JPH0843807A - Attraction mechanism of glass substrate - Google Patents

Abstract

PURPOSE:To prevent variation in inspection accuracy of optical sensors by warpage and deflection of glass substrates by forming grooves for evacuation of jigs in correspondence to shapes of multilayouts of color filters and panels on the glass substrates. CONSTITUTION:The glass substrates for multilayouts of the color filters are attracted by vacuum chucks and are fixed to an inspection apparatus by utilizing the parts thereof which are not the color filters at the time of inspecting the color filters. The vacuum chucks 2 are formed to the shape of a square with a cross inside and the grooves 6 are formed in the cruciform parts as well. The supporting span Ls of the glass substrates 9 is set at 1/2. The deflection by their own weight of the glass substrates 9 is proportional to the power of four of the span Ls by their own weight of the glass substrates 9 and, therefore, the deflection of the glass substrates 9 is 1/16 and the warpage and deflection of the glass substrates 9 are lessened. Then, the detecting capacity of the optical sensors is made nearly constant in any part.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction mechanism for a glass substrate, and more particularly, to suck a glass substrate on a jig called a vacuum chuck in order to inspect a color filter on the glass substrate used in a liquid crystal display device. Related adsorption mechanism.

[0002]

2. Description of the Related Art FIG. 4 is a side view of a conventional color filter inspection device. In FIG. 4, the liquid crystal panel or the color filter 1 is placed on the vacuum chuck 2,
A light source 3 such as a fluorescent lamp is provided below the vacuum chuck 2, and the color filter 1 is irradiated with light from the light source 3. The light transmitted through the color filter 1 is imaged by the CCD line sensor 5 via the imaging lens 4.

In the inspection apparatus shown in FIG. 4, the color filter 1 is suction-fixed by the vacuum chuck 2. That is, in the vacuum chuck 2, the groove 6 formed on the surface of the flat plate is connected through the fine hole 7 to the vacuum generator 8 installed outside, and the color filter 1 is placed on the vacuum chuck 2. As a result, the groove 6 has a negative pressure, and the color filter 1 is adsorbed and fixed to the vacuum chuck 2.

[0004]

By the way, recently,
Large-sized liquid crystal display devices are being put to practical use, and accordingly, glass substrates are becoming larger and thinner. Therefore, when a large glass substrate is placed on the conventional inspection apparatus shown in FIG. 4, the glass substrate 9 is bent or warped as shown in FIG. Therefore, when the CCD line sensor 5 is moved in the lateral direction to detect the surface of the glass substrate 9, the detection capability of the CCD line sensor 5 varies depending on the location, and accurate inspection cannot be performed. Further, when the warp or bending of the glass substrate 9 becomes large, a gap is created between the groove 6 of the vacuum chuck 2 and the glass substrate 9, the degree of vacuum in the groove 6 does not increase, and the glass substrate 9 is attracted to the vacuum chuck 2. There is a drawback that it can not be fixed.

Therefore, a main object of the present invention is to prevent the glass substrate from being warped or bent so that the detection ability at any part of the glass substrate can be made constant and the glass substrate can be prevented from being fixed by suction. Is to provide an adsorption mechanism of

[0006]

SUMMARY OF THE INVENTION The present invention relates to an inspection apparatus for inspecting a glass substrate such as a color filter for liquid crystal, which is an adsorption mechanism for adsorbing the glass substrate to a jig, which is a color filter on the glass substrate. A jig is provided with a groove for vacuuming for suction, which corresponds to the shape of multiple chamfered panels and panels.

[0007]

In the glass substrate suction mechanism according to the present invention, since the vacuuming groove of the jig is formed corresponding to the shape of the color filter on the glass substrate or the multiple chamfering of the panel, the glass substrate is warped or bent. Can be prevented.

[0008]

[Embodiment] In one embodiment of the present invention, a vacuum chuck structure is formed by paying attention to the multi-shaping of a color filter and a liquid crystal panel, and the opening of the vacuum chuck 2 shown in FIG. Alternatively, the glass substrate can be prevented from warping or bending by forming a cross-shaped shape.

FIG. 1 is a diagram showing an example of multi-striping of a color filter. FIG. 1 (a) shows a date-shaped one with two sheets, and FIG. 1 (b) shows a sheet with four sheets. Here is an example of a letter shape. In addition to this, there are 6 pieces. In the embodiment shown in FIG. 1, the color filter 12 of the glass substrate 11 is used.
The vacuum chuck is used to suck the non-inspected portion (non-inspection target), and not only the peripheral portion as in the conventional case but also the central portion is sucked. This is shown in FIG. 2 by taking four sheets as an example. A conventional vacuum chuck is shown in FIG. 3 for comparison.

In FIG. 2, the vacuum chuck 2 is formed in the shape of a letter, and the groove 6 is also formed in the cross portion. The support span Ls of the glass substrate 9 is L / 2. Since the bending of the glass substrate 1 due to its own weight is proportional to the fourth power of the span Ls, it is expected that the bending of the glass will be 1/16 by adopting the structure shown in FIG.

[0011]

As described above, according to the present invention, the groove for vacuum suction for adsorbing is formed in the jig in correspondence with the shape of the multiple filters of the color filter or the panel on the glass substrate. , Can reduce the warpage and bending of the glass substrate,
The detection capability of the optical sensor can be made almost constant in any part, and it is possible to prevent the glass substrate from being unable to be adsorbed and fixed due to warpage or bending.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of multi-coloring of a color filter.

FIG. 2 is a diagram showing an example of a vacuum chuck of a multi-colored color filter.

FIG. 3 is a diagram showing an example of a conventional vacuum chuck.

FIG. 4 is a side view of a conventional inspection device.

FIG. 5 is a cross-sectional view showing how a glass substrate placed on a conventional vacuum chuck is bent.

[Explanation of symbols]

 2 Vacuum chuck 6 Groove 9 Glass substrate

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Claims (1)

[Claims] 1. An inspection apparatus for inspecting a glass substrate such as a color filter for a liquid crystal, which is an adsorption mechanism for adsorbing the glass substrate to a jig, the multi-chambering of color filters and panels on the glass substrate. A suction mechanism for a glass substrate, characterized in that a groove for vacuum suction for suction is formed in the jig in correspondence with the above shape.