JP4615076B2 - Pressure measuring sensor - Google Patents

Pressure measuring sensor Download PDF

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Publication number
JP4615076B2
JP4615076B2 JP28701799A JP28701799A JP4615076B2 JP 4615076 B2 JP4615076 B2 JP 4615076B2 JP 28701799 A JP28701799 A JP 28701799A JP 28701799 A JP28701799 A JP 28701799A JP 4615076 B2 JP4615076 B2 JP 4615076B2
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Japan
Prior art keywords
pressure
pressure receiving
diaphragm
strain
pedestal
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JP28701799A
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Japanese (ja)
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JP2001108553A (en
Inventor
美一 松田
俊貴 坂本
雅一 生駒
欣也 田辺
博 斉藤
敏郎 原田
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THE FURUKAW ELECTRIC CO., LTD.
Tokyo Metropolitan Sewerage Service Corp
Metawater Co Ltd
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THE FURUKAW ELECTRIC CO., LTD.
Tokyo Metropolitan Sewerage Service Corp
Metawater Co Ltd
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Description

【０００１】
【発明の属する技術分野】
本発明は、歪み検出素子を用い、受圧素子に加わる圧力とその歪みとの関係から上記圧力を測定する圧力測定用センサに関する。
【０００２】
【関連する背景技術】
従来，この種のセンサでは、受圧素子であるダイアフラムに歪みゲージ等によって構成される歪み検出素子を貼り付けた構造からなるものがある。上記センサでは、この貼り付けの作業性を高めるため、ダイアフラムとケースを別々に作成し、ダイアフラムに歪み検出素子を固定した後に上記ダイアフラムをケースに固定していた。この固定方法としては、例えば溶接による場合と、ボルトによる場合が考えられるが、上記溶接による場合には、溶接時の熱の影響で上記ダイアフラムに固定された歪み検出素子が壊れてしまうため、ボルトによってダイアフラムをケースに固定する方法が一般的であった。
【０００３】
このボルトで固定する場合、上記センサは、ダイアフラム上に歪み検出素子を貼り付けた後に、ボルトによって上記ダイアフラムを台座の部分でケースと固定する構造になっていた。
【０００４】
【発明が解決しようとする課題】
ところが、上記センサでは、ボルトの固定状態、すなわちダイアフラムの台座とケースのボルトによる締め付け状態によって、ダイアフラムが変形して検出される歪みの特性が大幅に異なるという問題点があった。
また、上記センサでは、振動や衝撃等が加わりボルトに緩みが生じると、同じ圧力が加わってもダイアフラムの歪みが変化してしまい、圧力測定値に大きな誤差が生じるという問題点があった。
【０００５】
本発明は，上記問題点に鑑みなされたもので、ボルトの締め付け状態、または振動等によって台座の取り付け状態が変化しても、受圧素子の変形を防いで信頼性の高い圧力測定を可能とする圧力測定用センサを提供することを目的とする。
【０００６】
【課題を解決するための手段】
上記目的を達成するため、本発明では、受圧素子に歪み検出素子を固定し、該受圧素子の歪みを検出することにより、該受圧素子に加わる圧力を測定する圧力測定用センサにて、前記受圧素子と台座とを一体に形成し、かつ前記台座の外縁から前記台座の座面と同一面上を延出して受圧部及び収納部全体の底面の一部を成すようにつば部を設け、前記つば部を収納部にボルトにより固定するとともに、歪み検出素子が、受圧素子に加わる圧力による歪みを検出する圧力検出用ファイバブラッググレーティングと、収納部内の温度を検出する温度補償用ファイバブラッググレーティングと、を含んで構成される圧力測定用センサが提供される（請求項１）。また、受圧素子が台座の上面から窪んだ位置に配置されるように形成された圧力測定用センサが提供される（請求項２）。
【０００７】
すなわち、本発明の請求項１に記載の圧力測定用センサによれば、受圧素子であるダイアフラムと台座とつば部を一体に形成させて、このつば部をボルトで収納部であるケースに直接固定することで、溶接のように歪み検出素子に熱影響を与えることなく受圧部と収納部とを固定することができるとともに、ボルト固定によってダイアフラムに歪みが発生するのを防ぐ。
また、圧力検出用ファイバブラッググレーティングにより測定誤差の少ない圧力の測定が可能となる。また、温度補償用ファイバブラッググレーティングにより、温度変化による測定誤差を解消することが可能となり、測定誤差をより低減させることができる。
