JPH0821775A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPH0821775A
JPH0821775A JP6157160A JP15716094A JPH0821775A JP H0821775 A JPH0821775 A JP H0821775A JP 6157160 A JP6157160 A JP 6157160A JP 15716094 A JP15716094 A JP 15716094A JP H0821775 A JPH0821775 A JP H0821775A
Authority
JP
Japan
Prior art keywords
connection port
side connection
diaphragm
pressure
strain gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6157160A
Other languages
Japanese (ja)
Inventor
Keiji Sasaki
慶治 佐々木
Masayuki Furuguchi
眞之 古口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUJI KOKI SEISAKUSHO KK
Fujikoki Corp
Original Assignee
FUJI KOKI SEISAKUSHO KK
Fujikoki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUJI KOKI SEISAKUSHO KK, Fujikoki Corp filed Critical FUJI KOKI SEISAKUSHO KK
Priority to JP6157160A priority Critical patent/JPH0821775A/en
Priority to EP95104738A priority patent/EP0691533A3/en
Priority to US08/423,147 priority patent/US5587535A/en
Priority to KR1019950014496A priority patent/KR0159023B1/en
Publication of JPH0821775A publication Critical patent/JPH0821775A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To provide a pressure sensor which realizes an electric connection between strain gauge and printed board without being influenced by vibrations and shocks at diaphragm. CONSTITUTION:The pressure sensor is provided with a connection mouth body 2 on a press-receiving side which has a diaphragm 8 at the end face and a strain gauge 9 n the surface of the diaphragm 8, an intermediate body set to surround the strain gauge 9, and a connection mouth body 4 on the signal side which is to be engaged with the end face side of the connection mouth body 2 to cover the opening of the intermediate body. A printed board 21 is arranged at the intermediate body. Moreover, the printed board 21 is electrically connected with the strain gauge 9 by a terminal element 14 projecting from the strain gauge 9 and a conductive part at an edge of the printed board 21 sliding in touch with the terminal element 14. Accordingly, vibrations and shocks generated at the diaphragm 8 are not transmitted directly to the printed board 21. At the same time, the vibrations and shocks are absorbed through a relative shift of the terminal element 14 and the conductive part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、配管などを流れる流体
の圧力を検知する圧力センサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor for detecting the pressure of a fluid flowing through a pipe or the like.

【0002】[0002]

【従来の技術】圧力配管をもつシステム、例えば自動車
用空気調和装置では、冷凍サイクル中の冷媒圧力を用い
て、所定の制御を行うようにしている。こうした流体圧
力の検知には、圧力センサが用いられている。
2. Description of the Related Art In a system having pressure piping, for example, an air conditioner for an automobile, a predetermined control is performed by using a refrigerant pressure in a refrigeration cycle. A pressure sensor is used to detect such fluid pressure.

【0003】この種の圧力センサは、通常、特許出願公
表 平2−503831号に開示されているように、二
分割された本体からなり、本体の一方を流体の圧力を受
ける側とし、他方を圧力に応じた出力電圧信号を出力す
る側とした構造が用いられている。
A pressure sensor of this type is usually composed of a main body divided into two, as disclosed in Japanese Patent Application Laid-Open No. 2-503831, and one of the main bodies is a side receiving a fluid pressure and the other is a side. A structure in which an output voltage signal corresponding to the pressure is output is used.

【0004】具体的には、流体の圧力を受ける側は、図
10に示されるように一方の端部に圧力導入口(図示し
ない)を有し、他方の端面に歪ゲ−ジaが表面に接着固
定されたダイヤフラムbをもつ圧力受側接続口体cから
構成してある。
Specifically, the side receiving the pressure of the fluid has a pressure introducing port (not shown) at one end as shown in FIG. 10, and a strain gauge a is formed on the other end surface. It comprises a pressure receiving side connection port body c having a diaphragm b adhered and fixed thereto.

【0005】また信号を出力する側は、この圧力受側接
続口体cの端面と組合う信号側接続口体dから構成して
ある。ところで、圧力センサは、ダイヤフラムbの変位
で歪む歪ゲ−ジaからの出力を増幅して、外部に出力す
ることが行われている。
The side for outputting a signal is composed of a signal side connection port body d which is combined with the end face of the pressure receiving side connection port body c. By the way, the pressure sensor amplifies the output from the strain gauge a which is distorted by the displacement of the diaphragm b and outputs it to the outside.

【0006】これには、特許出願公表 平2−5038
31号に開示されているように、増幅するに必要な電子
部品を搭載したプリント基板をセンサ内部に設け、この
プリント基板に歪ゲ−ジと信号側接続口体に在るタ−ミ
ナル部(外部機器と接続可能な端子)との間を電気的に
接続することが行われている。
[0006] The patent application publication No. Hei 2-5038
As disclosed in No. 31, a printed circuit board on which electronic components necessary for amplification are mounted is provided inside the sensor, and the printed circuit board has a strain gauge and a terminal portion ( Electrical connection is being made between external devices and connectable terminals).

【0007】具体的には、図10に示されるように歪ゲ
−ジaと対応する信号側接続口体dの端面に凹部fを形
成して、歪ゲ−ジaの回りに機器収容室gを形成する。
歪ゲ−ジaに周辺部には、略コ字状に形成された複数個
のクリップhを半田付けしておき、これらクリップhに
プリント基板iの縁部を嵌合させて、プリント基板iの
全体を、機器収容室gに収容、詳しくは歪ゲ−ジaの上
方に収容させている。
Specifically, as shown in FIG. 10, a recess f is formed in the end face of the signal side connecting port body d corresponding to the strain gauge a, and a device accommodating chamber is provided around the strain gauge a. form g.
A plurality of clips h formed in a substantially U shape are soldered on the peripheral portion of the strain gauge a, and the edges of the printed circuit board i are fitted to these clips h to form the printed circuit board i. The entire device is housed in the device housing chamber g, more specifically above the strain gauge a.

【0008】またクリップhの先端部はプリント基板i
に半田付けされ、プリント基板iを保持するクリップh
を利用して、プリント基板iと歪ゲ−ジaとの間を電気
的に接続している。なお、プリント基板iと信号側接続
口体dのタ−ミナルとは図示しない接続部構造で電気的
に接続してある。
The tip of the clip h has a printed circuit board i.
Clip h that is soldered to and holds the printed circuit board i
Is used to electrically connect the printed circuit board i and the strain gauge a. The printed circuit board i and the terminal of the signal side connection port body d are electrically connected by a connection portion structure not shown.

【0009】[0009]

【発明が解決しようとする課題】こうした圧力センサの
ダイヤフラムbは、構造上、流体の圧力変化を要因とし
て、振動,衝撃などが生じる挙動を示す。ところが、ダ
イヤフラムbの表面に在る歪ゲ−ジaに、クリップhを
介して、プリント基板iを保持する構造だと、ダイヤフ
ラムbの振動,衝撃が、プリント基板iを保持している
クリップhの半田付け部j,さらにはプリント基板i
へ、そのまま伝わる。
The diaphragm b of such a pressure sensor structurally exhibits a behavior in which vibration, impact, etc. occur due to a change in fluid pressure. However, in the structure in which the printed circuit board i is held by the strain gauge a on the surface of the diaphragm b via the clip h, the vibration and shock of the diaphragm b cause the clip h holding the printed circuit board i. Soldering part j, and further printed circuit board i
To be transmitted as is.

【0010】このため、発生する応力の影響を受けて、
半田付け部jの半田、プリント基板iの半田付けしてい
る半田が、歪ゲ−ジa,プリント基板iから剥がれた
り、クラックが発生したりするおそれがあった。
Therefore, under the influence of the generated stress,
There is a risk that the solder of the soldering portion j and the solder of the printed circuit board i may be peeled off from the strain gauge a and the printed circuit board i, or cracks may be generated.

【0011】特に自動車用に使用したときには、外部か
らの振動,衝撃が加わったり、大きな温度変化が加わっ
た場合も、同様に半田付け部分に応力が発生し、同部分
に不具合を発生するおそれがあった。
Particularly when used for automobiles, even when external vibration or shock is applied or a large temperature change is applied, stress is similarly generated in the soldered portion, which may cause a defect in the soldered portion. there were.

【0012】このようなことが起きると、歪ゲ−ジaか
らプリント基板iに至る導電経路が損なわれ、圧力セン
サが正しく機能しないおそれがある。本発明はこのよう
な事情に鑑みてなされたもので、その目的とするところ
は、ダイヤフラムで発生する振動,衝撃の影響を受けな
い、歪ゲ−ジとプリント基板との間における電気的接続
を実現することができる圧力センサを提供することにあ
る。
When this happens, the conductive path from the strain gauge a to the printed circuit board i is damaged, and the pressure sensor may not function properly. The present invention has been made in view of such circumstances, and an object thereof is to provide an electrical connection between a strain gauge and a printed circuit board, which is not affected by vibration or shock generated in a diaphragm. It is to provide a pressure sensor that can be realized.

