JPH08502091A - ノボラック樹脂混合物 - Google Patents
ノボラック樹脂混合物Info
- Publication number
- JPH08502091A JPH08502091A JP6509202A JP50920294A JPH08502091A JP H08502091 A JPH08502091 A JP H08502091A JP 6509202 A JP6509202 A JP 6509202A JP 50920294 A JP50920294 A JP 50920294A JP H08502091 A JPH08502091 A JP H08502091A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- resin
- molecular weight
- resins
- novolac
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.同じまたは異なった化学組成を有する少なくとも2種類のノボラック樹脂 の混合物を含んでなり、同じ区域に正規化された、成分樹脂の分子量分布が少な くとも50%の重なりを示し、成分樹脂の溶解速度が少なくとも2.0のファク ターで異なっていることを特徴とする、水に不溶であるが、水性アルカリに可溶 な被膜形成ノボラック樹脂。 2.ノボラック樹脂が、60〜100%の分子量分布の重なりを示す、請求項 1に記載のノボラック樹脂混合物。 3.ノボラック樹脂が、70〜95%の分子量分布の重なりを示す、請求項1 に記載のノボラック樹脂混合物。 4.ノボラック樹脂の溶解速度が2.0〜約6.0のファクターで異なる、請 求項1に記載のノボラック樹脂混合物。 5.ノボラック樹脂がそれぞれホルムアルデヒドおよび1種またはそれより多 い多置換フェノールの反応生成物である、請求項1に記載のノボラック樹脂混合 物。 6.同じ区域に正規化された、成分樹脂の分子量分布が少なくとも50%の重 なりを示し、成分樹脂の溶解速度が少なくとも2.0のファクターで異なってい る、 同じまたは異なった化学組成を有する少なくとも2種類のノボラック樹脂を混合 することを特徴とする、水に不溶であるが、水性アルカリに可溶な被膜形成ノボ ラック樹脂の製造法。 7.ノボラック樹脂が、60〜100%の分子量分布の重なりを示す、請求項 6に記載の方法。 8.ノボラック樹脂が、70〜95%の分子量分布の重なりを示す、請求項6 に記載の方法。 9.ノボラック樹脂の溶解速度が2.0〜約6.0のファクターで異なる、請 求項6に記載の方法。 10.ノボラック樹脂がそれぞれホルムアルデヒドおよび1種またはそれより 多い多置換フェノールの反応生成物である、請求項6に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/953,031 | 1992-09-28 | ||
US07/953,031 US5371169A (en) | 1992-09-28 | 1992-09-28 | Novolak resin mixtures |
PCT/US1993/009122 WO1994007955A1 (en) | 1992-09-28 | 1993-09-24 | Novolak resin mixtures |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08502091A true JPH08502091A (ja) | 1996-03-05 |
JP3549882B2 JP3549882B2 (ja) | 2004-08-04 |
Family
ID=25493484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50920294A Expired - Lifetime JP3549882B2 (ja) | 1992-09-28 | 1993-09-24 | ノボラック樹脂混合物 |
Country Status (9)
Country | Link |
---|---|
US (1) | US5371169A (ja) |
EP (1) | EP0662990B1 (ja) |
JP (1) | JP3549882B2 (ja) |
KR (1) | KR100280598B1 (ja) |
DE (1) | DE69314965T2 (ja) |
HK (1) | HK1002332A1 (ja) |
SG (1) | SG49697A1 (ja) |
TW (1) | TW343225B (ja) |
WO (1) | WO1994007955A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6297352B1 (en) * | 1998-11-12 | 2001-10-02 | Clariant Finance (Bvi) Limited | Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge |
US6121412A (en) * | 1998-11-12 | 2000-09-19 | Clariant Finance (Bvi) Limited | Preparation of fractionated novolak resins by a novel extraction technique |
KR100846085B1 (ko) * | 2001-10-31 | 2008-07-14 | 주식회사 동진쎄미켐 | 액정표시장치 회로용 포토레지스트 조성물 |
JP4283773B2 (ja) * | 2002-08-30 | 2009-06-24 | 旭有機材工業株式会社 | ノボラック型フェノール樹脂の製造方法 |
US7691556B2 (en) * | 2004-09-15 | 2010-04-06 | Az Electronic Materials Usa Corp. | Antireflective compositions for photoresists |
