JPH085575A - Method and apparatus for detecting foreign matter protrusion on color filter - Google Patents

Abstract

PURPOSE:To obtain a method and apparatus for detecting a foreign matter protrusion T on a color filter while discriminating from an adhesion foreign matter (p) and selecting a foreign matter protrusion T exceeding an allowable height. CONSTITUTION:The foreign matter protrusion inspection apparatus 10 comprises an XY moving stage 2 mounting a color filter 11, systems 41A, 41B for illuminating the color filter 11 mounted on the stage 2 with luminous fluxes LT(lambdaH) and LT(lambdaL) of wavelengths lambdaH and lambdaL simultaneously at high and low angles of (40+ or -5) deg. and (15+ or -5) deg., respectively, an optical detection system 4 including a system 42 for receiving a scattering light LR from the protrusion T or the adhesion foreign matter (p), and a signal processing section 5 and a data processing section 6 connected sequentially with the light receiving system 42.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting a protrusion caused by a buried foreign substance in a color filter for a liquid crystal panel,
Regarding the inspection device.

[0002]

2. Description of the Related Art With the progress of liquid crystal and its control technology, a liquid crystal panel capable of displaying a color image on a screen of a considerable size has been developed, and a color filter is used for this. FIG. 7 shows an example of a color liquid crystal panel and a color filter used for the color liquid crystal panel, and the configuration thereof will be outlined.
The liquid crystal panel 1 shown in FIG. 7 (a) comprises a lower plate assembly 1A and an upper plate assembly 1B. The lower plate assembly 1A has a polarizing plate (A) attached on the lower surface of a glass plate (A) and a thin film transistor layer ( A TFT layer), an alignment film (A) for aligning the direction of liquid crystal molecules, and a liquid crystal film are sequentially laminated. On the other hand, in the upper plate assembly 1B, the color filters 11 are formed by implanting pixels of the three primary colors on the lower surface of the glass plate (B), and the indium oxide / titanium thin film (ITO) and the alignment film are formed under the color filter 11. The film (B) is laminated in sequence, the polarizing sheet (B) is attached to the upper surface of the glass plate (B), and the upper and lower assemblies 1B and 1A are bonded to each other. The image is displayed in color by being controlled by the above, and is transmitted or blocked to the upper side. Except for the glass plates (A) and (B), the thickness of each of the above layers is extremely thin, about 1 to several μm. Figure 7 (b)
Shows a cross section and a plane of the color filter 11. To explain an example of the manufacturing process, a chrome thin film 112 is vapor-deposited on the surface of a glass plate 111, and a large number of square holes are formed by etching the thin film 112, and pixels of three primary colors (RGB) are formed for each square hole. 113 are alternately planted and produced. The size of each pixel 113 is, for example, 20 to 40 μm in length and width, and the thickness is about several μm. Next, in order to protect each pixel 113, the entire surface of the color filter 11 is coated (overcoated) with a transparent material such as polyimide. However,
The overcoat is often omitted because it partially blocks the transmitted light and reduces the brightness of the image accordingly.

Now, there is a foreign substance on the color filter 11,
If the height is, for example, several μm or more, the foreign matter is ITO,
The TFT layer may be damaged by continuously breaking through the alignment film (B), the liquid crystal film, and the alignment film (A). The number of TFTs corresponding to each pixel 113 is arranged in the TFT layer, and a large number of TFTs are connected to each other without being independent of each other. Therefore, the damage of one TFT is not limited to only one. This causes a malfunction of the connected series of TFTs. in this case,
The height of the foreign matter is a problem, and even if the plane area is large, if the height is not more than a certain level, the foreign matter does not penetrate through the respective layers to reach the TFT and is therefore harmless.

