JPH0673444A - Aging treatment method of stainless steel foil for spring - Google Patents

Aging treatment method of stainless steel foil for spring

Info

Publication number
JPH0673444A
JPH0673444A JP22876192A JP22876192A JPH0673444A JP H0673444 A JPH0673444 A JP H0673444A JP 22876192 A JP22876192 A JP 22876192A JP 22876192 A JP22876192 A JP 22876192A JP H0673444 A JPH0673444 A JP H0673444A
Authority
JP
Japan
Prior art keywords
heat roll
foil
stainless steel
aging treatment
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP22876192A
Other languages
Japanese (ja)
Inventor
Atsushi Nakatsuka
淳 中塚
Jun Araki
純 荒木
Hidehiko Sumitomo
秀彦 住友
Wataru Murata
亘 村田
Chiaki Furuki
千秋 古木
Masayuki Kasuya
雅幸 糟谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP22876192A priority Critical patent/JPH0673444A/en
Publication of JPH0673444A publication Critical patent/JPH0673444A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To provide a manufacturing method of stainless steel foil which shortens the heating time by quickly heating the stainless steel foil and allows the foil to have high spring limited value and little difference of the residual stress between the front and the back surfaces of the foil. CONSTITUTION:At the time of executing aging treatment of the cold-rolled stainless steel foil coil by a heat roll heating while continuously passing the foil, the foil is manufactured keeping following relation between a D value and the heat roll diameter (H). D value =(T+273){10+log(t/360)} R/100 H>=1000 t0 Wherein, T: heat roll temp. ( deg.C), t: contact time between the heat roll and the foil (sec), R: cold rolling ratio (%), t0: plate thickness (mm), alpha series: 2000<=D value <=6000, and beta series 2600<=D value <=6000. By this method, the aging treatment can be executed in shorter time than the conventional method and the production efficiency is remarkably improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、自動車用部品、電子機
器部品、機械構造部品、一般家庭用部品等の高ばね性が
必要な部品に好適な、ばね用ステンレス鋼箔の時効処理
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aging treatment method for stainless steel foil for springs, which is suitable for automobile parts, electronic device parts, machine structural parts, parts for general household use and the like, which are required to have high spring properties. .

【0002】[0002]

【従来の技術】前述のような高強度が要求される部品と
しては、自動車では、ガスケット、自動車触媒担体用メ
タル担体、電子機器では、スイッチ、ベルト、リフタ
ー、サスペンションばね、機械関係のばね材等がある。
これらの部品は耐銹性が要求されるため、ステンレス鋼
が材料として使用されることが多い。
2. Description of the Related Art As components requiring high strength as described above, gaskets for automobiles, metal carriers for automobile catalyst carriers, electronic devices such as switches, belts, lifters, suspension springs, mechanical springs, etc. There is.
Since rust resistance is required for these parts, stainless steel is often used as the material.

【0003】また、これらの部品は使用中のヘタリが小
さいことが必要とされ、そのため機械的性質としてはば
ね限界値80kgf/mm2 以上が求められる。また、加工方
法としてエッチングやプレス加工が施される場合が多
く、その場合素材の残留応力の板表裏の差が2kgf/mm2
以下でなければ製品の形状を劣化させる。
Further, these parts are required to have a small set during use, and therefore, a spring limit value of 80 kgf / mm 2 or more is required as a mechanical property. In addition, etching and pressing are often used as the processing method, and in that case, the difference in residual stress of the material between the front and back of the plate is 2 kgf / mm 2
If it is not below, the shape of the product is deteriorated.

