JP2001242432A - Suction mechanism for liquid crystal panel - Google Patents
Suction mechanism for liquid crystal panelInfo
- Publication number
- JP2001242432A JP2001242432A JP2000049751A JP2000049751A JP2001242432A JP 2001242432 A JP2001242432 A JP 2001242432A JP 2000049751 A JP2000049751 A JP 2000049751A JP 2000049751 A JP2000049751 A JP 2000049751A JP 2001242432 A JP2001242432 A JP 2001242432A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal panel
- mask
- suction
- suction mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Manipulator (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶パネルを吸着
する液晶パネル用吸着機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal panel suction mechanism for sucking a liquid crystal panel.
【０００２】[0002]
【従来の技術】図４は、従来技術である吸着機構１を示
す断面図である。吸着機構１によって吸着される液晶パ
ネル１０は、たとえばガラス製の一対の基板１１，１２
の間に、プラスチックビーズなどから成るスペーサ１３
を介在し、周辺部をシール剤１４で接着して構成され
る。液晶パネル１０は、単一のパネルから分断して多数
作製され、吸着機構１は分断前のパネルも吸着する。分
断前の単一のパネルは、吸着機構１によって吸着されて
持ち上げられ、搬送コンベヤから分断ステージへ搬送さ
れ、分断用のステージに吸着されて保持される。また、
分断された多数の液晶パネル１０は、吸着機構１によっ
て吸着されて持ち上げられ、分断ステージから搬送コン
ベヤへ搬送される。吸着機構１は吸着部材２を備え、該
吸着部材２は、たとえば金属製の支持板と、該支持板の
吸着面側に接着されるアクリル板とで構成され、液晶パ
ネル１０の全面に接触する。吸着部材２は、空気を吸引
して液晶パネル１０を真空吸着するための複数のスルー
ホール３を有する。2. Description of the Related Art FIG. 4 is a sectional view showing a suction mechanism 1 according to the prior art. The liquid crystal panel 10 sucked by the suction mechanism 1 includes a pair of substrates 11 and 12 made of, for example, glass.
Spacer 13 made of plastic beads or the like
And the peripheral portion is bonded with a sealant 14. A large number of liquid crystal panels 10 are cut from a single panel, and the suction mechanism 1 also sucks the panel before the cutting. The single panel before the separation is sucked and lifted by the suction mechanism 1, conveyed from the conveyor to the separation stage, and sucked and held by the separation stage. Also,
A large number of the divided liquid crystal panels 10 are sucked by the suction mechanism 1 and lifted, and are conveyed from the division stage to the conveyance conveyor. The suction mechanism 1 includes a suction member 2, which is composed of, for example, a metal support plate and an acrylic plate adhered to the suction surface of the support plate, and is in contact with the entire surface of the liquid crystal panel 10. . The suction member 2 has a plurality of through holes 3 for sucking air to vacuum-suction the liquid crystal panel 10.
【０００３】なお、図４では分断後の液晶パネル１０を
持ち上げて吸着する吸着機構１を示しているが、分断前
の単一のパネルも同様の吸着機構１によって持ち上げら
れて吸着される。また、分断前の単一のパネルを分断ス
テージに吸着して保持するための吸着機構も同様にして
構成され、吸着部材２の上に分断前の単一のパネルが載
置される。FIG. 4 shows the suction mechanism 1 that lifts and adsorbs the liquid crystal panel 10 after division, but a single panel before division is also lifted and adsorbed by the same adsorption mechanism 1. A suction mechanism for suctioning and holding a single panel before division on the division stage is similarly configured, and the single panel before division is placed on the adsorption member 2.
