JPH08256U - Laser cavity - Google Patents
Laser cavityInfo
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- JPH08256U JPH08256U JP008024U JP802495U JPH08256U JP H08256 U JPH08256 U JP H08256U JP 008024 U JP008024 U JP 008024U JP 802495 U JP802495 U JP 802495U JP H08256 U JPH08256 U JP H08256U
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- heat medium
- communication holes
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Abstract
(57)【要約】
【課題】 レーザ共振器に関し、全ての支持部材の温度
を一定とすることのできる簡単で低価格のレーザ共振器
の提供を目的とする。
【解決手段】 レーザ管１と、該レーザ管の両側に平行
に設けられた一対の反射鏡２，４と、該各反射鏡がそれ
ぞれ取付けられた一対の保持部材３，５と、該各保持部
材を相互に固定支持し、内部に連通孔が形成された複数
の支持部材６ａ〜６ｄと、該各支持部材の連通孔を循環
し、該各支持部材の温度を全て同一の温度とする熱媒質
と、該熱媒質を前記各支持部材の連通孔を介して循環さ
せる循環手段７と、前記熱媒質の温度を室温にする空冷
式ラジエータで構成された熱交換手段８とを具備するよ
うに構成する。
(57) Abstract: It is an object of the present invention to provide a simple and low-cost laser resonator capable of keeping the temperature of all supporting members constant. A laser tube (1), a pair of reflecting mirrors (2,4) provided in parallel on both sides of the laser tube, a pair of holding members (3,5) to which the respective reflecting mirrors are attached, and respective holding members. A heat for fixing and supporting the members to each other and circulating a plurality of support members 6a to 6d each having a communication hole formed therein and the communication holes of the respective support members so that the temperatures of the respective support members are all the same. A medium, a circulation means 7 for circulating the heat medium through the communication holes of the respective support members, and a heat exchange means 8 constituted by an air-cooled radiator for bringing the temperature of the heat medium to room temperature are provided. Configure.
Description
【０００１】[0001]
本考案はレーザ共振器に関し、特に、平行に位置する２枚の反射鏡によりレー ザ管内の光を相互に反射してレーザ出力を得るレーザ共振器に関する。 The present invention relates to a laser resonator, and more particularly, to a laser resonator that mutually reflects light in a laser tube by two reflecting mirrors positioned in parallel to obtain a laser output.
【０００２】[0002]
図３は従来のレーザ共振器の問題点を説明するための図である。 図３に示されるように、従来の炭酸ガス等の気体レーザを発生させるためのレ ーザ共振器は、概略すると、レーザ管１０１、反射鏡１０２，１０４、保持部材 １０３，１０５、および、支持部材１０６ａ〜１０６ｄを具備している。 FIG. 3 is a diagram for explaining the problems of the conventional laser resonator. As shown in FIG. 3, a conventional laser resonator for generating a gas laser such as carbon dioxide gas is roughly described as follows: a laser tube 101, reflecting mirrors 102 and 104, holding members 103 and 105, and supporting members. The member 106a-106d is provided.
【０００３】 レーザ管１０１は、例えば、高周波の電圧を印加してそのレーザ管の内部にグ ロー放電を生じさせ、そして、グロー放電を行っているレーザ管１０１の内部に レーザガス（例えば、ＣＯ2 ，Ｎ2 ，Ｈｅの混合気体）を通過させることによっ て、レーザガス中の炭酸ガス分子を励起するようになされている。そして、励起 されて高準位の分子振動状態にある炭酸ガス分子が低準位の分子振動状態に遷移 するときに所定の波長の光を放出するが、レーザ共振器は上記の放出された光を レーザ管１０１の両側に設けられた２枚の反射鏡１０２および１０４で反射して 共振させ、その反射光の一部をハーフミラーである反射鏡１０４から取り出すこ とによりレーザ出力を得るものである。上記した反射鏡１０２および１０４は、 それぞれ保持部材１０３および１０５に取付けられ、また、保持部材１０３と１ ０５とは４本の支持部材１０６ａ〜１０６ｄによって相互に固定支持されている 。The laser tube 101 applies, for example, a high frequency voltage to generate glow discharge inside the laser tube, and laser gas (for example, CO 2 gas) is generated inside the laser tube 101 performing glow discharge. , N 2 and He mixed gas) is passed to excite carbon dioxide gas molecules in the laser gas. Then, when the carbon dioxide molecule in the high-level molecular vibration state excited and transits to the low-level molecular vibration state, it emits light of a predetermined wavelength, but the laser resonator emits light of the above-mentioned emitted light. Is reflected by two reflecting mirrors 102 and 104 provided on both sides of the laser tube 101 to cause resonance, and a part of the reflected light is extracted from the reflecting mirror 104 which is a half mirror to obtain a laser output. is there. The reflecting mirrors 102 and 104 described above are attached to holding members 103 and 105, respectively, and the holding members 103 and 105 are fixedly supported by four supporting members 106a to 106d.
