JPH0832226A - Method and apparatus for laser reflow - Google Patents

Method and apparatus for laser reflow

Info

Publication number
JPH0832226A
JPH0832226A JP16914094A JP16914094A JPH0832226A JP H0832226 A JPH0832226 A JP H0832226A JP 16914094 A JP16914094 A JP 16914094A JP 16914094 A JP16914094 A JP 16914094A JP H0832226 A JPH0832226 A JP H0832226A
Authority
JP
Japan
Prior art keywords
laser
laser beam
point
temperature
reflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16914094A
Other languages
Japanese (ja)
Inventor
Koji Hara
功二 原
Saburo Kikuchi
三郎 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Gunma Ltd
Original Assignee
NEC Gunma Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Gunma Ltd filed Critical NEC Gunma Ltd
Priority to JP16914094A priority Critical patent/JPH0832226A/en
Publication of JPH0832226A publication Critical patent/JPH0832226A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To realize good soldering by a method wherein the soldering is effected under same temperature conditions at the points of different thermal capacity in order to prevent defective soldering due to overheating or underheating. CONSTITUTION:In the preset stage, an infrared temperature sensor 9 measures the heated temperature of a mounting pad 12 irradiated with laser light from a laser irradiation head 5. The intensity of laser for main process is set based on the heating temperature measured depending on the positional information of the laser irradiation head and the set laser intensity is stored.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半田付けのために対象
物に予め塗布された半田をレーザーにより溶かすレーザ
ーリフロー装置に及び方法に関し、特に多端子、多リー
ドの表面実装部品を基板に半田付けするためのレーザー
リフロー装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser reflow apparatus and method for melting a solder previously applied to an object for soldering with a laser, and more particularly to soldering a multi-terminal, multi-lead surface mount component to a substrate. The present invention relates to a laser reflow device for attaching.

【0002】[0002]

【従来の技術】レーザリフローによる半田付けでは、プ
リント基板上にその実装パッドにリードを合わせてIC
等の表面実装部品を載置し、リード表面をレーザ光で照
射加熱し、実装パッドに予め塗布された半田を溶融させ
てプリント基板の実装パッドと表面実装部品のリードと
を半田付けする。
2. Description of the Related Art In soldering by laser reflow, a lead is aligned with a mounting pad on a printed circuit board to form an IC.
A surface mounting component such as the above is placed, the surface of the lead is irradiated with laser light and heated, and the solder previously applied to the mounting pad is melted to solder the mounting pad of the printed circuit board and the lead of the surface mounting component.

【0003】図4の従来のレーザーリフロー装置のブロ
ック図である。図において、レーザー駆動部7に駆動さ
れたレーザー装置6から出射されたレーザビームは、レ
ンズ、鏡、光ファイバ等からなる光化学系を介してレー
ザ照射ヘッド5に伝えられ、レーザ照射ヘッド5からプ
リント基板8上の一点に照射される。レーザ照射ヘッド
5はXY駆動部4によりXY方向(基板8に並行な平面
の方向に)一定速度で移動し、レーザービームの照射点
を基板8上のパッドと基板8に搭載される部品のリード
との接続点の列に沿って移動させてこれらを半田付けし
ていた。なお、XY駆動部4によりレーザー照射ヘッド
5を移動させる代わりにプリント基板8を載置するテー
ブルをXY方向に移動させる装置もある。
FIG. 5 is a block diagram of the conventional laser reflow apparatus of FIG. In the figure, a laser beam emitted from a laser device 6 driven by a laser driving unit 7 is transmitted to a laser irradiation head 5 via a photochemical system including a lens, a mirror, an optical fiber, etc., and is printed from the laser irradiation head 5. A single point on the substrate 8 is irradiated. The laser irradiation head 5 moves at a constant speed in the XY directions (in the direction of the plane parallel to the substrate 8) by the XY drive unit 4, and the irradiation point of the laser beam is the pad on the substrate 8 and the lead of the component mounted on the substrate 8. They were soldered by moving them along the row of connection points with. There is also a device that moves the table on which the printed circuit board 8 is placed in the XY directions instead of moving the laser irradiation head 5 by the XY drive unit 4.

