JPH0822617B2 - Method for manufacturing optical information storage medium - Google Patents

Method for manufacturing optical information storage medium

Info

Publication number
JPH0822617B2
JPH0822617B2 JP61297549A JP29754986A JPH0822617B2 JP H0822617 B2 JPH0822617 B2 JP H0822617B2 JP 61297549 A JP61297549 A JP 61297549A JP 29754986 A JP29754986 A JP 29754986A JP H0822617 B2 JPH0822617 B2 JP H0822617B2
Authority
JP
Japan
Prior art keywords
optical information
storage medium
information storage
film
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61297549A
Other languages
Japanese (ja)
Other versions
JPS63151956A (en
Inventor
龍淳 夫
石 金
真 古木
陽子 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP61297549A priority Critical patent/JPH0822617B2/en
Publication of JPS63151956A publication Critical patent/JPS63151956A/en
Publication of JPH0822617B2 publication Critical patent/JPH0822617B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/06—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being organic
    • G03G5/0601—Acyclic or carbocyclic compounds
    • G03G5/0609—Acyclic or carbocyclic compounds containing oxygen
    • G03G5/0611—Squaric acid
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/06—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being organic
    • G03G5/0601—Acyclic or carbocyclic compounds
    • G03G5/0618—Acyclic or carbocyclic compounds containing oxygen and nitrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60—Organic compounds having low molecular weight

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  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、レーザーによる書き込みと再生が可能な光
情報記憶媒体などに適用できる新規な有機薄膜を有する
光情報記憶媒体の製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing an optical information storage medium having a novel organic thin film that can be applied to an optical information storage medium that can be written and reproduced by a laser.

（従来の技術） 従来、レーザー光を用いた光情報記録再生装置として
は、回転しているディスク状の記録媒体にレーザー光を
照射して情報の記録再生を行なう情報記録再生装置が知
られている。この種の情報記録再生装置に用いられる光
情報記憶媒体の記録層としては、カルコゲナイト系を中
心とする低融点金属が主として提案されている。又、最
近になって比較的長波長に吸収を有する有機色素を記録
層として用いた光情報記憶媒体が提案されている。(Prior Art) Conventionally, as an optical information recording / reproducing apparatus using a laser beam, an information recording / reproducing apparatus for irradiating a rotating disc-shaped recording medium with a laser beam to record / reproduce information is known. There is. As a recording layer of an optical information storage medium used in this type of information recording / reproducing apparatus, a low melting point metal mainly composed of chalcogenite is mainly proposed. Further, recently, an optical information storage medium using an organic dye having absorption at a relatively long wavelength as a recording layer has been proposed.

（発明が解決しようとする問題点） 光情報記憶媒体について、従来提案されている低融点
金属を用いたものは、保存性が悪い、分解能が低い、記
録密度が低い、コスト高になるなどの欠点を有してい
る。さらに、このような無機系材料を主成分として形成
した薄膜は、レーザー光に対する反射率が高すぎるた
め、レーザーの利用率が減少し、高感度特性が得られに
くい欠点を有している。(Problems to be Solved by the Invention) An optical information storage medium using a conventionally proposed low melting point metal has poor storage stability, low resolution, low recording density, high cost, etc. It has drawbacks. Further, the thin film formed by using such an inorganic material as a main component has a drawback that since the reflectance to laser light is too high, the utilization factor of the laser is reduced and it is difficult to obtain high sensitivity characteristics.

又、比較的長波長に吸収を有する有機色素を記録層と
して用いたものについては、熱及び光に対し安定性が低
く分解し易いなどの問題点を有する。Further, the one using an organic dye having absorption in a relatively long wavelength as a recording layer has a problem that it has low stability against heat and light and is easily decomposed.

又、このような有機系色素を主成分とする有機薄膜
は、先の無機系薄膜とは逆に反射率が低いという問題点
を有している。反射率が低いとレーザー光により記録さ
れた部分と未記録部分との反射率に関するコントラスト
が低くなり記録された情報の再生の際十分高いS/N比が
得られにくい。Further, such an organic thin film containing an organic dye as a main component has a problem that the reflectance is low, contrary to the above-mentioned inorganic thin film. When the reflectance is low, the contrast of the reflectance between the portion recorded by the laser beam and the unrecorded portion is low, and it is difficult to obtain a sufficiently high S / N ratio when reproducing the recorded information.