【０００４】また、実開平５−５６３９３号公報には、
テーブル上で基板を吸着させて搬送する自動基板裁断装
置の搬送機において、少なくとも基板表面に当接しうる
面に多孔質状の吸着部材を設け、この吸着部材の背面を
減圧手段にて減圧ことによって、基板を吸着して搬送す
る構成が、特に吸着部材としてほぼ基板表面に当接しう
る大きさの連続気泡を有する発砲材料を用いて成る構成
が開示されている。In Japanese Utility Model Laid-Open No. 5-56393,
In a transfer device of an automatic substrate cutting device that sucks and transfers a substrate on a table, a porous suction member is provided on at least a surface that can contact the substrate surface, and the back surface of the suction member is depressurized by a decompression means. A configuration in which a substrate is sucked and transported, and in particular, a configuration in which a foaming material having open cells having a size that can substantially contact the substrate surface is used as the suction member is disclosed.
【０００５】[0005]
【発明が解決しようとする課題】液晶パネル１０の全面
を吸着する従来技術の吸着機構１では、液晶パネル１０
と吸着部材２との間に硬質の異物やごみなどが挟まれた
とき、これによってスペーサ１３が部分的に押し潰され
てしまうことがある。スペーサ１３は、互いに貼り合せ
られる一対の基板１１，１２の間隙、すなわち液晶層の
厚みを一定の厚みに保つための部材であり、基板１１，
１２の表面に散布される。このようなスペーサ１３が押
し潰されると、液晶パネル１０の平坦性や強度が低下す
る。In the prior art suction mechanism 1 for sucking the entire surface of the liquid crystal panel 10, the liquid crystal panel 10
When a hard foreign substance, dust, or the like is interposed between the suction member 2 and the suction member 2, the spacer 13 may be partially crushed by this. The spacer 13 is a member for keeping the gap between the pair of substrates 11 and 12 bonded to each other, that is, the thickness of the liquid crystal layer at a constant thickness.
12 surfaces. When such spacers 13 are crushed, the flatness and strength of the liquid crystal panel 10 decrease.
【０００６】本発明の目的は、一対の基板間に介在され
るスペーサを押し潰すこと無く液晶パネルを吸着するこ
とができる液晶パネル用吸着機構を提供することであ
る。An object of the present invention is to provide a liquid crystal panel suction mechanism that can suck a liquid crystal panel without crushing a spacer interposed between a pair of substrates.
【０００７】[0007]
【課題を解決するための手段】本発明は、吸着部材を備
え、一対の基板間に該基板の間隙を一定に保持するため
のスペーサを介在して貼合せた液晶パネルを前記吸着部
材によって吸着する液晶パネル用吸着機構において、液
晶パネルと吸着部材との間に、弾性材料から成り、液晶
パネル側に凹所を有するマスクを介在したことを特徴と
する液晶パネル用吸着機構である。According to the present invention, a liquid crystal panel provided with a suction member and having a spacer interposed between a pair of substrates for maintaining a constant gap between the substrates is suctioned by the suction member. In the suction mechanism for a liquid crystal panel, a mask made of an elastic material and having a recess on the liquid crystal panel side is interposed between the liquid crystal panel and the suction member.
【０００８】本発明に従えば、一対の基板間に、たとえ
ばプラスチックビーズ製のスペーサを介在し貼り合せて
構成される液晶パネルは、マスクを介して吸着部材に吸
着される。マスクは弾性材料から成り、優れたクッショ
ン性を有する。したがって、たとえば真空吸着時にマス
クが液晶パネルと吸着部材とに充分に密着し、吸着部材
によって液晶パネルを良好に吸着することが可能とな
る。また、液晶パネルとマスクとの間に異物やごみが有
った場合でも、弾性材料の優れたクッション性によって
凹凸を吸収することができる。さらに、マスクには凹所
が形成されるので、液晶パネルとマスクとの接触面積を
少なくして、硬質の異物やごみを挟み込んで吸着した場
合であっても、スペーサの潰れを低減することができ
る。したがって、液晶パネルの平坦性や強度の低下を防
止することができる。なお、マスクには凹所が設けられ
るだけなので、吸着性を損ねることはない。According to the present invention, a liquid crystal panel formed by laminating, for example, a plastic bead spacer between a pair of substrates is adsorbed to the adsorbing member via a mask. The mask is made of an elastic material and has excellent cushioning properties. Therefore, for example, at the time of vacuum suction, the mask sufficiently adheres to the liquid crystal panel and the suction member, and the liquid crystal panel can be satisfactorily sucked by the suction member. Further, even when foreign matter or dust is present between the liquid crystal panel and the mask, the unevenness can be absorbed by the excellent cushioning property of the elastic material. Further, since a recess is formed in the mask, the contact area between the liquid crystal panel and the mask is reduced, so that even when hard foreign matter or dust is interposed and sucked, the collapse of the spacer can be reduced. it can. Therefore, it is possible to prevent a decrease in flatness and strength of the liquid crystal panel. In addition, since only a recess is provided in the mask, it does not impair the adsorbability.