【0004】制御部3に接続された入出力部1より作業
者が入力することによりレーザ照射ヘッド5からプリン
ト基板8に照射されるレーザビームの強度を設定するこ
とができる。また作業者が予め設定したレーザ照射ヘッ
ド5が移動する軌跡のXY座標値、移動速度及びレーザ
ビームを照射する部分のXY座標値等を入出力部1から
入力し、これらの情報を制御部3に接続された記憶部2
に格納する。
The intensity of the laser beam emitted from the laser irradiation head 5 to the printed circuit board 8 can be set by an operator's input from the input / output unit 1 connected to the control unit 3. Further, the operator inputs in advance the XY coordinate values of the locus of movement of the laser irradiation head 5, the moving speed, the XY coordinate values of the portion for irradiating the laser beam, etc. from the input / output unit 1, and these information are input to the control unit 3. Storage unit 2 connected to
To be stored.

【0005】このレーザーリフロー装置の自動運転時に
は、制御部3が記憶部2に格納された情報に従い、XY
駆動部4及びレーザ駆動部7を制御し、作業者が予め設
定したレーザ照射ヘッド5の移動軌跡等に従い、予め設
定された強度のレーザビームで基板8上のレーザーリフ
ロー半田付けを行う。
At the time of automatic operation of this laser reflow device, the control unit 3 follows the information stored in the storage unit 2 in the XY direction.
The drive unit 4 and the laser drive unit 7 are controlled to perform laser reflow soldering on the substrate 8 with a laser beam having a preset intensity according to the movement locus of the laser irradiation head 5 preset by the operator.

【0006】[0006]

【発明が解決しようとする課題】従来のレーザーリフロ
ー半田付け装置では、プリセット時の設定した一定のレ
ーザー照射ヘッドの速度およびレーザー照射強度にて全
リフローを行う。部品のリードをリフロー半田付けする
プリント基板上の実装パッドが一定幅にしてあるために
レーザービームにより各実装パッドに供給される熱量は
均一となる。しかし実装パッドの熱容量は接続される導
体パターンの有無そして幅及び予め塗布された半田量に
より異なる。そのためリフロー時の溶融半田温度は実装
パッド毎に異なることととなり、加熱の過不足が発生
し、その結果、熱損傷、半田未溶融等の半田付け品質に
関する問題が発生していた。
In the conventional laser reflow soldering apparatus, the total reflow is performed at the preset laser irradiation head speed and laser irradiation intensity set at the preset time. Since the mounting pads on the printed circuit board on which the leads of the components are reflow-soldered have a constant width, the amount of heat supplied to each mounting pad by the laser beam becomes uniform. However, the heat capacity of the mounting pad differs depending on the presence or absence of the conductor pattern to be connected, the width, and the amount of solder applied in advance. Therefore, the molten solder temperature at the time of reflow is different for each mounting pad, which causes excess and deficiency of heating, resulting in problems regarding soldering quality such as thermal damage and unmelted solder.

【0007】[0007]

【課題を解決するための手段】本発明のレーザーリフロ
ー装置は、対象物にレーザービームを照射するレーザー
照射ヘッドを前記対象物に対して相対的に移動させて前
記対象物上に予め塗布された半田をリフローするレーザ
ーリフロー装置において、前記レーザー照射ヘッドと共
に前記対象物に対して移動し前記対象物上の前記レーザ
ビームの照射点の移動直後の点の温度を測定する赤外線
温度センサーを備えている。
In the laser reflow apparatus of the present invention, a laser irradiation head for irradiating an object with a laser beam is moved relative to the object and pre-coated on the object. A laser reflow device for reflowing solder is provided with an infrared temperature sensor that moves with the laser irradiation head with respect to the object and measures the temperature of a point immediately after the irradiation point of the laser beam on the object moves. .