【０００４】 ところで、反射鏡１０２と１０４とは正確に平行とされていなければ、レーザ 管１０１内で放出された光を２枚の反射鏡１０２および１０４で何度も反射して 共振させることができない。すなわち、２枚の反射鏡１０２と１０４との角度が 正確な平行状態から少しでもずれると、それらの反射鏡１０２および１０４で反 射される光の経路も次第にずれが大きくなり、反射光の経路は反射鏡の外側へ向 かって進行することになってしまう。この２枚の反射鏡１０２と１０４との角度 のずれは、主にレーザ管１０１から放射される熱によって、レーザ管１０１の上 部の温度Ｔ1 とレーザ管１０１の下部の温度Ｔ2 との間に温度差が生じ、支持部 材１０６ａ（１０６ｂ）と支持部材１０６ｃ（１０６ｄ）との熱膨張による長さ 変化が相違することが原因となっている。そのため、支持部材１０６ａ〜１０６ ｄの材質としては、熱膨張係数の極めて小さいＦｅ−Ｎｉ合金等のインバ（Ｉｎ ｖａｒ）が使用されている。By the way, if the reflecting mirrors 102 and 104 are not exactly parallel to each other, the light emitted in the laser tube 101 can be repeatedly reflected by the two reflecting mirrors 102 and 104 to cause resonance. Can not. That is, if the angle between the two reflecting mirrors 102 and 104 deviates from the accurate parallel state even a little, the paths of the light reflected by these reflecting mirrors 102 and 104 will gradually deviate, and the paths of the reflected light will increase. Will travel toward the outside of the mirror. The difference in angle between the two reflecting mirrors 102 and 104 is due to the heat radiated mainly from the laser tube 101 between the temperature T 1 above the laser tube 101 and the temperature T 2 below the laser tube 101. A temperature difference occurs between them, and this is caused by the difference in length change due to thermal expansion between the support member 106a (106b) and the support member 106c (106d). Therefore, as the material of the supporting members 106a to 106d, Invar such as Fe—Ni alloy having an extremely small thermal expansion coefficient is used.
【０００５】 また、従来より、レーザ管１０１の上部の温度Ｔ1 と下部の温度Ｔ2 との温度 差の影響を無くして支持部材１０６ａ（１０６ｂ）の温度と支持部材１０６ｃ（ １０６ｄ）の温度とを一致させるために、支持部材１０６ａ〜１０６ｄの内部の 長手軸方向に連通孔を形成し、それら各支持部材の連通孔に温度が一定とされた 水を流すことが行われている。Further, conventionally, the influence of the temperature difference between the upper temperature T 1 and the lower temperature T 2 of the laser tube 101 is eliminated, and the temperature of the supporting member 106a (106b) and the temperature of the supporting member 106c (106d) are reduced. In order to make the same, the communication holes are formed inside the support members 106a to 106d in the longitudinal axis direction, and water having a constant temperature is made to flow through the communication holes of the respective support members.
【０００６】[0006]
上述したように、従来のレーザ共振器は、レーザ管１０１からの発熱によるレ ーザ管の上部と下部との温度差に対して、支持部材１０６ａ〜１０６ｄに熱膨張 係数の極めて小さいインバ等の材質を使用して、支持部材１０６ａ〜１０６ｄが 熱によって伸縮しないようにしていた。しかし、この方式ではインバ等の熱膨張 係数の極めて小さい材質は高価となる欠点がある。 As described above, in the conventional laser resonator, the support members 106a to 106d are provided with an extremely small thermal expansion coefficient such as Invar in accordance with the temperature difference between the upper and lower portions of the laser tube due to the heat generated from the laser tube 101. A material is used so that the supporting members 106a to 106d do not expand or contract due to heat. However, this method has a drawback that materials such as Invar having a very small coefficient of thermal expansion are expensive.