【０００９】また本発明は、前記凹所は、マスクの少な
くとも液晶パネルの液晶層に対応する領域に設けられる
ことを特徴とする。Further, the present invention is characterized in that the recess is provided in at least a region of the mask corresponding to the liquid crystal layer of the liquid crystal panel.
【００１０】本発明に従えば、前記凹所はマスクの少な
くとも液晶パネルの液晶層に対応する領域に設けられる
ので、液晶パネルの全面における平坦性や強度の低下を
防止することができる。According to the present invention, since the recess is provided at least in a region of the mask corresponding to the liquid crystal layer of the liquid crystal panel, it is possible to prevent a decrease in flatness and strength over the entire surface of the liquid crystal panel.
【００１１】また本発明は、前記マスクは吸着部材の吸
着面に接着されることを特徴とする。Further, the present invention is characterized in that the mask is adhered to a suction surface of a suction member.
【００１２】本発明に従えば、前記マスクは吸着部材の
吸着面に接着されるので、吸着部材によって液晶パネル
を確実に吸着することが可能となる。また、硬質の異物
やごみを挟み込んで吸着した場合のスペーサの潰れを確
実に低減することができる。According to the present invention, since the mask is bonded to the suction surface of the suction member, the liquid crystal panel can be reliably sucked by the suction member. In addition, it is possible to reliably reduce the crushing of the spacer when a hard foreign substance or dust is interposed and adsorbed.
【００１３】[0013]
【発明の実施の形態】図１は、本発明の実施の一形態で
ある吸着機構２１を示す断面図である。図２（Ａ）およ
び図２（Ｂ）は、吸着機構２１が備えるマスク２４ａ，
２４ｂをそれぞれ示す平面図である。吸着機構２１は、
分断後の液晶パネル３０だけでなく分断前の単一のパネ
ルも吸着可能である。液晶パネル３０は、たとえばガラ
ス製の一対の基板３１，３２の間に、プラスチックビー
ズ製などのスペーサ３３を介在し、周辺部をシール剤３
４で接着して構成される。液晶パネル３０は単一のパネ
ルから分断して多数作製され、吸着機構２１によって吸
着されて持ち上げられ、分断ステージから搬送コンベヤ
へ搬送される。FIG. 1 is a sectional view showing a suction mechanism 21 according to an embodiment of the present invention. FIGS. 2A and 2B show masks 24a,
It is a top view which each shows 24b. The suction mechanism 21
Not only the liquid crystal panel 30 after division but also a single panel before division can be sucked. The liquid crystal panel 30 has a spacer 33 made of plastic beads or the like interposed between a pair of substrates 31 and 32 made of glass, for example.
4 and bonded. A large number of liquid crystal panels 30 are produced by being cut from a single panel, sucked and lifted by the suction mechanism 21, and transferred from the cutting stage to a transfer conveyor.
【００１４】なお、吸着機構２１によって吸着された液
晶パネル２０は、図示しない駆動手段によって水平およ
び上下方向に移動可能に構成され、これらの移動機構は
既知の手法によって実現される。初期状態において、吸
着部材２２は該移動機構によって水平姿勢に配置され
る。The liquid crystal panel 20 sucked by the suction mechanism 21 is configured to be movable horizontally and vertically by driving means (not shown), and these moving mechanisms are realized by a known method. In the initial state, the suction member 22 is arranged in a horizontal posture by the moving mechanism.
