JPS621226Y2 - - Google Patents
Info
- Publication number
- JPS621226Y2 JPS621226Y2 JP9336682U JP9336682U JPS621226Y2 JP S621226 Y2 JPS621226 Y2 JP S621226Y2 JP 9336682 U JP9336682 U JP 9336682U JP 9336682 U JP9336682 U JP 9336682U JP S621226 Y2 JPS621226 Y2 JP S621226Y2
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- cooling water
- electron beam
- cooling
- cooling chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 22
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 13
- 238000007493 shaping process Methods 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9336682U JPS59458U (ja) | 1982-06-21 | 1982-06-21 | 電子ビ−ム形蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9336682U JPS59458U (ja) | 1982-06-21 | 1982-06-21 | 電子ビ−ム形蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59458U JPS59458U (ja) | 1984-01-05 |
| JPS621226Y2 true JPS621226Y2 (enrdf_load_stackoverflow) | 1987-01-13 |
Family
ID=30224147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9336682U Granted JPS59458U (ja) | 1982-06-21 | 1982-06-21 | 電子ビ−ム形蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59458U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0319592Y2 (enrdf_load_stackoverflow) * | 1984-10-13 | 1991-04-25 |
-
1982
- 1982-06-21 JP JP9336682U patent/JPS59458U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59458U (ja) | 1984-01-05 |
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