【0008】本発明のレーザーリフロー方法は、対象物
上のレーザービームの照射点を移動させて前記対象物上
に予め塗布された半田をリフローするレーザーリフロー
方法において、試験用の対象物上に一定強度のレーザー
ビームの照射点を一定速度で軌跡を描かせて移動させる
と同時に前記試験用の対象物上の前記照射点の移動直後
の点の温度を測定することにより前記軌跡上の各点の前
記レーザービームの照射で上昇した温度を測定し、この
測定温度に基づいて前記軌跡上の各点ごとに目標温度ま
で加熱するように前記レーザビームの強度を調整し、こ
の後に前記試験用のものと同一種類の対象物に前記軌跡
点の各点ごとに調整後の強度の前記レーザービームによ
り前記照射点を前記一定の速度で移動させて前記軌跡を
描かせることを特徴とする。
The laser reflow method of the present invention is a laser reflow method in which the irradiation point of a laser beam on an object is moved to reflow solder previously coated on the object. By moving the irradiation point of the intense laser beam while drawing a locus at a constant speed and simultaneously measuring the temperature of the point immediately after the movement of the irradiation point on the test object, The temperature increased by the irradiation of the laser beam is measured, and the intensity of the laser beam is adjusted so that each point on the locus is heated to the target temperature based on the measured temperature, and then the test beam is used. The object of the same type is characterized in that the trajectory is drawn by moving the irradiation point at the constant speed by the laser beam having the intensity adjusted for each of the trajectory points. To.

【0009】または、上述の測定温度に基づいて前記軌
跡上の各点ごとに目標温度まで加熱するように前記照射
点の移動速度を調整し、この後に前記試験用のものと同
一種類の対象物に前記一定の強度の前記レーザービーム
の照射点を軌跡上の各点ごとに調整後の速度で移動させ
て前記軌跡を描かせることを特徴とする。
Alternatively, the moving speed of the irradiation point is adjusted so that each point on the locus is heated to the target temperature on the basis of the above-mentioned measured temperature, and thereafter, an object of the same type as that for the test is adjusted. In addition, the irradiation point of the laser beam having the constant intensity is moved at each speed on the locus at the adjusted speed to draw the locus.

【0010】[0010]

【実施例】次に、本発明について図面を参照して説明す
る。
Next, the present invention will be described with reference to the drawings.

【0011】図1は本発明の一実施例のブロック図であ
り、図2は本実施例のレーザ照射ヘッド5、赤外線温度
センサー9及び基板8を示す斜視図である。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a perspective view showing a laser irradiation head 5, an infrared temperature sensor 9 and a substrate 8 of this embodiment.

【0012】図2に示すようにプリント基板8には複数
の一定幅の実装パッド12が配列され、実装パッド12
の一部分のものには各種の導体パターン13が接続され
ている。プリント基板8の上側にレーザ照射ヘッド5及
び赤外線温度センサー9が並べて配置され、プリント基
板8のレーザ照射ヘッド5によるレーザービームの照射
点の直後(レーザ照射ヘッド5の移動における)の点の
温度を赤外線温度センサー9で計測する。このようにす
るため赤外線温度センサー9はレーザ照射ヘッド5を中
心として常にレーザ照射ヘッド5の進行方向の逆側に位
置するように旋回する。
As shown in FIG. 2, a plurality of mounting pads 12 having a constant width are arranged on the printed circuit board 8.
Various conductor patterns 13 are connected to a part of the. The laser irradiation head 5 and the infrared temperature sensor 9 are arranged side by side on the upper side of the printed circuit board 8, and the temperature of the point immediately after the laser irradiation point of the laser irradiation head 5 of the printed circuit board 8 (in the movement of the laser irradiation head 5) is measured. The infrared temperature sensor 9 measures. For this purpose, the infrared temperature sensor 9 is swung so that it is always located on the opposite side of the traveling direction of the laser irradiation head 5 with the laser irradiation head 5 as the center.

【0013】図1において赤外線温度センサ9は温度測
定部10から電源を供給され、赤外線温度センサ9の出
力信号は温度測定部10で増幅されて制御部3に送られ
る。また赤外線温度センサ9は旋回駆動部11によりレ
ーザ照射ヘッド5の回りを旋回させられ、旋回駆動部1
1はXY駆動部4と供に制御部3により制御される。
In FIG. 1, the infrared temperature sensor 9 is supplied with power from the temperature measuring section 10, and the output signal of the infrared temperature sensor 9 is amplified by the temperature measuring section 10 and sent to the control section 3. The infrared temperature sensor 9 is swung around the laser irradiation head 5 by the swivel drive unit 11, and the swivel drive unit 1 is rotated.
1 is controlled by the control unit 3 together with the XY drive unit 4.

