JPH0867914A - Production of ic lead frame material - Google Patents
Production of ic lead frame materialInfo
- Publication number
- JPH0867914A JPH0867914A JP20111494A JP20111494A JPH0867914A JP H0867914 A JPH0867914 A JP H0867914A JP 20111494 A JP20111494 A JP 20111494A JP 20111494 A JP20111494 A JP 20111494A JP H0867914 A JPH0867914 A JP H0867914A
- Authority
- JP
- Japan
- Prior art keywords
- lead frame
- annealing
- temper
- strength
- elongation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Heat Treatment Of Sheet Steel (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、電子機器に用いられ
るＩＣ（集積回路）リ−ドフレ−ム材の製造方法に係わ
り、更に詳しくは冷間圧延後の焼鈍、調質圧延及び矯正
からなる工程を調質焼鈍工程のみに簡略化し、安価で諸
特性に優れたＩＣリ−ドフレ−ム材を製造する方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an IC (integrated circuit) lead frame material used in electronic equipment, and more specifically, it comprises annealing after cold rolling, temper rolling and straightening. The present invention relates to a method for producing an IC lead frame material which is inexpensive and excellent in various characteristics by simplifying the process only to a temper annealing process.
【０００２】[0002]
【従来技術とその課題】ＩＣリ−ドフレ−ム用材（以下
単にリ−ドフレ−ム用材という）としては、一般に半導
体に近い熱膨張係数を有するFe−40〜45％Ni合金と放熱
性（熱伝導性）に優れたCu合金が使用されている。これ
らの内Fe−40〜45％Ni合金は、板厚0.15〜0.25mm程度の
薄板が用いられている。近時ＩＣの小型高集積化にとも
ないリ−ドフレ−ムにも多ピン化の要求が高まっている
が、その要求に答えるためにはリ−ドフレ−ム材料の薄
肉化を図ると共に変形を防止するために高強度化する必
要がある。2. Description of the Related Art As an IC lead frame material (hereinafter simply referred to as a lead frame material), a Fe-40 to 45% Ni alloy having a thermal expansion coefficient generally close to that of a semiconductor and heat radiation (heat A Cu alloy with excellent conductivity is used. Among these, Fe-40 to 45% Ni alloy is used as a thin plate having a plate thickness of about 0.15 to 0.25 mm. Recently, the demand for multi-pins in the lead frame has been increasing with the miniaturization and high integration of ICs. To meet the demand, the thickness of the lead frame material is reduced and the deformation is prevented. Therefore, it is necessary to increase the strength.
【０００３】薄板、高強度化したリ−ドフレ−ム用材に
更に要求されるのは、1 ）精密加工に耐える優れた板形
状、2 ）加工後のリ−ドフレ−ムに歪が現れない低残留
応力、3 ）リード部の曲げ加工に必要な伸びを有するこ
と等である。Further required for thin plate and high-strength lead frame material are 1) excellent plate shape that can withstand precision processing, and 2) low distortion that does not appear in the lead frame after processing. Residual stress, 3) Elongation required for bending the lead.
【０００４】リ−ドフレ−ム用Fe−40〜45％Ni合金材料
の製造工程は、図２に示すような工程が一般的である。
すなわち、熱間圧延後一回または複数回の「冷間圧延＋
再結晶焼鈍」工程を経た材料は、所定の硬さ、引張り特
性を付与するため調質圧延が施される。その後、硬さ、
引張り特性を変化させない条件で、テンションレベラ
ー、歪取り焼鈍、テンションアニ−ル等の矯正行程の一
つ叉は複数の工程を通すことにより板形状の改善、残留
応力の低減が図られる。The manufacturing process of Fe-40 to 45% Ni alloy material for lead frame is generally as shown in FIG.
That is, one or more times of “cold rolling + after hot rolling +
The material that has been subjected to the "recrystallization annealing" step is subjected to temper rolling in order to impart predetermined hardness and tensile properties. Then hardness,
It is possible to improve the plate shape and reduce residual stress by passing through one or more steps of a straightening process such as tension leveler, strain relief annealing, and tension annealing under the condition that the tensile properties are not changed.