【0013】[0013]

【課題を解決するための手段】上記課題を解決するため
に請求項1に記載の発明は、端面に圧力導入口からの圧
力を受けて変位するダイヤフラムを有し、かつこのダイ
ヤフラムの表面に同ダイヤフラムの歪みを検出する歪ゲ
−ジを有して構成される圧力受側接続口体と、この圧力
受側接続口体の端面部に歪ゲ−ジの周側を囲むように設
けられた短筒形の中間体と、この中間体の開口を被うよ
うに圧力受側接続口体の端面側と組合って設けられ、中
間体内に周囲が閉塞された機器収容室を形成する、外部
機器と接続可能な端子を有してなる信号側接続口体と、
中間体に固定されて機器収容室に配置され、電子部品が
搭載されてなるプリント基板と、このプリント基板と信
号側接続口体の端子との間を電気的に接続する第1の接
続部と、歪ゲ−ジとプリント基板との間を、ダイヤフラ
ムが変位する方向と略直角な方向から相互が摺接する二
つの摺接部材との摺接によって電気的に接続してなる第
2の接続部とを有して、圧力センサを構成したことにあ
る。
In order to solve the above-mentioned problems, the invention according to claim 1 has a diaphragm on its end face which is displaced by receiving pressure from a pressure introducing port, and which is the same on the surface of this diaphragm. A pressure receiving side connection port body having a strain gauge for detecting the strain of the diaphragm, and an end face portion of the pressure receiving side connection port body provided so as to surround the circumferential side of the strain gauge. A short tube-shaped intermediate body is provided in combination with the end face side of the pressure receiving side connection port body so as to cover the opening of the intermediate body, and forms a device-accommodating chamber whose periphery is closed in the intermediate body. A signal side connection body having a terminal connectable to a device,
A printed circuit board fixed to the intermediate body and arranged in the device accommodating chamber, on which electronic components are mounted, and a first connection portion for electrically connecting the printed circuit board and the terminal of the signal side connection port body. A second connecting portion electrically connecting the strain gauge and the printed circuit board by sliding contact with two sliding contact members that are in sliding contact with each other in a direction substantially perpendicular to the direction in which the diaphragm is displaced. And having a pressure sensor.

【0014】請求項2に記載の発明は、上記目的を簡単
な構造で実現するために、請求項1に記載の第2の接続
部を、歪ゲ−ジに有した、同歪ゲ−ジの端子部から前記
プリント基板へ向け前記ダイヤフラムが変位する方向に
延びる端子片と、プリント基板に有した、端子片とダイ
ヤフラムが変位する方向と略直角な方向から摺接する導
電部とを有して構成したことにある。
According to a second aspect of the present invention, in order to achieve the above object with a simple structure, the strain gauge has the second connecting portion according to the first aspect. A terminal piece extending in the direction in which the diaphragm is displaced from the terminal portion to the printed circuit board, and a conductive portion which is provided in the printed circuit board and is in sliding contact from a direction substantially perpendicular to the direction in which the terminal piece and the diaphragm are displaced. I have configured it.

【0015】請求項3に記載の発明は、さらに上記目的
に加え、プリント基板に応力を与えずにプリント基板と
信号側接続口体との接続を可能とするために、請求項1
に記載の第1の接続部を、タ−ミナルと導通するもので
あって、信号側接続口体の中間体の開口と向き合う面か
ら中間体に向かって突き出る差込部と、中間体に有し信
号側接続口体の装着にしたがって差込部が差し込まれる
リセプタクル部と、このリセプタクル部とプリント基板
との間を電気的に接続する変位可能な導電部材とを有し
て構成したことにある。
According to a third aspect of the present invention, in addition to the above object, the first aspect of the present invention enables connection between the printed circuit board and the signal-side connection port without applying stress to the printed circuit board.
The first connecting part described in 1) is electrically connected to the terminal, and has an insertion part protruding toward the intermediate body from a surface facing the opening of the intermediate body of the signal-side connection port body, and is provided in the intermediate body. It is configured to have a receptacle portion into which the insertion portion is inserted according to the mounting of the signal-side connection port body, and a displaceable conductive member that electrically connects the receptacle portion and the printed board. .

【0016】請求項4に記載の発明は、さらに上記目的
に加え、歪ゲ−ジをダイヤフラムに高精度で、かつ剥が
れなどの設置上の問題なくで設けることを可能とするた
めに、請求項1に記載の歪ゲ−ジを、ダイヤフラムの表
面にゲ−ジパタ−ンを直接、形成して構成したことにあ
る。
In addition to the above object, the invention according to claim 4 further provides a strain gauge on the diaphragm with high accuracy and without any installation problem such as peeling. The strain gauge described in 1 is constituted by directly forming a gauge pattern on the surface of the diaphragm.

【0017】請求項5に記載の発明は、さらに上記目的
に加え、リ−クがないおねじタイプの圧力センサを実現
するために、請求項1に記載の圧力受側接続口体を、金
属部材を鍛造加工で、内部の通路を、ダイヤフラム側に
臨む通路端を大とし、圧力導入口に連通する通路端を小
とした袋状に成形し、圧力導入口が形成された口部の外
周部におねじ部を形成して構成したことにある。
According to a fifth aspect of the invention, in addition to the above object, in order to realize a male screw type pressure sensor without a leak, the pressure receiving side connection port body according to the first aspect is made of metal. By forging the member, the inner passage is formed into a bag shape with a large passage end facing the diaphragm side and a small passage end communicating with the pressure inlet, and the outer periphery of the mouth where the pressure inlet is formed. This is because the screw part is formed on the part.

【0018】請求項6に記載の発明は、これに加え、さ
らに別途、結合手段を必要とせずに圧力受側接続口体,
中間体,信号側接続口体との三者を結合することを可能
にするために、圧力受側接続口体を、本体部の外周部
に、同本体部と同心状に張り出て、中間体、前記信号受
側接続口体の周囲を覆う薄肉金属の筒状体を有し、同筒
状体の先端部に、同先端部が変形されて、信号受側接続
口体の外周部と係合する係合部を有して構成したことに
ある。
In addition to the above, the invention according to claim 6 further comprises a pressure receiving side connection port body, which does not require a separate connecting means.
In order to enable the three members of the intermediate body and the signal side connection port body to be coupled, the pressure receiving side connection port body is extended to the outer peripheral portion of the main body portion concentrically with the main body portion and the intermediate portion. And a peripheral portion of the signal receiving side connection port body, which has a thin metal tubular body covering the periphery of the signal receiving side connection port body, the distal end portion being deformed at the tip end portion of the tubular body. It is configured to have an engaging portion that engages.

【0019】[0019]

【作用】請求項1に記載の発明によると、プリント基板
は、歪ゲ−ジでなく、この歪ゲ−ジとは別体な中間体に
独立して設けられる。と同時に同プリント基板と歪ゲ−
ジとの間は、ダイヤフラムが変位する方向に対して摺接
自在となる二つの摺動部材を介して電気的接続に接続さ
れる。
According to the first aspect of the present invention, the printed circuit board is independently provided not as the strain gauge but as an intermediate body which is separate from the strain gauge. At the same time, the same printed circuit board and strain gauge
It is connected to the electric connection via two sliding members which are slidable in the direction in which the diaphragm is displaced.

【0020】これにより、ダイヤフラムで生じる振動,
衝撃は、プリント基板には直接、伝わない。しかも、ダ
イヤフラムで生じる振動,衝撃は、歪ゲ−ジとプリント
基板とを電気的に接続している二つの摺動部材の相対変
位によって吸収される。
As a result, the vibration generated in the diaphragm,
Impact is not directly transmitted to the printed circuit board. Moreover, the vibrations and shocks generated by the diaphragm are absorbed by the relative displacement of the two sliding members that electrically connect the strain gauge and the printed circuit board.

【0021】このことは、プリント基板に発生する応力
は最小限に抑制され、従来のように半田付けした半田が
剥がれたり、クラックが発生したりすることが回避され
て、歪ゲ−ジからプリント基板に至る導電経路を良好に
保つ。
This means that the stress generated on the printed circuit board is suppressed to a minimum, peeling of the solder that has been soldered as in the conventional case and the occurrence of cracks are avoided, and printing is performed from the strain gauge. Maintain a good conductive path to the substrate.

【0022】請求項2に記載の発明によると、プリント
板に設けた導電部材と歪ゲ−ジから突き出る端子片とが
摺接するという簡単な構造により、ダイヤフラムで生じ
る振動,衝撃を吸収して、プリント基板と歪ゲ−ジとの
間の導電経路を良好に保つ。
According to the second aspect of the invention, the simple structure in which the conductive member provided on the printed board and the terminal piece protruding from the strain gauge are in sliding contact with each other can absorb the vibration and shock generated in the diaphragm, Maintains a good conductive path between the printed circuit board and the strain gauge.

【0023】請求項3に記載の発明によると、信号側接
続口体が圧力側接続口体と組合うにしたがい、信号側接
続口体の内面から突き出ている差込部が中間体に在るリ
セプタクル部に挿入されて、それぞれ独立して装着して
あるプリント基板とタ−ミナルとの間を導通する。
According to the third aspect of the invention, as the signal side connection port body is combined with the pressure side connection port body, the receptacle in which the insertion portion protruding from the inner surface of the signal side connection port body is present in the intermediate body. The printed circuit board and the terminal mounted independently of each other are electrically connected to each other.

【0024】このとき、リセプタクル部とプリント基板
との間は、変位可能な導電部材を介して接続されている
から、接続の際に生じる衝撃などは、導電部材の変位に
て吸収されて、プリント基板には伝わらない。
At this time, since the receptacle portion and the printed circuit board are connected via a displaceable conductive member, a shock or the like generated at the time of connection is absorbed by the displacement of the conductive member to print. It does not reach the board.

【0025】これにより、プリント基板に応力を与えず
に、プリント基板と信号側接続口体との接続が行われ
る。請求項4に記載の発明によると、直接的な形成によ
って、ダイヤフラムの表面には、歪ゲ−ジを高い精度、
かつ剥がれなどの問題なくダイヤフラムに、歪ゲ−ジが
形成される。
As a result, the printed circuit board and the signal side connection port can be connected without applying stress to the printed circuit board. According to the invention as set forth in claim 4, the strain gauge is highly accurately formed on the surface of the diaphragm by the direct formation.
In addition, a strain gauge is formed on the diaphragm without problems such as peeling.