Foreign substances existing in the color filter 11 are classified into adhered foreign substances and buried foreign substances depending on their states, which will be described with reference to FIG. In the figure, the adhered foreign matter is represented by p, and the buried foreign matter is represented by p ′. FIG. 8A shows the color filter 11 before the overcoat 114 is coated. For example,
The foreign matter p ₁ is attached to the middle of the pixel 113, and the foreign matter p ₂ is
3 is attached to the surface. Further, the foreign matter p ₃ ′ is buried in the pixel 113, and the pixel 113 swells up in a mountain shape to generate a foreign matter protrusion (hereinafter simply referred to as a protrusion) T. Figure 8 (b) is the figure (a)
Shows the case where the color filter 11 of is coated,
The above-mentioned adhered foreign matters p ₁ and p ₂ are buried in the overcoat 114 to become buried foreign matters p ₁ ′ and p ₂ ′, and the protrusions T are formed on the overcoat 114 due to them. Also, overcoat 114
For example, an adhered foreign matter p ₄ is newly adhered to this.

In FIG. 8, it is assumed that each foreign matter p, p'is spherical and each protrusion T is mountain-shaped, but in reality, there are various shapes and sizes, and some of them are actually measured by a microscope. Is shown in FIG. In FIG. 9, the sample protrusion T ₁
Has an elongated planar shape as shown in the figure and a cross-sectional shape in which the vicinity of the central portion projects, and the XY dimensions are 19 × 50 μm and the height H
Is 2.9 μm. On the other hand, the protrusion T ₃ has a smaller XY dimension (10 × 20 μm), but has substantially the same H:
It has 3.1 μm, and the cross-sectional shape is close to a chevron. As seen in other samples, the cross-sectional shape and height H of each protrusion T
Are independent of the planar shape and their dimensions, ie exhibit a wide variety of variations. The protrusions T of the adhered foreign matter p and the buried foreign matter p ′ are harmful if they have a certain height or more, but since the adhered foreign matter p can be removed by washing or the like, finally, Is
The protrusion T having a height higher than a certain level is a problem.

In the manufacturing stage of the color filter 11, the protrusion T is detected by visual inspection, and if the height H exceeds the allowable limit, the color filter 11 is considered defective and appropriate measures such as disposal are taken. There is. However, the visual inspection has an inability rate as well as individual differences. Therefore, it is necessary to accurately detect the height of the protrusion by an optical method and improve the efficiency of the inspection. As an optical inspection method for this, it is considered that the projection T can be detected by applying a conventionally used foreign matter inspection apparatus for a wafer of a semiconductor IC material. FIG. 10 shows a basic configuration of a detection optical system of a foreign matter inspection device for a wafer. Instead of the wafer, the color filter 11 to be inspected is placed on the XY moving stage 2 and moved in the X or Y direction. On the other hand, the light source of the detection optical system 3
The light beam L _T from the light source 31 is focused on the spot by the light projecting lens 32, and the scattered light L _R of the projection T is condensed by the condensing lens 33 and received by the light receiver 34, and the output signal is shown in the figure. The size of the protrusion T can be detected by processing with a signal processing circuit. In the actual foreign matter inspection apparatus, although the irradiation angle of the light flux L _T and the light receiving angle of the scattered light L _{R in} the above-described basic configuration are appropriately set, and other parts are improved, the foreign matter detection performance is improved. However, none of these inspection devices distinguishes the protrusion T from the adhering foreign matter p and further has no detection performance for the height of the protrusion T.

[0007]

[Problems to be Solved by the Invention]
There is a demand for a detection method that can detect the protrusion T caused by the embedded foreign matter p ′ by distinguishing it from the adhered foreign matter p, and further select a detected protrusion T that exceeds the allowable height value, and an inspection apparatus therefor. . The present invention has been made in response to the above request, and the protrusion T of the color filter can be detected separately from the adhering foreign matter p, and from the detected protrusions T, those that exceed the allowable height value can be selected. An object of the present invention is to provide a detection method and its inspection device.