【０００７】 また、レーザ管１０１の上部の温度Ｔ1 と下部の温度Ｔ2 との温度差の影響を 無くして支持部材１０６ａ（１０６ｂ）の温度と支持部材１０６ｃ（１０６ｄ） の温度とを一致させるために、各支持部材の連通孔に一定温度の水を流すことが 行われている。しかし、このような一定温度の水を各支持部材の連通孔に流すた めには、その水の温度を常に一定とするための恒温器およびその恒温水を循環さ せるためのポンプを有するチラーを必要としていた。そして、このチラーは大型 のものが必要とされるだけでなく、恒温器で設定された温度と室温との間に差が あると、例えば、恒温器で設定された温度が室温よりも相当低いと、支持部材１ ０６ａ〜１０６ｄに結露等を生じることになり、チラーから送出される水の温度 を室温に一致させなければならない。しかし、室温は季節や毎日の天気等によっ て様々に変化するため、チラーから送出される恒温水の温度を、例えば、人手に よって頻繁に設定しなければならなかった。このように、チラーを使用して恒温 水を支持部材１０６ａ〜１０６ｄの連通孔に循環させるレーザ共振器は、チラー に要する費用だけでなく温度設定の手間についても問題があった。Further, the temperature difference between the upper temperature T 1 and the lower temperature T 2 of the laser tube 101 is eliminated to make the temperature of the supporting member 106a (106b) equal to the temperature of the supporting member 106c (106d). Therefore, water with a constant temperature is made to flow through the communication holes of each support member. However, in order to allow such constant temperature water to flow through the communication holes of each support member, a chiller having a thermostat for constantly maintaining the temperature of the water and a pump for circulating the constant temperature water is provided. Was needed. And not only is this chiller needed to be large, but if there is a difference between the temperature set by the incubator and room temperature, for example, the temperature set by the incubator is significantly lower than room temperature. As a result, dew condensation or the like will occur on the support members 106a to 106d, and the temperature of the water sent from the chiller must match the room temperature. However, since the room temperature changes variously depending on the season and daily weather, the temperature of the constant temperature water sent from the chiller had to be set manually, for example, frequently. As described above, the laser resonator in which the chiller is used to circulate the constant temperature water through the communication holes of the supporting members 106a to 106d has a problem not only in the cost required for the chiller but also in the labor for setting the temperature.
【０００８】 本考案の目的は、上述した従来形のレーザ共振器における問題点に鑑み、反射 鏡がそれぞれ取付けられた一対の保持部材を相互に固定支持する支持部材の内部 に連通孔を形成し、循環手段により各支持部材の連通孔に熱媒質を循環させ、さ らに、簡単な構成の熱交換手段によりこの熱媒質の温度を室温に一致させること によって、室温と同じ温度の熱媒質を各支持部材の連通孔に循環させて全ての支 持部材の温度を一定とすることのできる簡単で低価格のレーザ共振器を提供する ことにある。In view of the above-mentioned problems in the conventional laser resonator, an object of the present invention is to form a communication hole inside a support member that fixedly supports a pair of holding members having reflection mirrors attached to each other. By circulating the heat medium through the communication hole of each support member by the circulation means, and by making the temperature of the heat medium coincide with the room temperature by the heat exchange means having a simple structure, the heat medium at the same temperature as the room temperature can be obtained. An object of the present invention is to provide a simple and low-cost laser resonator in which the temperature of all supporting members can be kept constant by circulating them through the communication holes of each supporting member.