【0026】請求項5に記載の発明によると、別途、ア
ダプタを必要とすることなく、先端におねじ部が付いた
圧力センサが組み立てられる。このことは、アダプタと
圧力受側接続口体とを接続しておねじタイプの圧力受側
接続口体を組立てる構造に見られるような隙間を生じる
おそれのある部位はなく、流体のリ−クはない。
According to the fifth aspect of the present invention, the pressure sensor having the threaded portion at the tip is assembled without the need for an additional adapter. This means that there is no possibility of creating a gap like the structure that assembles the screw type pressure receiving side connection port by connecting the adapter and the pressure receiving side connection port, and there is no fluid leak. There is no.

【0027】請求項6に記載の発明によると、筒状体で
中間体、信号受側接続口体の周囲を覆うように圧力受側
接続口体を信号受側接続口体の端側に組合わせて、筒状
体の端部を変形させて同部分を信号受側接続口体の外周
部に係合させれば、別途、結合手段を必要とせずに、圧
力受側接続口体,中間体,信号側接続口体の三者が結合
される。
According to the sixth aspect of the invention, the pressure receiving side connecting port body is assembled to the end side of the signal receiving side connecting port body so as to cover the periphery of the intermediate body and the signal receiving side connection port body with the tubular body. In addition, if the end portion of the tubular body is deformed and the same portion is engaged with the outer peripheral portion of the signal receiving side connection port body, the pressure receiving side connection port body, the intermediate portion without the need for a separate coupling means. The body and the signal-side connection body are connected.

【0028】[0028]

【実施例】以下、本発明を図1ないし図7に示す第1の
実施例にもとづいて説明する。図1は本発明を適用した
圧力センサの外観、図2は同圧力センサの分解斜視図、
図4は同圧力センサの断面図、図4は同圧力センサの断
面図、図5は同圧力センサの分解断面図をそれぞれ示し
ていて、図中1は本体である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the first embodiment shown in FIGS. 1 is an external view of a pressure sensor to which the present invention is applied, FIG. 2 is an exploded perspective view of the pressure sensor,
FIG. 4 is a sectional view of the same pressure sensor, FIG. 4 is a sectional view of the same pressure sensor, and FIG. 5 is an exploded sectional view of the same pressure sensor, in which 1 is a main body.

【0029】本体1は、図2および図5に示されるよう
に圧力受側接続口体2、中間体3、信号受側接続口体4
を有しており、これら三つの部品が軸心方向に直列に組
合って、全体を構成してある。
As shown in FIGS. 2 and 5, the main body 1 includes a pressure receiving side connecting port body 2, an intermediate body 3, and a signal receiving side connecting port body 4.
And these three parts are combined in series in the axial direction to form the whole.

【0030】すなわち、圧力受側接続口体2は、図4に
示されるように金属部材、例えばSUS又はアルミ合金
より有底筒状に形成されていて、開口端から基端側の大
部分を占める部位には例えば内面にめねじ部5aもつ六
角ナット部5が設けてある。そして、この六角ナット部
5の開口端を圧力導入口6とし、内部空間を通路7とし
てある。
That is, as shown in FIG. 4, the pressure receiving side connection port body 2 is formed of a metal member, for example, SUS or an aluminum alloy, into a cylindrical shape with a bottom, and most of the pressure receiving side connection port body from the open end to the base end side. A hexagon nut portion 5 having a female screw portion 5a on the inner surface is provided at the occupied portion, for example. The open end of the hexagon nut portion 5 serves as the pressure introducing port 6 and the internal space serves as the passage 7.

【0031】また通路7と向き合う圧力受側接続口体2
の底壁部分には、同部分を薄肉に成形してなるダイヤフ
ラム8が形成してある。むろん、ダイヤフラム8の厚み
は、圧力導入口6から流入する流体の圧力変化を感知
(変位)するような厚み寸法に設定してある。
Further, the pressure receiving side connection port body 2 facing the passage 7
A diaphragm 8 formed by thinly forming the bottom wall portion is formed on the bottom wall portion. Of course, the thickness of the diaphragm 8 is set to such a thickness dimension that the pressure change of the fluid flowing from the pressure introducing port 6 can be sensed (displaced).

【0032】このダイヤフラム8の表面には歪ゲ−ジ9
が設けられている。歪ゲ−ジ9は、誤差なく高い精度
で、ダイヤフラム8に組み付くよう、図7に示されるよ
うにダイヤフラム8に直接的に形成してある。
A strain gauge 9 is formed on the surface of the diaphragm 8.
Is provided. The strain gauge 9 is directly formed on the diaphragm 8 as shown in FIG. 7 so as to be attached to the diaphragm 8 with high accuracy without error.

【0033】詳しくは、ダイヤフラム8の表面に、絶縁
膜の固着硬化により、絶縁体10を設け、この絶縁体1
0の表面に、例えば銅および銅合金の蒸着およびエッチ
ング加工により、ゲ−ジパタ−ン11を形成し、さらに
その上に保護膜12を設けて、歪ゲ−ジ9を形成してあ
る。
More specifically, the insulator 10 is provided on the surface of the diaphragm 8 by fixing and hardening the insulating film.
On the surface of 0, a gauge pattern 11 is formed by vapor deposition and etching of copper and copper alloy, and a protective film 12 is further provided on the gauge pattern 11 to form a strain gauge 9.

【0034】またこの歪ゲ−ジ9の外周寄りの部位に
は、図2,図7に示されるように直径方向に沿って四つ
の端子部13が一列状に形成してある。これら端子部1
3には、例えば端子片14(一方の摺動部材)が同じ向
きで一列状に突設してある。
Further, at a portion near the outer periphery of the strain gauge 9, four terminal portions 13 are formed in a row along the diameter direction as shown in FIGS. These terminal parts 1
3, for example, terminal pieces 14 (one sliding member) are provided so as to protrude in a line in the same direction.

【0035】詳しくは、端子片14は例えば略逆L字状
に折曲げた板ばねから構成されていて、短手部分14a
の板面部分が、端子部13に半田付けしてある。そし
て、この半田付けによって、各端子片14の長手部分1
4bを、端子部13が並ぶ方向と平行な向きで、ダイヤ
フラム8が変位する方向に向かって突き出るように配置
させている。
More specifically, the terminal piece 14 is composed of, for example, a leaf spring bent in a substantially inverted L shape, and has a lateral portion 14a.
The plate surface portion of is soldered to the terminal portion 13. Then, by this soldering, the longitudinal portion 1 of each terminal piece 14 is
4b is arranged in a direction parallel to the direction in which the terminal portions 13 are arranged so as to project toward the direction in which the diaphragm 8 is displaced.

【0036】なお、15は六角ナット部5の基端側の外
周部分に設けてある固定用の鍔部、25は端子片14を
固定した半田を示す(図7のみに図示)。また中間体3
は、絶縁材料、例えば合成樹脂部材から短筒状に成形さ
れた本体部16を有している。
Reference numeral 15 indicates a fixing collar portion provided on the outer peripheral portion of the hexagonal nut portion 5 on the base end side, and 25 indicates solder to which the terminal piece 14 is fixed (only shown in FIG. 7). Also Intermediate 3
Has a body portion 16 formed from an insulating material, for example, a synthetic resin member, into a short tubular shape.

【0037】この本体部16の一端部には、図4および
図5に示されるように圧力受側接続口体2の基端部の外
径に対応した内径寸法と、鍔部15の外形に対応した外
径寸法とを有している円形の大径部17が形成してあ
る。
As shown in FIGS. 4 and 5, one end of the main body 16 has an inner diameter corresponding to the outer diameter of the base end of the pressure receiving side connection port 2 and an outer shape of the flange 15. A circular large diameter portion 17 having a corresponding outer diameter dimension is formed.

【0038】この大径部17が圧力受側接続口体2の基
端部に挿脱自在に嵌挿される。大径部17の長さは、歪
ゲ−ジ端から鍔部15までの距離より長い寸法に設定さ
れていて、大径部17の大部分を歪ゲ−ジ9の回りから
上方へ突出させている。
The large diameter portion 17 is removably fitted into the base end portion of the pressure receiving side connection port body 2. The length of the large diameter portion 17 is set to be longer than the distance from the end of the strain gauge to the collar portion 15, and most of the large diameter portion 17 is projected upward from around the strain gauge 9. ing.

【0039】またこの突き出る本体部16の他端部は、
大径部17より外径が小さい円形の小径部18となって
いる。この小径部18内には、図2および図3に示され
るように中心からずれた位置に矩形の開口19が形成し
てあり、歪ゲ−ジ9の周囲を上記大径部17と小径部1
8とで囲んでいる。
The other end of the protruding main body 16 is
The circular small diameter portion 18 has an outer diameter smaller than that of the large diameter portion 17. As shown in FIGS. 2 and 3, a rectangular opening 19 is formed in the small diameter portion 18 at a position deviated from the center, and the periphery of the strain gauge 9 is surrounded by the large diameter portion 17 and the small diameter portion. 1
Surrounded by 8 and.

【0040】矩形の開口19には、増幅回路を構成する
各種電子部品20を搭載した矩形のプリント基板21が
固定されている。詳しくは、図6にも示されるように矩
形の開口19を構成する周壁のうち、端子片列の両端側
に在る一対の壁部の例えば最下位となる部位には、それ
ぞれプリント基板21の縁部を受ける受座22が内方へ
突き出して設けてある。
In the rectangular opening 19, a rectangular printed board 21 on which various electronic components 20 constituting an amplifier circuit are mounted is fixed. More specifically, as shown in FIG. 6, among the peripheral walls forming the rectangular opening 19, for example, the lowest part of the pair of wall parts on both ends of the terminal strip, the bottom part of the printed circuit board 21 is provided. A seat 22 for receiving the edge is provided so as to project inward.