【0004】薄板ばね材の高ばね性化や残留応力を下げ
る方法として、再結晶温度以下の炉内で降伏点以下の張
力を与えながら通板させる、テンションアニーリング法
(特公昭46−26219号公報)が知られているが、
薄板の加熱処理方法については何ら検討されていない。
ばね材用箔の加熱方法としては、一般的に輻射加熱炉や
バッチ焼鈍炉が用いられており、この場合加熱速度が遅
く、加熱時間に長時間を必要とする。
As a method for improving the spring property and reducing the residual stress of a thin leaf spring material, a tension annealing method (Patent Publication No. 46-26219) is used, in which a thin plate spring is passed through a furnace at a recrystallization temperature or lower while a tension below the yield point is applied. ) Is known,
No consideration has been given to the heat treatment method for thin plates.
As a method for heating the spring material foil, a radiant heating furnace or a batch annealing furnace is generally used. In this case, the heating rate is slow and a long heating time is required.

【0005】[0005]

【発明が解決しようとする課題】本発明は、箔を急速加
熱して加熱時間を短縮し、かつ80kgf/mm2 以上の高ば
ね限界値および板表裏の残留応力の差が2kgf/mm2 以下
を有する箔の製造方法を提供することを目的としてい
る。
DISCLOSURE OF THE INVENTION According to the present invention, the foil is rapidly heated to shorten the heating time, and the difference between the high spring limit value of 80 kgf / mm 2 or more and the residual stress between the front and back of the plate is 2 kgf / mm 2 or less. It is an object of the present invention to provide a method for producing a foil having

【0006】[0006]

【課題を解決するための手段】本発明は、箔を加熱した
ロールに接触させて急速加熱を可能とし、加熱ロールの
径を限定することにより残留応力の均一化を可能にし
た。即ち本発明の要旨は以下の通りである。
According to the present invention, the foil is brought into contact with a heated roll for rapid heating, and the residual stress can be made uniform by limiting the diameter of the heating roll. That is, the gist of the present invention is as follows.

【0007】(1)冷間加工されたステンレス鋼箔のコ
イルを連続通板しながらヒートロール加熱によって時効
処理する際に、予め実験によって求めたばね限界値(K
b)とD値の関係から所定のばね限界値に対応するD値
を決定し、前記D値に応じて(1)式を満足するヒート
ロール温度(T)およびヒートロールと箔との接触時間
(t)で時効処理する。 D値=(T+273){10+log(t/3600)}(R/100)………………… (1)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
(1) When a cold rolled stainless steel foil coil is continuously aged and aged by heat roll heating, a spring limit value (K
From the relationship between b) and the D value, the D value corresponding to the predetermined spring limit value is determined, and the heat roll temperature (T) and the contact time between the heat roll and the foil satisfying the formula (1) according to the D value are determined. Aging treatment is performed at (t). D value = (T + 273) {10 + log (t / 3600)} (R / 100) …………………… (1) Formula T: Heat roll temperature (℃) where T ≦ 650 ℃ t: Heat roll and foil Contact time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment

【0008】(2)冷間加工されたフェライト系ステン
レス鋼箔のコイルを連続通板しながらヒートロール加熱
によって時効処理する際に、前記フェライト系ステンレ
ス鋼箔の時効処理前の冷間加工率に応じて、(2)式で
決定されるヒートロール温度(T)およびヒートロール
と箔との接触時間(t)で時効処理する。 2000≦D値=(T+273){10+log(t/3600)}(R/100)≦6000… (2)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
(2) When the coil of cold-worked ferritic stainless steel foil is aged by heat roll heating while continuously passing the coil, the cold working ratio of the ferritic stainless steel foil before aging is Accordingly, the aging treatment is performed at the heat roll temperature (T) and the contact time (t) between the heat roll and the foil, which are determined by the formula (2). 2000 ≦ D value = (T + 273) {10 + log (t / 3600)} (R / 100) ≦ 6000 (2) Formula T: Heat roll temperature (° C) where T ≦ 650 ° C t: Contact between heat roll and foil Time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment

【0009】(3)冷間加工されたオーステナイト系ス
テンレス鋼箔のコイルを連続通板しながらヒートロール
加熱によって時効処理する際に、前記オーステナイト系
ステンレス鋼箔の時効処理前の冷間加工率に応じて、
(3)式で決定されるヒートロール温度(T)およびヒ
ートロールと箔との接触時間(t)で時効処理する。 2600≦D値=(T+273){10+log(t/3600)}(R/100)≦6000… (3)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
(3) When the cold working austenitic stainless steel foil coil is aged by heat roll heating while continuously passing the coil, the cold working ratio of the austenitic stainless steel foil before aging treatment is Depending on,
Aging treatment is performed at the heat roll temperature (T) and the contact time (t) between the heat roll and the foil, which are determined by the formula (3). 2600 ≦ D value = (T + 273) {10 + log (t / 3600)} (R / 100) ≦ 6000 (3) Formula T: Heat roll temperature (° C) where T ≦ 650 ° C t: Contact between heat roll and foil Time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment

【0010】(4)前記ステンレス鋼箔の板厚に応じ
て、(4)式で決定される直径(H)のヒートロールを
用いて時効処理する。 H≧1000・t0 …………………………………………… (4)式 H:ヒートロール直径(mm) t0 :板厚(mm)
(4) Aging treatment is performed using a heat roll having a diameter (H) determined by the equation (4) according to the plate thickness of the stainless steel foil. H ≧ 1000 ・ t 0 ………………………………………… (4) Formula H: Heat roll diameter (mm) t 0 : Plate thickness (mm)

【0011】以下、本発明の構成用件の限定理由につい
て説明する。加熱したロールからの熱伝達係数は、輻射
加熱や空気伝熱に比べ大きく、急速加熱が可能であり、
設備の小型化や省力化が可能である。ヒートロールにて
加熱処理したときのヒートパターンを図1に示す。
The reasons for limiting the constitution requirements of the present invention will be described below. The heat transfer coefficient from the heated roll is larger than that of radiant heating or air heat transfer, and rapid heating is possible.
It is possible to downsize equipment and save labor. The heat pattern when heat-treated with a heat roll is shown in FIG.

【0012】ヒートロール処理は輻射加熱や空気伝達に
比べ急速加熱が可能であり、設備の小型化や省力化が可
能である。また、ヒートロールにより拘束されるため、
箔の残留応力が小さくできる。従って、箔の加熱方法を
ヒートロール方式とした。
The heat roll treatment can perform rapid heating as compared with radiant heating and air transfer, and can downsize the equipment and save labor. Also, because it is restrained by the heat roll,
The residual stress of the foil can be reduced. Therefore, the heating method of the foil is the heat roll method.

【0013】ばね限界値は、素材中の固溶C,Nが加工
により導入された転位を固着することにより向上する。
C,Nを冷間加工により導入された転位上に固着させる
には適正な冷間加工率と加熱処理が必要である。従っ
て、ばね限界値はC,Nの拡散と冷間加工率に関係し、
加熱処理の温度、時間および冷間加工率が影響する。そ
れを表す指標として(1)式のD値を用いる。
The spring limit value is improved by fixing the solid solution C and N in the material to dislocations introduced by working.
Appropriate cold work ratio and heat treatment are required to fix C and N on the dislocations introduced by cold work. Therefore, the spring limit value is related to the diffusion of C and N and the cold working rate,
The temperature, time, and cold work rate of heat treatment influence. The D value of the equation (1) is used as an index indicating that.

【0014】D値とばね限界値の関係を図2に示す。フ
ェライト系ステンレス鋼の場合は値が2000〜600
0、オーステナイト系ステンレス鋼の場合は2600〜
6000間でばね限界値80kgf/mm2 以上を満足でき
る。従って、D値をフェライト系ステンレス鋼の場合は
2000〜6000とし、オーステナイト系ステンレス
鋼の場合は2600〜6000とした。フェライト系ス
テンレス鋼とオ−ステナイト系ステンレス鋼の違いは、
C,Nの拡散速度の違いである。
The relationship between the D value and the spring limit value is shown in FIG. The value is 2000-600 for ferritic stainless steel
0, 2600-in case of austenitic stainless steel
It is possible to satisfy the spring limit value of 80 kgf / mm 2 or more between 6000. Therefore, the D value was set to 2000 to 6000 in the case of ferritic stainless steel and 2600 to 6000 in the case of austenitic stainless steel. The difference between ferritic stainless steel and austenitic stainless steel is
This is the difference in the diffusion rates of C and N.