【００１５】吸着機構２１は吸着部材２２を含んで構成
される。吸着部材２２は、たとえば金属製の支持板と、
該支持板の吸着面側に接着されるアクリル板とで構成さ
れる。吸着部材２２は、空気を吸引して液晶パネル３０
を真空吸着するための複数のスルーホール２３を有す
る。The suction mechanism 21 includes a suction member 22. The suction member 22 includes, for example, a metal support plate,
An acrylic plate adhered to the suction side of the support plate. The suction member 22 sucks air to remove the liquid crystal panel 30.
Has a plurality of through holes 23 for vacuum suction.
【００１６】特に、本発明の吸着機構２１は液晶パネル
３０と吸着部材２２との間に介在されるマスク２４を含
んで構成されることを特徴とする。マスク２４はクッシ
ョン性、平坦性および耐久性に優れた弾性材料から成
る。このような材料として、たとえばフッ素系ゴム、シ
リコン系ゴムおよびポリ塩化ビニル樹脂やポリウレタン
系などの合成樹脂を用いることができる。これによっ
て、マスク２４において、優れたクッション性が得られ
る。したがって、真空吸着時において、マスク２４は液
晶パネル３０と吸着部材２２とに充分に密着し、吸着部
材２２によって液晶パネル３０を良好に吸着することが
可能となる。また、液晶パネル３０とマスク２４との間
に異物やごみが有った場合でも、弾性材料の優れたクッ
ション性によって凹凸を吸収することが可能となる。こ
のようなマスク２４の大きさは、液晶パネル３０の全体
をほぼ覆う大きさが好ましい。In particular, the suction mechanism 21 of the present invention is characterized by including a mask 24 interposed between the liquid crystal panel 30 and the suction member 22. The mask 24 is made of an elastic material having excellent cushioning properties, flatness and durability. As such a material, for example, a synthetic resin such as a fluorine-based rubber, a silicone-based rubber, and a polyvinyl chloride resin or a polyurethane-based resin can be used. Thereby, in the mask 24, excellent cushioning properties are obtained. Therefore, at the time of vacuum suction, the mask 24 sufficiently adheres to the liquid crystal panel 30 and the suction member 22, and the liquid crystal panel 30 can be satisfactorily sucked by the suction member 22. Further, even when there is a foreign substance or dust between the liquid crystal panel 30 and the mask 24, the unevenness can be absorbed by the excellent cushioning property of the elastic material. The size of the mask 24 is preferably large enough to substantially cover the entire liquid crystal panel 30.
【００１７】またマスク２４は、液晶パネル３０の側に
凹所２５を有する。この凹所２５によって液晶パネル３
０とマスク２４との接触面積が少なくなり、これによっ
て硬質の異物やごみを挟み込んで吸着した場合であって
も、液晶パネル３０のスペーサ３３が潰れてしまうこと
を低減することができ、液晶パネル３０の平坦性や強度
の低下を防止することができる。凹所２５は単一であっ
ても構わないが、図２に示されるように複数であっても
構わない。具体的に、マスク２４ａは３０個の凹所２５
を有し、マスク２４ｂは２個の凹所２５を有する。この
ような凹所２５は、切り抜き加工によって形成される。The mask 24 has a recess 25 on the side of the liquid crystal panel 30. This recess 25 allows the liquid crystal panel 3
Therefore, even when hard foreign matter or dust is interposed and adsorbed, the spacer 33 of the liquid crystal panel 30 can be prevented from being crushed, and the liquid crystal panel can be reduced. 30 can be prevented from lowering in flatness and strength. The recess 25 may be single, but may be plural as shown in FIG. Specifically, the mask 24a has 30 recesses 25
And the mask 24b has two recesses 25. Such a recess 25 is formed by cutout processing.