【0041】各壁部の中央には、同壁部分を上側から下
側へ延びる帯板状に成形してなる一対のレバ−片23が
形成されている。レバ−片23は、壁部とつながる上端
部を支点として、前後方向に変位するばね性(弾性)を
有している。
At the center of each wall portion, a pair of lever pieces 23 are formed by molding the wall portion into a strip plate shape extending from the upper side to the lower side. The lever piece 23 has a spring property (elasticity) that is displaced in the front-rear direction with the upper end portion connected to the wall portion as a fulcrum.

【0042】また各レバ−片23の下部前面には、受座
22からプリント基板21の厚さ寸法分、離れた部位
に、突起23aが形成されていて、プリント基板21を
受座22と当接するまで開口19から嵌め込むことによ
り、弾性復帰するレバ−片23に在る突起23aによっ
て、受座22上のプリント基板21を抜け出ないように
保持させてある。
Further, a projection 23a is formed on the lower front surface of each lever piece 23 at a position apart from the seat 22 by the thickness dimension of the printed board 21, so that the printed board 21 contacts the seat 22. The printed board 21 on the receiving seat 22 is held so as not to come out by the projection 23a on the lever piece 23 that elastically returns by being fitted into the opening 19 until it contacts.

【0043】また歪ゲ−ジ9の端子片13と同方向に在
る開口19の壁部には、プリント基板21の縁部との間
で間隙を形成するための凹部24が形成してある。これ
によって、中間体3が圧力受側接続口体3に装着するに
伴い、歪ゲ−ジ9から立ち上がる端子片13の先端部
(長手部分14bの先端部)が、プリント基板21の縁
部にならって、凹部24内を挿通されるようにしてあ
る。
A recess 24 for forming a gap with the edge of the printed board 21 is formed in the wall of the opening 19 which is in the same direction as the terminal piece 13 of the strain gauge 9. . As a result, when the intermediate body 3 is mounted on the pressure receiving side connection port body 3, the tip end portion of the terminal piece 13 rising from the strain gauge 9 (the tip end portion of the longitudinal portion 14b) is located at the edge portion of the printed circuit board 21. Then, the inside of the recess 24 is inserted.

【0044】これら端子片13が触れるプリント基板2
1の各縁部分には、各端子片13と上記ダイヤフラム8
が変位する方向と直角な方向から摺接する導電部25
(他方の摺接部材,導電部材に相当)がそれぞれ形成さ
れていて、プリント基板21と歪ゲ−ジ9との両者間
を、ダイヤフラム8で生ずる変位を吸収できるように、
相対変位可能に電気的に接続している(第2の接続
部)。
Printed circuit board 2 touched by these terminal pieces 13
Each terminal piece 13 and the diaphragm 8 are attached to each edge portion of 1.
Conductive part 25 slidingly contacting from the direction perpendicular to the displacement direction
(Corresponding to the other sliding contact member and the conductive member) are respectively formed so that the displacement generated in the diaphragm 8 can be absorbed between both the printed circuit board 21 and the strain gauge 9.
Electrically connected so that relative displacement is possible (second connection portion).

【0045】なお、端子片13の先端部(長手部分14
bの先端部)は、導電部25に対して弾性的に接触させ
てある。又は必要に応じて接触部を半田付けによって接
続してもよい。
The tip of the terminal piece 13 (longitudinal portion 14
The tip portion b) is elastically brought into contact with the conductive portion 25. Alternatively, the contact portions may be connected by soldering if necessary.

【0046】また導電部25とは反対側に在る小径部1
8の平坦部分3aの上面には、図3にも示されるように
プリント基板21の縁部にならって、複数、例えば三つ
のリセプタクル部26が接続口26aを上側に向け、所
定の間隔で埋め込んである。むろん、各リセプタクル部
26の接続口26aは平坦部分3aの上面から開口して
いる。
The small-diameter portion 1 on the side opposite to the conductive portion 25
As shown in FIG. 3, a plurality of, for example, three receptacle portions 26 are embedded on the upper surface of the flat portion 3a of 8 at predetermined intervals with the connection ports 26a facing upward. Is. Of course, the connection port 26a of each receptacle 26 opens from the upper surface of the flat portion 3a.

【0047】各リセプタクル部26には、図3〜図5に
示されるようにプリント基板21に向かって延びる板ば
ね部27(導電部材)が一体に設けてある。この板ばね
部27は、例えば略階段状に成形されていて、同部分に
外力を逃がすための変位可能部28を構成している。
Each receptacle portion 26 is integrally provided with a leaf spring portion 27 (conductive member) extending toward the printed circuit board 21 as shown in FIGS. The leaf spring portion 27 is formed in, for example, a substantially stepped shape, and constitutes a displaceable portion 28 for releasing an external force at the portion.

【0048】そして、この板ばね部27の先端部が、プ
リント基板21の縁部上面に設けた導電部29に半田付
けされ、リセプタクル部26とプリント基板21との間
を変位可能に電気的に接続している。
The tip end of the leaf spring portion 27 is soldered to the conductive portion 29 provided on the upper surface of the edge portion of the printed board 21 so that the receptacle portion 26 and the printed board 21 can be electrically displaced. Connected.

【0049】なお、中間体3は、位置決め機能をもたせ
るために、レバ−片23が在る小径部18の部分18a
は、他の部分よりも部分的に高く成形してある上、同レ
バ−片23とリセプタクル部26との間に在る小径部1
8の外周部分に一対の段部30を形成してある。
The intermediate body 3 has a portion 18a of the small-diameter portion 18 where the lever piece 23 is present in order to have a positioning function.
Is partially higher than the other parts, and is also small-diameter portion 1 existing between the lever piece 23 and the receptacle portion 26.
A pair of stepped portions 30 is formed on the outer peripheral portion of 8.

【0050】また信号受側接続口体4は、絶縁材料、例
えば合成樹脂部材から成形された本体部31を有してい
る。本体部31は、図1および図2に示されるように一
端部に中間体3の小径部18と挿脱可能なキャップ部3
2を有し、他端部に楕円筒状の接続ケ−ス33を有して
構成してある。なお、キャップ部32の外径は、中間体
3の大径部17と同じ外形に設定してある。
The signal receiving side connection port body 4 has a main body 31 molded from an insulating material such as a synthetic resin member. As shown in FIGS. 1 and 2, the main body portion 31 has a cap portion 3 that can be inserted into and removed from the small diameter portion 18 of the intermediate body 3 at one end portion.
2 and has an elliptic cylindrical connection case 33 at the other end. The outer diameter of the cap portion 32 is set to be the same as that of the large diameter portion 17 of the intermediate body 3.

【0051】このキャップ部32が中間体3の小径部1
8に外嵌され、信号側接続口体4を、中間体3の開口1
9を被うように圧力側接続口体2に組合わせている。こ
の周囲が閉塞される中間体3内の空間を利用して、機器
収容室35を形成している。そして、この機器収容室3
5内に、先に述べたように中間体3を利用して、プリン
ト基板21を所定に配置させている。
This cap portion 32 is the small diameter portion 1 of the intermediate body 3.
8, the signal side connection port body 4 is attached to the opening 1 of the intermediate body 3.
It is combined with the pressure side connection port body 2 so as to cover 9. The equipment accommodating chamber 35 is formed by utilizing the space in the intermediate body 3 whose periphery is closed. And this equipment storage room 3
As described above, the printed circuit board 21 is arranged in the predetermined space 5 by utilizing the intermediate body 3.

【0052】またキャップ部32の内底面には、中間体
3に在る段部30と組合う一対の突起部(図示しな
い)、同じく高くなった部分18aと組合う一対の凹部
分34(図5に図示)が形成されていて、リセプタクル
部26が並ぶ方向と接続ケ−ス33の長手側方向とが合
ったときのみ、中間体3と信号受側接続口体4とが所定
に接続されるようにしてある。
Further, on the inner bottom surface of the cap portion 32, a pair of protrusions (not shown) which are combined with the step portion 30 in the intermediate body 3, and a pair of concave portions 34 which are also combined with the raised portion 18a (see FIG. 5) is formed, and the intermediate body 3 and the signal receiving side connection port body 4 are connected to each other in a predetermined manner only when the direction in which the receptacle portions 26 are arranged and the longitudinal direction of the connection case 33 are aligned. I am doing it.

【0053】つまり、リセプタクル部26が並ぶ向きと
同方向に、接続ケ−ス33の向きが位置決まる。接続ケ
−ス33内には、リセプタクル部26の位置にならっ
て、複数本、例えば三本のタ−ミナル部36(端子に相
当)が長手方向に並んで固定してある。
That is, the orientation of the connection case 33 is determined in the same direction as the orientation of the receptacle portions 26. Within the connection case 33, a plurality of, for example, three terminal portions 36 (corresponding to terminals) are fixed side by side in the longitudinal direction at the position of the receptacle portion 26.

【0054】タ−ミナル部36は、いずれも接続ケ−ス
33内から外部に露出する外部接続用の部位37を一端
部に有している。また各タ−ミナル部36の他端部に
は、逆L字状、すなわちキャップ部32の内底面に沿う
中継部分38aと同内底面からリセプタクル部26側に
向かって下がる差込部分38bとを有してなる差込片3
8(差込部に相当)が形成されている。
Each of the terminal portions 36 has a portion 37 for external connection, which is exposed from the inside of the connection case 33 to the outside. Further, the other end of each terminal portion 36 is provided with an inverted L-shape, that is, a relay portion 38a along the inner bottom surface of the cap portion 32 and an insertion portion 38b that descends from the inner bottom surface toward the receptacle portion 26 side. Insert piece 3 to have
8 (corresponding to the insertion portion) is formed.