【０００９】[0009]
本考案によれば、レーザ管と、該レーザ管の両側に平行に設けられた一対の反 射鏡と、該各反射鏡がそれぞれ取付けられた一対の保持部材と、該各保持部材を 相互に固定支持し、内部に連通孔が形成された複数の支持部材と、該各支持部材 の連通孔を循環し、該各支持部材の温度を全て同一の温度とする熱媒質と、該熱 媒質を前記各支持部材の連通孔を介して循環させる循環手段と、前記熱媒質の温 度を室温にする空冷式ラジエータで構成された熱交換手段とを具備するレーザ共 振器が提供される。 According to the present invention, a laser tube, a pair of reflecting mirrors provided in parallel on both sides of the laser tube, a pair of holding members to which the respective reflecting mirrors are attached, and the respective holding members are mutually provided. A plurality of support members that are fixedly supported and have communication holes formed therein, and a heat medium that circulates through the communication holes of each of the support members and that makes the temperature of each of the support members all the same, and the heat medium. There is provided a laser resonator including a circulation unit that circulates through the communication holes of the support members and a heat exchange unit that is an air-cooled radiator that brings the temperature of the heat medium to room temperature.
【００１０】[0010]
上述した構成を有する本考案のレーザ共振器によれば、レーザ管の両側に平行 に設けられた一対の反射鏡がそれぞれ取付けられた一対の保持部材は、内部に連 通孔が形成された複数の支持部材によって相互に固定支持される。また、循環手 段によって各支持部材の連通孔に熱媒質が循環される。そして、上記熱媒質は空 冷式ラジエータで構成された熱交換手段によってその温度が室温と一致するよう にされるため、全ての支持部材の温度は室温と同じ温度となり、これによって、 レーザ管の上部の支持部材と下部の支持部材との間に温度差がなくなり、２枚の 反射鏡は常に平行関係が維持されることになる。 According to the laser resonator of the present invention having the above-mentioned configuration, the pair of holding members, to which the pair of reflecting mirrors provided in parallel on both sides of the laser tube are attached, respectively, have a plurality of communication holes formed therein. Are fixedly supported by each other. In addition, the heat medium is circulated through the communication holes of each support member by the circulation means. Then, the temperature of the heat medium is made equal to the room temperature by the heat exchange means composed of the air-cooled radiator, so that the temperature of all the supporting members becomes the same temperature as the room temperature. There is no temperature difference between the upper support member and the lower support member, and the two reflecting mirrors are always maintained in parallel relationship.
【００１１】[0011]
以下、図面を参照して本考案に係るレーザ共振器の一実施例を説明する。 図１は本考案に係るレーザ共振器の一実施例を概略的に示す図であり、図２は 図１のレーザ共振器をＡ−Ａ線に沿って切断した断面図である。 図１に示されるように、レーザ共振器は、概略すると、レーザ管１、反射鏡２ ，４、保持部材３，５、および、支持部材６ａ〜６ｄを具備している。 An embodiment of a laser resonator according to the present invention will be described below with reference to the drawings. 1 is a schematic view showing an embodiment of a laser resonator according to the present invention, and FIG. 2 is a sectional view of the laser resonator of FIG. 1 taken along line AA. As shown in FIG. 1, the laser resonator is roughly provided with a laser tube 1, reflecting mirrors 2 and 4, holding members 3 and 5, and supporting members 6a to 6d.
【００１２】 レーザ管１は、例えば、２MHz 程度の高周波電圧を印加してレーザ管１の内部 １ｃ（図２参照）にグロー放電を生じさせ、また、グロー放電を行っているレー ザ管の内部１ｃにレーザガス（例えば、ＣＯ2 ，Ｎ2 ，Ｈｅの混合気体）を通過 させることによって、ＣＯ2 分子を励起するようになされている。そして、励起 されて高準位の分子振動状態にあるＣＯ2 分子が低準位の分子振動状態に遷移す るときに放出される所定の波長の光をレーザ管１の両側に設けられた２枚の反射 鏡２および４で反射して共振させる。そして、その反射光の一部をハーフミラー である反射鏡４からレーザ出力として取り出すようになされている。上記の反射 鏡２および４は、それぞれ保持部材３および５に傾きの調整可能として取付けら れ、また、保持部材３と５は４本の支持部材１０６ａ〜１０６ｄによって相互に 固定支持されている。The laser tube 1 applies a high-frequency voltage of, for example, about 2 MHz to cause glow discharge in the inside 1 c (see FIG. 2) of the laser tube 1 and also inside the laser tube that is performing glow discharge. CO 2 molecules are excited by passing a laser gas (for example, a mixed gas of CO 2 , N 2 , and He) through 1c. Then, the light of a predetermined wavelength emitted when the CO 2 molecule in the high-level molecular vibration state excited and transiting to the low-level molecular vibration state is provided on both sides of the laser tube 1. The sheet is reflected by the reflecting mirrors 2 and 4 and resonated. Then, a part of the reflected light is taken out as a laser output from the reflecting mirror 4 which is a half mirror. The reflecting mirrors 2 and 4 are attached to the holding members 3 and 5, respectively, so that their tilts can be adjusted, and the holding members 3 and 5 are fixedly supported by four supporting members 106a to 106d.
