JPH0845012A - Production of magnetic head - Google Patents

Production of magnetic head

Info

Publication number
JPH0845012A
JPH0845012A JP18255694A JP18255694A JPH0845012A JP H0845012 A JPH0845012 A JP H0845012A JP 18255694 A JP18255694 A JP 18255694A JP 18255694 A JP18255694 A JP 18255694A JP H0845012 A JPH0845012 A JP H0845012A
Authority
JP
Japan
Prior art keywords
substrate
magnetic
block
soft magnetic
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18255694A
Other languages
Japanese (ja)
Inventor
Akio Kitatani
明雄 北谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP18255694A priority Critical patent/JPH0845012A/en
Publication of JPH0845012A publication Critical patent/JPH0845012A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To uniformly wear sliding surfaces with a recording medium and to obviate, the generation of uneven wear by holding soft magnetic thin films with a pair of nonmagnetic substrates therein and forming these thin films on the sliding surfaces. CONSTITUTION:The soft magnetic thin films 2 are formed on approximately V-shaped groove surfaces formed at a prescribed pitch size on the front surface of a nonmagnetic substrate 3, by which a first substrate block 6 is formed. Low melting glass 7 is disposed on the substrate block 6 and a nonmagnetic substrate 4 having approximately the V-shaped grooves formed at the same pitch size is disposed thereon. The low melting glass 7 is then melted while load is applied thereon. As a result, both nonmagnetic substrates 3, 4 are adhered via the soft magnetic thin films 2, by which a second substrate block 9 is formed. A pair of the second substrate blocks 5, 5 are joined in such a manner that the gap surfaces face each other as shown in Fig. (C) to form a core block 17. The core block 17 is cut at a prescribed pitch B to form head chips l. As a result, the sliding surfaces on which three kinds of the different materials coexist heretofore are formed are formed of only the two kinds exclusive of the glass and, therefore, the sliding surfaces are uniformly worn and the generation of the uneven wear is averted.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ビデオテープレコーダ
等の磁気記録再生装置に用いられる磁気ヘッドの製造方
法に関し、とくに磁気回路を構成する軟磁性薄膜と、こ
の軟磁性薄膜を支持する非磁性基板とからなる磁気ヘッ
ドの製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head used in a magnetic recording / reproducing apparatus such as a video tape recorder, and more particularly to a soft magnetic thin film constituting a magnetic circuit and a non-magnetic material supporting the soft magnetic thin film. The present invention relates to a method of manufacturing a magnetic head including a substrate.

【0002】[0002]

【従来の技術】近年、磁気記録媒体の高密度化にともな
いメタルテープのような高保磁力媒体が主流となって来
ている。このため磁気ヘッドに使用されるコア材料も高
い飽和磁束密度を有するものが要求され、同時に狭トラ
ック化されたものが要求されている。
2. Description of the Related Art In recent years, a high coercive force medium such as a metal tape has become mainstream with the increase in density of magnetic recording media. For this reason, the core material used for the magnetic head is required to have a high saturation magnetic flux density, and at the same time, the one having a narrowed track is required.

【0003】そこで、図8に示すようなヘッドチップ2
1を用いた磁気ヘッドが実用化されている。このヘッド
チップ21は軟磁性薄膜22を非磁性基板23および低
融点ガラス24によって挟み込むようにして形成した一
対の基板ブロック25,25を接合して構成したもので
ある。
Therefore, the head chip 2 as shown in FIG.
A magnetic head using No. 1 has been put to practical use. The head chip 21 is formed by joining a pair of substrate blocks 25, 25 formed by sandwiching a soft magnetic thin film 22 between a non-magnetic substrate 23 and a low melting point glass 24.

【0004】このヘッドチップ21の製造方法は、ま
ず、図9に示すように、セラミックスや感光性結晶化ガ
ラス、結晶化ガラス等の非磁性材料からなる非磁性基板
23の表面に所定のピッチ寸法Aで略V字状の溝23a
を形成し、この溝23aの溝面に軟磁性薄膜22を形成
する。
In the method of manufacturing the head chip 21, first, as shown in FIG. 9, a predetermined pitch dimension is formed on the surface of a non-magnetic substrate 23 made of a non-magnetic material such as ceramics, photosensitive crystallized glass, or crystallized glass. A is a substantially V-shaped groove 23a
And the soft magnetic thin film 22 is formed on the groove surface of the groove 23a.

