JP2957319B2 - Method for manufacturing substrate material and method for manufacturing magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a substrate material suitable for precision processing and a method of manufacturing a magnetic head using the substrate material.

[0002]

2. Description of the Related Art Generally, non-magnetic substrate materials such as various ceramic substrates and crystallized glass substrates are known as substrate materials for precision processing. Further, as an application example using such a substrate, a magnetic head for a magnetic recording / reproducing device such as a VTR (Video Tape Recorder) can be cited.

[0003] In recent years, with the diversification of the amount of information in the field of magnetic recording, demands for increasing the recording density have been increasing. Also,
With the increase in density of magnetic recording, high coercive force media such as metal tapes have become mainstream as magnetic recording media, and magnetic heads having high saturation magnetic flux density are required.

Therefore, for example, as shown in FIGS. 11 and 12, a predetermined area of a substrate 25 made of a nonmagnetic material such as crystallized glass or ceramics is made of a sendust alloy having a high saturation magnetic flux density. Soft magnetic thin film 2
A thin-film laminated magnetic head provided with 9.29 is used.

Here, the magnetic head chip 2 shown in FIG.
Taking the magnetic head chip 21 as an example, the magnetic head chip 21 is located on the left and right in the figure, and the opposing surfaces are formed in a mountain shape. The groove formed is referred to as a V-groove).
And soft magnetic thin films 29, 29 laminated on the inclined surfaces of the V-grooves of these substrates 25, 25, and a gap 24 was formed between the substrates 25, 25 bonded with the low melting point glass 30. Things.

Next, the steps of manufacturing the magnetic head chip 21 will be described step by step.

First, as shown in FIG. 13, a pitch C in consideration of the thickness of the final magnetic head and the cutting allowance is provided on the upper surface of a substantially rectangular parallelepiped substrate 25 made of photosensitive crystallized glass or ceramics. A groove 28 having a substantially V-shaped cross section.
Are continuously formed by dicing or the like using the lower surface 25a of the substrate 25 as a reference surface. Subsequently, as shown in FIG. 14, a film thickness corresponding to the track width of the magnetic head is formed on one of the side walls 28a of the grooves 28 by a thin film forming method such as a vacuum evaporation method or a sputtering method. A soft magnetic thin film 29 made of a sendust alloy or the like is formed.

[0008] Next, as shown in FIG.
Then, the low melting point glass 30 is molded, and the upper surface of the low melting point glass 30 is ground into a flat shape as shown in FIG. Next, the lower surface 25a of the substrate 25 is ground with reference to the ground upper surface of the low-melting glass 30. Finally, the surface of the low-melting-point glass 30 is polished until a predetermined thickness D is reached with reference to the ground surface of the lower surface 25a, and as shown in FIG. Is formed, the coil winding grooves 32 and 33 are formed in the substrate 25, and the one-side core block 22 is manufactured.

[0009] Thereafter, as shown in FIG.
4. Using a welding jig 39 composed of holding pieces 35 and 36, a leaf spring 37, and a screw screw 38, with the track portions 31 of the pair of one-side core blocks 22 The screws 38 are screwed together, the pressing force of the leaf spring 37 is adjusted to a predetermined value, and welding is performed to produce the core block 23 as shown in FIG.

Thereafter, the core block 23 is cut at a predetermined pitch C ', and the tape sliding surface 21a is polished to produce a magnetic head chip 21 as shown in FIG. Then, the magnetic head chip 21 is fixed to a base plate (not shown), and a coil winding (not shown) is wound around the coil winding grooves 32 and 33, thereby completing the magnetic head.

[0011]

However, the crystallized glass used as the substrate material of the magnetic head is high in hardness and excellent in abrasion resistance. There is a problem that it is difficult to perform good precision processing, and that the abrasion is too small and the tape touch on the tape sliding surface of the magnetic head is not so good.

Further, the soft magnetic thin film made of an alloy such as Sendust is worn before the substrate made of crystallized glass, which causes uneven wear.

On the other hand, ceramics used as a substrate material of a magnetic head, like the above-mentioned crystallized glass, often have better workability than crystallized glass because of the presence of grain boundaries. As a substrate material for use, the amount of wear is too large, and there is a problem in the life of the magnetic head.

[0014]

According to a first aspect of the present invention, there is provided a method for manufacturing a substrate material, comprising the steps of grinding a crystallized glass into a powder and then sintering the glass by a hot press method. It is characterized by.

According to a second aspect of the present invention, there is provided a magnetic head manufacturing method in which a soft magnetic thin film is provided in a predetermined region of a substrate to solve the above-mentioned problems. A magnetic head is obtained by using a substrate material manufactured by the manufacturing method of (1).

[0016]

According to the method of the first aspect, the substrate material is produced by sintering powdered crystallized glass by a hot press method. Thus, unlike the general crystallized glass, the substrate material has a grain boundary between grains and has a crystal structure of a grain boundary unit. Therefore, the workability of the substrate is improved, and a substrate of any shape can be manufactured by using the hot press method.