【００１３】 すなわち、反射鏡２と４とは正確に平行とされていなければ、レーザ管１内で 発生した光を２枚の反射鏡２および４で何度も反射して共振させることができな いが、反射鏡２と保持部材３との接続および反射鏡４と保持部材５との接続は、 それぞれベローズ２ａおよび４ａを介して行われ、２枚の反射鏡２および４と保 持部材３および５との取付け個所には、２枚の反射鏡２と４とが正確に平行とな るような微調整機構が設けられている。この微調整機構によって、２つの保持部 材３および５の工作上の平行状態からのずれを補償し、支持部材６ａ〜６ｄの長 さが個別に変化しない状態において、２枚の反射鏡２および４を完全に平行とす ることができるようになされている。また、レーザ管１と保持部材３および５と の接続個所にもベローズ１ａおよび１ｂが設けられ、レーザ管１の発熱による長 さの変化に対応するようになされている。That is, if the reflecting mirrors 2 and 4 are not exactly parallel to each other, the light generated in the laser tube 1 can be repeatedly reflected by the two reflecting mirrors 2 and 4 and resonated. However, the connection between the reflecting mirror 2 and the holding member 3 and the connection between the reflecting mirror 4 and the holding member 5 are performed via the bellows 2a and 4a, respectively, and the two reflecting mirrors 2 and 4 and the holding member are connected. A fine adjustment mechanism is provided at a mounting position of 3 and 5 so that the two reflecting mirrors 2 and 4 are exactly parallel to each other. This fine adjustment mechanism compensates for the deviation of the two holding members 3 and 5 from the parallel state in working, and when the lengths of the supporting members 6a to 6d do not change individually, the two reflecting mirrors 2 and It is designed so that 4 can be made completely parallel. Further, bellows 1a and 1b are also provided at connection points between the laser tube 1 and the holding members 3 and 5 so as to cope with a change in length due to heat generation of the laser tube 1.
【００１４】 図１および図２から明らかなように、支持部材６ａ〜６ｄの内部には、それら の長手軸方向にそれぞれ連通孔６１ａ〜６１ｄが形成されていて、それぞれの連 通孔６１ａ〜６１ｄには各支持部材６ａ〜６ｄの温度を一定とするための循環水 が流されている。この支持部材の連通孔６１ａ〜６１ｄに流される循環水の量は 、１つの支持部材の連通孔に付き、例えば、１０ｌ／分程度であり、これによっ て、レーザ管１からの発熱によるレーザ管の上部と下部との温度差を吸収し、全 ての支持部材６ａ〜６ｄの温度を一致させることができる。As is apparent from FIGS. 1 and 2, communication holes 61a to 61d are formed inside the support members 6a to 6d in the longitudinal axis direction thereof, and the communication holes 61a to 61d are formed. Circulating water for keeping the temperature of each of the support members 6a to 6d constant is flowed through the. The amount of circulating water flown into the communication holes 61a to 61d of the support member is, for example, about 10 l / min per communication hole of the support member, which allows the laser generated by the laser tube 1 to generate heat. It is possible to absorb the temperature difference between the upper part and the lower part of the tube and make the temperatures of all the supporting members 6a to 6d equal.