本発明は、このような状況に鑑みなされたもので、高
機能の新しいタイプの有機薄膜を有する光情報記憶媒体
の製造方法を提供することを目的とするものである。The present invention has been made in view of such circumstances, and an object of the present invention is to provide a method of manufacturing an optical information storage medium having a new type of organic thin film with high functionality.

更に、本発明は高度に配向状態が制御された有機薄膜
を有する光情報記憶媒体の製造方法を提供することを目
的とする。Another object of the present invention is to provide a method for manufacturing an optical information storage medium having an organic thin film whose orientation state is highly controlled.

本発明は、更に光感度で高い信頼性を有する新規な光
情報記憶媒体の製造方法を提供することを目的とする。It is an object of the present invention to provide a novel method for manufacturing an optical information storage medium having high photosensitivity and high reliability.

（問題点を解決するための手段及び作用） 本発明は、上記光情報記憶媒体の製造方法に関するも
のであり、水の表面上に上記一般式で示されるスクエア
リリウム染料を含有する単分子膜を形成し、その単分子
膜と適当な基板とを接触させることにより、基板表面上
にスクエアリリウム染料の薄膜を形成させることを特徴
とする。(Means and Actions for Solving Problems) The present invention relates to a method for manufacturing the above optical information storage medium, which comprises a monomolecular film containing a squarylium dye represented by the above general formula on the surface of water. It is characterized in that a thin film of squarylium dye is formed on the surface of the substrate by forming it and bringing the monomolecular film into contact with a suitable substrate.

次に、本発明において使用されるスクエアリリウム染
料の代表例をあげる。Next, typical examples of the square lilium dye used in the present invention will be given.

上記のスクエアリリウム染料は、H.E.Sprenger and
W.Ziegenbein;Angew.Chem.internal.Edit.,Vol.5,p894
（1966）に記載の方法と類似の方法によって製造するこ
とができる。 The above square lilium dye is HESprenger and
W.Ziegenbein; Angew.Chem.internal.Edit., Vol.5, p894
It can be produced by a method similar to the method described in (1966).

本発明において、光情報記憶媒体は、下記のように水
面上で単分子膜を形成し、適当な基板上に移しとる方法
によって形成される。すなわち、水の表面上に前記一般
式で示されるスクエアリリウム染料１種以上を含有する
高度に配向制御された単分子膜を形成し、その単分子膜
と適当な基板とを繰り返し接触させることにより、基板
表面上にスクエアリリウム染料を含む薄膜を形成するこ
とができる。In the present invention, the optical information storage medium is formed by a method of forming a monomolecular film on the water surface and transferring it to an appropriate substrate as described below. That is, by forming a highly oriented monomolecular film containing one or more squarylium dyes represented by the above general formula on the surface of water and repeatedly contacting the monomolecular film with a suitable substrate. It is possible to form a thin film containing a square lilium dye on the surface of a substrate.

本発明におけるスクエアリリウム染料を含有する高度
に配向制御された単分子膜の累積方法としては、膜物質
を溶解した液体を水面上に展開し、その展開膜は一定の
表面圧で圧縮し、単分子膜を形成しながら基板と接触さ
せ、移しとるラングミュア ブロジェット（Langmuir−
Blodgett）法、水平付着法、回転円筒法等が用いられ
る。例えば、ラングミュア ブロジェット法では、ま
ず、スクエアリリウム染料及び必要に応じて他の物質を
有機溶剤に溶解し、これを水面上に展開してスクエアリ
リウム染料を膜状に析出させる。次に、この析出物が水
面上を自由に拡散して拡がりすぎないように仕切板を設
け、展開面積を制御して膜物質の集合状態を制御し、表
面圧を徐々に上昇させ、累積膜の製造に適する表面圧
（π）を設定することができる。本発明に用いられるス
クエアリリウム染料の場合、染料の種類、マトリックス
分子の割合、設定温度、金属イオンの種類の濃度、pHな
どにより異なるが、累積膜の製造に適する表面圧は、π
＝５〜50dyn/cmであり、望ましくはπ＝10〜30dyn/cmで
ある。この表面圧を維持しながら、静かに清浄な基板を
垂直に水中で上下させると、単分子膜は基板上に移り、
これを繰り返すことにより累積膜は基板上に均一に形成
される。As a method of accumulating a highly oriented controlled monomolecular film containing a squarylium dye in the present invention, a liquid in which a film substance is dissolved is developed on a water surface, and the developed film is compressed at a constant surface pressure to obtain The Langmuir-Blodgett (Langmuir-
Blodgett) method, horizontal attachment method, rotating cylinder method, etc. are used. For example, in the Langmuir-Blodgett method, first, a squarylium dye and other substances, if necessary, are dissolved in an organic solvent, and this is spread on a water surface to deposit the squarylium dye in a film form. Next, a partition plate is provided to prevent this precipitate from freely diffusing on the water surface and spreading too much, and controlling the spreading area to control the aggregated state of the film substances, gradually increasing the surface pressure, and increasing the cumulative film. It is possible to set a surface pressure (π) suitable for manufacturing In the case of the squarylium dye used in the present invention, the type of the dye, the ratio of the matrix molecules, the set temperature, the concentration of the type of metal ions, the pH, etc., the surface pressure suitable for the production of the cumulative film, π
= 5 to 50 dyn / cm, preferably π = 10 to 30 dyn / cm. While maintaining this surface pressure, when gently moving the clean substrate vertically up and down in water, the monomolecular film moves onto the substrate,
By repeating this, the cumulative film is uniformly formed on the substrate.