【0015】 D値=(T+273){10+log(t/3600)}(R/100)………………… (1)式 T:ヒートロール温度(℃) t:ヒートロールと箔との接触時間 (s) R:ステンレス鋼箔の時効処理前の冷間圧延率(%) 加熱ロールの温度が650℃を超えると、箔が再結晶す
るためD値に関係なく、ばね限界値が低下する。従っ
て、加熱ロールの温度を650℃以下とする。
D value = (T + 273) {10 + log (t / 3600)} (R / 100) …………………… (1) Formula T: Heat roll temperature (° C) t: Contact between heat roll and foil Time (s) R: Cold rolling rate of stainless steel foil before aging treatment (%) When the temperature of the heating roll exceeds 650 ° C, the foil recrystallizes, so the spring limit value decreases regardless of the D value. . Therefore, the temperature of the heating roll is set to 650 ° C. or lower.

【0016】加熱ロールの径は小さ過ぎると、残留応力
の表裏の差を大きくする。残留応力の表裏の差におよぼ
すヒートロール直径と板厚の関係を図3に示す。残留応
力の表裏の差を2kgf/mm2 以下にするにはヒートロール
直径を(4)式以上にする必要がある。
If the diameter of the heating roll is too small, the difference between the front and back of the residual stress becomes large. FIG. 3 shows the relationship between the heat roll diameter and the plate thickness, which affects the difference in residual stress between the front and back. In order to reduce the difference in residual stress between the front and back sides to 2 kgf / mm 2 or less, the diameter of the heat roll must be at least (4).

【0017】 H≧1000・t0 …………………………………………… (4)式 H:ヒートロール直径(mm) t0 :板厚(mm)H ≧ 1000 · t 0 ………………………………………… (4) Formula H: Heat roll diameter (mm) t 0 : Plate thickness (mm)

【0018】[0018]

【実施例】表1に示すようなステンレス鋼を通常の転炉
−VOD法、電気炉−AOD法あるいは真空溶解法によ
り溶製し、鋳造後、熱間圧延、焼鈍および冷間圧延を行
い、冷間圧延仕上げの箔を製造した。
EXAMPLES Stainless steels shown in Table 1 were melted by a normal converter-VOD method, electric furnace-AOD method or vacuum melting method, and after casting, hot rolling, annealing and cold rolling were performed, A foil with a cold rolled finish was produced.

【0019】最終冷間圧延率、ヒートロール温度
(T)、箔とヒートロールの接触時間(t)、D値、ロ
ール直径、ばね限界値(Kb)、箔表裏の残留応力差
(Δσr )を表2に示す。
Final cold rolling rate, heat roll temperature (T), contact time between foil and heat roll (t), D value, roll diameter, spring limit value (Kb), difference in residual stress between front and back of foil (Δσ r ). Is shown in Table 2.

【0020】ばね限界値(Kb)は、圧延方向に平行な
方向から板取し、JIS H 3130のモーメント式
試験機を用いて測定した。箔表裏の残留応力(Δσr
はX線による応力測定により圧延方向に平行な方向から
求めた。
The spring limit value (Kb) was measured by using a moment tester of JIS H 3130, which was prepared by cutting a plate in a direction parallel to the rolling direction. Residual stress on the front and back of the foil (Δσ r )
Was determined from the direction parallel to the rolling direction by the stress measurement by X-ray.

【0021】本発明鋼はいずれもばね限界値が80kgf/
mm2 以上であり、かつ残留応力の表裏の差が2kgf/mm2
以下であることがわかる。
The steel of the present invention has a spring limit value of 80 kgf /
mm 2 or more and the difference in residual stress between the front and back is 2 kgf / mm 2
It can be seen that

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【表2】 [Table 2]

【0024】[0024]

【発明の効果】本発明の方法によれば高ばね性を有する
ステンレス鋼が提供でき、高強度を利用する分野の発展
に大きく貢献できる。
According to the method of the present invention, a stainless steel having a high spring property can be provided, which can greatly contribute to the development of the field utilizing high strength.