【0055】各差込部分38bは、リセプタクル部26
に差込まれる長さに設定されていて、キャップ部32と
中間体3とが接続されることを利用して、差込片38,
リセプタクル部26を通じて、タ−ミナル部36とプリ
ント基板21との間を電気的に接続している(第1の接
続部)。
Each insertion portion 38b has a receptacle portion 26.
The length is set so that the cap portion 32 and the intermediate body 3 are connected to each other.
The terminal portion 36 and the printed circuit board 21 are electrically connected to each other through the receptacle portion 26 (first connection portion).

【0056】そして、こうした同径をなして直列に組合
う圧力受側接続口体2,中間体3,信号受側接続口体4
の周囲には、接続具、例えばアルミ部材で円筒形に成形
されたカラ−39が挿入され、三部品を外れないように
結合させている。
Then, the pressure receiving side connecting port body 2, the intermediate body 3, and the signal receiving side connecting port body 4 which have the same diameter and are assembled in series are formed.
Around the periphery of the connector, a connecting tool, for example, a color 39 molded into a cylindrical shape with an aluminum member is inserted, and the three parts are coupled so as not to come off.

【0057】詳しくは、カラ−39は、あらかじめ下端
には圧力受側接続口体2の鍔部15と係合する折曲部3
9aが形成してあり、六角ナット部5からカラ−39
を、折曲部39aが鍔部15と当接するまで挿入した
後、上端にキャップ部32の角部に形成した段差32a
に向かう変形力を与えて、同部分を段差32aに係合さ
せることで、圧力受側接続口体2,信号受側接続口体4
間を結合させている。
More specifically, the collar 39 has, at its lower end, a bent portion 3 which is previously engaged with the flange portion 15 of the pressure receiving side connection port body 2.
9a is formed, and from the hexagon nut portion 5 to the color 39
Is inserted until the bent portion 39a comes into contact with the flange portion 15, and then the step 32a formed at the corner of the cap portion 32 is formed at the upper end.
By applying a deforming force toward the step 32a to engage the same with the step 32a, the pressure receiving side connecting port body 2 and the signal receiving side connecting port body 4
The spaces are connected.

【0058】なお、図中1aは部材間をシ−ルするため
のOリング、39aは段差32aに係合するカラ−先端
の係合部を示す。こうした圧力センサを組み立てるとき
は、まず、例えば圧力受側接続口体2に中間体3を組合
せることから始める。
In the figure, 1a is an O-ring for sealing between members, and 39a is an engaging portion at the tip of a color for engaging the step 32a. When assembling such a pressure sensor, first, for example, the pressure receiving side connection port body 2 and the intermediate body 3 are assembled.

【0059】これは、各端子片13の先端部と凹部24
との位置を合せ、この状態から中間体3の大径部17を
圧力受側接続口体2の歪ゲ−ジ9の周側に嵌めることで
行われる。
This is because the tip of each terminal piece 13 and the recess 24 are
And the large diameter portion 17 of the intermediate body 3 is fitted to the circumferential side of the strain gauge 9 of the pressure receiving side connection port body 2 from this state.

【0060】この嵌込みにしたがい、各端子片13の先
端部が、凹部24に挿入されて、プリント基板21の縁
部に在る導電部25に摺接する。鍔部15に当接するま
で、中間体3が挿入されると、圧力側接続口体2,中間
体3の二部品間の組み付けを終え、歪ゲ−ジ9とプリン
ト基板21との間の電気的な接続がなされる。
According to this fitting, the tips of the terminal pieces 13 are inserted into the recesses 24 and are brought into sliding contact with the conductive portions 25 at the edges of the printed board 21. When the intermediate body 3 is inserted until it comes into contact with the flange portion 15, the assembling between the two parts of the pressure side connection port body 2 and the intermediate body 3 is completed, and the electrical connection between the strain gauge 9 and the printed circuit board 21 is completed. Connection is made.

【0061】ついで、この中間体3に信号受側接続口体
4を組付ける。これは、差込部分38bが在る向きを、
リセプタクル部26の向きに合わせて、信号受側接続口
体4のキャップ部32を中間体3の小径部18に嵌め込
む。
Then, the signal receiving side connection port body 4 is assembled to the intermediate body 3. This is the direction in which the insertion portion 38b is,
The cap portion 32 of the signal receiving side connection port body 4 is fitted into the small diameter portion 18 of the intermediate body 3 in accordance with the orientation of the receptacle portion 26.

【0062】これにより、キャップ部32の内底面に在
る一対の突起部,凹部部分34が中間体3に在る段部3
0,高くなった部分18aに嵌り込む。続いて、これら
をガイドとして各タ−ミナル部36の差込部分38bが
各リセプタクル部26に差込まれる。
As a result, the pair of protrusions and recesses 34 on the inner bottom surface of the cap portion 32 have the step portion 3 in the intermediate body 3.
0, fit into the raised portion 18a. Then, using these as guides, the insertion portions 38b of the respective terminal portions 36 are inserted into the respective receptacle portions 26.

【0063】段部30、高くなった部分38bに当接す
るまで、キャップ部32が挿入されると、信号受側接続
口体4の組付けを終え、信号受側接続口体4は中間体3
を介して圧力受側接続口体2に組合う。
When the cap portion 32 is inserted until it abuts the stepped portion 30 and the raised portion 38b, the assembly of the signal receiving side connection port body 4 is completed, and the signal receiving side connection port body 4 is the intermediate body 3.
To the pressure receiving side connection port body 2 via.

【0064】これにより、圧力受側接続口体2,中間体
3,信号受側接続口体4は、同径をなして直列に並ぶ。
ついで、カラ−39を六角ナット部5側から嵌め、同カ
ラ−39を折曲部39aが鍔部15と当接するまで挿入
する。
As a result, the pressure receiving side connection port body 2, the intermediate body 3, and the signal receiving side connection port body 4 have the same diameter and are arranged in series.
Then, the collar 39 is fitted from the side of the hexagonal nut portion 5 and the collar 39 is inserted until the bent portion 39 a comes into contact with the collar portion 15.

【0065】その後、カラ−39の上端を変形させて、
キャップ部32に在る段差部32aに係合させれば、図
1および図4に示されるように圧力センサが組み上が
る。こうした構成された圧力センサを使用するときは、
六角ナット部5を、圧力検出を必要とする部位、例えば
空調配管の検出ポ−ト部に螺挿して、圧力センサを装着
した後、タ−ミナル部36に、接続具(図示しない)を
介して、外部機器を電気的に接続すればよい。
After that, the upper end of the color 39 is deformed,
By engaging with the step portion 32a in the cap portion 32, the pressure sensor is assembled as shown in FIGS. 1 and 4. When using such a configured pressure sensor,
After the hexagonal nut portion 5 is screwed into a portion requiring pressure detection, for example, a detection port portion of an air conditioning pipe and a pressure sensor is attached, the terminal portion 36 is connected via a connector (not shown). Then, the external device may be electrically connected.

【0066】これにより、配管の圧力は、ダイヤフラム
8の変位で歪む歪ゲ−ジ9で検出される。この出力電圧
はプリント基板21に搭載された増幅回路で増幅され、
同出力電圧が検出圧力値として、タ−ミナル部36部か
ら外部へ出力される。
As a result, the pressure in the pipe is detected by the strain gauge 9 which is distorted by the displacement of the diaphragm 8. This output voltage is amplified by the amplifier circuit mounted on the printed circuit board 21,
The output voltage is output as a detected pressure value from the terminal unit 36 to the outside.

【0067】このとき、従来の圧力センサによると、ダ
イヤフラム8で生じる振動,衝撃の影響を受けて、プリ
ント基板21の歪ゲ−ジ9を接続する半田が剥がれた
り、同半田にクラックが発生することが懸念されたが、
本発明によると、このようなことはない。
At this time, according to the conventional pressure sensor, the solder connecting the strain gauge 9 of the printed circuit board 21 is peeled off or a crack is generated in the solder under the influence of the vibration and shock generated in the diaphragm 8. I was worried that
According to the invention, this is not the case.

【0068】すなわち、本発明の圧力センサは、プリン
ト基板21が、歪ゲ−ジ9でなく、この歪ゲ−ジ9とは
別体な中間体3に独立して設けてあるから、ダイヤフラ
ム8で生じる振動,衝撃は、プリント基板21には直
接、伝わない。
That is, in the pressure sensor of the present invention, the printed circuit board 21 is provided not in the strain gauge 9 but in the intermediate body 3 which is separate from the strain gauge 9. The vibrations and shocks generated at 1 are not directly transmitted to the printed board 21.

【0069】しかも、これに加えプリント基板21と歪
ゲ−ジ9との間は、ダイヤフラム8が変位する方向に対
して摺接自在な、端子片13,導電部25といった二つ
の摺動部材を介して電気的に接続してあるから、ダイヤ
フラム8で生じる振動,衝撃は、端子片13と導電部2
5との相対変位によって吸収され、プリント基板21に
発生する応力は最小限に抑制される。
In addition to this, between the printed circuit board 21 and the strain gauge 9, there are two sliding members such as the terminal piece 13 and the conductive portion 25 which are slidable in the direction in which the diaphragm 8 is displaced. Since they are electrically connected to each other, the vibration and shock generated in the diaphragm 8 are not connected to the terminal piece 13 and the conductive portion 2.
The stress generated in the printed circuit board 21 by being absorbed by the relative displacement with respect to 5 is suppressed to a minimum.

【0070】このことは、プリント基板21は、ダイヤ
フラム8で生じる振動,衝撃から保護される。したがっ
て、従来のようにプリント基板21に半田付けした半田
が剥がれたり、クラックが発生したりすることを回避す
ることができる。
This means that the printed circuit board 21 is protected from the vibration and shock generated in the diaphragm 8. Therefore, it is possible to prevent the solder soldered to the printed circuit board 21 from peeling off or cracking as in the conventional case.