また、本発明の請求項２に記載の圧力測定用センサによれば、センサを組み立てる際に、受圧素子やファイバブラッググレーティング等に他の構成部品が当たることなく、受圧素子やファイバブラッググレーティンの損傷を低減することができる。
【０００８】
【発明の実施の形態】
本発明に係る圧力測定用センサの実施例を図１乃至図４の図面に基づいて説明する。
図１は、圧力測定用センサの構成の第１実施例を示す断面図である。図において、本実施例の圧力測定用センサは、本発明の受圧部１０と、本発明の収納部を構成するケース１１と、上部金具１２と、本発明の歪み検出素子を有する光ケーブル１３とからなる。
【０００９】
受圧部１０は、本発明の受圧素子を構成するダイアフラム１０ａと、台座１０ｂと、本発明のつば部を構成するフランジ１０ｃとから構成されている。ダイアフラム１０ａと台座１０ｂは、例えば１枚のステンレス板で一体に形成されており、平面が円筒形で、またその断面がＨ型形状に構成されている。また、台座１０ｂ下部の外縁上には、フランジ１０ｃが一体に形成されている。
【００１０】
ケース１１は、中空の円筒形状に構成されている。このケース１１の下部には、受圧部１０のフランジ１０ｃがボルト１４で固定されており、受圧部１０のダイアフラム１０ａと台座１０ｂはケース１１内に嵌め込まれる。ところで、台座１０ｂを直接ケース１１に固定しなかった理由は、台座１０ｂを直接ボルト固定すると、台座１０ｂの中央に設けられたダイアフラム１０ａにボルトの締め付け状態による歪みが発生するので、この歪みの発生を防止するためである。また、受圧部１０とケース１１間は、台座１０ｂ側面のＯリング１６でシールされている。なお、本発明では、フランジ１０ｃにボルト１４を通す穴をあけ、かつケース１１には、ボルト用のタップをきれば、受圧部１０での歪みの発生をさらに低減することが可能となる。
【００１１】
また、ケース１１の上部には、上部金具１２がボルト１７で固定されており、上部金具１３の中央部には光ケーブル１３が貫入されている。また、ケース１１と上部金具１３間は、上部金具１３側面のＯリング１８でシールされている。
光ケーブル１３内には、光ファイバ１５が設けられており、光ファイバ１５は、上部金具１２からケース１１内部に挿入されている。光ファイバ１５には、光の伝搬方向の一部にファイバブラッググレーティング（以下、「ＦＢＧ」という）１５ａ，ＦＢＧ１５ｂとがそれぞれ形成されており、ＦＢＧ１５ａ，１５ｂは、図示しない光源から伝搬してきた光のうちブラッグ波長と呼ばれるある特定の波長領域の光を反射させ、その他の波長領域の光を透過させる機能を持っている。ＦＢＧ１５ａは、本発明の歪み検出素子を構成して圧力を検出するための圧力検出用ＦＢＧで、例えば圧力によってたわむダイアフラム１０ａ上の中央部に接着剤で貼り付けられている。また、ＦＢＧ１５ｂは、温度を検出して温度補償するための温度検出用ＦＢＧで、機械的な外力を受けないように、例えばケース１１内下部で、かつ円周方向に接着剤で貼り付けられている。なお、光ファイバ１５は、余長部分がケース１１内に納められている。また、本発明の歪み検出素子としては、例えばダイアフラムの歪みを機械的に検出する歪みゲージを用いても良い。
【００１２】
次に、ダイアフラム１０ａとケース１１を固定するボルトのトルクを変えて圧力とダイアフラムの歪みの関係を図２に示す。なお、この実験では、本発明に係る受圧部のダイアフラムの中央に、歪み検出素子として歪みゲージを貼り付けて上記測定を行った。
図２において、この実験例では、ボルトをトルク２０ｋｍ・ｃｍで締め付けた時、そこから１／４回転弛めた時、２／４回転弛めた時、３／４回転弛めた時のダイアフラムの歪みを測定した。この結果、本実施例では、台座外縁にフランジを設け、上記フランジでケースと固定するため、ボルトの締め付け状態に影響を受けることがなくなり、いずれの締め付け状態でも、ダイアフラムに加わる圧力に対してほぼ同一の歪みの状態を、本発明に係る圧力測定用センサで測定できることが確認された。
【００１３】
図３は、図１に示した第１実施例の場合の振動前後の圧力特性を測定したものである。振動試験は、温度が２０℃一定の環境条件において加速度４Ｇで、周波数３３Ｈｚの振動を２時間加えた。図３において、横軸はダイアフラムに加わる圧力、縦軸はＦＢＧの反射波長をとり、圧力測定用センサの圧力とＦＢＧ波長特性の関係を示したものである。
【００１４】
第１実施例では、外部から加わる圧力により、ダイアフラム１０ａが歪み，ダイアフラム１０ａ上に貼り付けられたＦＢＧ１５ａに上記歪みが加わると、伸び縮みがＦＢＧ１５ａに発生し、ＦＢＧ１５ａの反射特性が変化する。ＦＢＧ１５ａは、この反射特性に基づいたブラッグ波長の光を光ファイバ１５に反射しており、この光の反射波長を測定することにより、上記加わった圧力を求めることができる。
【００１５】
この結果、本実施例では、振動前後の圧力対ＦＢＧの反射波長の特性はほとんど変化なく、圧力０〜９．８×１０4ＰａでＦＢＧの反射波長は、１５４７．８７〜１５４８．３３ｎｍ変化する。波長変化量は、９．８×１０4Ｐａあたり０．４６ｎｍ変化しており、測定誤差の少ない測定が可能となった。このような結果が生じるのは、ボルト締めに起因した歪みを生じる力がフランジ１０ｃと台座１０ｂに吸収され、ダイアフラム１０ａに加わらなくなり、ＦＢＧの反射波長の特性が変化しないためと考えられる。
【００１６】
このように、本実施例では、ダイアフラムと一体形成された台座外縁にボトル固定用のつば部を設け、つば部とケースをボルトで固定することで、上記ダイアフラムをケースに取り付けるので、ボルトの締め付け状態、または振動等によって台座の取り付け状態が変化しても、ダイアフラムの変形を防いで信頼性の高い圧力測定を可能とする。