【０００５】上記の板形状改善、残留応力低減を目的と
したリ−ドフレ−ム材の製造方法としては、例えば、特
開平4-214821号公報にて提案されている。この方法は、
リ−ドフレ−ム用合金の長尺の薄板に対し、その長手方
向に張力を加えつつ、張力の加えられた部分を加熱する
焼鈍処理、すなわちテンションアニ−ルをすることによ
り剛性および靭性を向上させると共に、残留応力を低減
させる方法である。A method for manufacturing a lead frame material for the purpose of improving the plate shape and reducing the residual stress is proposed in, for example, Japanese Patent Laid-Open No. 4-214821. This method
Rigidity and toughness are improved by applying annealing to a long thin sheet of a lead frame alloy while applying tension in the longitudinal direction, and heating the portion to which tension is applied, i.e., tension annealing. This is a method of reducing the residual stress.
【０００６】一方、リ−ドフレ−ム材の高強度化の方法
としては、Co、Nb、Ti等の元素を添加する方法、あるい
は図２の工程で調質圧延時に圧下率を増加させる方法が
ある。On the other hand, as a method for increasing the strength of the lead frame material, a method of adding an element such as Co, Nb, or Ti, or a method of increasing the rolling reduction during temper rolling in the step of FIG. is there.
【０００７】合金元素の添加による強度を向上させる方
法は、添加元素が高価であり、コストアップにつながる
ので好ましくない。The method of improving the strength by adding an alloy element is not preferable because the added element is expensive and leads to an increase in cost.
【０００８】従来の調質圧延による方法においては、圧
下率を増加させることにより高強度化することができる
が、強度（引張強さ）が上がる反面、伸びが低下してリ
ードの曲げ性が低下して、折れ等を招いてしまうという
問題があった。このため、一般的にFe−42Ni合金の場
合、調質圧下率を20％程度にすることにより引張強さ63
〜65Kgf/mm2 （ＨV200〜210 ）程度の強度で、伸び7 〜
10％が確保されている。In the conventional temper rolling method, the strength can be increased by increasing the rolling reduction, but the strength (tensile strength) is increased, but the elongation is decreased and the bendability of the lead is decreased. Then, there is a problem that it causes a break or the like. Therefore, in general, in the case of Fe-42Ni alloy, the tensile strength of 63
~ 65Kgf / mm 2 (HV200 ~ 210) with strength of 7 ~
10% is secured.
【０００９】また、これ等の方法はいずれも冷間圧延の
後に、焼鈍、調質圧延、及び矯正という工程が必ず必要
なため材料のコストアップの原因となっている。Further, all of these methods cause increase in material cost because the steps of annealing, temper rolling, and straightening are always required after cold rolling.
【００１０】[0010]
【発明が解決しようとする課題】本発明の目的は、従来
のリ−ドフレ−ム材の製造工程を簡略化すると共に、要
求される機械的性質に容易に対応でき、高強度でありな
がら伸びも大きく、形状性に優れた低残留応力のリ−ド
フレ−ム用材を製造する方法を提供することにある。SUMMARY OF THE INVENTION The object of the present invention is to simplify the manufacturing process of the conventional lead frame material, to easily meet the required mechanical properties, and to provide high strength and elongation. Another object of the present invention is to provide a method for producing a lead frame material having a large residual stress and a low residual stress which is excellent in shape.
【００１１】[0011]
【課題を解決するための手段】そこで、本発明者等は従
来のリ−ドフレ−ム材の製造工程を簡略化すると共に、
強度調整を容易に行うことができ、材料の曲げ加工性、
形状性が良好で低残留応力のリ−ドフレ−ム用材を製造
する方法について鋭意研究を行った結果以下の知見を得
た。Therefore, the inventors of the present invention have simplified the manufacturing process of the conventional lead frame material, and
The strength can be easily adjusted, the bending workability of the material,
As a result of earnest research on a method for producing a material for a lead frame having good shape and low residual stress, the following findings were obtained.