【0014】本実施例ではレーザー照射ヘッド5からプ
リント基板8に照射されるレーザービームの強度を入出
力部1からの入力により予め設定しておくほか、レーザ
ーリフローの自動運転中にも制御部3からの指令により
随時変更することができる。
In the present embodiment, the intensity of the laser beam irradiated from the laser irradiation head 5 to the printed circuit board 8 is preset by inputting from the input / output unit 1, and the control unit 3 is also operated during the automatic operation of the laser reflow. It can be changed at any time by a command from.

【0015】本実施例ではプリセット時にリフロー時の
各実装パッドについての最適なレーザービームの強度を
設定するために、試験用のプリント基板8を用い、レー
ザービーム照射による各実装パッドの温度上昇を測定す
る。この測定は記憶部2に格納された情報に従い、自動
運転によるレーザーリフローを行うものでレーザービー
ムの照射点がプリント基板8上の実装パッドの列に沿っ
て軌跡を描くようにレーザー照射ヘッド5を一定速度で
移動させ、照射点が実装パッド上を通る間予め設定した
一定強度でレーザービームの照射を行い、その照射直後
の加熱された点の上昇した温度を赤外線温度センサ9で
測定し、各測定点のXY座標と供に測定した温度を記憶
部2に記憶させる。
In this embodiment, in order to set the optimum laser beam intensity for each mounting pad during reflow at the time of presetting, a printed circuit board 8 for testing is used to measure the temperature rise of each mounting pad due to laser beam irradiation. To do. In this measurement, laser reflow is performed by automatic operation according to the information stored in the storage unit 2. The laser irradiation head 5 is moved so that the irradiation point of the laser beam draws a locus along the row of the mounting pads on the printed circuit board 8. While moving at a constant speed, while the irradiation point passes over the mounting pad, a laser beam is irradiated with a preset constant intensity, and the elevated temperature of the heated point immediately after the irradiation is measured by the infrared temperature sensor 9. The temperature measured together with the XY coordinates of the measurement point is stored in the storage unit 2.

【0016】次に、測定結果の温度に基づき各実装パッ
ドの上昇温度が同一となるようにレーザービームの強度
を調整して設定する。例えば、測定温度が目標とする温
度範囲内であった実装パッドについては測定時に設定し
たものと同一の強度を設定し、目標、温度範囲外であっ
た実装パッドについては測定温度から目標温度を減算し
たものに比例定数を掛けた値を前の設定強度から減算し
たものを調整後のレーザービームの強度として設定す
る。このように設定したレーザービームの強度を記憶部
3に実装パッドのXY座標に対応ずけて格納する。
Next, the intensity of the laser beam is adjusted and set so that the mounting pads have the same elevated temperature based on the temperature of the measurement result. For example, for mounting pads whose measured temperature was within the target temperature range, set the same strength as that set at the time of measurement, and for mounting pads outside the target and temperature range, subtract the target temperature from the measured temperature. The value obtained by multiplying the calculated value by a proportional constant is subtracted from the previously set intensity, and is set as the adjusted laser beam intensity. The intensity of the laser beam set in this way is stored in the storage unit 3 in correspondence with the XY coordinates of the mounting pad.

【0017】以上のプリセットの後に記憶部2に格納さ
れた情報に従い自動運転によりレーザ照射ヘッド5を移
動させると共に実装パッドごとに設定した最適な強度の
レーザービームを照射して製品用のプリント基板8のレ
ーザーリフローを行う。
After the above preset, the laser irradiation head 5 is moved by the automatic operation according to the information stored in the storage unit 2 and the laser beam having the optimum intensity set for each mounting pad is irradiated to the printed board 8 for the product. Laser reflow.