【0005】次いで、図10に示すように、非磁性基板
23の溝23aに低融点ガラス24を充填し、溝23a
の頂点と低融点ガラス24の表面とが一致するように低
融点ガラス24を平面状に研磨する。その後、図11に
示すように、基板23の一端面側の表面に内部巻線溝2
6を形成し、裏面に外部巻線溝27を形成し、さらにギ
ャップ面28に非磁性ギャップ材29を形成し、基板ブ
ロック25とする。
Next, as shown in FIG. 10, the groove 23a of the non-magnetic substrate 23 is filled with the low melting point glass 24, and the groove 23a is formed.
The low-melting-point glass 24 is planarly polished so that the top of the low-melting-point glass and the surface of the low-melting-point glass 24 coincide with each other. Then, as shown in FIG. 11, the internal winding groove 2 is formed on the surface of the substrate 23 on the one end surface side.
6, the external winding groove 27 is formed on the back surface, and the nonmagnetic gap material 29 is further formed on the gap surface 28 to form the substrate block 25.

【0006】その後、図12に示すように、2つの基板
ブロック25のギャップ面28どうしを対向させ、加圧
固定を行って接合し、コアブロック30を形成する。次
いで、摺動面に沿って所定のピッチ寸法Bで破線L1,
L2で示すように切断してヘッドチップ21とする(図
8)。
After that, as shown in FIG. 12, the gap surfaces 28 of the two substrate blocks 25 are opposed to each other, and they are pressure-fixed and joined to form a core block 30. Next, along the sliding surface, with a predetermined pitch dimension B, the broken line L1,
The head chip 21 is cut as shown by L2 (FIG. 8).

【0007】[0007]

【発明が解決しようとする課題】前述した従来のヘッド
チップを使用した磁気ヘッドでは、テープが接触する摺
動面に硬度、摩擦係数、ヘッド摺動面に占める面積がそ
れぞれ異なる3種類の材料が軟磁性薄膜、非磁性基板、
低融点ガラスとして混在し、かつギャップを介して非対
称であるため、長い間磁気テープを走行させるとテープ
に接触している箇所が均一に摩耗せずに偏摩耗となり、
結果的に偏摩耗によって起こる微小な段差が磁気テープ
と磁気ヘッドとの間のスペースとなり、十分な記録再生
が出来なくなるという不都合が生じる。また、この微小
な段差に磁気テープの磁性粉が付着して目詰まりを起こ
したり、その磁性粉によって磁気ヘッドに傷がついたり
するといった不都合も生じる。
In the magnetic head using the above-mentioned conventional head chip, three kinds of materials having different hardness, friction coefficient, and area occupied by the head sliding surface are used for the sliding surface contacting the tape. Soft magnetic thin film, non-magnetic substrate,
Since it is mixed as a low-melting glass and is asymmetrical across the gap, running the magnetic tape for a long time causes uneven wear without evenly wearing the parts in contact with the tape,
As a result, a minute step caused by uneven wear becomes a space between the magnetic tape and the magnetic head, which causes a problem that sufficient recording and reproduction cannot be performed. In addition, the magnetic powder of the magnetic tape may adhere to the minute steps to cause clogging, and the magnetic powder may damage the magnetic head.

【0008】本発明の目的は、磁気テープと接触する磁
気ヘッドの摺動面が均一に摩耗し、偏摩耗が生じないよ
うにした磁気ヘッドの製造方法を提供することにある。
An object of the present invention is to provide a method of manufacturing a magnetic head in which the sliding surface of the magnetic head in contact with the magnetic tape is uniformly worn and uneven wear is prevented.