【００１２】１）図１に示す工程の如く、冷間圧延によ
り加工硬化した後、焼鈍（再結晶焼鈍）及び調質圧延を
施すことなく、単に材料に張力を加えて軟化焼鈍（以下
調質焼鈍と称す）を施すことにより、従来の製造工程に
より製造したリ−ドフレ−ム用材と同等以上の諸特性を
有する材料が得られること。1) As shown in FIG. 1, after work-hardening by cold rolling, the material is not subjected to annealing (recrystallization annealing) and temper rolling, but simply tension is applied to the material for softening annealing (hereinafter referred to as tempering). The material having properties equal to or higher than those of the lead frame material manufactured by the conventional manufacturing process can be obtained by performing annealing).
【００１３】２）冷間圧延材に調質焼鈍を施す場合、焼
鈍温度を600 ℃を超え710 ℃未満の高温が適しているこ
と。2) When temper-annealing the cold-rolled material, a high annealing temperature of more than 600 ° C and less than 710 ° C is suitable.
【００１４】３）調質焼鈍温度を高温にすることにより
強度調整が容易となると共に、形状性も一層の改善が図
られること。3) By increasing the tempering annealing temperature, the strength can be easily adjusted and the shape property can be further improved.
【００１５】４）特に、従来の調質圧延により製造した
材料に比べ、調質焼鈍により製造した材料では、高強度
で伸びの大きな材料が得られること。4) In particular, a material manufactured by temper annealing can obtain a material having high strength and large elongation as compared with a material manufactured by conventional temper rolling.
【００１６】本発明は上記知見に基づき完成されたもの
で、その要旨とするところは、「ＩＣリ−ドフレ−ム用
合金の熱延材を焼鈍した後、冷間圧延により薄板材に加
工し、この薄板材に対して、張力を負荷した状態で600
℃を超え710 ℃未満の温度域に加熱する調質焼鈍を施す
ことを特徴とするＩＣリ−ドフレ−ム材の製造方法」で
ある。The present invention has been completed based on the above findings, and the gist of the present invention is that "a hot rolled material of an alloy for an IC lead frame is annealed and then processed into a thin plate material by cold rolling. , This thin plate is 600
The method for producing an IC lead frame material is characterized by performing a heat treatment annealing in which the temperature is higher than ℃ and lower than 710 ℃.
【００１７】[0017]
【作用】次に、本発明における製造条件を前記の如く限
定した理由と作用について詳述する。Next, the reason why the manufacturing conditions in the present invention are limited as described above and the function thereof will be described in detail.
【００１８】A ）調質焼鈍温度 冷間圧延した材料に張力を負荷した状態で調質焼鈍する
ことにより、冷間圧延で硬化した材料を軟化し、目的と
した強度、伸びを確保すると共に、その後の精密加工に
必要な優れた板形状、低残留応力の材料を製造するため
には、600 ℃を超え710 ℃未満の温度範囲で焼鈍をする
必要がある。A) Tempering annealing temperature By temper annealing the cold-rolled material under tension, the material hardened by cold rolling is softened to secure desired strength and elongation, and It is necessary to anneal in the temperature range of more than 600 ℃ and less than 710 ℃ in order to produce a material with excellent plate shape and low residual stress required for subsequent precision processing.
【００１９】調質焼鈍温度条件を検討するために、板厚
0.15mmの冷間圧延圧下率95％のFe−42Ni合金圧延材を用
い、張力 5〜10Kgf/mm2 を負荷して600 〜750 ℃の温度
範囲において種々温度を変化させて各 1.5分間加熱した
後、硬度測定と引張り試験及び残留応力測定を行った。In order to examine the tempering annealing temperature condition, the plate thickness
Using 0.15 mm cold rolled Fe-42Ni alloy with 95% rolling reduction, a tension of 5 to 10 Kgf / mm 2 was applied, and various temperatures were varied in the temperature range of 600 to 750 ° C for 1.5 minutes each. Then, hardness measurement, tensile test, and residual stress measurement were performed.