【図面の簡単な説明】[Brief description of drawings]

【図1】ヒートロール加熱および輻射加熱処理のヒート
パターンである。
FIG. 1 is a heat pattern of heat roll heating and radiation heat treatment.

【図2】ばね限界値とD値の関係の図表である。FIG. 2 is a chart showing a relationship between a spring limit value and a D value.

【図3】残留応力の表裏の差におよぼすロール直径の板
厚の関係を示す図表である。
FIG. 3 is a table showing the relationship between the roll diameter and the plate thickness, which affects the difference in the residual stress between the front and back sides.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 村田 亘 光市大字島田3434番地 新日本製鐵株式会 社光製鐵所内 (72)発明者 古木 千秋 光市大字島田3434番地 新日本製鐵株式会 社光製鐵所内 (72)発明者 糟谷 雅幸 東海市東海町5−3 新日本製鐵株式会社 名古屋製鐵所内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Wataru Mitsumitsu 3434 Shimada, Shinjuku Nippon Steel Co., Ltd. Inside the Hikari Works (72) Inventor Chiaki Furugi 3434 Shimada, Shinjuku Nippon Steel Co., Ltd. Inside the Shoko Works (72) Inventor Masayuki Kasuya 5-3 Tokai-cho, Tokai City Nippon Steel Corporation Nagoya Works

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 冷間加工されたステンレス鋼箔のコイル
を連続通板しながらヒートロール加熱によって時効処理
する際に、予め実験によって求めたばね限界値(Kb)
とD値の関係から所定のばね限界値に対応するD値を決
定し、前記D値に応じて(1)式を満足するヒートロー
ル温度(T)およびヒートロールと箔との接触時間
(t)で時効処理することを特徴とするばね用ステンレ
ス鋼箔の時効処理方法。 D値=(T+273){10+log(t/3600)}(R/100)………………… (1)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
1. A spring limit value (Kb) obtained by an experiment in advance when a cold rolled stainless steel foil coil is aged by heating with a heat roll while continuously passing the coil.
And the D value, the D value corresponding to the predetermined spring limit value is determined, and the heat roll temperature (T) and the contact time (t) between the heat roll and the foil satisfying the equation (1) are determined according to the D value. ) Aging treatment method for spring stainless steel foil. D value = (T + 273) {10 + log (t / 3600)} (R / 100) …………………… (1) Formula T: Heat roll temperature (℃) where T ≦ 650 ℃ t: Heat roll and foil Contact time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment
【請求項2】 冷間加工されたフェライト系ステンレス
鋼箔のコイルを連続通板しながらヒートロール加熱によ
って時効処理する際に、前記フェライト系ステンレス鋼
箔の時効処理前の冷間加工率に応じて、(2)式で決定
されるヒートロール温度(T)およびヒートロールと箔
との接触時間(t)で時効処理することを特徴とするば
ね用フェライト系ステンレス鋼箔の時効処理方法。 2000≦D値=(T+273){10+log(t/3600)}(R/100)≦6000… (2)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
2. When a coil of a cold-worked ferritic stainless steel foil is aged by heat roll heating while continuously passing the coil, it depends on the cold working rate of the ferritic stainless steel foil before aging. And aging treatment at the heat roll temperature (T) and the contact time (t) between the heat roll and the foil, which are determined by the formula (2). 2000 ≦ D value = (T + 273) {10 + log (t / 3600)} (R / 100) ≦ 6000 (2) Formula T: Heat roll temperature (° C) where T ≦ 650 ° C t: Contact between heat roll and foil Time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment
【請求項3】 冷間加工されたオーステナイト系ステン
レス鋼箔のコイルを連続通板しながらヒートロール加熱
によって時効処理する際に、前記オーステナイト系ステ
ンレス鋼箔の時効処理前の冷間加工率に応じて、(3)
式で決定されるヒートロール温度(T)およびヒートロ
ールと箔との接触時間(t)で時効処理することを特徴
とするばね用フェライト系ステンレス鋼箔の時効処理方
法。 2600≦D値=(T+273){10+log(t/3600)}(R/100)≦6000… (3)式 T:ヒートロール温度(℃) 但し T≦ 650℃ t:ヒートロールと箔との接触時間 (sec) R:ステンレス鋼箔の時効処理前の冷間圧延率(%)
3. A cold-worked austenitic stainless steel foil coil is subjected to aging treatment by heat roll heating while continuously passing through the coil, depending on the cold working ratio of the austenitic stainless steel foil before aging treatment. (3)
An aging treatment method for a ferritic stainless steel foil for spring, which comprises aging treatment at a heat roll temperature (T) and a contact time (t) between the heat roll and the foil determined by the formula. 2600 ≦ D value = (T + 273) {10 + log (t / 3600)} (R / 100) ≦ 6000 (3) Formula T: Heat roll temperature (° C) where T ≦ 650 ° C t: Contact between heat roll and foil Time (sec) R: Cold rolling rate (%) of stainless steel foil before aging treatment
【請求項4】 前記ステンレス鋼箔の板厚に応じて、
(4)式で決定される直径(H)のヒートロールを用い
て時効処理することを特徴とする請求項1、請求項2又
は請求項3記載のばね用ステンレス鋼箔の時効処理方
法。 H≧1000・t0 …………………………………………… (4)式 H :ヒートロール直径(mm) t0 :板厚(mm)
4. Depending on the plate thickness of the stainless steel foil,
The aging treatment method for a stainless steel foil for a spring according to claim 1, claim 2 or claim 3, wherein the aging treatment is performed using a heat roll having a diameter (H) determined by the formula (4). H ≧ 1000 ・ t 0 …………………………………………… (4) Formula H: Heat roll diameter (mm) t 0 : Plate thickness (mm)
JP22876192A 1992-08-27 1992-08-27 Aging treatment method of stainless steel foil for spring Withdrawn JPH0673444A (en)