【0071】この結果、歪ゲ−ジ9からプリント基板2
1に至る導電経路を良好に保つことができ、圧力センサ
の信頼性を高めることなる。しかも、その構造は、プリ
ント板21に設けた導電部25と歪ゲ−ジ9から突き出
る端子片13とを摺接させるだけなので、簡単である。
As a result, from the strain gauge 9 to the printed circuit board 2
The conductive path up to 1 can be maintained well, and the reliability of the pressure sensor is improved. Moreover, the structure is simple because the conductive portion 25 provided on the printed board 21 and the terminal piece 13 protruding from the strain gauge 9 are brought into sliding contact with each other.

【0072】また、中間体3に固定したプリント基板2
1と信号受側接続口体4とを電気的に接続する構造とし
て、中間体3にリセプタクル部26を設け、このリセプ
タクル部26とプリント基板21との間を板ばね部27
を介して接続し、上記リセプタクル部26に、キャップ
部32の内面から突出した差込片38が差込まれる構造
を採用したことにより、信号受側の接続の際に生じる衝
撃などは、板ばね部27の変位にて吸収されて、プリン
ト基板21に伝わらずにすむ。
The printed board 2 fixed to the intermediate 3
1 and the signal receiving side connection port body 4 are electrically connected to each other, the intermediate body 3 is provided with the receptacle portion 26, and the leaf spring portion 27 is provided between the receptacle portion 26 and the printed board 21.
By adopting a structure in which the insertion piece 38 protruding from the inner surface of the cap portion 32 is inserted into the receptacle portion 26, the impact generated at the time of connection on the signal receiving side is not affected by the leaf spring. It is absorbed by the displacement of the portion 27 and does not reach the printed circuit board 21.

【0073】しかも、リセプタクル部26と差込片38
との位置決めは、中間体3に設けた突起,高くなった部
分18a、これらと組合うキャップ部32の内底面に設
けた凹部34とをガイドとして、信号受側接続口体2と
中間体3とを組付けるだけでよいから、簡単である。
Moreover, the receptacle portion 26 and the insertion piece 38
The signal receiving side connection port body 2 and the intermediate body 3 are positioned with respect to each other by using the projection provided on the intermediate body 3, the raised portion 18a, and the recessed portion 34 provided on the inner bottom surface of the cap portion 32 mating with these as a guide. It is easy because you only have to assemble and.

【0074】さらにダイヤフラム8の表面に直接、ゲ−
ジパタ−ン11を形成する歪ゲ−ジ9の採用は、剥がれ
などの問題なく、高い精度で歪ゲ−ジ9をダイヤフラム
8に設置でき、これによっても圧力センサに高い信頼性
をもたらすことができる。
Further, a gate is directly attached to the surface of the diaphragm 8.
Adopting the strain gauge 9 for forming the dip pattern 11 allows the strain gauge 9 to be installed on the diaphragm 8 with high accuracy without causing problems such as peeling, which also brings high reliability to the pressure sensor. it can.

【0075】図8および図9は、本発明の第2の実施例
を示す。本実施例は、アダプタを必要とせずに、第1の
実施例で示しためねじタイプの圧力受側接続口体2を有
する圧力センサから、おねじタイプの圧力受側接続口体
40を有する圧力センサに変えられるようにしたもので
ある。
8 and 9 show a second embodiment of the present invention. In this embodiment, the pressure sensor having the screw type pressure receiving side connection port body 2 for showing in the first example is changed from the pressure sensor having the male screw type pressure receiving side connection port body 40 without the need for an adapter. It can be changed to a sensor.

【0076】すなわち、通常、めねじタイプの圧力受側
接続口体2を有する圧力センサから、めねじタイプに変
える場合、先端の六角ナット部5に、おねじ部が形成さ
れたアダプタを設けていたが、これでは、接続した部材
間に流体がリ−クする隙間が生じることがある上、圧力
センサの全長がアダプタ分、大きくなることが見られ
る。
That is, normally, when a pressure sensor having a female thread type pressure receiving side connection port body 2 is changed to a female thread type, the hexagonal nut portion 5 at the tip is provided with an adapter having a male thread portion. However, in this case, a gap in which the fluid leaks may occur between the connected members, and it can be seen that the entire length of the pressure sensor is increased by the amount corresponding to the adapter.

【0077】そこで、第2の実施例は、ダイヤフラム8
および歪ゲ−ジ9の大きさを変えず、鍛造加工を用い
て、おねじタイプの圧力受側接続口体40を一体に成形
した。すなわち、同圧力受側接続口体40は、図9に示
されるように例えば円柱状に成形してあるSUS又はア
ルミ合金といった金属ブロック41に鍛造加工を施し
て、まず、所定の外形のダイヤフラム43,同ダイヤフ
ラム43の大きさに対応した通路44,同通路44の大
きさに対応した圧力導入口45とを有する概略的な外形
の圧力受側接続口体40を成形する。
Therefore, in the second embodiment, the diaphragm 8
And the size of the strain gauge 9 was not changed, and the male screw type pressure receiving side connection port body 40 was integrally formed by forging. That is, in the pressure receiving side connection port body 40, as shown in FIG. 9, for example, a metal block 41 such as a SUS or aluminum alloy formed in a cylindrical shape is forged, and a diaphragm 43 having a predetermined outer shape is first formed. A pressure receiving side connection port body 40 having a rough outer shape having a passage 44 corresponding to the size of the diaphragm 43 and a pressure introduction port 45 corresponding to the size of the passage 44 is formed.

【0078】ついで、この圧力受側接続口体40の口体
部45の先端部に絞り加工を施して、通路44を袋状に
し、圧力導入口45の外径をおねじ径に対応した径寸法
に成形する。
Next, the tip of the mouth portion 45 of the pressure receiving side connection mouth 40 is drawn to make the passage 44 into a bag shape, and the outer diameter of the pressure inlet 45 corresponds to the diameter of the male screw. Shape to size.

【0079】この後、この圧力受側接続口体40の各部
に面出し加工を施し、圧力導入口45が形成された口部
46の外周部におねじを加工して、所定の外形形状に加
工した後、仕上げれば、おねじタイプの圧力受側接続口
体40が形成される。
After that, each part of the pressure receiving side connection port body 40 is subjected to a chamfering process, and a screw is processed on the outer peripheral part of the port part 46 in which the pressure introducing port 45 is formed to obtain a predetermined outer shape. After processing and finishing, a male screw type pressure receiving side connection port body 40 is formed.

【0080】つまり、おねじタイプの圧力受側接続口体
40は、金属部材の鍛造加工を用いて、ダイヤフラム4
3に臨む通路端を大とし、圧力導入口45に連通する通
路端を小とした袋状に通路44に成形し、口部46の外
周部におねじ部を形成して構成されてある。
That is, the male screw type pressure receiving side connection port body 40 is manufactured by using a forging process of a metal member to form the diaphragm 4
3 is formed into a bag-like passage 44 having a large passage end facing the pressure passage 3 and a small passage end communicating with the pressure introducing port 45, and a screw portion is formed on the outer peripheral portion of the mouth portion 46.

【0081】すなわち、袋状にすることにより、ダイヤ
フラム径を変える必要がないために、歪ゲ−ジ9の感度
を落とさずにすむ。こうした圧力受側接続口体40を用
いると、別途、アダプタを必要とすることなく、先端に
おねじ部が付いた圧力センサが組み立てられる。
That is, by making the shape of the bag, it is not necessary to change the diameter of the diaphragm, so that the sensitivity of the strain gauge 9 is not reduced. When such a pressure receiving side connection port body 40 is used, a pressure sensor having a threaded portion at the tip thereof can be assembled without the need for an additional adapter.

【0082】したがって、アダプタを用いておねじタイ
プの圧力受側接続口体を組立てる構造に見られるような
隙間が生じるおそれはなく、流体のリ−クはない。しか
も、アダプタを用いずにすむ分、圧力センサの全長は小
さくてすむ。
Therefore, there is no possibility of forming a gap as seen in the structure of assembling the screw type pressure receiving side connection port body using the adapter, and there is no fluid leak. Moreover, the total length of the pressure sensor can be small because the adapter is not used.

【0083】また圧力受側接続口体40を成形するとき
に、図9に示されるように圧力受側接続口体40の本体
部47の外周部に、同本体部47と同心状をなして張り
出る、中間体3、信号受側接続口体4のキャップ部32
の周囲を覆うことが可能な薄肉金属の筒状体48を形成
して、カラ−としてもよい。
Further, when molding the pressure receiving side connection port body 40, as shown in FIG. 9, the main body part 47 of the pressure receiving side connection port body 40 is concentrically formed with the outer peripheral part of the body part 47. Overhang, intermediate body 3, cap portion 32 of signal receiving side connection body 4
It is also possible to form a thin metal cylindrical body 48 capable of covering the periphery of the above to form a color.

【0084】こうした筒状体48を有する圧力受側接続
口体40であると、筒状体48で中間体3、信号受側接
続口体4の周囲を覆うように圧力受側接続口体40を信
号受側接続口体4の端側に組合わせた後、筒状体48の
端部を変形させて同部分をキャプ部32の段差32aの
外周部に係合させれば、図8に示されるように別途、結
合手段、すなわちカラ−をを必要とせずに、圧力受側接
続口体40,中間体3,信号側接続口体4の三者を結合
することができる。
With the pressure receiving side connection port body 40 having such a tubular body 48, the pressure receiving side connection port body 40 is covered with the tubular body 48 so as to cover the periphery of the intermediate body 3 and the signal receiving side connection port body 4. 8 is combined with the end side of the signal receiving side connection port body 4, the end portion of the tubular body 48 is deformed, and the same portion is engaged with the outer peripheral portion of the step 32a of the cap portion 32. As shown in the drawing, the pressure receiving side connection port body 40, the intermediate body 3, and the signal side connection port body 4 can be connected together without the need for a separate connecting means, that is, a color.