【００２０】図３は、冷間圧延材の焼鈍温度と硬度の関
係を示す図であり、図４は、焼鈍温度と引張強さの関係
を示す図である。図３及び図４から明かなように、加熱
温度の上昇に伴い軟化が進む。600 ℃を越え710 ℃未満
の温度域での調質焼鈍を行えば、現在一般に用いられて
いるリ−ドフレ−ム材と同等以上の硬さ、引張強さが得
られる（後述の実施例の表１、試験番号 25 の従来例参
照）。600 ℃以下での焼鈍では軟化せず、硬度、引張強
さは冷間圧延ままのものと殆ど変わらない。一方、710
℃以上では軟化し過ぎ必要な強度が得られなくなること
がわかる。FIG. 3 is a diagram showing the relationship between the annealing temperature and the hardness of the cold rolled material, and FIG. 4 is a diagram showing the relationship between the annealing temperature and the tensile strength. As is clear from FIGS. 3 and 4, softening progresses as the heating temperature rises. If the temper annealing is performed in a temperature range of more than 600 ° C and less than 710 ° C, hardness and tensile strength equal to or higher than those of the lead frame materials generally used at present can be obtained (see Examples described later). (See Table 1, Test No. 25, Conventional Example). It does not soften when annealed at 600 ° C or less, and its hardness and tensile strength are almost the same as those of cold rolled steel. On the other hand, 710
It can be seen that at temperatures above 0 ° C, it softens too much and the required strength cannot be obtained.
【００２１】また、図５に冷間圧延材の焼鈍温度と残留
応力との関係を示す。加熱温度の上昇にともない表層部
に引張残留応力が付加される傾向を示し、材料内に存在
する残留応力は低減した。これらの結果により、好まし
い調質焼鈍の温度範囲としては640 〜700 ℃である。FIG. 5 shows the relationship between the annealing temperature and the residual stress of the cold rolled material. The tensile residual stress tended to be added to the surface layer as the heating temperature increased, and the residual stress existing in the material decreased. From these results, the preferable temperature range for temper annealing is 640 to 700 ° C.
【００２２】焼鈍時間については限定しないが、３分以
内が実操業に適している。好ましくは 1〜1.5 分であ
る。The annealing time is not limited, but 3 minutes or less is suitable for actual operation. It is preferably 1 to 1.5 minutes.
【００２３】B ）張力の負荷 調質焼鈍中に張力を負荷するのは、焼鈍後の形状性を改
善するためである。B) Loading of Tension The purpose of applying tension during temper annealing is to improve the shape after annealing.
【００２４】張力の効果を確認するために、板厚0.2mm
のFe−42Ni合金冷間圧延材を用い、600 〜750 ℃の温度
範囲で温度を変化させ、各 1.5分間保持するとともに５
Kgf/mm2 の張力を負荷する試験を行った。また、比較試
験として700 ℃で張力を付加しないで焼鈍のみを行っ
た。各焼鈍材から幅300mm 、長さ1000mmの形状性評価用
試験片を切り出し、伸び率差を求め形状性を評価した。In order to confirm the effect of tension, a plate thickness of 0.2 mm
Using the Fe-42Ni alloy cold-rolled material, the temperature was changed in the temperature range of 600 to 750 ℃ and held for 1.5 minutes each.
A test of applying a tension of Kgf / mm 2 was performed. As a comparative test, only annealing was performed at 700 ° C. without applying tension. From each annealed material, a test piece for shape evaluation having a width of 300 mm and a length of 1000 mm was cut out, and the difference in elongation was obtained to evaluate the shape.
【００２５】伸び率差は、図６に示すように、板幅部位
ｉ-1，ｉ-2・・・・での圧延方向での長さＬｉ-1，Ｌｉ-2，
・・・・の違いを、最小長さＬm を基準として下式で現した
ものである。As shown in FIG. 6, the difference in elongation ratio is the lengths Li-1, Li-2, in the rolling direction at the strip width portions i-1, i-2 ...
.. is expressed by the following equation with the minimum length Lm as a reference.