[0008]

SUMMARY OF THE INVENTION The present invention is a method and an inspection device for detecting foreign matter protrusions of a color filter, which achieves the above object. Detection method of the foreign matter protrusions to the surface of the color filter, and a wavelength lambda _H light beam L _T (λ _H), wavelength lambda
_L of the light beam _{L T} (λ L), and respectively irradiated (40 ± 5) high angle and (15 ± 5) in ° simultaneously at low angles of °, both light beams L
Scattered light L _R (λ _H ), L _R (λ of _T (λ _H ), L _T (λ _L ) respectively
_L ) is received at a light receiving angle of (55 ± 5) ° and wavelength-divided by a dichroic mirror.
An image is formed on the line sensor and the second CCD line sensor.
The output signal of the first CCD line sensor is compared with a first threshold value V _H for removing the signal component of the adhered foreign matter adhering to the color filter, and the signal component of the foreign matter protrusion is detected to generate a protrusion pulse. Further, the output signal of the second CCD line sensor is integrated to create integrated data indicating the heights of the foreign matter protrusion and the adhered foreign matter, and the integration of the accumulated foreign matter is performed by ANDing each integrated data and the protrusion pulse. The data is removed to extract the integral data of the foreign matter protrusion, the integrated data is compared with the second threshold value V _L for the height allowable value, and the foreign matter protrusion exceeding the height allowable value is selected, and the height thereof is selected. It outputs data.

Next, the foreign matter projection inspection apparatus is provided with respect to the mounted color filter and a moving stage on which a color filter is mounted and which moves in the X and Y directions to output XY coordinate data. A detection optical system including a high-angle illumination system, a low-angle illumination system, and a light receiving system that receives scattered light of foreign matter protrusions or adhered foreign matter, and a signal processing unit and a data processing unit that are sequentially connected to the light receiving system. Composed. The high-angle illumination system and the low-angle illumination system of the detection optical system cause the light flux L _T (λ _H ) of wavelength λ _H to be (40 ± 5) ° with respect to the surface of the color filter.
The light beam L _T (λ _L ) of wavelength λ _L at a high angle of (15 ± 5) °
And the light receiving system is set to a light receiving angle of (55 ± 5) ° with respect to the surface of the color filter.
Scattered light L _R (λ _H ), L
A dichroic mirror that separates _R (λ _L ) into wavelengths, and a first CCD line sensor and a second CCD that form the reflected lights L _R (λ _H ) and L _R (λ _L ) separated into wavelengths, respectively. It consists of a line sensor. The signal processing unit receives the output signal of the first CCD line sensor, removes the signal component of the adhering foreign matter adhering to the color filter, and sets the first threshold value V _H for detecting the signal component for the foreign matter protrusion. A first detection circuit, a projection pulse generation circuit that generates a projection pulse indicating the timing of the detected foreign matter projection, and an output signal of the second CCD line sensor are input, and both the foreign matter projection and the adhering foreign matter are detected. A second detection circuit, an integration circuit that integrates the detection signal of the second detection circuit and outputs integrated data, and ANDs the integrated data with the projection pulse and the XY coordinate data to obtain the integrated data of the foreign matter projection. It is composed of an AND circuit that outputs XY coordinate data. In addition, the data processing unit outputs the integrated data of the foreign matter protrusion output from the AND circuit and the XY
A memory for storing the coordinate data and a second threshold value _VL for the height allowable value of the foreign matter projection are set, and the integrated data stored in the memory is compared with the second threshold value _VL to determine the height allowable value. It is composed of a microprocessor that sorts out foreign matter protrusions that exceed the height and outputs height data and XY coordinate data.

[0010]

