JPH08362Y2 - 真空蒸着用マニピュレータ - Google Patents

真空蒸着用マニピュレータ

Info

Publication number
JPH08362Y2
JPH08362Y2 JP9065590U JP9065590U JPH08362Y2 JP H08362 Y2 JPH08362 Y2 JP H08362Y2 JP 9065590 U JP9065590 U JP 9065590U JP 9065590 U JP9065590 U JP 9065590U JP H08362 Y2 JPH08362 Y2 JP H08362Y2
Authority
JP
Japan
Prior art keywords
substrate
vapor deposition
vacuum
manipulator
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9065590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448261U (OSRAM
Inventor
透 丸野
容子 丸尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9065590U priority Critical patent/JPH08362Y2/ja
Publication of JPH0448261U publication Critical patent/JPH0448261U/ja
Application granted granted Critical
Publication of JPH08362Y2 publication Critical patent/JPH08362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9065590U 1990-08-31 1990-08-31 真空蒸着用マニピュレータ Expired - Lifetime JPH08362Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9065590U JPH08362Y2 (ja) 1990-08-31 1990-08-31 真空蒸着用マニピュレータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9065590U JPH08362Y2 (ja) 1990-08-31 1990-08-31 真空蒸着用マニピュレータ

Publications (2)

Publication Number Publication Date
JPH0448261U JPH0448261U (OSRAM) 1992-04-23
JPH08362Y2 true JPH08362Y2 (ja) 1996-01-10

Family

ID=31825591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9065590U Expired - Lifetime JPH08362Y2 (ja) 1990-08-31 1990-08-31 真空蒸着用マニピュレータ

Country Status (1)

Country Link
JP (1) JPH08362Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0448261U (OSRAM) 1992-04-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term