本発明に使用される膜形成物質の溶剤としては、膜形
成物質を溶解し、水と相溶せず、かつ、揮発性の有機溶
剤であればどのような物でも使用可能であるが、例え
ば、ジクロルメタン、クロロホルム、トリクロルエタン
のようなハロゲン化炭化水素、ベンゼン、トルエン、キ
シレンなどの芳香族系炭化水素、イソプロパノール、ブ
タノール等のアルコール類、メチルエチルケトン、シク
ロヘキサノン等のケトン類、テトラヒドロフラン、ジオ
キサン、エチレングリコールモノメチルエーテル等のエ
ーテル類、酢酸メチル、酢酸エチル、酢酸ブチル等のエ
ステル類等を用いることができる。As the solvent of the film-forming substance used in the present invention, it is possible to use any substance as long as it dissolves the film-forming substance, is incompatible with water, and is a volatile organic solvent. Halogenated hydrocarbons such as dichloromethane, chloroform and trichloroethane, aromatic hydrocarbons such as benzene, toluene and xylene, alcohols such as isopropanol and butanol, ketones such as methyl ethyl ketone and cyclohexanone, tetrahydrofuran, dioxane, ethylene glycol Ethers such as monomethyl ether and esters such as methyl acetate, ethyl acetate and butyl acetate can be used.

本発明による光情報記憶媒体を製造するために使用す
る累積装置は、表面圧を常にモニターでき、しかも常に
一定の表面圧を自動的に維持できる制御装置を備えてい
ることが望ましい。具体的には協和界面科学製累積装
置、ラウダ（Lauda）製累積装置、ジョイス−レーベル
（Joyce−Loebel）製累積装置が使用可能である。The accumulator used to manufacture the optical information storage medium according to the present invention preferably comprises a controller capable of constantly monitoring the surface pressure and automatically maintaining a constant surface pressure at all times. Specifically, a Kyowa Interface Science accumulator, a Lauda accumulator, and a Joyce-Loebel accumulator can be used.

本発明による光情報記憶媒体において、光エネルギー
を吸収し、光情報の記録を行なう記録層は、光を吸収す
る分子１種類以上の成膜分子からなる。In the optical information storage medium according to the present invention, the recording layer that absorbs light energy and records optical information is composed of one or more kinds of film-forming molecules that absorb light.

本発明による光情報記憶媒体において、上記スクエア
リリウム染料のうち、ただ１種類の染料分子からなる単
分子膜は勿論、特徴の異なる２種類以上の染料分子を同
一単分子膜中に混在させた混合単分子膜も使用すること
ができ、又、単分子膜を２層以上累積された多層膜にお
いて、同一種類の単分子膜、混合単分子膜の累積膜、
又、異なる種類の単分子膜、混合単分子膜の累積膜も使
用可能である。In the optical information storage medium according to the present invention, of the above-mentioned square lilium dyes, not only a monomolecular film consisting of only one kind of dye molecule but also two or more kinds of dye molecules having different characteristics are mixed in the same monomolecular film A monomolecular film can also be used, and in a multilayer film in which two or more monomolecular films are accumulated, a monomolecular film of the same type, a mixed monomolecular film,
Also, different types of monolayers and mixed monolayers can be used.