Now, characteristics such as the irradiation angle of the illumination light with respect to the foreign matter will be considered in advance. In principle, it is easy to capture a planar image of a foreign substance when illuminating the foreign substance at a high angle, and it is easy to capture a height image of the foreign substance when illuminating the foreign substance at a low angle. it is obvious. Even if the adhered foreign matter and the buried foreign matter have the same size, the projection is considerably larger than the adhered foreign matter because the pixel is swollen by the buried foreign matter. Of course, both adhered and buried foreign matter,
Although of various sizes, the protrusions are generally larger than the adhering foreign matter, and thus the image is also larger. The present invention focuses on the feature of the image by such an irradiation angle and the fact that the projection is generally large with respect to the adhered foreign matter. In the above method for detecting foreign matter projections, the surface of the color filter is irradiated with the light flux L _T (λ _H ) of wavelength λ _H at a high angle of (40 ± 5) °, and scattered light of projections or adhered foreign matter is obtained. L _R (λ
It has been confirmed by experiments that when ( _H ) is received at a light receiving angle of (55 ± 5) °, the scattered light of adhering foreign matter is received much weaker than the scattered light of the protrusions, and this allows the separation of the two. It is possible. That is, these scattered light L _R (λ _H )
Is wavelength-selected by the dichroic mirror and imaged on the first CCD line sensor, and the output signal thereof is compared with the first threshold value V _H to detect the signal component of the foreign matter protrusion, and a protrusion pulse is created. On the other hand, the luminous flux L _T (λ _L ) of wavelength λ _L
It is also confirmed by experiments that a signal indicating the height of the protrusion can be obtained by the low angle of (15 ± 5) ° and the light receiving angle. However, in the case of low-angle irradiation, the scattered light from the adhered foreign matter and the projection is received to the same extent. The scattered light L _R (λ _L ) is wavelength-selected by the dichroic mirror and imaged on the second CCD line sensor.
The scattered light of the protrusions and the adhering foreign matter is only partially received, and it is necessary to sum (or integrate) these to obtain height information. Therefore, the output signal of the second CCD line sensor is integrated to create integrated data indicating the heights of the protrusion and the adhering foreign matter. Each obtained integrated data is AND-combined with the projection pulse to remove the integrated data of the adhering foreign matter, the integrated data of the projection is extracted, and the extracted integrated data is compared with the second threshold value V _L for the height allowable value. Then, the foreign matter protrusions exceeding the height allowable value are selected, and the height data thereof is output. In the above, both luminous fluxes L _T
The reason for distinguishing the wavelengths of λ _H into λ _H and λ _L is to separate the scattered light L _R of both light fluxes, and the wavelengths λ _H and λ _L themselves have no special meaning and can be separated by a dichroic mirror. It can be arbitrary.

Next, the foreign matter projection inspection apparatus is a concrete embodiment of the above-mentioned detection method, in which the color filter is mounted on the XY moving stage and moved in the X or Y direction. Due to the high-angle illumination system and the low-angle illumination system of the system, the luminous flux L _T (λ _H ) of wavelength λ _H is at the high angle and the luminous flux L _T (λ _L ) of wavelength λ _L is at the low angle, respectively. Is irradiated. In the light receiving system, both scattered lights L _R (λ _H ), L _R (λ _L ) are wavelength-separated by the dichroic mirror, and the first and second light beams are separated.
The image is formed on each CCD line sensor. In the signal processing unit, the output signal of the first CCD line sensor is input to the first detection circuit, and the first threshold value V set in this is input.
Compared to _H , the signal component of the adhered foreign matter is removed and only the signal component of the foreign matter protrusion is detected, and then the protrusion pulse generation circuit generates a protrusion pulse indicating the timing of the protrusion. On the other hand, the output signal of the second CCD line sensor is input to the second detection circuit to detect both the protrusion and the adhered foreign matter,
Further, the integration circuit integrates and outputs each integrated data indicating each height, and these and the above-mentioned projection pulse and the XY coordinate data are AND-combined by the AND circuit, and the integrated data of the projection and the XY coordinate data are output. To be done. Both of these data are input to the data processing unit, temporarily stored in the memory, and then read by the microprocessor.
By comparing with the second threshold value V _L set to this, the protrusion exceeding the allowable height value is selected, and the height data and the XY coordinate value are output.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing an embodiment of a foreign matter protrusion inspection apparatus 10 of the present invention, and FIGS.
Is an explanatory view of the operation and action of each part of the foreign matter protrusion inspection apparatus 10,
FIG. 5 is a distribution diagram of detection signals of foreign matter or foreign matter protrusions of a sample detected by the foreign matter protrusion inspection apparatus 10, FIG.
Is a measured data table of XY dimensions of each sample.