【００１８】特に、液晶パネル３０の全面に平坦性およ
び強度が要求される場合には、マスク２４の、少なくと
も液晶パネル３０の液晶層に対応する領域に凹所２５を
設けること、すなわち液晶パネル３０の液晶層に対応す
る領域にマスク２４が接触しないように凹所２５を設け
ることが好ましい。In particular, when flatness and strength are required on the entire surface of the liquid crystal panel 30, the concave portion 25 is provided in at least the region of the mask 24 corresponding to the liquid crystal layer of the liquid crystal panel 30, that is, the liquid crystal panel 30 is provided. It is preferable to provide a recess 25 so that the mask 24 does not contact a region corresponding to the liquid crystal layer.
【００１９】さらに、マスク２４は吸着部材２２の吸着
面に装着されるが、特に接着することが好ましい。これ
によって、吸着部材２２によって液晶パネル３０を確実
に吸着することが可能となる。また、硬質の異物やごみ
を挟み込んで吸着した場合のスペーサ３３の潰れを確実
に低減することができる。Further, although the mask 24 is mounted on the suction surface of the suction member 22, it is particularly preferable to adhere the mask. Thus, the liquid crystal panel 30 can be reliably sucked by the suction member 22. In addition, it is possible to reliably reduce the crush of the spacer 33 when a hard foreign substance or dust is interposed and adsorbed.
【００２０】なお、分断前の単一のパネルも本発明に基
づく吸着機構２１によって吸着されて持ち上げられ、搬
送コンベヤから分断ステージへ搬送され、分断用のステ
ージに吸着されて保持される。図１では、液晶パネル３
０を持ち上げて吸着する吸着機構２１を示しているが、
分断前の単一のパネルも同様の吸着機構２１によって持
ち上げられて吸着される。The single panel before the separation is also sucked and lifted by the suction mechanism 21 according to the present invention, transported from the conveyor to the separation stage, and sucked and held by the separation stage. In FIG. 1, the liquid crystal panel 3
Although the suction mechanism 21 that lifts and sucks 0 is shown,
The single panel before the division is lifted and sucked by the similar suction mechanism 21.
【００２１】図３は、本発明の実施の他の形態である吸
着機構４１を示す断面図である。吸着機構４１は、分断
前の単一のパネル５０を分断ステージに吸着して保持す
る。吸着機構４１では、吸着部材２２と同様にして実現
され、スルーホール２３を有するる分断ステージ４２の
上に前記マスク２４が装着、特に接着される。分断前の
単一のパネル５０はマスク２４の上に載置される。FIG. 3 is a sectional view showing a suction mechanism 41 according to another embodiment of the present invention. The suction mechanism 41 suctions and holds the single panel 50 before the division on the division stage. The suction mechanism 41 is realized in the same manner as the suction member 22, and the mask 24 is mounted on the dividing stage 42 having the through holes 23, particularly, adhered thereto. The single panel 50 before division is placed on the mask 24.
【００２２】この場合、パネル５０のスクライブ（裁
断）ラインに沿ってマスク２４が接触し、スクライブラ
イン以外の領域、すなわちパネル５０の液晶層に対応す
る領域にマスク２４が接触しないようにマスク２４に凹
所２５を設けることが好ましい。たとえば、パネル５０
を２枚に分断する２面取りの場合では、図２（Ｂ）に示
されるマスク２４ｂが使用され、複数に分断する多面取
りの場合では、図２（Ａ）に示される格子状のマスク２
４ａが使用される。In this case, the mask 24 comes into contact with the scribe (cut) line of the panel 50, and the mask 24 contacts the area other than the scribe line, that is, the area corresponding to the liquid crystal layer of the panel 50 so that the mask 24 does not come into contact. Preferably, a recess 25 is provided. For example, panel 50
In the case of two-chamfering in which is divided into two pieces, the mask 24b shown in FIG. 2B is used, and in the case of multi-chamfering in which it is divided into a plurality of pieces, the lattice-shaped mask 2 shown in FIG.
4a is used.