【００１５】 上記した支持部材６ａ〜６ｄの連通孔６１ａ〜６１ｄに流す循環水はポンプ７ によって送出され、図１中の矢印で示されるように、移送パイプ９、空冷式ラジ エータ８、および、支持部材の連通孔６１ａ〜６１ｄを介してポンプ７に戻され るようになされている。ここで、循環水の温度は空冷式ラジエータ８および移送 パイプ９を通ることによって熱交換され、高周波励起レーザが設置された場所の 室温に一致するようになる。そのため、季節や毎日の天気等による室温の変化に 対しても、恒温器等の特別な装置を必要とすることなく、常に、循環水の温度を 室温に一致させることができる。このように、循環水の温度は季節や毎日の天気 等による室温の変化に伴って変化し、従って、全ての支持部材６ａ〜６ｄの温度 が室温に一致して変化することになる。ここで、全ての支持部材６ａ〜６ｄは室 温によってその温度を変化させることになるが、この温度変化は支持部材６ａ〜 ６ｄの全てに対するもので各支持部材の相互間の温度差は、常に、存在しないの で一対の保持部材３および５に取付けられた２枚の反射鏡２と３との平行関係は 、常に、維持され続けることになる。The circulating water flowing through the communication holes 61a to 61d of the support members 6a to 6d is sent out by the pump 7, and as shown by an arrow in FIG. 1, a transfer pipe 9, an air-cooled radiator 8, and It is adapted to be returned to the pump 7 through the communication holes 61a to 61d of the support member. Here, the temperature of the circulating water is heat-exchanged by passing through the air-cooled radiator 8 and the transfer pipe 9, and becomes equal to the room temperature of the place where the high-frequency pump laser is installed. Therefore, even when the room temperature changes due to the season or daily weather, the temperature of the circulating water can always be matched with the room temperature without requiring a special device such as an incubator. In this way, the temperature of the circulating water changes with changes in room temperature due to seasons, daily weather, etc. Therefore, the temperatures of all the supporting members 6a to 6d change in accordance with room temperature. Here, all the supporting members 6a to 6d change their temperatures depending on the room temperature, but this temperature change is to all the supporting members 6a to 6d, and the temperature difference between the respective supporting members is always Since it does not exist, the parallel relationship between the two reflecting mirrors 2 and 3 attached to the pair of holding members 3 and 5 is always maintained.
【００１６】 以上の実施例において、ポンプ７で送出される循環水は空冷式ラジエータ８を 通って室温との熱交換が行われるように構成されているが、この空冷式ラジエー タ８が無くともポンプ７と支持部材の連通孔６１ａ〜６１ｄを繋ぐ移送パイプ９ によって室温との熱交換を行うことができる。この空冷式ラジエータ８を設けな いで移送パイプ９だけで熱交換を行う場合、移送パイプ９は熱伝導率の高い金属 パイプ等の材質で形成するのが好ましい。In the above-described embodiment, the circulating water delivered by the pump 7 is configured to exchange heat with room temperature through the air-cooled radiator 8, but without the air-cooled radiator 8, The transfer pipe 9 that connects the pump 7 and the communication holes 61a to 61d of the support member can perform heat exchange with room temperature. When heat is exchanged only by the transfer pipe 9 without providing the air-cooled radiator 8, the transfer pipe 9 is preferably made of a material such as a metal pipe having a high thermal conductivity.
【００１７】[0017]
以上、詳述したように、本考案に係るレーザ共振器は、反射鏡がそれぞれ取付 けられた一対の保持部材を相互に固定支持する支持部材の内部に連通孔を形成し 、循環手段により各支持部材の連通孔に熱媒質を循環させ、さらに、空冷式ラジ エータで構成された熱交換手段によりこの熱媒質の温度を室温に一致させること によって、室温と同じ温度の熱媒質を各支持部材の連通孔に循環させて全ての支 持部材の温度を一定とすることのできる簡単で低価格のレーザ共振器を提供する ことができる。 As described above in detail, in the laser resonator according to the present invention, a communication hole is formed in the inside of a supporting member that fixedly supports a pair of holding members to which reflecting mirrors are attached, respectively, and each of them is circulated by a circulating means. The heat medium is circulated through the communication holes of the support member, and the temperature of the heat medium is made to coincide with the room temperature by the heat exchanging means constituted by the air-cooled radiator, so that the heat medium at the same temperature as the room temperature is used for each support member. It is possible to provide a simple and low-cost laser resonator in which the temperature of all supporting members can be kept constant by circulating the laser resonator through the communicating hole.
【図１】本考案に係るレーザ共振器の一実施例を概略的
に示す図である。FIG. 1 is a diagram schematically showing an embodiment of a laser resonator according to the present invention.