【００１７】
また、本実施例では、ダイアフラムを台座の中間部に一体形成させてくぼみをもたせたので、センサを組み立てる際に、ダイアフラムやＦＢＧに他の構成部品などがあたることがなくなり、上記ダイアフラムやＦＢＧの損傷が低減できる。
図４は、本発明に係る圧力測定用センサの構成の第２実施例を示す断面図である。なお、図４において第１実施例と同様の構成部分に関しては、説明の都合上、同一符号を付記する。
【００１８】
図において、本実施例と第１実施例との異なる点は、ダイアフラム１０ａを台座１０ｂの最上部に一体形成させた点である。
このように、本実施例では、ダイアフラムが台座の最上部に設けられるため、上記ダイアフラム表面と台座の最上部が構成する平面（ケース底の平面）が広くなり、このため光ファイバの曲げが緩和でき、また組立の作業性も向上できる。
【００１９】
本発明は、これら実施例に限定されるものではなく、本発明の要旨を逸脱しない範囲で種々の変形実施が可能である。例えば、つば部とケースとの間に緩衝用のラバーやワッシャーを用いることで、ボルト締めに起因した歪みを生じる力や振動等によって台座の取り付け状態が変化しても、さらにダイアフラムの変形を防ぐことができる。
【００２０】
【発明の効果】
以上説明したように、本発明の請求項１に係る圧力測定用センサは、受圧素子に歪み検出素子を固定し、該受圧素子の歪みを検出することにより、該受圧素子に加わる圧力を測定する圧力測定用センサにて、前記受圧素子と台座とが一体に形成され、かつ前記台座の縁部に設けられたつば部を有する受圧部と、前記受圧部と歪み検出素子を収納する収納部とからなり、前記受圧部は前記つば部を介してボルトにより前記収納部に固定されるので、ボルトの締め付け状態、または振動等によって台座の取り付け状態が変化しても、受圧素子の変形を防いで信頼性の高い圧力測定を可能とするとともに、歪み検出素子に熱影響を与えることなく受圧部と収納部とを固定することができる。また、温度変化に対応しつつ正確に圧力を検出することができる。また、本発明の請求項２に係る圧力測定用センサは、センサを組み立てる際に受圧素子や歪み検出素子の損傷を低減することができる。
【図面の簡単な説明】
【図１】本発明に係る圧力測定用センサの構成の第１実施例を示す断面図である。
【図２】本発明の歪み検出素子に歪みゲージを用いた場合の圧力とダイアフラムの歪みの関係を示す図である。
【図３】図１の圧力測定用センサにおける圧力とＦＢＧ波長特性の関係を示す図である。
【図４】本発明に係る圧力測定用センサの構成の第２実施例を示す断面図である。
【符号の説明】
１０ 受圧部
１０ａ ダイアフラム
１０ｂ 台座
１０ｃ フランジ
１１ ケース
１２ 上部金具
１３ 光ケーブル
１４，１７ ボルト
１５ 光ファイバ
１５ａ，１５ｂ ＦＢＧ
１６，１８ Ｏリング[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pressure measuring sensor that uses a strain detecting element and measures the pressure from the relationship between the pressure applied to the pressure receiving element and the strain.
[0002]
[Related background]
Conventionally, this type of sensor has a structure in which a strain detection element constituted by a strain gauge or the like is attached to a diaphragm which is a pressure receiving element. In the sensor described above, in order to improve the workability of the pasting, the diaphragm and the case are prepared separately, and after the strain detection element is fixed to the diaphragm, the diaphragm is fixed to the case. As the fixing method, for example, welding and bolts are conceivable. However, in the case of welding, the strain detection element fixed to the diaphragm is broken due to the influence of heat during welding. In general, the diaphragm is fixed to the case by the above method.
[0003]
In the case of fixing with the bolt, the sensor has a structure in which the diaphragm is fixed to the case at the pedestal portion with the bolt after the strain detecting element is attached on the diaphragm.
[0004]
[Problems to be solved by the invention]