【0018】なお、上述のように1回のみの温度測定で
レーザービームの強度を決定せずに、図3に示すように
調整後のレーザービーム強度で前のものとは別の試験用
プリント基板を用いて再度、各実装パッドの上昇温度を
測定し、すべての実装パッドについて上昇温度が目標範
囲内となるまで、温度測定と強度調整を繰り返すように
してもよい。
It should be noted that, as described above, the intensity of the laser beam is not determined by measuring the temperature only once, and the intensity of the laser beam after adjustment is different from that of the previous one as shown in FIG. The temperature rise of each mounting pad may be measured again by using, and temperature measurement and strength adjustment may be repeated until the temperature rise of all the mounting pads falls within the target range.

【0019】また、レーザービームの強度を調整する代
わりに実装パッドごとにレーザ照射ヘッド5の移動速度
を調整するようにしてもよい。すなわち、試験用プリン
ト基板での測定温度が高過ぎた実装パッドについてはレ
ーザ照射ヘッド5の移動をより高速にし、温度が低過ぎ
た実装パッドについては移動をより低速にする。
Instead of adjusting the intensity of the laser beam, the moving speed of the laser irradiation head 5 may be adjusted for each mounting pad. That is, the laser irradiation head 5 is moved at a higher speed for a mounting pad whose measured temperature on the test printed circuit board is too high, and is moved at a lower speed for a mounting pad whose temperature is too low.

【0020】なお、本実施例では赤外線温度センサー9
がレーザー照射ヘッド5の回りを旋回するようにした
が、半田リフローを行うのにレーザー照射ヘッドが±X
方向及び±Y方向の4方向のみしか移動しない場合は、
レーザー照射ヘッドの周囲の±X方向及び±Y方向の4
箇所に4個の赤外線温度センサーを設けてレーザー照射
ヘッドの移動方向によりいずれかの赤外線温度センサー
を選択してレーザービーム照射点の移動直後の点の温度
を測るようにすれば、赤外線温度センサーを旋回させる
必要はない。
In this embodiment, the infrared temperature sensor 9
Was rotated around the laser irradiation head 5, but the laser irradiation head was ± X to perform the solder reflow.
Direction and ± Y direction only,
4 around the laser irradiation head in the ± X and ± Y directions
If four infrared temperature sensors are installed at the location and one of the infrared temperature sensors is selected according to the moving direction of the laser irradiation head to measure the temperature of the point immediately after moving the laser beam irradiation point, the infrared temperature sensor can be used. No need to turn.

【0021】また、赤外線温度センサー9により測定し
た温度に基づき、調整したレーザービームの強度又はレ
ーザー照射ヘッド5の移動速度を測定するのは所定のプ
ログラムに従って制御部3で機械的に算出するようにも
できるし、測定結果を入出力部1に表示し、人がこれを
見て調整後の値を決定し、その調整後の値を入出力部1
から入力して記憶部2に格納するように人が介在するよ
うにしてもよい。
The intensity of the adjusted laser beam or the moving speed of the laser irradiation head 5 is measured on the basis of the temperature measured by the infrared temperature sensor 9 so that the controller 3 mechanically calculates it according to a predetermined program. It is also possible to display the measurement result on the input / output unit 1, a person looks at it and determines the adjusted value, and the adjusted value is input / output unit 1
Alternatively, a person may intervene so that the data is input from and stored in the storage unit 2.

【0022】[0022]

【発明の効果】以上説明したように本発明のレーザーリ
フロー装置及び方法は、レーザーリフローにおいて、熱
容量の異なる半田付けポイント(対象物のレーザービー
ム照射点の移動軌跡上の各点)全てを同一の温度条件で
半田リフローが行える為、加熱の加不足による熱損傷、
半田未溶融のない良好な半田付けが可能であり、信頼性
を保証する上で極めて有効な効果を発揮する。
As described above, in the laser reflow apparatus and method of the present invention, all the soldering points (each point on the moving locus of the laser beam irradiation point of the object) having different heat capacities are the same in the laser reflow. Since solder reflow can be performed under temperature conditions, heat damage due to insufficient heating,
Good soldering is possible without unmelted solder, and it is extremely effective in ensuring reliability.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例のブロック図である。FIG. 1 is a block diagram of one embodiment of the present invention.