In FIG. 1, a foreign matter projection inspection apparatus 10 is
An XY moving stage 2 having a control circuit 2a on which a color filter 11 to be inspected is mounted, a detection optical system 4 arranged corresponding to the color filter 11, and connected thereto as shown in the figure. And a signal processing unit 5 and a data processing unit 6. The XY moving stage 2 or the control circuit 2a sequentially outputs the XY coordinate values as it moves. The detection optical system 4 includes a laser light source 41 having a wavelength λ _H.
1, a high-angle illumination system 41A including a focusing lens 412, a laser light source 413 having a wavelength λ _L , a low-angle illumination system 41B including a focusing lens 414, a condenser lens 421, a dichroic mirror 422, and a first CCD line sensor 423. , And a light receiving system 42 composed of a second CCD line sensor 424. Each CCD line sensor 423, 424 has a plurality of light receiving elements s and a width X _a , and is arranged in the Y direction perpendicular to the paper surface. The high-angle illumination system 41A makes the luminous flux L _T (λ _H ) at a high angle θ _H of (40 ± 5) ° with respect to the surface of the color filter 11, and the low-angle illumination system 41B makes the luminous flux L _T (λ _L ) To (15 ± 5) °
At a low angle θ _L of
5) ° light receiving angle θ _R , both light fluxes L _T (λ _H ), L
_The signal processing unit 5 that receives the scattered light L _R (λ _H ) and L _R (λ _L ) of _T (λ _L ) includes a first detection circuit 51 and a first detection circuit 51 that are sequentially connected to the first CCD line sensor 423. A projection pulse generation circuit 52,
The second CCD line sensor 424 which is sequentially connected to the second
Detection circuit 53, integration circuit 54, A / D converter 55, and AND circuit 56 connected to both the projection pulse generation circuit 52 and the A / D converter 55, and the first detection circuit 51 includes: The first threshold value V _H for removing the signal component of the adhered foreign matter p is set, and the second detection circuit 53 is set with the threshold value V _N for removing noise such as specular reflection light L _R 'of the surface. The data processing unit 6 is composed of a memory (MEM) 61 and a microprocessor (MPU) 62, and a second threshold value V _L for the height allowable value of the protrusion T is set in the MPU 62.

2 to 6 in combination with FIG. 1, the method of inspecting the projection T in the foreign matter projection inspection apparatus 10 and the result thereof will be described below. FIG. 2 illustrates the directional characteristics of the scattered light L _R of the light flux L _T (λ _H ) emitted at a high angle. (a) is the case where the projection T is irradiated, and the scattered light L _RT
Is considerably strongly scattered in the direction of the light receiving angle θ _R of the light receiving system 42. On the other hand, although the regular reflection light L _R 'is reflected in the direction of the regular reflection angle θ _H ' from the smooth surface other than the protrusion T, θ _H '<
Since it is θ _R , the intensity of the regular reflection light L _R 'in the light receiving direction is weak and the amount of light received by the light receiving system 42 is L _RT > L _R '. (b) is the case of the adhered foreign matter p, and in this case as well, the amount of received light is L _RP > L _R ', but this scattered light L _RP is the scattered light L of the protrusion T shown in (a).
Experiments have confirmed that it is often much smaller than _RT . (c) shows the case where the edge of each pixel 113 of the color filter 11 is illuminated, and in this case as well, it has been confirmed that the amount of received light is L _RE > L _R '. By the above, the scattered light of the light beam _{L T (λ H) L R} (λ H) is a condenser lens
Focused by 421 and then dichroic mirror 422
Is imaged on the first CCD line sensor 423 through
The output signal is input to the first detection circuit 51, the signal component of the adhering foreign matter p is removed and the component of the protrusion T is detected by the first threshold value V _H set to this, and the detection signal is the protrusion. The pulse is input to the pulse generation circuit 52, and a projection pulse indicating the timing at which the projection T is detected is generated.
Enter in 56.

