振動を与える。その結果、平
面板6を介して、それに押し当てられた状態の外部電極
ペースト膜3に超音波振動が与えられて、外部電極ペー
スト膜3は流動性が良くなり、外部電極ペースト膜の膜
厚が整えられるとともに、外部電極ペースト膜の中の気
泡が存在していてもそれが外部に押し出される。なお、
使用される超音波振動数は数十KHz〜数百KHz程度
で外部電極ペーストの粘度やセラミック素子2の寸法な
どから適宜定める。
After that, as shown in FIG. 4, an ultrasonic vibrator 7 is brought into contact with the flat plate 6 to apply vibration. As a result, ultrasonic vibration is applied to the external electrode paste film 3 pressed against the external electrode paste film 3 through the flat plate 6, so that the external electrode paste film 3 has good fluidity, and the film thickness of the external electrode paste film is increased. Is adjusted, and even if bubbles are present in the external electrode paste film, they are extruded to the outside. In addition,
The ultrasonic vibration frequency used is about several tens KHz to several hundreds KHz, and is appropriately determined based on the viscosity of the external electrode paste, the dimensions of the ceramic element 2, and the like.

【0013】その後、図4の乾燥炉8の中で、前記外部
電極ペースト膜3は前記平面板6に押し当てられた状態
で乾燥され、固化される。乾燥が終了すれば、乾燥炉8
から取り出し、平面板6よりセラミック素子を取り出せ
ばよい。この場合、平面板6に離型剤が塗布されている
ため、前記外部電極ペースト膜3が前記平面板6に取ら
れることはない。なお、乾燥条件は電極材料ペースト1
に使用される溶剤の種類によって、適宜定める。また、
使用される離型剤は少なくとも、この乾燥工程を終了し
ても、外部電極ペースト膜3に対して離型性が失われる
ことの無いものが用いられる。
Thereafter, in the drying oven 8 shown in FIG. 4, the external electrode paste film 3 is dried and solidified while being pressed against the plane plate 6. When the drying is completed, the drying oven 8
Then, the ceramic element may be taken out from the flat plate 6. In this case, since the release agent is applied to the flat plate 6, the external electrode paste film 3 is not taken by the flat plate 6. The drying conditions are electrode material paste 1
It is determined appropriately depending on the type of solvent used in. Also,
As the release agent used, at least a release agent that does not lose its releasability with respect to the external electrode paste film 3 even after this drying step is completed is used.

【0014】その結果、得られた外部電極ペースト膜
は、図5に示すように、セラミック素子2の端部の膜厚
Tとセラミック素子2の端部の下面の周縁部の膜厚tと
の差が小さくなり、全体的にほぼ均一な厚みの外部電極
ペースト膜3が形成される。また、外部電極ペースト膜
3の中には気泡が残存していない。
As a result, the obtained external electrode paste film has a film thickness T at the end portion of the ceramic element 2 and a film thickness t at the peripheral portion of the lower surface of the ceramic element 2 as shown in FIG. The difference is reduced, and the external electrode paste film 3 having a substantially uniform thickness is formed as a whole. In addition, no bubbles remain in the external electrode paste film 3.

【0015】よって、上記の外部電極ペースト膜3を焼
成することによって、全体的にほぼ均一な膜厚でかつボ
イドのない外部電極を有するセラミック電子部品を得る
ことができる。従って、この実施例の外部電極が形成さ
れたセラミック電子部品は、耐湿試験をしたり、外部電
極の表面に湿式電解メッキを施しても、湿気やメッキ液
がセラミック素子の内部に浸入しにくく、信頼性の高い
電子部品を得ることができる。なお、このセラミック電
子部品の製造方法は、積層コンデンサに限らず、チップ
抵抗やチップインダクタなど、外部電極を有するあらゆ
る電子部品に応用できることは言うまでもない。
Therefore, by firing the above-mentioned external electrode paste film 3, it is possible to obtain a ceramic electronic component having an external electrode having a substantially uniform film thickness and having no voids. Therefore, the ceramic electronic component formed with the external electrode of this embodiment, even if subjected to a humidity resistance test, or wet electrolytic plating on the surface of the external electrode, moisture or plating liquid is unlikely to enter the inside of the ceramic element, A highly reliable electronic component can be obtained. It goes without saying that the method for manufacturing the ceramic electronic component is not limited to the multilayer capacitor and can be applied to any electronic component having an external electrode such as a chip resistor and a chip inductor.

【図面の簡単な説明】[Brief description of drawings]

【図1】従来の電子部品の外部電極形成方法を説明する
図。
FIG. 1 is a diagram illustrating a conventional method of forming an external electrode of an electronic component.

【図2】 図1の工程で得られた外部電極ペースト膜の
状態を示す要部拡大断面図。
FIG. 2 is an enlarged sectional view of an essential part showing a state of an external electrode paste film obtained in the step of FIG.

【図3】外部電極ペースト膜を離型剤が形成された平面
板に押し当てた状態を示す要部拡大断面図。
FIG. 3 is an enlarged sectional view of an essential part showing a state in which an external electrode paste film is pressed against a flat plate on which a release agent is formed.

【図4】外部電極ペースト膜に超音波振動を与えて、そ
の後乾燥する工程を示す説明図。
FIG. 4 is an explanatory view showing a step of applying ultrasonic vibration to the external electrode paste film and then drying it.

【図5】本発明で得られた外部電極ペースト膜の状態を
示す要部拡大断面図である。
FIG. 5 is an enlarged sectional view of an essential part showing a state of an external electrode paste film obtained by the present invention.