【図2】図1に示すレーザー照射ヘッド5、赤外線温度
センサー9及びプリント基板8の関係を示す斜視図であ
る。
FIG. 2 is a perspective view showing the relationship between the laser irradiation head 5, the infrared temperature sensor 9 and the printed circuit board 8 shown in FIG.

【図3】図1の実施例において赤外線温度センサー9に
よる温度測定を繰り返す場合の手順を示す流れ図であ
る。
FIG. 3 is a flowchart showing a procedure for repeating temperature measurement by the infrared temperature sensor 9 in the embodiment of FIG.

【図4】従来のレーザーリフロー半田付け装置のブロッ
ク図である。
FIG. 4 is a block diagram of a conventional laser reflow soldering device.

【符号の説明】[Explanation of symbols]

1 入出力 2 記憶部 3 制御部 4 XY駆動部 5 レーザー照射ヘッド 6 レーザー装置 7 レーザー駆動部 8 プリント基板 9 赤外線温度センサー 10 温度測定部 11 旋回駆動部 12 パッド 13 パターン 1 Input / output 2 Storage part 3 Control part 4 XY drive part 5 Laser irradiation head 6 Laser device 7 Laser drive part 8 Printed circuit board 9 Infrared temperature sensor 10 Temperature measurement part 11 Swiveling drive part 12 Pad 13 pattern

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 対象物にレーザービームを照射するレー
ザー照射ヘッドを前記対象物に対して相対的に移動させ
て前記対象物上に予め塗布された半田をリフローするレ
ーザーリフロー装置において、 前記レーザー照射ヘッドと共に前記対象物に対して移動
し前記対象物上の前記レーザビームの照射点の移動直後
の点の温度を測定する赤外線温度センサーを備えたこと
を特徴とするレーザーリフロー装置。
1. A laser reflow apparatus for moving a laser irradiation head for irradiating a target object with a laser beam relative to the target object to reflow solder previously coated on the target object. A laser reflow apparatus comprising an infrared temperature sensor that moves with the head with respect to the target object and measures the temperature of a point immediately after the irradiation point of the laser beam on the target object moves.
【請求項2】対象物上のレーザービームの照射点を移動
させて前記対象物上に予め塗布された半田をリフローす
るレーザーリフロー方法において、 試験用の対象物上に一定強度のレーザービームの照射点
を一定速度で軌跡を描かせて移動させると同時に前記試
験用の対象物上の前記照射点の移動直後の点の温度を測
定することにより前記軌跡上の各点の前記レーザービー
ムの照射で上昇した温度を測定し、この測定温度に基づ
いて前記軌跡上の各点ごとに目標温度まで加熱するよう
に前記レーザビームの強度を調整し、 この後に前記試験用のものと同一種類の対象物に前記軌
跡点の各点ごとに調整後の強度の前記レーザービームに
より前記照射点を前記一定の速度で移動させて前記軌跡
を描かせることを特徴とするレーザーリフロー方法。
2. A laser reflow method in which a laser beam irradiation point on an object is moved to reflow solder previously coated on the object, the irradiation of the laser beam having a constant intensity on the object to be tested. By radiating the laser beam at each point on the locus by measuring the temperature of the point immediately after the movement of the irradiation point on the test object while moving the point while drawing a locus at a constant speed. The increased temperature is measured, and the intensity of the laser beam is adjusted so that each point on the locus is heated to the target temperature based on the measured temperature, and then the same type of object as that for the test is used. The laser reflow method characterized in that the irradiation point is moved at the constant speed by the laser beam having the intensity adjusted for each of the locus points to draw the locus.
【請求項3】 対象物上のレーザービームの照射点を移
動させて前記対象物上に予め塗布された半田をリフロー
するレーザーリフロー方法において、 試験用の対象物上に一定の強度のレーザービームの照射
点を一定の速度で軌跡を描かせて移動させると同時に前
記試験用の対象物上の前記照射点の移動直後の点の温度
を測定することにより前記軌跡上の各点の前記レーザー
ビーム照射により上昇した温度を測定しこの測定温度に
基づいて前記軌跡上の各点ごとに目標温度まで加熱する
ように前記照射点の移動速度を調整し、 この後に前記試験用のものと同一種類の対象物に前記一
定の強度の前記レーザービームの照射点を軌跡上の各点
ごとに調整後の速度で移動させて前記軌跡を描かせるこ
とを特徴とするレーザーリフロー方法。
3. A laser reflow method in which a laser beam irradiation point on an object is moved to reflow solder previously coated on the object, wherein a laser beam having a constant intensity is applied on the object to be tested. Laser beam irradiation of each point on the trajectory by measuring the temperature of the irradiation point on the test object immediately after the irradiation point is moved while moving the irradiation point along a trajectory at a constant speed. Measured the temperature increased by, and adjust the moving speed of the irradiation point so as to heat up to the target temperature for each point on the locus based on this measured temperature, and then the same type of object as the one for the test. A laser reflow method, characterized in that an irradiation point of the laser beam of the constant intensity is moved on an object at each speed on the trajectory at an adjusted speed to draw the trajectory.
JP16914094A 1994-07-21 1994-07-21 Method and apparatus for laser reflow Pending JPH0832226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16914094A JPH0832226A (en) 1994-07-21 1994-07-21 Method and apparatus for laser reflow