Next, FIG. 3 shows a light beam L emitted at a low angle.
_T(λ_L) Indicates the case. Two protrusions T now_a, T_b Height of
To H_a, H_b And the total amount of each scattered light is ΣL_Ra, Σ
L_RbThen, H_a > H_b In case of, ΣL_Ra> ΣL_Rbso
It is almost confirmed by experiments that there is. In addition, illustration
No, but the scattered light L of the protrusion T_RTAnd scattered light L of adhering foreign matter p
_RPIs received by the light-receiving system 42 at approximately the same level.
Also L_RT, L_RP> L_R'Is. Scattered light L of the above-mentioned protrusion T
_RTAnd scattered light L of adhering foreign matter p_RPGoes through the condenser lens 421.
Is reflected by the dichroic mirror 422, and the second C
An image is partially formed on each light receiving element s of the CD line sensor 424.
Be done. By scanning the second CCD line sensor 424,
The output signal output next is input to the second detection circuit 53,
Threshold V_N After the noise is removed by the
Are sequentially integrated. According to FIG. 4, the integration circuit 54
Explain the integration method and its significance. In (a), XY transfer
The color filter 11 moves in the X direction by the moving stage 2.
Then, the protrusion T also moves and the scattered light L_RTImage by T ’
Is partially connected to the second CCD line sensor 424.
It is imaged and corresponds to the amount of light received from each light receiving element s for each scan
Signal of the intensity to be output sequentially and input to the integration circuit 54.
It In (b), the protrusion T_T Image T ’
Assuming that the curve shown in FIG.
From the sensor 424, one scan, that is, its width X_a 
Scattered light L_R1, L_R2...... L_R5The received light signal for ...
Output, each scattered light L_R Is each width X_a Curve height corresponding to
H₁, h₂ ...... h_Five Think that it is almost proportional to
Does not support. Therefore, the integration circuit 64 integrates and ΣL_RiCalculate
When it comes out, this is Σh_i , That is, the height of the desired protrusion T
H data can be obtained.

Both integrated data for the projection T and the adhered foreign matter p integrated by the integrating circuit 54 are digitized by the A / D converter 55 and then input to the AND circuit 56 together with the XY coordinate data from the control circuit 2a. To do. These are AND-combined with the projection pulse input as described above to extract the integral data and the XY coordinate data of the projection T, which are input to the data processing unit 6 and temporarily stored in the MEM 61. The stored integral data is read out by the MPU 62 and compared with the second threshold value _VL , the protrusion T having a height exceeding the allowable value is selected, and the height data and the XY coordinate data are output from the MPU 62. It

In FIG. 5, in order to confirm the performance of the above-described foreign matter projection inspection apparatus 10, 10 adhered foreign matter p and 17 projections T are taken as samples, and the integration output from the integrating circuit 54 is made for each sample. The horizontal axis is the value, and the first CCD line sensor
The distribution of the specific level of each sample is shown with the peak value of the output signal of the 423 as the vertical axis. Further, the attached table shows data obtained by actually measuring the height H of each protrusion T with a microscope. Note that the overcoat 114 is not coated on each sample in this case. FIG. 6 shows data obtained by actually measuring the XY dimensions of each of these samples with a microscope. In FIG. 5, ten adhered foreign matters p shown by X are removed with the exception of p ₁ and p ₂ except the first threshold V _H. However, if the first threshold value is set to the dotted line V _H ′, p ₁ and p ₂ can be removed, but on the other hand, the detection range of the protrusion T described below is narrowed by that amount. The threshold value V _H of Next, regarding the protrusions T, the marks S _{1 to} S ₇ are the protrusions T whose measured height H is within the range of 2 to 3 μm, and these are all detected by the first threshold value V _H. Now, if the height allowable value is set to 3 μm and the second threshold value _VL is set at the position shown in the figure, S _{1 to} S ₆ are removed by this, and S ₇ is detected as an exception. ◎ marked M _{1 to} M ₃ has H of 3 to 5
With the protrusion T of μm, M ₂ and M ₃ are detected by the second threshold value _VL , and M ₁ is not detected, resulting in a detection error. ● L ₁
~ L ₃ is ₅ to 6 μm, △ L ₄ and L ₅ are 6 to 7 μm, □
The mark L ₆ is ₇ to 15 μm, and the mark L ₇ is the protrusion T having H of 15 μm or more, and these are all detected by the second threshold value V _L. Here, XY dimensions shown in FIG.
Comparing the heights H of the above-mentioned projections T, the size of the plane area and the height H of each sample are irrelevant, and the projection T having the height H exceeding the allowable value is irrespective of the size of the plane area. It can be seen that most have been detected. From the above, it can be concluded that the foreign matter projection inspection apparatus 10 has considerably good discrimination performance and detection performance of the projection T that is equal to or larger than the allowable value. Although each sample is not coated with the overcoat 114, it has the same performance even when the overcoat 114 is coated. A light flux of wavelength λ _H for high-angle illumination and a light flux of wavelength λ _L for low-angle illumination are used, but a laser may be used.