【0009】[0009]

【課題を解決するための手段】本発明による磁気ヘッド
の製造方法は、非磁性基板の表面に所定のピッチ寸法で
形成した略V字状の溝の溝面に軟磁性薄膜を形成して第
1の基板ブロックを形成する工程と、第1の基板ブロッ
ク上に低融点ガラスを配し、その上に同一のピッチ寸法
で形成した略V字状の溝を有する非磁性基板を配し、低
融点ガラスに荷重をかけながら溶解することにより両非
磁性基板を軟磁性薄膜を介して接着して第2の基板ブロ
ックを形成する工程と、一対の第2の基板ブロックをギ
ャップ面どうしが互いに対向するように接合してコアブ
ロックを形成する工程と、コアブロックを所定のピッチ
寸法で切断してヘッドチップとする工程とを有し、磁気
回路を形成する軟磁性薄膜を両非磁性基板によって挟み
込むように摺動面上に形成する。
According to the method of manufacturing a magnetic head of the present invention, a soft magnetic thin film is formed on a groove surface of a substantially V-shaped groove formed on a surface of a non-magnetic substrate with a predetermined pitch dimension. The step of forming the first substrate block and the step of forming the low melting point glass on the first substrate block, and arranging the non-magnetic substrate having the substantially V-shaped groove formed with the same pitch dimension thereon, A step of forming a second substrate block by adhering both non-magnetic substrates through a soft magnetic thin film by melting the melting point glass while applying a load, and a gap surface of a pair of second substrate blocks facing each other. And a step of cutting the core block into a head chip by cutting the core block at a predetermined pitch dimension, and the soft magnetic thin film forming the magnetic circuit is sandwiched by both nonmagnetic substrates. As sliding surface Form to.

【0010】この場合、軟磁性薄膜および非磁性基板
は、互いに近い硬度を有する材質のものを用いるように
する。
In this case, the soft magnetic thin film and the non-magnetic substrate should be made of materials having hardness close to each other.

【0011】[0011]

【作用】本発明による磁気ヘッドの製造方法は、非磁性
基板の表面に所定のピッチ寸法で略V字状の溝を形成
し、この形成した溝の溝面に軟磁性薄膜を形成して第1
の基板ブロックを形成する。
According to the method of manufacturing a magnetic head according to the present invention, substantially V-shaped grooves are formed on the surface of a non-magnetic substrate at a predetermined pitch, and a soft magnetic thin film is formed on the groove surface of the formed grooves. 1
Forming a substrate block.

【0012】次いで、この第1の基板ブロック上に低融
点ガラスを配し、その上に同一のピッチ寸法で形成した
略V字状の溝を有する非磁性基板を配し、低融点ガラス
に荷重をかけながら溶解することにより両非磁性基板を
軟磁性薄膜を介して接着して第2の基板ブロックを形成
する。
Next, a low melting point glass is placed on the first substrate block, and a non-magnetic substrate having substantially V-shaped grooves formed with the same pitch dimension is placed thereon, and the low melting point glass is loaded. The two non-magnetic substrates are adhered to each other via the soft magnetic thin film by being melted while applying the liquid to form a second substrate block.

【0013】次いで、一対の第2の基板ブロックをギャ
ップ面どうしが互いに対向するように接合してコアブロ
ックを形成し、このコアブロックを所定のピッチ寸法で
切断してヘッドチップとする。こうして磁気回路を形成
する軟磁性薄膜を、両非磁性基板によって挟み込むよう
にして摺動面上に形成する。
Next, a pair of second substrate blocks are joined so that the gap surfaces face each other to form a core block, and the core block is cut at a predetermined pitch to form a head chip. Thus, the soft magnetic thin film forming the magnetic circuit is formed on the sliding surface so as to be sandwiched between the two non-magnetic substrates.

【0014】軟磁性薄膜の硬度と非磁性基板の硬度とは
近いことが望ましく、例えば軟磁性薄膜として使用する
FeAlSi系合金の硬度は530〜600、FeTa
Ti系合金の硬度は1000、非磁性基板として使用す
るセラミックスの硬度は800、結晶化ガラスの硬度は
650〜750である。
It is desirable that the hardness of the soft magnetic thin film and the hardness of the non-magnetic substrate are close to each other. For example, the hardness of the FeAlSi type alloy used as the soft magnetic thin film is 530 to 600, and FeTa.
The hardness of the Ti-based alloy is 1000, the hardness of the ceramic used as the non-magnetic substrate is 800, and the hardness of the crystallized glass is 650 to 750.