However, the above-described sensor has a problem in that the distortion characteristics detected by deformation of the diaphragm are greatly different depending on the bolt fixing state, that is, the tightening state of the diaphragm base and the case with the bolt.
Further, the above-described sensor has a problem that when vibration or impact is applied and the bolt is loosened, the distortion of the diaphragm changes even when the same pressure is applied, resulting in a large error in the pressure measurement value.
[0005]
The present invention has been made in view of the above problems, and even if the mounting state of the pedestal changes due to the tightening state of the bolt or the vibration, the pressure receiving element is prevented from being deformed and the pressure can be measured with high reliability. An object is to provide a sensor for pressure measurement.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a pressure measuring sensor for measuring the pressure applied to the pressure receiving element by fixing a strain detecting element to the pressure receiving element and detecting the strain of the pressure receiving element. The element and the pedestal are integrally formed, and a collar portion is provided so as to extend from the outer edge of the pedestal on the same surface as the seating surface of the pedestal so as to form part of the bottom surface of the pressure receiving portion and the storage portion, While fixing the collar part to the storage part with a bolt , the strain detection element detects a strain due to pressure applied to the pressure receiving element, a pressure detection fiber Bragg grating, and a temperature compensation fiber Bragg grating that detects the temperature in the storage part, A pressure measurement sensor is provided (claim 1). In addition, a pressure measuring sensor formed so that the pressure receiving element is disposed at a position recessed from the upper surface of the pedestal is provided .
[0007]
That is, according to the pressure measuring sensor of the first aspect of the present invention, the diaphragm, which is the pressure receiving element, the pedestal, and the collar portion are integrally formed, and the collar portion is directly fixed to the case which is the housing portion with the bolt. By doing so, it is possible to fix the pressure receiving portion and the storage portion without causing a thermal effect on the strain detection element as in welding, and to prevent the diaphragm from being distorted by bolt fixing.