【００２３】[0023]
【発明の効果】以上のように本発明によれば、一対の基
板間にスペーサを介在し貼り合せて構成される液晶パネ
ルと、吸着部材との間に、液晶パネル側に凹所を有し、
弾性材料から成るマスクを介在したので、マスクが液晶
パネルと吸着部材とに充分に密着し、吸着部材によって
液晶パネルを良好に吸着することが可能となり、また液
晶パネルとマスクとの間に異物やごみが有った場合で
も、弾性材料の優れたクッション性によって凹凸を吸収
することが可能となる。また、液晶パネルとマスクとの
接触面積を少なくして、硬質の異物やごみを挟み込んて
吸着した場合であっても、スペーサの潰れを低減するこ
とができ、液晶パネルの平坦性や強度の低下を防止する
ことができる。As described above, according to the present invention, a recess is provided on the liquid crystal panel side between a liquid crystal panel formed by bonding a spacer between a pair of substrates and a suction member. ,
Since the mask made of an elastic material is interposed, the mask is sufficiently adhered to the liquid crystal panel and the adsorbing member, and the liquid crystal panel can be well adsorbed by the adsorbing member. Even if there is dust, it is possible to absorb unevenness due to the excellent cushioning property of the elastic material. Also, by reducing the contact area between the liquid crystal panel and the mask, even when hard foreign matter or dust is interposed and adsorbed, the collapse of the spacer can be reduced, and the flatness and strength of the liquid crystal panel are reduced. Can be prevented.
【００２４】また本発明によれば、前記凹所をマスクの
少なくとも液晶パネルの液晶層に対応する領域に設けた
ので、液晶パネルの全面における平坦性や強度の低下を
防止することができる。Further, according to the present invention, since the recess is provided at least in a region of the mask corresponding to the liquid crystal layer of the liquid crystal panel, it is possible to prevent a decrease in flatness and strength over the entire surface of the liquid crystal panel.
【００２５】また本発明によれば、前記マスクを吸着部
材の吸着面に接着したので、吸着部材によって液晶パネ
ルを確実に吸着することが可能となり、また硬質の異物
やごみを挟み込んて吸着した場合のスペーサの潰れを確
実に低減することができる。Further, according to the present invention, since the mask is bonded to the suction surface of the suction member, the liquid crystal panel can be reliably sucked by the suction member. Of the spacer can be reliably reduced.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の実施の一形態である吸着機構２１を示
す断面図である。FIG. 1 is a sectional view showing a suction mechanism 21 according to an embodiment of the present invention.
【図２】吸着機構２１が備えるマスク２４ａ，２４ｂを
それぞれ示す平面図である。FIG. 2 is a plan view showing masks 24a and 24b included in the suction mechanism 21;
【図３】本発明の実施の他の形態である吸着機構４１を
示す断面図である。FIG. 3 is a cross-sectional view showing a suction mechanism 41 according to another embodiment of the present invention.
【図４】従来技術である吸着機構１を示す断面図であ
る。FIG. 4 is a cross-sectional view showing a suction mechanism 1 according to the related art.
２１，４１ 吸着機構 ２２，４２ 吸着部材 ２３ スルーホール ２４，２４ａ，２４ｂ マスク ２５ 凹所 ３０，５０ 液晶パネル ３３ スペーサ 21, 41 Suction mechanism 22, 42 Suction member 23 Through hole 24, 24a, 24b Mask 25 Recess 30, 50 Liquid crystal panel 33 Spacer
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2H088 FA05 FA17 FA26 HA01 MA04 3C007 DS01 FS01 FT06 FT11 FU01 KS07 NS09 NS17 3F061 AA01 CA01 CB02 CB05 CC01 DB04 DB06 DD05 5G435 AA07 AA17 BB12 CC09 KK02 KK05 KK10 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 FA05 FA17 FA26 HA01 MA04 3C007 DS01 FS01 FT06 FT11 FU01 KS07 NS09 NS17 3F061 AA01 CA01 CB02 CB05 CC01 DB04 DB06 DD05 5G435 AA07 AA17 BB12 CC09 KK02 KK05 KK10
Claims (3)
の間隙を一定に保持するためのスペーサを介在して貼合
せた液晶パネルを前記吸着部材によって吸着する液晶パ
ネル用吸着機構において、 液晶パネルと吸着部材との間に、弾性材料から成り、液
晶パネル側に凹所を有するマスクを介在したことを特徴
とする液晶パネル用吸着機構。1. A liquid crystal panel suction mechanism comprising a suction member, wherein a liquid crystal panel bonded to a pair of substrates with a spacer interposed between the pair of substrates for maintaining a constant gap therebetween is suctioned by the suction member. A suction mechanism for a liquid crystal panel, wherein a mask made of an elastic material and having a recess on the liquid crystal panel side is interposed between the liquid crystal panel and the suction member.