[0018]

As described above, in the method and the inspection apparatus for detecting foreign matter protrusions of a color filter according to the present invention, it is difficult to distinguish between the adhered foreign matter and the foreign matter protrusion, which have been difficult in the past, and the height allowable value is exceeded. Detection of foreign matter protrusions is performed well, and each of these performances has been confirmed by experiments on samples and has high reliability, and the effects that contribute to the inspection technology of the color filter for liquid crystal pulses are:
There is a big one.

[Brief description of drawings]

FIG. 1 is a block configuration diagram of an embodiment of a foreign matter protrusion inspection apparatus 10 of the present invention.

2A and 2B are explanatory diagrams of directivity of scattered light L _R by an illumination system 41A. FIG. 2A is a case where a projection T is irradiated, FIG. 2B is a case where an adhered foreign matter p is irradiated, and FIG. c) shows the case where the edge of the pixel is illuminated.

FIG. 3 shows two projections T _a and T by the illumination system 41B.
It is explanatory drawing with respect to the comparison of the intensity | strength of both scattered light L _R of _b .

FIG. 4 is an explanatory diagram of an integration method in the integration circuit 54 and its significance.

FIG. 5 is a distribution diagram of detection signals of adhered foreign matter or protrusions of a sample detected by the foreign matter protrusion inspection apparatus 10.

6 is a measured data table of XY dimensions of each sample of FIG.

7A and 7B are views for explaining an example of the configuration of a color liquid crystal panel, wherein FIG. 7A is a sectional view of the liquid crystal panel 1, and FIG. 7B is a sectional view and a plan view of a color filter 11.

8A and 8B are explanatory views of a protrusion T formed by an adhered foreign substance p and a buried foreign substance p ′ existing in the color filter 11, where FIG. 8A shows a case without overcoating, and FIG. 8B shows a case with overcoating. .

FIG. 9 is a table of actually measured data of the shape and dimensions of the protrusions T of the sample measured by a microscope.

FIG. 10 is a basic configuration diagram of a foreign matter inspection apparatus for a wafer.

[Explanation of symbols]

1 ... Color liquid crystal panel, 11 ... Color filter, 111 ... Glass plate, 112 ... Chrome thin film, 113 ... Pixel, 114 ... Overcoat, 2 ... XY moving stage, 2a ... Control circuit, 3
... Detection optical system of wafer foreign matter inspection apparatus, 4 ... Detection optical system of the present invention, 41A ... High angle illumination system, 41B ... Low angle illumination system, 411, 413 ... Laser light source, 412, 414 ... Focusing lens, 42
... Light receiving system, 421 ... Condensing lens, 422 ... Dichroic mirror, 423 ... First CCD line sensor, 424 ... Second CCD line sensor, 5 ... Signal processing unit, 51 ... First detection circuit, 52 ... Protrusion Pulse generation circuit, 53 ... second detection circuit,
54 ... Integrator circuit, 55 ... A / D converter, 56 ... AND circuit, 6
... data processing unit, 61 ... memory, 62 ... microprocessor (MPU), 10 ... foreign matter protrusion inspection apparatus of this invention, R,
G, B ... Three primary colors of pixel, p ... Adhering foreign matter, p '... Buried foreign matter, T ... Foreign matter protrusion (simple protrusion), L _T (λ _H ) ... Light flux of wavelength λ _H , L _T (λ _L ) ... Wavelength Luminous flux of λ _L , θ _H ... Luminous flux L _T (λ _H )
Irradiation angle of θ _L, luminous flux L _T (λ _L ) of irradiation angle, L _R (λ _H ), L
_R (λ _L ) ... scattered light, ΣL _R ... sum of scattered light, L _R '... regular reflection light, θ _R ... reception angle, θ _H ' ... regular reflection angle, V _H ... first threshold value, _VL ... Second threshold, V _N ... Threshold for noise.