【００２６】εi ＝（Ｌｉ−Ｌm ）／Ｌm εi ： 板幅部位ｉでの伸び率差 Ｌｉ： 板幅部位ｉの圧延方向での長さ Ｌm ： 板幅部位中の圧延方向での最小長さ 図７に冷間圧延材の焼鈍温度と伸び率差との関係を示
す。同図より明かなように、張力を加えた材料では焼鈍
温度の上昇に伴い伸び率差が低減している。これは、圧
延方向での長さの短い部分が張力により延ばされたため
に平坦化したものと推測される。これに対し、700 ℃焼
鈍のみの材料では形状改善は認められない。Εi = (Li-Lm) / Lm εi: Elongation difference in strip width portion i Li: Length of strip width portion i in rolling direction Lm: Minimum length in strip width portion in rolling direction FIG. 7 shows the relationship between the annealing temperature and the difference in elongation of the cold rolled material. As is clear from the figure, in the material to which tension is applied, the difference in elongation decreases as the annealing temperature rises. It is presumed that this is because the portion having a short length in the rolling direction was flattened because it was stretched by the tension. On the other hand, the shape improvement is not observed in the material only annealed at 700 ° C.
【００２７】このように、焼鈍のみの材料に比べ、張力
を付加した焼鈍材は形状が顕著に改善されることが解
る。As described above, it is understood that the shape of the annealed material to which tension is applied is remarkably improved as compared with the material only of the annealed material.
【００２８】本発明の方法は、従来の製造方法における
冷間圧延後の焼鈍工程、調質圧延工程及び矯正工程を省
略し、冷間圧延後に調質焼鈍を行うのであるが、この簡
略化した製造工程を採用することにより、高強度であり
ながら、伸びが大きい材料得られるに至ったのである。The method of the present invention omits the annealing step, temper rolling step and straightening step after cold rolling in the conventional manufacturing method and performs temper annealing after cold rolling, which is simplified. By adopting the manufacturing process, it was possible to obtain a material having high strength and high elongation.
【００２９】図８に、従来の調質圧延により製造した材
料及び本発明の調質焼鈍法により製造した材料のそれぞ
れにおける引張強さに対する伸びの変化を示す。同図よ
り明かなように、従来法による調質圧延材は引張強さ73
kgf/mm2 程度で殆ど伸びなくなるのに対し、調質焼鈍材
は引張強さが80kgf/mm2 を超えても10数％の伸びを示し
ている。FIG. 8 shows changes in elongation with respect to tensile strength of the material manufactured by the conventional temper rolling and the material manufactured by the temper annealing method of the present invention. As is clear from the figure, the temper-rolled material obtained by the conventional method has a tensile strength of 73%.
While the tempered annealed material shows almost no elongation at about kgf / mm 2 , the temper-annealed material exhibits elongation of 10% or more even if the tensile strength exceeds 80 kgf / mm 2 .
【００３０】本発明でいうリ−ドフレ−ム用合金とはFe
−30〜50％Ni合金である。代表的なものとしては、低熱
膨張率のFe−40〜45％Ni合金であり、シャドウマスクに
用いられるFe−30〜35％Ni合金にも適用できる。The alloy for lead frames referred to in the present invention is Fe
-30 to 50% Ni alloy. A typical example is an Fe-40 to 45% Ni alloy having a low coefficient of thermal expansion, and it is also applicable to an Fe-30 to 35% Ni alloy used for a shadow mask.
【００３１】[0031]
【実施例】素材としてのFe−42％Ni合金を1200℃で熱間
圧延して5mm 厚の熱間圧延板を製造し、焼鈍、酸洗、後
冷間圧延を行い板厚0.25mm冷間圧延薄板材とした。この
薄板材を表１に示すように、焼鈍温度550 〜750 ℃、保
持時間1 〜5 分の範囲で各条件を変えて調質焼鈍を行
い、本発明で規定する焼鈍温度で処理したものを本発明
例として比較例と対比した。その時に負荷した張力は 5
Kgf/mm2 と10Kgf/mm2であった。調質焼鈍後の材料につ
いて硬度、引張強さ、伸び、表層部の残留応力及び板反
りを測定した。従来法として、上記冷間圧延材を 900℃
で焼鈍した後、圧延率 20 ％で調質圧延を行い、しかる
後、この調質材に加熱温度600 ℃、保持時間 1.5分、張
力10Kgf/mm2 なる条件でテンションアニ−ル（TA処理）
を施した。試験結果を表１に示す。[Example] A Fe-42% Ni alloy as a raw material was hot-rolled at 1200 ° C to produce a hot-rolled sheet having a thickness of 5 mm, which was annealed, pickled, and then cold-rolled to obtain a sheet having a thickness of 0.25 mm. It was a rolled thin plate material. As shown in Table 1, this thin plate material was subjected to temper annealing by changing each condition within an annealing temperature range of 550 to 750 ° C and a holding time range of 1 to 5 minutes, and was treated at the annealing temperature specified in the present invention. The example of the present invention was compared with the comparative example. The tension applied at that time is 5
It was Kgf / mm 2 and 10 Kgf / mm 2 . The hardness, tensile strength, elongation, residual stress of the surface layer and plate warp of the material after the temper annealing were measured. As a conventional method, the above cold-rolled material is 900 ° C
After tempering, the material is temper-rolled at a rolling rate of 20%, and then the tempered material is heated at a temperature of 600 ° C, a holding time of 1.5 minutes and a tension of 10 kgf / mm 2 is applied to the tension anneal (TA treatment).