単分子膜の安定性を改善するための膜形成材料として
は、アラキジン酸、ステアリン酸などの脂肪酸、ヘキサ
デカン、オクタデカンなどのパラフィン系炭化水素、1
0,12−ペンタコサジイン酸、10,12−トリコサジイン酸
などのジアセチレン系化合物などを利用することができ
る。Film-forming materials for improving the stability of monolayers include fatty acids such as arachidic acid and stearic acid, paraffin hydrocarbons such as hexadecane and octadecane, 1
Diacetylene compounds such as 0,12-pentacosadiynoic acid and 10,12-tricosadiynoic acid can be used.

本発明の製造方法によって製造される光情報記憶媒体
は、基本的には第１図に示すように、基板１と有機薄膜
からなる記録層２とから構成されるが、必要に応じてさ
らに下引層、保護層などを設けることもできる。The optical information storage medium manufactured by the manufacturing method of the present invention basically comprises a substrate 1 and a recording layer 2 composed of an organic thin film as shown in FIG. A draw layer, a protective layer, etc. can also be provided.

基板１としては、ポリエステル、アクリル樹脂、ポリ
カーボネート、ポリスルホン、ポリオレフィン、フェノ
ール樹脂、エポキシ樹脂、ポリアミド、ポリイミドなど
のプラスチック、アルミニウムなどの金属やガラスなど
を用いることができる。As the substrate 1, polyester, acrylic resin, polycarbonate, polysulfone, polyolefin, phenol resin, epoxy resin, polyamide, plastic such as polyimide, metal such as aluminum, glass, or the like can be used.

本発明による光情報記憶用媒体において、第２図に示
すように、基板１と記録層２との間に反射層３を設ける
ことができる。反射層としては、アルミニウム、銀、ク
ロムなどの金属の蒸着膜を利用することができる。In the optical information storage medium according to the present invention, as shown in FIG. 2, a reflective layer 3 can be provided between the substrate 1 and the recording layer 2. As the reflective layer, a vapor deposited film of a metal such as aluminum, silver or chromium can be used.

上記の本発明で使用される基板は、表面をアラキジン
酸カドミウム又はステアリン酸鉄などで疎水化処理をし
て使用することもできる。The above-mentioned substrate used in the present invention can be used after the surface thereof is subjected to a hydrophobic treatment with cadmium arachidate or iron stearate.

（実施例） 以下、実施例によって本発明を説明する。(Example) Hereinafter, the present invention will be described with reference to an example.

実施例１ 前記一般式（Ｉ）で表わされるスクエアリリウム染料
のうち、Ｒがｎ−プロピル基である染料とアラキジン酸
とをモル比1:1でクロロホルムに溶解する。この溶液を2
0℃のCdCl2 2.5×10-4mol/、KHCO3 ３×10-5mol/
の濃度に調整した次の表面上に展開し、クロロホルム蒸
発後、累積表面圧が30dyn/cmにバリヤーを移動し膜面積
を圧縮して単分子膜を作成した。Example 1 Among the squarylium dyes represented by the general formula (I), a dye in which R is an n-propyl group and arachidic acid are dissolved in chloroform at a molar ratio of 1: 1. 2 this solution
CdCl 2 2.5 × 10 -4 mol /, KHCO 3 3 × 10 -5 mol / at 0 ℃
It was developed on the next surface adjusted to the above concentration, and after evaporation of chloroform, the barrier was moved to a cumulative surface pressure of 30 dyn / cm and the membrane area was compressed to form a monomolecular membrane.

この単分子膜をアルミニウム反射膜のついたガラス基
板に50層累積させて、厚さ約1400オングストロームの記
録層を形成し、光情報記憶媒体を得た。Fifty layers of this monomolecular film were accumulated on a glass substrate having an aluminum reflective film to form a recording layer having a thickness of about 1400 Å, and an optical information storage medium was obtained.

このようにして得られた光情報記憶媒体を、発振波長
780nmのガリウム−アルミニウム−ヒ素半導体レーザー
を用い、照射面パワー3.2mW、ビーム径1.5μｍで書き込
みを行なったところ、均一かつ明瞭な形状のスポットが
得られた。The optical information storage medium obtained in this way is
When a 780 nm gallium-aluminum-arsenic semiconductor laser was used for writing with an irradiation surface power of 3.2 mW and a beam diameter of 1.5 μm, spots with a uniform and clear shape were obtained.