【図２】図１のレーザ共振器をＡ−Ａ線に沿って切断し
た断面図である。FIG. 2 is a cross-sectional view of the laser resonator of FIG. 1 taken along line AA.
【図３】従来のレーザ共振器の問題点を説明するための
図である。FIG. 3 is a diagram for explaining a problem of a conventional laser resonator.
１…レーザ管 ２，４…反射鏡 ３，５…保持部材 ６ａ〜６ｄ…支持部材 ６１ａ〜６１ｄ…連通孔 ７…ポンプ ８…空冷式ラジエータ ９…移送パイプ DESCRIPTION OF SYMBOLS 1 ... Laser tube 2,4 ... Reflector 3,5 ... Holding member 6a-6d ... Support member 61a-61d ... Communication hole 7 ... Pump 8 ... Air-cooled radiator 9 ... Transfer pipe
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｓ 3/08 Ｚ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location H01S 3/08 Z
Claims (4)
（２，４）と、 該各反射鏡がそれぞれ取付けられた一対の保持部材
（３，５）と、 該各保持部材を相互に固定支持し、内部に連通孔が形成
された複数の支持部材（６ａ〜６ｄ）と、 該各支持部材の連通孔を循環し、該各支持部材の温度を
全て同一の温度とする熱媒質と、 該熱媒質を前記各支持部材の連通孔を介して循環させる
循環手段（７）と、 前記熱媒質の温度を室温にする空冷式ラジエータ（８）
で構成された熱交換手段と、 を具備するレーザ共振器。1. A laser tube (1), a pair of reflecting mirrors (2, 4) provided on both sides of the laser tube in parallel, and a pair of holding members (3, 3) to which the respective reflecting mirrors are attached. 5), a plurality of supporting members (6a to 6d) that fixedly support each of the holding members to each other and have communication holes formed therein, and the communication holes of the respective support members are circulated, A heat medium that keeps all the temperatures the same, a circulation means (7) that circulates the heat medium through the communication holes of the support members, and an air-cooled radiator (8) that raises the temperature of the heat medium to room temperature.
A laser resonator comprising:
ザ共振器。2. The laser resonator according to claim 1, wherein the heat medium is water.
る請求項１のレーザ共振器。3. The laser resonator according to claim 1, wherein the circulating means is a pump.
る移送パイプ（９）を備えている請求項１のレーザ共振
器。4. Laser cavity according to claim 1, wherein the heat exchange means comprises a transfer pipe (9) for transferring the heat medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP008024U JPH08256U (en) | 1995-08-02 | 1995-08-02 | Laser cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP008024U JPH08256U (en) | 1995-08-02 | 1995-08-02 | Laser cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08256U true JPH08256U (en) | 1996-02-06 |
Family
ID=18528301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP008024U Pending JPH08256U (en) | 1995-08-02 | 1995-08-02 | Laser cavity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08256U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50132223U (en) * | 1974-04-10 | 1975-10-30 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572209B2 (en) * | 1973-06-21 | 1982-01-14 | ||
| JPS5797689A (en) * | 1980-12-11 | 1982-06-17 | Matsushita Electric Ind Co Ltd | Laser oscillator |
| JPS57124487A (en) * | 1981-01-27 | 1982-08-03 | Ushio Inc | Gas laser oscillator |
| JPS5961978A (en) * | 1982-10-01 | 1984-04-09 | Nippon Sekigaisen Kogyo Kk | Laser irradiating device |
| JPS59207676A (en) * | 1983-05-11 | 1984-11-24 | Daihen Corp | Gas laser device |
-
1995
- 1995-08-02 JP JP008024U patent/JPH08256U/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572209B2 (en) * | 1973-06-21 | 1982-01-14 | ||
| JPS5797689A (en) * | 1980-12-11 | 1982-06-17 | Matsushita Electric Ind Co Ltd | Laser oscillator |
| JPS57124487A (en) * | 1981-01-27 | 1982-08-03 | Ushio Inc | Gas laser oscillator |
| JPS5961978A (en) * | 1982-10-01 | 1984-04-09 | Nippon Sekigaisen Kogyo Kk | Laser irradiating device |
| JPS59207676A (en) * | 1983-05-11 | 1984-11-24 | Daihen Corp | Gas laser device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50132223U (en) * | 1974-04-10 | 1975-10-30 |
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