ネルの液晶層に対応する領域に設けられることを特徴と
する請求項１記載の液晶パネル用吸着機構。2. The liquid crystal panel suction mechanism according to claim 1, wherein the recess is provided in at least a region of the mask corresponding to a liquid crystal layer of the liquid crystal panel.
れることを特徴とする請求項１記載の液晶パネル用吸着
機構。3. The suction mechanism according to claim 1, wherein the mask is adhered to a suction surface of a suction member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000049751A JP2001242432A (en) | 2000-02-25 | 2000-02-25 | Suction mechanism for liquid crystal panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000049751A JP2001242432A (en) | 2000-02-25 | 2000-02-25 | Suction mechanism for liquid crystal panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001242432A true JP2001242432A (en) | 2001-09-07 |
Family
ID=18571638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000049751A Pending JP2001242432A (en) | 2000-02-25 | 2000-02-25 | Suction mechanism for liquid crystal panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001242432A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006073839A (en) * | 2004-09-03 | 2006-03-16 | Oki Electric Ind Co Ltd | Semiconductor device holder and semiconductor device manufactured using the same |
| JP2006231282A (en) * | 2005-02-28 | 2006-09-07 | Seiko Epson Corp | Lens holder and method for producing lens |
| JPWO2006075515A1 (en) * | 2005-01-13 | 2008-06-12 | シャープ株式会社 | Display panel manufacturing apparatus and display panel manufacturing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121035U (en) * | 1988-02-09 | 1989-08-16 | ||
| JPH0556393U (en) * | 1992-01-08 | 1993-07-27 | 三星ダイヤモンド工業株式会社 | Conveyor of automatic substrate cutting device |
| JPH0843807A (en) * | 1994-07-27 | 1996-02-16 | Ntn Corp | Attraction mechanism of glass substrate |
-
2000
- 2000-02-25 JP JP2000049751A patent/JP2001242432A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01121035U (en) * | 1988-02-09 | 1989-08-16 | ||
| JPH0556393U (en) * | 1992-01-08 | 1993-07-27 | 三星ダイヤモンド工業株式会社 | Conveyor of automatic substrate cutting device |
| JPH0843807A (en) * | 1994-07-27 | 1996-02-16 | Ntn Corp | Attraction mechanism of glass substrate |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006073839A (en) * | 2004-09-03 | 2006-03-16 | Oki Electric Ind Co Ltd | Semiconductor device holder and semiconductor device manufactured using the same |
| US7659132B2 (en) | 2004-09-03 | 2010-02-09 | Oki Semiconductor Co., Ltd. | Semiconductor element holding apparatus and semiconductor device manufactured using the same |
| JP4541807B2 (en) * | 2004-09-03 | 2010-09-08 | Ｏｋｉセミコンダクタ株式会社 | Semiconductor element holding device and semiconductor element transport method |
| JPWO2006075515A1 (en) * | 2005-01-13 | 2008-06-12 | シャープ株式会社 | Display panel manufacturing apparatus and display panel manufacturing method |
| JP2006231282A (en) * | 2005-02-28 | 2006-09-07 | Seiko Epson Corp | Lens holder and method for producing lens |
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