【0015】[0015]

【実施例】図1は、本発明により形成された高飽和磁束
密度を有するヘッドチップ1の外観斜視図である。この
ヘッドチップ1は帯状に形成された軟磁性薄膜2の両側
を非磁性基板3,4によって挟み込むようにして形成し
た一対の基板ブロック5,5を接合して構成したもので
ある。
1 is an external perspective view of a head chip 1 having a high saturation magnetic flux density formed according to the present invention. The head chip 1 is constructed by joining a pair of substrate blocks 5 and 5 formed so that both sides of a strip-shaped soft magnetic thin film 2 are sandwiched by non-magnetic substrates 3 and 4.

【0016】このヘッドチップ1の製造方法は、まず、
例えば感光性結晶化ガラス、結晶化ガラスあるいはセラ
ミックス材料により形成された平板状の基板3の表面
に、図2に示すように、所定のピッチ寸法Aで略V字状
の溝3aをダイシング加工により形成し、その後、図3
に示すように溝3aの溝面に真空蒸着またはスパッタ法
により所定の膜厚(2〜30μm程度)でFeAlSi
系合金からなる軟磁性薄膜2を形成し基板ブロック6と
する。
The method of manufacturing the head chip 1 is as follows.
For example, as shown in FIG. 2, a substantially V-shaped groove 3a with a predetermined pitch dimension A is formed by dicing on the surface of a flat plate-shaped substrate 3 made of photosensitive crystallized glass, crystallized glass or a ceramic material. Formed and then Figure 3
As shown in FIG. 3, FeAlSi is formed on the groove surface of the groove 3a with a predetermined film thickness (about 2 to 30 μm) by vacuum deposition or sputtering.
A soft magnetic thin film 2 made of a system alloy is formed to form a substrate block 6.

【0017】次いで、図4に示すように、基板ブロック
6の表面に低融点ガラス7を置き、その上に同じ非磁性
基板3と同じ材質を使用し同じピッチ寸法Aで略V字状
の溝を形成した非磁性基板4を置き、その上に軟磁性薄
膜2と基板4とが密着するように所定重量の重り8を置
き、所定の温度でボンディングを行い、基板ブロック9
とする。
Next, as shown in FIG. 4, a low-melting glass 7 is placed on the surface of the substrate block 6, and the same material as that of the non-magnetic substrate 3 is used and a substantially V-shaped groove is formed at the same pitch dimension A. The non-magnetic substrate 4 on which is formed is placed, and a weight 8 having a predetermined weight is placed on the non-magnetic substrate 4 so that the soft magnetic thin film 2 and the substrate 4 are in close contact with each other.
And

【0018】次に、基板ブロック9を、基板3の溝3a
の頂点まで平面状に研磨し、はみ出した非磁性基板4と
低融点ガラス7とを取り除くように研磨する。その結
果、基板ブロック9は、図5に示すように、基板3の溝
3aの溝面に軟磁性薄膜2が形成され、さらに溝3a内
に非磁性基板4が充填された形状となる。
Next, the substrate block 9 is attached to the groove 3a of the substrate 3.
To a vertex, and is polished so as to remove the protruding non-magnetic substrate 4 and low melting point glass 7. As a result, the substrate block 9 has a shape in which the soft magnetic thin film 2 is formed on the groove surface of the groove 3a of the substrate 3 and the nonmagnetic substrate 4 is filled in the groove 3a, as shown in FIG.

【0019】次いで、図6に示すように、基板ブロック
9の一端側の表面および裏面に内部巻線溝10および外
部巻線溝11を形成し、基板ブロック9の他端側の表面
に補助溝12を形成する。そして、内部巻線溝10が形
成された面であるギャップ面13に所定のギャップが形
成されるようにSiO2 等の非磁性ギャップ材14を真
空蒸着またはスパッタリングにより形成して基板ブロッ
ク5とする。
Next, as shown in FIG. 6, the inner winding groove 10 and the outer winding groove 11 are formed on the front surface and the back surface on one end side of the substrate block 9, and the auxiliary groove is formed on the surface on the other end side of the substrate block 9. 12 is formed. Then, a non-magnetic gap material 14 such as SiO 2 is formed by vacuum vapor deposition or sputtering so as to form a predetermined gap on the gap surface 13 which is the surface on which the internal winding groove 10 is formed, to form the substrate block 5. .