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16914094A JPH0832226A (en) 1994-07-21 1994-07-21 Method and apparatus for laser reflow

Publications (1)

Publication Number Publication Date
JPH0832226A true JPH0832226A (en) 1996-02-02

Family

ID=15881033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16914094A Pending JPH0832226A (en) 1994-07-21 1994-07-21 Method and apparatus for laser reflow

Country Status (1)

Country Link
JP (1) JPH0832226A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008177307A (en) * 2007-01-17 2008-07-31 Toyota Motor Corp Wiring joining method for semiconductor device
JP2011003630A (en) * 2009-06-17 2011-01-06 Sumitomo Heavy Ind Ltd Laser irradiator and method for irradiating laser
JP2013248651A (en) * 2012-06-01 2013-12-12 Fujikura Ltd Joining method, joining device, controller, and program

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6487713A (en) * 1987-09-29 1989-03-31 Toshiba Corp Laser control equipment
JPH0444390A (en) * 1990-06-11 1992-02-14 Matsushita Electric Ind Co Ltd Laser soldering method and device
JPH0455079A (en) * 1990-06-25 1992-02-21 Toshiba F Ee Syst Eng Kk Laser beam machine
JPH04140650A (en) * 1990-10-01 1992-05-14 Toshiba Corp Apparatus for inspecting printed circuit board
JPH0555740A (en) * 1991-07-05 1993-03-05 Matsushita Electric Ind Co Ltd Electronic part soldering method and apparatus
JPH06196852A (en) * 1992-12-24 1994-07-15 Matsushita Electric Ind Co Ltd Laser bonding method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6487713A (en) * 1987-09-29 1989-03-31 Toshiba Corp Laser control equipment
JPH0444390A (en) * 1990-06-11 1992-02-14 Matsushita Electric Ind Co Ltd Laser soldering method and device
JPH0455079A (en) * 1990-06-25 1992-02-21 Toshiba F Ee Syst Eng Kk Laser beam machine
JPH04140650A (en) * 1990-10-01 1992-05-14 Toshiba Corp Apparatus for inspecting printed circuit board
JPH0555740A (en) * 1991-07-05 1993-03-05 Matsushita Electric Ind Co Ltd Electronic part soldering method and apparatus
JPH06196852A (en) * 1992-12-24 1994-07-15 Matsushita Electric Ind Co Ltd Laser bonding method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008177307A (en) * 2007-01-17 2008-07-31 Toyota Motor Corp Wiring joining method for semiconductor device
JP2011003630A (en) * 2009-06-17 2011-01-06 Sumitomo Heavy Ind Ltd Laser irradiator and method for irradiating laser
JP2013248651A (en) * 2012-06-01 2013-12-12 Fujikura Ltd Joining method, joining device, controller, and program

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