【0085】但し、48aは同段差32aに係合する係
合部を示す。なお、図8において、第1の実施例と同じ
部分には同一符号を付してその説明を省略した。
However, reference numeral 48a indicates an engaging portion which engages with the step 32a. In FIG. 8, the same parts as those in the first embodiment are designated by the same reference numerals and the description thereof is omitted.

【0086】[0086]

【発明の効果】以上説明したように請求項1に記載の発
明によれば、ダイヤフラムで発生する振動,衝撃の影響
を受けない、歪ゲ−ジとプリント基板との間における電
気的接続を実現することができる。
As described above, according to the first aspect of the present invention, the electrical connection between the strain gauge and the printed circuit board is realized without being affected by the vibration and shock generated in the diaphragm. can do.

【0087】この結果、歪ゲ−ジからプリント基板に至
る導電経路を良好に保つことができ、信頼性の高い圧力
センサを提供できる。請求項2に記載の発明によれば、
この請求項1の効果を簡単な構造で実現することができ
るという効果を奏する。
As a result, the conductive path from the strain gauge to the printed circuit board can be maintained well, and a highly reliable pressure sensor can be provided. According to the invention of claim 2,
The effect of claim 1 can be realized with a simple structure.

【0088】請求項3に記載の発明によれば、請求項1
の効果に加え、プリント基板に応力を与えずにプリント
基板と信号側接続口体とを接続することができるという
効果を奏する。
According to the invention of claim 3, claim 1
In addition to the above effect, there is an effect that the printed circuit board and the signal side connection port body can be connected without applying stress to the printed circuit board.

【0089】請求項4に記載の発明によれば、請求項1
の効果に加え、歪ゲ−ジをダイヤフラムに高精度で、か
つ剥がれなどの設置上の問題なくで設けることができる
という効果を奏する。
According to the invention of claim 4, claim 1
In addition to the above effect, there is an effect that the strain gauge can be provided on the diaphragm with high accuracy and without any installation problem such as peeling.

【0090】請求項5に記載の発明によれば、請求項1
の効果に加え、リ−クがない、さらには全長が短い、お
ねじタイプの圧力センサを実現することができる。請求
項6に記載の発明によれば、請求項5の効果に加え、別
途、結合手段を必要とせずに、圧力受側接続口体,中間
体,信号側接続口体との三者を結合できるという効果を
奏する。
According to the invention of claim 5, claim 1
In addition to the above effect, it is possible to realize a male thread type pressure sensor having no leak and having a short total length. According to the invention described in claim 6, in addition to the effect of claim 5, the pressure receiving side connection port body, the intermediate body, and the signal side connection port body are combined without the need for a separate connecting means. It has the effect of being able to.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の圧力センサの外観を示
す斜視図。
FIG. 1 is a perspective view showing an appearance of a pressure sensor according to a first embodiment of the present invention.

【図2】同圧力センサを分解した分解斜視図。FIG. 2 is an exploded perspective view in which the pressure sensor is disassembled.

【図3】同分解した中間体の各部構造を、装着されたプ
リント基板と共に示す斜視図。
FIG. 3 is a perspective view showing a structure of each part of the disassembled intermediate body together with a mounted printed circuit board.

【図4】圧力センサの全体の断面図。FIG. 4 is a sectional view of the entire pressure sensor.

【図5】分解した圧力センサの各部品の断面図。FIG. 5 is a cross-sectional view of disassembled parts of the pressure sensor.

【図6】異なる方向から見た中間体回りの断面図。FIG. 6 is a cross-sectional view around an intermediate body viewed from different directions.

【図7】図4中のA部を拡大して示す歪ゲ−ジの構造を
説明するための断面図。
FIG. 7 is a cross-sectional view for explaining the structure of a strain gauge shown by enlarging a portion A in FIG.

【図8】本発明の第2の実施例の圧力センサを示す断面
図。
FIG. 8 is a sectional view showing a pressure sensor according to a second embodiment of the present invention.

【図9】同おねじタイプの圧力センサを構成する圧力受
側接続口体の製造方法を説明するための図。
FIG. 9 is a diagram for explaining a method of manufacturing a pressure receiving side connection port body that constitutes the male thread type pressure sensor.

【図10】従来の圧力センサにおけるプリント基板の設
置構造を説明するための断面図。
FIG. 10 is a cross-sectional view for explaining the installation structure of the printed circuit board in the conventional pressure sensor.

【符号の説明】[Explanation of symbols]

1,40…圧力受側接続口体 3…中間体 4
…信号受側接続口体 6,45…圧力導入口 7,44…通路 8,43
…ダイヤフラム 9…歪ゲ−ジ 11…ゲ−ジパタ−ン 13…
端子片(摺動部材) 17…大径部 18…小径部 21
…プリント基板 22…受座 23…レバ−片 23a
…突起 25…導電部(摺動部材) 26
…リセプタクル部 27…板ばね部(導電部材) 35…機器収容室 36…タ−ミナル部(端子) 38…差込片(差込
部) 48…筒状体 48a…係合部。
1, 40 ... Pressure receiving side connection port body 3 ... Intermediate body 4
... Signal receiving side connection body 6,45 ... Pressure introduction port 7,44 ... Passage 8,43
... Diaphragm 9 ... Strain gauge 11 ... Gauge pattern 13 ...
Terminal piece (sliding member) 17 ... Large diameter part 18 ... Small diameter part 21
... Printed circuit board 22 ... Seat 23 ... Lever piece 23a
... Projection 25 ... Conductive part (sliding member) 26
... Receptacle part 27 ... Leaf spring part (conductive member) 35 ... Device accommodating chamber 36 ... Terminal part (terminal) 38 ... Insertion piece (insertion part) 48 ... Cylindrical body 48a ... Engagement part.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 端面に圧力導入口からの圧力を受けて変
位するダイヤフラムを有し、かつこのダイヤフラムの表
面に同ダイヤフラムの歪みを検出する歪ゲ−ジを有して
構成される圧力受側接続口体と、 この圧力受側接続口体の端面部に前記歪ゲ−ジの周側を
囲むように設けられた短筒形の中間体と、 この中間体の開口を被うように前記圧力受側接続口体の
端面側と組合って設けられ、前記中間体内に周囲が閉塞
された機器収容室を形成する、外部機器と接続可能な端
子を有してなる信号側接続口体と、 前記中間体に固定されて前記機器収容室に配置され、電
子部品が搭載されてなるプリント基板と、 このプリント基板と前記信号側接続口体の端子との間を
電気的に接続する第1の接続部と、 前記歪ゲ−ジと前記プリント基板との間を、前記ダイヤ
フラムが変位する方向と略直角な方向から相互が摺接す
る二つの摺接部材との摺接によって電気的に接続してな
る第2の接続部と、 を具備してなることを特徴とする圧力センサ。
1. A pressure receiving side having an end face having a diaphragm that is displaced by receiving pressure from a pressure introducing port, and a strain gauge for detecting strain of the diaphragm on the surface of the diaphragm. The connection port body, a short tubular intermediate body provided on the end face portion of the pressure receiving side connection port body so as to surround the peripheral side of the strain gauge, and the above-mentioned cover body covering the opening of the intermediate body. A signal side connection port body which is provided in combination with the end face side of the pressure receiving side connection port body and which has a terminal capable of being connected to an external device, which forms a device housing chamber whose periphery is closed in the intermediate body. A first printed circuit board fixed to the intermediate body and arranged in the device housing chamber, on which electronic components are mounted, and a printed circuit board and a terminal of the signal side connection port body are electrically connected Between the strain gauge and the printed circuit board, A pressure, comprising: a second connecting portion electrically connected by sliding contact with two sliding contact members that are in sliding contact with each other in a direction substantially perpendicular to a direction in which the ear diaphragm is displaced. Sensor.
【請求項2】 前記第2の接続部は、 前記歪ゲ−ジに前記プリント基板へ向けて前記ダイヤフ
ラムが変位する方向に延びる端子片を有し、 前記プリント基板に前記端子片と前記ダイヤフラムが変
位する方向と略直角な方向から摺接する導電部材を有し
てなることを特徴とする請求項1に記載の圧力センサ。
2. The second connection portion has a terminal piece extending in the strain gauge in a direction in which the diaphragm is displaced toward the printed circuit board, and the printed circuit board includes the terminal piece and the diaphragm. The pressure sensor according to claim 1, further comprising a conductive member that is slidably contacted in a direction substantially perpendicular to the displacing direction.
【請求項3】 前記第1の接続部は、 前記信号側接続口体に、前記タ−ミナルと導通し、前記
中間体の開口と向き合う面から前記中間体に向かって突
き出る差込部を有し、 前記中間体に前記信号側接続口体の装着にしたがって前
記差込部が差し込まれるリセプタクル部を有し、 かつこのリセプタクル部と前記プリント基板との間を電
気的に接続する変位可能な導電部材を有してなることを
特徴とする請求項1に記載の圧力センサ。
3. The first connection part has an insertion part in the signal side connection port body, which is electrically connected to the terminal and protrudes from a surface facing the opening of the intermediate body toward the intermediate body. The intermediate body has a receptacle portion into which the plug-in portion is inserted according to the mounting of the signal-side connection port body, and a displaceable conductive member that electrically connects the receptacle portion and the printed circuit board. The pressure sensor according to claim 1, further comprising a member.
【請求項4】 前記歪ゲ−ジは、 前記ダイヤフラムの表面にゲ−ジパタ−ンを形成してな
ることを特徴とする請求項1に記載の圧力センサ。
4. The pressure sensor according to claim 1, wherein the strain gauge has a gauge pattern formed on a surface of the diaphragm.
【請求項5】 前記圧力受側接続口体は、金属部材を鍛
造加工で、内部の通路を、ダイヤフラム側に臨む通路端
を大とし、圧力導入口に連通する通路端を小とした袋状
に成形し、圧力導入口が形成された口部の外周部におね
じ部を形成してなることを特徴とする請求項1に記載の
圧力センサ。
5. The pressure receiving side connection port body is formed by forging a metal member, and has a bag shape in which an inner passage has a large passage end facing the diaphragm side and a small passage end communicating with the pressure introducing port. 2. The pressure sensor according to claim 1, wherein the pressure sensor is formed by forming a threaded portion on an outer peripheral portion of the mouth portion formed with the pressure introduction port.
【請求項6】 前記圧力受側接続口体は、 本体部の外周部に、同本体と同心状に張り出て、前記中
間体、前記信号受側接続口体の周囲を覆う薄肉金属の筒
状体を有し、 さらに同筒状体の先端部には、同先端部が変形されて、
前記信号受側接続口体の外周部と係合する係合部を有し
ていることを特徴とする請求項5に記載の圧力センサ。
6. The pressure-reception-side connection port body is a thin-walled metal tube that protrudes concentrically with the body on the outer periphery of the body part and covers the periphery of the intermediate body and the signal-reception-side connection port body. The tubular body has a cylindrical body, and the distal end portion of the cylindrical body is deformed,
The pressure sensor according to claim 5, further comprising an engaging portion that engages with an outer peripheral portion of the signal receiving side connection port body.
JP6157160A 1994-07-08 1994-07-08 Pressure sensor Pending JPH0821775A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6157160A JPH0821775A (en) 1994-07-08 1994-07-08 Pressure sensor
EP95104738A EP0691533A3 (en) 1994-07-08 1995-03-30 Pressure sensor
US08/423,147 US5587535A (en) 1994-07-08 1995-04-17 Pressure sensor including a pair of slidable contacts between a strain gage and a print circuit board
KR1019950014496A KR0159023B1 (en) 1994-07-08 1995-06-01 Pressure sensor including a pair of slidable contacts between a strain gauge and a print circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6157160A JPH0821775A (en) 1994-07-08 1994-07-08 Pressure sensor