【0020】次いで、図7に示すように、一対の基板ブ
ロック5を、ギャップ面13どうしが対向するように位
置を合わせ、加圧固定を行い、内部巻線溝10および補
助溝12内にそれぞれ溝より細い棒ガラス15,16を
挿入し、この棒ガラス15,16を電気炉によって溶解
接合し、コアブロック17とする。
Next, as shown in FIG. 7, the pair of substrate blocks 5 are aligned so that the gap surfaces 13 face each other, and pressure fixing is performed, and the internal winding groove 10 and the auxiliary groove 12 are respectively inserted. Bars 15 and 16 thinner than the groove are inserted, and the bars 15 and 16 are melted and joined by an electric furnace to form a core block 17.

【0021】その後、コアブロック17を破線L1,L
2に沿って所定のピッチ寸法B(=A×cosθ;ただ
し、θはアジマス角度)で切断してヘッドチップ1(図
1)とする。そして、このヘッドチップ1をベース板
(不図示)に接着固定した後、コイル巻線およびテープ
研磨を施して磁気ヘッドを形成する。
Thereafter, the core block 17 is connected to broken lines L1 and L.
A head chip 1 (FIG. 1) is obtained by cutting along 2 along a predetermined pitch dimension B (= A × cos θ; where θ is an azimuth angle). Then, after the head chip 1 is bonded and fixed to a base plate (not shown), coil winding and tape polishing are performed to form a magnetic head.

【0022】[0022]

【発明の効果】本発明によれば、磁気テープが接触する
摺動面を、互いに硬度が近い非磁性基板によって軟磁性
薄膜を挟み込むように構成するようにしたので、従来3
種類の異なる材料が混在していた摺動面を、2種類だけ
で構成することになり、偏摩耗を最小限に抑えることが
できる。
According to the present invention, the sliding surface with which the magnetic tape comes into contact is structured such that the soft magnetic thin film is sandwiched between the non-magnetic substrates having hardnesses close to each other.
The sliding surface in which different kinds of materials are mixed is constituted by only two kinds, and it is possible to minimize uneven wear.

【0023】その結果、磁気テープと磁気ヘッドとの間
のスペースが極小になり、広帯域記録に十分対応してい
けるようになる。そして、偏摩耗によって起こる微小な
段差もなくなることで、磁気テープの磁性粉が付着しな
いため、磁気ヘッドの目詰まりや、傷つきも無くなるこ
とになる。
As a result, the space between the magnetic tape and the magnetic head is minimized, and wide band recording can be sufficiently supported. Since the minute steps caused by the uneven wear are eliminated, the magnetic powder of the magnetic tape does not adhere, so that the magnetic head is not clogged or scratched.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明により形成されたヘッドチップの外観斜
視図である。
FIG. 1 is an external perspective view of a head chip formed according to the present invention.

【図2】平板状の非磁性基板の表面に略V字状の溝を形
成した図である。
FIG. 2 is a view in which a substantially V-shaped groove is formed on the surface of a flat non-magnetic substrate.

【図3】非磁性基板のV字状の溝の溝面に軟磁性薄膜を
形成した図である。
FIG. 3 is a diagram in which a soft magnetic thin film is formed on the groove surface of a V-shaped groove of a non-magnetic substrate.

【図4】図3に示す基板ブロックの上に低融点ガラス、
他の非磁性基板および重りを置いた状態を示す図であ
る。
4 is a low-melting glass on the substrate block shown in FIG.
It is a figure which shows the state which put the other non-magnetic substrate and weight.

【図5】溝内に非磁性基板が充填された基板ブロックの
表面を平面状に研磨した状態を示す図である。
FIG. 5 is a view showing a state in which the surface of a substrate block having a groove filled with a non-magnetic substrate is planarly polished.

【図6】基板ブロックに内部巻線溝、外部巻線溝および
補助溝を形成した状態を示す斜視図である。
FIG. 6 is a perspective view showing a state in which an inner winding groove, an outer winding groove, and an auxiliary groove are formed in the substrate block.

【図7】図6で形成した2つの基板ブロックを接合した
状態を示す斜視図である。
7 is a perspective view showing a state in which the two substrate blocks formed in FIG. 6 are joined together.

【図8】従来のヘッドチップの外観斜視図である。FIG. 8 is an external perspective view of a conventional head chip.