Was applied. Table 1 shows the test results.
【００３２】[0032]
【表１】 [Table 1]
【００３３】板反りの測定は、幅300mm 、長さ1000mmの
試験片を用い、吊り下げ時の板幅中心部（150mm ）の反
りにより測定した値である。The plate warp is a value measured by using a test piece having a width of 300 mm and a length of 1000 mm and measuring the warp of the plate width center portion (150 mm) at the time of suspension.
【００３４】同表より明かように本発明例の場合は、引
張強さ90kgf/mm2 程度の材料おいても10％近い伸びが確
保されており、低残留応力で板形状（板反りが小さい）
にも優れていることが確認される。これに対し、試験番
号21〜24の比較例は、600 ℃での焼鈍材であり硬さ、引
張強さ、伸びに殆ど変化が見られず、冷間圧延まま材と
殆ど変わらない特性を示した。また、試験番号21〜23の
比較例は、形状性に優れるものの材料の軟化が進み過ぎ
るため硬さ、引張強さが小さい。As is clear from the table, in the case of the example of the present invention, even a material having a tensile strength of about 90 kgf / mm 2 has an elongation of about 10% secured, and has a low residual stress and a plate shape (a small plate warp). )
It is confirmed that it is also excellent. On the other hand, the comparative examples of test Nos. 21 to 24 are the annealed materials at 600 ° C., which show almost no change in hardness, tensile strength, and elongation, and show almost the same characteristics as the as-cold-rolled materials. It was Further, in Comparative Examples of Test Nos. 21 to 23, although the shape property is excellent, the material is excessively softened, so that the hardness and the tensile strength are small.
【００３５】[0035]
【発明の効果】本発明の製造方法によれば、製造工程が
簡略化できるので大幅なコストダウンが図れるとと共
に、強度調整が容易で高強度で伸びが大きく、低残留応
力で板形状に優れたＩＣリ−ドフレ−ム用材料の製造が
できる。According to the manufacturing method of the present invention, since the manufacturing process can be simplified, the cost can be drastically reduced, the strength can be easily adjusted, the strength is high, the elongation is large, the residual stress is low, and the plate shape is excellent. It is possible to manufacture a material for an IC lead frame.
【図１】本発明のＩＣリ−ドフ−レ−ム用材の製造工程
を説明する図である。FIG. 1 is a diagram illustrating a manufacturing process of a material for an IC lead frame according to the present invention.
【図２】従来のＩＣリ−ドフ−レ−ム用材の製造行程を
説明する図である。FIG. 2 is a diagram illustrating a manufacturing process of a conventional IC lead frame material.
【図３】冷間圧延材の焼鈍温度と焼鈍後の硬度との関係
を示す図である。FIG. 3 is a diagram showing a relationship between an annealing temperature of a cold rolled material and hardness after annealing.
【図４】焼鈍温度と焼鈍後の引張強さとの関係を示す図
である。FIG. 4 is a diagram showing a relationship between an annealing temperature and a tensile strength after annealing.
【図５】冷間圧延材の焼鈍温度と焼鈍後の残留応力との
関係を示す図である。FIG. 5 is a diagram showing a relationship between an annealing temperature of a cold rolled material and residual stress after annealing.