In addition, the pressure detection fiber Bragg grating enables measurement of pressure with little measurement error. Further, the temperature compensation fiber Bragg grating can eliminate the measurement error due to the temperature change, and can further reduce the measurement error.
Moreover, according to the pressure measuring sensor of the second aspect of the present invention, when the sensor is assembled, the pressure receiving element and the fiber Bragg grating are not exposed to other components such as the pressure receiving element and the fiber Bragg grating. Damage can be reduced .
[0008]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of a pressure measuring sensor according to the present invention will be described with reference to the drawings of FIGS.
FIG. 1 is a sectional view showing a first embodiment of the configuration of the pressure measuring sensor. In the figure, the pressure measuring sensor of the present embodiment is composed of a pressure receiving portion 10 of the present invention, a case 11 constituting the storage portion of the present invention, an upper metal fitting 12, and an optical cable 13 having a strain detecting element of the present invention. Become.
[0009]
The pressure receiving part 10 is comprised from the diaphragm 10a which comprises the pressure receiving element of this invention, the base 10b, and the flange 10c which comprises the collar part of this invention. The diaphragm 10a and the pedestal 10b are integrally formed of, for example, a single stainless steel plate, the plane is cylindrical, and the cross section is formed in an H shape. A flange 10c is integrally formed on the outer edge of the lower portion of the base 10b.
[0010]
The case 11 is configured in a hollow cylindrical shape. A flange 10 c of the pressure receiving unit 10 is fixed to the lower portion of the case 11 with a bolt 14, and the diaphragm 10 a and the base 10 b of the pressure receiving unit 10 are fitted into the case 11. By the way, the reason why the base 10b is not directly fixed to the case 11 is that when the base 10b is directly bolted, the diaphragm 10a provided at the center of the base 10b is distorted due to the tightened state of the bolt. It is for preventing. The space between the pressure receiving portion 10 and the case 11 is sealed with an O-ring 16 on the side surface of the base 10b. In the present invention, if a hole for passing the bolt 14 is made in the flange 10c and a bolt tap is opened in the case 11, the occurrence of distortion in the pressure receiving portion 10 can be further reduced.
[0011]
Further, the upper metal part 12 is fixed to the upper part of the case 11 with bolts 17, and the optical cable 13 is inserted into the center part of the upper metal part 13. Further, the case 11 and the upper metal fitting 13 are sealed with an O-ring 18 on the side surface of the upper metal fitting 13.
An optical fiber 15 is provided in the optical cable 13, and the optical fiber 15 is inserted from the upper metal fitting 12 into the case 11. The optical fiber 15 is formed with fiber Bragg gratings (hereinafter referred to as “FBG”) 15a and FBG 15b in a part of the light propagation direction, and the FBGs 15a and 15b transmit light transmitted from a light source (not shown). Among them, it has a function of reflecting light in a specific wavelength region called Bragg wavelength and transmitting light in other wavelength regions. The FBG 15a is a pressure detection FBG that constitutes the strain detection element of the present invention and detects pressure. For example, the FBG 15a is affixed to the center of the diaphragm 10a that is bent by pressure with an adhesive. Further, the FBG 15b is a temperature detecting FBG for detecting and compensating the temperature, and is attached with an adhesive in the lower part of the case 11 and in the circumferential direction so as not to receive a mechanical external force. Yes. The extra length of the optical fiber 15 is housed in the case 11. Further, as the strain detection element of the present invention, for example, a strain gauge that mechanically detects the strain of the diaphragm may be used.
[0012]
Next, FIG. 2 shows the relationship between the pressure and the distortion of the diaphragm by changing the torque of the bolt that fixes the diaphragm 10a and the case 11. In this experiment, a strain gauge was attached as a strain detection element at the center of the diaphragm of the pressure receiving portion according to the present invention, and the above measurement was performed.