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Application Number Priority Date Filing Date Title
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JPH0673444A true JPH0673444A (en) 1994-03-15

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002194504A (en) * 2000-12-21 2002-07-10 Sumitomo Metal Ind Ltd Chromium stainless steel foil and production method of the same
JP2010144231A (en) * 2008-12-19 2010-07-01 Nippon Kinzoku Co Ltd Stainless steel sheet for spring, and manufacturing method of the same
WO2012060330A1 (en) * 2010-11-01 2012-05-10 日本碍子株式会社 Heat treatment method and heat treatment apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002194504A (en) * 2000-12-21 2002-07-10 Sumitomo Metal Ind Ltd Chromium stainless steel foil and production method of the same
JP2010144231A (en) * 2008-12-19 2010-07-01 Nippon Kinzoku Co Ltd Stainless steel sheet for spring, and manufacturing method of the same
WO2012060330A1 (en) * 2010-11-01 2012-05-10 日本碍子株式会社 Heat treatment method and heat treatment apparatus
CN102822377A (en) * 2010-11-01 2012-12-12 日本碍子株式会社 Heat treatment method and heat treatment apparatus
US20130000792A1 (en) * 2010-11-01 2013-01-03 Yokohama National University Heat treatment method and heat treatment apparatus
JPWO2012060330A1 (en) * 2010-11-01 2014-05-12 日本碍子株式会社 Heat treatment method and heat treatment apparatus
CN102822377B (en) * 2010-11-01 2015-10-14 日本碍子株式会社 Heat treating method and thermal treatment unit
JP2016040414A (en) * 2010-11-01 2016-03-24 日本碍子株式会社 Heat treatment method, and heat treatment apparatus
US9435015B2 (en) 2010-11-01 2016-09-06 Ngk Insulators, Ltd. Heat treatment method and heat treatment apparatus

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