又、この記録部に低出力の半導体レーザーを照射し、
反射光の検知を行なったところ、45dBと良好であった。Also, irradiating this recording section with a low-power semiconductor laser,
When the reflected light was detected, it was good at 45 dB.

（発明の効果） 本発明の製造方法によって製造される光情報記憶媒体
は、前記一般式（Ｉ）で示されるスクエアリリウム染料
を含有する有機薄膜を有するから、吸収スペクトルがシ
ャープであって、高感度で高い信頼性を有する。(Effect of the Invention) The optical information storage medium manufactured by the manufacturing method of the present invention has an organic thin film containing the squarylium dye represented by the general formula (I), and therefore has a sharp absorption spectrum and high It has high sensitivity and high reliability.

更に、本発明の光情報記憶媒体の製造方法によれば、
基板上に、非常に薄い膜を、膜形成分子が高度に配向制
御した状態で形成することができ、しかも均質な集合状
態の薄膜を、極めて簡単かつ安価に製造することができ
る。Furthermore, according to the method for manufacturing an optical information storage medium of the present invention,
It is possible to form a very thin film on a substrate in a state in which the film forming molecules have a highly controlled orientation, and it is possible to manufacture a thin film in a homogeneous aggregate state very easily and at low cost.

【図面の簡単な説明】[Brief description of drawings]

第１図及び第２図は、それぞれ本発明の製造方法によっ
て製造される光情報記憶媒体の一例の模式図である。 １……基板、２……記録層、３……反射層。FIG. 1 and FIG. 2 are schematic views of an example of the optical information storage medium manufactured by the manufacturing method of the present invention. 1 ... Substrate, 2 ... Recording layer, 3 ... Reflective layer.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐藤 陽子 神奈川県海老名市本郷2274番地 富士ゼロ ックス株式会社海老名事業所内 (56)参考文献 特開 昭60−131537（ＪＰ，Ａ) 特開 昭58−141246（ＪＰ，Ａ) 特開 昭56−46221（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoko Sato 2274 Hongo, Ebina City, Kanagawa Fuji Xerox Co., Ltd. Ebina Works (56) Reference JP-A-60-131537 (JP, A) JP-A-58- 141246 (JP, A) JP-A-56-46221 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】水の表面上に、下記一般式（Ｉ）で示され
るスクエアリリウム染料を含有する単分子膜を形成し、
その単分子膜と適当な基板とを接触させることにより、
基板表面上にスクエアリリウム染料の薄膜を形成するこ
とを特徴とする光情報記憶媒体の製造方法。 （式中、Ｒはアルキル基を示す。）1. A monomolecular film containing a squarylium dye represented by the following general formula (I) is formed on the surface of water,
By contacting the monolayer with a suitable substrate,
A method for manufacturing an optical information storage medium, which comprises forming a thin film of square lilium dye on a substrate surface. (In the formula, R represents an alkyl group.)
JP61297549A 1986-12-16 1986-12-16 Method for manufacturing optical information storage medium Expired - Fee Related JPH0822617B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61297549A JPH0822617B2 (en) 1986-12-16 1986-12-16 Method for manufacturing optical information storage medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61297549A JPH0822617B2 (en) 1986-12-16 1986-12-16 Method for manufacturing optical information storage medium

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6191345A Division JP2560269B2 (en) 1994-07-22 1994-07-22 Method for manufacturing electrophotographic photosensitive layer

Publications (2)

Publication Number Publication Date
JPS63151956A JPS63151956A (en) 1988-06-24
JPH0822617B2 true JPH0822617B2 (en) 1996-03-06

Family

ID=17847978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61297549A Expired - Fee Related JPH0822617B2 (en) 1986-12-16 1986-12-16 Method for manufacturing optical information storage medium

Country Status (1)

Country Link
JP (1) JPH0822617B2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646221A (en) * 1979-09-20 1981-04-27 Nippon Telegr & Teleph Corp <Ntt> Optically recording medium
DE3274723D1 (en) * 1981-09-25 1987-01-29 Ici Plc Method of applying thin films to substrates
JPS60131537A (en) * 1983-12-21 1985-07-13 Fuji Xerox Co Ltd Electrophotographic sensitive body

Also Published As

Publication number Publication date
JPS63151956A (en) 1988-06-24

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