In FIG. 2, in this experimental example, when the bolt is tightened with a torque of 20 km · cm, when the bolt is loosened 1/4 turn, when it is loosened 2/4 turn, when the bolt is loosened 3/4 turn, the diaphragm The distortion of was measured. As a result, in this embodiment, since the flange is provided on the outer edge of the base and is fixed to the case with the flange, it is not affected by the tightening state of the bolt, and in any tightening state, the pressure applied to the diaphragm is almost the same. It was confirmed that the same strain state can be measured by the pressure measuring sensor according to the present invention.
[0013]
FIG. 3 shows the measurement of pressure characteristics before and after vibration in the case of the first embodiment shown in FIG. In the vibration test, vibration with a frequency of 33 Hz and an acceleration of 4 G was applied for 2 hours under an environmental condition where the temperature was constant at 20 ° C. In FIG. 3, the horizontal axis represents the pressure applied to the diaphragm, and the vertical axis represents the reflection wavelength of the FBG. The relationship between the pressure of the pressure measuring sensor and the FBG wavelength characteristics is shown.
[0014]
In the first embodiment, the diaphragm 10a is distorted by the pressure applied from the outside, and when the above strain is applied to the FBG 15a attached on the diaphragm 10a, expansion / contraction occurs in the FBG 15a, and the reflection characteristics of the FBG 15a change. The FBG 15a reflects Bragg wavelength light based on this reflection characteristic to the optical fiber 15, and the applied pressure can be obtained by measuring the reflection wavelength of this light.
[0015]
As a result, in this example, the characteristics of the reflection wavelength of FBG before and after vibration hardly change, and the reflection wavelength of FBG varies from 1547.87 to 1548.33 nm at a pressure of 0 to 9.8 × 10 4 Pa. . The amount of change in wavelength changed by 0.46 nm per 9.8 × 10 4 Pa, and measurement with little measurement error became possible. The reason why such a result occurs is considered to be that a force that causes distortion due to bolting is absorbed by the flange 10c and the pedestal 10b and is not applied to the diaphragm 10a, and the reflected wavelength characteristics of the FBG do not change.
[0016]
As described above, in this embodiment, the flange for fixing the bottle is provided on the outer edge of the base integrally formed with the diaphragm, and the flange and the case are fixed with the bolt, so that the diaphragm is attached to the case. Even if the mounting state of the pedestal changes due to the state or vibration, the diaphragm can be prevented from being deformed and pressure measurement can be performed with high reliability.
[0017]
Further, in this embodiment, the diaphragm is integrally formed in the middle portion of the pedestal so as to have a recess, so that when the sensor is assembled, the diaphragm or FBG is not exposed to other components, and the diaphragm or FBG Damage can be reduced.
FIG. 4 is a sectional view showing a second embodiment of the configuration of the pressure measuring sensor according to the present invention. In FIG. 4, the same components as those in the first embodiment are denoted by the same reference numerals for convenience of explanation.
[0018]
In the figure, the difference between the present embodiment and the first embodiment is that the diaphragm 10a is integrally formed on the uppermost portion of the base 10b.
Thus, in this embodiment, since the diaphragm is provided at the top of the pedestal, the plane formed by the surface of the diaphragm and the top of the pedestal (the plane at the bottom of the case) is widened, which reduces the bending of the optical fiber. In addition, assembly workability can be improved.
[0019]
The present invention is not limited to these examples, and various modifications can be made without departing from the scope of the present invention. For example, by using a rubber or washer for cushioning between the collar and the case, even if the mounting state of the pedestal changes due to the force or vibration that causes distortion due to bolt tightening, further deformation of the diaphragm is prevented. be able to.
[0020]
【The invention's effect】
As described above, the pressure measuring sensor according to claim 1 of the present invention measures the pressure applied to the pressure receiving element by fixing the strain detecting element to the pressure receiving element and detecting the strain of the pressure receiving element. In the pressure measuring sensor, the pressure receiving element and the pedestal are integrally formed, and a pressure receiving part having a flange portion provided at an edge of the pedestal; a storage part for storing the pressure receiving part and the strain detection element; Since the pressure receiving portion is fixed to the storage portion by a bolt through the collar portion, the deformation of the pressure receiving element is prevented even if the mounting state of the pedestal changes due to the tightening state of the bolt or vibration. While enabling highly reliable pressure measurement, it is possible to fix the pressure receiving portion and the storage portion without affecting the strain detecting element. Further, it is possible to accurately detect the pressure while responding to the temperature change. The pressure measuring sensor according to claim 2 of the present invention can reduce damage to the pressure receiving element and the strain detecting element when the sensor is assembled .