Front Page Continuation (72) Inventor Takahito Tabata 2-6-2 Otemachi, Chiyoda-ku, Tokyo Inside Ritsuden Electronics Engineering Co., Ltd. (72) Inventor Mitsuyoshi Koizumi 2-6-2 Otemachi, Chiyoda-ku, Tokyo Hiritsu Electronics Engineering Co., Ltd.

Claims (2)

[Claims] 1. A foreign matter projection of a color filter for a liquid crystal panel as a detection target, with respect to the surface of the color filter, and a wavelength lambda _H light beam L _T (λ _H), the wavelength lambda _L light beam L _T (lambda _L ) and a high angle of (40 ± 5) ° and (15 ± 5) ° respectively
Of both light beams L _T (λ _H ), L _T (λ _L )
The scattered light L _R (λ _H ), L _R (λ _L ) of
The light is received at a light receiving angle of 5) °, the wavelengths are separated by a dichroic mirror, and each is imaged on a first CCD line sensor and a second CCD line sensor. The signal component of the foreign matter protrusion is detected to generate a protrusion pulse by comparing with the first threshold value V _H for removing the signal component of the adhered foreign substance adhered to the color filter, and the second CCD line sensor's The output signal is integrated to create integrated data indicating the heights of the foreign matter protrusion and the adhered foreign matter, and the integrated data of the adhered foreign matter is removed by AND synthesis of the integrated data and the protrusion pulse. The integrated data of the foreign matter protrusion is extracted, and the extracted integrated data is used as the second threshold value V for the height allowable value.
_A method for detecting foreign matter protrusions of a color filter, wherein the foreign matter protrusions that exceed the height allowable value are selected in comparison with _L and the height data is output. 2. A foreign matter protrusion of a color filter for a liquid crystal panel is set as an inspection target, the color filter is placed and moved in X and Y directions, and a moving stage for outputting XY coordinate data, and the placed stage. A detection optical system, which is provided for the color filter, includes a high-angle illumination system, a low-angle illumination system, and a light-receiving system that receives scattered light of the foreign matter protrusions or adhered foreign matter adhered to the color filter, and the light receiving system. And a high-angle illumination system and a low-angle illumination system of the detection optical system, a light flux of wavelength λ _H with respect to the surface of the color filter. L _T (λ
At high angles of _{H) (40 ± 5) °} , the wavelength lambda _L light beam L _T (lambda
_L ) is irradiated at a low angle of (15 ± 5) °, and the light receiving system is (55 ± 5) ° with respect to the surface of the color filter.
The scattered light L of the foreign matter protrusions or the foreign matter adhered to the color filter which is set to the light receiving angle of
A dichroic mirror for wavelength-separating _R (λ _H ), L _R (λ _L ) and both reflected light L _R (λ _H ), L _R (λ _L ) are wavelength-separated.
The first CCD line sensor and the second image forming respective images
The signal processing unit receives the output signal of the first CCD line sensor, removes the signal component of the adhered foreign matter adhering to the color filter, and detects the signal component for the foreign matter protrusion. A first detection circuit in which a first threshold value V _H is set, a projection pulse generation circuit for generating a projection pulse indicating the timing of the detected foreign matter projection, and the second CCD
A second detection circuit that receives the output signal of the line sensor and detects both the foreign matter protrusion and the adhered foreign matter, an integration circuit that integrates the detection signal of the second detection circuit and outputs integrated data, and And a combination of the integration data, the projection pulse, and the XY coordinate data to output the integration data of the foreign matter projection and the XY coordinate data, and the data processing unit outputs the output of the AND circuit. A memory for storing the integrated data of the foreign matter projections and the XY coordinate data, and a second threshold value V for the allowable height of the foreign matter projections.
_L is set, the integrated data stored in the memory is compared with the second threshold value _VL , and a foreign matter protrusion exceeding the height allowable value is selected, and the height data and XY coordinate data are selected. Characterized by comprising a microprocessor for outputting,
Foreign matter protrusion inspection device for color filters.