According to a second aspect of the present invention, there is provided the first aspect.
A magnetic head is manufactured by using the substrate material manufactured by the method described above. Therefore, compared with the case where crystallized glass is used as the magnetic head substrate, the workability is improved and the wear is moderately performed. And uneven wear can be prevented.

In addition, since this substrate material also has the characteristics of crystallized glass, the amount of wear is smaller than when a magnetic head is manufactured using ceramics.

[0019]

1 to 10 show an embodiment of the present invention.
This will be described below.

In the manufacturing process of a substrate material, first, crystallized glass produced by ultraviolet irradiation or the like is ground by a ball mill or the like. Next, the obtained crystallized glass powder is filled in a hot press mold having a substantially rectangular parallelepiped shape, and sintered by hot pressing under predetermined conditions. Thereafter, by taking out from the mold, a substrate made of sintered crystallized glass having a structure in which a grain boundary exists between particles is produced as shown in FIG.

As described above, a magnetic head manufactured by using a substrate obtained by sintering powdered crystallized glass by a hot press method is not shown on a magnetic head chip 17 as shown in FIG. It is configured by applying a coil winding. The magnetic head chip 17 is formed on a pair of substrates 1.1, which are located on the left and right sides in the figure and whose opposing surfaces are formed in a mountain shape, and are formed along the side walls of the V-grooves of the substrates 1.1. Soft magnetic thin film made of Sendust alloy etc.
And a substrate 1 welded and bonded with a low-melting glass 6
A gap is formed between the substrates 1 by a track width, and coil winding grooves 7.8 are formed on both sides of each substrate 1.1.

Hereinafter, a procedure for manufacturing the magnetic head chip 17 will be described.

First, as shown in FIG. 3, a plurality of grooves 4 each having a predetermined V-shaped cross section and having a predetermined depth are formed on an upper surface 1a of a substantially rectangular parallelepiped substrate 1 made of the sintered crystallized glass. Pitch A considering final magnetic head thickness and cutting allowance
, Are formed so as to be adjacent to each other and extend in parallel with each other. These grooves 4 are formed continuously over both ends by, for example, dicing or the like, using the lower surface 1b, which is the surface facing the surface on which the grooves 4 are formed, of the substrate 1 as a reference surface. Thus, two substrates 1 on which the grooves 4 are formed are manufactured.

At this time, it is desirable that the angle θ between at least one side wall 4a of each groove 4 and the normal line H of the substrate 1 is equal to the azimuth angle in the final magnetic head form. Thus, there is an advantage that in a substrate cutting process described later, a substrate having any azimuth angle only needs to be vertically fixed to the same cutting jig.

Next, as shown in FIG. 4, a predetermined film thickness is formed on the side walls 4a of the grooves 4 formed on the substrate 1 by using a thin film forming method such as a vacuum evaporation method or a sputtering method. That is, the soft magnetic thin films 5 made of a sendust alloy or the like are formed so as to have a film thickness substantially corresponding to the track width of the magnetic head.

Subsequently, as shown in FIG.
Then, the low melting point glass 6 is molded so as to be filled from the surface, and then, as shown in FIG. 6, the upper surface of the low melting point glass 6 is ground to make the bottoms of the grooves 4... Then, the lower surface 1b of the substrate 1 is ground with reference to the ground surface of the low-melting glass 6, and further, the opposing surface is polished to a predetermined thickness B with the ground surface of the lower surface 1b as a reference, so that the gap is opposed. The surface is referred to as surface 1c. Thereby, as shown in FIG. 7, the end face of the soft magnetic thin film 5 is
A track portion 1d that is exposed on c and extends on a straight line is formed.

Next, a gap space material (not shown) made of a non-magnetic material such as SiO ₂ is formed on the gap facing surface 1c so as to have a predetermined gap length. The coil winding grooves 7, 8 are respectively formed on 1c and on the opposing surface, and the one-side core block 15 is manufactured.

Then, as shown in FIG. 8, the welding jig 14 is formed with the pair of single-sided core blocks 15, 15 with the track portions 1d, 1d facing each other to form a gap.
Is mounted on the mounting table 9 having a substantially U-shaped cross section. Then, the screw 13 is screwed into the holding pieces 10 and 11.
The pair of one-sided core blocks 15 is sandwiched between the core blocks 15, and the screw screw 13 is further operated to clamp the core block 15 with a predetermined pressing force via the leaf spring 12.

Next, this is heated in an electric furnace (not shown), so that the pair of one-side core blocks 15.
5 is welded with the low melting point glass 6 to form a core block 16 as shown in FIG. Then, the core block 16 is fixed to a cutting jig (not shown),
The magnetic head chip 17 is obtained by cutting at a predetermined pitch A 'and polishing the tape sliding surface 17a as shown in FIG.