【図６】伸び率差を説明する図である。FIG. 6 is a diagram illustrating a difference in elongation rate.
【図７】調質焼鈍の板形状性に及ぼす影響を示す図であ
る。FIG. 7 is a diagram showing the effect of temper annealing on the plate formability.
【図８】調質圧延及び調質焼鈍により製造した材料の引
張強さと伸びの関係を示す図である。FIG. 8 is a diagram showing a relationship between tensile strength and elongation of a material manufactured by temper rolling and temper annealing.
Claims (1)
した後、冷間圧延により薄板材に加工し、この薄板材に
対して、張力を負荷した状態で600 ℃を超え710 ℃未満
の温度域に加熱する調質焼鈍を施すことを特徴とするＩ
Ｃリ−ドフレ−ム材の製造方法。1. A hot-rolled material of an alloy for an IC lead frame is annealed and is then cold-rolled to be processed into a thin plate material, and the thin plate material is heated to a temperature of over 600 ° C. under a tension of 710. I characterized in that it is subjected to temper annealing by heating in a temperature range of less than ℃ I
Method for producing C lead frame material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20111494A JPH0867914A (en) | 1994-08-25 | 1994-08-25 | Production of ic lead frame material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20111494A JPH0867914A (en) | 1994-08-25 | 1994-08-25 | Production of ic lead frame material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0867914A true JPH0867914A (en) | 1996-03-12 |
Family
ID=16435640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20111494A Pending JPH0867914A (en) | 1994-08-25 | 1994-08-25 | Production of ic lead frame material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0867914A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5516816B1 (en) * | 2013-10-15 | 2014-06-11 | 大日本印刷株式会社 | Metal plate, method for producing metal plate, and method for producing vapor deposition mask using metal plate |
| CN104854254A (en) * | 2013-01-10 | 2015-08-19 | 大日本印刷株式会社 | Metal plate, metal plate production method, and method for producing vapor deposition mask using metal plate |
| CN108265265A (en) * | 2013-09-13 | 2018-07-10 | 大日本印刷株式会社 | Metallic plate, the manufacturing method of metallic plate and the method using metallic plate manufacture mask |
| US10570498B2 (en) | 2015-02-10 | 2020-02-25 | Dai Nippon Printing Co., Ltd. | Manufacturing method for deposition mask, metal plate used for producing deposition mask, and manufacturing method for said metal sheet |
| US10600963B2 (en) | 2014-05-13 | 2020-03-24 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate |
-
1994
- 1994-08-25 JP JP20111494A patent/JPH0867914A/en active Pending
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110306155B (en) * | 2013-01-10 | 2022-04-26 | 大日本印刷株式会社 | Method for manufacturing vapor deposition mask |
| CN104854254A (en) * | 2013-01-10 | 2015-08-19 | 大日本印刷株式会社 | Metal plate, metal plate production method, and method for producing vapor deposition mask using metal plate |
| CN110306155A (en) * | 2013-01-10 | 2019-10-08 | 大日本印刷株式会社 | The manufacturing method of deposition mask |
| CN107858643A (en) * | 2013-01-10 | 2018-03-30 | 大日本印刷株式会社 | Metallic plate, the manufacture method of metallic plate and the method using metallic plate manufacture deposition mask |
| CN107937870A (en) * | 2013-01-10 | 2018-04-20 | 大日本印刷株式会社 | Metallic plate, the manufacture method of metallic plate and the method using metallic plate manufacture deposition mask |
| CN108265265A (en) * | 2013-09-13 | 2018-07-10 | 大日本印刷株式会社 | Metallic plate, the manufacturing method of metallic plate and the method using metallic plate manufacture mask |
| US10731261B2 (en) | 2013-09-13 | 2020-08-04 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by use of metal plate |
| US10233546B2 (en) | 2013-09-13 | 2019-03-19 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by use of metal plate |
| CN105637110A (en) * | 2013-10-15 | 2016-06-01 | 大日本印刷株式会社 | Metal plate, production method of metal plate, and method of producing vapor deposition mask by using metal plate |
| US9828665B2 (en) | 2013-10-15 | 2017-11-28 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing deposition mask by use of metal plate |