Publications (1)

Publication Number Publication Date
JPH0821775A true JPH0821775A (en) 1996-01-23

Family

ID=15643500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6157160A Pending JPH0821775A (en) 1994-07-08 1994-07-08 Pressure sensor

Country Status (4)

Country Link
US (1) US5587535A (en)
EP (1) EP0691533A3 (en)
JP (1) JPH0821775A (en)
KR (1) KR0159023B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108553A (en) * 1999-10-07 2001-04-20 Furukawa Electric Co Ltd:The Sensor for measuring pressure
JP2001242031A (en) * 2000-01-12 2001-09-07 Texas Instr Inc <Ti> Airtight pressure transducer
JP2017067644A (en) * 2015-09-30 2017-04-06 日立オートモティブシステムズ株式会社 Pressure detecting device

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5802912A (en) * 1996-01-25 1998-09-08 Delco Electronics Corporation Electrical terminal apparatus
DK173145B1 (en) * 1996-11-20 2000-02-07 Danfoss A/S smoke transmitter tImproved enclosure for measuring converter, especially a t
DE19724309B4 (en) * 1997-06-10 2007-01-18 Ifm Electronic Gmbh Sensor housing with process connection
US6447342B1 (en) * 2001-05-10 2002-09-10 Delphi Technologies, Inc. Pressure sensor connector
DE10124678A1 (en) * 2001-05-18 2002-11-21 Endress & Hauser Gmbh & Co Kg Process container monitoring probe has housing supporting probe rod and with threaded connection to wall of container
DE10201000A1 (en) * 2002-01-11 2003-07-31 Infineon Technologies Ag Integrated sensor module and method for its manufacture
DE10221303A1 (en) * 2002-05-14 2003-11-27 Valeo Schalter & Sensoren Gmbh Sensor, in particular ultrasound sensor, and method of manufacture
US6742395B1 (en) * 2002-12-20 2004-06-01 Texas Instruments Incorporated Hermetic pressure transducer
US7093495B2 (en) * 2003-07-28 2006-08-22 Cts Corporation Pressure sensor
US6997059B2 (en) * 2003-10-07 2006-02-14 Cts Corporation Pressure sensor
US20050103110A1 (en) * 2003-11-19 2005-05-19 Cts Corporation Integrated pressure and temperature sensor
US7240558B2 (en) * 2003-11-19 2007-07-10 Cts Corporation Pressure sensor
US6948377B2 (en) * 2003-12-08 2005-09-27 Honeywell International, Inc. Method and apparatus for detecting the strain levels imposed on a circuit board
US7270010B2 (en) * 2004-08-27 2007-09-18 Ashcroft-Nagano, Inc. System and method for pressure measurement
JP4403559B2 (en) * 2006-12-07 2010-01-27 Smc株式会社 pressure switch
JP4203678B2 (en) * 2006-12-07 2009-01-07 Smc株式会社 pressure switch
US20080190493A1 (en) * 2007-02-14 2008-08-14 Chang-Hoon Oh Sensor module, fluid circulation system having the same, and method for assembling sensor module
US7458274B2 (en) * 2007-02-20 2008-12-02 Honeywell International Inc. Pressure sensor incorporating a compliant pin
KR200448151Y1 (en) * 2007-05-03 2010-03-18 (주)신한전기 Press sensor module
EP2001092A1 (en) * 2008-02-11 2008-12-10 Continental Automotive GmbH Electric device for a motor vehicle, in particular a sensor
ITTO20080484A1 (en) * 2008-06-19 2009-12-20 Eltek Spa PRESSURE SENSOR DEVICE
ITTO20080483A1 (en) * 2008-06-19 2009-12-20 Eltek Spa PRESSURE SENSOR DEVICE
KR101600089B1 (en) 2009-10-14 2016-03-07 타이코에이엠피 주식회사 vertical pressure sensor
EP2581708B1 (en) * 2010-06-14 2016-03-16 Eagle Industry Co., Ltd. Sensor
DE102012204905A1 (en) * 2012-03-27 2013-10-02 Robert Bosch Gmbh Circuit carrier for a sensor unit and corresponding sensor unit
JP5761126B2 (en) * 2012-05-31 2015-08-12 日本精機株式会社 Pressure detection device
KR102000294B1 (en) * 2012-09-28 2019-07-15 타이코에이엠피 주식회사 Pressure sensor
US9310266B2 (en) * 2013-05-08 2016-04-12 Sensata Technologies, Inc. Strain gauge pressure sensor
DE102014216158A1 (en) * 2014-02-17 2015-08-20 Robert Bosch Gmbh Connection device for a pressure sensor, pressure sensor and method for producing a connection device
CN107290099B (en) 2016-04-11 2021-06-08 森萨塔科技公司 Pressure sensor, plug for a pressure sensor and method for producing a plug
US20170299545A1 (en) * 2016-04-19 2017-10-19 Tyco Electronics Corporation Sensor package having an electrical contact
EP3236226B1 (en) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Method of manufacturing a pressure sensor
CN107367349A (en) * 2016-05-11 2017-11-21 浙江三花制冷集团有限公司 Plug-in type pressure sensor
US10545064B2 (en) 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
US11153985B2 (en) * 2017-06-29 2021-10-19 Rosemount Inc. Modular hybrid circuit packaging
US10323998B2 (en) 2017-06-30 2019-06-18 Sensata Technologies, Inc. Fluid pressure sensor
US10724907B2 (en) 2017-07-12 2020-07-28 Sensata Technologies, Inc. Pressure sensor element with glass barrier material configured for increased capacitive response
US10557770B2 (en) 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
DE102019209443A1 (en) * 2019-06-28 2020-12-31 Continental Teves Ag & Co. Ohg Sensor device for determining a fluid pressure
JP7327247B2 (en) * 2020-03-31 2023-08-16 株式会社デンソー Pressure sensor for evaporative fuel leak inspection device
WO2023186273A1 (en) * 2022-03-29 2023-10-05 Zf Cv Systems Europe Bv A modular pressure sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3247719A (en) * 1963-10-01 1966-04-26 Chelner Herbert Strain decoupled transducer
US4449112A (en) * 1982-03-18 1984-05-15 Fasco Controls Corporation Oil pressure sender with rolling diaphragm
US4767897A (en) * 1987-11-03 1988-08-30 Chrysler Motors Corporation Conductor structure for transducer switch
US4993267A (en) * 1988-04-08 1991-02-19 General Electric Company Electronic transducer
DE3937573A1 (en) * 1989-11-11 1991-05-16 Gewerk Eisenhuette Westfalia ELECTRICAL PRESSURE GAUGE FOR MEASURING HYDRAULIC PRESSURES, ESPECIALLY FOR USE IN MINING HYDRAULICS
US5014557A (en) * 1990-06-06 1991-05-14 Acustar, Inc. Composite base for a pressure transducer
US5159525A (en) * 1991-07-29 1992-10-27 Fuji Koki Manufacturing Co., Ltd. Pressure sensor
US5331857A (en) * 1992-08-21 1994-07-26 General Automotive Specialty Co., Inc. Pressure transducer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108553A (en) * 1999-10-07 2001-04-20 Furukawa Electric Co Ltd:The Sensor for measuring pressure
JP4615076B2 (en) * 1999-10-07 2011-01-19 古河電気工業株式会社 Pressure measuring sensor
JP2001242031A (en) * 2000-01-12 2001-09-07 Texas Instr Inc <Ti> Airtight pressure transducer
JP2017067644A (en) * 2015-09-30 2017-04-06 日立オートモティブシステムズ株式会社 Pressure detecting device

Also Published As

Publication number Publication date
EP0691533A2 (en) 1996-01-10
EP0691533A3 (en) 1999-07-28
KR0159023B1 (en) 1999-03-30
US5587535A (en) 1996-12-24

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