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a first embodiment of a configuration of a pressure measuring sensor according to the present invention.
FIG. 2 is a diagram showing the relationship between pressure and diaphragm strain when a strain gauge is used in the strain sensing element of the present invention.
3 is a diagram showing the relationship between pressure and FBG wavelength characteristics in the pressure measurement sensor of FIG. 1; FIG.
FIG. 4 is a sectional view showing a second embodiment of the configuration of the pressure measuring sensor according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Pressure receiving part 10a Diaphragm 10b Base 10c Flange 11 Case 12 Upper metal fitting 13 Optical cable 14, 17 Bolt 15 Optical fiber 15a, 15b FBG
16,18 O-ring

Claims (2)

受圧素子に歪み検出素子を固定し、該受圧素子の歪みを検出することにより、該受圧素子に加わる圧力を測定する圧力測定用センサにて、
前記受圧素子と台座とが一体に形成され、かつ前記台座の外縁に設けられたつば部を有する受圧部と、
前記受圧部と歪み検出素子を収納する収納部とを備え、
前記つば部は前記台座の外縁から前記台座の座面と同一面上を延出して前記受圧部及び前記収納部全体の底面の一部を成すように設けられるとともに、
前記受圧部は前記つば部を介して前記収納部にボルトにより固定され、
前記歪み検出素子は、前記受圧素子に加わる圧力による歪みを検出する圧力検出用ファイバブラッググレーティングと、前記収納部内の温度を検出する温度補償用ファイバブラッググレーティングと、を含んで構成されることを特徴とする圧力測定用センサ。With a pressure measuring sensor that measures the pressure applied to the pressure receiving element by fixing the strain detecting element to the pressure receiving element and detecting the strain of the pressure receiving element,
A pressure receiving portion in which the pressure receiving element and the pedestal are integrally formed and having a collar portion provided on an outer edge of the pedestal ;
A pressure receiving portion and a storage portion for storing the strain detection element;
The collar portion is provided so as to extend from the outer edge of the pedestal on the same surface as the seating surface of the pedestal so as to form a part of the bottom surface of the pressure receiving portion and the entire storage portion,
The pressure receiving portion is fixed to the storage portion with a bolt through the collar portion,
The strain detecting element includes a pressure detecting fiber Bragg grating that detects strain due to pressure applied to the pressure receiving element, and a temperature compensating fiber Bragg grating that detects a temperature in the storage unit. Sensor for pressure measurement. 前記受圧素子は、前記台座の上面から窪んだ位置に配置されるように形成されることを特徴とする請求項１に記載の圧力測定用センサ。  The pressure measuring sensor according to claim 1, wherein the pressure receiving element is formed to be disposed at a position recessed from an upper surface of the pedestal.
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JPH0712937U (en) * 1993-07-28 1995-03-03 エヌオーケー株式会社 Structure of pressure sensor
JPH0821775A (en) * 1994-07-08 1996-01-23 Fuji Koki Seisakusho:Kk Pressure sensor

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JPH01299432A (en) * 1988-05-27 1989-12-04 Komatsu Ltd Thin-film pressure sensor
DE3919411A1 (en) * 1989-03-07 1990-12-20 Pfister Gmbh PRESSURE SENSOR AND RELATED PRODUCTION PROCESS
JP3571936B2 (en) * 1997-11-11 2004-09-29 古河電気工業株式会社 Pressure measuring device
JP3310207B2 (en) * 1997-11-20 2002-08-05 株式会社日立製作所 Immersion water level gauge

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JPH0637739U (en) * 1992-10-27 1994-05-20 エヌオーケー株式会社 Pressure sensor
JPH0712937U (en) * 1993-07-28 1995-03-03 エヌオーケー株式会社 Structure of pressure sensor
JPH0821775A (en) * 1994-07-08 1996-01-23 Fuji Koki Seisakusho:Kk Pressure sensor

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