JPH08359Y2 - カーボン蒸着装置 - Google Patents

カーボン蒸着装置

Info

Publication number
JPH08359Y2
JPH08359Y2 JP1990402932U JP40293290U JPH08359Y2 JP H08359 Y2 JPH08359 Y2 JP H08359Y2 JP 1990402932 U JP1990402932 U JP 1990402932U JP 40293290 U JP40293290 U JP 40293290U JP H08359 Y2 JPH08359 Y2 JP H08359Y2
Authority
JP
Japan
Prior art keywords
carbon
sample
time
heating current
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990402932U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0489544U (enrdf_load_stackoverflow
Inventor
勝人 後藤
孝 島谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyu Denshi Co Ltd
Original Assignee
Sanyu Denshi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyu Denshi Co Ltd filed Critical Sanyu Denshi Co Ltd
Priority to JP1990402932U priority Critical patent/JPH08359Y2/ja
Publication of JPH0489544U publication Critical patent/JPH0489544U/ja
Application granted granted Critical
Publication of JPH08359Y2 publication Critical patent/JPH08359Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990402932U 1990-12-12 1990-12-12 カーボン蒸着装置 Expired - Lifetime JPH08359Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990402932U JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990402932U JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Publications (2)

Publication Number Publication Date
JPH0489544U JPH0489544U (enrdf_load_stackoverflow) 1992-08-05
JPH08359Y2 true JPH08359Y2 (ja) 1996-01-10

Family

ID=31880780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990402932U Expired - Lifetime JPH08359Y2 (ja) 1990-12-12 1990-12-12 カーボン蒸着装置

Country Status (1)

Country Link
JP (1) JPH08359Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730674Y2 (ja) * 1989-04-04 1995-07-12 サンユー電子株式会社 カーボン蒸着装置

Also Published As

Publication number Publication date
JPH0489544U (enrdf_load_stackoverflow) 1992-08-05

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