The magnetic head chip 17 thus obtained
Is bonded and fixed to a base plate (not shown), and a coil winding (not shown) is applied to the coil winding grooves 13 and 14 to complete a magnetic head.

As described above, unlike a conventional crystallized glass substrate, the substrate produced by grinding the crystallized glass into a powder and then sintering it using a hot press method is different from a conventional crystallized glass substrate. Therefore, workability by dicing or the like is improved. In the step of performing hot pressing, a substrate having any shape can be manufactured by using a mold having a shape according to the purpose.

Further, since the above-mentioned substrate has a crystal structure of a grain boundary unit, unlike a crystallized glass substrate, it is appropriately worn. Therefore, using such a substrate, for example, when a magnetic head is manufactured, as has been a problem in a magnetic head using a conventional crystallized glass substrate,
Only the soft magnetic thin film made of a sendust alloy or the like is not worn first, and uneven wear can be prevented. As a result, it is possible to provide a magnetic head that makes full use of the characteristics of the soft magnetic thin film made of an alloy or the like.

Moreover, since the substrate also has the characteristics of crystallized glass, a magnetic head having excellent wear resistance and a long life compared with a magnetic head made of a ceramic substrate can be used. Can be provided.

In the above embodiment, an example was described in which the present invention was applied to a magnetic head having a soft magnetic thin film 5 extending obliquely to a gap on a tape sliding surface of the magnetic head.
As another embodiment of the present invention, as shown in FIG. 10, for a magnetic head in which the soft magnetic thin film 5 extends perpendicular to the gap, the method of manufacturing the substrate material and the method of manufacturing the magnetic head of the present embodiment are described. It is also possible to apply.

[0035]

According to the first aspect of the present invention, as described above, the crystallized glass is ground into a powder and then sintered by a hot press method.

Therefore, there is an effect that a substrate suitable for precision processing can be provided without being limited by the shape of the substrate.

According to a second aspect of the present invention, a method of manufacturing a magnetic head is to obtain a magnetic head using the substrate material manufactured by the first aspect of the present invention.

Therefore, the substrate of the magnetic head is appropriately abraded as compared with the crystallized glass substrate, thereby preventing uneven wear and fully utilizing the characteristics of the soft magnetic thin film made of, for example, an alloy. Magnetic head can be provided. Further, since the substrate also has the characteristics of crystallized glass, it has better wear resistance than a ceramic substrate, and has the effect of extending the life of the magnetic head.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a structure of a substrate manufactured based on a manufacturing method of the present invention.

FIG. 2 is a perspective view of a magnetic head chip manufactured using the substrate.

FIG. 3 is a front view showing a substrate on which a groove is formed in the manufacturing method.

FIG. 4 is a front view showing a substrate having a soft magnetic thin film formed in the groove.

FIG. 5 is a front view showing a substrate in which the grooves are filled with low-melting glass.

FIG. 6 is a front view showing a substrate on which the low-melting glass is polished in a planar shape.

FIG. 7 is a perspective view of a one-sided core block obtained by forming a coil winding groove on the substrate.

FIG. 8 is a perspective view showing a state where a pair of the one-sided core blocks are clamped by using a welding jig.

FIG. 9 is a perspective view of a core block obtained by joining the pair of single-sided core blocks.

FIG. 10 is a perspective view showing another magnetic head chip manufactured by the manufacturing method of the present invention.

FIG. 11 is a perspective view of a magnetic head chip manufactured by a conventional manufacturing method.

FIG. 12 is a perspective view of another magnetic head chip manufactured by a conventional manufacturing method.

FIG. 13 is a front view showing a substrate on which a groove is formed in a manufacturing process of the magnetic head chip of FIG. 11;

FIG. 14 is a front view showing a substrate in which a soft magnetic thin film is formed in the groove.

FIG. 15 is a front view showing a substrate in which the grooves are filled with low-melting glass.

FIG. 16 is a front view showing a substrate in which the low-melting glass is polished in a plane.

FIG. 17 is a perspective view of a one-sided core block obtained by forming a coil winding groove on the substrate.

FIG. 18 is a perspective view showing a state where a pair of the one-sided core blocks are clamped by using a welding jig.

FIG. 19 is a perspective view of a core block obtained by joining the pair of single-sided core blocks.

[Explanation of symbols]

 1 Substrate 5 Soft Magnetic Thin Film 17 Magnetic Head Chip

Claims (2)

(57) [Claims] 1. A method for manufacturing a substrate material, comprising: grinding a crystallized glass into a powder and then sintering the glass by a hot press method. 2. A method of manufacturing a magnetic head comprising a soft magnetic thin film provided in a predetermined region of a substrate, wherein the magnetic head is obtained by using a substrate material manufactured by the manufacturing method according to claim 1. A method for manufacturing a magnetic head.