【図9】従来の非磁性基板のV字状の溝の溝面に軟磁性
薄膜を形成した図である。
FIG. 9 is a view in which a soft magnetic thin film is formed on the groove surface of a V-shaped groove of a conventional non-magnetic substrate.

【図10】図9に示す非磁性基板のV字状の溝内に低融
点ガラスを充填した状態を示す図である。
10 is a diagram showing a state where a low melting point glass is filled in the V-shaped groove of the non-magnetic substrate shown in FIG.

【図11】基板ブロックに内部巻線溝および外部巻線溝
を形成した状態を示す斜視図である。
FIG. 11 is a perspective view showing a state in which an inner winding groove and an outer winding groove are formed in the substrate block.

【図12】図11で形成した2つの基板ブロックを接合
した状態を示す斜視図である。
12 is a perspective view showing a state in which the two substrate blocks formed in FIG. 11 are joined.

【符号の説明】[Explanation of symbols]

1 ヘッドチップ 2 軟磁性薄膜 3,4 非磁性基板 3a 略V字状の溝 5,6,9 基板ブロック 7 低融点ガラス 8 重り 10 内部巻線溝 11 外部巻線溝 12 補助溝 13 ギャップ面 14 非磁性ギャップ材 15,16 棒ガラス 17 コアブロック 1 head chip 2 soft magnetic thin film 3,4 non-magnetic substrate 3a substantially V-shaped groove 5,6,9 substrate block 7 low melting glass 8 weight 10 internal winding groove 11 external winding groove 12 auxiliary groove 13 gap surface 14 Non-magnetic gap material 15,16 Bar glass 17 Core block

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基板の表面に所定のピッチ寸法で
形成した略V字状の溝の溝面に軟磁性薄膜を形成して第
1の基板ブロックを形成する工程と、 前記第1の基板ブロック上に低融点ガラスを配し、その
上に前記所定のピッチ寸法と同一のピッチ寸法で形成し
た略V字状の溝を有する非磁性基板を配し、前記低融点
ガラスに荷重をかけながら溶解することにより前記両非
磁性基板を前記軟磁性薄膜を介して接着して第2の基板
ブロックを形成する工程と、 一対の前記第2の基板ブロックをギャップ面どうしが互
いに対向するように接合してコアブロックを形成する工
程と、 前記コアブロックを所定のピッチ寸法で切断してヘッド
チップとする工程とを有し、 磁気回路を形成する前記軟磁性薄膜を、前記両非磁性基
板によって挟み込むようにして摺動面上に形成すること
を特徴とする磁気ヘッドの製造方法。
1. A step of forming a soft magnetic thin film on a groove surface of a substantially V-shaped groove formed on a surface of a non-magnetic substrate with a predetermined pitch dimension to form a first substrate block, and the first substrate block. A low-melting glass is arranged on a substrate block, and a non-magnetic substrate having substantially V-shaped grooves formed with the same pitch dimension as the predetermined pitch dimension is arranged thereon, and a load is applied to the low-melting glass. While melting, the two non-magnetic substrates are adhered to each other through the soft magnetic thin film to form a second substrate block; and a pair of the second substrate blocks are arranged so that their gap surfaces face each other. A step of joining to form a core block, and a step of cutting the core block at a predetermined pitch dimension to form a head chip, wherein the soft magnetic thin film forming a magnetic circuit is formed by the nonmagnetic substrates. So as to be sandwiched Method of manufacturing a magnetic head, characterized in that formed on the sliding surface and.
【請求項2】 前記軟磁性薄膜および前記非磁性基板
は、互いに近い硬度を有する材質のものを用いることを
特徴とする請求項1記載の磁気ヘッドの製造方法。
2. The method of manufacturing a magnetic head according to claim 1, wherein the soft magnetic thin film and the non-magnetic substrate are made of materials having hardnesses close to each other.
JP18255694A 1994-08-03 1994-08-03 Production of magnetic head Pending JPH0845012A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18255694A JPH0845012A (en) 1994-08-03 1994-08-03 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18255694A JPH0845012A (en) 1994-08-03 1994-08-03 Production of magnetic head

Publications (1)

Publication Number Publication Date
JPH0845012A true JPH0845012A (en) 1996-02-16

Family

ID=16120345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18255694A Pending JPH0845012A (en) 1994-08-03 1994-08-03 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPH0845012A (en)

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