US20060057501A1 (en) * | 2004-09-15 | 2006-03-16 | Hengpeng Wu | Antireflective compositions for photoresists |
US7553905B2 (en) * | 2005-10-31 | 2009-06-30 | Az Electronic Materials Usa Corp. | Anti-reflective coatings |
US20090042133A1 (en) * | 2007-08-10 | 2009-02-12 | Zhong Xiang | Antireflective Coating Composition |
FR2959226B1 (fr) * | 2010-04-21 | 2012-05-25 | Saint Gobain Technical Fabrics | Structure de fils de verre destinee a renforcer des articles abrasifs agglomeres. |
TWI485520B (zh) * | 2013-06-11 | 2015-05-21 | Chi Mei Corp | 負型感光性樹脂組成物及其應用 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3666473A (en) * | 1970-10-06 | 1972-05-30 | Ibm | Positive photoresists for projection exposure |
JPS5271224A (en) * | 1975-12-11 | 1977-06-14 | Toshiba Corp | Positive type light sensitive composition |
US4551409A (en) * | 1983-11-07 | 1985-11-05 | Shipley Company Inc. | Photoresist composition of cocondensed naphthol and phenol with formaldehyde in admixture with positive o-quinone diazide or negative azide |
JPS616647A (ja) * | 1984-06-20 | 1986-01-13 | Konishiroku Photo Ind Co Ltd | ポジ型感光性平版印刷版用感光性組成物 |
JPS61106297A (ja) * | 1984-10-30 | 1986-05-24 | Konishiroku Photo Ind Co Ltd | 感光性平版印刷版 |
JPH0654384B2 (ja) * | 1985-08-09 | 1994-07-20 | 東京応化工業株式会社 | ポジ型ホトレジスト組成物 |
JP2693472B2 (ja) * | 1987-11-26 | 1997-12-24 | 株式会社東芝 | レジスト |
JP2623778B2 (ja) * | 1988-10-18 | 1997-06-25 | 日本合成ゴム株式会社 | 感放射線性樹脂組成物 |
-
1992
- 1992-09-28 US US07/953,031 patent/US5371169A/en not_active Expired - Lifetime
-
1993
- 1993-09-24 EP EP93922388A patent/EP0662990B1/en not_active Expired - Lifetime
- 1993-09-24 WO PCT/US1993/009122 patent/WO1994007955A1/en active IP Right Grant
- 1993-09-24 SG SG1996004193A patent/SG49697A1/en unknown
- 1993-09-24 JP JP50920294A patent/JP3549882B2/ja not_active Expired - Lifetime
- 1993-09-24 KR KR1019950701193A patent/KR100280598B1/ko not_active IP Right Cessation
- 1993-09-24 DE DE69314965T patent/DE69314965T2/de not_active Expired - Fee Related
- 1993-09-25 TW TW082107915A patent/TW343225B/zh not_active IP Right Cessation
-
1998
- 1998-01-19 HK HK98100434A patent/HK1002332A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG49697A1 (en) | 1998-06-15 |
DE69314965T2 (de) | 1998-02-26 |
HK1002332A1 (en) | 1998-08-14 |
WO1994007955A1 (en) | 1994-04-14 |
TW343225B (en) | 1998-10-21 |
EP0662990A1 (en) | 1995-07-19 |
JP3549882B2 (ja) | 2004-08-04 |
KR950703611A (ko) | 1995-09-20 |
EP0662990B1 (en) | 1997-10-29 |
US5371169A (en) | 1994-12-06 |
KR100280598B1 (ko) | 2001-02-01 |
DE69314965D1 (de) | 1997-12-04 |
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