JPH082592Y2 - マイクロシステムガスセンサ - Google Patents

マイクロシステムガスセンサ

Info

Publication number
JPH082592Y2
JPH082592Y2 JP1988140411U JP14041188U JPH082592Y2 JP H082592 Y2 JPH082592 Y2 JP H082592Y2 JP 1988140411 U JP1988140411 U JP 1988140411U JP 14041188 U JP14041188 U JP 14041188U JP H082592 Y2 JPH082592 Y2 JP H082592Y2
Authority
JP
Japan
Prior art keywords
substrate
hole
gas sensor
diaphragm
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988140411U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
裕史 宮田
利幸 澤田
淳 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1988140411U priority Critical patent/JPH082592Y2/ja
Publication of JPH0260863U publication Critical patent/JPH0260863U/ja
Application granted granted Critical
Publication of JPH082592Y2 publication Critical patent/JPH082592Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Sampling And Sample Adjustment (AREA)
JP1988140411U 1988-10-27 1988-10-27 マイクロシステムガスセンサ Expired - Lifetime JPH082592Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988140411U JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988140411U JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Publications (2)

Publication Number Publication Date
JPH0260863U JPH0260863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-07
JPH082592Y2 true JPH082592Y2 (ja) 1996-01-29

Family

ID=31404554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988140411U Expired - Lifetime JPH082592Y2 (ja) 1988-10-27 1988-10-27 マイクロシステムガスセンサ

Country Status (1)

Country Link
JP (1) JPH082592Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5212286B2 (ja) * 2009-07-09 2013-06-19 富士電機株式会社 薄膜ガスセンサおよび薄膜ガスセンサの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2619003B2 (ja) * 1988-08-05 1997-06-11 株式会社東芝 酸素検出素子及びその製造方法

Also Published As

Publication number Publication date
JPH0260863U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-07

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