| JP5516816B1 (en) * | 2013-10-15 | 2014-06-11 | 大日本印刷株式会社 | Metal plate, method for producing metal plate, and method for producing vapor deposition mask using metal plate |
| JP2015078401A (en) * | 2013-10-15 | 2015-04-23 | 大日本印刷株式会社 | Metal plate, production method of metal plate, and method of producing vapor deposition mask by using metal plate |
| WO2015056537A1 (en) * | 2013-10-15 | 2015-04-23 | 大日本印刷株式会社 | Metal sheet, method for manufacturing metal sheet, and method for manufacturing vapor deposition mask using metal sheet |
| US11486031B2 (en) | 2013-10-15 | 2022-11-01 | Dai Nippon Printing Co., Ltd. | Metal plate |
| US10600963B2 (en) | 2014-05-13 | 2020-03-24 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate |
| US11217750B2 (en) | 2014-05-13 | 2022-01-04 | Dai Nippon Printing Co., Ltd. | Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate |
| US10570498B2 (en) | 2015-02-10 | 2020-02-25 | Dai Nippon Printing Co., Ltd. | Manufacturing method for deposition mask, metal plate used for producing deposition mask, and manufacturing method for said metal sheet |
| US10612124B2 (en) | 2015-02-10 | 2020-04-07 | Dai Nippon Printing Co., Ltd. | Manufacturing method for deposition mask, metal plate used for producing deposition mask, and manufacturing method for said metal sheet |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2002241841A (en) | Method for producing strip made of iron-nickel alloy | |
| JP2021014639A (en) | PRODUCING METHOD OF Fe-Ni ALLOY SHEET | |
| JP2001226718A (en) | Method for producing stainless steel sheet excellent in flatness after etching | |
| JPH0867914A (en) | Production of ic lead frame material | |
| JPH0472037A (en) | High strength and low thermal expansion alloy and its manufacture | |
| EP3521459B1 (en) | METHOD FOR PRODUCING Fe-Ni-BASED ALLOY THIN PLATE AND Fe-Ni-BASED ALLOY THIN PLATE | |
| JPH06248339A (en) | Production of steel sheet for vessel with high rigidity | |
| JP2003286527A (en) | Copper or copper alloy with low shrinkage percentage, and manufacturing method therefor | |
| JP3603726B2 (en) | Austenitic stainless steel sheet for electronic components | |
| JPS6389649A (en) | Manufacture of al-mg-zn alloy material having superior formability | |
| JP4604883B2 (en) | Steel plate with small anisotropy and method for producing the same | |
| JP3379301B2 (en) | Method for producing low thermal expansion alloy thin plate for shadow mask excellent in plate shape and heat shrink resistance | |
| JPWO2019244962A1 (en) | Fe-Ni alloy thin plate | |
| JPS60251227A (en) | Production of low-expansion fe-ni steel sheet | |
| JPS63169330A (en) | Production of chromium stainless steel strip of high-strength double phase structure having excellent ductility | |
| JPH10152728A (en) | Production of cold rolled steel sheet excellent in workability and surface property | |
| JPS58181825A (en) | Manufacture of shadow mask | |
| JPH06271943A (en) | Production of ferritic stainless steel sheet excellent in formability and ridging resistance and furthermore small in anisotropy | |
| JPH0673444A (en) | Aging treatment method of stainless steel foil for spring | |
| JP2830472B2 (en) | High-strength Fe-Ni-Co alloy thin plate excellent in corrosion resistance, repeated bending characteristics, and etching properties, and method for producing the same | |
| JPH08218155A (en) | Production of zirconium-copper alloy sheet having fine crystal grain | |
| JP3606135B2 (en) | Ferritic stainless steel sheet for spring and manufacturing method thereof | |
| JPS63103055A (en) | Manufacture of thin iron-copper alloy strip for lead frame | |
| JP4437863B2 (en) | Manufacturing method of steel sheet for steel house with excellent fire resistance | |
| JP2550784B2 (en) | High strength and low thermal expansion Fe-Ni-Co alloy excellent in plating property, soldering property and cyclic bending property, and method for producing the same |