【符号の説明】[Explanation of symbols]

1 電極材料ペースト層 2 セラミック素子 3 外部電極ペースト膜 4 気泡 5 離型剤層 6 平面板 7 超音波振動子 8 乾燥炉 9 定盤 1 Electrode Material Paste Layer 2 Ceramic Element 3 External Electrode Paste Film 4 Bubbles 5 Release Agent Layer 6 Plane Plate 7 Ultrasonic Transducer 8 Drying Furnace 9 Surface Plate

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 H01G 4/252 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical indication H01G 4/252

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 定盤上に形成された電極材料ペースト層
にセラミック素子の端部を浸漬し、引上げて、セラミッ
ク素子の端部に外部電極ペースト膜を形成し、外部電極
ペースト膜に対する離型剤層が形成された平面板に、前
記セラミック素子の端部に形成された固化前の前記外部
電極ペースト膜を押し当てて、その膜を押し上げ、その
状態で前記外部電極ペースト膜に超音波振動を与えるこ
とにより、前記セラミック素子の端部に形成された前記
外部電極ペースト膜の膜厚を整え、その後乾燥して前記
外部電極ペースト膜を固化した後、前記セラミック素子
を前記平面板より取り出して焼成することを特徴とす
る、セラミック電子部品の外部電極形成方法。
1. An end portion of a ceramic element is dipped in an electrode material paste layer formed on a surface plate and pulled up to form an external electrode paste film on the end portion of the ceramic element, and a release from the external electrode paste film is performed. The external electrode paste film before solidification, which is formed at the end portion of the ceramic element, is pressed against the flat plate on which the agent layer is formed, the film is pushed up, and ultrasonic vibration is applied to the external electrode paste film in that state. By adjusting the film thickness of the external electrode paste film formed at the end of the ceramic element, and then drying to solidify the external electrode paste film, the ceramic element is taken out from the flat plate. A method for forming an external electrode for a ceramic electronic component, which comprises firing.
JP6205665A 1994-08-30 1994-08-30 Formation of outer electrode of ceramic electronic part Pending JPH0869950A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6205665A JPH0869950A (en) 1994-08-30 1994-08-30 Formation of outer electrode of ceramic electronic part

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Application Number Priority Date Filing Date Title
JP6205665A JPH0869950A (en) 1994-08-30 1994-08-30 Formation of outer electrode of ceramic electronic part

Publications (1)

Publication Number Publication Date
JPH0869950A true JPH0869950A (en) 1996-03-12

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JP6205665A Pending JPH0869950A (en) 1994-08-30 1994-08-30 Formation of outer electrode of ceramic electronic part

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Cited By (9)

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JP2011166030A (en) * 2010-02-12 2011-08-25 Murata Mfg Co Ltd Method of forming electrode and method of manufacturing electronic component containing the electrode
JP2013149936A (en) * 2012-01-18 2013-08-01 Samsung Electro-Mechanics Co Ltd Multilayer ceramic electronic component and fabrication method thereof
US9153381B2 (en) 2012-09-27 2015-10-06 Samsung Electro-Mechanics Co., Ltd. Chip device and method for manufacturing the same
JP2017168746A (en) * 2016-03-17 2017-09-21 株式会社村田製作所 Electronic component and method of manufacturing electronic component
JP2017183469A (en) * 2016-03-30 2017-10-05 太陽誘電株式会社 Manufacturing method for multilayer ceramic electronic component, and multilayer ceramic electronic component
WO2018070093A1 (en) * 2016-10-14 2018-04-19 株式会社クリエゾン Method and apparatus for manufacturing electronic component, and electronic component
KR20180058009A (en) * 2016-11-23 2018-05-31 삼성전기주식회사 Capacitor and method of fabricating the same
KR20180094827A (en) * 2016-11-23 2018-08-24 삼성전기주식회사 Capacitor and method of fabricating the same
CN114851626A (en) * 2022-04-06 2022-08-05 黎荣华 Anti-adhesion electrode paste demolding equipment

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011166030A (en) * 2010-02-12 2011-08-25 Murata Mfg Co Ltd Method of forming electrode and method of manufacturing electronic component containing the electrode
JP2013149936A (en) * 2012-01-18 2013-08-01 Samsung Electro-Mechanics Co Ltd Multilayer ceramic electronic component and fabrication method thereof
US9153381B2 (en) 2012-09-27 2015-10-06 Samsung Electro-Mechanics Co., Ltd. Chip device and method for manufacturing the same
JP2017168746A (en) * 2016-03-17 2017-09-21 株式会社村田製作所 Electronic component and method of manufacturing electronic component
JP2017183469A (en) * 2016-03-30 2017-10-05 太陽誘電株式会社 Manufacturing method for multilayer ceramic electronic component, and multilayer ceramic electronic component
WO2018070093A1 (en) * 2016-10-14 2018-04-19 株式会社クリエゾン Method and apparatus for manufacturing electronic component, and electronic component
KR20180058009A (en) * 2016-11-23 2018-05-31 삼성전기주식회사 Capacitor and method of fabricating the same
KR20180094827A (en) * 2016-11-23 2018-08-24 삼성전기주식회사 Capacitor and method of fabricating the same
CN114851626A (en) * 2022-04-06 2022-08-05 黎荣华 Anti-adhesion electrode paste demolding equipment
CN114851626B (en) * 2022-04-06 2023-11-03 鄂尔多斯市广利炭素有限责任公司 Anti-adhesion electrode paste demolding equipment

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